CN103149153B - Test analysis method for optical transmission characteristics of super-diffraction material - Google Patents
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Abstract
本发明公开了一种超衍射材料光传输特性的测试分析方法，利用测试激发光栅、待测超衍射材料样品和检测光栅实现测试分析，其特点是：光源从激发光栅侧入射，产生多级携带高空间频率的衍射波，然后通过待测超衍射材料样品，样品的透射波与检测光栅差频形成携带待测样品传输特性的干涉条纹。并可以通过旋转待测样品测试不同空间频率衍射波的透射光强或者干涉条纹对比度，以确定待测超衍射材料样品的光传输特性。本发明方法结构简洁，设计灵活，且测试方法便捷，实时性强。
The invention discloses a method for testing and analyzing the light transmission characteristics of a super-diffraction material. The test and analysis is realized by using a test excitation grating, a sample of a super-diffraction material to be tested, and a detection grating. The diffracted wave with high spatial frequency then passes through the superdiffraction material sample to be tested, and the transmitted wave of the sample is different from the detection grating to form interference fringes carrying the transmission characteristics of the sample to be tested. And the transmitted light intensity or interference fringe contrast of diffracted waves of different spatial frequencies can be tested by rotating the sample to be tested, so as to determine the light transmission characteristics of the super-diffraction material sample to be tested. The method of the invention has simple structure, flexible design, convenient testing method and strong real-time performance.
Description
技术领域technical field
本发明涉及一种测试超衍射材料光传输特性的方法，具体原理是利用激发光栅产生不同衍射频率通过待测超衍射材料，然后利用检测光栅观察不同空间频率的透射光强或者干涉条纹对比度，确定超衍射材料的光传输特性。The invention relates to a method for testing the light transmission characteristics of a super-diffraction material. The specific principle is to use an excitation grating to generate different diffraction frequencies to pass through the super-diffraction material to be tested, and then use a detection grating to observe the transmitted light intensity or interference fringe contrast of different spatial frequencies to determine Light transmission properties of superdiffractive materials.
背景技术Background technique
由于衍射效应的存在，物象上超衍射极限的高频空间信息以倏逝波的形式存在，被局域在物体表面，所以传统光学仪器的分辨率受到瑞利衍射极限的限制。利用超衍射材料有效的将高频倏逝信息耦合至远场参与成像已经引起了人们的广泛关注。单层金属膜层作为超衍射材料实现了紫外波段的超衍射光刻成像(Fang N，Lee H，Sun C，Zhang X.Sub-diffraction-limited optical imaging with a sliver superlens.Science.2005，308 (5721)：534-537)；金属-电解质多层曲面复合结构组成的“far-field hyperlens”超衍射结构材料同样可以将表面超衍射极限的空间信息传播至远场实现成像(Jacob Z，Alekseyev LV，Narimanov E.Opticalhyperlens：Far-field imaging beyond the diffraction limit.Opt.Express.2006，14(18)：8247-8256)。多数研究都是基于固定衍射材料的光学传输特性实现超衍射成像功能，但对于不同超衍射材料光学传输特性的功能测试研究较少，一般都需要利用超衍射材料成像并进行后处理，不具有实时性，而且工艺手段复杂，成本昂贵等，不利于系统集成。Due to the existence of the diffraction effect, the high-frequency spatial information beyond the diffraction limit on the object image exists in the form of evanescent waves and is localized on the surface of the object, so the resolution of traditional optical instruments is limited by the Rayleigh diffraction limit. Using superdiffractive materials to effectively couple high-frequency evanescent information to far-field imaging has attracted widespread attention. A single-layer metal film layer as a super-diffraction material realizes super-diffraction lithography imaging in the ultraviolet band (Fang N, Lee H, Sun C, Zhang X.Sub-diffraction-limited optical imaging with a sliver superlens.Science.2005, 308 ( 5721): 534-537); the "far-field hyperlens" superdiffraction structure material composed of metal-electrolyte multilayer curved surface composite structure can also transmit the spatial information of the surface superdiffraction limit to the far field for imaging (Jacob Z, Alekseyev LV , Narimanov E. Optical hyperlens: Far-field imaging beyond the diffraction limit. Opt. Express. 2006, 14(18): 8247-8256). Most studies are based on the optical transmission characteristics of fixed diffractive materials to realize the super-diffraction imaging function, but there are few functional tests on the optical transmission characteristics of different super-diffractive materials. Generally, it is necessary to use super-diffractive materials for imaging and post-processing. In addition, the process means are complex and expensive, which is not conducive to system integration.
发明内容Contents of the invention
针对现有技术存在的不足，本发明的目的是提供了一种测试超衍射材料光传输特性的方法。该方法不仅简化了工艺手段，更增加了设计灵活性、实时性，具有很强的实用价值。Aiming at the deficiencies in the prior art, the purpose of the present invention is to provide a method for testing the light transmission characteristics of super-diffraction materials. The method not only simplifies the process means, but also increases the design flexibility and real-time performance, and has strong practical value.
为达成所述目的，本发明提供一种超衍射材料光传输特性的测试分析方法，所述测试分析的步骤包括：In order to achieve the stated purpose, the present invention provides a method for testing and analyzing the optical transmission characteristics of a superdiffraction material, and the steps of testing and analyzing include:
步骤S1：利用激发光栅和检测光栅组成测试光路；Step S1: using the excitation grating and the detection grating to form a test optical path;
步骤S2：将光源入射光经偏振片调整为电场方向与激发光栅方向垂直的线偏振模式照射到激发光栅，使激发光栅产生多级次的携带空间频率的衍射波并通过旋转待测超衍射材料样品，得到激发光栅产生的不同空间频率衍射波的传输特性，其中转动角度与产生的衍射空间频率kx满足：Step S2: Adjust the incident light of the light source through the polarizer to a linearly polarized mode in which the electric field direction is perpendicular to the excitation grating direction and irradiate the excitation grating, so that the excitation grating generates multi-order diffracted waves carrying spatial frequencies and rotates the super-diffraction material to be tested Sample, the transmission characteristics of different spatial frequency diffracted waves generated by exciting the grating, where the rotation angle and the generated diffraction spatial frequency k x satisfy:
其中n＝0，±1，±2，......，k0为自由空间波矢，θ为斜入射角度，Tex为激发光栅周期，n表示激发光栅的衍射级次；Wherein n=0, ±1, ±2,..., k 0 is the free space wave vector, θ is the oblique incident angle, T ex is the excitation grating period, n represents the diffraction order of the excitation grating;
步骤S3：待测超衍射材料样品的透射波与检测光栅差频形成携带待测超衍射材料样品传输特性的干涉条纹并利用物镜进行观测，以此确定超衍射材料的光传输特性。Step S3: The frequency difference between the transmitted wave of the superdiffraction material sample to be tested and the detection grating forms interference fringes carrying the transmission characteristics of the superdiffraction material sample to be tested, and is observed with the objective lens to determine the light transmission characteristics of the superdiffraction material.
优选实施例，所述的入射光选择单色平面波，经过偏振片调整为电场方向与激发光栅方向垂直的线偏振模式照射到激发光栅，然后通过待测超衍射材料样品，最后利用物镜对经过检测光栅产生的干涉条纹观测。In a preferred embodiment, the incident light selects a monochromatic plane wave, adjusts the polarizer to a linearly polarized mode in which the direction of the electric field is perpendicular to the direction of the excitation grating, and irradiates the excitation grating, then passes through the sample of the super-diffraction material to be tested, and finally uses the objective lens to detect Observation of interference fringes produced by a grating.
优选实施例，激发光栅与检测光栅都是一维光栅，激发光栅与检测光栅排布方向一致。In a preferred embodiment, both the excitation grating and the detection grating are one-dimensional gratings, and the arrangement directions of the excitation grating and the detection grating are consistent.
优选实施例，待测超衍射材料样品为具有倏逝波超衍射传输特性的结构材料，包括但不限于金属-介质多层膜结构。In a preferred embodiment, the superdiffraction material sample to be tested is a structural material with evanescent wave superdiffraction transmission characteristics, including but not limited to a metal-dielectric multilayer film structure.
优选实施例，通过旋转待测超衍射材料样品，测试空间频率范围为的倏逝波的光传输特性。In a preferred embodiment, by rotating the super-diffraction material sample to be tested, the test spatial frequency range is Optical transmission properties of the evanescent wave.
优选实施例，对于不同的空间频率衍射波，通过待测超衍射材料样品后，与检测光栅差频形成的干涉条纹周期满足：In a preferred embodiment, for diffracted waves of different spatial frequencies, after passing through the sample of the super-diffraction material to be tested, the period of the interference fringe formed with the difference frequency of the detection grating satisfies:
其中Tdet为检测光栅周期，Tinterference为观测干涉条纹周期，通过观测不同的干涉条纹周期确定不同衍射空间频率的透射特性。Among them, T det is the detection grating period, T interference is the observed interference fringe period, and the transmission characteristics of different diffraction spatial frequencies are determined by observing different interference fringe periods.
优选实施例，通过旋转待测超衍射材料样品，观测不同空间衍射频率下的干涉条纹对比度，确定待测超衍射材料样品的超衍射光传输能力。In a preferred embodiment, by rotating the sample of the super-diffraction material to be tested and observing the contrast of interference fringes at different spatial diffraction frequencies, the super-diffraction light transmission capability of the sample of the super-diffraction material to be tested is determined.
优选实施例，光学传输特性的测试手段包括但不限于干涉条纹的对比度，或透射光强。In a preferred embodiment, the test means of optical transmission characteristics include but not limited to the contrast of interference fringes, or the intensity of transmitted light.
本发明与现有技术相比所具有的特点是：利用激发光栅产生的多级携带高空间频率的衍射波并通过待测超衍射材料，然后测量经过检测光栅的透射光强度或者干涉条纹对比度确定待测超衍射材料的光传输特性。除此之外，还可以通过旋转待测样品测试不同空间频率衍射波的透射光强或者干涉条纹对比度，进一步确定待测样品的传输特性。相对于普通超衍射材料检测器件，该方法不仅工艺手段简单，而且设计灵活、实时性强，具有很强的实用价值。Compared with the prior art, the present invention has the following characteristics: use the multi-level diffracted wave with high spatial frequency generated by the excitation grating to pass through the super-diffraction material to be tested, and then measure the transmitted light intensity or the contrast of the interference fringe through the detection grating to determine Light transmission properties of the super diffractive material to be tested. In addition, the transmitted light intensity or interference fringe contrast of diffracted waves at different spatial frequencies can be tested by rotating the sample to further determine the transmission characteristics of the sample to be tested. Compared with ordinary super-diffraction material detection devices, this method not only has simple process means, but also has flexible design, strong real-time performance, and strong practical value.
附图说明Description of drawings
图1是本发明实施例所设计的测试分析的原理结构图；Fig. 1 is the principle structural diagram of the test analysis designed in the embodiment of the present invention;
图2是本发明实施例所设计的测试分析的结构侧视图；Fig. 2 is the structural side view of the test analysis designed in the embodiment of the present invention;
图3是本发明实施例所设计的待测超衍射材料的结构图；Fig. 3 is the structural diagram of the superdiffraction material to be measured designed in the embodiment of the present invention;
图4是本发明实施例所设计的待测超衍射材料的光学传递函数；Fig. 4 is the optical transfer function of the superdiffraction material to be measured designed in the embodiment of the present invention;
图5是本发明实施例所设计的通过待测超衍射材料的干涉条纹仿真图像；Fig. 5 is the simulated image of the interference fringes by the superdiffraction material to be measured designed in the embodiment of the present invention;
图6a和图6b是本发明实施例所设计的旋转待测超衍射材料的干涉条纹实验图像。Fig. 6a and Fig. 6b are experimental images of interference fringes of the rotating super-diffraction material to be tested designed in the embodiment of the present invention.
具体实施方式Detailed ways
下面对本发明的实施例作详细说明，本实施例在以本发明技术方案为前提下进行实施，给出了详细的实施方式和具体的操作过程，但本发明的保护范围不限于下述的实施例。The embodiments of the present invention are described in detail below. This embodiment is implemented on the premise of the technical solution of the present invention, and detailed implementation methods and specific operating procedures are provided, but the protection scope of the present invention is not limited to the following implementation example.
请参阅图1为超衍射材料光传输特性的测试分析的原理图。如图所示，本发明由激发光栅1，待测超衍射材料2和检测光栅3组成。光源的入射光入射到激发光栅1，产生多级携带高空间频率的衍射波并进入待测超衍射材料2；通过待测超衍射材料2后的透射波携带了待测超衍射材料2的样品信息并与检测光栅3作用，差频形成携带待测超衍射材料2的样品传输特性的干涉条纹。并可以通过旋转待测超衍射材料2的样品(如图2所示测试分析的结构侧视图，待测超衍射材料2的样品旋转角度为θ)，测试不同空间频率的透射光强或者干涉条纹对比度，确定待测超衍射材料2的样品的光传输特性。这是本发明的基本原理。Please refer to FIG. 1 for a schematic diagram of the test and analysis of the light transmission characteristics of the superdiffraction material. As shown in the figure, the present invention consists of an excitation grating 1 , a super-diffraction material to be tested 2 and a detection grating 3 . The incident light of the light source is incident on the excitation grating 1 to generate multi-level diffraction waves carrying high spatial frequency and enter the super-diffraction material 2 to be tested; the transmitted wave after passing through the super-diffraction material 2 to be tested carries the sample of the super-diffraction material 2 The information interacts with the detection grating 3, and the difference frequency forms interference fringes carrying the sample transmission characteristics of the super-diffraction material 2 to be measured. And by rotating the sample of the super-diffraction material 2 to be tested (the structural side view of the test analysis as shown in Figure 2, the sample rotation angle of the super-diffraction material 2 to be tested is θ), test the transmitted light intensity or interference fringes of different spatial frequencies Contrast, determine the light transmission characteristics of the sample of the super diffractive material 2 to be tested. This is the basic principle of the invention.
本发明实施例的具体步骤如下：The concrete steps of the embodiment of the present invention are as follows:
步骤(1)：利用激发光栅1和检测光栅3组成测试光路；工作波长选为532纳米，光源的入射光偏振态选为电场方向与激发光栅1方向垂直的线偏振模式。Step (1): Use the excitation grating 1 and the detection grating 3 to form a test optical path; the working wavelength is selected as 532 nanometers, and the polarization state of the incident light of the light source is selected as a linear polarization mode in which the direction of the electric field is perpendicular to the direction of the excitation grating 1.
步骤(2)：激发光栅1和检测光栅3的材料分别选择高折射率的镉和硅，εCr＝-10.92-26.52i，εsi＝17.22-0.365i。Step (2): The materials of the excitation grating 1 and the detection grating 3 are respectively high refractive index cadmium and silicon, ε Cr =-10.92-26.52i, ε si =17.22-0.365i.
步骤(3)：激发光栅1和检测光栅3的周期分别选择400纳米和210纳米。Step (3): The periods of the excitation grating 1 and the detection grating 3 are selected to be 400 nanometers and 210 nanometers respectively.
步骤(4)：将光源入射光经偏振片调整为电场方向与激发光栅方向垂直的线偏振模式照射到激发光栅，使激发光栅产生多级次的携带空间频率的衍射波并通过旋转待测超衍射材料样品，得到激发光栅产生的不同空间频率衍射波的传输特性，其中转动角度与产生的空间衍射频率kx可以由下式确定：Step (4): The incident light of the light source is adjusted to a linearly polarized mode in which the direction of the electric field is perpendicular to the direction of the excitation grating through the polarizer and irradiates the excitation grating, so that the excitation grating generates multi-order diffracted waves carrying spatial frequencies and rotates the ultra-sonic wave to be measured Diffraction material samples, the transmission characteristics of different spatial frequency diffraction waves generated by exciting the grating, where the rotation angle and the generated spatial diffraction frequency kx can be determined by the following formula:
其中k0为自由空间波矢，Tex为激发光栅周期，θ为入射光与垂直法线的夹角，正入射时为0，n为激发光栅的衍射级次。根据步骤(1)和步骤(3)，经过激发光栅1后产生衍射波的空间频率为1.33n×k0。Where k 0 is the wave vector in free space, T ex is the period of the excitation grating, θ is the angle between the incident light and the vertical normal, which is 0 at normal incidence, and n is the diffraction order of the excitation grating. According to step (1) and step (3), the spatial frequency of the diffracted wave after passing through the excitation grating 1 is 1.33n×k 0 .
步骤(5)：待测超衍射材料2选择为金属-介质多层膜结构，如图3所示，其中金属层4选择为银，介质层5选择为二氧化硅。Step (5): The superdiffraction material 2 to be tested is selected as a metal-dielectric multilayer film structure, as shown in FIG. 3 , wherein the metal layer 4 is selected to be silver, and the dielectric layer 5 is selected to be silicon dioxide.
步骤(6)：周期型多层膜结构中的金属层4的厚度选择为30纳米，介质层5的厚度选择为20纳米。Step (6): The thickness of the metal layer 4 in the periodic multilayer film structure is selected to be 30 nanometers, and the thickness of the dielectric layer 5 is selected to be 20 nanometers.
步骤(7)：对于步骤(5)和步骤(6)设计的银-二氧化硅多层膜结构，其光学传递函数(Optical Transfer Functions，OTF)可以由严格耦合波理论计算得到，如图4所示待测超衍射材料的光学传递函数。其光学传输特性为：对于第一阶和第三阶的衍射频率分别为1.33×k0和3.99×k0，是无法透射通过多层膜结构。仅有第二阶衍射频率2.66×k0可以产生透射。Step (7): For the silver-silicon dioxide multilayer film structure designed in step (5) and step (6), its optical transfer function (Optical Transfer Functions, OTF) can be calculated by strict coupled wave theory, as shown in Figure 4 The optical transfer function of the superdiffraction material to be tested is shown. Its optical transmission characteristics are: the diffraction frequencies of the first order and the third order are 1.33×k 0 and 3.99×k 0 respectively, which cannot be transmitted through the multilayer film structure. Only the second-order diffraction frequency 2.66×k 0 can produce transmission.
步骤(8)：经过待测超衍射材料2的样品的透射光与检测光栅3差频形成携带待测超衍射材料样品传输特性的干涉条纹并利用物镜进行观测，其中透射光频率、检测光栅3的周期和观测干涉条纹周期的关系满足以下公式：Step (8): The frequency difference between the transmitted light of the sample of the super-diffraction material 2 to be tested and the detection grating 3 forms interference fringes carrying the transmission characteristics of the sample of the super-diffraction material to be measured, and is observed with the objective lens, wherein the frequency of the transmitted light and the detection grating 3 The relationship between the period of and the observed interference fringe period satisfies the following formula:
其中Tex为激发光栅1的周期，Tdet为检测光栅3的周期，Tinterference为观测干涉条纹周期。由图5示出通过待测超衍射材料的干涉条纹仿真图像，得到最终干涉条纹的周期为4.2微米，与公式2向吻合，经过观测干涉条纹确定了待测超衍射材料2的样品如步骤(7)所述的光学传输特性。Where T ex is the period of the excitation grating 1, T det is the period of the detection grating 3, and T interference is the period of the observed interference fringes. Shown by Fig. 5 by the interference fringe simulation image of superdiffraction material to be measured, the period that obtains final interference fringe is 4.2 microns, matches with formula 2, determines the sample of superdiffraction material 2 to be measured as step ( 7) The optical transmission characteristics described above.
步骤(9)：根据公式(1)旋转待测超衍射材料2产生不同空间频率的衍射波(如图2所示)，通过观察干涉条纹对比度的变化可以进一步确定待测超衍射材料2的光学传输特性。在图6a中，当垂直入射时条纹清晰对比度可以达到0.81；但随着旋转角度增加到14°，由于衍射频率的改变使得透射率下降，条纹湮没在噪声信号中。利用本发明提出的测试方法大大的简化了工艺程序，而且设计灵活、实时性强；图6a和图6b是本发明实施例所设计的旋转待测超衍射材料的干涉条纹实验图像；图6a是0°，图6b是14°。Step (9): Rotate the superdiffraction material 2 to be tested according to the formula (1) to generate diffracted waves of different spatial frequencies (as shown in Figure 2), and the optical properties of the superdiffraction material 2 to be tested can be further determined by observing the change in the contrast of the interference fringes. transfer characteristics. In Fig. 6a, the fringe clear contrast can reach 0.81 when the vertical incidence is normal; but as the rotation angle increases to 14°, the transmittance decreases due to the change of the diffraction frequency, and the fringe is annihilated in the noise signal. The test method proposed by the present invention greatly simplifies the process procedure, and the design is flexible and real-time; Fig. 6a and Fig. 6b are the experimental images of the interference fringes of the rotating super-diffraction material to be tested designed in the embodiment of the present invention; Fig. 6a is 0°, Figure 6b is 14°.
以上所述，仅为本发明中的具体实施方式，但本发明的保护范围并不局限于此，任何熟悉该技术的人在本发明所揭露的技术范围内，可理解想到的变换或替换，都应涵盖在本发明的包含范围之内。The above is only a specific implementation mode in the present invention, but the scope of protection of the present invention is not limited thereto. Anyone familiar with the technology can understand the conceivable transformation or replacement within the technical scope disclosed in the present invention. All should be covered within the scope of the present invention.
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