CN103219634B - The carbon dioxide laser of a kind of band fluid cooling jacket - Google Patents
The carbon dioxide laser of a kind of band fluid cooling jacket Download PDFInfo
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- CN103219634B CN103219634B CN201310168534.0A CN201310168534A CN103219634B CN 103219634 B CN103219634 B CN 103219634B CN 201310168534 A CN201310168534 A CN 201310168534A CN 103219634 B CN103219634 B CN 103219634B
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Abstract
The present invention relates to a kind of laser device, in particular to the carbon dioxide laser of a kind of band fluid cooling jacket, comprise laser apparatus, described laser apparatus two ends are respectively arranged with output optic acts and reflecting optics, described output optic acts is provided with output optic acts cooling jacket, the end sleeve that described reflecting optics installed by described laser apparatus is provided with the unlimited cover shell of the airtight the other end in one end, the insulating mat for sealing gap between described cover shell and described laser apparatus it is provided with between the open end of described cover shell and described laser apparatus, in the described laser apparatus end and described reflecting optics of installing described reflecting optics are sealed in by the closed cavity between described cover shell and described insulating mat, it is filled with cooling fluid in closed cavity between described cover shell and described insulating mat, described hull outside end is provided with refrigerating unit. the heat of reflecting optics and laser apparatus end is delivered on cover shell by cooling fluid, through refrigerating unit cooling, thus cools reflecting optics and the end of laser apparatus installation reflecting optics.
Description
Technical field
The present invention relates to a kind of laser device, in particular to the carbon dioxide laser of a kind of band fluid cooling jacket.
Background technology
In current laser apparatus, discharge tube is normally made up of glass or quartz material, and the inside is filled with carbon dioxide and other assist gass; Electrode is generally nickel hollow cylinder; One end of resonator cavity is reflecting optics, and the other end is output optic acts. When adding high-voltage on electrode, discharge tube produces glow discharge, after specular reflection, form laser beam. Laser apparatus has bigger power and compares high effciency of energy transfer, and spectrum line is also relatively abundanter, has the Laser output of tens spectrum lines, be widely used in industry, military affairs, medical treatment, scientific research etc. near 10 microns.
In current laser apparatus use, only portion of energy is converted when generation laser, all the other energy transformation are the heat energy of gas, and temperature is raised, and the rising of gas temperature, to cause the thermal excitation disappearing and exciting with laser lower level of upper laser level, this all can make the reversion number of particle reduce; Further, the rising of gas temperature, will make broadening of spectral lines, cause gain factor to decline; Particularly, the rising of gas temperature, also will cause the decomposition of carbon dioxide molecule, reduce the carbon dioxide molecule concentration in discharge tube, and these factors all can make the output rating of laser apparatus decline, and even produce " temperature quenching ".
At present in order to reduce the temperature of laser apparatus, it is to reduce the temperature of discharge tube at the outer sheathed refrigerating unit of discharge tube, the reflecting optics and output optic acts at laser apparatus two ends arrange refrigerating unit respectively to cool the temperature of reflecting optics and output optic acts, the refrigerating unit used at present, inside has cooling fluid storage to receive chamber, and is provided with cooling liquid inlet and cooling liquid outlet on chamber is received in cooling fluid storage. In use, refrigerating unit is adjacent to output optic acts and reflecting optics, and cooling fluid enters cooling fluid storage from cooling liquid inlet and receives chamber then from cooling liquid outlet outflow, thus realizes cooling output optic acts and reflecting optics object.
In actual use, for reflecting optics, only laser beam is reflected by the reflecting optics of middle portion, and laser beam does not drop on the eyeglass of peripheral portion, thus the temperature that result on reflecting optics presents the thermograde progressively reduced to the periphery from middle part.
Current laser apparatus reflecting optics refrigerating unit is that integral plaster is combined on reflecting optics, reflecting optics is carried out overall cooling, although the temperature of reflecting optics obtains reduction, but on reflecting optics still to present middle portion temperature relatively high, and the thermograde that peripheral temperature is relatively low, this kind of thermograde appears on reflecting optics, make the expansion amplitude in the middle part of reflecting optics be greater than peripheral expansion amplitude, affect the working life simultaneously also reducing reflecting optics of reflecting optics setting accuracy.
In addition, owing to current laser apparatus reflecting optics refrigerating unit is that integral plaster is combined on reflecting optics, refrigerating unit is merely able to be cooled by laser apparatus reflecting optics, and the end that reflecting optics installed by laser apparatus can not access cooling.
So, needing one at present badly can when laser works, Homogeneous cooling reflecting optics, and can the carbon dioxide laser of cooling laser device end.
Summary of the invention
It is an object of the invention to: for existing laser apparatus reflecting optics refrigerating unit when cooling laser device reflecting optics, the thermograde on laser apparatus reflecting optics can not be eliminated, cause the working life simultaneously also reducing reflecting optics affecting reflecting optics setting accuracy, and the end of laser apparatus installation reflecting optics but can not access the deficiency of cooling, providing one can Homogeneous cooling reflecting optics, avoid that reflecting optics occurs higher thermograde, thus improve reflecting optics setting accuracy and working life, and can the carbon dioxide laser of cooling laser device end.
In order to realize above-mentioned purpose, the technical solution used in the present invention is:
The carbon dioxide laser of a kind of band fluid cooling jacket, comprise laser apparatus, described laser apparatus two ends are respectively arranged with output optic acts and reflecting optics, described output optic acts is provided with output optic acts cooling jacket, the end sleeve that described reflecting optics installed by described laser apparatus is provided with the unlimited cover shell of the airtight the other end in one end, the insulating mat for sealing gap between described cover shell and described laser apparatus it is provided with between the open end of described cover shell and described laser apparatus, in described reflecting optics and the laser apparatus end of installing this reflecting optics are sealed in by the closed cavity between described cover shell and described insulating mat, it is filled with cooling fluid in closed cavity between described cover shell and described insulating mat, described cover shell outboard end is provided with refrigerating unit, the seal gum for sealing described closed cavity also it is provided with between the open end of described cover shell and described laser apparatus. during laser works, the temperature of the end that reflecting optics installed by reflecting optics and laser apparatus raises, the heat of reflecting optics and the laser apparatus end installing this reflecting optics is delivered on cover shell by cooling fluid rapidly, the refrigerating unit cooling jacket shell that cover shell outboard end is arranged, thus reach cooling reflecting optics and the effect of the laser apparatus end of this reflecting optics is installed, and owing to being provided with insulating mat, prevent the danger externally discharged in laser apparatus end.
As the preferred version of the present invention, described reflecting optics deviates from and is provided with conducting strip on the end face of described laser apparatus with one heart, between described conducting strip and described reflecting optics, there is gap, it is adjacent in the middle part of projection and described reflecting optics in the middle part of described conducting strip, described conducting strip is peripheral to be separated with described reflecting optics periphery, it is provided with seal gum between described conducting strip edge and described reflecting optics edge, between described reflecting optics and described conducting strip, forms annular cavity. due to reflecting optics only middle portion laser beam is reflected, laser beam does not drop on the peripheral portion of reflecting optics, so reflecting optics middle portion temperature is far away higher than peripheral temperature, reflecting optics is formed bigger thermograde, at the middle part of conducting strip, projection is set, the projection of conducting strip is adjacent to the higher middle part of reflecting optics temperature, separated by air between reflecting optics periphery and conducting strip periphery, the heat in the middle part of reflecting optics is made to be delivered on conducting strip fast, and the heat of reflecting optics periphery is by being delivered to conducting strip again after air, heat transmission is comparatively slow, heat on conducting strip is delivered on cover shell by cooling fluid, cover shell is after refrigerating unit cools, decline to a great extent with peripheral thermograde in the middle part of reflecting optics, improve reflecting optics setting accuracy and working life.
As the preferred version of the present invention, protruding and contact with described conducting strip to conducting strip in the middle part of described cover shell inner side end.When mounted, convenient location and the installation overlapping shell.
As the preferred version of the present invention, described conducting strip is metal conducting strip. Adopt metallic substance as conducting strip, owing to metallic substance has good thermal conductivity, it is to increase to the cooling performance of reflecting optics and the laser apparatus end installing this reflecting optics.
As the preferred version of the present invention, described conducting strip is red copper. Red copper has bigger thermal conductivity, further increases the cooling performance to reflecting optics and the laser apparatus end installing this reflecting optics.
As the preferred version of the present invention, between the projection of described conducting strip and described reflecting optics, it is provided with binding agent. Owing to the hardness of conducting strip and reflecting optics is all higher, it is difficult to ensure that conducting strip and reflecting optics fit tightly, thus affect the cooling performance of reflecting optics, between the projection and reflecting optics of conducting strip, binding agent is set, fill up the fine clearance between conducting strip and reflecting optics, what make that the heat on reflecting optics can be good be delivered on conducting strip, it is to increase to the cooling performance of reflecting optics and the laser apparatus end installing this reflecting optics.
As the preferred version of the present invention, described cooling fluid is cooling oil. Cooling oil has good thermal conduction capability, further increases the cooling performance to reflecting optics and the laser apparatus end installing this reflecting optics.
As the preferred version of the present invention, described cover shell is stupalith. Owing to stupalith has good thermal conduction capability, thus further improve the cooling performance to reflecting optics; Meanwhile, owing to stupalith has good insulating property, so adopting stupalith as cover shell, it also avoid the high pressure of electrode in laser apparatus to the danger of external discharge.
As the preferred version of the present invention, described cover shell is alumina-ceramic. Alumina-ceramic has good thermal conduction capability, it is to increase to the cooling performance of reflecting optics and the laser apparatus end installing this reflecting optics.
As the preferred version of the present invention, described cover shell is magnesia ceramics. Magnesia ceramics has good thermal conduction capability, further increases the cooling performance to reflecting optics and the laser apparatus end installing this reflecting optics.
As the preferred version of the present invention, described cover shell is beryllium oxide ceramics. Beryllium oxide ceramics has good thermal conduction capability, further increases the cooling performance to reflecting optics and the laser apparatus end installing this reflecting optics.
As the preferred version of the present invention, described cover shell is yttrium. Yttrium has good thermal conduction capability, further increases the cooling performance to reflecting optics and the laser apparatus end installing this reflecting optics.
The carbon dioxide laser of the band fluid cooling jacket of the present invention, in the laser apparatus end installing reflecting optics, ceramic jacket shell is set, the laser apparatus end of reflecting optics will be installed by ceramic jacket shell, reflecting optics and the conducting strip being arranged on reflecting optics are sealed in cover shell, and inject cooling fluid in the closed cavity of cover shell, then refrigerating unit is set in cover shell outer end, during laser works, the temperature of the laser apparatus end of reflecting optics and this reflecting optics of installation raises, the heat of reflecting optics and the laser apparatus end installing this reflecting optics is delivered on cover shell by cooling fluid rapidly, the refrigerating unit cooling jacket shell that cover shell outboard end is arranged, thus reach cooling reflecting optics and the effect of the laser apparatus end of this reflecting optics is installed,Simultaneously, owing to being provided with the protruding conducting strip in middle part with one heart at reflecting optics, when laser works, due to reflecting optics only middle portion laser beam is reflected, laser beam does not drop on the peripheral portion of reflecting optics, so reflecting optics middle portion temperature is far away higher than peripheral temperature, reflecting optics is formed bigger thermograde, at the middle part of conducting strip, projection is set, projection is adjacent to the middle part that reflecting optics temperature is higher, separated by air between reflecting optics periphery and conducting strip periphery, the heat at middle part on reflecting optics is made to be delivered on conducting strip fast, and the heat of reflecting optics periphery is by being delivered to conducting strip again after air, heat transmission is comparatively slow, heat on conducting strip is delivered on cover shell by cooling fluid, cover shell is after refrigerating unit cools, decline to a great extent with peripheral thermograde in the middle part of reflecting optics, improve reflecting optics setting accuracy and working life.
In sum, owing to have employed technique scheme, the invention has the beneficial effects as follows:
1, reflecting optics can be cooled simultaneously and the laser apparatus end of this reflecting optics is installed.
2, the thermograde on much slower reflecting optics.
3, have employed cooling oil as cooling fluid, it is to increase cooling efficiency.
4, have employed stupalith as cover shell, further increase cooling efficiency.
Accompanying drawing explanation
Fig. 1 is the sectional view of the laser apparatus reflecting optics installation end of the present invention;
Fig. 2 is the structural representation of the present invention,
Figure marks: 1-laser apparatus, 2-output optic acts, 3-reflecting optics, 4-output optic acts cooling jacket, 5-overlaps shell, 6-insulating mat, 7-cooling fluid, 8-refrigerating unit, 9-conducting strip, 10.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in detail.
In order to make the object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated. It is to be understood that specific embodiment described herein is only in order to explain the present invention, it is not intended to limit the present invention.
The carbon dioxide laser of a kind of band fluid cooling jacket as depicted in figs. 1 and 2, comprise laser apparatus 1, described laser apparatus 1 two ends are respectively arranged with output optic acts 2 and reflecting optics 3, described output optic acts 2 is provided with output optic acts cooling jacket 4, the end sleeve that described reflecting optics 3 installed by described laser apparatus 1 is provided with the unlimited cover shell 5 of the airtight the other end in one end, the insulating mat 6 for sealing gap between described cover shell 5 and described laser apparatus 1 it is provided with between the open end of described cover shell 5 and described laser apparatus 1, closed cavity between described cover shell 5 and described insulating mat 6 by described reflecting optics 3 and this reflecting optics 3 is installed laser apparatus 1 end part seal interior, it is filled with cooling fluid 7 in closed cavity between described cover shell 5 and described insulating mat 6, described cover shell 5 outboard end is provided with refrigerating unit 8, the seal gum for sealing described closed cavity also it is provided with between the open end of described cover shell 5 and described laser apparatus 1. during laser works, the temperature that the end of reflecting optics 3 installed by reflecting optics 3 and laser apparatus 1 raises, the heat of reflecting optics 3 and laser apparatus 1 end is delivered on cover shell 5 by cooling fluid 7 rapidly, the refrigerating unit 8 cooling jacket shell 5 that cover shell 5 outboard end is arranged, thus reach cooling reflecting optics 3 and the effect of laser apparatus 1 end of this reflecting optics 3 is installed, and owing to being provided with insulating mat, prevent the danger externally discharged in laser apparatus 1 end.
As the preferred version of the present invention, described reflecting optics 3 deviates from and is provided with conducting strip 9 with one heart on the end face of described laser apparatus 1, between described conducting strip 9 and described reflecting optics 3, there is gap, it is adjacent in the middle part of projection and described reflecting optics 3 in the middle part of described conducting strip 9, described conducting strip 9 is peripheral to be separated with described reflecting optics 3 periphery, it is provided with seal gum between described conducting strip 9 edge and described reflecting optics 3 edge, between described reflecting optics 3 and described conducting strip 9, forms annular cavity. due to reflecting optics 3 only middle portion laser beam is reflected, laser beam does not drop on the peripheral portion of reflecting optics 3, so reflecting optics 3 middle portion temperature is far away higher than peripheral temperature, reflecting optics 3 is formed bigger thermograde, at the middle part of conducting strip 9, projection is set, the projection of conducting strip 9 is adjacent to the middle part that reflecting optics 3 temperature is higher, separated by air between reflecting optics 3 periphery and conducting strip 9 periphery, heat in the middle part of reflecting optics 3 can be delivered on conducting strip 9 fast, and the heat of reflecting optics 3 periphery is by being delivered to conducting strip 9 again after air, heat transmission is comparatively slow, heat on conducting strip 9 is delivered on cover shell 5 by cooling fluid 7, cover shell 5 is after refrigerating unit 8 cools, decline to a great extent with peripheral thermograde in the middle part of reflecting optics 3, improve reflecting optics 3 setting accuracy and working life.
As the preferred version of the present invention, protruding and contact with described conducting strip 9 to conducting strip 9 in the middle part of described cover shell 5 inner side end. When mounted, convenient location and the installation overlapping shell 5.
As the preferred version of the present invention, described conducting strip 9 is metal conducting strip 9. Adopt metallic substance as conducting strip 9, owing to metallic substance has good thermal conductivity, it is to increase to the cooling performance of reflecting optics 3 and laser apparatus 1 end installing this reflecting optics 3.
As the preferred version of the present invention, described conducting strip 9 is red copper. Red copper has bigger thermal conductivity, further increases the cooling performance to reflecting optics 3 and laser apparatus 1 end installing this reflecting optics 3.
As the preferred version of the present invention, between the projection of described conducting strip 9 and described reflecting optics 3, it is provided with binding agent. Owing to conducting strip 9 is all higher with the hardness of reflecting optics 3, it is difficult to ensure that conducting strip 9 and reflecting optics 3 fit tightly, thus affect the cooling performance of reflecting optics 3, between the projection and reflecting optics 3 of conducting strip 9, binding agent is set, fill up the fine clearance between conducting strip 9 and reflecting optics 3, what make that the heat on reflecting optics 3 can be good be delivered on conducting strip 9, it is to increase to the cooling performance of reflecting optics 3 and laser apparatus 1 end installing this reflecting optics 3.
As the preferred version of the present invention, described cooling fluid 7 is cooling oil. Cooling oil has good thermal conduction capability, further increases the cooling performance to reflecting optics 3 and laser apparatus 1 end installing this reflecting optics 3.
As the preferred version of the present invention, described cover shell 5 is stupalith. Owing to stupalith has good thermal conduction capability, thus the further cooling performance that improve the end that reflecting optics 3 and laser apparatus 1 are installed reflecting optics 3; Meanwhile, owing to stupalith has good insulating property, so adopting stupalith as cover shell 5, it also avoid the high pressure of electrode in laser apparatus 1 to the danger of external discharge.
As the preferred version of the present invention, described cover shell 5 is alumina-ceramic.Alumina-ceramic has good thermal conduction capability, further increases the cooling performance to reflecting optics 3 and laser apparatus 1 end installing this reflecting optics 3.
As the preferred version of the present invention, described cover shell 5 is magnesia ceramics. Magnesia ceramics has good thermal conduction capability, further increases the cooling performance to reflecting optics 3 and laser apparatus 1 end installing this reflecting optics 3.
As the preferred version of the present invention, described cover shell 5 is beryllium oxide ceramics. Beryllium oxide ceramics has good thermal conduction capability, further increases the cooling performance to reflecting optics 3 and laser apparatus 1 end installing this reflecting optics 3.
As the preferred version of the present invention, described cover shell 5 is yttrium. Yttrium has good thermal conduction capability, further increases the cooling performance to reflecting optics 3 and laser apparatus 1 end installing this reflecting optics 3.
The carbon dioxide laser of the band fluid cooling jacket of the present invention, cover shell 5 is set in laser apparatus 1 end installing reflecting optics 3, laser apparatus 1 end of reflecting optics 3 will be installed by cover shell 5, reflecting optics 3 and the conducting strip 9 being arranged on reflecting optics 3 are sealed in cover shell 5, and inject cooling fluid 7 in the closed cavity of cover shell 5, then refrigerating unit 8 is set in cover shell 5 outer end, when laser apparatus 1 works, the temperature of laser apparatus 1 end of reflecting optics 3 and this reflecting optics 3 of installation raises, the heat of reflecting optics 3 and laser apparatus 1 end is delivered on cover shell 5 by cooling fluid 7 rapidly, the refrigerating unit 8 cooling jacket shell 5 that cover shell 5 outboard end is arranged, thus reach cooling reflecting optics 3 and the effect of laser apparatus 1 end of this reflecting optics 3 is installed, simultaneously, owing to being provided with the protruding conducting strip 9 in middle part with one heart at reflecting optics 3, when laser apparatus 1 works, due to reflecting optics 3 only middle portion laser beam is reflected, laser beam does not drop on the peripheral portion of reflecting optics 3, so reflecting optics 3 middle portion temperature is far away higher than peripheral temperature, reflecting optics 3 is formed bigger thermograde, at the middle part of conducting strip 9, projection is set, the projection of conducting strip 9 is adjacent to the middle part that reflecting optics 3 temperature is higher, separated by air between reflecting optics 3 periphery and conducting strip 9 periphery, heat in the middle part of reflecting optics 3 can be delivered on conducting strip 9 fast, and the heat of reflecting optics 3 periphery is by being delivered to conducting strip 9 again after air, heat transmission is comparatively slow, heat on conducting strip 9 is delivered on cover shell 5 by cooling fluid 7, cover shell 5 is after refrigerating unit 8 cools, decline to a great extent with peripheral thermograde in the middle part of reflecting optics 3, improve reflecting optics 3 setting accuracy and working life.
All any amendment, equivalent replacement and improvement etc. done within the spirit and principles in the present invention, all should be included within protection scope of the present invention.
Claims (9)
1. the carbon dioxide laser of a band fluid cooling jacket, comprise laser apparatus, described laser apparatus two ends are respectively arranged with output optic acts and reflecting optics, described output optic acts is provided with output optic acts cooling jacket, it is characterized in that, the end sleeve that described reflecting optics installed by described laser apparatus is provided with the unlimited cover shell of the airtight the other end in one end, the insulating mat for sealing gap between described cover shell and described laser apparatus it is provided with between the open end of described cover shell and described laser apparatus, in described reflecting optics and the laser apparatus end of installing this reflecting optics are sealed in by the closed cavity between described cover shell and described insulating mat, it is filled with cooling fluid in closed cavity between described cover shell and described insulating mat, described cover shell outboard end is provided with refrigerating unit, the seal gum for sealing described closed cavity also it is provided with between the open end of described cover shell and described laser apparatus, described reflecting optics deviates from and is provided with conducting strip on the end face of described laser apparatus with one heart, between described conducting strip and described reflecting optics, there is gap, it is adjacent in the middle part of projection and described reflecting optics in the middle part of described conducting strip, it is provided with seal gum between described conducting strip edge and described reflecting optics edge, annular cavity is formed between described reflecting optics and described conducting strip.
2. the carbon dioxide laser of band fluid cooling jacket according to claim 1, it is characterised in that, protruding and contact with described conducting strip to conducting strip in the middle part of described cover shell inner side end.
3. the carbon dioxide laser of band fluid cooling jacket according to claim 2, it is characterised in that, described conducting strip is metal conducting strip.
4. the carbon dioxide laser of band fluid cooling jacket according to claim 3, it is characterised in that, described conducting strip is red copper.
5. the carbon dioxide laser of band fluid cooling jacket according to claim 4, it is characterised in that, it is provided with binding agent between the projection of described conducting strip and described reflecting optics.
6. the carbon dioxide laser of band fluid cooling jacket according to claim 5, it is characterised in that, described cooling fluid is cooling oil.
7. the carbon dioxide laser of band fluid cooling jacket according to claim 1-6 any one, it is characterised in that, described cover shell is stupalith.
8. the carbon dioxide laser of band fluid cooling jacket according to claim 7, it is characterised in that, described cover shell is alumina-ceramic.
9. the carbon dioxide laser of band fluid cooling jacket according to claim 7, it is characterised in that, described cover shell is beryllium oxide ceramics.
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CN103414092A (en) * | 2013-08-09 | 2013-11-27 | 殷可翔 | Reflecting window for carbon dioxide laser |
CN105226487A (en) * | 2015-10-26 | 2016-01-06 | 惠州市杰普特电子技术有限公司 | Laser scanning device |
CN107910738A (en) * | 2017-12-21 | 2018-04-13 | 成都微深科技有限公司 | A kind of coolant jacket for laser output optic acts |
CN111129918A (en) * | 2019-12-09 | 2020-05-08 | 南通科技职业学院 | Ceramic water cooling device for carbon dioxide laser |
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US5450435A (en) * | 1992-09-14 | 1995-09-12 | Matsushita Electric Industrial Co., Ltd. | Gas laser oscillator |
CN201167204Y (en) * | 2008-07-10 | 2008-12-17 | 襄樊祥镭激光科技有限责任公司 | Insulating sleeve for carbon dioxide laser tube reflecting lens |
CN103001105A (en) * | 2012-12-20 | 2013-03-27 | 成都微深科技有限公司 | Output lens cooling device of carbon dioxide laser |
CN203300947U (en) * | 2013-05-09 | 2013-11-20 | 成都微深科技有限公司 | Carbon dioxide laser with oil liquid cooling sleeve |
Family Cites Families (1)
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JPS5966178A (en) * | 1982-10-08 | 1984-04-14 | Matsushita Electric Ind Co Ltd | Gas laser device |
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Patent Citations (4)
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US5450435A (en) * | 1992-09-14 | 1995-09-12 | Matsushita Electric Industrial Co., Ltd. | Gas laser oscillator |
CN201167204Y (en) * | 2008-07-10 | 2008-12-17 | 襄樊祥镭激光科技有限责任公司 | Insulating sleeve for carbon dioxide laser tube reflecting lens |
CN103001105A (en) * | 2012-12-20 | 2013-03-27 | 成都微深科技有限公司 | Output lens cooling device of carbon dioxide laser |
CN203300947U (en) * | 2013-05-09 | 2013-11-20 | 成都微深科技有限公司 | Carbon dioxide laser with oil liquid cooling sleeve |
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