CN103291751B - A kind of flexible hinge ultrasonic bearing - Google Patents
A kind of flexible hinge ultrasonic bearing Download PDFInfo
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- CN103291751B CN103291751B CN201310192309.0A CN201310192309A CN103291751B CN 103291751 B CN103291751 B CN 103291751B CN 201310192309 A CN201310192309 A CN 201310192309A CN 103291751 B CN103291751 B CN 103291751B
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- flexible hinge
- bearing
- ultrasonic bearing
- piezoelectric constant
- ultrasonic
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- 238000005461 lubrication Methods 0.000 abstract description 9
- 230000005540 biological transmission Effects 0.000 abstract description 4
- 238000001125 extrusion Methods 0.000 description 12
- 239000000725 suspension Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000008041 oiling agent Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
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- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
The invention provides a kind of flexible hinge ultrasonic bearing, described flexible hinge ultrasonic bearing is Fang Tizhuan, described flexible hinge ultrasonic bearing includes four faces extended along the longitudinal direction, these four faces described are formed with a piezoelectric constant slot respectively, described flexible hinge ultrasonic bearing is formed with the circular hole extended along the longitudinal direction, described four piezoelectric constant slots are surrounded on the surrounding of described circular hole, described flexible hinge ultrasonic bearing also includes 4 single circular arc flexible hinges and 12 bicircular arcs flexible hinges, described 4 single circular arc flexible hinges are formed along equally distributed 4 half slots of circular hole and circular hole, every 3 in described 12 bicircular arcs flexible hinges are evenly distributed on the perpendicular bisector of two single circular arc flexible hinge positions, flexible hinge ultrasonic bearing of the present invention can reduce the friction between body surface, generation heat is little, and can be applicable in the gas lubrication occasion of underloading, contactless transmission can be realized.
Description
Technical field:
The present invention relates to a kind of flexible hinge ultrasonic bearing, it is applied on gas extrusion suspension device, belongs to gas lubrication and contactless transmission field.
Background technique:
From mid-term in last century, Gas Bearing Technology obtains increasing concern, and it instead of traditional lubricant oils and fat as oiling agent with gas, have heating little, wear and tear little, pollution-free and almost without advantages such as frictions.Due to it, to have kinematic accuracy high, narrow and small gap can be kept, the feature that can work in the environment such as high/low temperature, radiation, magnetic field, corrosion, make gas bearing compared to fluid lubricated bearing, have more wide application prospect in fields such as precision and ultraprecise engineering, micro machining, hard disc drive, space technology, medical apparatus and nuclear engineerings.
Divide by the mechanism of lubrication, gas bearing can be divided into: hydrostatic lubrication type, hydrodynamic lubrication type and squeeze film lubricating type.Aerostatic bearing is also known as outside voltage supply bearing, and external air source equipment supply gas enters supported clearance through air passing hole, forms air film, with support load.Owing to will be equipped with a set of comparatively complicated air machinery, its application area is subject to a definite limitation.Dynamic pressure type be by supported body surface relatively supporting mass apparent motion time, the gas film pressure that produces at moving direction wedge gap carrys out load-supporting, does not need the stable pressure gas source continued.But its bearing capacity is little, rigidity is low, in starting and suspension of engineering work, there is contact wear between contact surface.These two kinds of bearings are widely used at present.Gas extrusion film bearing is that the transducer be made up of piezoelectric constant or magnetostriction materials produces dither along supporting surface Normal direction, the gas in gap is constantly squeezed, forms the air film with pressure, produce bearing capacity.The advantages such as it is simple, compact that gas extrusion film lubrication has structure, easy adjustment, but its bearing capacity is lower, installs more complicated.From the sixties in last century, abroad someone carries out the research of gas extrusion film theory and experiment.Along with the improvement of the character of piezoceramic material, the bearing capacity of gas extrusion film is greatly improved, and gas extrusion film lubrication have also been obtained Chinese scholars and more and more pays close attention to.But because the method carried by gas extrusion film is at present still immature, gas extrusion film lubrication is still in laboratory stage, and engineering is not still applied.
Summary of the invention:
The invention provides a kind of flexible hinge ultrasonic bearing, this flexible hinge ultrasonic bearing can reduce the friction between body surface, produces heat little, and can be applicable to, in the gas lubrication occasion of underloading, realize contactless transmission.
The present invention adopts following technological scheme: a kind of flexible hinge ultrasonic bearing, described flexible hinge ultrasonic bearing is Fang Tizhuan, described flexible hinge ultrasonic bearing includes four faces extended along the longitudinal direction, these four faces described are formed with a piezoelectric constant slot respectively, described flexible hinge ultrasonic bearing is formed with the circular hole extended along the longitudinal direction, described four piezoelectric constant slots are surrounded on the surrounding of described circular hole, described flexible hinge ultrasonic bearing also includes 4 single circular arc flexible hinges and 12 bicircular arcs flexible hinges, described 4 single circular arc flexible hinges are formed along equally distributed 4 half slots of circular hole and circular hole, every 3 in described 12 bicircular arcs flexible hinges are evenly distributed on the perpendicular bisector of two single circular arc flexible hinge positions, described flexible hinge ultrasonic bearing also includes the guide rail with the annular opening contacts of described flexible hinge ultrasonic bearing, described flexible hinge ultrasonic bearing by described circular hole and described guide rail contact to be supported, described flexible hinge ultrasonic bearing also includes the piezoelectric constant be arranged in described piezoelectric constant slot, the quantity of described piezoelectric constant is 8, the length of described 8 piezoelectric constant, width and thickness are all identical, and be transverse vibration, described 8 piezoelectric constant are arranged in described piezoelectric constant slot uniformly, described piezoelectric constant and bearing adopt Bond to paste.
Described flexible hinge ultrasonic bearing is the square body of 50mm × 50mm × 30mm.
Described flexible hinge ultrasonic bearing and guide rail are that small―gap suture assembles.
The present invention has following beneficial effect:
(1) support to reduce the friction between body surface with air film, produce heat little;
(2) relative to aerostatic bearing, flexible hinge ultrasonic bearing of the present invention does not need external air source;
(3) relative to aero dynamic bearing, flexible hinge ultrasonic bearing of the present invention does not need high speed rotating;
(4) relative to some other squeeze film bearing, flexible hinge ultrasonic bearing of the present invention has flexible hinge and can work on circular guideway; Contactless transmission can be realized.
Accompanying drawing illustrates:
The perspective view of Fig. 1 flexible hinge ultrasonic bearing of the present invention.
Fig. 2 is the front elevational schematic of Fig. 1.
Fig. 3 is that schematic diagram is looked on a left side of Fig. 1.
Fig. 4 is the two-dimensional representation of the single circular arc flexible hinge in flexible hinge ultrasonic bearing of the present invention.
Fig. 5 is the two-dimensional representation of the bicircular arcs flexible hinge in flexible hinge ultrasonic bearing of the present invention.
Fig. 6 is the assembling schematic diagram of flexible hinge ultrasonic bearing of the present invention.
Fig. 7 is gas extrusion film schematic diagram.
Fig. 8 is the Mode Shape figure under two different frequencies.
Wherein:
1-piezoelectric constant slot; 2-circular hole; The mono-circular arc flexible hinge of 3-; 4-bicircular arcs flexible hinge; 5-piezoelectric constant; 6-guide rail; 7-exciting plate; 8-suspension board.
Embodiment:
Please refer to shown in Fig. 1 to Fig. 6, flexible hinge ultrasonic bearing of the present invention comprises: 4 piezoelectric constant slots, 1, circular hole, 2,4 single circular arc flexible hinges 3 and 12 bicircular arcs flexible hinges 4.Flexible hinge ultrasonic bearing of the present invention is Fang Tizhuan, flexible hinge ultrasonic bearing includes four faces extended along the longitudinal direction, 4 piezoelectric constant slots 1 are formed on these four faces respectively, circular hole 2 extends along the longitudinal direction, four piezoelectric constant slots 1 are surrounded on the surrounding of circular hole 2, wherein 4 single circular arc flexible hinges are formed along the half slot of equally distributed 4 diameter of phi 3 of circular hole and circular hole, and 12 every 3 of bicircular arcs flexible hinges are evenly distributed on the perpendicular bisector of two single circular arc flexible hinge positions.
Wherein the walled thickness of flexible hinge is 0.667 with radius of arc ratio.Bearing interface is the square of a 50mm × 50mm, and length is 30mm.The effect of flexible hinge is mainly reflected in: the power that (1) makes piezoelectric constant 5 produce acts on bearing uniformly; (2) amplitude of piezoelectric constant 5 is amplified.Piezoelectric constant 5 is vibrated the amplitude produced and is amplified by flexible hinge, and flexible hinge ultrasonic bearing contacts to be supported by the circular hole of diameter of phi 30 with guide rail 6.8 piezoelectric constant are arranged in four slots of flexible hinge ultrasonic bearing uniformly, and each slot is uniformly distributed two piezoelectric constant, and piezoelectric constant and bearing adopt Bond to paste.Bearing and guide rail 6 assemble for small―gap suture, and guide rail 6 two ends are fixed on a heavier base, to reach damping effect.
The present invention adopts monolithic telescopic type PZT-5 piezoelectric constant, and relative to piezoelectric pile, monolithic piezoelectric ceramic can reduce power consumption.The order of magnitude due to the gas gap of squeeze film is generally micron order (10
-6m) even nanometer (10
-9m), therefore flexible hinge ultrasonic bearing and the surface of contact of guide rail contact and the processing request of guide rail surface higher, need fine grinding.
Piezoelectric constant 5 is driven to need high signal source.Usually choose general analogue signal, obtained the high-frequency signal (ultrasonic signal) needed by power amplifier, the high-frequency signal obtained as far as possible close to the resonant frequency of piezoelectric constant and squeeze film bearing, to obtain larger amplitude.The high frequency sinusoidal voltage signal obtained is applied to the two poles of the earth of piezoelectric constant, under high-frequency signal effect, piezoelectric constant produces transverse vibration, bearing is impelled to produce distortion, make air film in gap continue to extrude, obtain a persistency higher than atmospheric gas pressure, namely produce bearing capacity.The amplitude of vibration is amplified by flexible hinge; Amplitude becomes large, and bearing capacity also becomes large.Be freely suspend during bearing working, therefore, the generation of bearing capacity is mainly produced by the air film extruding on bearing top.When bearing stable suspersion, air-film thickness also reaches steady state.When suspension quality hour, the hoverheight under steady state is large; On the contrary, when suspended load discharge is large, the hoverheight under steady state is little.
Please refer to Fig. 1 to Fig. 6 and composition graphs 7 to Fig. 8, shown in Fig. 7 is gas extrusion film fundamental diagram, applies a high frequency sinusoidal signal and drives exciting plate 7 to vibrate, the gas in the vibration-extrusion gap of exciting plate 7 to exciting plate 7, pressure is constantly changed, the suspending power supporting suspension board 8 of generation.The size of bearing capacity is relevant with factors such as excited frequency, exciting amplitude, air-film thickness and physical dimensions.
The bearing capacity of gas extrusion film is by supporting mass and is determined by the gas pressure in supporting mass gap, and the gas pressure in exciting process can be obtained by the Gas Reynold's equation solving band extruding item.
In the present invention, the form of Gas Reynold's equation is:
The distribution that numerical solution can obtain the pressure of air film is carried out to above formula.
During squeeze film work, choosing of excited frequency is very important, when excited frequency is in the scope that people can hear, easily produce noise, and bearing capacity is lower; When excited frequency is too large, although can produce larger bearing capacity, require high to the fatigue characteristic of material, correlative charges is higher.Consider general excited frequency and get 20k-80kHz.The Mode Shape figure that Fig. 8 is flexible hinge ultrasonic bearing natural frequency when being f=21248Hz and f=52130Hz, in above-mentioned given frequency range, these two Mode Shape are more satisfactory.Can be found out clearly by Fig. 8, the distortion of f=52130Hz is larger.
The above is only the preferred embodiment of the present invention, it should be pointed out that for those skilled in the art, can also make some improvement under the premise without departing from the principles of the invention, and these improvement also should be considered as protection scope of the present invention.
Claims (3)
1. a flexible hinge ultrasonic bearing, it is characterized in that: described flexible hinge ultrasonic bearing is Fang Tizhuan, described flexible hinge ultrasonic bearing includes four faces extended along the longitudinal direction, these four faces described are formed with a piezoelectric constant slot respectively, described flexible hinge ultrasonic bearing is formed with the circular hole extended along the longitudinal direction, described four piezoelectric constant slots are surrounded on the surrounding of described circular hole, described flexible hinge ultrasonic bearing also includes 4 single circular arc flexible hinges and 12 bicircular arcs flexible hinges, described 4 single circular arc flexible hinges are formed along equally distributed 4 half slots of circular hole and circular hole, every 3 in described 12 bicircular arcs flexible hinges are evenly distributed on the perpendicular bisector of two single circular arc flexible hinge positions, described flexible hinge ultrasonic bearing also includes the guide rail with the annular opening contacts of described flexible hinge ultrasonic bearing, described flexible hinge ultrasonic bearing by described circular hole and described guide rail contact to be supported, described flexible hinge ultrasonic bearing also includes the piezoelectric constant be arranged in described piezoelectric constant slot, the quantity of described piezoelectric constant is 8, the length of described 8 piezoelectric constant, width and thickness are all identical, and be transverse vibration, described 8 piezoelectric constant are arranged in described piezoelectric constant slot uniformly, described piezoelectric constant and bearing adopt Bond to paste.
2. flexible hinge ultrasonic bearing as claimed in claim 1, is characterized in that: described flexible hinge ultrasonic bearing is the square body of 50mm × 50mm × 30mm.
3. flexible hinge ultrasonic bearing as claimed in claim 1, is characterized in that: described flexible hinge ultrasonic bearing and guide rail are that small―gap suture assembles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310192309.0A CN103291751B (en) | 2013-05-23 | 2013-05-23 | A kind of flexible hinge ultrasonic bearing |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310192309.0A CN103291751B (en) | 2013-05-23 | 2013-05-23 | A kind of flexible hinge ultrasonic bearing |
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| Publication Number | Publication Date |
|---|---|
| CN103291751A CN103291751A (en) | 2013-09-11 |
| CN103291751B true CN103291751B (en) | 2015-11-18 |
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|---|---|---|---|
| CN201310192309.0A Expired - Fee Related CN103291751B (en) | 2013-05-23 | 2013-05-23 | A kind of flexible hinge ultrasonic bearing |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05131331A (en) * | 1991-11-07 | 1993-05-28 | Hitachi Ltd | Sliding guide device and table device employing the same sliding guide device |
| CN102594221A (en) * | 2012-02-22 | 2012-07-18 | 南京航空航天大学 | Gas extrusion suspension device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2754577B1 (en) * | 1996-10-11 | 1998-12-11 | Suisse Electronique Microtech | PLANAR FLEXIBLE PIVOT WITH MONOLITHIC UNIT MODULES |
-
2013
- 2013-05-23 CN CN201310192309.0A patent/CN103291751B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05131331A (en) * | 1991-11-07 | 1993-05-28 | Hitachi Ltd | Sliding guide device and table device employing the same sliding guide device |
| CN102594221A (en) * | 2012-02-22 | 2012-07-18 | 南京航空航天大学 | Gas extrusion suspension device |
Non-Patent Citations (1)
| Title |
|---|
| Self-levitating sliding air contact;T.A.Stolarski,Wei Chai;《International Journal of Mechanical Sciences》;20061231;第601页至第620页，附图1－5 * |
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| CN103291751A (en) | 2013-09-11 |
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Granted publication date: 20151118 Termination date: 20210523 |