CN103217096B - 一种三窗口同步移相干涉仪 - Google Patents
一种三窗口同步移相干涉仪 Download PDFInfo
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CN103217096B true CN103217096B (zh) | 2016-04-20 |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN105423911B (zh) * | 2015-11-09 | 2018-02-13 | 哈尔滨工程大学 | 一种基于光栅离焦的共路数字全息显微装置与方法 |
CN105467609B (zh) * | 2016-01-15 | 2017-12-15 | 南开大学 | 一种基于沃拉斯顿棱镜的空间角分复用全息术的参考光分束方法及其专用装置 |
CN106643520A (zh) * | 2016-12-16 | 2017-05-10 | 哈尔滨工业大学深圳研究生院 | 一种用于光栅位移测量系统的位移计算方法 |
CN108180833A (zh) * | 2018-01-08 | 2018-06-19 | 哈尔滨工程大学 | 基于分光瞳的反射式同步相移数字全息装置与方法 |
CN108225182A (zh) * | 2018-01-08 | 2018-06-29 | 哈尔滨工程大学 | 基于分光瞳的反射式相移数字全息装置与方法 |
Citations (6)
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JP2008157710A (ja) * | 2006-12-22 | 2008-07-10 | Naohiro Tanno | 光コヒーレンストモグラフィー装置 |
CN102538986A (zh) * | 2012-01-05 | 2012-07-04 | 哈尔滨工程大学 | 基于三窗口的共光路干涉检测方法与装置 |
CN102914257A (zh) * | 2012-09-29 | 2013-02-06 | 哈尔滨工程大学 | 分光同步移相干涉显微检测装置及检测方法 |
CN102914256A (zh) * | 2012-09-29 | 2013-02-06 | 哈尔滨工程大学 | 基于正交双光栅的同步移相干涉检测装置及检测方法 |
CN102914259A (zh) * | 2012-09-29 | 2013-02-06 | 哈尔滨工程大学 | 基于分光同步移相的干涉检测装置及检测方法 |
CN102954758A (zh) * | 2012-10-30 | 2013-03-06 | 哈尔滨工程大学 | 基于同步载频移相的干涉检测装置与检测方法 |
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US7466426B2 (en) * | 2005-12-14 | 2008-12-16 | General Electric Company | Phase shifting imaging module and method of imaging |
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Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2008157710A (ja) * | 2006-12-22 | 2008-07-10 | Naohiro Tanno | 光コヒーレンストモグラフィー装置 |
CN102538986A (zh) * | 2012-01-05 | 2012-07-04 | 哈尔滨工程大学 | 基于三窗口的共光路干涉检测方法与装置 |
CN102914257A (zh) * | 2012-09-29 | 2013-02-06 | 哈尔滨工程大学 | 分光同步移相干涉显微检测装置及检测方法 |
CN102914256A (zh) * | 2012-09-29 | 2013-02-06 | 哈尔滨工程大学 | 基于正交双光栅的同步移相干涉检测装置及检测方法 |
CN102914259A (zh) * | 2012-09-29 | 2013-02-06 | 哈尔滨工程大学 | 基于分光同步移相的干涉检测装置及检测方法 |
CN102954758A (zh) * | 2012-10-30 | 2013-03-06 | 哈尔滨工程大学 | 基于同步载频移相的干涉检测装置与检测方法 |
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Inventor after: Shan Mingguang Inventor after: Hao Bengong Inventor after: Zhong Zhi Inventor after: Diao Ming Inventor after: Zhang Yabin Inventor after: Dou Zheng Inventor before: Hao Bengong Inventor before: Shan Mingguang Inventor before: Zhong Zhi Inventor before: Diao Ming Inventor before: Zhang Yabin Inventor before: Dou Zheng |
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