CN103223347B - Method for synthesis of silica loaded nickel-platinum catalyst by ultrasonic spray pyrolysis - Google Patents
Method for synthesis of silica loaded nickel-platinum catalyst by ultrasonic spray pyrolysis Download PDFInfo
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- CN103223347B CN103223347B CN201310130768.6A CN201310130768A CN103223347B CN 103223347 B CN103223347 B CN 103223347B CN 201310130768 A CN201310130768 A CN 201310130768A CN 103223347 B CN103223347 B CN 103223347B
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- silicon tetrachloride
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 76
- 239000003054 catalyst Substances 0.000 title claims abstract description 55
- 239000000377 silicon dioxide Substances 0.000 title claims abstract description 39
- 238000000034 method Methods 0.000 title claims abstract description 24
- PCLURTMBFDTLSK-UHFFFAOYSA-N nickel platinum Chemical compound [Ni].[Pt] PCLURTMBFDTLSK-UHFFFAOYSA-N 0.000 title claims abstract description 22
- 230000015572 biosynthetic process Effects 0.000 title abstract description 7
- 238000003786 synthesis reaction Methods 0.000 title abstract description 7
- 238000003764 ultrasonic spray pyrolysis Methods 0.000 title abstract 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 claims abstract description 68
- 239000005049 silicon tetrachloride Substances 0.000 claims abstract description 68
- 150000001875 compounds Chemical class 0.000 claims abstract description 20
- 238000006243 chemical reaction Methods 0.000 claims abstract description 13
- 230000008016 vaporization Effects 0.000 claims abstract description 9
- 239000002245 particle Substances 0.000 claims abstract description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 83
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 73
- 229910052697 platinum Inorganic materials 0.000 claims description 35
- 238000000889 atomisation Methods 0.000 claims description 33
- 229910052759 nickel Inorganic materials 0.000 claims description 29
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 239000002184 metal Substances 0.000 claims description 20
- 239000005543 nano-size silicon particle Substances 0.000 claims description 19
- 239000007789 gas Substances 0.000 claims description 17
- 239000000843 powder Substances 0.000 claims description 16
- 238000002360 preparation method Methods 0.000 claims description 16
- 238000000197 pyrolysis Methods 0.000 claims description 16
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 10
- 229920005591 polysilicon Polymers 0.000 claims description 10
- 239000006227 byproduct Substances 0.000 claims description 9
- 239000000047 product Substances 0.000 claims description 9
- 230000008021 deposition Effects 0.000 claims description 8
- 238000004821 distillation Methods 0.000 claims description 8
- 230000007062 hydrolysis Effects 0.000 claims description 8
- 238000006460 hydrolysis reaction Methods 0.000 claims description 8
- 239000002994 raw material Substances 0.000 claims description 8
- 239000007921 spray Substances 0.000 claims description 8
- 238000009834 vaporization Methods 0.000 claims description 8
- 239000003595 mist Substances 0.000 claims description 6
- PEUPIGGLJVUNEU-UHFFFAOYSA-N nickel silicon Chemical compound [Si].[Ni] PEUPIGGLJVUNEU-UHFFFAOYSA-N 0.000 claims description 5
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 4
- 239000002253 acid Substances 0.000 claims description 2
- 239000012159 carrier gas Substances 0.000 claims description 2
- 239000008187 granular material Substances 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 4
- 238000001035 drying Methods 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 description 5
- 239000006185 dispersion Substances 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000001802 infusion Methods 0.000 description 3
- 239000002243 precursor Substances 0.000 description 2
- 238000004064 recycling Methods 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
- 238000004517 catalytic hydrocracking Methods 0.000 description 1
- 238000009903 catalytic hydrogenation reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006356 dehydrogenation reaction Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
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Abstract
The invention relates to a method for synthesis of a silica loaded nickel-platinum catalyst by ultrasonic spray pyrolysis. The method includes: step 1. preparing a nickel-platinum-containing soluble compound solution; step 2. atomizing the nickel-platinum-containing soluble compound solution; step 3. vaporizing silicon tetrachloride; step 4. bringing the atomized nickel-platinum liquid drops and silicon tetrachloride vapor to undergo a pyrolytic reaction so as to generate nanoscale silica, simultaneously making the active nickel-platinum-containing soluble compound form catalyst particles under high temperature and loading them on the nano-silica; and step 5. collecting and drying the catalyst. The method provided in the invention solves the problems that a silica carrier is expensive and the loading process is complex, has a simple synthesis process, and the obtained nano-silica loaded nickel-platinum catalyst has high activity and good dispersity.
Description
Technical field
The invention belongs to catalyst preparation technical field, be specifically related to the method for ultrasonic atomization pyrolysismethod synthetic silica nickel-loaded platinum catalyst.
Background technology
Nanometer grade silica has huge specific area, suitable pore size distribution$, and has good mechanical strength and chemical inertness, can be used as the carrier of catalyst.Silicon dioxide carried nickel platinum metal catalyst can be used for the multiple reactions such as catalytic hydrogenation, dehydrogenation, hydrocracking.
The preparation of silicon dioxide carried active metal catalyst, adopts infusion process at present, fully contacts by the solution that carrier silicas is immersed in containing active component, then through filtering, dry, roasting and activation, obtained catalyst.Catalyst prepared by infusion process, the active component of load is mainly distributed in carrier surface, is evenly distributed, and utilization rate is high, is applicable to very much the noble metal catalysts such as preparation Ni, Pt.Directly make carrier with shaping nano silicon, although eliminate the complicated technologies such as carrier is shaping, pretreatment, nanometer grade silica is as high-end nanometer product, and price is relatively costly.
Ultrasonic atomization pyrolysismethod is sprayed by solution with ultrasonic wave, at high temperature pyrolytic reaction occurs with another kind of material.Due to hyperacoustic vibrating dispersion effect, the particle diameter of ejection solution is about 5 μm, reacts, can synthesize the nano material that concentration class is little, good dispersion, specific area are high with high-temperature gas.Utilize ultrasonic atomization pyrolysismethod synthesis of nano silica supported metal nickel, the principle of platinum is, by the soluble compound solution sonic oscillation ejection containing active metal nickel, platinum, at high temperature pyrolytic reaction is there is, the silicon dioxide carried nickel platinum catalyst of synthesis of nano with silica precursor.Polysilicon refuse silicon tetrachloride (SiCl is adopted in reaction
4) substitute traditional ethyl orthosilicate (TEOS) and make the presoma of silica, can reduce costs and realize the recycling of resource.Adopt the method for the silicon dioxide carried nickel platinum catalyst of ultrasonic atomization pyrolysismethod synthesis of nano, there is no Patents and research report at present both at home and abroad.
Summary of the invention
In order to overcome the defect of above-mentioned prior art, the nano silicon existed for infusion process urges the shortcomings such as carrier is expensive, carrier complex forming technology, the object of the present invention is to provide a kind of method of ultrasonic atomization pyrolysismethod synthetic silica nickel-loaded platinum catalyst, solve the problem that silica supports is expensive, load process is complicated, there is synthesis technique simple, the nano silicon nickel-loaded platinum catalyst activity obtained is high, good dispersion.
To achieve these goals, technical scheme of the present invention is:
The method of ultrasonic atomization pyrolysismethod synthetic silica nickel-loaded platinum catalyst, comprises the following steps:
The preparation of the soluble compound solution of step one, nickel metal platinum: active metal adopts the combination of nickel, platinum or both arbitrary proportions, preparation mass concentration is the soluble compound solution of the nickel metal platinum of 0.2 ~ 2%;
The atomization of the soluble compound solution of step 2, nickel metal platinum: adopt power 200W, transducer frequency is the ultrasonic ultrasonic delay line memory of 1.7MHz, atomization rates is 0.4mL/min, and the soluble compound solution mist of nickel metal platinum being changed into average grain diameter is that the droplet of 5 μm sprays into pyrolysis reactor;
The vaporization of step 3, silicon tetrachloride: adopt silicon tetrachloride as by-product of polysilicon to make raw material, silicon tetrachloride first carries out purifying through distillation equipment, then silicon tetrachloride is heated to more than 60 DEG C and vaporizes, and taken out of by carrier gas;
Metallic nickel platinum drop after step 4, atomization and silicon tetrachloride steam generation pyrolytic reaction: silicon tetrachloride steam and the nickel platinum drop after being atomized are injected into pyrolysis reactor, the mol ratio of silicon tetrachloride gas and nickel platinum drop is 1:10 ~ 1:50, react at 200 ~ 500 DEG C of temperature, silicon tetrachloride gas and micron-sized drop generation hydrolysis, generate nanometer grade silica, in drop, residual moisture is by evaporate to dryness, and the soluble compound simultaneously containing active nickel platinum at high temperature forms supporting catalyst particles on nano silicon.
The collection of step 5, catalyst is with dry: nano silicon nickel-loaded platinum catalyst powder deposition in collector, take out powder and at 200 DEG C dry 2h, obtain product.
Advantage of the present invention:
(1) adopt ultrasonic atomization pyrolysismethod, a step realizes the preparation of nanometer silicon dioxide and the load of active component, and technique is simple, and the catalyst activity obtained is high, good dispersion.
(2) what silica precursor adopted is silicon tetrachloride as by-product of polysilicon, replaces conventional ethyl orthosilicate, realizes the recycling of resource while reducing costs.
(3) by changing the soluble chemical component solution concentration of nickeliferous platinum, the catalyst of different catalytic efficiency is obtained.
Detailed description of the invention
Below in conjunction with embodiment, the present invention is described in detail.
Embodiment one
The method of ultrasonic atomization pyrolysismethod synthetic silica nickel-loaded platinum catalyst, specifically comprises following step:
Step one, preparation containing the soluble compound solution of active metal: by Ni (OH)
2be dissolved in the hydrochloric acid solution of 0.4mol/L, form NiCl
2solution, ensures that the mass fraction of nickel is 1%.
Step 2, NiCl
2the atomization of solution: adopt power 200W, transducer frequency is the ultrasonic ultrasonic delay line memory of 1.7MHz, and atomization rates is 0.4mL/min, by NiCl
2it is that the droplet of 5 μm sprays into pyrolysis reactor that solution mist changes into average grain diameter.
The vaporization of step 3, silicon tetrachloride: adopt silicon tetrachloride as by-product of polysilicon to make raw material, silicon tetrachloride enters evaporimeter and vaporizes after distillation equipment purifying, and silicon tetrachloride sample introduction speed is 0.2mL/min.
Step 4, NiCl
2drop and silicon tetrachloride steam generation pyrolytic reaction: silicon tetrachloride steam and NiCl
2drop is injected into pyrolysis reactor, and the mol ratio of silicon tetrachloride gas and nickel platinum drop is 1:10 ~ 1:50, reacts at 300 DEG C, silicon tetrachloride gas and micron-sized drop generation hydrolysis, generate nanometer grade silica, in drop, residual moisture is by evaporate to dryness, NiCl
2at high temperature form Ni supporting catalyst particles on nano silicon.
The collection of step 5, catalyst is with dry: nano silicon supported ni catalyst powder deposition in collector, take out powder and at 200 DEG C dry 2h, obtain product.
Carry out test to this catalyst to characterize, BET specific surface area is 245m
2/ g, total pore volume is the mass percent of 0.18mL/g, XRF data result display nickel/silica is 22%.
Embodiment two
The method of ultrasonic atomization pyrolysismethod synthetic silica nickel-loaded platinum catalyst, specifically comprises following step:
Step one, preparation containing the soluble compound solution of active metal: by chloroplatinic acid (H
2ptCl
6) be dissolved in pure water, ensure that the mass fraction of platinum is 1%.
Step 2, H
2ptCl
6the atomization of solution: adopt power 200W, transducer frequency is the ultrasonic ultrasonic delay line memory of 1.7MHz, and atomization rates is 0.4mL/min, by H
2ptCl
6it is that the droplet of 5 μm sprays into pyrolysis reactor that solution mist changes into average grain diameter.
The vaporization of step 3, silicon tetrachloride: adopt silicon tetrachloride as by-product of polysilicon to make raw material, silicon tetrachloride enters evaporimeter and vaporizes after distillation equipment purifying, and silicon tetrachloride sample introduction speed is 0.2mL/min.
Step 4, H
2ptCl
6drop and silicon tetrachloride steam generation pyrolytic reaction: silicon tetrachloride steam and H
2ptCl
6drop is injected into pyrolysis reactor, and the mol ratio of silicon tetrachloride gas and nickel platinum drop is 1:10 ~ 1:50, reacts at 300 DEG C.Silicon tetrachloride gas and micron-sized drop generation hydrolysis, generate nanometer grade silica, in drop, residual moisture is by evaporate to dryness, H
2ptCl
6at high temperature form Pt supporting catalyst particles on nano silicon.
The collection of step 5, catalyst is with dry: nano silicon loaded Pt catalyst powder deposition in collector, take out powder and at 200 DEG C dry 2h, obtain product.
Carry out test to this catalyst to characterize: BET specific surface area is 275m
2/ g, total pore volume is the mass percent that 0.37mL/g, XRF record platinum/silica is 24%.
Embodiment three
The method of ultrasonic atomization pyrolysismethod synthetic silica nickel-loaded platinum catalyst, specifically comprises following step:
Step one, preparation containing the soluble compound solution of active metal: preparation Ni mass fraction is the NiCl of 0.5%
2solution and Pt mass fraction are the H of 0.5%
2ptCl
6solution.
Step 2, atomization containing Ni/Pt active component mixed liquor: adopt power 200W, transducer frequency is the ultrasonic ultrasonic delay line memory of 1.7MHz, atomization rates is 0.4mL/min, and Ni/Pt living solution being atomized into average grain diameter is that the droplet of 5 μm sprays into pyrolysis reactor.
The vaporization of step 3, silicon tetrachloride: adopt silicon tetrachloride as by-product of polysilicon to make raw material, silicon tetrachloride enters evaporimeter and vaporizes after distillation equipment purifying, and silicon tetrachloride sample introduction speed is 0.2mL/min.
Step 4, Ni/Pt living solution drop and silicon tetrachloride steam generation pyrolytic reaction: silicon tetrachloride steam and Ni/Pt living solution drop are injected into pyrolysis reactor, the mol ratio of silicon tetrachloride gas and nickel platinum drop is 1:10 ~ 1:50, react at 300 DEG C, silicon tetrachloride gas and micron-sized drop generation hydrolysis, generate nanometer grade silica, in drop, residual moisture is by evaporate to dryness, NiCl
2/ H
2ptCl
6at high temperature form the load of nickel Pt catalyst granule on nano silicon.
The collection of step 5, catalyst is with dry: nano silicon nickel-loaded platinum catalyst powder deposition in collector, take out powder and at 200 DEG C dry 2h, obtain product.
Carry out test to this catalyst to characterize: BET specific surface area is 230m
2/ g, total pore volume is 0.53mL/g.
Claims (4)
1. the method for ultrasonic atomization pyrolysismethod synthetic silica nickel-loaded platinum catalyst, is characterized in that, comprise the following steps:
The preparation of the soluble compound solution of step one, nickel metal platinum: active metal adopts the combination of nickel, platinum or both arbitrary proportions, preparation mass concentration is the soluble compound solution of the nickel metal platinum of 0.2 ~ 2%;
The atomization of the soluble compound solution of step 2, nickel metal platinum: adopt power 200W, transducer frequency is the ultrasonic ultrasonic delay line memory of 1.7MHz, atomization rates is 0.4mL/min, and the soluble compound solution mist of nickel metal platinum being changed into average grain diameter is that the droplet of 5 μm sprays into pyrolysis reactor;
The vaporization of step 3, silicon tetrachloride: adopt silicon tetrachloride as by-product of polysilicon to make raw material, silicon tetrachloride first carries out purifying through distillation equipment, then silicon tetrachloride is heated to more than 60 DEG C and vaporizes, and taken out of by carrier gas;
Metallic nickel platinum drop after step 4, atomization and silicon tetrachloride steam generation pyrolytic reaction: silicon tetrachloride steam and the nickel platinum drop after being atomized are injected into pyrolysis reactor, the mol ratio of silicon tetrachloride gas and nickel platinum drop is 1:10 ~ 1:50, react at 200 ~ 500 DEG C of temperature, silicon tetrachloride gas and micron-sized drop generation hydrolysis, generate nanometer grade silica, in drop, residual moisture is by evaporate to dryness, and the soluble compound simultaneously containing active nickel platinum at high temperature forms supporting catalyst particles on nano silicon;
The collection of step 5, catalyst is with dry: nano silicon nickel-loaded platinum catalyst powder deposition in collector, take out powder and at 200 DEG C dry 2h, obtain product.
2. the method for ultrasonic atomization pyrolysismethod synthetic silica nickel-loaded platinum catalyst according to claim 1, is characterized in that, comprise the following steps: step one, preparation containing the soluble compound solution of active metal: by Ni (OH)
2be dissolved in the hydrochloric acid solution of 0.4mol/L, form NiCl
2solution, ensures that the mass fraction of nickel is 1%;
Step 2, NiCl
2the atomization of solution: adopt power 200W, transducer frequency is the ultrasonic ultrasonic delay line memory of 1.7MHz, and atomization rates is 0.4mL/min, by NiCl
2it is that the droplet of 5 μm sprays into pyrolysis reactor that solution mist changes into average grain diameter;
The vaporization of step 3, silicon tetrachloride: adopt silicon tetrachloride as by-product of polysilicon to make raw material, silicon tetrachloride enters evaporimeter and vaporizes after distillation equipment purifying, and silicon tetrachloride sample introduction speed is 0.2mL/min;
Step 4, NiCl
2drop and silicon tetrachloride steam generation pyrolytic reaction: silicon tetrachloride steam and NiCl
2drop is injected into pyrolysis reactor, and the mol ratio of silicon tetrachloride gas and nickel platinum drop is 1:10 ~ 1:50, reacts at 300 DEG C, silicon tetrachloride gas and micron-sized drop generation hydrolysis, generate nanometer grade silica, in drop, residual moisture is by evaporate to dryness, NiCl
2at high temperature form Ni supporting catalyst particles on nano silicon;
The collection of step 5, catalyst is with dry: nano silicon supported ni catalyst powder deposition in collector, take out powder and at 200 DEG C dry 2h, obtain product.
3. the method for ultrasonic atomization pyrolysismethod synthetic silica nickel-loaded platinum catalyst according to claim 1, is characterized in that, step one, preparation containing the soluble compound solution of active metal: by chloroplatinic acid (H
2ptCl
6) be dissolved in pure water, ensure that the mass fraction of platinum is 1%;
Step 2, H
2ptCl
6the atomization of solution: adopt power 200W, transducer frequency is the ultrasonic ultrasonic delay line memory of 1.7MHz, and atomization rates is 0.4mL/min, by H
2ptCl
6it is that the droplet of 5 μm sprays into pyrolysis reactor that solution mist changes into average grain diameter;
The vaporization of step 3, silicon tetrachloride: adopt silicon tetrachloride as by-product of polysilicon to make raw material, silicon tetrachloride enters evaporimeter and vaporizes after distillation equipment purifying, and silicon tetrachloride sample introduction speed is 0.2mL/min;
Step 4, H
2ptCl
6drop and silicon tetrachloride steam generation pyrolytic reaction: silicon tetrachloride steam and H
2ptCl
6drop is injected into pyrolysis reactor, and the mol ratio of silicon tetrachloride gas and nickel platinum drop is 1:10 ~ 1:50, reacts at 300 DEG C, silicon tetrachloride gas and micron-sized drop generation hydrolysis, generate nanometer grade silica, in drop, residual moisture is by evaporate to dryness, H
2ptCl
6at high temperature form Pt supporting catalyst particles on nano silicon;
The collection of step 5, catalyst is with dry: nano silicon loaded Pt catalyst powder deposition in collector, take out powder and at 200 DEG C dry 2h, obtain product.
4. the method for ultrasonic atomization pyrolysismethod synthetic silica nickel-loaded platinum catalyst according to claim 1, is characterized in that, step one, preparation containing the soluble compound solution of active metal: preparation Ni mass fraction is the NiCl of 0.5%
2solution and Pt mass fraction are the H of 0.5%
2ptCl
6solution;
Step 2, atomization containing Ni/Pt active component mixed liquor: adopt power 200W, transducer frequency is the ultrasonic ultrasonic delay line memory of 1.7MHz, atomization rates is 0.4mL/min, and Ni/Pt living solution being atomized into average grain diameter is that the droplet of 5 μm sprays into pyrolysis reactor;
The vaporization of step 3, silicon tetrachloride: adopt silicon tetrachloride as by-product of polysilicon to make raw material, silicon tetrachloride enters evaporimeter and vaporizes after distillation equipment purifying, and silicon tetrachloride sample introduction speed is 0.2mL/min;
Step 4, Ni/Pt living solution drop and silicon tetrachloride steam generation pyrolytic reaction: silicon tetrachloride steam and Ni/Pt living solution drop are injected into pyrolysis reactor, the mol ratio of silicon tetrachloride gas and nickel platinum drop is 1:10 ~ 1:50, react at 300 DEG C, silicon tetrachloride gas and micron-sized drop generation hydrolysis, generate nanometer grade silica, in drop, residual moisture is by evaporate to dryness, NiCl
2/ H
2ptCl
6at high temperature form the load of nickel Pt catalyst granule on nano silicon;
The collection of step 5, catalyst is with dry: nano silicon nickel-loaded platinum catalyst powder deposition in collector, take out powder and at 200 DEG C dry 2h, obtain product.
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CN103464220B (en) * | 2013-09-13 | 2015-01-14 | 太原理工大学 | Method for modifying catalyst through ultrasonic atomization |
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CN109590028A (en) * | 2018-11-28 | 2019-04-09 | 浙江工商大学 | A method of nm-class catalyst is prepared using ultrasonic atomizatio plasma reaction |
CN111359673A (en) * | 2020-03-26 | 2020-07-03 | 安徽元琛环保科技股份有限公司 | MnO2PPS composite material and preparation method and application thereof |
CN114425055B (en) * | 2020-10-15 | 2024-04-19 | 武汉工程大学 | Silica supported multi-metal nano-particle, preparation method and antibacterial application thereof |
CN114345333A (en) * | 2022-01-14 | 2022-04-15 | 济南大学 | Preparation method of automobile exhaust purification catalyst with controllable precious metal content and obtained product |
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CN1040932A (en) * | 1988-09-08 | 1990-04-04 | 清华大学 | Ultrasonic atomizing preparation of superfine powder |
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