CN103189893A - Pattern inspection apparatus and pattern inspection method - Google Patents
Pattern inspection apparatus and pattern inspection method Download PDFInfo
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- CN103189893A CN103189893A CN2010800699374A CN201080069937A CN103189893A CN 103189893 A CN103189893 A CN 103189893A CN 2010800699374 A CN2010800699374 A CN 2010800699374A CN 201080069937 A CN201080069937 A CN 201080069937A CN 103189893 A CN103189893 A CN 103189893A
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/001—Industrial image inspection using an image reference approach
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T1/00—General purpose image data processing
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/70—Determining position or orientation of objects or cameras
- G06T7/73—Determining position or orientation of objects or cameras using feature-based methods
- G06T7/74—Determining position or orientation of objects or cameras using feature-based methods involving reference images or patches
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30144—Printing quality
Abstract
Provided is a pattern inspection method, wherein, when executing an inspecting of whether each of the patterns on measurement objects, which are conveyed continuously in a first direction and onto which the same pattern is patterned, is pass or fail, a search for an angle correction image that has the pattern thereof deviated for an angle equivalent to the amount of angle deviation of the pattern to be inspected is executed within a storage apparatus, which has stored therein a plurality of angle correction images that have the angles of the patterns thereof deviated at predetermined angles with respect to a direction towards which the angle correction images are supposed to be oriented, and the angle correction image that was found as a result of the search is compared to images of each of the patterns that have had position deviation thereof corrected.
Description
Technical field
The present invention relates to check along each figure of direction measuring object thing that transport continuously, the same figure of construction good image inspecting device, image checking mehtod and be used for carrying out the program of Same Way whether.
Background technology
With the same figure of press printing regulation, each one the cut-out of each figure paper, corrugated paper, plastic sheeting or other thin slice (below, be called " the sheet-fed ") storage that is transported to regulation with travelling belt or other conveyer with the zone.
On figure printed on each sheet-fed, often result from paper supply skew in the printing equipment the printing skew, that printings such as the tone difference of the blending ratio adjustment deficiency of printing ink, the filth that the abnormal printing of the printing equipment that results from is bad, the foreign matter that results from adheres to are plunderred, resulted from the wiping of ink viscosity adjustment deficiency of resulting from is bad.
Therefore, after each sheet-fed has printed figure, each sheet-fed temporarily transport to storage area during, perhaps, during transport (for example, machining area or packaging area) from this temporary transient storage area to other operating area, that is, before each sheet-fed finally dispatches from the factory, must implement the figure inspection whether each figure obtains normally (that is, as designing) printing.
Usually, such inspection is undertaken by image inspecting device.
Image inspecting device comprises the memory storage of Memory Reference image, and each figure and this benchmark image are compared, and according to determinating reference, only has the figure more than being judged to be on an equal basis just to be judged as normal figure.
Under the situation that each figure is printed at the assigned position place on each sheet-fed, image inspecting device can judge without barrier whether each figure is good, but the situation that has each figure to depart from assigned position to be printed (situation of " position skew " takes place), the perhaps situation (situation of generation " angular deflection ") that is printed obliquely with respect to the carriage direction of sheet-fed.
Such position skew and angular deflection take place, and its reason is: (A) printing is with respect to the skew of the profile (perhaps, the center of each sheet-fed) of each sheet-fed; And (B) result from each sheet-fed transport with respect to both sides or a side in the skew of when shooting video camera (camera head).
And then the occurrence cause as (A) skew has: (a) paper supply skew; And (b) extraction skew.So-called paper supply skew refers to when graphic printing, supplies with the skew that takes place because sheet-fed departs from the position of regulation, so-calledly extracts skew, refers to the skew that blank for example etc. extracts with respect to printed pattern.
Each sheet-fed is after having carried out graphic printing, the figure inspection of carrying out during transporting to temporary storage area is On line inspection (carrying out the figure inspection simultaneously with printing), contrast with it, the figure inspection that each sheet-fed carries out during transporting to other operating area from temporary storage area be the off-line inspection (with printing not simultaneously, be after printing finishes, to carry out the figure inspection).
Like this, under the situation of occurrence positions skew or angular deflection, even figure itself normally is printed, because position skew or angular deflection also often are judged as improper figure.
In order to handle such problem, existing image inspecting device has carried out being used for avoiding resulting from the disposal of the erroneous judgement of position skew or angular deflection.
Usually, existing image inspecting device is made of following apparatus: camera head, each the printed figure on each sheet-fed that transports with constant speed along a direction is made a video recording, and make the check image of each figure; Memory storage is used for the Memory Reference image; And image processing apparatus, read benchmark image from memory storage, compare with the check image of each figure, judge whether each figure is good.
Fig. 7 is the skeleton diagram of the whether good process of judging of each figure in the existing image inspecting device.
For simplicity, suppose that sheet-fed 400 makes rectangular shape, each sheet-fed 400 transports continuously along direction A, on each sheet-fed 400, and printing equilateral triangle figure 500.This equilateral triangle figure 500 supposes that the center (center of gravity) of equilateral triangle figure 500 is consistent with the center 401 of sheet-fed 400 under the situation of normal printing, and, one side be printed as carriage direction A quadrature with sheet-fed 400 among three limits of equilateral triangle.
Camera head is made a video recording to each printed on the sheet-fed 400 equilateral triangle figure 500, makes the check image of figure inspection usefulness.
Shown in Fig. 7 (A), the situation of the 500 occurrence positions skew of imagination equilateral triangle figure and angular deflection.
Particularly, originally the point that should locate with respect to the center (center of gravity) of equilateral triangle figure 500 is the center 401 of sheet-fed 400, equilateral triangle figure 500 is in distance Y of carriage direction A skew, with the direction B of carriage direction A quadrature, be offset a distance X, moreover when rotating at the center 401 around sheet-fed 400, (rotation) angle θ in the counterclockwise direction tilts.
At first, image processing apparatus on the check image of equilateral triangle figure 500, detection position side-play amount Y, X and angular deflection amount θ.
Then, shown in Fig. 7 (B), image processing apparatus is on the check image of equilateral triangle figure 500, and is initial, makes 500 translations of equilateral triangle figure, and position offset Y, X are decided to be zero.That is image processing apparatus is consistent with the center 401 of sheet-fed 400 by the center that makes equilateral triangle figure 500, thereby makes the position skew on the carriage direction A and eliminate with the position skew on the direction B of carriage direction A quadrature.
And then, shown in Fig. 7 (C), image processing apparatus is on the check image of equilateral triangle figure 500, centered by the center 401 of sheet-fed 400, make equilateral triangle figure 500 be rotated in a clockwise direction an angle θ (affined transformation), angular deflection is eliminated.Under this state, equilateral triangle figure 500 is on check image, be in the position that should locate originally (that is, the center of equilateral triangle figure 500 is consistent with the center 401 of sheet-fed 400), and, the direction that sensing should be pointed to originally (that is, one side becoming among three limits of equilateral triangle figure 500 is parallel with direction B).
Thereafter, whether image processing apparatus will so have been proofreaied and correct position skew and angular deflection on check image equilateral triangle figure 500 compares with the benchmark image of reading from memory storage 502, judge good as the figure of equilateral triangle figure 500.
As mentioned above, existing image inspecting device detect position skew and angular deflection and proofreaied and correct position skew and angular deflection after, check image and the benchmark image of each figure compared.
Therefore, can avoid resulting from the erroneous judgement of position skew or angular deflection, can correctly judge each figure well whether.
As such image inspecting device, the image inspecting device described in patent documentation 1 and 2 is arranged.
The prior art document
Patent documentation
Patent documentation 1: No. the 3604333rd, patent (spy opens the 2002-63566 communique)
Patent documentation 2: the spy opens the 2006-138768 communique
Summary of the invention
As mentioned above, according to existing image inspecting device, though can avoid resulting from the erroneous judgement of position skew and angular deflection, but because particularly the correction of angular deflection must have huge treatment capacity, so under the situation of using the limitary control device of its processing power (computing machine), the increaseization in processing time is inevitable.
The present invention carries out in view of the problem in this existing image inspecting device, its purpose is, even a kind of whether good situation about judging of using the limitary control device of its processing power (computing machine) to carry out each figure is provided, also can avoid the whether good program of judging image inspecting device, the image checking mehtod of required processing time increaseization and being used for carrying out Same Way of each figure.
In order to achieve the above object, the present invention checks along each figure of direction measuring object thing that transport continuously, the same figure of construction good image inspecting device whether, it provides a kind of image inspecting device, comprise: camera head, above-mentioned each figure is made a video recording, make the check image of above-mentioned each figure; Pick-up unit, in above-mentioned check image, detect on the first direction of the position that should locate originally with respect to above-mentioned each figure position offset and with the second direction of above-mentioned first direction quadrature on position offset and the direction that should point to originally with respect to above-mentioned each figure in the clockwise direction or the angular deflection amount counterclockwise; Means for correcting, in above-mentioned check image, position skew and the position on the above-mentioned second direction of proofreading and correct on the above-mentioned first direction are offset; Memory storage, storage is gone up a plurality of angularity correction images that are offset a predetermined angle in the clockwise direction or counterclockwise with respect to the direction that above-mentioned each figure should point to originally; Indexing unit is retrieved the above-mentioned angularity correction image of one of above-mentioned map migration and above-mentioned angular deflection amount angle same from above-mentioned memory storage; And comparison means, to the above-mentioned angularity correction that retrieves with above-mentioned indexing unit with image with above-mentioned correction the above-mentioned check image that is offset of position skew on the above-mentioned first direction and the position on the above-mentioned second direction compare.
In image inspecting device of the present invention, above-mentioned indexing unit is preferably retrieved the angularity correction image of the angle in the scope of a θ ± α of above-mentioned map migration, to replace the above-mentioned angularity correction image of one of above-mentioned map migration and above-mentioned angular deflection amount angle same.
θ: with above-mentioned angular deflection amount angle same
α: predetermined permissible range angle
In image inspecting device of the present invention, above-mentioned indexing unit preferably retrieve above-mentioned figure with close to the angularity correction image of the angular deflection of above-mentioned angular deflection amount, to replace the above-mentioned angularity correction image of one of above-mentioned map migration and above-mentioned angular deflection amount angle same.
Moreover, the present invention checks that it provides a kind of image checking mehtod, comprising: first process along each figure of direction measuring object thing that transport continuously, the same figure of construction good image checking mehtod whether, above-mentioned each figure is made a video recording, make the check image of above-mentioned each figure; Second process, in above-mentioned check image, detect on the first direction of the position that should locate originally with respect to above-mentioned each figure position offset and with the second direction of above-mentioned first direction quadrature on position offset and the direction that should point to originally with respect to above-mentioned each figure in the clockwise direction or the angular deflection amount counterclockwise; The 3rd process, in above-mentioned check image, position skew and the position on the above-mentioned second direction of proofreading and correct on the above-mentioned first direction are offset; The 4th process, from direction pre-prepd, that should point to originally with respect to above-mentioned each figure in the clockwise direction or counterclockwise a plurality of angularity corrections usefulness images of a predetermined angle of skew, retrieve the angularity correction image of one of above-mentioned map migration and above-mentioned angular deflection amount angle same; And the 5th process, to the above-mentioned angularity correction that in above-mentioned the 4th process, retrieves with image with in above-mentioned the 3rd process, proofreaied and correct the above-mentioned check image that position skew on the above-mentioned first direction and the position on the above-mentioned second direction be offset and compared.
In image checking mehtod of the present invention, in above-mentioned the 4th process, preferably retrieve the angularity correction image of the angle in the scope of a θ ± α of above-mentioned map migration, to replace the above-mentioned angularity correction image of one of above-mentioned map migration and above-mentioned angular deflection amount angle same.
θ: with above-mentioned angular deflection amount angle same
α: predetermined permissible range angle
In image checking mehtod of the present invention, in above-mentioned the 4th process, preferably retrieve above-mentioned figure with close to the angularity correction image of the angular deflection of above-mentioned angular deflection amount, to replace the above-mentioned angularity correction image of one of above-mentioned map migration and above-mentioned angular deflection amount angle same.
Moreover, the present invention transports along a direction continuously be used to making computing machine carry out inspection, whether each figure of the measuring object thing of the same figure of construction the program of good image checking mehtod, it is program that the processing that said procedure carries out provides a kind of processing that is made of following processing: first handles, in above-mentioned check image, detect on the first direction of the position that should locate originally with respect to above-mentioned each figure position offset and with the second direction of above-mentioned first direction quadrature on position offset, and the direction that should point to originally with respect to above-mentioned each figure in the clockwise direction or the angular deflection amount counterclockwise; Second handles, and in above-mentioned check image, proofreaies and correct position skew on the above-mentioned first direction and the position on the above-mentioned second direction and is offset; The 3rd handles, from direction pre-prepd, that should point to originally with respect to above-mentioned each figure in the clockwise direction or counterclockwise a plurality of angularity corrections usefulness images of a predetermined angle of skew, retrieve above-mentioned figure and be offset an angularity correction image with above-mentioned angular deflection amount angle same in advance; And the reason everywhere, to the above-mentioned angularity correction that in the above-mentioned the 3rd handles, retrieves with image with in above-mentioned second handles, proofreaied and correct the above-mentioned check image that position skew on the above-mentioned first direction and the position on the above-mentioned second direction be offset and compared.
In program of the present invention, in the above-mentioned the 3rd handles, preferably retrieve the angularity correction image of the angle in the scope of a θ ± α of above-mentioned map migration, to replace the above-mentioned angularity correction image of one of above-mentioned map migration and above-mentioned angular deflection amount angle same.
θ: with above-mentioned angular deflection amount angle same
α: predetermined permissible range angle
In program of the present invention, in the above-mentioned the 3rd handles, preferably retrieve above-mentioned figure with close to the angularity correction image of the angular deflection of above-mentioned angular deflection amount, to replace the above-mentioned angularity correction image of one of above-mentioned map migration and above-mentioned angular deflection amount angle same.
The effect of invention
Image inspecting device of the present invention comprises that a plurality of angularity corrections that stored angles in advance has been offset are with the memory storage of images.Indexing unit has the angularity correction image that is offset the angle same skew with the actual angle of each figure from these angularity corrections with extracting out the image, comparison means will be compared with image and the check image that the correction of only carrying out the position skew also still keeps angular deflection by the angularity correction that indexing unit is extracted out, judges whether each figure is good.
In existing image inspecting device, owing to carried out the rotation correction (affined transformation) that usefulness is eliminated in the angular deflection of the huge treatment capacities of needs, so can't prevent the increaseization in processing time.To this, different with existing image inspecting device in image inspecting device of the present invention, in the check image of each figure, need not to carry out the correction of angular deflection.Like this, image testing device of the present invention owing to need not needs the correction of the angular deflection of huge treatment capacity, so can avoid the increase in processing time required in the figure inspection.
In addition, have in use under the situation of control device of same treatment capacity, image inspecting device of the present invention and existing image inspecting device compare, and the inspection amount of average time per unit is increased.
For example, as camera head, under the situation of the colored area camera of using 5,000,000 pixels, inspection number of times with respect to the average time per unit in the existing image inspecting device (1 second) is 10(time/second), the inspection number of times of the average time per unit in the image inspecting device of the present invention (1 second) is 16.6(time/second).Like this, image inspecting device of the present invention is compared with existing image inspecting device, can realize 1.66 times processing speed.
In addition, image checking mehtod of the present invention and program that be used for to carry out Same Way also can be received the effect same with image inspecting device of the present invention.
Description of drawings
Fig. 1 is the block scheme of structure that the image inspecting device of first embodiment of the present invention is shown.
Fig. 2 is the planimetric map when seeing each sheet-fed that has printed the figure that the image inspecting device with first embodiment of the present invention checks from the top.
Fig. 3 is that the inscape that the image inspecting device of first embodiment of the present invention is shown is the block scheme of the structure of image processing apparatus.
Fig. 4 is the block scheme of the functional working condition of central processing unit (CPU) that control device is shown.
Fig. 5 is the process flow diagram of the action during figure that the image inspecting device of first embodiment of the present invention is shown checks.
Fig. 6 is the skeleton diagram that the whether good process of judging of each figure in the image inspecting device of first embodiment of the present invention is shown.
Fig. 7 is the skeleton diagram that the whether good process of judging of each figure in the existing image inspecting device is shown.
Embodiment
(first embodiment)
Fig. 1 is the block scheme of structure that the image inspecting device 100 of first embodiment of the present invention is shown.
Fig. 2 be see from the top printed figure 200 that the image inspecting device 100 with present embodiment checks as each thin slice 210 of sheet-fed the time planimetric map.
Each thin slice 210 forms rectangular shape, loads with constant interval on the conveyer 220 that is made of travelling belt, is transported along direction A with constant speed by conveyer 220.
As shown in Figure 2, on each thin slice 210, print the figure 200 of the equilateral triangle of same shape.The figure 200 of each equilateral triangle is under the situation of normal printing, carriage direction A quadrature with a limit and thin slice 210, and, be positioned at the mode of central authorities of the Width (with the direction B of the carriage direction A quadrature of thin slice 210) of thin slice 210 with its center (center of gravity), be printed on the thin slice 210.
As shown in Figure 1, the image inspecting device 100 of present embodiment is by the equilateral triangle figure 200 that is printed on the thin slice 210 is made a video recording, make each equilateral triangle figure 200 check image camera head 110 and based on the check image of each equilateral triangle figure 200 made from camera head 110, judge each equilateral triangle figure 200 whether preferable image treating apparatus 120 constitutes.
Moreover, as shown in Figure 1, connect display device 130 at image processing apparatus 120.
Fig. 3 is the block scheme that the structure of image processing apparatus 120 is shown.
As shown in Figure 3, image processing apparatus 120 is by mould-number (A/D) converting means 121 that simulated data is transformed into numerical data; Control device 122; Digital data converting is become number-Mo (D/A) converting means 123 of simulated data; And first memory storage, 124 formations.
Various controls program and other fixing data that first memory 1222 storage central processing units 1221 are used for carrying out.
Fig. 4 is the block scheme of functional working condition of central processing unit (CPU) 1221 that control device 122 is shown.
As shown in Figure 4, central processing unit (CPU) 1221, with regard to functional, constituted by following part: pick-up unit 1221A, in the check image of each equilateral triangle figure 200, detect on the direction A of the position that should locate originally with respect to each equilateral triangle figure 200 position offset X and with the direction B of direction A quadrature on position offset Y and the direction that should point to originally with respect to each equilateral triangle figure 200 in the clockwise direction or the angular deflection amount θ counterclockwise; Means for correcting 1221B, in the check image of each equilateral triangle figure 200, the position skew on the orientation A and the position skew on the direction B; Indexing unit 1221C is from one of first memory storage 124 retrieval equilateral triangle figures, the 200 skew angularity correction usefulness image (back will be narrated) with angular deflection amount θ angle same; And comparison means 1221D, to the angularity correction that retrieves with indexing unit 1221C with image with proofreaied and correct the check image that position skew on the direction A and the position on the direction B be offset with means for correcting 1221B and compared.
A plurality of angularity corrections that the check image of 124 storages of first memory storage and each equilateral triangle figure 200 compares view data of image.
So-called angularity correction image refers to the direction that should point to originally with respect to each equilateral triangle figure 200 go up the image that is offset a predetermined angle in the clockwise direction or counterclockwise.
As mentioned above, each equilateral triangle figure 200 under the situation of normal printing, with the carriage direction A quadrature of a limit and thin slice 210, and, be positioned at the mode at center of the thin slice 210 of rectangular shape with this center (center of gravity), be printed on the thin slice 210.
124 storages of first memory storage are with respect to the equilateral triangle figure 200 of normal printing, spend to the scopes of 10 degree 0.1, around the center (center of gravity) of equilateral triangle figure 200, in the clockwise direction with respectively tilt a plurality of images of 0.1 degree of counter clockwise direction both sides, as the angularity correction image.
For example, as shown in Figure 6, first memory storage 124 storage: tilt the angularity correction of an angle θ 1 in the counterclockwise direction with image 124A, tilt the angularity correction of an angle θ 2 in the counterclockwise direction with image 124B, with respect to the equilateral triangle figure 200 of the normal printing angle θ that tilts in the counterclockwise direction with respect to the equilateral triangle figure 200 of normal printing with respect to the equilateral triangle figure 200 of normal printing
3Angularity correction with image 124C, with respect to the equilateral triangle figure 200 of the normal printing angle θ that tilts in the counterclockwise direction
4Angularity correction with image 124D, with respect to the equilateral triangle figure 200 of the normal printing angle θ that tilts in the counterclockwise direction
5Angularity correction with image 124E.
Fig. 5 is the process flow diagram of the action during figure that the image inspecting device 100 of present embodiment is shown checks, Fig. 6 is the skeleton diagram that the whether good process of judging of each figure in the image inspecting device 100 of present embodiment is shown.
Below, referring to figs. 1 through Fig. 6, the action during the figure that the image inspecting device 110 of present embodiment is described checks.
Each figure of 110 pairs of printed equilateral triangle figures 200 on each thin slice 210 that transports with constant speed along direction A of camera head is made a video recording, and makes the check image (the step S100 of Fig. 5) of the figure inspection usefulness of each equilateral triangle figure 200.
The check image of Manufactured each equilateral triangle figure 200 is sent to the step S110 of A/D commutator 121(Fig. 5 of image processing apparatus 120), be transformed into numerical data from simulated data.This numerical data is sent to control device 122.
Shown in Fig. 6 (A), the situation of the occurrence positions skew of one of imagination equilateral triangle figure 200 and angular deflection.
Particularly, suppose with respect to the center (center of gravity) of equilateral triangle figure 200 reference point 201 for the point (center of thin slice 210) that should be positioned at originally, equilateral triangle figure 200 is in distance Y of the carriage direction A of thin slice 210 skew, be offset a distance X at the direction B with carriage direction A quadrature, and then, around the reference point 201 angle θ that tilts in the counterclockwise direction.
At first, the pick-up unit 1221A of central processing unit (CPU) 1221 detects position offset Y, X and angular deflection amount θ (the step S120 of Fig. 5) on the check image of equilateral triangle figure 200.
Then, shown in Fig. 6 (B), the means for correcting 1221B of central processing unit (CPU) 1221 makes 200 translations of equilateral triangle figure on the check image of equilateral triangle figure 200, and position offset Y, X are decided to be zero (the step S130 of Fig. 5).That is, the means for correcting 1221B of central processing unit (CPU) 1221 is by with the centrally aligned reference point 201 of equilateral triangle figure 200, thereby makes the position skew on the carriage direction A of thin slice 210 and eliminate with the position skew on the direction B of carriage direction A quadrature.
At this moment, equilateral triangle figure 200 is in the state that angular deflection only takes place on check image.
Then, the indexing unit 1221C of central processing unit (CPU) 1221 from a plurality of angularity corrections that are stored in first memory storage 124 with the images, the retrieval angularity correction usefulness image (the step S140 of Fig. 5) with the angular deflection amount θ angle same of equilateral triangle figure 200 that tilts.
For example, at θ=θ
3Situation under, indexing unit 1221C, shown in Fig. 6 (C), angle the drive is proofreaied and correct and to be used image as a comparison with image 124C.
Then, the comparison means 1221D of central processing unit (CPU) 1221 is corrected position skew, only kept the equilateral triangle figure 200 shown in equilateral triangle figure 200(Fig. 6 (B) of angular deflection) with relatively compare (the step S150 of Fig. 5) with the angularity correction of image with image 124C with indexing unit 1221C extraction.
By this relatively, judge whether good as the figure of equilateral triangle figure 200 by comparison means 1221D.
Result of determination and angularity correction are delivered to digital-analog conversion device 123 with image 124C from control device 122, are transformed into simulated data again.
This simulated data is sent to display device 130, shows (the step S160 of Fig. 5) in display device 130.
As mentioned above, image inspecting device 100 according to present embodiment, consider to prepare in advance a plurality of angularity correction images of angular deflection, among these angularity corrections usefulness images, extraction has the angularity correction image with the skew of the angular deflection angle same of reality, and these angularity corrections are compared with image and each equilateral triangle figure 200.
Therefore, different with existing image inspecting device in the image inspecting device 100 of present embodiment, in the check image of each equilateral triangle figure 200, need not to carry out for the rotation correction (affined transformation) of eliminating angular deflection.The correction of angular deflection must have huge treatment capacity, but because the image inspecting device 100 of present embodiment need not to carry out the correction of angular deflection, so can avoid figure to check that the required processing time increases.
The image inspecting device 100 of present embodiment is not limited to said structure, can do various changes.
For example, in the image inspecting device 100 of present embodiment, angularity correction is stored in first memory storage 124 with the view data of image, but angularity correction is not limited to first memory storage 124 with the storage of the view data of image.For example, in first memory (ROM) 1222, also be possible with the image data storage of image with angularity correction, in this case, just need not to arrange first memory storage 124.
In addition, in the image inspecting device 100 of present embodiment, for simplicity, printed figure 200 is got the figure of equilateral triangle on each thin slice 210, but the shape of printed figure is arbitrarily on thin slice 210.
In addition, the shape of thin slice 210 is not limited to rectangle, can get shape arbitrarily.
In addition, in the image inspecting device 100 of present embodiment, the angularity correction image setting that is stored in first memory storage 124 is the center (center of gravity) around equilateral triangle figure 200, each 0.1 degree that tilts, but the five equilibrium ratio at inclination angle is not limited to 0.1 degree.As required, also can select other numerical value (for example, 0.05 degree or 0.01 degree).
(second embodiment)
In the image inspecting device 100 of above-mentioned first embodiment, the indexing unit 1221C of central processing unit (CPU) 1221 from a plurality of angularity corrections that are stored in first memory storage 124 with among the images, the retrieval angularity correction usefulness image (the step S140 of Fig. 5) with the angular deflection amount θ angle same of equilateral triangle figure 200 that tilts.
Therefore, in second embodiment, the tilt angularity correction image of an angle the scope of the angular deflection amount θ ± α of equilateral triangle figure 200 in of the indexing unit 1221C of central processing unit (CPU) 1221 retrieval is with one of the replacement inclination angularity correction image with the angular deflection amount θ angle same of equilateral triangle figure 200.
For example, if be set at α=0.05 degree, then first memory storage 124 to the scope of 10 degree, covers whole inclination angles at 0.1 degree.
If the angular deflection amount θ of equilateral triangle figure 200 is set at 0.14 degree, then in the image inspecting device 100 of first embodiment, detect the angularity correction with the angular deflection amount θ angle same of equilateral triangle figure 200 and become impossible with image.To this, in the image inspecting device of present embodiment, because under the situation that is set at α=0.05 degree, 0.14 degree is included in the scope of 0.1 ± 0.05 degree, so indexing unit 1221C retrieval is used image as a comparison with the angularity correction image of the angle inclination of 0.1 degree.
Like this, image inspecting device according to present embodiment, one is not stored into situation in first memory storage 124 with the angularity correction of the angular deflection amount θ angle same of equilateral triangle figure 200 with image even tilt, and can extract out with this angularity correction with the most approximate angularity correction image of image yet.
Perhaps, the indexing unit 1221C of central processing unit (CPU) 1221 retrieval tilt one with the angular deflection amount θ of the equilateral triangle figure 200 angularity correction image of approximate angle the most, also be possible with angularity correction with the angular deflection amount θ angle same of equilateral triangle figure 200 of replacement inclination with image.
For example, be under the situation of 0.14 degree at the angular deflection amount θ of equilateral triangle figure 200, indexing unit 1221C extracts out with close to the i.e. angularity correction image that tilts of the angle of 0.1 degree of the angle of 0.14 degree, uses image as a comparison.
Utilizability on the industry
In the above-described embodiment, check that object is that figure 200 is printed on the thin slice 210, but as thin slice 210, except plastic sheeting, also comprise paper, corrugated paper, by the sheet material (plate object) that rigid body constitutes, other is the object of all flat shapes (two-dimensional shapes).
Moreover the program that image inspecting device of the present invention, image checking mehtod and being used for carried out Same Way is not limited to the object of flat shape (two-dimensional shapes), also can be applicable to the object of three-dimensional shape (3D shape).For example, under the situation that same mechanical part is transported, because from above flat shape (two-dimensional shapes) when seeing each of these mechanical parts also be considered to a kind of of figure, so also can apply the present invention to the complanation figure of mechanical part.
Moreover, for three-dimensional shapes such as mechanical part (3D shape), for example, by from the top, side (four directions), below, oblique upper, tiltedly a plurality of directions such as below are implemented figure inspection of the present invention, and these check results are comprehensive in addition, also can implement the 3D shape inspection in the three-dimensional shape.
Description of reference numerals
The image inspecting device of 100 first embodiments of the present invention
110 camera heads
120 image processing apparatus
130 display device
200 equilateral triangle figures
210 thin slices
220 conveyers
121 A/D commutators
122 control device
123 digital-analog conversion devices
124 first memory storages
1221 central processing units (CPU)
1222 first memories
1223 second memories
1224 input interfaces
1225 output interfaces
1226 buses
Claims (9)
1. image inspecting device, this is to check along each figure of direction measuring object thing that transport continuously, the same figure of construction good image inspecting device whether, comprising:
Camera head is made a video recording to above-mentioned each figure, makes the check image of above-mentioned each figure;
Pick-up unit, in above-mentioned check image, detect on the first direction of the position that should locate originally with respect to above-mentioned each figure position offset and with the second direction of above-mentioned first direction quadrature on position offset and the direction that should point to originally with respect to above-mentioned each figure in the clockwise direction or the angular deflection amount counterclockwise;
Means for correcting, in above-mentioned check image, position skew and the position on the above-mentioned second direction of proofreading and correct on the above-mentioned first direction are offset;
Memory storage, storage is gone up a plurality of angularity correction images that are offset a predetermined angle in the clockwise direction or counterclockwise with respect to the direction that above-mentioned each figure should point to originally;
Indexing unit is retrieved the above-mentioned angularity correction image of one of above-mentioned map migration and above-mentioned angular deflection amount angle same from above-mentioned memory storage; And
Comparison means, to the above-mentioned angularity correction that retrieves with above-mentioned indexing unit with image with above-mentioned correction the above-mentioned check image that is offset of position skew on the above-mentioned first direction and the position on the above-mentioned second direction compare.
2. image inspecting device as claimed in claim 1 is characterized in that,
Above-mentioned indexing unit is retrieved the angularity correction image of the angle in the scope of a θ ± α of above-mentioned map migration, replacing the above-mentioned angularity correction image of one of above-mentioned map migration and above-mentioned angular deflection amount angle same,
θ: with above-mentioned angular deflection amount angle same,
α: predetermined permissible range angle.
3. image inspecting device as claimed in claim 1 is characterized in that,
Above-mentioned indexing unit retrieve above-mentioned figure with close to the angularity correction image of the angular deflection of above-mentioned angular deflection amount, to replace the above-mentioned angularity correction image of one of above-mentioned map migration and above-mentioned angular deflection amount angle same.
4. image checking mehtod, this is to check along each figure of direction measuring object thing that transport continuously, the same figure of construction good image checking mehtod whether, comprising:
First process is made a video recording to above-mentioned each figure, makes the check image of above-mentioned each figure;
Second process, in above-mentioned check image, detect on the first direction of the position that should locate originally with respect to above-mentioned each figure position offset and with the second direction of above-mentioned first direction quadrature on position offset and the direction that should point to originally with respect to above-mentioned each figure in the clockwise direction or the angular deflection amount counterclockwise;
The 3rd process, in above-mentioned check image, position skew and the position on the above-mentioned second direction of proofreading and correct on the above-mentioned first direction are offset;
The 4th process, from direction pre-prepd, that should point to originally with respect to above-mentioned each figure in the clockwise direction or counterclockwise a plurality of angularity corrections usefulness images of a predetermined angle of skew, retrieve the angularity correction image of one of above-mentioned map migration and above-mentioned angular deflection amount angle same; And
The 5th process, to the above-mentioned angularity correction that in above-mentioned the 4th process, retrieves with image with in above-mentioned the 3rd process, proofreaied and correct the above-mentioned check image that position skew on the above-mentioned first direction and the position on the above-mentioned second direction be offset and compared.
5. image checking mehtod as claimed in claim 4 is characterized in that,
In above-mentioned the 4th process, retrieve the angularity correction image of the angle in the scope of a θ ± α of above-mentioned map migration, replacing the above-mentioned angularity correction image of one of above-mentioned map migration and above-mentioned angular deflection amount angle same,
θ: with above-mentioned angular deflection amount angle same,
α: predetermined permissible range angle.
6. image checking mehtod as claimed in claim 4 is characterized in that,
In above-mentioned the 4th process, retrieve above-mentioned figure with close to the angularity correction image of the angular deflection of above-mentioned angular deflection amount, to replace the above-mentioned angularity correction image of one of above-mentioned map migration and above-mentioned angular deflection amount angle same.
7. program, this be used to computing machine is carried out check along a direction transport continuously, each figure of the measuring object thing of the same figure of construction program of good image checking mehtod whether,
The processing that said procedure carries out is made of following processing:
First handles, in above-mentioned check image, detect on the first direction of the position that should locate originally with respect to above-mentioned each figure position offset and with the second direction of above-mentioned first direction quadrature on position offset and the direction that should point to originally with respect to above-mentioned each figure in the clockwise direction or the angular deflection amount counterclockwise;
Second handles, and in above-mentioned check image, proofreaies and correct position skew on the above-mentioned first direction and the position on the above-mentioned second direction and is offset;
The 3rd handles, from direction pre-prepd, that should point to originally with respect to above-mentioned each figure in the clockwise direction or counterclockwise a plurality of angularity corrections usefulness images of a predetermined angle of skew, retrieve above-mentioned figure and be offset an angularity correction image with above-mentioned angular deflection amount angle same in advance; And
The reason everywhere, to the above-mentioned angularity correction that in the above-mentioned the 3rd handles, retrieves with image with in above-mentioned second handles, proofreaied and correct the above-mentioned check image that position skew on the above-mentioned first direction and the position on the above-mentioned second direction be offset and compared.
8. program as claimed in claim 7 is characterized in that,
In the above-mentioned the 3rd handles, retrieve the angularity correction image of the angle in the scope of a θ ± α of above-mentioned map migration, replacing the above-mentioned angularity correction image of one of above-mentioned map migration and above-mentioned angular deflection amount angle same,
θ: with above-mentioned angular deflection amount angle same,
α: predetermined permissible range angle.
9. program as claimed in claim 7 is characterized in that,
In the above-mentioned the 3rd handles, retrieve above-mentioned figure with close to the angularity correction image of the angular deflection of above-mentioned angular deflection amount, to replace the above-mentioned angularity correction image of one of above-mentioned map migration and above-mentioned angular deflection amount angle same.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2010/071034 WO2012070135A1 (en) | 2010-11-25 | 2010-11-25 | Pattern inspection apparatus and pattern inspection method |
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| Publication Number | Publication Date |
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| CN103189893A true CN103189893A (en) | 2013-07-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2010800699374A Pending CN103189893A (en) | 2010-11-25 | 2010-11-25 | Pattern inspection apparatus and pattern inspection method |
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|---|---|
| JP (1) | JPWO2012070135A1 (en) |
| KR (1) | KR20130081281A (en) |
| CN (1) | CN103189893A (en) |
| WO (1) | WO2012070135A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105975372A (en) * | 2015-02-16 | 2016-09-28 | 罗伯特·博世有限公司 | Method of testing graphics displayed by a display device |
| CN106660361A (en) * | 2015-04-21 | 2017-05-10 | 株式会社尼利可 | Register control method and device |
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| JPH10206134A (en) * | 1997-01-17 | 1998-08-07 | Matsushita Electric Works Ltd | Position detecting method by image processing |
| US20030137665A1 (en) * | 2002-01-18 | 2003-07-24 | Nec Electronics Corporation | Pattern test device |
| CN1701964A (en) * | 2004-05-24 | 2005-11-30 | 佳能株式会社 | Image processing apparatus and image processing method for the same |
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| JPH04233670A (en) | 1990-12-28 | 1992-08-21 | Omron Corp | Picture processor |
| JPH06207816A (en) | 1991-06-22 | 1994-07-26 | Shinko Electric Ind Co Ltd | Image position corrector |
| JP3422147B2 (en) | 1994-09-30 | 2003-06-30 | オムロン株式会社 | Position shift amount detecting device and image measuring device |
| JPH09128539A (en) | 1995-10-26 | 1997-05-16 | Hitachi Eng Co Ltd | Angle deviation detecting method for object image, method and device for image recognizing processing |
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2010
- 2010-11-25 WO PCT/JP2010/071034 patent/WO2012070135A1/en active Application Filing
- 2010-11-25 KR KR1020137006433A patent/KR20130081281A/en not_active Application Discontinuation
- 2010-11-25 CN CN2010800699374A patent/CN103189893A/en active Pending
- 2010-11-25 JP JP2012545573A patent/JPWO2012070135A1/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10206134A (en) * | 1997-01-17 | 1998-08-07 | Matsushita Electric Works Ltd | Position detecting method by image processing |
| US20030137665A1 (en) * | 2002-01-18 | 2003-07-24 | Nec Electronics Corporation | Pattern test device |
| CN1701964A (en) * | 2004-05-24 | 2005-11-30 | 佳能株式会社 | Image processing apparatus and image processing method for the same |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105975372A (en) * | 2015-02-16 | 2016-09-28 | 罗伯特·博世有限公司 | Method of testing graphics displayed by a display device |
| CN106660361A (en) * | 2015-04-21 | 2017-05-10 | 株式会社尼利可 | Register control method and device |
| CN106660361B (en) * | 2015-04-21 | 2019-04-19 | 株式会社尼利可 | Register control method and device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20130081281A (en) | 2013-07-16 |
| WO2012070135A1 (en) | 2012-05-31 |
| JPWO2012070135A1 (en) | 2014-05-19 |
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Application publication date: 20130703 |