CN103197654A - Monitoring system of standard semiconductor equipment based on organic photo conductor (OPC) - Google Patents
Monitoring system of standard semiconductor equipment based on organic photo conductor (OPC) Download PDFInfo
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Abstract
The invention provides a monitoring system of standard semiconductor equipment based on an organic photo conductor (OPC). The monitoring system of the semiconductor equipment based on the OPC standard comprises lower computer sets and an upper computer. The lower computer sets are connected with the semiconductor equipment, and used for controlling operation of the semiconductor equipment and monitoring operating state and procedure parameters of the semiconductor equipment. The upper computer is connected with lower computer sets, and used for monitoring and managing the lower computer sets and acquiring state information and procedure parameters of the semiconductor equipment from the lower computer sets, and sending control instructions, a technical formula and technical parameters controlling operation of the semiconductor equipment to the lower computer sets. The monitoring system of the semiconductor equipment based on the OPC standard has the advantages of being safe and reliable, and convenient to operate. Besides, an unified mode is used to real time assess control the lower computer sets of each unit module of the semiconductor equipment, the lower computer sets are integrated, and unified management of each unit module and production dispatching of wafer machining are achieved.
Description
Technical field
The present invention relates to semiconductor equipment control technology field, particularly a kind of supervisory system of equipping based on the semiconductor of OPC standard.
Background technology
For security and the reliability that guarantees that the semiconductor device received shipment is capable, bring into play simultaneously the operation usefulness of system to greatest extent, satisfy technologist's operational requirements, press for the upper strata supervisory system that independent research one cover can be monitored in real time to equipment.At present there are many ready-made general configuration softwares to can be used for making up the upper strata monitor system software on the market, as KingView and WINCC etc., but all have some problems:
(1) general configuration software price is generally relatively more expensive;
(2) interface element is abundant inadequately, remains in certain defective for the special processing of process data, can't satisfy process requirements better;
(3) general configuration software requirement user further edits according to self-demand, and the user also will expend great effort software is configured before use with in using, and takes time and effort.
Summary of the invention
The present invention is intended to solve at least one of technical matters that exists in the prior art.
For this reason, the objective of the invention is to propose the supervisory system that a kind of safe and reliable and easy to operate semiconductor based on the OPC standard is equipped, be used for equipping with uniform way real time access control semiconductor the next unit of each unit module, and each the next unit integrated, finish the production scheduling of unified management and the wafer processing of each unit module.
To achieve these goals, embodiments of the invention provide a kind of supervisory system of equipping based on the semiconductor of OPC standard, comprise: the next unit, described the next unit links to each other with the semiconductor equipment, be used for the operation of the described semiconductor equipment of control, and monitor running status and the procedure parameter of described semiconductor equipment; And host computer, described host computer links to each other with described the next unit, be used for monitoring downwards and managing, and obtain status information and the procedure parameter of described semiconductor equipment from described the next unit, and send capable steering order, technical recipe and the technological parameter of the described semiconductor device received shipment of control to described the next unit.
In addition, supervisory system of equipping based on the semiconductor of OPC standard according to the above embodiment of the present invention can also have following additional technical characterictic:
In some instances, described the next unit comprises a plurality of slave computers, and each slave computer links to each other with each technique unit or EFEM and wafer transfer system in the described semiconductor equipment respectively in described a plurality of slave computers.
In some instances, described host computer further comprises: opc server, described opc server disposes described the next unit information to realize the communication of described opc server and described the next unit, and described the next unit monitored and manage, wherein, described the next unit packets of information title and the address of drawing together each slave computer; Client, described client links to each other with described opc server, being used for providing user interface to the technologist, with realize between described technologist and the described semiconductor equipment alternately.
In some instances, described user interface comprises the sub-interface of editor, disposes sub-interface, safeguards sub-interface, monitors sub-interface and helps sub-interface.
In some instances, the mode of the interface of described client by creating target opc server and the support of visit opc server realize and described opc server between information interaction.
In some instances, described client be used for to be created described target opc server, and being connected between foundation and the described target opc server, and creates and interpolation OPC group objects and OPC item object, and according to described OPC group and OPC item, described client is obtained data from described opc server.
In some instances, after closing described client user interface, described client also is used for removing described OPC item object and described OPC group objects, and being connected between disconnection and the described target opc server, and eliminates described target opc server with the release resource.
In some instances, described client is write data in synchronous or asynchronous mode to described opc server, and the mode that described client is passed through to subscribe to is from described opc server read data.
In some instances, pass through the Ethernet physical connection between described host computer and the described the next unit.
Supervisory system according to the semiconductor based on the OPC standard of the embodiment of the invention is equipped has following advantage:
The invention has the advantages that:
(1) simple to operate, the user interface of upper strata supervisory system has good effect of visualization, makes things convenient for the technologist to operate;
(2) be convenient to safeguard, when bottom control system (PLC) needs maintenance or hardware device to change, if the address of each variable of bottom and original function remain unchanged, just can not influence the normal use of upper strata supervisory system.
(3) good extensibility, native system such as the new unit module of need expansion only need new unit module is added in the network according to the current architecture of system.The upper strata supervisory system is finished appending of corresponding configuration and variable and is got final product, and need not to change original architecture.
(4) safe and reliable, native system adopts the OPC technology, for normal data communication provides good assurance.
Additional aspect of the present invention and advantage part in the following description provide, and part will become obviously from the following description, or recognize by practice of the present invention.
Description of drawings
Of the present invention and/or additional aspect and advantage are from obviously and easily understanding becoming the description of embodiment below in conjunction with accompanying drawing, wherein:
Fig. 1 is according to an embodiment of the invention based on the synoptic diagram of the supervisory system hardware configuration of the semiconductor of OPC standard equipment;
Fig. 2 is according to an embodiment of the invention based on the OPC architectural schematic of the supervisory system of the semiconductor of OPC standard equipment;
Fig. 3 is according to an embodiment of the invention based on the workflow of the client-side program of the supervisory system of the semiconductor of OPC standard equipment;
Fig. 4 is according to an embodiment of the invention based on the client of the supervisory system of the semiconductor of the OPC standard equipment synoptic diagram with method of synchronization visit opc server;
Fig. 5 is according to an embodiment of the invention based on the client of the supervisory system of the semiconductor of the OPC standard equipment synoptic diagram with asynchronous system visit opc server;
Fig. 6 is according to an embodiment of the invention based on the client of the supervisory system of the semiconductor of the OPC standard equipment synoptic diagram with subscribing manner visit opc server;
Fig. 7 forms synoptic diagram based on the function of the user interface of the supervisory system of the semiconductor of OPC standard equipment according to an embodiment of the invention.
Embodiment
Describe embodiments of the invention below in detail, the example of described embodiment is shown in the drawings, and wherein identical or similar label is represented identical or similar elements or the element with identical or similar functions from start to finish.Be exemplary below by the embodiment that is described with reference to the drawings, only be used for explaining the present invention, and can not be interpreted as limitation of the present invention.On the contrary, embodiments of the invention comprise spirit and interior all changes, modification and the equivalent of intension scope that falls into institute's additional claims.
In description of the invention, it will be appreciated that term " first ", " second " etc. only are used for describing purpose, and can not be interpreted as indication or hint relative importance.In description of the invention, need to prove that unless clear and definite regulation and restriction are arranged in addition, term " links to each other ", " connection " should do broad understanding, for example, can be fixedly connected, also can be to removably connect, or connect integratedly; Can be mechanical connection, also can be to be electrically connected; Can be directly to link to each other, also can link to each other indirectly by intermediary.For the ordinary skill in the art, can concrete condition understand above-mentioned term concrete implication in the present invention.In addition, in description of the invention, except as otherwise noted, the implication of " a plurality of " is two or more.
The supervisory system of equipping according to the semiconductor based on the OPC standard of the embodiment of the invention is described below in conjunction with accompanying drawing.
The supervisory system that the semiconductor based on the OPC standard of the embodiment of the invention is equipped comprises the next unit and host computer IPC.Wherein, the next unit links to each other with the semiconductor equipment, is used for the operation of control semiconductor equipment, and running status and the operational factor of monitoring semiconductor equipment.Host computer IPC links to each other with the next unit, be used for monitoring downwards and managing, and obtain status information and the procedure parameter of semiconductor equipment from the next unit, and send capable steering order, technical recipe and the technological parameter of control semiconductor device received shipment to the next unit.Wherein, monitor downwards and management refers to the next unit and semiconductor equipment is monitored and managed.
As a concrete example, as shown in Figure 1, suppose that the semiconductor equipment comprises technique unit 1, technique unit 2, EFEM and wafer transfer system, then the next unit comprises a plurality of slave computers, each slave computer links to each other with technique unit or EFEM and wafer transfer system in the semiconductor equipment respectively in a plurality of slave computers, in Fig. 1, show the situation that the next unit comprises three slave computers, three slave computers are Programmable Logic Controller PLC1, Programmable Logic Controller PLC2 and Programmable Logic Controller PLC3, wherein, PLC1 links to each other with technique unit 1, PLC2 links to each other with technique unit 2, and PLC3 links to each other with the wafer transfer system with EFEM respectively.In Fig. 1, show the connected mode that communicates by Ethernet between a kind of host computer IPC and the next unit.
As from the foregoing, the supervisory system based on the semiconductor of OPC standard equipment of the embodiment of the invention adopts " IPC(industrial computer, i.e. host computer)+PLC(programmable logic controller (PLC)) " two-stage control model.Each PLC of bottom is responsible for controlling unit module (established technology unit, EFEM and wafer transfer system) separately, and host computer IPC is responsible for the state and the execution of managing each PLC of each unit module of monitoring in real time.Each PLC realizes and host computer IPC and physical connection each other thereof by Industrial Ethernet.Thereby between the assurance levels, in the normal communication, can realize the target to semiconductor equipment decentralised control and centralized operation.
Be in charge of the operation that whole semiconductor is equipped based on the supervisory system that the semiconductor of OPC standard is equipped, major function comprises the condition monitoring of each unit module of semiconductor equipment and the maintenance of local data, namely read and show state variable and the technological parameter of each unit module in real time, download technical recipe, and send every steering order etc., can realize the unified scheduling of each unit module, thereby guarantee the safety in production of whole technological process.
The upper strata monitor system software operates among the host computer IPC.In order to guarantee the reliability of data access, the present invention adopts the OPC technology to realize that the upper strata supervisory system is to the visit of each sub-control system (being each PLC).The signal of OPC architecture as shown in Figure 2.
Particularly, upper strata supervisory system (host computer IPC) comprises opc server and client.Opc server disposes the next unit information (being title and the address of each slave computer) with the communication of realization opc server and the next unit, and the next unit is monitored and managed; Client links to each other with opc server, comprises OPC Data access module and user interface, realizes reading, handle and showing of data, and the functions such as transmission of operations instruction.The PLC of lower floor sets up a plurality of memory blocks (DB) specially and is responsible for depositing all data (comprising state variable and technological parameter etc.) temporarily, client can be read and write the data of DB among the PLC of lower floor in real time by the visit opc server, thereby realizes the information interaction of technologist and semiconductor equipment.The user interface of client is in order to realize mutual between technologist and the semiconductor equipment.Further, user interface includes but not limited to: edit sub-interface, dispose sub-interface, safeguard sub-interface, monitor sub-interface and help sub-interface.
When client and opc server carry out communication, client can be by creating target opc server and the support of visit opc server the mode of interface realize and opc server between information interaction, that is: client is used for creating target opc server, and being connected between foundation and the target opc server, and create and interpolation OPC group objects and OPC item object, and according to OPC group and OPC item, client is obtained data from opc server.
Further, after closing described client user interface, client also is used for removing OPC item object and OPC group objects, and being connected between disconnection and the target opc server, and eliminates target opc server to discharge resource.
Particularly, OPC is made up of two sockets: OPC self defined interface (OPC COM Custom Interfaces) and OPC automation interface (OPC OLE Automation Interfaces).Self defined interface efficient height, by this interface, the client can bring into play the optimum performance of opc server, is fit to adopt the client of C Plus Plus; Automation interface has been simplified the realization of client applications, be fit to adopt the client of VB language, but need carry out type checking during operation, influences the travelling speed of program.Therefore, the present invention adopts the OPC self defined interface to realize that client is to the visit of opc server.
From bottom, the raw data that the OPC technology obtains physical equipment sends to Process Control System (as PLC and opc server), again the data of Process Control System is delivered to application program (in client); From high level, opc server is made up of three objects: target opc server, OPC group objects and OPC item object.
(1) target opc server
Target opc server is the main object of opc server program.In the OPC of client Data access module, at first need to create this object, finish required function by its interface again.It below is the several main opc server interface that needs realization.
1) the IUnknown interface is the basic standard interface that all com components all must be realized, it carries out the interface inquiry for CLIENT PROGRAM provides the QueryInterface method.
2) the IOPCCommon interface is the interface that all kinds of opc servers all use, and can be certain specific client/server dialogue by this interface and arranges and the local sign of inquiry (LocalID).Like this, the operation of a CLIENT PROGRAM will can not influence other CLIENT PROGRAM.
3) the IOPCServer interface is the main interface of target opc server.CLIENT PROGRAM can be created, inquire about by this interface and the deletion group objects, and understands the information of opc server self.These information comprise the number of server creation-time, running status, group objects and version number etc.
4) the IOPCItemProperties interface provides a kind of method of conveniently browsing data item attribute in the opc server memory block for CLIENT PROGRAM.These attributes comprise quantities, setting value, high limit alarming value, lowest limit alarming value and note etc.By this interface, OPC client need not to create and the management group just can directly obtain these information, has simplified operation.
(2) OPC group objects
After target opc server is created the OPC group objects, the pointer of OPC group objects is passed to client, by client direct control group objects.The data item (mainly comprising each technological parameter, state variable and command variable) that client will need to visit is added in same group as the OPC item.Be that unit carries out to organize when client is carried out data access to opc server, namely CLIENT PROGRAM is carried out unified read-write operation to the OPC item in organizing, and has improved the efficient of data communication.
Client is managed the state of whole group objects by the IOPCGroupStateMgt interface.And the IOPCItemMgt interface allows the CLIENT PROGRAM group objects to add, delete and manage the OPC item of its containing.
(3) OPC item object
Wherein, the OPC item represent with opc server in being connected of data.It is pointed out that the OPC item is not actual data source, just expression and data source is connected.Therefore, when adding the OPC item in OPC group, each address of strict difinition guarantees the correctness of data read.
In the supervisory system of upper strata, client and opc server reciprocal process mainly be divided into following step, as shown in Figure 3, comprising:
(1) defines and creates an OPCSever object (target opc server).
(2) set up and being connected of OPCSever object.Be initialization COM storehouse, utilize the CLSIDFromProgID function to obtain CLSID.Based on the CLSID that obtains, client is created an OPC Server object, and obtains a pointer variable IOPCServer who points to server object.
(3) definition and interpolation OPCGroup object (OPC group objects) arrange the device association attributes.
(4) definition and interpolation OPCCItem object (OPC item object) arrange the device association attributes.Namely as the main interface of opc server, the IOPCServer interface is responsible for creating OPC Group, and returns other interface pointer, guarantees the interface function that client can invoking server.OPC client can add the OPCItem object of some by the OPCGroup object reference IOPCItemMgt interface of creating.
(5) the DataChange event of triggering OPC group objects, the i.e. read-write operation of data.Particularly, come the value of each Item object among synchronous or the asynchronous write OPCGroup by the member function Write that calls IOPCSyncIO or IOPCAsyncIO2.For reading of data, the unified subscribing manner that adopts of this supervisory system is monitored each process variable in real time.
(6) data item that changes is informed client.
(7) remove the OPCItem object.
(8) remove the OPCGroup object.
(9) disconnect and being connected of OPCSever object.
(10) eliminate the OPCSever object, discharge resource.Be that client discharges all interface pointer and deletes OPCItem, OPCGroup and OPCServer object successively when withdrawing from.
In further embodiment of the present invention, client can be synchronously or/asynchronous mode writes data to opc server, client also can be by the mode of subscribing to from the opc server read data.Wherein:
The data access mode
In the supervisory system of upper strata, client and opc server comprise two aspects alternately: one is that client reads data from server, and one is that user end to server is write data.In the OPC standard, the data access of opc server and OPC client (being client) has three kinds of modes: synchronous, asynchronous and subscription.Among the present invention, client is write The data synchronous write and asynchronous write to opc server.For reading of data, the unified subscription formula that adopts.
(1) synchronization of access mode (as shown in Figure 4)
Under the method for synchronization, the OPC client is by calling interface function access opc server, and opc server is according to the request search data item of OPC client.After search was finished, opc server sent the result to client.The OPC client is being waited for always before returning, and namely customer's call function runs to writing of all data always and finishes.
(2) asynchronous access mode (as shown in Figure 5)
Under asynchronous system, the OPC client sends request to opc server, and this operation is arranged, and function returns immediately so that client can be proceeded other operations.Each operation is regarded as one " things ", and a things ID is arranged.After operation is finished, produce a readjustment.In the information of readjustment, indicate things ID and operating result.Unique things ID is produced by the client, and returns to the client in readjustment, is used for guaranteeing return data correctly.
OPC client executing asynchronous feature more complicated, but quite effective.It can be operated the bigger data of quantity CPU and network resource consumption are reduced to minimum simultaneously.
(3) subscribe to formula access mode (as shown in Figure 6)
Subscription formula access mode comes down to a kind of of asynchronous data access mode, but different with above-mentioned dual mode, and subscribing manner can only read the data of opc server and can not write data to opc server.
In whole process, the OPC client needn't send request to opc server, but server periodically scanning buffer data and upgrade among Cache(the present invention, the scan period is defined as 500 milliseconds).If data change or change above certain limit, just notify client and send data, thereby make the OPC client can obtain the data that opc server sends automatically.The variation range that limits data is called as the dead band, the setting of can being correlated with.
Write operation for the significant data in the native system (for example technological parameter and system configuration information) adopts synchronous mode OPC data WriteMode, correctly arranges to guarantee each parameter, can not omit.For the write operation of general variable, can suitably select asynchronous system OPC data WriteMode for use, to reduce the consumption of CPU and Internet resources, guarantee the real-time of system.Than the method for synchronization and asynchronous system, subscription formula data acquisition modes can reduce the number of times of client-access server effectively, make the consumption of CPU and Internet resources drop to minimum, simultaneously can carry out lot of data, and farthest avoided the situation of network congestion, therefore very big advantage is being arranged aspect the data monitoring of big data quantity, and for the reading of data, the unified subscribing manner that adopts of this supervisory system is monitored each process variable in real time.
Client OPC Data access module implementation method
In translation and compiling environment, realize the OPC client applications, at first should can official website download OPC header file (opccomn.h, opccomn_i.cpp from the OPC international fund, opcda.h, opcda_i.cpp, OpcError.h, OpcPre.h OpcPre.cpp), and loads in engineering.In client OPC Data access module, self-defined OpcClient class, OpcPublic class and COPCDataCallback class (class name and function name definition in addition in the literary composition).
1.OpcClient class
In the OpcClient header file, number and the basic data type of definition OPC item.In source file, realize the main method of visit opc server successively, i.e. the connection of opc server and disconnection, and synchronous/asynchronous is write etc.In the data write method, at different data types, can realize bool type data write method respectively, float type data write method and int type data write method.For the dirigibility of data access, the present invention has also realized the data write method of array type, i.e. a plurality of data of the same type of write-once are to make things convenient for the processing of data.
1.1 connect opc server function C onnectServer;
ConnectServer mainly be responsible for to realize being connected of client and server, and sets up OPC group and OPC item, and specifically performance history can be carried out according to the following steps:
Initialization COM storehouse;
Utilize function C LSIDFromProgID (L " OPC.SimaticNET " ， ﹠amp; Clsid) ProgID is converted into CLSID.Each com server has the ProgID of a character string type, can obtain globally unique CLSID by ProgID by the CLSIDFromProgID function.For example, the ProgID among the present invention is OPC.SimaticNET;
Utilize an OPC Server of CoCreateInstance function creation class example, obtain a pointer variable of pointing to the server object interface;
With IOPCServer interface method AddGroup interpolation group.In the parameter of returning, obtain pointing to the pointer of required process group object IOPCItemMgt interface;
Defined item arranges each corresponding address, routine m_Items[41 one by one] .szItemID=L " S7:[S7connection_1] MX954.6 ".For the array variable of continuation address, only first address is composed to this and got final product;
With the AddItems method of IOPCItemMgt interface whole are added in this group, and detection readable writing whether;
Obtain the IOPCGroupStateMgt interface, and inquiry synchronous versus asynchronous mode;
Set up subscribing manner, reading needs the data monitored item.
1.2 disconnect opc server contiguous function DisconnectServer;
DisconnectServer is responsible for finishing the communication of OPC client and server.In DisconnectServer, need remove (calling the RemoveItems function) successively, discharge synchronous, asynchronous and IOPCItemMgt interface (calling each Release function), remove group (calling the RemoveGroup function), discharge server (calling the Release function), and in the end call the CoUninitialize function and nullify the COM storehouse.
1.3 write method
According to different types of data, realize (or asynchronous) write method synchronously respectively, so that in program development process, the access mode of data is more clear and be easy to check.The present invention has mainly realized three kinds of modes that synchronous (or asynchronous) write, comprise bool type data write method SyncWriteBool (int ItemNo, bool ItemValue)/AsyncWriteBool (int ItemNo, bool ItemValue), float type data write method SyncWriteReal (int ItemNo, double ItemValue)/AsyncWriteReal (int ItemNo, double ItemValue) and int type data write method SyncWriteInt (int ItemNo, int ItemValue)/AsyncWriteInt (int ItemNo, int ItemValue).Wherein, first formal parameter list show by assignment to as if the group in which, second formal parameter list shows the value that will compose.For array variable, i.e. continuous variable of the same type can be by SyncWrite (int ItemNo, void*ItemValue, type ValueType, int ValueNo)/AsyncWrite (int ItemNo, void*ItemValue, type ValueType, int ValueNo) realize writing function, wherein shape ginseng ItemNo represent in the group which, the value that ItemValue indicates to compose, ValueType represents data type, and ValueNo represents the variable number.
Be example with the synchronous write function, in function body, according to data type access mode divided earlier, set gradually every property value (comprising data type and value etc.) according to shape ginseng content again.If the use method of synchronization need be called the Write function of IOPCSyncIO.If the use asynchronous system need be called the Write function of IOPCAsyncIO2.
2.OpcPublic class
Because this supervisory system adopts subscription formula data read mode to unify all parametric variables of reading system, so need special definition OpcPublic class to be responsible for temporary every process variable.Other classes all can be called such, to read each member variable in the class.Because each member variable of OpcPublic class is brought in constant renewal in, so satisfied the needs of data in real time monitoring.
During each member variable in definition OpcPublic class, should consider the data type of OPC item, to make things convenient for the processing of data.For example, for the OPC item of bool type, if go to read with the variable V ariant of QString type.When the OPC item was true, Variant was " 1 "; When the OPC item was false, Variant was " 0 ".
3.COPCDataCallback class
The COPCDataCallback class is to read the key of each OPC data item in this supervisory system, and it has inherited CComObjectRoot class and IOPCDataCallback class.The work of reading of all monitored variablees all realizes in member function OnDataChange.OnDataChange is for the treatment of the notice of OPC group objects, and this notice is carried out automatically by opc server when data change.
In the realization of subscribing to formula data access mode, will read mode according to the data type of each OPC item and segment.The numbering of OPC item of utilizing the member variable of OpcPublic class finds the item of self correspondence, thereby realizes reading of data.
Except needs are realized OnDataChange, also need realize OnReadComplete, OnWriteComplete and OnCancelComplete function among the OPCCallback.Wherein OnReadComplete and OnWriteComplete are for the treatment of the notice of finishing about the asynchronous operation read-write from the OPC group objects.OnCancelComplete for the treatment of from the OPC group objects about cancellation asynchronous operation completed notice.
The user interface of supervisory system
User interface is the important component part of supervisory system, but and is unique operation part that the technologist can intuitively see.The technologist is undertaken alternately by interface and system, with all parameters of real-time monitoring system, and carries out operations, and the assurance security of system is effectively moved.The present invention adopts a C++ kit for the cross-platform graphical interface program of exploitation of Qt() set up and be convenient to the graphic user interface that the technologist operates.The technologist can carry out every routine operation to the semiconductor equipment after entering the interface.According to the general function demand of equipment, user interface mainly comprises function (see figure 7)s such as editor, configuration, maintenance, supervision and help.In each functional module,, should be carried out the secondary of this module and divide by operand (for example technique unit 2 and technique unit 1 etc.) according to specifically, obtain different submodules, to make things convenient for technologist's use.At each submodule, according to its functional requirement, design corresponding sub-interface.Enter a certain sub-interface if desired, click in the drop-down menu of main interface corresponding and get final product.In addition, owing to adopt the form of menu, made things convenient for follow-up function expansion, so can easily new sub-interface (submodule) be joined in the menu at main interface.State-variable in the interface and bottom address keep one-to-one relationship, have guaranteed the real-time control of equipment and collection and the demonstration of status data.
Be example with the maintenance module, but the technologist utilize each unit module of maintenance module manual operation.Constitute according to equipment, be divided into technique unit 1, technique unit 2 and three sub-interfaces of EFEM, be respectively applied to debug corresponding unit.By each sub-interface, the technologist can operate each action of each unit, each parameter of each unit is set, and reads each variable of each unit.All interface controls all have corresponding label prompting, avoid technologist's operating mistake.
Operating process:
Operating process is divided into automatic process and manual process.Automatic process is used for the normal continuous flow procedure of equipment, and manual process is used for technologist manually debugging and service equipment, each of controllable device action.
(1) automatic process
Technologist's opening operation software, land the embodiment of the invention system (client from be dynamically connected opc server and finish relevant action);
The technologist finishes basic configuration information (comprise system enable etc.);
The technologist downloads technical recipe (if technical recipe is directly downloaded or do not done change, need not to download again);
Select wafer;
Click operation;
Equipment is started working, and the every state-variable of technologist's real time monitoring is if any unusual (system can eject warning information), abort process;
Operation finishes, as does not have follow-up work, and the technologist withdraws from function software (client automatic cutout and opc server be connected and finish relevant action);
(2) manual process
Technologist's opening operation software, land supervisory system (client from be dynamically connected opc server and finish relevant action);
According to the operation that will realize, the technologist enters the interface of regulation;
The operation that the technologist expects (comprising the setting of parameter, the transmission of action command and the maintenance of local data etc.);
For each operation, the technologist can read feedback information in real time on the interface;
Operation finishes, as does not have follow-up work, and the technologist withdraws from function software (client automatic cutout and opc server be connected and finish relevant action).
Supervisory system according to the semiconductor based on the OPC standard of the embodiment of the invention is equipped has following advantage:
The invention has the advantages that:
(1) simple to operate, the user interface of upper strata supervisory system has good effect of visualization, makes things convenient for the technologist to operate;
(2) be convenient to safeguard, when bottom control system (PLC) needs maintenance or hardware device to change, if the address of each variable of bottom and original function remain unchanged, just can not influence the normal use of upper strata supervisory system.
(3) good extensibility, native system such as the new unit module of need expansion only need new unit module is added in the network according to the current architecture of system.The upper strata supervisory system is finished appending of corresponding configuration and variable and is got final product, and need not to change original architecture.
(4) safe and reliable, native system adopts the OPC technology, for normal data communication provides good assurance.
In the description of this instructions, concrete feature, structure, material or characteristics that the description of reference term " embodiment ", " some embodiment ", " example ", " concrete example " or " some examples " etc. means in conjunction with this embodiment or example description are contained at least one embodiment of the present invention or the example.In this manual, the schematic statement to described term not necessarily refers to identical embodiment or example.And concrete feature, structure, material or the characteristics of description can be with the suitable manner combination in any one or more embodiment or example.In the present invention, term " a plurality of " refers to two or more.
Although illustrated and described embodiments of the invention, for the ordinary skill in the art, be appreciated that without departing from the principles and spirit of the present invention and can carry out multiple variation, modification, replacement and modification to these embodiment that scope of the present invention is by claims and be equal to and limit.
Claims (9)
1. the supervisory system based on the semiconductor equipment of OPC standard is characterized in that, comprising:
The next unit, described the next unit links to each other with the semiconductor equipment, is used for the operation of the described semiconductor equipment of control, and monitors running status and the procedure parameter of described semiconductor equipment;
Host computer, described host computer links to each other with described the next unit, be used for monitoring downwards and managing, and obtain status information and the procedure parameter of described semiconductor equipment from described the next unit, and send capable steering order, technical recipe and the technological parameter of the described semiconductor device received shipment of control to described the next unit.
2. supervisory system according to claim 1 is characterized in that, described the next unit comprises a plurality of slave computers, and each slave computer links to each other with each technique unit or EFEM and wafer transfer system in the described semiconductor equipment respectively in described a plurality of slave computers.
3. supervisory system according to claim 1 is characterized in that, described host computer further comprises:
Opc server, described opc server disposes described the next unit information to realize the communication of described opc server and described the next unit, and described the next unit monitored and manage, wherein, described the next unit packets of information is drawn together title and the address of each slave computer;
Client, described client links to each other with described opc server, being used for providing user interface to the technologist, with realize between described technologist and the described semiconductor equipment alternately.
4. supervisory system according to claim 3 is characterized in that, described user interface comprises the sub-interface of editor, disposes sub-interface, safeguards sub-interface, monitors sub-interface and helps sub-interface.
5. according to claim 3 or 4 described supervisory systems, it is characterized in that, the mode of the interface of described client by creating target opc server and the support of visit opc server realize and described opc server between information interaction.
6. supervisory system according to claim 5, it is characterized in that, described client is used for creating described target opc server, and being connected between foundation and the described target opc server, and create and interpolation OPC group objects and OPC item object, and according to described OPC group and OPC item, described client is obtained data from described opc server.
7. supervisory system according to claim 6, it is characterized in that, after closing described client user interface, described client removes described OPC item object and described OPC group objects, and being connected between disconnection and the described target opc server, and eliminate described target opc server to discharge resource.
8. according to each described supervisory system of claim 1-5, it is characterized in that described client is write data in synchronous or asynchronous mode to described opc server, the mode that described client is passed through to subscribe to is from described opc server read data.
9. supervisory system according to claim 1 is characterized in that, passes through the Ethernet physical connection between described host computer and the described the next unit.
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103218751A (en) * | 2013-04-25 | 2013-07-24 | 清华大学 | Technological prescription document processing system of semiconductor equipment based on extensive markup language (XML) |
| CN103389901A (en) * | 2013-07-25 | 2013-11-13 | 上海航天测控通信研究所 | EGK-based radar display and control interface development method |
| CN103809576A (en) * | 2014-02-28 | 2014-05-21 | 北京七星华创电子股份有限公司 | Host failure handling method and device |
| CN105334808A (en) * | 2014-06-26 | 2016-02-17 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Data processing method and system of semiconductor equipment |
| CN109426170A (en) * | 2017-09-01 | 2019-03-05 | 北京北方华创微电子装备有限公司 | It updates the method for display real time data and updates the system of display real time data |
| WO2019097854A1 (en) * | 2017-11-15 | 2019-05-23 | 株式会社日立製作所 | Data collection device and data collection system |
| CN109871470A (en) * | 2019-02-28 | 2019-06-11 | 国网浙江省电力公司 | A kind of grid equipment data label management system and implementation method |
| CN109991237A (en) * | 2019-03-14 | 2019-07-09 | 上汽大通汽车有限公司 | Painting dressing automobiles skirt glue vision detection system and method |
| CN110286637A (en) * | 2019-06-20 | 2019-09-27 | 共享智能铸造产业创新中心有限公司 | Information collecting method, apparatus and system |
| CN110865599A (en) * | 2019-11-20 | 2020-03-06 | 同济大学 | PLC-based simulated intelligent processing equipment and method |
| CN112286100A (en) * | 2020-10-29 | 2021-01-29 | 常州捷佳创精密机械有限公司 | Operation device, installation and debugging method and control method |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11327630A (en) * | 1998-05-19 | 1999-11-26 | Mitsubishi Electric Corp | Monitoring controller and monitoring controlling method |
| WO2004004283A1 (en) * | 2002-06-28 | 2004-01-08 | Honeywell International Inc. | Opc server redirection manager |
| CN1798141A (en) * | 2004-12-22 | 2006-07-05 | 中国科学院沈阳自动化研究所 | System accorded with OPC standard for monitoring remote configuration |
| CN201576198U (en) * | 2009-11-27 | 2010-09-08 | 广东交通职业技术学院 | Ship cabin data observing and controlling system based on OPC technology |
| CN101840227A (en) * | 2010-05-28 | 2010-09-22 | 苏州智尊智能科技有限公司 | Centralized data collecting and monitoring system for cotton comber |
| CN102663068A (en) * | 2012-03-31 | 2012-09-12 | 哈尔滨工业大学 | Device for realizing real-time updating of database and data real-time updating method in boiler control based on OPC (OLE for Process Control) server |
-
2013
- 2013-04-17 CN CN2013101342923A patent/CN103197654A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11327630A (en) * | 1998-05-19 | 1999-11-26 | Mitsubishi Electric Corp | Monitoring controller and monitoring controlling method |
| WO2004004283A1 (en) * | 2002-06-28 | 2004-01-08 | Honeywell International Inc. | Opc server redirection manager |
| CN1798141A (en) * | 2004-12-22 | 2006-07-05 | 中国科学院沈阳自动化研究所 | System accorded with OPC standard for monitoring remote configuration |
| CN201576198U (en) * | 2009-11-27 | 2010-09-08 | 广东交通职业技术学院 | Ship cabin data observing and controlling system based on OPC technology |
| CN101840227A (en) * | 2010-05-28 | 2010-09-22 | 苏州智尊智能科技有限公司 | Centralized data collecting and monitoring system for cotton comber |
| CN102663068A (en) * | 2012-03-31 | 2012-09-12 | 哈尔滨工业大学 | Device for realizing real-time updating of database and data real-time updating method in boiler control based on OPC (OLE for Process Control) server |
Non-Patent Citations (2)
| Title |
|---|
| 庄然: "OPC与SPC集成技术在半导体生产中的应用", 《中国优秀硕士学位论文全文数据库》 * |
| 庄然: "OPC与SPC集成技术在半导体生产中的应用", 《中国优秀硕士学位论文全文数据库》, 28 April 2008 (2008-04-28) * |
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103218751A (en) * | 2013-04-25 | 2013-07-24 | 清华大学 | Technological prescription document processing system of semiconductor equipment based on extensive markup language (XML) |
| CN103218751B (en) * | 2013-04-25 | 2017-04-05 | 清华大学 | The technical recipe DPS that quasiconductor based on XML is equipped |
| CN103389901A (en) * | 2013-07-25 | 2013-11-13 | 上海航天测控通信研究所 | EGK-based radar display and control interface development method |
| CN103809576A (en) * | 2014-02-28 | 2014-05-21 | 北京七星华创电子股份有限公司 | Host failure handling method and device |
| CN103809576B (en) * | 2014-02-28 | 2016-08-17 | 北京七星华创电子股份有限公司 | Host computer crash handling method and apparatus |
| CN105334808A (en) * | 2014-06-26 | 2016-02-17 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Data processing method and system of semiconductor equipment |
| CN109426170A (en) * | 2017-09-01 | 2019-03-05 | 北京北方华创微电子装备有限公司 | It updates the method for display real time data and updates the system of display real time data |
| CN109426170B (en) * | 2017-09-01 | 2022-04-22 | 北京北方华创微电子装备有限公司 | Method for updating display real-time data and system for updating display real-time data |
| WO2019097854A1 (en) * | 2017-11-15 | 2019-05-23 | 株式会社日立製作所 | Data collection device and data collection system |
| CN109871470A (en) * | 2019-02-28 | 2019-06-11 | 国网浙江省电力公司 | A kind of grid equipment data label management system and implementation method |
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| CN110286637A (en) * | 2019-06-20 | 2019-09-27 | 共享智能铸造产业创新中心有限公司 | Information collecting method, apparatus and system |
| CN110286637B (en) * | 2019-06-20 | 2021-10-01 | 共享智能铸造产业创新中心有限公司 | Information acquisition method, device and system |
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