CN103257635B - A kind of Experimental Control System of auxiliary process flow process and method - Google Patents

A kind of Experimental Control System of auxiliary process flow process and method Download PDF

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Publication number
CN103257635B
CN103257635B CN201310122196.7A CN201310122196A CN103257635B CN 103257635 B CN103257635 B CN 103257635B CN 201310122196 A CN201310122196 A CN 201310122196A CN 103257635 B CN103257635 B CN 103257635B
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experiment
main flow
repeatedly
batch
module
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CN103257635A (en
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朱燕萍
娄晓祺
俞晓菁
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Shanghai Huali Microelectronics Corp
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Shanghai Huali Microelectronics Corp
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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Abstract

The invention discloses a kind of Experimental Control System and method of auxiliary process flow process, the method comprises the steps: to preset all experiment conditions in an experimental design; The beginning website of definition main flow and end website, and perform the main flow of this experiment; According to the experiment condition preset, the pilot process in main flow utilizes virtual site to connect, and carries out repeatedly batch experiment to the experiment condition that each is preset; Successively the result of repeatedly batch experiment is merged, by the present invention, all batch experiments can be completed in once experiment, decrease the switching frequency of built-in unit, while the process controllability on not effect string, considerably increase the efficiency of experiment.

Description

A kind of Experimental Control System of auxiliary process flow process and method
Technical field
The present invention, about a kind of Experimental Control System and method, particularly relates to a kind of Experimental Control System and method of auxiliary process flow process.
Background technology
In art production process, the condition constantly changing adjusting process flow process is often needed to verify the reliability of processing procedure.Current, if when needing to technological process the experiment doing different condition, often can only of main flow stage do once go experiment in batches, if when needing to do multiple experiment, multiple experimental design must be offered, after an experiment completes and gets back to main flow, restart batch experiment again, have repetitive operation many times like this, considerably increase the switching frequency of equipment, the technology controlling and process on effect string.
Summary of the invention
For overcoming the deficiency that above-mentioned prior art exists, the object of the present invention is the Experimental Control System and the method that provide a kind of auxiliary process flow process, by all experiment conditions all being designed in an experimental design, do repeatedly do experiment in batches, achieve and complete all batch experiments in once testing, decrease the switching frequency of built-in unit, while the process controllability on not effect string, considerably increase the efficiency of experiment.
For reaching above-mentioned and other object, the present invention proposes a kind of Experimental Control System of auxiliary process flow process, at least comprises:
Preset module, for presetting all experiment conditions in an experimental design;
Main flow performs module, for defining the beginning website of main flow and terminating website, and performs the main flow of this experiment;
Repeatedly batch experiment module, according to the experiment condition preset, the pilot process in main flow utilizes virtual site to connect, and carries out batch experiment to the experiment condition that each is preset; And
Merge module, for merging the result of repeatedly batch experiment successively.
Further, this repeatedly batch experiment module main flow pilot process support repeatedly in batches, this merging module is to the result support merging repeatedly of repeatedly batch experiment.
Further, this repeatedly batch experiment module can the doing over again of experimental result work part.
For reaching above-mentioned and other object, the present invention also provides a kind of experiment control method of auxiliary process flow process, comprises the steps:
Step one, presets all experiment conditions in an experimental design;
Step 2, the beginning website of definition main flow and end website, and perform the main flow of this experiment;
Step 3, according to the experiment condition preset, the pilot process in main flow utilizes virtual site to connect, and carries out repeatedly batch experiment to the experiment condition that each is preset;
Step 4, merges the result of repeatedly batch experiment successively.
Further, in step 3, can doing over again according to result work part.
Further, in step 3, in each batch experiment, can be set to critical support certain experiment allowed time.
Further, in step one, the bound of redefinable metric data and standard specification.
Compared with prior art, the Experimental Control System of a kind of auxiliary process flow process of the present invention and method are by presetting the experiment of different condition, in an experimental design, all experiment conditions are all designed into, do repeatedly do experiment in batches, be not required to be each condition of checking and offer an experimental design, all batch experiments can be completed in once testing, decrease the switching frequency of built-in unit, also the process controllability on line can not be had influence on, considerably increase the efficiency of experiment, and the present invention can in an experiment experimentally result carry out part doing over again, certain allowed time can be set to crucial processing procedure in an experiment simultaneously, and can independent of the Data Collection specification in database according to the requirement of process conditions in experimental design, bound and the standard specification of its metric data can be redefined separately, the present invention's control method realized in an experimental design repeatedly deciliter is different from main flow and can be self-existent, contribute to the management and control of technique on line.
Accompanying drawing explanation
Fig. 1 is the system architecture diagram of the Experimental Control System of a kind of auxiliary process flow process of the present invention;
Fig. 2 is the flow chart of steps of the experiment control method of a kind of auxiliary process flow process of the present invention;
Fig. 3 is the schematic flow sheet of the preferred embodiment of the experiment control method of a kind of auxiliary process flow process of the present invention.
Embodiment
Below by way of specific instantiation and accompanying drawings embodiments of the present invention, those skilled in the art can understand other advantage of the present invention and effect easily by content disclosed in the present specification.The present invention is also implemented by other different instantiation or is applied, and the every details in this instructions also can based on different viewpoints and application, carries out various modification and change not deviating under spirit of the present invention.
Fig. 1 is the system architecture diagram of the Experimental Control System of a kind of auxiliary process flow process of the present invention.As shown in Figure 1, the Experimental Control System of a kind of auxiliary process flow process of the present invention, at least comprises: preset module 101, main flow performs module 102, repeatedly batch experiment module 103 and merge module 104.
Wherein, module 101 is preset for presetting all experiment conditions in an experimental design; Main flow performs module 102 for defining the beginning website of main flow and terminating website, and performs the main flow of this experiment; Repeatedly batch experiment module 101 is according to the experiment condition preset, and the pilot process in main flow utilizes virtual site to connect, and carries out repeatedly batch experiment to the experiment condition that each is preset; Merge module 104, for merging the result of repeatedly batch experiment successively.
Visible, the experiment of the present invention from after pilot process do not use the website of main flow, directly connect with virtual site, experimental design only define one start website and one terminate website, support hereinto repeatedly in batches and merge, be arranged in this time total experimental design need the verification condition done, can independent design flow process, and the present invention can do doing over again of part according to result, as slip-stick artist find wherein certain batch experiment experimental result error larger time, can do over again to this batch of experiment, the present invention simultaneously also can arrange certain experiment allowed time to critical support in an experiment, and can according to the requirement of process conditions independent of the Data Collection specification in database in experimental design, bound and the standard specification of its metric data can be redefined separately.The Experimental Control System of the present invention realizes repeatedly deciliter can being different from main flow and can be self-existent in an experimental design, also contributes to the technique management and control on line.
Fig. 2 is the flow chart of steps of the experiment control method of a kind of auxiliary process flow process of the present invention.As shown in Figure 2, the experiment control method of a kind of auxiliary process flow process of the present invention, comprises the steps:
Step 201, presets all experiment conditions in an experimental design;
Step 202, the beginning website of definition main flow and end website, and perform the main flow of this experiment;
Step 203, according to the experiment condition preset, the pilot process in main flow utilizes virtual site to connect, and carries out repeatedly batch experiment to the experiment condition that each is preset; And
Step 204, merges the result of repeatedly batch experiment successively.
Fig. 3 is the schematic flow sheet of the preferred embodiment of the experiment control method of a kind of auxiliary process flow process of the present invention.Below cooperation figure is specifically described the present invention by a preferred embodiment.Main flow is MainFlow, batch experiment flow process is Runcard, comprise RCMainFlow and RCeachsplitflow, RCMainFlow is the main flow of batch experiment flow process (Runcard), determine beginning/merging (start/merge) website of batch experiment (Runcard), determine that Lotsplit/merge (needs in batches different several times) several times; RCeachsplitflow is after certain split, and divide several batches, the flow of each batch of run, this splitflow need hang over above RCMain.
In present pre-ferred embodiments, the executive mode of the experiment control of the present invention:
1. SplitbyRC: after performing an action, Lot (batch) enters RuncardMainflow
2. SplitbyRC:Lot (batch) automatically by setting Group in batches, enters runcardsplitflow (Branch).
3. NoAction:Lot (batch) waits for Groupflow operation in runcard
4. NoAction:Lot (batch) operation complete wait Merge
5. MergebyRC: after performing an action, Lot (batch) gets back to RuncardMain
6. SplitbyRC:Lot (batch) sets Group in batches by the 2nd loop automatically, and in batches, lot enters respective runcardsplitflow again
7. NoAction:Lot (batch) waits for Groupflow operation in runcard
8. NoAction:Lot (batch) operation complete wait Merge
9. mergebyruncard: after performing an action, lot (batch) directly gets back to main lot (batch), jumps out runcard.
10. NoAction:Lot (batch) preparation work merge website in main flow.
Visible, the Experimental Control System of a kind of auxiliary process flow process of the present invention and method are by presetting the experiment of different condition, in an experimental design, all experiment conditions are all designed into, do repeatedly do experiment in batches, do not need for verifying that each condition offers an experimental design, all batch experiments can be completed in once testing, decrease the switching frequency of built-in unit, also the process controllability on line can not be had influence on, considerably increase the efficiency of experiment, and experimentally result carries out doing over again of part in an experiment, certain allowed time can be set to crucial processing procedure in an experiment simultaneously, and can independent of the Data Collection specification in database according to the requirement of process conditions in experimental design, bound and the standard specification of its metric data can be redefined separately.This control method realizing repeatedly deciliter in an experimental design is different from main flow and can be self-existent, so also contributes to the management and control of technique on line.
Above-described embodiment is illustrative principle of the present invention and effect thereof only, but not for limiting the present invention.Any those skilled in the art all without prejudice under spirit of the present invention and category, can carry out modifying to above-described embodiment and change.Therefore, the scope of the present invention, should listed by claims.

Claims (6)

1. an Experimental Control System for auxiliary process flow process, at least comprises:
Preset module, for presetting all experiment conditions in an experimental design;
Main flow performs module, for defining the beginning website of main flow and terminating website, and performs the main flow of this experiment;
Repeatedly batch experiment module, according to the experiment condition preset, the pilot process in main flow utilizes virtual site to connect, and carries out batch experiment to the experiment condition preset; And
Merge module, for merging the result of repeatedly batch experiment successively;
Wherein, this repeatedly batch experiment module main flow pilot process support repeatedly in batches, this merging module is to the result support merging repeatedly of repeatedly batch experiment.
2. the Experimental Control System of a kind of auxiliary process flow process as claimed in claim 1, is characterized in that: repeatedly batch experiment module can the doing over again of experimental result work part for this.
3. an experiment control method for auxiliary process flow process, comprises the steps:
Step one, presets all experiment conditions in an experimental design;
Step 2, the beginning website of definition main flow and end website, and perform the main flow of this experiment;
Step 3, according to the experiment condition preset, the pilot process in main flow utilizes virtual site to connect, and carries out repeatedly batch experiment to the experiment condition that each is preset;
Step 4, merges the result of repeatedly batch experiment successively.
4. the experiment control method of a kind of auxiliary process flow process as claimed in claim 3, is characterized in that: in step 3, can doing over again according to result work part.
5. the experiment control method of a kind of auxiliary process flow process as claimed in claim 3, is characterized in that: in step 3, can arrange certain experiment allowed time in each batch experiment to critical support.
6. the experiment control method of a kind of auxiliary process flow process as claimed in claim 3, is characterized in that: in step one, the bound of redefinable metric data and standard specification.
CN201310122196.7A 2013-04-09 2013-04-09 A kind of Experimental Control System of auxiliary process flow process and method Active CN103257635B (en)

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CN106776911B (en) * 2016-11-30 2020-04-10 上海华力微电子有限公司 Method and system for optimizing lot exception handling caused by WAT machine alarm

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101093586A (en) * 2007-07-12 2007-12-26 上海交通大学 Parallel collision detection method of real time interactive operation oriented to complex scene
CN101944153A (en) * 2010-10-19 2011-01-12 上海海事大学 Component-based container terminal three-dimensional simulation method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101093586A (en) * 2007-07-12 2007-12-26 上海交通大学 Parallel collision detection method of real time interactive operation oriented to complex scene
CN101944153A (en) * 2010-10-19 2011-01-12 上海海事大学 Component-based container terminal three-dimensional simulation method

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