CN103206933B - Measure method for correcting coordinate and 3-D measurer - Google Patents
Measure method for correcting coordinate and 3-D measurer Download PDFInfo
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- CN103206933B CN103206933B CN201310010185.XA CN201310010185A CN103206933B CN 103206933 B CN103206933 B CN 103206933B CN 201310010185 A CN201310010185 A CN 201310010185A CN 103206933 B CN103206933 B CN 103206933B
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- 238000000034 method Methods 0.000 title claims description 29
- 238000005259 measurement Methods 0.000 claims abstract description 197
- 238000012937 correction Methods 0.000 claims abstract description 72
- 238000000691 measurement method Methods 0.000 claims abstract description 24
- 238000004364 calculation method Methods 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 2
- 238000007689 inspection Methods 0.000 claims 2
- 230000007246 mechanism Effects 0.000 description 14
- 230000004048 modification Effects 0.000 description 11
- 238000012986 modification Methods 0.000 description 11
- 230000008859 change Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000002360 preparation method Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/045—Correction of measurements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/004—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points
- G01B5/008—Measuring arrangements characterised by the use of mechanical techniques for measuring coordinates of points using coordinate measuring machines
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
- G01B5/0016—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to weight
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F15/00—Digital computers in general; Data processing equipment in general
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- Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Computer Hardware Design (AREA)
- General Engineering & Computer Science (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
One kind measurement method for correcting coordinate, it corrects the measurement coordinate for the measurement object being placed on base, wherein the measurement method for correcting coordinate includes weight obtaining step, position acquisition step and aligning step.Weight obtaining step obtains the information relevant with the weight for measuring object.Position acquisition step obtains the information relevant with measuring position of the object on base.Weight and position correction of the aligning step based on measurement object measure the measurement coordinate of object.
Description
The cross reference of related application
This application claims under the 35U.S.C § 119 for the Japanese publication No.2012-005309 for being filed on January 13rd, 2012
Priority, it is open clearly by quoting overall is herein incorporated.
Technical field
The present invention relates to one kind measurement method for correcting coordinate and 3-D measurer.
Background technology
Traditionally, as improving the three-dimensional deformed when the measurement object of weight is placed on base along with base
There is provided measurement method for correcting coordinate for the method that measurement accuracy in measuring appliance declines（For example, being announced referring to Japanese Patent Publication
No.2005-214943）.The measurement method for correcting coordinate that Japanese Patent Publication announces No.2005-214943 comprises the following steps
（1）Arrive（3）：
（1）When various heavy measurement objects have been placed on 3-D measurer, the geometric error of 3-D measurer is determined,
The step of correction parameter being obtained from the measurement result of each measurement weight of object, and stores correction parameter in memory.
（2）The step of inputting the weight for the measurement object to be measured.
（3）Read from memory and correspond to step（2）The correction parameter of the weight of the measurement object of middle input, and school
The measurement coordinate of the measurement object just measured.
When placing the measurement object of weight on base, the mode of base deformation depends on the weight of measurement object, and also
Depending on position of the measurement object on base.However, announcing No.2005-214943 measurement coordinate in Japanese Patent Publication
In bearing calibration, only notice is placed in the weight of measurement object, and utilizes the school for the weight for corresponding only to measure object
The measurement coordinate of the positive parameter correction measurement object to be measured.Specifically, when measuring change in location of the object on base, bottom
The mode of seat deformation also changes.Consequently, because using the correction parameter correction measurement coordinate for the weight for corresponding only to measure object,
So measurement accuracy can not be improved fully.
The content of the invention
The nonrestrictive feature of the present invention, which is provided, can improve the measurement method for correcting coordinate of measurement accuracy, and three-dimensional
Measuring appliance.
The measurement method for correcting coordinate of the present invention is the measurement of the measurement coordinate for the measurement object that correction is placed on base
Method for correcting coordinate.The weight that the measurement method for correcting coordinate includes obtaining the information relevant with the weight of measurement object is obtained
Step；Obtain the position acquisition step of the information relevant with measuring position of the object on base；And based on measurement object
The aligning step of the measurement coordinate of weight and position correction measurement object.
In the present invention, the measurement coordinate of weight obtaining step, position acquisition step and aligning step correction measurement object.
Therefore, it is possible to the weight not only according to measurement object, always according to the change of the base of the position corresponding to measurement object on base
Shape measures the measurement coordinate of object to correct.Therefore, it is possible to correctly speculate the deformation of base and can fully improve survey
Measure the measurement accuracy of object.
In the measurement method for correcting coordinate of the present invention, multiple weight sensors are preferably attached to base, weight is passed
Load of the sensor detection from the measurement object being placed on base.Weight obtaining step passes through based on from multiple weight sensors
The detected value of each calculate the weight of measurement object, preferably obtain the relevant information of weight with measurement object.Position
Obtaining step is by the placement location based on multiple weight sensors and the detected value of each from multiple weight sensors
The position of measurement object is calculated, the information relevant with the position for measuring object is preferably obtained.
In control device（Such as PC（Personal computer））Or any other electronic processing equipment execution weight obtaining step,
When position acquisition step and aligning step, control device can perform procedure below（A）With（B）In one be used as weight obtain step
Rapid and position acquisition step：
（A）In weight obtaining step and position acquisition step, control device obtains user via loader（Such as mouse
Or keyboard）Each relevant information in the position of weight input, with measuring object and measurement object on base.
（B）In weight obtaining step, control device is based on each from the multiple weight sensors for being attached to base
Detected value calculate measurement object weight.Similarly, in the obtaining step of position, control device is based on multiple weight sensors
Placement location and detected value from each calculate position of the measurement object on base.
In the present invention, control device implementation procedure（B）.Therefore, with control device implementation procedure（A）Configuration compare
Compared with the operation on the loader of the weight information relevant with position of the user input with measuring object can be omitted.Therefore improve
Convenience.
In the measurement method for correcting coordinate of the present invention, aligning step preferably includes Deformation calculation code
（protocol）With measurement coordinates correction code.Weight and position of the Deformation calculation code based on measurement object are calculated on base
Each position at base deflection.Measure the measurement of deflection correction measurement object of the coordinates correction code based on base
Coordinate.
In control device（Such as PC）When performing weight obtaining step, position acquisition step and aligning step, control device
Executable procedure below（C）With（D）One of be used as obtaining step.
（C）As preliminary preparation, the weight for the measurement object being placed on base and position be changed to various weight with
Position, then calculates the correction parameter of the measurement coordinate for being used to correct measurement object in each case, and for measurement
Each weight of object and position store each correction parameter in memory.In addition, in weight obtaining step and position acquisition
After step, control device reads the weight corresponding to measurement object and the correction parameter of position from memory, is next based on
The measurement coordinate of correction parameter correction measurement object.
（D）After weight obtaining step and position acquisition step, weight and position of the control device based on measurement object
Calculate the deflection of the base at each position on base.Then, based on the deflection calculated, control device correction measurement
The measurement coordinate of object.
In the present invention, control device implementation procedure（D）.Therefore, with control device implementation procedure（C）Configuration compare
Compared with, it is not necessary to it is preliminary to prepare, and the time and efforts involved when performing measurement method for correcting coordinate can be greatly reduced.
In the measurement method for correcting coordinate of the present invention, aligning step is preferably read from memory corresponds to measurement object
Weight and position correction parameter, be next based on correction parameter correction measurement object measurement coordinate.
In the present invention, control device implementation procedure（C）.Therefore, with control device implementation procedure（D）Configuration compare
Compared with, it is not necessary to the deformation that control device calculates the base at each position on base is taken temperature, and therefore, it is possible to greatly reduce
Processing load on control device.
The 3-D measurer of the present invention is the 3-D measurer for the measurement object that measurement is placed on base.3-D measurer
Including weight getter, location acquirer and adjuster.Weight getter obtains the information relevant with the weight for measuring object.Position
Put getter and obtain the information relevant with measuring position of the object on base.Weight and position of the adjuster based on measurement object
The measurement coordinate of correction measurement object.In the present invention, 3-D measurer is to perform measurement method for correcting coordinate described above
Equipment, and therefore enjoy and the similar effect and result of measurement method for correcting coordinate described above.
Brief description of the drawings
It is used as the nonrestrictive example of the example embodiment of the present invention, multiple accompanying drawings with reference to shown in, in detailed below
The present invention is further described in description, wherein through several views of accompanying drawing, same reference number represents same part, and
And wherein：
Fig. 1 is the block diagram for the illustrative arrangement for showing the 3-D measurer according to the first embodiment of the present invention；
Fig. 2 is the general frame view for the main body for showing the 3-D measurer according to the first embodiment of the present invention；
Fig. 3 is the lateral frame view of a part for the main body of the 3-D measurer according to the first embodiment of the present invention；
Fig. 4 is the frame view for showing the example placement location according to the weight sensor of the first embodiment of the present invention；
Fig. 5 is flow chart of the description according to the measurement method for correcting coordinate of the first embodiment of the present invention；
Fig. 6 is gradient of the description according to the first embodiment of the present invention（pitch）Knots modification frame view；And
Fig. 7 is the block diagram for the illustrative arrangement for showing 3-D measurer according to the second embodiment of the present invention.
Embodiment
The details being shown in which is the purpose of the illustrative discussion as an example and only for embodiments of the invention,
And the content for the description for being to provide for being believed to be in terms of most useful and principle of the invention that is being readily appreciated that and design and
Present.At this point, the more detailed structure of the invention shown than needed for the basic comprehension for the present invention is not made
The trial of details, using making it will be apparent to those skilled in that the accompanying drawing for how being practically carrying out the form of the present invention is carried out
Description.
【First embodiment】
The first embodiment of the present invention is described below with reference to accompanying drawing.
【The general introduction configuration of 3-D measurer】
Fig. 1 is the block diagram for the illustrative arrangement for showing the 3-D measurer 1 according to the first embodiment of the present invention.Such as Fig. 1
Shown, 3-D measurer 1 includes：3-D measurer main body 2；Motion controller 3, it carries out the driving of 3-D measurer main body 2
Control；Operator 4, it provides order manually to operate 3-D measurer main body via action bars etc. to motion controller 3
2；And master computer 5, it provides predetermined order to motion controller 3 and performs calculating process.
【The configuration of 3-D measurer main body】
Fig. 2 is the general frame view for showing 3-D measurer main body 2.In addition, in fig. 2, upwardly direction is referred to as+
Z-direction and two axles perpendicular to Z axis are known respectively as X-axis and Y-axis.Subsequent accompanying drawing has used similar nomenclature.
As shown in Fig. 2 3-D measurer main body 2 includes detector（probe）21st, drive mechanism 22 and thereon erect drive mechanism 22
Base 23.Detector 21 includes being used for measurement object W spherical measurement head 211A.Drive mechanism 22 supports detector 21
Base side, and drive detector 21.
Fig. 3 is the side of a part for 3-D measurer main body 2（+ X-axis side）Frame view.Base 23 is placed thereon
Measurement object W part, and it is placed so that the upper surface of base 23 is consistent with horizontal plane.In addition, as shown in figure 3,
Multiple weight sensors 231 are disposed in the lower surface of base 23, and weight sensor 231 is detected from being placed on base 23
Object W load is measured, and the signal corresponding to detected value is exported to motion controller 3.It can come for example, by following configuration
Illustrate weight sensor 231, in the configuration, deformation（distortion）Measuring instrument is embedded into base 23 or antidetonation platform 23A（Figure
2）In so as to based in base 23 or antidetonation platform 23A deformation quantity detect come measurement object W load.
Fig. 4 is the frame view for the example placement location for showing weight sensor 231.In the present embodiment, such as Fig. 4 institutes
Show, three weight sensors 231 are placed in the lower surface of base 23.As shown in figure 4, in three weight sensors 231,
First weight sensor 231A is placed in the lower surface of base 23, in-Y-axis side and the X-direction in the middle of substantially
On position.By contrast, as shown in figure 4, the second weight sensor 231B and the 3rd weight sensor 231C are placed on base
In 23 lower surface, arranged along X-direction+Y-axis side.In addition, as shown in figure 4, first arrives 3rd sensor 231A-
The first of 231C constitutes isosceles triangle to the 3rd placement location P1-P3, the second placement location P2 and the in isosceles triangle
Three placement location P3 set up the straight line on the base to form triangle.
Drive mechanism 22 supports the base side of detector 21, and also includes enabling the skate machine that detector 21 is shifted
Structure 24 and the driver 25 by driving the driving detector 21 of sliding equipment 24.As shown in Fig. 2 sliding equipment 24 includes two branch
Post 241, beam 242, slider 243 and piston（ram）244.Two pillars 241 on base 23 from X-direction both sides along+
Z-direction extends, and provides the two pillars 241 so that they are slidably shifted along Y direction.In the present embodiment
In, as shown in figure 3, in each of two pillars 241-end of Z-direction provides air bearing 245.Such as Fig. 3 institutes
Show, air bearing 245 includes the first air cushion of discharge compressed air（air pad）Pd1 and the second air cushion Pd2.By from first
Compressed air is discharged with the second air cushion Pd1 and Pd2, two pillars 241, which are supported on, to be swum in the state of the top of base 23.
By each support beam 242 of pillar 241, and beam 242 extends along X-direction.Slider 243 is provided so as to along X
Direction of principal axis is slidably shifted on beam 242.Piston 244 is inserted in the inside of slider 243, and provides piston 244 so as to along Z
Direction of principal axis is slidably shifted in slider 243.Therefore, drive mechanism 22 is included in each direction in X, Y and Z-direction
Multiple drive rods of upper driving detector 21.Piston 244 piston 244-base end of Z-direction end support detector 21
Side.In addition, being ready for multiple different detectors, and detector 21 can be selected from these detectors and by piston 244
Support detector 21.
As shown in Fig. 1 or Fig. 2, driver 25 includes X, Y and Z axis driver 251X, 251Y and 251Z.In pillar 241
In, Y-axis driver 251Y drives-X-direction pillar 241 along Y direction.X-axis driver 251X is slided and edge on beam 242
X-direction drives slider 243.Z axis driver 251Z is slided in slider 243 and is driven piston 244 along Z-direction.
As shown in figure 1, each in X, Y and Z axis driver 251X, 251Y and 251Z includes X, Y and Z axis scale respectively
（scale）Sensor 252X, 252Y and 252Z, for detecting slider 243, each pillar 241 and each axle side of piston 244
Upward position.In addition, each in scale sensor 252 is output corresponding to slider 243, each pillar 241 and lived
The position sensor of the pulse signal of the shift amount of plug 244.
As shown in Fig. 1 or Fig. 2, detector 21 includes：Contact pilotage 211（Fig. 1）, there is side measurement head foremost at it
211A；And the supporting mechanism 212 of the bottom side of support contact pilotage 211.Supporting mechanism 212 supports contact pilotage 211 will pass through
Each side in X, Y and Z-direction offsets up contact pilotage 211 and contact pilotage 211 is positioned to predetermined position.Apply external force to
In the case of measurement head 211A（That is, in measurement head 211A contact measurement object W）, each direction in X, Y and Z-direction
On in predetermined scope allow contact pilotage 211 displacement.As shown in figure 1, supporting mechanism 212 includes being used to detect in each axle side
X-axis detector sensor 213X, Y-axis detector sensor 213Y and the Z axis detector sensor of the position of upward contact pilotage 211
213Z.In addition, similar to each in scale sensor 252, each in detector sensor 213 is that output corresponds to
The position sensor of the pulse signal of the shift amount of contact pilotage 211 on each direction of principal axis.
【The configuration of motion controller】
As shown in figure 1, motion controller 3 includes：Drive control device 31, it is in response to from operator 4 and master computer 5
One of order control driver 25；Counter 32, its pulse signals are counted；With memory 33, its storage will be by transporting
The data that movement controller 3 is used.As shown in figure 1, counter 32 includes scale counter 321, explorer count device 322 and surveyed
Measure coordinates correction device 323.Scale counter 321 is by obtaining the pulse signal exported from each in scale sensor 252
Counting determine the shift amount of sliding equipment 24.Explorer count device 322 is by obtaining from every in detector sensor 213
The counting of the pulse signal of one output determines the shift amount of detector 21.Export and counted respectively by scale to master computer 5
Sliding equipment 24 and the shift amount of detector 21 that device 321 and explorer count device 322 are determined.
Measurement coordinates correction device 323 corrects the deformation with base 23 when placing the measurement object W of weight on base 23
Measurement coordinate in error.As shown in figure 1, measurement coordinates correction device 323 includes weight getter 323A, location acquirer
323B and adjuster 323C.Weight getter 323A obtains the information relevant with the weight for measuring object W.Location acquirer 323B
Obtain the information relevant with measuring positions of the object W on base 23.
Weight and position of the adjuster 323C based on measurement object W, are corrected by master computer 5（Measure coordinate calculator 53）
The measurement object W of calculating measurement coordinate.As shown in figure 1, adjuster 323C includes correcting value calculator 323D and adjuster
323E.Weight and position based on measurement object W, correcting value calculator 323D are calculated for correcting what is calculated by master computer 5
Measure the correcting value of object W measurement coordinate.Based on the correcting value calculated by correcting value calculator 323D, adjuster 323E corrections
The measurement object W calculated by master computer 5 measurement coordinate.
【The configuration of master computer】
Master computer 5 includes CPU（CPU）And memory, and by providing predetermined to motion controller 3
Order control three-dimensional processor main body 2.As shown in figure 1, master computer 5 includes commander 51, shift amount getter 52, measurement
Coordinate calculator 53 and the memory 54 for storing the data that will be used by master computer 5.
Commander 51 provides predetermined order to the drive control device 31 of motion controller 3, to drive 3-D measurer
The sliding equipment 24 of main body 2.Specifically, commander 51 exports the position command value for driving measurement head 211A.In addition, depositing
Storage measurement object W outline data in reservoir 54.Shift amount getter 52 obtains detector 21 and drive mechanism 22（Skate machine
Structure 24）, the shift amount determined by counter 32.Now, shift amount getter 52 is based on the orthogonal seat defined by detector 21
Mark system obtains the shift amount of detector 21, and obtains drive mechanism 22 based on the orthogonal coordinate system defined by drive mechanism 22
Shift amount.
Coordinate calculator 53 is measured based on the detector 21 obtained by shift amount getter 52 and the displacement of drive mechanism 22
Amount calculates measurement object W measurement coordinate（That is, measurement head 211A position）.In addition, adjustment drive mechanism 22 shift amount with
Just in the displacement for definitely not occurring the contact pilotage 211 in supporting mechanism 212（That is, when the shift amount of detector 21 is 0）Refer to
Show measurement head 211A position.
【Measure method for correcting coordinate】
Fig. 5 is the flow chart of description measurement method for correcting coordinate.Next, the process of description measurement coordinates correction device 323
（Measure method for correcting coordinate）.In addition, hereinafter, for the ease of description, the measurement for the measurement object W being placed on base 23
By as completion, and will measurement coordinate as being calculated via measurement coordinate calculator 53.First, weight getter
323A obtains the information relevant with the weight for measuring object W（Step S1：Weight obtaining step）.In the present embodiment, weight is obtained
Take device 323A by inputting the signal exported from each weight sensor 231, be next based on from each weight sensor 231
Detected value calculates measurement object W weight, come the relevant information of the weight that obtains with measure object W.Specifically, weight getter
323A combines the detected value from each weight sensor 231 to calculate measurement object W weight P.
After step S1, location acquirer 323B obtains the information relevant with measuring positions of the object W on base 23
（Step S2：Position acquisition step）.In the present embodiment, location acquirer 323B passes through based on each weight sensor 231
First to the 3rd placement location P1-P3 and based on from each weight sensor 231 detected value calculate measurement object W the bottom of at
Position on seat 23, come the relevant information in the position that obtains with measure object W.Specifically, location acquirer 323B is from memory
Between 33 read between in Y direction, the first weight sensor 231A and second and the 3rd weight sensor 231B and 231C
Gauge is from L（Fig. 3 and 4）.Then, the first placement location P1 using the first weight sensor 231A is used as baseline, position acquisition
Detected values of the device 323B based on spacing distance L and from each weight sensor 231, calculating is extended to from the first placement location P1
In the Y direction for the placement location for measuring object W apart from a（Fig. 3 and 4）.This is calculated as measuring object W position apart from a.
For example, weight P, spacing distance L, detected value R1 to the R3 from the first to the 3rd weight sensor 231 are (for
One arrive 3rd sensor 231A-231C reaction force) and apart from a have by below equation (1) and formula (2) description pass
System.
【Formula 1】
【Formula 2】
Therefore, location acquirer 323B as used in formula（1）Described in relation, based on weight P, spacing distance L
With the detected value R1 from the first weight sensor 231A（For the first weight sensor 231A reaction force）Calculate distance
a.Alternatively, location acquirer 323B is used in formula（2）Described in relation, based on weight P, spacing distance L and from
Two and the 3rd weight sensor 231B and 231C detected value R2 and R3（For second and the 3rd weight sensor 231B and 231C
Reaction force）Calculate apart from a.
Upon step s 2, the weight P based on measurement object W（Calculate in step sl）With apart from a（In step s 2
Calculate）, the measurement coordinate that adjuster 323C corrections are calculated by measurement coordinate calculator 53（Step S3：Aligning step）.Specifically
Ground, in following steps S3A and step S3B, correcting value calculator 323D calculates the measurement coordinate for correcting measurement object W
Correcting value（The knots modification △ p of gradient）.First, correcting value calculator 323D performs the procedure below in step S3A（Deflection
Calculate code）.Specifically, correcting value calculator 323D reads the total length L 0 of base 23 in the Y-axis direction from memory 33
（Fig. 3 and 4）.Then, based on total length L 0, measure object W weight P and calculated apart from a, correcting value calculator 323D in Y
The deflection of at position y on direction of principal axis, base 23（Deflection in the Z-axis direction：Curvature（flexure）ω）, this base
In the first weight sensor 231A the first placement location P1.For example, correcting value calculator 323D uses below equation（3）Calculate
Curvature ω.In addition, in formula（3）In, E is that the Young's modulus and I of base 23 are the section second moments of base 23.
【Formula 3】
Fig. 6 is the frame view for the knots modification △ p for describing gradient.Specifically, Fig. 6 is from the side（+ X-axis side）Viewing
When, pass through the pillar 241 placed a part for the base 23 that measurement object W is deformed on base 23 and be placed on base 23
（Air bearing 245）A part frame view.In order to easily describe, Fig. 6 only shows upper surface as base 23.Connect down
Come, correcting value calculator 323D performs the procedure below in step S3B.Specifically, correcting value calculator 323D is from memory
In 33 read Y direction on, in the first air cushion Pd1（It is positioned at-Y-axis side）With the second air cushion Pd2（It is positioned at+Y-axis side）It
Between spacing distance S（Fig. 6）.Then, in pillar 241（Air bearing 245）Be positioned at from X-direction watch when position y when,
Correcting value calculator 323D calculates angle of the pillar 241 from horizontal plane based on spacing distance S and curvature ω.This angle is counted
Calculate the knots modification △ p for gradient（Fig. 6）.
For example, correcting value calculator 323D uses below equation（4）Calculate the knots modification △ p of gradient.In addition, as in Fig. 6
It is shown, in formula（4）In, ω 1 is indicated when the position of the first air cushion Pd1 in the Y direction based on the first weight sensor 231A
Put substitution formula（3）In position y when the curvature that obtains.In addition, ω 2 is indicated when the Y-axis based on the first weight sensor 231A
The position of the second air cushion Pd2 on direction substitutes into formula（3）In position y when the curvature that obtains.
【Formula 4】
After step S3B, knots modification △ p, adjuster the 323E correction based on gradient is counted by measurement coordinate calculator 53
The measurement coordinate of calculation（Step S3C：Measure coordinates correction code）.
First embodiment described above has result described below.In the present embodiment, by weight obtaining step S1,
Position acquisition step S2 and aligning step S3 correction measurement objects W measurement coordinate.Therefore, not only can be according to measurement object W
Weight, measurement object W can also be corrected according to the deformation of the base 23 in response to positions of the measurement object W on base 23
Measurement coordinate.It therefore, it can the correct measurement accuracy for deforming and can fully improving measurement object W for speculating base 23.
In the present embodiment, measurement coordinates correction device 323 is based on from the multiple weight sensors 231 for being attached to base 23
The detected value of each calculate measurement object W weight P.In addition, measurement coordinates correction device 323 is based on multiple weight sensors
The first of 231 calculates measurement object W on base 23 to the 3rd placement location P1-P3 and based on the detected value from each
Position（Apart from a）.Therefore, it is configured as obtaining for example via user via such as compared to measurement coordinates correction device 323
It is each in position of weight loader input, with measuring object W and measurement object W of mouse or keyboard on base 23
The situation of individual related information, it is convenient to omit the input operation of user and convenience can be improved.
Based on the weight P for measuring object and calibration method is sat apart from a measurements for correcting measurement object W to can also be with lower section
Method.Specifically, as preliminary preparation, the weight for the measurement object W being placed on base 23 and position are changed into various weight
And position.The correction parameter of the measurement coordinate for being used to correct measurement object in the case of each in these situations is calculated, and
Correction parameter is stored in the memory 33 to each weight and position for measuring object W.Then, in weight obtaining step S1 and position
After putting obtaining step S2, measurement coordinates correction device 323 read from memory 33 the weight P that corresponds to measurement object W and away from
Correction parameter from a.Measurement coordinates correction device 323 is next based on correction parameter correction measurement object W measurement coordinate.In this reality
Apply in example, after weight obtaining step S1 and position acquisition step S2, measurement coordinates correction device 323 is based on measurement object W's
Weight P and apart from a calculate correcting value（The knots modification △ p of gradient）, it is next based on the knots modification △ p correction measurement objects W of gradient
Measurement coordinate.Therefore, preliminary preparation described above becomes not needing, and can greatly reduce in execution measurement coordinate school
The time and efforts involved during positive process.
【Second embodiment】
Then, the second embodiment of the present invention is described.Fig. 7 is the signal for showing the 3-D measurer according to second embodiment
Property configuration block diagram.In addition, the following pair of structure similar to the structure in first embodiment give identical reference number and
Omit its detailed description.In the first embodiment, adjuster 323C（Correcting value calculator 323D）Weight based on measurement object W
P and calculate correcting value to correct measurement object W measurement coordinate apart from a.Therefore adjuster 323C is corrected based on correcting value and surveyed
Measure object W measurement coordinate.By contrast, in the present embodiment, by performing above-mentioned preliminary preparation, in the memory 33 in advance
Store the various weight P and the correction parameter of each in a for measuring object W.Then, in aligning step S3,
Adjuster 323F（Fig. 7）The weight P and the correction parameter apart from a for corresponding to measurement object W are read from memory 33, to make
Measurement object W measurement coordinate is corrected with correction parameter.In addition, for example, the generation side similar to the production method of correlation technique 1
Method（Fig. 3）Correction parameter production method can be illustrated.
According to above-mentioned second embodiment, except the result similar to first embodiment, following result is obtained.In this implementation
In example, it is not necessary to which adjuster 323F calculates correcting value so as to the weight P based on measurement object W in aligning step S3 and apart from a
Correction measurement object W measurement coordinate, therefore, it is possible to greatly reduce the processing load of master computer 5.In addition, with correlation technique 1
It is similar, when producing correction parameter during preliminary prepare, correction parameter can be calculated, wherein gradient member can not only be corrected
Element, additionally it is possible to correct other geometric errors（For example, rollover elements）.In this case, compared to first embodiment, except oblique
Spend element, additionally it is possible to correction such as rollover elements, and can further improve measurement accuracy.
The invention is not restricted to above-described embodiment, and can be included in realize modification in the range of the purpose of the present invention and
Improve.In each example, measurement object is calculated based on the detected value of each in multiple weight sensors 231
W weight P and position（Apart from a）.However, the invention is not restricted to this.User can also utilize loader（Such as mouse or key
Disk）Input weight P and position（Apart from a）.In each example, the quantity and placement location of weight sensor 231 are not limited to
The number and placement location described in various embodiments, and can have some other quantity and placement location.It is real first
Apply in example, only calculate gradient element（The knots modification △ p of gradient）As correcting value to correct measurement object W measurement coordinate.
However, the invention is not restricted to this.For example, except gradient element, rollover elements can also be calculated, and can be based on gradient member
Element and rollover elements correct measurement object W measurement coordinate.In the first embodiment, apart from a, curvature ω and gradient change
Amount △ p can be used except above formula（1）-（4）Formula in addition is obtained.
The present invention can be used in the 3-D measurer for the measurement object that measurement is placed on base.
Note, the purpose only explained provides foregoing example, and foregoing example should never be considered for the present invention
Limitation.Although describing the present invention with reference to example embodiment, it should be understood that word used herein is the word of description and explanation, and
It is not the word of limitation.The change changed as is now described and such as can be made within the scope of the appended claims, and at it
Various aspects do not depart from scope and spirit of the present invention.Although there is described herein this with reference to specific structure, material and embodiment
Invention, the present invention is not intended to be limited to specific disclosure herein；But, the present invention is expanded to for example in scope of the following claims
Interior all functionally equivalent structures, method and purposes.
The invention is not restricted to above-described embodiment, and various changes and modifications can be possible without departing from the present invention
Scope.
Claims (17)
1. a kind of measurement method for correcting coordinate for the measurement coordinate for correcting the measurement object being located on base, the bearing calibration bag
Include：
By multiple weight that the base is attached in the side relative with the side that the measurement object is located at of base
Sensor obtains the weight information relevant with the weight for measuring object；
Obtain the positional information relevant with measuring position of the object on base；And
Weight and position correction based on measurement object measure the measurement coordinate of object,
Wherein：
The acquisition positional information is included by the position relative to multiple weight sensors and from multiple weight sensors
The detected value of each calculates the position of measurement object and obtains the information relevant with the position for measuring object.
2. measurement method for correcting coordinate, also includes as claimed in claim 1：
Via weight sensor, detection is placed on the load of the measurement object on base, wherein：
The weight information that obtains is included by calculating measurement thing based on the detected value of each from multiple weight sensors
The weight of body and obtain the relevant information of weight with measuring object.
3. measurement method for correcting coordinate, includes wherein the correction measures coordinate as claimed in claim 1：
Via Deformation calculation code, weight and position based on measurement object calculate the base at each position on base
Deflection；And
Via measurement coordinates correction code, the measurement coordinate of the deflection correction measurement object based on base.
4. measurement method for correcting coordinate, includes wherein the correction measures coordinate as claimed in claim 2：
Via Deformation calculation code, weight and position based on measurement object calculate the base at each position on base
Deflection；And
Via measurement coordinates correction code, the measurement coordinate of the deflection correction measurement object based on base.
5. measurement method for correcting coordinate, includes reading from memory wherein the correction measures coordinate as claimed in claim 1
The correction parameter of weight and position corresponding to measurement object, and the measurement coordinate for measuring object is corrected based on correction parameter.
6. measurement method for correcting coordinate, includes reading from memory wherein the correction measures coordinate as claimed in claim 2
The correction parameter of weight and position corresponding to measurement object, and the measurement coordinate for measuring object is corrected based on correction parameter.
7. measurement method for correcting coordinate, also includes reading from memory wherein the correction measures coordinate as claimed in claim 3
The weight corresponding to measurement object and the correction parameter of position are taken, and is sat based on the measurement that correction parameter corrects measurement object
Mark.
8. measurement method for correcting coordinate, also includes reading from memory wherein the correction measures coordinate as claimed in claim 4
The weight corresponding to measurement object and the correction parameter of position are taken, and is sat based on the measurement that correction parameter corrects measurement object
Mark.
9. measuring method for correcting coordinate as claimed in claim 1, the base includes flat base, and the acquisition position
The acquisition of information information relevant with measuring position of the object in the plane of base.
10. measuring method for correcting coordinate as claimed in claim 1, the base includes flat base, and the acquisition position
Confidence breath includes：Based on it is detected on measure weight of object data, and based on measurement object base plane
In position, it is determined that position of the measurement object on base.
11. method for correcting coordinate is measured as claimed in claim 1, wherein the acquisition positional information includes：Based on ShiShimonoseki
It is calculating location information：
R1=((L-a)/L) P wherein, L represent along the second weight sensor with being connected in the multiple weight sensor and
Vertical horizontal line measurement, the first weight sensor in the multiple weight sensor of the line of 3rd weight sensor and company
Connect described second and the 3rd weight sensor the line between spacing distance, a represent along the horizontal line from measurement thing
Body is to the distance of the first weight sensor, and P represents to measure the weight of object, and R1 represents the value that the first weight sensor is detected.
12. method for correcting coordinate is measured as claimed in claim 1, wherein the acquisition positional information includes：Based on ShiShimonoseki
It is calculating location information：
R2+R3=(a/L) P
Wherein, L is represented along the second weight sensor and the 3rd weight sensor with being connected in the multiple weight sensor
Vertical horizontal line measurement, the first weight sensor in the multiple weight sensor of line with being connected described second and the
Spacing distance between the line of three weight sensors, a represents to pass to the first weight along the horizontal line from measurement object
The distance of sensor, P represents the weight of measurement object, and R2 and R3 represent the second weight sensor and the inspection of the 3rd weight sensor respectively
The value measured.
13. a kind of coordinate measuring set for measuring the measurement object being located on base, the device includes：
Weight getter, it is configured as obtaining the information relevant with the weight of measurement object, and the weight getter is included in
The multiple weight sensors being attached on the side relative with the side for the base that the measurement object is located at of base；
Location acquirer, it is configured as the position acquisition relative to multiple weight sensors with measuring position of the object on base
It is equipped with the information of pass；And
Adjuster, it is configured as the measurement coordinate that object is measured based on the weight and position correction for measuring object.
14. coordinate measuring set as claimed in claim 13, wherein, the base includes flat base, and the position
Getter is configured as obtaining the information relevant with measuring position of the object in the plane of base.
15. coordinate measuring set as claimed in claim 13, the base includes flat base, and the location acquirer
Based on the detected data on measuring weight of object, and based on position of the object in the plane of base is measured, obtain
Take the information relevant with the position for measuring object.
16. coordinate measuring set as claimed in claim 13, wherein the location acquirer, which is based on following relation, calculates position
Information：
R1=((L-a)/L) P
Wherein, L is represented along the second weight sensor and the 3rd weight sensor with being connected in the multiple weight sensor
Vertical horizontal line measurement, the first weight sensor in the multiple weight sensor of line with being connected described second and the
Spacing distance between the line of three weight sensors, a represents to pass to the first weight along the horizontal line from measurement object
The distance of sensor, P represents the weight of measurement object, and R1 represents the value that the first weight sensor is detected.
17. coordinate measuring set as claimed in claim 13, wherein the location acquirer, which is based on following relation, calculates position
Information：
R2+R3=(a/L) P
Wherein, L is represented along the second weight sensor and the 3rd weight sensor with being connected in the multiple weight sensor
Vertical horizontal line measurement, the first weight sensor in the multiple weight sensor of line with being connected described second and the
Spacing distance between the line of three weight sensors, a represents to pass to the first weight along the horizontal line from measurement object
The distance of sensor, P represents the weight of measurement object, and R2 and R3 represent the second weight sensor and the inspection of the 3rd weight sensor respectively
The value measured.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012005309A JP6113958B2 (en) | 2012-01-13 | 2012-01-13 | Measurement coordinate correction method and coordinate measuring machine |
| JP2012-005309 | 2012-01-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103206933A CN103206933A (en) | 2013-07-17 |
| CN103206933B true CN103206933B (en) | 2017-07-18 |
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| CN201310010185.XA Active CN103206933B (en) | 2012-01-13 | 2013-01-11 | Measure method for correcting coordinate and 3-D measurer |
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| US (1) | US20130185010A1 (en) |
| EP (1) | EP2615409B1 (en) |
| JP (1) | JP6113958B2 (en) |
| CN (1) | CN103206933B (en) |
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| GB201003363D0 (en) * | 2010-03-01 | 2010-04-14 | Renishaw Plc | Measurement method and apparatus |
| US9250055B2 (en) * | 2014-05-09 | 2016-02-02 | Mitutoyo Corporation | High speed contact detector for measurement sensors |
| DE102014209342A1 (en) * | 2014-05-16 | 2015-11-19 | Carl Zeiss Microscopy Gmbh | Method for determining geometric data of an object using a measuring microscope and a measuring microscope |
| JP6579647B2 (en) * | 2015-03-04 | 2019-09-25 | 株式会社ミツトヨ | Measuring device and shaft workpiece support mechanism |
| JP6171259B1 (en) * | 2016-03-31 | 2017-08-02 | 株式会社東京精密 | Surface shape measuring apparatus and surface shape measuring method |
| DE102016205469A1 (en) * | 2016-04-01 | 2017-10-05 | Wobben Properties Gmbh | Measuring system for measuring a surface |
| JP2019066418A (en) * | 2017-10-04 | 2019-04-25 | 株式会社ミツトヨ | Measuring apparatus and measurement system |
| CN109506659A (en) * | 2018-12-26 | 2019-03-22 | 苏州罗伯特木牛流马物流技术有限公司 | Laser navigation AGV and its air navigation aid |
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|---|---|---|---|---|
| DE10214489A1 (en) * | 2002-03-26 | 2003-10-23 | Zeiss Carl | Guidance error determination method, for use with metrology or coordinate measurement instruments, whereby guidance errors are related to a particular factor and determined as a function of the factor using finite element analysis |
| JP4675047B2 (en) * | 2004-02-02 | 2011-04-20 | 株式会社ミツトヨ | Measuring coordinate correction method for three-dimensional measuring machine and three-dimensional measuring system |
| JP2006125924A (en) * | 2004-10-27 | 2006-05-18 | Tokyo Seimitsu Co Ltd | Roundness/cylindrical shape measuring apparatus |
| DE102006002093B4 (en) * | 2006-01-17 | 2010-11-25 | Airbus Deutschland Gmbh | Device for detecting contour deviations of a flexible component taking into account the component weight and method |
| EP2171394B2 (en) * | 2007-07-24 | 2020-07-15 | Hexagon Metrology S.p.A. | Method for compensating measurement errors caused by deformations of a measuring machine bed under the load of a workpiece and measuring machine operating according to said method |
| EP2472216B1 (en) * | 2010-12-30 | 2013-08-14 | Hexagon Metrology S.p.A. | Coordinate measuring machine |
| JP5789114B2 (en) * | 2011-04-04 | 2015-10-07 | オークマ株式会社 | Correction value calculation method and program for machine tool |
| EP2557390B1 (en) * | 2011-08-12 | 2019-05-22 | Hexagon Metrology S.p.A. | Measuring machine provided with a block of concrete having the function of foundation or machine bed, and method for compensating the measuring errors due to deformations of the block |
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2012
- 2012-01-13 JP JP2012005309A patent/JP6113958B2/en active Active
- 2012-12-28 US US13/729,187 patent/US20130185010A1/en not_active Abandoned
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Also Published As
| Publication number | Publication date |
|---|---|
| JP2013145156A (en) | 2013-07-25 |
| JP6113958B2 (en) | 2017-04-12 |
| EP2615409A1 (en) | 2013-07-17 |
| CN103206933A (en) | 2013-07-17 |
| US20130185010A1 (en) | 2013-07-18 |
| EP2615409B1 (en) | 2014-01-15 |
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