CN103246366A - Dynamic offset calibration - Google Patents
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- CN103246366A CN103246366A CN2013100497749A CN201310049774A CN103246366A CN 103246366 A CN103246366 A CN 103246366A CN 2013100497749 A CN2013100497749 A CN 2013100497749A CN 201310049774 A CN201310049774 A CN 201310049774A CN 103246366 A CN103246366 A CN 103246366A
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- 238000000034 method Methods 0.000 claims abstract description 33
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- 238000012937 correction Methods 0.000 claims abstract description 3
- 230000003068 static effect Effects 0.000 claims description 19
- 230000009471 action Effects 0.000 claims description 4
- 230000001133 acceleration Effects 0.000 abstract description 22
- 238000005259 measurement Methods 0.000 abstract description 12
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Abstract
The invention relates to a dynamic offset calibration. A hand-held processor system for processing data from an integrated MEMS device disposed within a hand-held computer system and method. A dynamic offset correction (DOC) process computes 3-axis accelerometer biases without needing to know the orientation of the device. Arbitrary output biases can be corrected to ensure consistent performance. A system of linear equations is formed using basic observations of gravity measurements by an acceleration measuring device, conditioned upon constraints in data quality, degree of sensed motion, duration, and time separation. This system of equations is modified and solved when appropriate geometric diversity conditions are met.
Description
The cross reference of related application
The application requires the right of priority of following pending application application and its full content is incorporated into for your guidance: the U.S. Provisional Patent Application of submitting on February 7th, 2012 number 61/596,189, and the Application No. of submitting on February 5th, 2013.
Technical field
The present invention relates to integrated circuit (IC) and MEMS(microelectromechanical systems) device application, relate more specifically to the method and structure for improvement of the collimation technique of integrated MEMS device.
Background technology
The research and development of integrated micro continues to obtain breakthrough in CMOS and MEMS.For integrated circuit (IC), the CMOS technology has become important manufacturing technology.
Although obtained great success, IC,, particularly MEMS still has limitation.Similar with IC exploitation, concentrate on improve performance, MEMS exploitation reduced in size and that reduce cost still faces the challenge.In addition, the application of MEMS need be expected the complicated day by day micro-system of stronger computing power usually.Unfortunately, such application does not generally exist.These and other restrictions of traditional MEMS and IC will be made below further by this instructions and describing in detail.
Summary of the invention
The present invention relates to integrated circuit (IC) and MEMS(microelectromechanical systems) device application.
In the present embodiment, the present invention includes microprocessor, microcontroller or for the treatment of from the computer implemented method that is arranged on the data of integrated MEMS device in the handheld computer system, described handheld computer system is programmed to carry out described method.During normal running, can carry out sensor parameters calibration and aftertreatment (post-processing) such as accelerator.In the time interval in the time of can selecting not have dynamic acceleration, this is can carry out sensing when static and do not consider direction (for example, device is positioned at any certain location, is unnecessary such as level, direction such as vertical) because accelerator is at it.This static acceleration can be used to the dynamic deflection calibration or dynamic deflection is proofreaied and correct or dynamic offset compensation (DOC) is handled.
Than conventional art, can have multiple advantage by method of the present invention.From user perspective, DOC implements can improve measurement to support high performance application.DOC handles and can be triggered wittingly or can be at running background by the user.This makes the user of device or manufacturer can determine dirigibility what just meets purposes and the performance requirement of expection best.Because the magnetometer that many users have expected to calibrate mobile device via a series of action to be obtaining high precision, so will be very low to the influence on the program of this enforcement.Need not the user but DOC handles also running background and trigger calibration.When satisfying calibration condition, DOC can " detect " automatically.In addition, can consume low-down power and carry out this processing, this be because, can only use initial calibration procedure (initial calibration routine) and then low-down duty factor maintenance task come along with the time is improved precision.In addition, can revise during use calibration condition with obtain initial convergence fast with extremely accurate between acceptable combination.From developer's viewpoint, because do not need meticulous factory's internal calibration, so this enforcement of device can realize lower cost.This will not need to be placed on each part on the known direction and to measure.No matter any bias source or reason, device all can be worked.
Description of drawings
Fig. 1 shows the process flow diagram of simplification that is used for calibrating the integrated MEMS device according to the embodiment of the present invention.
Embodiment
The present invention relates to integrated circuit (IC) and MEMS(microelectromechanical systems) device application.More specifically, embodiments of the present invention have proposed the method and structure for improvement of the collimation technique of integrated MEMS device, this integrated MEMS device can be embodied in mobile phone, board device (video tablet, tablet), in the handheld computer etc.Only in the mode of example, the MEMS device can comprise accelerator, gyrostat, Magnetic Sensor, pressure transducer, loudspeaker, humidity sensor, temperature sensor, chemical sensor, biology sensor, inertial sensor etc. at least.But can think that the present invention has the wideer scope of application.
In embodiment, the present invention can comprise for the treatment of the microprocessor realizing method from the data that are arranged on the integrated MEMS device in the handheld computer system, and described handheld computer system is become to carrying out this method.During normal running, can carry out sensor parameters calibration and aftertreatment such as accelerator.In the time interval in the time of can selecting not have dynamic acceleration, this is can carry out sensing when static and do not consider direction (for example, device is positioned at any certain location, is unnecessary such as level, direction such as vertical) because accelerator is at it.This static acceleration can be used to the dynamic deflection calibration or dynamic deflection is proofreaied and correct (DOC) processing because regardless of the orientation (for example, equipment needn't be positioned at such as level, vertical etc. any ad-hoc location), it can be responded to when accelerator is static, so the time period can select not have dynamic acceleration the time.This static acceleration can be used to the dynamic deflection calibration or dynamic deflection is proofreaied and correct (DOC) processing.
Calibration can comprise monitoring existing X, Y, the output of Z sensor and guarantee not change in the data of these three axles when the DATA REASONING of continuous time domain.Can utilize a plurality of measured values to calculate offset calibration, described a plurality of measured values can dynamically obtain during normal running.In concrete embodiment, gravity will be unique power of measuring.Use terrestrial gravitation to measure acceleration as a reference and in four very different directions of device, can estimate X, Y, Z side-play amount.
In one embodiment, X, the Y of optional apparatus " position " change place, Z acceleration (" measurement point "), this means ' static state ' acceleration difference of X, Y, Z axle does not have dynamic acceleration, that is, gravity is the main component of acceleration that device senses.This can use state machine to determine with hardware or software.In various embodiments, the time interval that can apply minimum between sample satisfies the possibility of measurement point and need not carry out a large amount of screening operation (screening operation) that expends more calculating to increase geometric condition, for example, " between the measurement point required 200ms ".
If X
Mi, Y
Mi, Z
MiIt is acceleration measured among the example i.If X
Off, Y
Off, Z
OffBe to be respectively side-play amount in 3 axles each.If X
Ai, Y
Ai, Z
AiActual acceleration when when the side-play amount on each being zero, so,
X
mi=X
ai+X
off
Y
mi=Y
ai+Y
off
Z
mi=Z
ai+Z
off
It is known when not having dynamic acceleration,
X
ai 2+Y
ai 2+Z
ai 2=1g
2
If two the complete incoherent data sample that (acceleration of gravity only arranged) during the consideration static acceleration, so
X
a1 2+Y
a1 2+Z
a1 2=1g
2
This means
(X
m1–X
off)
2+(Y
m1–Y
off)
2+(Z
m1–Z
off)
2=1g
2
For another independent (uncorrelated) data point that except earth acceleration exists, does not have other components of acceleration,
X
a2 2+Y
a2 2+Z
a2 2=1g
2
(X
m2-X
off)
2+(Y
m2-Y
off)
2+(Z
m2-Z
off)
2=1g
2
Subtract each other,
(X
m1 2–X
m2 2)–2*X
off(X
m1–X
m2)+(Y
m1 2–Y
m2 2)–2*Y
off(Y
m1–Y
m2)+(Z
m1 2–Z
m2 2)–2*Z
off(Z
m1–Z
m2)=0
Consideration based on the data of measurement result, can solve X more than three pairs
Off, Y
OffAnd Z
OffThen, from that, can deduct this side-play amount from each data of measuring.Ask difference operation to make calculating not be subjected to the influence of the actual value of gravity.It is right to be preferably uncorrelated data, and this is because can find the solution three unknown numbers with the least error amount.This means the variation that has some motions or state on the equipment.Although will obtain best performance, 3 pairs need not to be completely orthogonal.Four independent measured values can rearrange and be organized into system of linear equations, and it can be aligned to following matrix computations:
Wherein, Δ represents to represent the difference of the acceleration of measuring under the different time situation, and o is the matrix along the side-play amount of 3 axles, and Y represents the matrix of the squared difference of the acceleration under the different time situation.
In various embodiments, dynamic deflection is proofreaied and correct (DOC) and is calculated three accelerator deviations and the direction that do not need to know equipment.Can proofread and correct output bias arbitrarily to guarantee consistent performance.In embodiment, can set up N * 3 matrixes of each new effective measurement group in the hope of measuring the multistage average of structure, thereby be used for calibration, maybe can upgrade 3 * 3 matrixes with better measured value, this is because they are progressive for finding optimal measured value to come for calibration.Under the situation of 3 * 3 matrixes, the big young pathbreaker of matrix is known, and one of contrary artificial methods availalbe that calculates simple matrix can be used for determining deviate.
In embodiment, 3 * 3 matrix methods can comprise by checking how much diversity and the fine tuning that exchanges with best measurements:
In embodiment, N * 3 matrix methods can comprise all effective measured values of use and find the solution with least square method:
Those of ordinary skill in the art will appreciate that, is used for finding the solution other distortion, modification and the replaceable mode of this prescription formula.
Fig. 1 shows the process flow diagram according to the method that is used for calibration integrated MEMS device of embodiment of the present invention.This treatment scheme illustrates the step of before discussing.In embodiment, use DOC to handle to calculate 3 * 3 inverses of a matrix and offset value.This finishes by collect the DATA REASONING value from MEMS sensor (in this case, being the MEMS accelerator) under various inspection conditions.
These inspection conditions include but not limited to whether passed time enough from nearest measurement; Whether satisfy the static condition of sensor; Whether satisfy the geometry diversity condition of collected data; Whether the temperature of equipment keeps enough stablizing and whether exceeding time/data limit.In this embodiment, if satisfy the time conditions that is used for setting up new measurement point, then move static check.If satisfy the static check condition, then calculate the matrix determinant of all supposition of line replacement.This will determine that new measured value is whether good than in the existing measured value any, and replace as required.
After calculating matrix, if meeting geometric diversity condition is calculated 3x3 inverse of a matrix and offset value so.If do not satisfy, then the supervision time/the data limit condition.If do not satisfy time conditions, static condition or time/the data limit condition, then collect new data.If the time of satisfying/data limit condition, then set the mark that is used for deterioration or failure calibration.Alternatively, can allow to handle operation until satisfying calibration condition fully.Other combinations, variation, modification and substitute mode in this steering logic exist.
Can when powering on, start calibration just.To X
Off, Y
OffAnd Z
OffSeeking time mean value can cause offset numbers more accurately.In some embodiments, when calculating side-play amount, if dynamic accelerated events takes place, then can detect this dynamic accelerated events based on the big variation of X, Y or Z, and should in above calculating, not use this data point.This calibration steps can be suitable for being used for effectively various sensing data speed.For example, when the above poll rate of 256Hz, calibration only needs several milliseconds of every measurement points, thereby causes significantly the enough calibrations less than 1 second.On the contrary, can also use slower data rate in the bigger time period, estimate to realize very high-precision skew.
In various embodiments, hands movement type collimation technique (being used for the electronic compass calibration on the cell phone) also can be used.This hands movement type collimation technique can comprise the motion of 8 fonts or other similar motions.Another concrete mode keeps equipment with short time period (for example, below several seconds) near quadrature position a plurality of (for example, four).
In embodiment, the integrated MEMS device can comprise 6 axle sensors with 3 gyrostats and 3 accelerators or 3 accelerators and 3 magnetometers.During gyroscopic hands movement calibration (for example, 8 fonts), accelerator can also be collected data point to be used for calibration or other processing.Another embodiment of motion calibration comprises that device is oriented near orthogonal directions.For example, can to remain on for X, Y and Z be 0,0,1g near measured value respectively to the accelerator direction; 1g, 0,0; 0,1g, 0; 0,0, the direction of-1g.Those of ordinary skill in the art will appreciate that the user starts the other types of calibration process.
In optional embodiment, simple method can be described as follows:
1. read X, Y, Z.When not having dynamic acceleration (parts are not moving), X
2+ Y
2+ Z
2=1g
2And independent of direction.Be to be caused by 3 of sensor and measuring route with respect to any Δ of 1g.
2. in simple the correction, if hypothesis Z skew is minimum skew (needn't represent that it is maximum in all parts), when aftertreatment Z axle measured value, can apply Δ to Z.
Example 1: this case description the calibration of telephone plant.Use the scheduled operation that continues several seconds to guarantee that telephone plant is applied with a plurality of orientation.This process does not rely on the whole value to each weight application, but detects the enough geometry diversity that are present in measurement point automatically, to calculate the deviation on each with acceptable accuracy.This processing can promote the user by phone manufacturer to be carried out, or calibration service may operate in the backstage, and only continues to be perfectly collimated until equipment.If phone only remains on pocket or table goes up or it does not experience the quiet hour on a plurality of directions, this second method need take a long time.
In embodiment, the DOC algorithm can learn when the geometry diversity of the quiet hour section that data are collected is not enough to provide 3 * 3 good matrixes.When how much diversity were not enough, calibration deterioration and degree of accuracy were low.When having not enough quiet-time section, then calibration is infeasible.Calibration operation, be used for to determine that accelerator real only successful threshold value or the standard of the gravity of experience can be modified.
About phone embodiment of the present invention, if there is significant accelerator deviation in manufacture component, phone manufacturer will have several selections.Two kinds of such selections are provided here:
1. allow the dynamic deflection correct operation to be triggered by the terminal user.The user must follow the tracks of operation, guarantee its term of execution have enough geometry diversity, such as at institute's recommended location (such as near, quadrature position or with respect to the various precalculated positions of human body) maintenance equipment.
2. operation backstage dynamic deflection is proofreaied and correct, and this needs constant operation service until finishing calibration.
Example 2, this case description from some results to the calibration testing of phone, this is transparent for the user.In this example, the operation that be used for to start calibration procedure comprises and picking up the telephone, as making a phone call; Watch screen and then with phone as in the pocket.In 26 tests of operation in ~ 6 seconds, this basic fundamental promptly converges to the deviation on all＜30mg, the 1-∑.
In various embodiments, can further improve the result of employed phone or other equipment as background task operation dynamic deflection calibration process.According to tuning and tradeoff, also can use more accurate static calibration, for example traditional " be placed on phone on the surface level and press button " type is handled.In embodiment, can use other collimation technique to realize＜10mg, every, the deviation of 1-∑.
Example 3, this case description in the electronic compass device, use the calibration of the accelerator of DOC, to determine the improvement of 0g skew.In this case, implement DOC with the software on the PIC microcontroller on the PCB.Wait for that by utilizing in all 6 directions 3 seconds stable X, Y, Z readings of mark record this initial 0g skew (along with PCB rotating operation DOC algorithm on 4 directions, finishing until the DOC algorithm).Then, calculating by software should skew to each sample application.Then, mark stable X, Y, the 0g off-set value that the Z reading records gained by waiting for 3 seconds in all 6 directions equally.The result shows the remarkable improvement of 0g skew in the electronic compass equipment.Based on 32 parts of measuring, mean value+1 ∑ value is 8.325mg for X, is 13.988mg for Y, is 20.567mg for Z.
In embodiment, the invention provides a kind of handheld computer system that is used for handling from the data that are arranged on the intrasystem integrated MEMS device of handheld computer.This system can comprise shell, be used for storing the entity stores device of a plurality of non-instantaneity executable instructions, comprise the integrated MEMS device that is arranged on the MEMS sensor in the housing and be arranged in the housing and be coupled to the processor of entity stores device and integrated MEMS device.Described processor is programmed to carry out multiple function by a plurality of non-instantaneity executable instructions.In various concrete embodiments, described instruction can comprise:
● processor is programmed for by being arranged on the executable code of the MEMS sensor sensing calibration data measured value in the computer system
● processor is programmed for the executable code of the offset data of the calculating that utilizes the processor use calibration data measured value that is arranged in the computer system to proofread and correct the definite MEMS sensor of (DOC) processing by dynamic deflection
● processor is programmed for by the MEMS sensor with X, the Y of cycle predetermined time sensing at least four static directions and the executable code of Z axle sensor data
● processor is programmed for by the executable code at a plurality of significant figures of MEMS sensor sensing strong point and the executable code that processor is programmed for execution DOC processing, wherein, DOC handles and comprises that structure comprises N * 3 matrixes at a plurality of significant figures strong point and utilizes least square method
● processor is programmed for by the executable code of four desired data points of MEMS sensor sensing and the executable code that processor is programmed for execution DOC processing at least, wherein, described DOC handles and comprises that structure comprises 3 * 3 matrixes of at least four desired data points
● processor is programmed in response to the user utilizes the handheld computer system to carry out predetermined actions and start the executable code that DOC handles
● processor is programmed in response to the user utilizes the handheld computer system to carry out from the first user location retrieval handheld computer system, keep described computer system, keep described computer system and then the action of computer system rreturn value first customer location is started the executable code that DOC handles at the 3rd customer location at second customer location
● processor is programmed for DOC handled constantly operates to backstage DOC and handle up to the executable code that satisfies predetermined calibration condition
● processor is programmed for DOC handled constantly operates to backstage DOC and handle up to the executable code that satisfies time cycle condition, static condition, how much diversity conditioned disjunction data limit conditions
● processor is programmed for when the user is placed on the handheld computer system on the surface level and presses button or when the user carries out the operation of 8 fonts by MEMS sensor sensing user starts the calibration data measured value, and utilize the user to start the calibration data measured value by described processor and determine that the user starts the executable code that calculates offset data
In embodiment, the MEMS sensor can comprise the MEMS accelerator, and the integrated MEMS device can comprise having MEMS accelerator and the gyroscopic integrated 6 MEMS inertial sensor devices of MEMS.The integrated MEMS device can also comprise the integrated 6 MEMS inertial sensor devices with MEMS accelerator and magnetometer or have the MEMS accelerator and MEMS gyroscopic integrated 9 or 10 inertial sensor devices, magnetometer and pressure detectors.Other distortion, modification or change also can be arranged.
In one embodiment, DOC can be embedded on the chip with sensor and need not use ppu.Previously described method of operating can utilize logical OR on the sheet by the same device in hand-held device or separately the microprocessor in the chip implement.It will be apparent to those skilled in the art that many other hardware and software configurations are applicable to the present invention.
It will also be appreciated that, example described herein and embodiment only are the purposes of example, can be used as various modifications and distortion for a person skilled in the art accordingly, and these modifications and distortion comprises within the spirit and scope of the present invention and the scope of claims in.
Claims (11)
1. system that comprises logic on microprocessor, the sheet goes up logic for described and is used for handling data from being arranged on the integrated MEMS device in the handheld computer system, and described system comprises:
Sensing module is configured to by being arranged on the MEMS sensor sensing calibration data measured value in the described computer system; And
Correction module is configured to utilize the processor that is arranged in the described computer system to use described calibration data measured value to proofread and correct the offset data that (DOC) handles the calculating that detects described MEMS sensor by dynamic deflection.
2. system according to claim 1, wherein, described sensing calibration data measured value comprises with cycle predetermined time sensing X, Y and Z axle sensor data on one or more static directions;
Wherein, described calibration data measured value comprises a plurality of significant figures strong point, and wherein, described DOC handles and comprises structure N * 3 matrixes and use least square method, and described N * 3 matrixes comprise a plurality of significant figures strong point.
3. system according to claim 1, wherein, described calibration data measured value comprises at least four desired data points, and wherein, and described DOC handles and comprises and make up 3 * 3 matrixes, and described 3 * 3 matrixes comprise described at least four desired data point.
4. system according to claim 1, wherein, described DOC handles and utilizes described handheld computer system to carry out predetermined operation by the user to start,
Wherein, described predetermined operation comprise the user from the described handheld computer of first user location retrieval system, keep described computer system at second customer location, the 3rd and position, the four-function family action that keeps described computer system then.
5. system according to claim 1, wherein, described DOC handles to be configured to constantly move until the backstage DOC that satisfies predetermined calibration condition and handles;
Wherein, described predetermined calibration condition comprises time cycle condition, static condition, how much diversity conditioned disjunction data limit conditions.
6. system according to claim 5, wherein, described time cycle condition, static condition, how much diversity conditioned disjunction data limit conditions are corrected to improve precision in time in initial time period of convergence or after using the finishing of more undemanding condition.
7. system according to claim 1, comprise that further the user starts calibration process, described user starts calibration process and comprises by described MEMS sensor sensing user when the user is placed on described handheld computer system on the surface level and presses button or when the user carries out the operation of 8 fonts and start the calibration data measured value, and uses described user to start the calibration data measured value by described processor and determine that the user starts the calculating offset data.
8. system according to claim 1, wherein, described MEMS sensor comprises the MEMS accelerator, described integrated MEMS device comprises integrated 3 MEMS accelerators, or comprise described MEMS accelerator and the gyroscopic 6 MEMS inertial sensor devices of MEMS, or comprise 6 shaft devices of described MEMS accelerator and MEMS magnetometer.
9. hand-held Inertial Sensor System comprises in the same device that is integrated in the described hand-held device or is used for handling microprocessor from the data that are arranged on the integrated MEMS device in the handheld computer system in the independent chip that described system comprises
Housing;
The entity stores device is used for storing the executable instruction of a plurality of non-instantaneitys;
The integrated MEMS device is arranged in the described housing, and described integrated MEMS device comprises the MEMS sensor;
Processor is arranged in the described housing and is coupled to described entity stores device and described integrated MEMS device, and wherein, described processor is programmed to carry out multiple function by the executable instruction of described a plurality of non-instantaneitys;
Sensing module comprises described processor is programmed for by being arranged on the executable code of the described MEMS sensor sensing calibration data measured value in the described computer system; And
The offset data module comprises described processor is programmed for and utilizes the processor be arranged in the described computer system to use described calibration data measured value to proofread and correct the offset data that (DCO) handles the calculating of determining described MEMS sensor by dynamic deflection.
10. system according to claim 9, further comprise the calibration data module, described calibration data module comprises described processor is programmed for by the executable code of described MEMS sensor with X, Y on four static directions of cycle predetermined time sensing and Z axle sensor data at least.
11. system according to claim 9, wherein, described MEMS sensor comprises the MEMS accelerator, and described integrated MEMS device comprises
Comprise the gyroscopic integrated 6 MEMS inertial sensor devices of MEMS accelerator and MEMS,
The integrated 6 MEMS inertial sensor devices that comprise MEMS accelerator and magnetometer,
Or comprise described MEMS accelerator and MEMS gyroscopic integrated 9 or 10 inertial sensor devices, magnetometer and pressure sensors.
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| US201261596189P | 2012-02-07 | 2012-02-07 | |
| US61/596,189 | 2012-02-07 | ||
| US13/760,014 | 2013-02-05 | ||
| US13/760,014 US10324108B2 (en) | 2012-02-07 | 2013-02-05 | Dynamic offset correction for calibration of MEMS sensor |
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| CN112200847A (en) * | 2020-10-29 | 2021-01-08 | 中国航空工业集团公司洛阳电光设备研究所 | Method for enhancing matching and calibration of flight visual images |
| CN112200847B (en) * | 2020-10-29 | 2022-10-25 | 中国航空工业集团公司洛阳电光设备研究所 | Method for enhancing matching and calibration of flight visual images |
| CN116172540A (en) * | 2023-04-28 | 2023-05-30 | 长春市鑫睿商贸有限公司 | Method for detecting magnetic localizer in tissue focus and method for using detection device thereof |
| CN116172540B (en) * | 2023-04-28 | 2023-07-04 | 长春市鑫睿商贸有限公司 | Method for detecting magnetic localizer in tissue focus and method for using detection device thereof |
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