CN103199436B - 基于倾斜光束边发射激光器的硅波导输出面上光源装置 - Google Patents
基于倾斜光束边发射激光器的硅波导输出面上光源装置 Download PDFInfo
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- CN103199436B CN103199436B CN201310053244.1A CN201310053244A CN103199436B CN 103199436 B CN103199436 B CN 103199436B CN 201310053244 A CN201310053244 A CN 201310053244A CN 103199436 B CN103199436 B CN 103199436B
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CN201310053244.1A CN103199436B (zh) | 2013-02-19 | 2013-02-19 | 基于倾斜光束边发射激光器的硅波导输出面上光源装置 |
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CN103199436B true CN103199436B (zh) | 2014-10-22 |
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CN103633551B (zh) * | 2013-12-19 | 2016-04-20 | 武汉电信器件有限公司 | 用于片上光互连的激光器封装方法 |
CN105259623B (zh) * | 2015-10-30 | 2017-05-10 | 武汉电信器件有限公司 | 一种激光器与光栅耦合器的封装结构及其方法 |
CN105353461B (zh) * | 2015-12-14 | 2018-12-07 | 中国科学院半导体研究所 | 大容差耦合波导 |
CN105552714A (zh) * | 2016-01-15 | 2016-05-04 | 北京工业大学 | 一种带有DBR光栅结构的852nm窄线宽边发射激光器及其制备方法 |
CN109541754A (zh) * | 2017-09-22 | 2019-03-29 | 北京万集科技股份有限公司 | 一种光耦合结构及其制造方法 |
US10921525B2 (en) * | 2018-11-30 | 2021-02-16 | Mitsubishi Electric Research Laboratories, Inc. | Grating coupler and integrated grating coupler system |
CN109861079B (zh) * | 2019-01-08 | 2021-02-23 | 中国科学院半导体研究所 | 基于微结构激光器的一维雷达扫描发射装置及制备方法 |
US11143821B1 (en) * | 2020-03-24 | 2021-10-12 | Mitsubishi Electric Research Laboratories, Inc. | Integrated grating coupler system |
CN111650691B (zh) * | 2020-06-24 | 2021-08-03 | 中国科学院半导体研究所 | 硅基片上集成半导体放大器 |
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CN1658453A (zh) * | 2004-02-18 | 2005-08-24 | 中国科学院半导体研究所 | 混合集成的可调谐半导体激光器 |
US8050525B2 (en) * | 2006-10-11 | 2011-11-01 | Futurewei Technologies, Inc. | Method and system for grating taps for monitoring a DWDM transmitter array integrated on a PLC platform |
US8368995B2 (en) * | 2009-10-13 | 2013-02-05 | Skorpios Technologies, Inc. | Method and system for hybrid integration of an opto-electronic integrated circuit |
US8257990B2 (en) * | 2009-12-30 | 2012-09-04 | Intel Corporation | Hybrid silicon vertical cavity laser with in-plane coupling |
EP2450693A1 (en) * | 2010-11-08 | 2012-05-09 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | An arrayed waveguide grating (AWG) |
CN202563118U (zh) * | 2012-01-12 | 2012-11-28 | 苏州海光芯创光电科技有限公司 | 一种波分复用器件及其在高速光器件中的应用 |
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Inventor after: Zheng Wanhua Inventor after: Qu Hongwei Inventor after: Wang Hailing Inventor after: Zhangsiriguleng Inventor before: Zhang Yejin Inventor before: Qu Hongwei Inventor before: Wang Hailing Inventor before: Zhangsiriguleng Inventor before: Zheng Wanhua |
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