CN103163326A - Acceleration sensor of high-inherent frequency micro machine - Google Patents
Acceleration sensor of high-inherent frequency micro machine Download PDFInfo
- Publication number
- CN103163326A CN103163326A CN 201110424524 CN201110424524A CN103163326A CN 103163326 A CN103163326 A CN 103163326A CN 201110424524 CN201110424524 CN 201110424524 CN 201110424524 A CN201110424524 A CN 201110424524A CN 103163326 A CN103163326 A CN 103163326A
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- sensitive
- frequency micro
- acceleration sensor
- inherent frequency
- micro machine
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Abstract
An acceleration sensor of a high-inherent frequency micro machine comprises sensitive beams. The sensitive beam is located right above a main beam, the main beam is connected with the sensitive beams through a transition area, the sensitive beams are symmetrically arranged at two ends of a mass block in matching mode, sensitive resistors are arranged on the connecting parts of the sensitive beams and anchor areas, and a lower cover plate is connected with the mass block. The acceleration sensor of the high-inherent frequency micro machine has high inherent frequency.
Description
Technical field
The invention belongs to the microelectromechanical systems field, be specifically related to a kind of high natural frequency micro-machine acceleration transducer.
Background technology
Stress on the large back rest to a certain extent of the acceleration of silicon micro mechanical piezoresistance type acceleration sensor may make the beam fracture, should come bowl to decide the measurement range of sensor according to the fracture strength of silicon.
Summary of the invention
In order to overcome the shortcoming of above-mentioned prior art, the object of the present invention is to provide a kind of high natural frequency micro-machine acceleration transducer, have high natural frequency.
In order to achieve the above object, the technical scheme taked of the present invention is:
A kind of high natural frequency micro-machine acceleration transducer, comprise sensitive beam 2, sensitive beam 2 is positioned at directly over girder 4, girder 4 is realized being connected with sensitive beam 2 by zone of transition 6, sensitive beam 2 balanced configurations are at the two ends of mass 5, sensitive resistance 1 is placed in the joint in sensitive beam 2 and anchor district 3, and lower cover 7 is connected with mass 5.
The present invention has high natural frequency.
Description of drawings
Accompanying drawing is structural representation of the present invention.
Embodiment
The present invention is described in detail below in conjunction with accompanying drawing.
A kind of high natural frequency micro-machine acceleration transducer, comprise sensitive beam 2, sensitive beam 2 is positioned at directly over girder 4, girder 4 is realized being connected with sensitive beam 2 by zone of transition 6, sensitive beam 2 balanced configurations are at the two ends of mass 5, sensitive resistance 1 is placed in the joint in sensitive beam 2 and anchor district 3, and lower cover 7 is connected with mass 5.
The present invention has high natural frequency.
Claims (1)
1. high natural frequency micro-machine acceleration transducer, comprise sensitive beam (2), it is characterized in that: sensitive beam (2) is positioned at directly over girder (4), girder (4) is realized being connected by zone of transition (6) and sensitive beam (2), sensitive beam (2) balanced configuration is at the two ends of mass (5), sensitive resistance (1) is placed in the joint in sensitive beam (2) and anchor district (3), and lower cover (7) is connected with mass (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110424524 CN103163326A (en) | 2011-12-15 | 2011-12-15 | Acceleration sensor of high-inherent frequency micro machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110424524 CN103163326A (en) | 2011-12-15 | 2011-12-15 | Acceleration sensor of high-inherent frequency micro machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103163326A true CN103163326A (en) | 2013-06-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110424524 Pending CN103163326A (en) | 2011-12-15 | 2011-12-15 | Acceleration sensor of high-inherent frequency micro machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103163326A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104897926A (en) * | 2014-03-03 | 2015-09-09 | 英飞凌科技股份有限公司 | Acceleration sensor |
-
2011
- 2011-12-15 CN CN 201110424524 patent/CN103163326A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104897926A (en) * | 2014-03-03 | 2015-09-09 | 英飞凌科技股份有限公司 | Acceleration sensor |
| US10648999B2 (en) | 2014-03-03 | 2020-05-12 | Infineon Technologies Ag | Method for manufacturing an acceleration sensor |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C05 | Deemed withdrawal (patent law before 1993) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20130619 |