CN103215649A - Cleaning method and cleaning equipment for boron diffusion furnace tube - Google Patents
Cleaning method and cleaning equipment for boron diffusion furnace tube Download PDFInfo
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- CN103215649A CN103215649A CN2013101197898A CN201310119789A CN103215649A CN 103215649 A CN103215649 A CN 103215649A CN 2013101197898 A CN2013101197898 A CN 2013101197898A CN 201310119789 A CN201310119789 A CN 201310119789A CN 103215649 A CN103215649 A CN 103215649A
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- boron diffusion
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- diffusion boiler
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Abstract
The invention provides a cleaning method and cleaning equipment for a boron diffusion furnace tube. The cleaning method for a boron diffusion furnace tube comprises the following steps of: step S10, charging a water-carrying gas in the boron diffusion furnace tube; and step S20, discharging the water-carrying gas after passing through the boron diffusion furnace tube. The cleaning equipment for the boron diffusion furnace tube comprises a gas supply device, a water-holding container, a first pipeline and a second pipeline, wherein the intake end of the first pipeline is connected with the gas supply device, and the exhaust end of the first pipeline extends to be below the liquid level of the water-holding container; and the intake end of the second pipeline is connected with the water-holding container and located above the liquid level of the water-holding container, and the exhaust end of the second pipeline is connected with the intake port of the boron diffusion furnace tube. With the adoption of the cleaning method and cleaning equipment for the boron diffusion furnace tube provided by the invention, the boron diffusion furnace tube can be rapidly and conveniently cleaned.
Description
Technical field
The present invention relates to boron diffusion Technology field, in particular to a kind of cleaning method and cleaning equipment thereof of boron diffusion boiler tube.
Background technology
At present, N type crystal silicon battery is inefficient high with its cost, more and more is subjected to the attention in market.In the process of making N type crystal silicon battery, boron diffusion operation (N type silicon chip forms the P/N knot in the diffusion rear surface) is a link important in the production process.
In above-mentioned operation, need in the boron diffusion boiler tube to feed to carry the nitrogen of liquid boride and the boron diffusion boiler tube heated and realize.Therefore, boron diffusion boiler tube and the container that is contained with liquid boride are passed through pipe connection.Can obtain the above-mentioned nitrogen that carries liquid boride by in the container of liquid boride, feeding nitrogen.The pipeline that feeds nitrogen need stretch to below the liquid level of liquid boride, and maintains a certain distance between the junction of pipeline and container need and the liquid level.
After the boron diffusion operation finished, the boron diffusion furnace wall can be stained with and contain boron oxide compound, because the boron diffusion boiler tube is Quartz stove tube mostly, these contain boron oxide compound Quartz stove tube is had erosion action.To contain the erosion action of boron oxide compound in order reducing, to need the staff regularly the boron diffusion boiler tube to be cleaned the boron diffusion boiler tube.
The mode of the cleaning boron diffusion boiler tube of prior art is more loaded down with trivial details, particularly to boiler tube cooling and these two steps of dismounting boiler tube.There is following shortcoming in above-mentioned boron diffusion boiler tube purging method:
1, time of needing of boron diffusion boiler tube cooling longer, approximately 6-8 hour, reduced the utilization ratio of equipment in the unit time.
2, minimum 4 workmans of boron diffusion boiler tube needs of dismounting, and easy disassembling cause the breakage of boron diffusion boiler tube, and these may all can increase production cost.
3, the boron diffusion boiler tube through repeatedly dismounting can't use.
Summary of the invention
The present invention aims to provide a kind of cleaning method and cleaning equipment thereof of the boron diffusion boiler tube of can be apace, easily the boron diffusion boiler tube being cleaned.
To achieve these goals, according to an aspect of the present invention, provide a kind of cleaning method of boron diffusion boiler tube, may further comprise the steps: step S10: in the boron diffusion boiler tube, fed and take the aqueous vapor body; Step S20: discharge through taking the aqueous vapor body behind the boron diffusion boiler tube.
Further, taking the aqueous vapor body is the gas that carries water vapour.
Further, take the aqueous vapor body for taking water nitrogen.
Further, in step S10, the boron diffusion boiler tube remains on more than 100 ℃.
Further, in step S10, make the inside of boron diffusion boiler tube form negative pressure.
According to a further aspect in the invention, provide a kind of cleaning equipment of boron diffusion boiler tube, having comprised: air feeder; Water container; First pipeline, inlet end is connected with air feeder, and the outlet side of first pipeline extends to below the liquid level of water container; Second pipeline, inlet end are connected with water container and are positioned at more than the liquid level of water container, and the outlet side of second pipeline is connected with the inlet mouth of boron diffusion boiler tube.
Further, cleaning equipment of the present invention also comprises first heating unit that is used to heat water container.
Further, cleaning equipment of the present invention also comprises second heating unit that is used to heat the boron diffusion boiler tube.
Further, cleaning equipment of the present invention also comprises the pneumatic pump that is used to make the inner formation of boron diffusion boiler tube negative pressure.
Further, cleaning equipment of the present invention also comprises the collection device that is connected with the air outlet of boron diffusion boiler tube, and pneumatic pump is arranged on the collection device.
Use technical scheme of the present invention, utilize to contain boron oxide compound characteristic soluble in water, in the boron diffusion boiler tube, feed and take the aqueous vapor body, the boron oxide compound (for example boron oxide) that contains on the boron diffusion boiler tube inwall is dissolved in the moisture of taking the aqueous vapor body.Make to be dissolved with the aqueous vapor body of taking that contains boron oxide compound and to discharge the boron diffusion boiler tube, and then, removed the boron oxide compound that contains in the boron diffusion boiler tube.Cleaning method of the present invention need not the dismounting of boron diffusion boiler tube can be carried out apace the boron diffusion boiler tube, cleaned easily.
Description of drawings
The Figure of description that constitutes the application's a part is used to provide further understanding of the present invention, and illustrative examples of the present invention and explanation thereof are used to explain the present invention, do not constitute improper qualification of the present invention.In the accompanying drawings:
Fig. 1 shows the schematic flow sheet according to the embodiment of the cleaning method of boron diffusion boiler tube of the present invention; And
Fig. 2 shows the perspective structure synoptic diagram according to the embodiment of the cleaning equipment of boron diffusion boiler tube of the present invention.
Reference numeral among the above-mentioned figure is as follows:
1, boron diffusion boiler tube; 10, air feeder; 20, water container; 21, liquid level; 30, first pipeline; 40, second pipeline; 50, collection device.
Embodiment
Need to prove that under the situation of not conflicting, embodiment and the feature among the embodiment among the application can make up mutually.Describe the present invention below with reference to the accompanying drawings and in conjunction with the embodiments in detail.
As shown in Figure 1, the cleaning method of the boron diffusion boiler tube of present embodiment may further comprise the steps:
Step S10: in the boron diffusion boiler tube, feed and take the aqueous vapor body.Gas is fed to the water surface, be defined as after above-mentioned gas is emerged from water again and take the aqueous vapor body.Utilization contains boron oxide compound characteristic soluble in water, and the boron oxide compound (for example boron oxide) that contains on the boron diffusion boiler tube inwall is dissolved in the moisture of taking the aqueous vapor body.
Step S20: discharge through taking the aqueous vapor body behind the boron diffusion boiler tube, can directly be disposed in the air through the aqueous vapor body of taking that contains boron oxide compound that is dissolved with behind the boron diffusion boiler tube.Thereby make that being dissolved with the aqueous vapor body of taking that contains boron oxide compound discharges the boron diffusion boiler tube, to realize removing the boron oxide compound that contains in the boron diffusion boiler tube.The cleaning method of present embodiment need not the dismounting of boron diffusion boiler tube can be cleaned quickly and easily to the boron diffusion boiler tube.The aqueous vapor body of taking that contains boron oxide compound can certainly be reclaimed, can reclaim by collection device is set.
In the present embodiment, taking the aqueous vapor body is the nitrogen that carries water vapour.The water content of gas of carrying water vapour in the unit volume is bigger than the water content of taking the aqueous vapor body, has improved the effect that dissolving contains boron oxide compound, has accelerated dissolution rate.Select for use nitrogen to be because the nitrogen cost is low, and adopt nitrogen mostly in the boron diffusion technology, take conveniently.Certainly, one skilled in the art will appreciate that the gas that also can adopt other to use always.
In the present embodiment, feed when taking the aqueous vapor body in the boron diffusion boiler tube, the boron diffusion boiler tube remains on more than 100 ℃.The high temperature of boron diffusion boiler tube raises the aqueous vapor body temperature degree of taking that feeds in the boron diffusion boiler tube, owing to contain the easier hot water that is dissolved in of boron oxide compound, therefore, it is better that pyritous is taken the cleaning effect of aqueous vapor body.
In the present embodiment, in the boron diffusion boiler tube, feed when taking the aqueous vapor body, make the inside of boron diffusion boiler tube form negative pressure.Form negative pressure and can make that to take the aqueous vapor body more smooth and easy in the circulation of boron diffusion boiler tube.Take the aqueous vapor body and to contain the dissolving of boron oxide compound more abundant in order to make, the negative pressure in the boron diffusion boiler tube is preferably 0 to-30Pa.Negative pressure is big more, and to take the aqueous vapor body also fast flowing of boron diffusion boiler tube, insufficient with the dissolving that contains boron oxide compound.
As shown in Figure 2, the embodiment according to the cleaning equipment of boron diffusion boiler tube 1 of the present invention comprises: air feeder 10, water container 20, first pipeline 30, second pipeline 40.The inlet end of first pipeline 30 is connected with air feeder 10, and the outlet side of first pipeline 30 extends to the liquid level of water container 20 below 21.The inlet end of second pipeline 40 is connected with water container 20 and the liquid level that is positioned at water container 20 more than 21, and the outlet side of second pipeline 40 is connected with the inlet mouth of boron diffusion boiler tube 1.Flow out in the water container 20 and flow into gases in second pipeline 40 and be defined as and take the aqueous vapor body, that is to say, the gas that feeds second pipeline 40 with respect to first pipeline 30 for taking the aqueous vapor body.In order to prevent gas leakage, water container 20 is preferably sealed structure.Operation for convenience only needs to change the container that is contained with liquid boride in the former boron diffusion technology into water container 20 and gets final product.
The cleaning equipment of present embodiment also comprises the first heating unit (not shown) that is used to heat water container 20, so that the water boiling produces water vapour in the water container 20.
The cleaning equipment of present embodiment also comprises the second heating unit (not shown) that is used to heat boron diffusion boiler tube 1, so that boron diffusion boiler tube 1 keeps high temperature.Temperature in the boron diffusion boiler tube 1 is preferably more than 500 ℃.
The cleaning equipment of present embodiment also comprises the pneumatic pump (not shown) that is used to make boron diffusion boiler tube 1 inner formation negative pressure.As long as the pressure in the boron diffusion boiler tube 1 less than the pressure of air feeder 10 so that in the air feeder 10 gas flow into boron diffusion boiler tube 1 smoothly, can be referred to as the boron diffusion boiler tube 1 inner negative pressure that forms.
Leak for preventing to have the aqueous vapor body of taking that contains boron oxide compound, the cleaning equipment of present embodiment also comprises the collection device 50 that is connected with the air outlet of cleaning boron diffusion boiler tube 1.Pneumatic pump is arranged on the collection device 50 so that collection device 50 all forms negative pressure with boron diffusion boiler tube 1 with respect to air feeder 10.When the temperature in the boron diffusion boiler tube 1 more than 100 ℃ the time, in boron diffusion boiler tube 1, discharge normal temperature air or the lower air of temperature taken the aqueous vapor body chance collection device 50, moisture and then the condensation taken in the aqueous vapor body form liquid water, be dissolved with a large amount of boron oxide compounds that contains in the liquid water, collection device 50 also can reclaim above-mentioned liquid water.
The above is the preferred embodiments of the present invention only, is not limited to the present invention, and for a person skilled in the art, the present invention can have various changes and variation.Within the spirit and principles in the present invention all, any modification of being done, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. the cleaning method of a boron diffusion boiler tube is characterized in that, may further comprise the steps:
Step S10: in the boron diffusion boiler tube, feed and take the aqueous vapor body;
Step S20: discharge through the described aqueous vapor body of taking behind the described boron diffusion boiler tube.
2. cleaning method according to claim 1 is characterized in that, the described aqueous vapor body of taking is the gas that carries water vapour.
3. cleaning method according to claim 1 is characterized in that, the described aqueous vapor body of taking is for taking water nitrogen.
4. cleaning method according to claim 1 is characterized in that, in described step S10, described boron diffusion boiler tube remains on more than 100 ℃.
5. cleaning method according to claim 1 is characterized in that, in described step S10, makes the inside of described boron diffusion boiler tube form negative pressure.
6. the cleaning equipment of a boron diffusion boiler tube is characterized in that, comprising:
Air feeder (10);
Water container (20);
First pipeline (30), inlet end is connected with described air feeder (10), and the outlet side of described first pipeline (30) extends to below the liquid level (21) of described water container (20);
Second pipeline (40), inlet end is with more than described water container (20) is connected and is positioned at the liquid level (21) of described water container (20), and the outlet side of described second pipeline (40) is connected with the inlet mouth of boron diffusion boiler tube (1).
7. cleaning equipment according to claim 6 is characterized in that, also comprises first heating unit that is used to heat described water container (20).
8. cleaning equipment according to claim 6 is characterized in that, also comprises second heating unit that is used to heat described boron diffusion boiler tube (1).
9. cleaning equipment according to claim 6 is characterized in that, also comprises being used to make the inner pneumatic pump that forms negative pressure of described boron diffusion boiler tube (1).
10. cleaning equipment according to claim 9 is characterized in that, also comprises the collection device (50) that is connected with the air outlet of described boron diffusion boiler tube (1), and described pneumatic pump is arranged on the described collection device (50).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013101197898A CN103215649A (en) | 2013-04-08 | 2013-04-08 | Cleaning method and cleaning equipment for boron diffusion furnace tube |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013101197898A CN103215649A (en) | 2013-04-08 | 2013-04-08 | Cleaning method and cleaning equipment for boron diffusion furnace tube |
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| CN103215649A true CN103215649A (en) | 2013-07-24 |
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| CN2013101197898A Pending CN103215649A (en) | 2013-04-08 | 2013-04-08 | Cleaning method and cleaning equipment for boron diffusion furnace tube |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108728901A (en) * | 2018-06-15 | 2018-11-02 | 常州亿晶光电科技有限公司 | A kind of maintenance method of diffusion furnace tube |
| CN113008037A (en) * | 2019-12-20 | 2021-06-22 | 中国电子科技集团公司第四十八研究所 | Furnace door system of boron diffusion furnace |
| CN113380677A (en) * | 2021-07-15 | 2021-09-10 | 青岛赛瑞达电子科技有限公司 | Process chamber with water vapor evaporation system |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101327487A (en) * | 2007-06-21 | 2008-12-24 | 中芯国际集成电路制造(上海)有限公司 | Method and system for cleaning boiler tube |
| CN101522087A (en) * | 2006-10-07 | 2009-09-02 | Tbw工业有限公司 | Vacuum line clean-out separator system |
| CN102784775A (en) * | 2012-08-23 | 2012-11-21 | 英利能源（中国）有限公司 | Method for cleaning boron-diffusion furnace tubes |
-
2013
- 2013-04-08 CN CN2013101197898A patent/CN103215649A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101522087A (en) * | 2006-10-07 | 2009-09-02 | Tbw工业有限公司 | Vacuum line clean-out separator system |
| CN101327487A (en) * | 2007-06-21 | 2008-12-24 | 中芯国际集成电路制造(上海)有限公司 | Method and system for cleaning boiler tube |
| CN102784775A (en) * | 2012-08-23 | 2012-11-21 | 英利能源（中国）有限公司 | Method for cleaning boron-diffusion furnace tubes |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108728901A (en) * | 2018-06-15 | 2018-11-02 | 常州亿晶光电科技有限公司 | A kind of maintenance method of diffusion furnace tube |
| CN113008037A (en) * | 2019-12-20 | 2021-06-22 | 中国电子科技集团公司第四十八研究所 | Furnace door system of boron diffusion furnace |
| CN113380677A (en) * | 2021-07-15 | 2021-09-10 | 青岛赛瑞达电子科技有限公司 | Process chamber with water vapor evaporation system |
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Application publication date: 20130724 |