CN103194738B - Strengthened diffusion plate and manufacture method thereof - Google Patents
Strengthened diffusion plate and manufacture method thereof Download PDFInfo
- Publication number
- CN103194738B CN103194738B CN201210004195.8A CN201210004195A CN103194738B CN 103194738 B CN103194738 B CN 103194738B CN 201210004195 A CN201210004195 A CN 201210004195A CN 103194738 B CN103194738 B CN 103194738B
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- base plate
- diffusion plate
- kink
- germule
- plate
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Abstract
A kind of strengthened diffusion plate and manufacture method thereof, this manufacture method comprises a shaping process steps, a cleaning step, a punch steps, a surface treatment step and a cleaning, made strengthened diffusion plate comprises one to connect connection section kink in order to the connection section, arranged on plate being connected to a filming equipment, and the base plate of connecting bending folding part, base plate is formed with multiple through hole.Kink, connection section, base plate match and define a diffluence room, and base plate is protruded to diffluence room's direction arc by with kink junction and swelled towards central authorities.By the structure design of this base plate, the deformation quantity of base plate heated bending can be reduced, and this strengthened diffusion plate can repeat regeneration use, therefore can consumables cost be reduced.
Description
[technical field]
The invention relates to a kind of gas diffusion plate and manufacture method thereof, particularly about a kind of strengthened diffusion plate and manufacture method thereof.
[background technology]
Consult Fig. 1, existing gas diffusion plate 2 be arranged at a filming equipment 1 arrange on plate 11, and comprise one, in order to be arranged at this, plate body 21, on plate 11 is set by this plate body 21 around the air chamber 22 defined, and to be multiplely formed on this plate body 21 and to make this air chamber 22 be communicated in extraneous through hole 23.When reality uses, this filming equipment 1 comprises one and the spaced heated seats 12 of existing gas diffusion plate 2, and a thing 13 to be plated is positioned in this heated seats 12, then gas is conveyed in this air chamber 22, and by through hole 23, gas dispersion is exported, and then make gas be heated after can be deposited on the surface of this thing 13 to be plated equably, so can complete plated film operation.
Consult Fig. 2, because the bulk strength of existing gas diffusion plate 2 is not enough, and with this heated seats 12 apart from quite close, therefore the structural strength of this plate body 21 can reduce in high temperature environments, in addition, can by this plate body 21 to extrapolation after being positioned at this air chamber 22 when gases are heated, they expand.Therefore, existing gas diffusion plate 2 easily produces diastrophic problem under the double influence of hot environment and gaseous tension.
And when existing gas diffusion plate 2 produces flexural deformation, output gas will be caused cannot to be deposited on this thing 13 to be plated equably, and cause the thickness evenness of plated film finished product to be deteriorated.Therefore must by this filming equipment 1 hesitation, the existing gas diffusion plate 2 that could more renew, but the rate of capacity utilization of this filming equipment 1 also can be caused to decline the while of shutdown.In addition, because this gas diffusion plate 2 takes normal replacing, and regeneration use cannot be repeated, so that increase consumables cost.
So how improving above-described shortcoming, is the important goal of the art person's ongoing effort always.
[summary of the invention]
Therefore, object of the present invention, is namely providing a kind of not easily temperature distortion and the strengthened diffusion plate of renewable repeated use.
Another object of the present invention, uses providing one that strengthened diffusion plate can be made to repeat regeneration exactly, and then can reduce the manufacture method of strengthened diffusion plate of consumables cost.
So strengthened diffusion plate of the present invention, includes a junction, a kink and a base plate.Wherein, this connection section is in order to be connected to the arranging on plate of this filming equipment.This kink connects this connection section, and this base plate connects this kink, and this base plate is formed with multiple through hole.This base plate and this connection section, this kink define a diffluence room jointly, and this base plate protrudes to this diffluence room's direction arc by with this kink junction and swell towards central authorities.
The manufacture method of strengthened diffusion plate of the present invention, comprises a shaping process steps, a cleaning step, a punch steps, a surface treatment step and a cleaning.
In this shaping process steps, that a bulk is processed into a germule, this germule comprises the kink that a junction, connects this connection section, and one connects the base plate of this kink, this base plate is formed with multiple through hole, and this base plate and this connection section, kink define a diffluence room jointly.
In this cleaning step, be the impurity removing this first embryo surface.
In this punch steps, first prepare the lower press tool that on, press tool and matches with press tool on this, this germule is arranged in this lower press tool, and the diffluence room of this germule is towards this lower press tool, orders about press tool on this and carry out stamping press towards the base plate of this strengthened diffusion plate.
In this surface treatment step, being carry out surface treatment operation to moving back the germule after mould, making this first embryogeny one corrosion-resistant and the protective layer of resistance to electricity slurry impact.
In this cleaning, be then the impurity of the protective layer removing this germule, namely make this strengthened diffusion plate.
Effect of the present invention is; by make this base plate predeformation become by with this kink junction towards central authorities and protrude the structure of swelling to this diffluence room's arc; make the not easily temperature distortion of this base plate, therefore can reduce the number of times of this filming equipment shutdown maintenance, and then improve overall plated film production capacity.If the temperature distortion under life-time service of this base plate; still can after removing the protective layer formed by described surface treatment; sequentially revert to the form before not using and renewable repeated use via this punch steps, surface treatment step and cleaning, therefore can consumables cost be reduced.
[accompanying drawing explanation]
Fig. 1 is a cross-sectional schematic, illustrates that existing gas diffusion plate is arranged at the aspect of a filming equipment;
Fig. 2 is a cross-sectional schematic, and the existing gas diffusion plate of aid illustration has produced diastrophic aspect;
Fig. 3 is a schema, and the manufacture method of a preferred embodiment of strengthened diffusion plate of the present invention is described;
Fig. 4 is a cross-sectional schematic, the enforcement aspect pressing down stroke in the punch steps in the manufacture method of this preferred embodiment of aid illustration;
Fig. 5 is a cross-sectional schematic, the enforcement aspect of moving back line journey in the punch steps in the manufacture method of this preferred embodiment of aid illustration;
Fig. 6 is a sectional view, and this preferred embodiment and a reference plane are described;
Fig. 7 is a part sectioned view, the pass through aperture of a base plate in this preferred embodiment of aid illustration;
Fig. 8 is a cross-sectional schematic, and the enforcement aspect of this preferred embodiment and a filming equipment is described; And
Fig. 9 is a cross-sectional schematic, and the enforcement aspect of the strengthened diffusion plate of this preferred embodiment after being subject to thermal deformation is described.
3 filming equipments
31 arrange plate
32 heated seats
33 dash plates
331 pores
34 things to be plated
4 connection sections
5 base plate
51 through holes
511 wide aperture sections
512 small-bore sections
The section of shoulder in 513
52 first surfaces
53 second curved surfaces
531 central points
6 kinks
61 inner bending districts
62 outer bent areas
7 diffluence room
8 screws
Press tool on 91
92 times press tools
101 ~ 105 ... step
P1 reference plane
[embodiment]
Aforementioned and other technology contents, feature and effect for the present invention, in the detailed description of following cooperation with reference to one of graphic preferred embodiment, can clearly present.
Consult Fig. 3, be one of the manufacture method preferred embodiment of strengthened diffusion plate of the present invention, this manufacture method includes shaping process steps 101, cleaning step 102, punch steps 103, surface treatment step 104 and a cleaning 105.
Consult Fig. 3 and Fig. 4, first, carry out this shaping process steps 101, one bulk is made a germule by turning operation, this germule comprises the kink 6 that a junction 4, connects this connection section 4, and one connects the base plate 5 of this kink 6, and this base plate 5 defines a diffluence room 7 jointly with this connection section 4, kink 6, and utilizes a bore operation in the base plate 5 of this germule, make multiple through hole 51 separately.In this preferred embodiment, this diffuser plate material is aluminum or aluminum alloy.
Then, carry out this cleaning step 102, be in this step utilize ultrasonic washer remove this first embryo surface by described shaping process steps 101 the impurity such as chip or oil stain that remains.
Continue and consult Fig. 3, then punch steps 103 is carried out, coordinate and consult Fig. 4 and Fig. 5, press tool 91 and a lower press tool 92 matched with press tool on this 91 in preparation one, this germule is arranged in this lower press tool 92, and the diffluence room 7 of this germule is towards this lower press tool 92, order about the base plate 5 of press tool 91 towards this strengthened diffusion plate as shown in Fig. 4 hollow core arrow on this and carry out stamping press, on this, press tool 91 is pressing down in stroke, 1.3mm to 1.7mm can be pressed down further after this base plate 5 of conflict, be preferably 1.5mm, make this base plate 5 by with this kink 6 junction towards central authorities and swell to this curved protrusion in diffluence room 7 direction.Afterwards, to order about on this press tool 91 as shown in Fig. 5 hollow core arrow towards away from this strengthened diffusion plate direction displacement to carry out moving back line journey, after moving back line journey, this base plate 5 resilient portion deformation quantity, consult Fig. 6, this base plate 5 has the first surface 52 that is positioned at this diffluence room 7, and one in contrast to this first surface 52 and the second curved surface 53 be positioned at outside this diffluence room 7, and define the reference plane P1 that trims the periphery of this second curved surface 53, the central point 531 of this second curved surface 53 is 0.1mm to 0.5mm apart from the vertical range of this reference plane P1, be preferably 0.3mm.
Continue and consult Fig. 3, carrying out this surface treatment step 104 more afterwards, is carry out anodizing operation to moving back this germule after mould in this step, makes this first embryogeny one corrosion-resistant and the protective layer of resistance to electricity slurry impact.
Finally, carry out this cleaning 105, remove the impurity of the protective layer of this germule, namely make this strengthened diffusion plate.
Consult Fig. 6 and Fig. 8, strengthened diffusion plate made by above manufacture method of the present invention includes a junction 4, kink 6 and a base plate 5, this connection section 4 arranges on plate 31 in order to what be connected to this filming equipment 3, this kink 6 connects this connection section 4, this base plate 5 connects this kink 6, and this base plate 5 is formed with multiple through hole 51.This base plate 5 defines a diffluence room 7 jointly with this connection section 4, this kink 6, and this base plate 5 protrudes to this diffluence room 7 direction arc by with this kink 6 junction and swell towards central authorities, this base plate 5 has the first surface 52 that is positioned at this diffluence room 7, and one is positioned at the second outer curved surface 53 of this diffluence room 7 in contrast to this first surface 52, and define the reference plane P1 that trims the periphery of this second curved surface 53, the central point 531 of this second curved surface 53 is 0.1mm to 0.5mm apart from the vertical range of this reference plane P1, is preferably 0.3mm.In addition, this kink 6 comprise one with the inner bending district 61 of this diffluence room 7 homonymy, and one in contrast to the outer bent area 62 in this inner bending district 61.
Consult Fig. 7, every pass through aperture 51 of this base plate 5 is perpendicular to the surface of this base plate 5, and this every pass through aperture 51 has the small-bore section 512 that a wide aperture section 511, being communicated in this diffluence room 7 is communicated in the external world, and one by this wide aperture section 511 towards the section of shoulder 513 in small-bore section 512 convergent, preferably gas guide effect can be reached by this structure design.
Consult Fig. 8, when reality uses, this strengthened diffusion plate be arranged at a filming equipment 3 arrange on plate 31, this filming equipment 3 also comprises one and the spaced heated seats 32 of this base plate 5, and one is arranged at this and arranges between plate 31 and this strengthened diffusion plate, and be formed with the dash plate 33 of multiple pore 331.And a thing 34 to be plated is positioned in this heated seats 32, then after making these pore 331 rectifications first via dash plate 33 of gas direction as shown by the arrows in Figure 6, send in this diffluence room 7 again, then gas can be dispersed and be output in the external world by the arrangement of described through hole 51, the gas exported can be deposited on the surface of this thing 34 to be plated equably to form coatings after the heat effect being subject to this heated seats 32, so can complete plated film operation.
Strengthened diffusion plate of the present invention and the design of manufacture method above thereof, have the following stated advantage when reality uses:
(1) not easily temperature distortion:
This base plate 5 by this described punch steps 103 predeformation become by with this kink 6 junction towards central authorities and protrude the structure of swelling to this diffluence room 7 direction, and produce the compressive residual stress of the stretching residual stress of this temperature distortion of an opposing in this inner bending district 61, and produce the stretching residual stress of the compressive residual stress of this temperature distortion of an opposing in this outer bent area 62.Therefore, the more not easily deformation under the double influence of described hot environment and gaseous tension of this base plate 5, and the work-ing life of this strengthened diffusion plate can be extended, therefore can reduce the number of times of this filming equipment 3 shutdown maintenance, and then overall plated film production capacity can be improved.
What deserves to be explained is, the deformation quantity of this base plate 5 predeformation is quite small, therefore, even if the film thickness uniformity demand of plated film operation still can be met under the situation of non-heated bending, and this base plate 5 should be cancelled out each other by the deformation quantity of thermal deformation and predeformation after used a period of time, now, this base plate 5 deformation becomes writing board shape (see Fig. 9), and can reach the film thickness uniformity of plated film operation the best.
(2) renewable repeated use:
If this base plate 5 is subject to thermal deformation under long-term use; cause gas cannot be deposited on this thing 34 to be plated equably; this strengthened diffusion plate can be removed the protective layer formed by described surface treatment step 104; again sequentially via this punch steps 103, surface treatment step 104 and cleaning 105; this strengthened diffusion plate is made to revert to the form before not using and renewable repeated use; therefore, the consumables cost of this strengthened diffusion plate can be reduced.
In sum, strengthened diffusion plate of the present invention and manufacture method above design, this base plate 5 predeformation become by with this kink 6 junction towards central authorities and protrude the structure of swelling, more not easily temperature distortion to this diffluence room 7 direction arc.If this base plate 5 temperature distortion under life-time service; still can after this protective layer of removal; sequentially revert to the form before not using and renewable repeated use via this punch steps 103, surface treatment step 104 and cleaning 105 again, therefore really can reach object of the present invention.
The above, be only preferred embodiment of the present invention, when not limiting scope of the invention process with this, the simple equivalence namely generally done according to the present patent application the scope of the claims and invention description content changes and modifies, and all still remains within the scope of the patent.
Claims (4)
1. the manufacture method of a strengthened diffusion plate comprises:
One shaping process steps, one bulk is processed into a germule, this germule comprises the kink that a junction, connects this connection section, and one connects the base plate of this kink, this base plate is formed with multiple through hole, and this base plate and this connection section, kink define a diffluence room jointly;
One cleaning step, removes the impurity of this first embryo surface;
One punch steps, the lower press tool that in preparation one, press tool and matches with press tool on this, this germule is arranged in this lower press tool, and the diffluence room of this germule is towards this lower press tool, orders about press tool on this and carry out stamping press towards the base plate of this strengthened diffusion plate;
One surface treatment step, carries out surface treatment operation to moving back this germule after mould, makes this first embryogeny one corrosion-resistant and the protective layer of resistance to electricity slurry impact; And
One cleaning, removes the impurity of the protective layer of this germule, namely makes this strengthened diffusion plate.
2. the manufacture method of strengthened diffusion plate as claimed in claim 1, wherein, this base plate has the first surface that is positioned at this diffluence room, and one in contrast to this first surface and the second curved surface be positioned at outside this diffluence room, and define the reference plane that trims the periphery of this second curved surface, in this punch steps, on this, press tool is pressing down in stroke, 1.3mm to 1.7mm can be pressed down further after this base plate of conflict, make this base plate by with this kink junction towards central authorities and swell to curved protrusion the in this diffluence room direction, after moving back mould, this base plate resilient portion deformation quantity, the central point of this second curved surface is made to be 0.1mm to 0.5mm apart from the vertical range of this reference plane.
3. the manufacture method of strengthened diffusion plate as claimed in claim 2, wherein, in this shaping process steps, this germule is that this through hole is then utilize bore operation to make by made by turning operation.
4. the manufacture method of strengthened diffusion plate as claimed any one in claims 1 to 3, wherein, in this surface treatment step, anodizing is adopted in this surface treatment operation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210004195.8A CN103194738B (en) | 2012-01-09 | 2012-01-09 | Strengthened diffusion plate and manufacture method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210004195.8A CN103194738B (en) | 2012-01-09 | 2012-01-09 | Strengthened diffusion plate and manufacture method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103194738A CN103194738A (en) | 2013-07-10 |
| CN103194738B true CN103194738B (en) | 2016-04-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210004195.8A Expired - Fee Related CN103194738B (en) | 2012-01-09 | 2012-01-09 | Strengthened diffusion plate and manufacture method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103194738B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101018886A (en) * | 2004-07-12 | 2007-08-15 | 应用材料股份有限公司 | Plasma uniformity control by gas diffuser curvature |
| CN202011903U (en) * | 2011-03-15 | 2011-10-19 | 光阳工业股份有限公司 | Strengthened diffusion plate |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004107687A (en) * | 2002-09-13 | 2004-04-08 | Tokita Cvd Systems Kk | Nozzle for open type cvd system |
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2012
- 2012-01-09 CN CN201210004195.8A patent/CN103194738B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101018886A (en) * | 2004-07-12 | 2007-08-15 | 应用材料股份有限公司 | Plasma uniformity control by gas diffuser curvature |
| CN202011903U (en) * | 2011-03-15 | 2011-10-19 | 光阳工业股份有限公司 | Strengthened diffusion plate |
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| Publication number | Publication date |
|---|---|
| CN103194738A (en) | 2013-07-10 |
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Granted publication date: 20160413 Termination date: 20190109 |
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| CF01 | Termination of patent right due to non-payment of annual fee |