CN103174758A - Anti-locking rotating device - Google Patents

Anti-locking rotating device Download PDF

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Publication number
CN103174758A
CN103174758A CN2013101092754A CN201310109275A CN103174758A CN 103174758 A CN103174758 A CN 103174758A CN 2013101092754 A CN2013101092754 A CN 2013101092754A CN 201310109275 A CN201310109275 A CN 201310109275A CN 103174758 A CN103174758 A CN 103174758A
Authority
CN
China
Prior art keywords
space ring
spacer ring
radial bearing
cod
axle sleeve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2013101092754A
Other languages
Chinese (zh)
Inventor
易葵
朱美萍
齐红基
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Institute of Optics and Fine Mechanics of CAS
Original Assignee
Shanghai Institute of Optics and Fine Mechanics of CAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Institute of Optics and Fine Mechanics of CAS filed Critical Shanghai Institute of Optics and Fine Mechanics of CAS
Priority to CN2013101092754A priority Critical patent/CN103174758A/en
Publication of CN103174758A publication Critical patent/CN103174758A/en
Pending legal-status Critical Current

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Abstract

The invention discloses an anti-locking rotating device which is characterized by comprising a shaft sleeve, a first radial bearing, an axial bearing, a second radial bearing, a third space ring, an axial bearing ball space ring, a second space ring, a shaft sleeve cover, a first space ring, a rotating shaft, a bolt, a rotating shaft cover, a key, a transmission gear and a fixing plate, wherein the second radial bearing, the third space ring, the axial bearing, the axial bearing ball space ring, the second space ring and the first radial bearing are sleeved between the rotating shaft and the shaft sleeve from inside to outside, and the first space ring and the shaft sleeve cover are sleeved on the rotating shaft and the shaft sleeve; the rotating shaft cover and the transmission gear are sleeved at the port of the rotating shaft through a bolt and the key; and the shaft sleeve and the fixing plate are fixed together. The anti-locking rotating device has high loading capacity; in particular, the axial bearing ball space ring is made of ceramic or polytetrafluoroethylene or graphite, so that the anti-locking rotating device has the capacity of stably running for a long time under a high-temperature and high-vacuum environment; and the problem that the rotating device is locked if a film coating machine is in high vacuum, high temperature and high load is solved.

Description

Anti-jamming slewing gear
Technical field
The present invention relates to vacuum coater, particularly a kind of anti-jamming slewing gear.More particularly, the present invention relates to a kind of improvement with the long-time anti-jamming slewing gear of high vacuum high temperature high capacity, it can be avoided under high vacuum high temperature high capacity working condition, causes failure and the corresponding economic loss of production process because slewing gear is stuck.
Background technique
In the vacuum coating process, for guaranteeing generally all will to be made by the plating element and rotate (as spherical rotary, Plane Rotation, planetary rotation etc.) by the uniformity of deposition materials on the plating element, this just needs corresponding slewing gear.Operate in due to these slewing gears under the condition of high vacuum, high temperature and high capacity, and thereby general lubricant oil can volatilization affect quality of forming film (absorption increase under the vacuum high-temperature condition, even rete comes off), this just makes the elements such as bearing in rotating mechanism not allow to add lubricant oil.Under these circumstances, the ball in bearing will damage with conventional steel spacer ring or copper spacer ring generation hard grind, the slightly long stuck phenomenon that just occurs of time.The present invention improves for this phenomenon exactly.
Summary of the invention
The purpose of this invention is to provide a kind of anti-jamming slewing gear, have high load capability; Especially the cod ball cage adopts pottery or teflon or graphite material to make, and has the ability of energy long-time steady operation under the high temperature high vacuum.Solved the long playing stuck problem of coater slewing gear under high vacuum, high temperature, high capacity.
Technical solution of the present invention is as follows:
a kind of anti-jamming slewing gear, its characteristics are, this device comprises axle sleeve, the first radial bearing, cod, the second radial bearing, the 3rd spacer ring, the cod ball cage, the second spacer ring, the axle sleeve lid, the first spacer ring, rotatingshaft, bolt, rotate shaft-cup, key, driving gear and fixed plate, between described rotatingshaft and axle sleeve, sheathed the second radial bearing successively from inside to outside, the 3rd spacer ring, cod, the cod ball cage, the second spacer ring and the first radial bearing, then sheathed the first spacer ring and axle sleeve cover, to rotate shaft-cup and driving gear is set in described rotatingshaft port by bolt and key, described axle sleeve and fixed plate are fixed together.
Described cod ball cage adopts pottery, teflon or graphite material to make.
Adopt three bearing structures on rotating, adopt two radial bearings and a cod, can guarantee like this stability of rotating, neither can rock, also can not beat.
In load, load is delivered to the inner ring of the first radial bearing by the 3rd spacer ring, then be delivered to cod by the second spacer ring, is delivered to the outer ring of the second radial bearing by the 3rd spacer ring, is delivered at last on axle sleeve and fixed plate.Such two radial bearings only can bear the power of circular runout, and axially the power of (load direction) is all born by cod, and because cod can bear large axial force, therefore, whole rotational structure can be born high load.
On anti-jamming, because load is all born by cod, so the wearing and tearing of the spacer ring of cod are the most severe, are the main causes that causes that slewing gear is stuck.The present invention adopts the spacer ring of pottery or teflon or graphite material, and the bits that wear and tear can not be bonded on ball, also can play lubricated effect, has long-time anti-jamming function.
Compared with prior art, the present invention has following excellent results:
1. adopt three bearing structures, have high load capability;
2. adopt the spacer ring of pottery or teflon or graphite material, having can long playing ability under the high temperature high vacuum.
Description of drawings
Fig. 1 is that the present invention rotates the Anti-blocking device cross-sectional view.
Embodiment
First see also Fig. 1, Fig. 1 is that the present invention rotates the Anti-blocking device cross-sectional view.as seen from the figure, the slewing gear that the present invention is anti-jamming, this device comprises axle sleeve 1, the first radial bearing 2, cod 3, the second radial bearing 4, the 3rd spacer ring 5, cod ball cage 6, the second spacer ring 7, axle sleeve lid 8, the first spacer ring 9, rotatingshaft 10, bolt 11, rotate shaft-cup 12, key 13, driving gear 14 and fixed plate 15, between described rotatingshaft 10 and axle sleeve 1, in axle to the axle outer end sheathed the second radial bearing 4 successively, the 3rd spacer ring 5, cod 3, cod ball cage 6, the second spacer ring 7 and the first radial bearing 2, then sheathed the first spacer ring 9 and axle sleeve lid 8, to rotate by bolt 11 and key 13 port that shaft-cup 12 and driving gear 14 are set in described rotatingshaft 10, described axle sleeve 1 and fixed plate 15 are fixed together.Described cod ball cage 6 adopts pottery, teflon or graphite material to make.
Experiment shows, apparatus of the present invention are used for a long time at coater, rotates to keep stable always, the phenomenon of card never occurs, and it is good that the sound that sends also keeps always, solved the stuck problem of coater slewing gear under high vacuum, high temperature, high capacity.Apparatus of the present invention can also be used for the positions such as the anti-jamming rotary bearing of rotation under high temperature, high vacuum, high load condition.

Claims (2)

1. an anti-jamming slewing gear, is characterized in that, this device comprises axle sleeve (1), the first radial bearing (2), cod (3), the second radial bearing (4), the 3rd spacer ring (5), cod ball cage (6), the second spacer ring (7), axle sleeve lid (8), the first spacer ring (9), rotatingshaft (10), bolt (11), rotate shaft-cup (12), key (13), driving gear (14) and fixed plate (15), between described rotatingshaft (10) and axle sleeve (1), in axle to external port sheathed the 3rd radial bearing (4) successively, the 3rd spacer ring (5), cod (3), cod ball cage (6), the second spacer ring (7) and the first radial bearing (2), then sheathed the first spacer ring (9) and the axle sleeve lid (8) of fixing, to rotate shaft-cup (12) and driving gear (14) is set in described rotatingshaft (10) port by bolt (11) and key (13), described axle sleeve (1) and fixed plate (15) are fixed together.
2. anti-jamming slewing gear according to claim 1, is characterized in that, described cod ball cage (6) adopts pottery, teflon or graphite material to make.
CN2013101092754A 2013-03-29 2013-03-29 Anti-locking rotating device Pending CN103174758A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2013101092754A CN103174758A (en) 2013-03-29 2013-03-29 Anti-locking rotating device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2013101092754A CN103174758A (en) 2013-03-29 2013-03-29 Anti-locking rotating device

Publications (1)

Publication Number Publication Date
CN103174758A true CN103174758A (en) 2013-06-26

Family

ID=48634833

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2013101092754A Pending CN103174758A (en) 2013-03-29 2013-03-29 Anti-locking rotating device

Country Status (1)

Country Link
CN (1) CN103174758A (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4575263A (en) * 1983-09-23 1986-03-11 Alfa-Laval Separation Ab Bearing device
JP2009248118A (en) * 2008-04-04 2009-10-29 Ntn Corp Back up roll device
CN201786907U (en) * 2010-09-03 2011-04-06 吉宏食品机械有限公司 Centre revolving spindle device
CN202108881U (en) * 2011-06-17 2012-01-11 联众(广州)不锈钢有限公司 Work roll thrust bearing
CN202768650U (en) * 2012-09-11 2013-03-06 厦门天机自动化有限公司 Main shaft mechanism with pre-tightening thrust bearing

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4575263A (en) * 1983-09-23 1986-03-11 Alfa-Laval Separation Ab Bearing device
JP2009248118A (en) * 2008-04-04 2009-10-29 Ntn Corp Back up roll device
CN201786907U (en) * 2010-09-03 2011-04-06 吉宏食品机械有限公司 Centre revolving spindle device
CN202108881U (en) * 2011-06-17 2012-01-11 联众(广州)不锈钢有限公司 Work roll thrust bearing
CN202768650U (en) * 2012-09-11 2013-03-06 厦门天机自动化有限公司 Main shaft mechanism with pre-tightening thrust bearing

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Application publication date: 20130626