CN103164320B - Inspection system, inspection information collect device - Google Patents
Inspection system, inspection information collect device Download PDFInfo
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- CN103164320B CN103164320B CN201210279291.3A CN201210279291A CN103164320B CN 103164320 B CN103164320 B CN 103164320B CN 201210279291 A CN201210279291 A CN 201210279291A CN 103164320 B CN103164320 B CN 103164320B
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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- Testing Or Calibration Of Command Recording Devices (AREA)
- Tests Of Electronic Circuits (AREA)
- General Factory Administration (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Debugging And Monitoring (AREA)
- Management, Administration, Business Operations System, And Electronic Commerce (AREA)
Abstract
The present invention provides inspection system, inspection information to collect device, compared with the situation fixing with the checks sequence of the inspection project of inspected object, can shorten the review time of inspected object.Inspection system (10) includes check device and external device (ED) (14), and check device has：Memory element, stores the multiple inspection programs for checking inspected object；Receiving unit, receives the inspection set information at least setting inspection project and checks sequence；Performance element, according to checks sequence, executes inspection program corresponding with inspection project；Inspection result transmitting element, sends the inspection result of the inspection project of performance element execution, and external device (ED) has：Check set information transmitting element, inspection set information is sent to check device；Collection unit, collects to the inspection result sending from check device；Sequencing unit, according to the summarized results of collection unit, is ranked up to the checks sequence of inspection project with disqualification rate order from high to low.
Description
Technical field
The present invention relates to inspection system, inspection information collect device.
Background technology
Management system as described below has been recorded in patent documentation 1：This management system enters line pipe to the processing meanss of substrate
Reason, this management system is characterised by, is being provided with factory's side setting of above-mentioned processing meanss to being processed by above-mentioned processing meanss
The check device that substrate is checked, is provided with the provider-side of above-mentioned processing meanss and obtains by above-mentioned check device via network
The master computer of the inspection information of substrate checking.
Equipment management system as described below has been recorded in patent documentation 2：This equipment management system possesses：Master computer；
Multiple equipment, they are controlled by this master computer, carry out predetermined processing respectively；And inspection unit, it is to by current engineering
Equipment carried out the product of predetermined processing and checked, this equipment management system is characterised by, it is right that above-mentioned each equipment possesses
The sensor unit that the state of each equipment in product treatment is monitored, according to this sensor unit sense this equipment or
In the case of the said goods exception, or it is this product departing from true in advance in the result by above-mentioned inspection unit inspection product
In the case of fixed critical field, the equipment of this current engineering is made to stop or notify this abnormality.
Prior art literature
Patent documentation 1：Japanese Unexamined Patent Publication 2003-7605 publication
Patent documentation 2：Japanese Unexamined Patent Publication 4-354663 publication
Content of the invention
It is an object of the invention to, provide a kind of checks sequence of inspection project with inspected object fixing situation phase
Ratio can shorten the inspection system of the review time of inspected object, inspection information collects device and inspection information collects journey
Sequence.
To achieve these goals, the inspection system of first aspect present invention includes check device and inspection information collects dress
Put, described check device has：Memory element, it stores the multiple inspection programs for checking inspected object；Receiving unit,
It receives the inspection set information at least setting inspection project and checks sequence；Performance element, its according to described checks sequence,
Execute described inspection program corresponding with described inspection project；And inspection result transmitting element, it sends by described execution
The inspection result of the described inspection project of unit execution, described inspection information collects device to be had：Check that set information sends single
Unit, described inspection set information is sent to described check device by it；Collection unit, it is to the institute sending from described check device
State inspection result to be collected；And sequencing unit, its according to the summarized results of described collection unit, with disqualification rate from height to
Low order is ranked up to the described checks sequence of described inspection project.
According to the second aspect of the invention, described sequencing unit is arranged to described checks sequence in the manner as described below
Sequence：In the case that described inspected object is reexamined, there occurs the underproof inspection of inspection in last time from checked
The project of looking into starts to execute inspection.
According to the third aspect of the invention we, collect device for a described inspection information, possess multiple described inspections and fill
Put.
According to the fourth aspect of the invention, inspection information collects device and includes：Check set information transmitting element, it is to inspection
Look into device and send inspection set information, this check device has：Memory element, it stores for checking the multiple of inspected object
Inspection program；Receiving unit, it receives the described inspection set information at least setting inspection project and checks sequence；Execute list
Unit, it executes inspection program corresponding with described inspection project according to described checks sequence；And inspection result transmitting element,
The inspection result of the inspection project that its transmission is executed by described performance element；Collection unit, it is sent out to from described check device
The inspection result of inspection project that send, described is collected；And sequencing unit, it collects knot according to described collection unit
Really, with disqualification rate, order from high to low is ranked up to the described checks sequence of described inspection project.
According to the fifth aspect of the invention, check that information total program makes computer as composition fourth aspect present invention
The unit that inspection information collects device carrys out function.
According to the invention of the present invention first, the four, the 5th aspects, there is effect as described below：With inspected object
The fixing situation of the checks sequence of inspection project is compared, and can shorten the review time of inspected object.
Invention according to a second aspect of the present invention, has effect as described below：When reexamining inspected object, with
Compare from the situation initially proceeding by inspection, that can shorten inspected object reexamines the time.
Invention according to a third aspect of the present invention, has effect as described below：With each inspection for multiple check devices
Look into device and be respectively provided with inspection information and collect the situation of device and compare, it is possible to increase inspection result collect efficiency.
Brief description
Fig. 1 is the structure chart of inspection system.
Fig. 2 is the summary construction diagram of check device.
Fig. 3 is the figure of the storage content of the nonvolatile memory illustrating check device.
Fig. 4 is the summary construction diagram of external device (ED).
Fig. 5 is the flow chart of the process being executed by check device.
Fig. 6 is the flow chart of the process being executed by external device (ED).
Symbol description
10 inspection systems
12 check devices
14 external device (ED)s (inspection information collects device)
16 networks
18 computers
18D nonvolatile memory
20 operating portions
22 display parts
40 computers
42 operating portions
44 display parts
48 hard disks
Specific embodiment
Below, embodiments of the present invention are illustrated.
[inspection system]
In FIG exemplified with the schematic configuration of the inspection system 10 of present embodiment.As shown in Figure 1, inspection system 10
It is configured to the knot that multiple check devices 12 are connected to each other via network 16 with the external device (ED) 14 collecting device as inspection information
Structure.
(check device)
In fig. 2 exemplified with the schematic configuration of check device 12.As shown in Figure 2, check device 12 is configured to including meter
Calculation machine 18.
Computer 18 has CPU (the Central Processing being connected to respectively as performance element by bus 18F
Unit) 18A, ROM (Read Only Memory) 18B, RAM (Random Access Memory) 18C, nonvolatile memory
18D and the structure of input/output interface (I/O) 18E.
I/O 18E is connected with including for carrying out the operation constituting to checking related operation button of operation etc.
Portion 20, by carry out to check display part 22 that related liquid crystal display of display etc. is constituted, for via network 16 and outside
Device 14 enter row data communication the network communication interface (I/F) 24 as receiving unit and inspection result transmitting element and
For connecting interface (I/F) 26 of being connected with inspected object F etc..
In addition, in the present embodiment although inspected object F is for example to be equipped with to take on the electronics such as image processing system
Printed wiring board of the control circuit of the control of equipment etc., but the species not limited to this of inspected object F.
Nonvolatile memory 18D as memory element is for example made up of the EEPROM etc. of rewritable storage content.As
Shown in Fig. 3, this nonvolatile memory 18D is previously stored with control program PO described later, is used for checking inspected object F
Multiple inspection programs P1, P2, P3 ....The plurality of inspection program is in the manner as described below respectively according to inspected object F's
Each inspection project is arranged, and for example checks that program P1 is corresponding with inspection project 1, checks that program P2 is corresponding with inspection project 2 ...
By that analogy.In addition, in the case of there are multiple inspected object F, each species according to inspected object F stores respectively
There is multiple inspection program corresponding with multiple inspection projects.
(inspection information collects device)
Exemplified with the schematic configuration of the external device (ED) 14 collecting device as inspection information in Fig. 4.As shown in Figure 4, outward
Part device 14 is configured to including computer 40, such as using general personal computer.
Computer 40 has and is connected to CPU 40A, ROM 40B, RAM 40C, non-volatile memories respectively by bus 40F
Device 40D and the structure of input/output interface (I/O) 40E.
The operating portion 42 constituting including keyboard and mouse etc. is connected with I/O 40E, is made up of liquid crystal display etc.
Display part 44, for via network 16 and check device 12 enter row data communication as checking set information transmitting element
Network communication interface (I/F) 46 and each for storing inspection result information of control program described later and inspected object F etc.
Hard disk 48 of the information of kind etc..
In addition, with regard to control program described later, being stored in advance in hard disk 48 as one in the present embodiment, passing through
Read in the program that this prestores to execute by CPU 40A.Alternatively, it is also possible to logging program in the recording mediums such as CD-ROM,
And executed by this program of the reading such as CD-ROM drive.
[action of inspection system]
Below, as the effect of present embodiment, with reference to flow chart to performed by check device 12 and external device (ED) 14
Process illustrate.
(action of check device)
First, with reference to the flow chart shown in Fig. 5, the process performed by check device 12 is illustrated.In addition, Fig. 5
Shown process is such execution：Inspected object F is connected on the connection I/F26 of check device 12 operator, and right
Operating portion 20 is operable to indicate the inspection proceeding by inspected object F, thus be stored in non-volatile by CPU 18A reading
Control program PO in property memorizer 18D is executing.More particularly, for carrying, the ministry of electronics industry (has been installed) in inspected object F
In the case of the printed wiring board of part, when substrate inspection in being for example recorded in Japanese Patent Application 2011-175979 etc. for the operator
When looking into device (on-line testing device, functional tester) upper setting printed wiring board, the ministry of electronics industry of probe and printed wiring board
Stannum (fillet) etc. of filling out of part contacts.The probe of base board checking device is passed through connection I/F 26 and is electrically connected with check device 12, because
This, when operator is operated to the operating portion 20 of check device 12 and proceeded by inspection (execution control program PO), checks
Device 12 carries out action inspection of electronic unit etc..
As shown in figure 5, in step 100, by the distinguished symbol of inspected object F from network service I/F 24 via network
16 are sent to external device (ED) 14.With regard to the distinguished symbol of inspected object F, it is including expression inspected object F as one
The distinguished symbol of at least one of the numeral of species (machine name) and factory number and mark.In addition, with regard to factory number,
Intrinsic numbering is had on each inspected object F.
With regard to distinguished symbol, such as, in the case of being stored in advance in the control circuit being equipped on inspected object F, it is
Obtained from this control circuit by this control circuit is sent with the request signal of the distinguished symbol asking inspected object F.
In addition, it is also possible to pass through according to reading (not shown) in the case that distinguished symbol is printed on inspected object F
Unit is taken to read printed distinguished symbol to obtain.
In a step 102, judge whether to have received at least via network 16, network service I/F 24 from external device (ED) 14
Set the inspection set information of inspection project and checks sequence, in the case of receiving inspection set information, transfer to step
102, carry out standby in the case of not receiving inspection set information, till checking set information.In addition, with regard to
The concrete process being executed by external device (ED) 14, will be described later.
At step 104, according to by checking the checks sequence that set information sets, read from nonvolatile memory 18D
Go out inspection program corresponding with the inspection project of current checks sequence and to be executed by CPU 18A.If inspected object F is
Printed wiring board, then check that program is the journey for example supply voltage of the circuit being equipped on printed wiring board tested
Program that whether sequence, inspection break with the presence or absence of the program of mistake, inspection distribution in the sending and receiving of signal, inspection electronics
Program of part regular event etc., but check the species not limited to this of program.
In step 106, whether the inspection result of the performed inspection program of judgement is that inspection is unqualified, be not to check
In the case of underproof, transfer to step 108, be check underproof in the case of, transfer to step 110.
In step 108, judge whether to have executed by checking all of inspection program that set information sets, in execution
In the case of complete all of inspection program, transfer to step 110, in the case of being not carried out all of inspection program, return
Same as described above process is repeated to step 104.
In step 110, by the inspection result of performed inspection project together with the distinguished symbol of inspected object F from
Network service I/F 24 is sent to external device (ED) 14 via network 16.
(inspection information collects the action of device)
Below, with reference to the flow chart shown in Fig. 6, to by collecting as inspection information performed by the external device (ED) 14 of device
Process illustrates.In addition, the process shown in Fig. 6 is such execution：Operating portion 42 is operable to indicate by operator
The beginning checking, thus being read in the control program being stored in hard disk 48 and executed by CPU 40A.
In step 200, judge external device (ED) 14 whether via network 16 and network service I/F 46 from check device
12 distinguished symbols that have received inspected object F.Receive the situation of the distinguished symbol of inspected object F in external device (ED) 14
Under, transfer to step 202, carry out standby in the case of the distinguished symbol not receiving inspected object F, until receive by
Till the distinguished symbol of check object F.
In step 202., the inspection result judging the last time of inspected object F related to the distinguished symbol receiving is
No it is stored in hard disk 48.In other words, this is equal to the last time judging in the inspected object F related to the distinguished symbol receiving
In inspection whether there is there occurs inspection underproof inspection project and specifically reexamine.
And, when the inspection result of last time of being stored with hard disk 48, and be specifically reexamine in the case of, transfer to
Step 204, and in the case of not being specifically to reexamine, be specifically initial examination in the case of, transfer to step 206.
In step 204, underproof inspection project will be there occurs in the inspection result of last time as initial inspection
Project, to set checks sequence (sequencing unit), the inspection set information including this inspection project and checks sequence is sent to inspection
Look into device 12.For example, there being 10 inspection projects, and perform the situation of the inspection of last time with the order of inspection project 1～10
Under, when there occurs unqualified in inspection project 3, using inspection project 3 as initial inspection project, check item will be set
The inspection set information of the checks sequence of mesh 3～10 is sent to check device 12.Thus, it is omitted in last time inspection and do not find not
The inspection of qualified inspection project 1,2, starts to execute inspection from inspection project 3.
On the other hand, in step 206, by CPU 40A according to the inspection in step 210 described later (collection unit)
The disqualification rate that the summarized results of result calculate order from high to low sets checks sequence (sequencing unit), will include this inspection
The inspection set information of project and checks sequence is sent to check device 12 from network service I/F 46 via network 16.Example
As, in the summarized results of the inspection result of step 210, each inspection project disqualification rate (NG incidence rate) from high to low according to
Secondary for inspection project 5 (8%), inspection project 3 (5%), inspection project 2 (3%), inspection project 1 (1%), inspection project 6～10
(0%), in the case of, the inspection set information being sequentially set as checks sequence with this is sent to check device 12.In addition,
In all of inspection project, due to securing the checks sequence of inspection project sometimes according to the scope of examination, therefore in this feelings
Under condition, do not change fixing order to set checks sequence.For example, in above-mentioned example, the disqualification rate of each inspection project
Order from high to low is inspection project 5,3,1,6～10, but is being previously determined according to this order for inspection project 1～3
In the case of being checked, inspection project 1～3 is processed as an inspection project securing its checks sequence,
Checks sequence is made to become the order of inspection project 5,1,2,3,6～10.In this case, using inspection project 1～3 as one
Inspection project is the maximum disqualification rate of inspection project 1～3 come the disqualification rate in the case of being processed.That is, in above-mentioned example
In son, because the disqualification rate (5%) of inspection project 3 is maximum, therefore using the disqualification rate of inspection project 1～3 as 5% place
Reason.
In a step 208, judge whether to have received each of inspected object F via network 16, network service I/F 46
The inspection result of inspection project, in the case of receiving inspection result, transfers to step 210, is not receiving inspection result
In the case of carry out standby, till receiving inspection result.
In step 210, will associate with distinguished symbol via the inspection result that network 16, network service I/F 46 receive
Get up to be stored in hard disk 48, and the inspection result that received according to this by CPU 40A and inspection result in the past, according to
Each machine name collects the inspection result (collection unit) of the inspected object F of multiple factory numbers.For example, to each inspection project
The meansigma methodss of review time etc. from current to the disqualification rate of the predetermined period in past and each inspection project carry out
Collect and store in hard disk 48.
In the step 212, the inspection result having collected is shown on display part 44.For example, every day is unqualified
Rate etc. is shown on display part 44 in the form of Pareto picture.
In step 214, judge operator whether operating portion 42 to be operated and indicated end and check, indicating
In the case of terminating to check, terminate this routine, in the case of not indicating that end checks, return to step 200 and repeat
Process same as described above.
As described above, in the present embodiment, by the inspection being calculated with the summarized results of the inspection result according to the past
The inspection set information that disqualification rate order from high to low is sorted to the checks sequence of inspection project is sent to inspection
Device 12 and execute the inspection of inspected object F.That is, start to execute successively inspection from being susceptible to underproof inspection project.
Thus, the time till shortening discovery inspection is unqualified, and shorten the overall review time.
In addition, occur in the inspection of last time unqualified and in the case of being reexamined, be omitted in during last time checks
Do not find underproof inspection project, there occurs that underproof inspection project starts to execute inspection, therefore from checked in last time
With compared with initial inspection project starts to re-start the situation of inspection, shorten the review time reexamined.Particularly, such as
Contact unqualified etc. such, complete at short notice the inspection analyzing and repair underproof in the case of, again examined
When looking into, check that underproof inspection project starts to execute inspection from there occurs, thus when shortening the inspection reexamined further
Between.In addition, e.g. broken string of distribution etc. is such, need the long-time inspection repaired underproof in the case of, carrying out weight
It is also possible to not there occurs from checked in last time that underproof inspection project starts to execute inspection during new inspection, but from initial
Inspection project start to execute inspection.
In addition, the structure (with reference to Fig. 2, Fig. 3) of the check device 12 illustrating in the present embodiment and external device (ED) 14 is
One example is it is of course possible to deleting unwanted part without departing from the spirit and scope of the invention or adding new part.
For example, in the present embodiment, list for an external device (ED) 14 use multiple check device 12 in the case of,
But can also only have a check device 12.
And, the flow process (with reference to Fig. 4, Fig. 5) of the process of illustrated control program in the present embodiment is also one
Example is it is of course possible to deleting unwanted step without departing from the spirit and scope of the invention or adding new step or change
Processing sequence.
Claims (4)
1. a kind of inspection system it is characterised in that
This inspection system includes check device and inspection information collects device,
Described check device has：Memory element, it stores the multiple inspection programs for checking multiple inspected objects；Receive
Unit, it receives the inspection set information at least setting inspection project and checks sequence；Performance element, it is according to described inspection
Sequentially, execute described inspection program corresponding with described inspection project；And inspection result transmitting element, it sends by described
The inspection result of the described inspection project of performance element execution,
Described inspection information collects device to be had：Collection unit, it enters to the described inspection result sending from described check device
Row collects；Sequencing unit, the situation of the inspected object of enforcement initial examination in checking the plurality of inspected object
Under, this sequencing unit according in the plurality of inspected object of described collection unit having been carried out check described tested
Check the summarized results of the described inspection result of elephant, with the described inspection to described inspection project for the disqualification rate order from high to low
Look into order to be ranked up, the feelings of the described inspected object that the enforcement in checking the plurality of inspected object is reexamined
Under condition, this sequencing unit there occurs, according in checking in last time, the content checking underproof inspection project, suitable to described inspection
Sequence be ranked up so that from this last time inspection in there occurs inspection underproof inspection project or initial inspection project from the beginning of
Execute inspection；And checking set information transmitting element, it will set the described checks sequence being sorted by described sequencing unit
Described inspection set information be sent to described check device.
2. inspection system according to claim 1 it is characterised in that
All described inspection projects have in the case of securing the inspection project of described checks sequence, with for this check item
The mode that mesh does not change fixing checks sequence is ranked up to the checks sequence of described all described inspection projects.
3. inspection system according to claim 1 and 2 it is characterised in that
Collect device for a described inspection information, possess multiple described check devices.
4. a kind of inspection information collect device it is characterised in that
This inspection information collects device and includes：
Collection unit, it collects to the inspection result sending from check device, and this check device has：Memory element, its
Store the multiple inspection programs for checking multiple inspected objects；Receiving unit, its receive at least set inspection project and
The inspection set information of checks sequence；Performance element, it executes inspection corresponding with described inspection project according to described checks sequence
Look into program；And inspection result transmitting element, the described inspection knot of the inspection project that its transmission is executed by described performance element
Really；
Sequencing unit, in the case of the inspected object of enforcement initial examination in checking the plurality of inspected object,
This sequencing unit is examined according to having been carried out the described of inspection in the plurality of inspected object of described collection unit
The summarized results of the described inspection result of object, with the described inspection to described inspection project for the disqualification rate order from high to low
Order is ranked up, the situation of the described inspected object that the enforcement in checking the plurality of inspected object is reexamined
Under, this sequencing unit there occurs, according in checking in last time, the content checking underproof inspection project, to described checks sequence
It is ranked up so that there occurs that the underproof inspection project of inspection or initial inspection project start to hold from this last time inspection
Row checks；And
Check set information transmitting element, it will set the described inspection of the described checks sequence being sorted by described sequencing unit
Set information is sent to described check device.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011274629A JP5018997B1 (en) | 2011-12-15 | 2011-12-15 | Inspection system, inspection information totalization apparatus, and inspection information totalization program |
| JP2011-274629 | 2011-12-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103164320A CN103164320A (en) | 2013-06-19 |
| CN103164320B true CN103164320B (en) | 2017-03-01 |
Family
ID=46980464
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210279291.3A Active CN103164320B (en) | 2011-12-15 | 2012-08-07 | Inspection system, inspection information collect device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP5018997B1 (en) |
| CN (1) | CN103164320B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6546810B2 (en) * | 2015-08-24 | 2019-07-17 | 新電元工業株式会社 | Inspection apparatus and inspection method |
| JP2018194356A (en) * | 2017-05-15 | 2018-12-06 | 東京エレクトロン株式会社 | Device inspection method |
| CN107330273A (en) * | 2017-06-30 | 2017-11-07 | 王中显 | Inspection result display methods, device and electronic equipment |
| CN111338731B (en) * | 2020-02-24 | 2022-05-24 | 腾讯科技（深圳）有限公司 | Page display method and device, computer readable storage medium and computer equipment |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62121375A (en) * | 1985-11-21 | 1987-06-02 | Hitachi Ltd | Automatic re-testing method in in-circuit tester |
| JPH01244380A (en) * | 1988-03-25 | 1989-09-28 | Nec Yamaguchi Ltd | Ic tester |
| JPH09292445A (en) * | 1996-04-30 | 1997-11-11 | Sony Corp | Testing apparatus for performance of product |
| JP2000081467A (en) * | 1998-09-04 | 2000-03-21 | Advantest Corp | Method for controlling procedure of execution in semiconductor testing device |
| CN1433265A (en) * | 2001-10-11 | 2003-07-30 | 富士机械制造株式会社 | Base board operation result checking device and method and electric circuit producing system and method |
| WO2011115174A1 (en) * | 2010-03-16 | 2011-09-22 | 東京エレクトロン株式会社 | Semiconductor manufacturing system |
-
2011
- 2011-12-15 JP JP2011274629A patent/JP5018997B1/en not_active Expired - Fee Related
-
2012
- 2012-08-07 CN CN201210279291.3A patent/CN103164320B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62121375A (en) * | 1985-11-21 | 1987-06-02 | Hitachi Ltd | Automatic re-testing method in in-circuit tester |
| JPH01244380A (en) * | 1988-03-25 | 1989-09-28 | Nec Yamaguchi Ltd | Ic tester |
| JPH09292445A (en) * | 1996-04-30 | 1997-11-11 | Sony Corp | Testing apparatus for performance of product |
| JP2000081467A (en) * | 1998-09-04 | 2000-03-21 | Advantest Corp | Method for controlling procedure of execution in semiconductor testing device |
| CN1433265A (en) * | 2001-10-11 | 2003-07-30 | 富士机械制造株式会社 | Base board operation result checking device and method and electric circuit producing system and method |
| WO2011115174A1 (en) * | 2010-03-16 | 2011-09-22 | 東京エレクトロン株式会社 | Semiconductor manufacturing system |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013124973A (en) | 2013-06-24 |
| CN103164320A (en) | 2013-06-19 |
| JP5018997B1 (en) | 2012-09-05 |
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