CN103163573B - Method for manufacturing micro lenses or micro-lens array - Google Patents
Method for manufacturing micro lenses or micro-lens array Download PDFInfo
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- CN103163573B CN103163573B CN201110423132.1A CN201110423132A CN103163573B CN 103163573 B CN103163573 B CN 103163573B CN 201110423132 A CN201110423132 A CN 201110423132A CN 103163573 B CN103163573 B CN 103163573B
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- gasoloid
- sio
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Abstract
The invention relates to the field of optical elements and discloses a method for manufacturing micro lenses or a micro-lens array. First, needed holes or a needed groove array are or is etched in the surface of an optical substrate by using the method of photoetching, and then SiO2 aerosol in corresponding weight is injected into the etched holes or the etched groove array; or a film layer which is not infiltrative with the SiO2 aerosol is plated on a non-etched area on the surface of the optical substrate first, and then the SiO2 aerosol is injected; and concave lenses, concave cylindrical lenses and the like are formed by using surface tension produced by infiltration of the SiO2 aerosol and optical substrate material, or convex lens, convex cylindrical lenses and the like are formed by using surface contractility produced by non-infiltration of the SiO2 aerosol and the film layer. The method for manufacturing the micro lenses or the micro-lens array is simple in process and low in cost, and the micro lenses or the micro-lens array can be quickly manufactured in a large scale.
Description
Technical field
The present invention relates to optical element field, particularly relate to a kind of method making lenticule or microlens array.
Background technology
Lenticule is the very small lens of a kind of size, and the lens traditionally diameter being less than 1mm are defined as lenticule, and some diameter is also considered to lenticule to the lens of more than 5mm greatly.Lenticule can be applicable to photovalve, as image sensing machine, the mobile phone digital optics module or solar cell etc. of digital camera, for focusing on received light beam, or the light beam that diffusion light electric device is launched.Microlens array provides optical versatility in for the microencapsulated of imaging applications.
Traditional making lenticule or the method for microlens array, as used backflow or method of diffusion, mechanical buffing etc., complex manufacturing technology, cost is high.
Summary of the invention
The invention provides a kind of method of brand-new making lenticule or microlens array, technique is simple, is applicable to extensive quick Fabrication.
For achieving the above object, technical scheme proposed by the invention is: a kind of method making lenticule or microlens array, comprises the steps: that (1) adopts photoetching process at optical substrate surface etch hole or groove array; (2) in hole or groove array, inject the SiO of corresponding weight
2gasoloid, described Optical substrate materials be can with SiO
2the material that gasoloid infiltrates, SiO
2gasoloid and optical substrate infiltrate, and surface forms concave surface or recessed cylinder; (3) SiO is solidified
2gasoloid.
Or, at injection SiO
2before gasoloid, first plate one deck and SiO in the non-etch areas in optical substrate surface
2the noninfiltrated rete of gasoloid, and then inject the SiO of corresponding weight
2gasoloid; SiO
2gasoloid and rete non-infiltration, surface forms convex surface or projection face, finally solidifies SiO again
2gasoloid.
Further, the Kong Weiwei circular hole of above-mentioned etching, micro-slotted eye or micro-cylindrical hole array etc.
Further, the SiO of injection
2aerocolloidal weight can according to SiO
2the volume of aerosol density and hole or groove is determined.The radius in hole is the radius-of-curvature of concave surface or convex surface, or the width of groove is the radius-of-curvature in recessed cylinder or projection face, and radius-of-curvature can determine the focal length of lens thus.
Beneficial effect of the present invention: a kind of method making lenticule or microlens array of the present invention, utilizes optical substrate and SiO
2the tension force that gasoloid infiltrates forms concavees lens, recessed cylindrical mirror etc.; At optical substrate plated surface one deck and SiO
2the noninfiltrated rete of gasoloid, utilizes SiO
2gasoloid and the noninfiltrated surperficial convergent force of rete, form convex lens, convex cylindrical mirror etc., and the method technique is simple, and cost is low, and can quick Fabrication on a large scale.
Accompanying drawing explanation
Fig. 1 is nick lens making process schematic diagram;
Fig. 2 is dimpling lens making process schematic diagram;
Fig. 3 is microsphere lens array schematic diagram;
Fig. 4 is micro-cylindrical lens array schematic diagram.
Reference numeral: 101, optical substrate; 102, SiO
2gasoloid; 201, optical substrate; 202, rete; 203, SiO
2gasoloid.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention will be further described.
As shown in Figure 1, be the manufacturing process schematic diagram of nick lens arra, first adopt photoetching process at the hole that optical substrate 101 surface etch needs or groove array, as cylindrical holes or oval aperture; Then in the hole or groove array of etching, inject the SiO of corresponding weight
2gasoloid 102, optical substrate 101 material be can with SiO
2the material that gasoloid 102 infiltrates, SiO
2gasoloid 102 and optical substrate 101 infiltrate, and utilize its surface tension to form concave surface or recessed cylindrical microlenses, most relief SiO
2gasoloid 102 spontaneous curing.As shown in figure 3 or 4, etching be cylindrical holes, then can form nick lens after spontaneous curing; What etch is micro-rectangular channel, then can form nick cylindrical lens after spontaneous curing.
As shown in Figure 2, be the manufacturing process schematic diagram of dimpling lens arra, equally first adopt photoetching process at the hole that optical substrate 201 surface etch needs or groove array, then plate one deck and SiO in the surperficial non-etch areas of optical substrate 201
2the noninfiltrated rete 202 of gasoloid 203, and then inject the SiO of corresponding weight
2gasoloid 203; SiO
2gasoloid 203 and rete 202 non-infiltration, surface forms convex surface or projection face, most relief SiO
2gasoloid 203 spontaneous curing.As shown in figure 3 or 4, etching be cylindrical holes, then can form dimpling lens after spontaneous curing; What etch is micro-rectangular channel, then can form dimpling cylindrical lens after spontaneous curing.
Utilize the method can etch hole or the groove of the required geometric configuration such as micro-circular hole, micro-slotted eye or micro-rectangular channel as required on optical substrate, just can be made into microsphere lens, micro-cylindrical mirror etc. accordingly.The SiO injected
2aerocolloidal weight can according to SiO
2the volume of aerosol density and hole or groove is determined.The radius in hole is the radius-of-curvature of concave surface or convex surface, or the width of groove is the radius-of-curvature in recessed cylinder or projection face, and radius-of-curvature can determine the focal length of lens thus.
Although specifically show in conjunction with preferred embodiment and describe the present invention; but those skilled in the art should be understood that; not departing from the spirit and scope of the present invention that appended claims limits; in the form and details to the various changes that the present invention makes, be protection scope of the present invention.
Claims (4)
1. make a method for lenticule or microlens array, it is characterized in that, comprise the steps: that (1) adopts photoetching process at optical substrate surface etch hole or groove array; (2) in hole or groove array, inject the SiO of corresponding weight
2gasoloid, described Optical substrate materials be can with SiO
2the material that gasoloid infiltrates, SiO
2gasoloid and optical substrate infiltrate, and surface forms concave surface or recessed cylinder; (3) SiO is solidified
2gasoloid.
2. make a method for lenticule or microlens array, it is characterized in that, comprise the steps: that (1) adopts photoetching process at optical substrate surface etch hole or groove array; (2) plate one deck and the noninfiltrated rete of SiO2 gasoloid in the non-etch areas in optical substrate surface, (3) inject the SiO2 gasoloid of corresponding weight in hole or groove array; SiO2 gasoloid and rete non-infiltration, surface forms convex surface or projection face; (4) SiO2 gasoloid is solidified.
3. a kind of method making lenticule or microlens array as claimed in claim 1 or 2, is characterized in that: the Kong Weiwei circular hole of described etching, micro-slotted eye or micro-cylindrical hole array.
4. a kind of method making lenticule or microlens array as claimed in claim 1 or 2, is characterized in that: the SiO of injection
2aerocolloidal weight is according to SiO
2the volume of aerosol density and hole or groove is determined.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110423132.1A CN103163573B (en) | 2011-12-16 | 2011-12-16 | Method for manufacturing micro lenses or micro-lens array |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110423132.1A CN103163573B (en) | 2011-12-16 | 2011-12-16 | Method for manufacturing micro lenses or micro-lens array |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103163573A CN103163573A (en) | 2013-06-19 |
| CN103163573B true CN103163573B (en) | 2015-02-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110423132.1A Active CN103163573B (en) | 2011-12-16 | 2011-12-16 | Method for manufacturing micro lenses or micro-lens array |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103353627B (en) * | 2013-07-12 | 2015-01-21 | 厦门理工学院 | Manufacturing method of micro lens array mold |
| CN103809226A (en) * | 2014-02-27 | 2014-05-21 | 四川云盾光电科技有限公司 | Method for shaping micro lens by means of infiltration etching |
| CN104297827A (en) * | 2014-05-28 | 2015-01-21 | 郑州恒昊玻璃技术有限公司 | Preparation method of lenticular glass grating |
| CN104345359B (en) * | 2014-10-28 | 2017-01-18 | 京东方科技集团股份有限公司 | Micro lens array, manufacturing method of micro lens array, image obtaining device and display device |
| CN106154359B (en) * | 2015-03-24 | 2018-03-20 | 福州高意光学有限公司 | A kind of aspherical optical element preparation method |
| CN105448197A (en) * | 2016-01-04 | 2016-03-30 | 京东方科技集团股份有限公司 | Display base plate and preparation method thereof as well as display device |
| CN115421229A (en) * | 2022-09-19 | 2022-12-02 | 上海交通大学 | Photoetching-polishing direct forming manufacturing method of SU-8 micro lens array |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1646613A (en) * | 2002-02-19 | 2005-07-27 | 光子－X有限公司 | Polymer nanocomposites for optical applications |
| CN1884208A (en) * | 2006-07-07 | 2006-12-27 | 霍镰泉 | Method for forming antisoil coating on substrate surface and products therefrom |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005036174A (en) * | 2003-07-02 | 2005-02-10 | Olympus Corp | Resin composition for optical material, and optical element using the composition |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1646613A (en) * | 2002-02-19 | 2005-07-27 | 光子－X有限公司 | Polymer nanocomposites for optical applications |
| CN1884208A (en) * | 2006-07-07 | 2006-12-27 | 霍镰泉 | Method for forming antisoil coating on substrate surface and products therefrom |
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| CN103163573A (en) | 2013-06-19 |
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