CN103273581A

CN103273581A - Silicon tandem cutting-off device

Info

Publication number: CN103273581A
Application number: CN2013102554093A
Authority: CN
Inventors: 吴晓华; 刘顺谦
Original assignee: NANTONG GAOXIN ELECTRONICS CO Ltd
Current assignee: NANTONG GAOXIN ELECTRONICS CO Ltd
Priority date: 2013-06-25
Filing date: 2013-06-25
Publication date: 2013-09-04

Abstract

The invention discloses a silicon tandem cutting machining device in the field of semiconductor production and provides a silicon tandem cutting-off device. The silicon tandem cutting-off device comprises a metal wire reciprocating swing mechanism, a pressurizing device, a novel metal wire conveying mechanism, a tension adjusting device, a warning mechanism and a motor control circuit. The silicon tandem cutting-off device is characterized in that the metal wire reciprocating swing mechanism consists of a main drive motor, three multiple-groove pulley wheels, a reversing switch and cutting metal wires. The main drive motor is an alternating current servo motor, the reversing switch is a proximity switch, the novel metal wire conveying mechanism is connected with a conveying pulley wheel through a wire unwinding motor and a speed reducer and gradually supplies a small amount of novel metal wires, used metal wires are reeled and wound on a wire winding tube through a wire winding motor, and the tension adjusting device ensures certain tension force for winding the metal wires through a tension motor. Compared with the prior art, the silicon tandem cutting-off device has the advantages of being reliable in work, low in maintenance requirement, high in speed and efficiency, strong in overload resisting capacity, few in material consumption and high in accuracy, improving the pass percent of products and the like.

Description

Silicon is folded shearing device

Technical field

The silicon in semiconductor production field is folded cutting processing machinery, and a kind of silicon is folded shearing device.

Background technology

In semiconductor production processing, need by the folded cutting machine of silicon the folded silicon particle that cuts into of silicon, cutting machine is exactly to utilize the rotating of AC servo motor and moving up and down of seesaw-type link rod, make wire carry out back and forth movement repeatedly as dragsaw, drive that the suspension abrasive particle comes cutting hard and the machine of crisp object.My company utilizes cutting machine that the folded silicon particle that is cut into of silicon is used for next procedure.

The current direct current transistor of the used most employing of the folded shearing device of silicon is both at home and abroad recommended the control system of the way of output, power is the special brush direct current generator that has, control circuit board is that discrete component welding finishes, reversing switch adopts the contact travel switch, this system has the cost height, the fault rate height, life-span is short, shortcomings such as maintenance cost height and maintenance cycle are long, brush DC servo motor maintaining inconvenience is arranged, need often to change carbon brush, otherwise easily loose contact, even produce electric arc and burn out motor, and shortcomings such as motor is difficult for having bought and price high and the processing customization cycle is long.

Summary of the invention

The objective of the invention is to overcome the deficiencies in the prior art, solve shortcomings such as the folded shearing device fault rate height of silicon, life-span weak point, accessory and maintenance cost height, a kind of folded shearing device of silicon that adopts the AC servo motor of brushless and commutator is provided.

The present invention is achieved by the following technical solutions:

A kind of silicon is folded shearing device, comprise wire reciprocally swinging mechanism, pressue device, new feeding of metal wire mechanism, tension-adjusting gear, alarm mechanism and circuit for controlling motor, it is characterized in that: wire reciprocally swinging mechanism is by driving main motor, three multiple-grooved pulleys, reversing switch and cutting metal wire are formed, drive main motor and adopt AC servo motor, AC servo motor brushless and commutator, reliable operation, require low to maintaining, reversing switch is near switch, the probability that overshoot takes place has lacked, thereby reduced broken string, new feeding of metal wire mechanism is linked to each other with carrying pulley by reduction box by the unwrapping wire motor, supply with new wire one by one on a small quantity by new feeding of metal wire mechanism. used wire batches by the take-up motor and is wound on the bobbin, and tension-adjusting gear keeps wire to have certain force of strain to reel by tension motor; Tension motor is for deciding torque motor; Alarm mechanism comprises main shaft overload-alarm and break alarm; The line of cut group of the certain intervals width that the cutting metal wire of wire reciprocally swinging mechanism is made up of several finer wires, finer wire diameter 0.115-0.12mm, interval width are 0.77-2.07mm; Drive main motor and realize stepless time adjustment with the velocity simulate voltage of potentiometer control.

The present invention compared with prior art has following beneficial effect:

1. reliable operation requires low to maintaining;

2. the fast efficient height of speed;

3. the strong material consumption of anti-overload ability is few;

4. precision height has improved the qualification rate of product.

Description of drawings

Fig. 1 is the folded shearing device structure principle chart of silicon;

Fig. 2 is the folded shearing device electrical schematic diagram of silicon.

Among the figure: drive main motor 1, unwrapping wire motor 2, tension motor 3, C1 multiple-grooved pulley 4-1, C2 multiple-grooved pulley 4-2 and C3 multiple-grooved pulley 4-3.

The specific embodiment

Below in conjunction with accompanying drawing content of the present invention is further described:

Be illustrated in figure 1 as the folded shearing device structure principle chart of silicon

Wire is wound on three multiple-grooved pulley C1 multiple-grooved pulley 4-1, C2 multiple-grooved pulley 4-2 and the C3 multiple-grooved pulley 4-3 from the front, by rotating, wire 1 spacing of when C2 multiple-grooved pulley moves to C3 multiple-grooved pulley, just advancing, like this, just with helical coil on pulley. multiple-grooved pulley C3 multiple-grooved pulley and drives main motor 1 and directly is connected; C1 multiple-grooved pulley, C2 multiple-grooved pulley become follow-up pulley.

At first, reciprocating motion wiry is described:

Move in the direction of the clock if drive main motor 1, then wire moves to C2 multiple-grooved pulley from C1 multiple-grooved pulley together. and therefore, the wire on right side is involved in by C1 multiple-grooved pulley, and the wire in left side is then emitted from C2 multiple-grooved pulley; So the seesaw-type link rod moves in the direction of the clock., the cam that is installed in seesaw-type link rod back makes near switch motion, make the electric power polarity that drives main motor 1 reverse, therefore, driving main motor 1 reverses. and when cam makes when moving again near switch, mainly drive main motor 1 and reverse again. wire just moves back and forth repeatedly like this.

Pressurization: the silicon that is fixed on the erecting bed is folded, relies on the load weight, overlays on wire with certain pressure. and the adjustment of load is regulated by the counterweight in control panel left side.

New feeding of metal wire: unwrapping wire motor 2 links to each other with carrying pulley by reduction box. and rely on this mechanism can supply with new wire one by one on a small quantity. used wire batches by tension motor M1 (take-up motor) and is wound on the bobbin.

Tension force: on one side tension motor 3 remain wire certain force of strain arranged as deciding torque motor, Yi Bian reel.

Report to the police: wire broken string back is connected in the cam while secund at the seesaw back side because the pulling of take-up motor makes the seesaw secund, and following warning disconnects near switch, and alarm relay disconnects, and alarm lamp is bright, and all motors stop.

Claims

1. a silicon is folded shearing device, comprise wire reciprocally swinging mechanism, pressue device, new wire conveying mechanism, tension-adjusting gear, alarm mechanism and circuit for controlling motor, it is characterized in that: wire reciprocally swinging mechanism is by driving main motor, three multiple-grooved pulleys, reversing switch and cutting metal wire are formed, drive main motor and adopt AC servo motor, reversing switch is near switch, new wire conveying mechanism is linked to each other with carrying pulley by reduction box by the unwrapping wire motor, supply with new wire one by one on a small quantity by new feeding of metal wire mechanism. used wire batches by the take-up motor, be wound on the bobbin, tension-adjusting gear keeps wire to have certain force of strain to reel by tension motor.

2. silicon according to claim 1 is folded shearing device, it is characterized in that: tension motor is for deciding torque motor.

3. silicon according to claim 1 is folded shearing device, and it is characterized in that: alarm mechanism comprises main shaft overload-alarm and break alarm.

4. silicon according to claim 1 is folded shearing device, it is characterized in that: the line of cut group of the certain intervals width that the cutting metal wire of wire reciprocally swinging mechanism is made up of several finer wires, finer wire diameter 0.115-0.12mm, interval width are 0.77-2.07mm.

5. the folded shearing device of silicon according to claim 1 is characterized in that: drive main motor and realize stepless time adjustment with the velocity simulate voltage of potentiometer control.