CN103149153B - Test analysis method for optical transmission characteristics of super-diffraction material - Google Patents
Test analysis method for optical transmission characteristics of super-diffraction material Download PDFInfo
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- CN103149153B CN103149153B CN201310035988.0A CN201310035988A CN103149153B CN 103149153 B CN103149153 B CN 103149153B CN 201310035988 A CN201310035988 A CN 201310035988A CN 103149153 B CN103149153 B CN 103149153B
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- 239000000463 material Substances 0.000 title claims abstract description 72
- 238000012360 testing method Methods 0.000 title claims abstract description 30
- 230000003287 optical effect Effects 0.000 title claims abstract description 18
- 230000005540 biological transmission Effects 0.000 title claims abstract description 14
- 238000004458 analytical method Methods 0.000 title claims abstract description 9
- 238000000034 method Methods 0.000 claims abstract description 17
- 238000001514 detection method Methods 0.000 claims abstract description 13
- 238000012546 transfer Methods 0.000 claims description 25
- 230000010287 polarization Effects 0.000 claims description 7
- 238000005728 strengthening Methods 0.000 claims description 7
- 230000005684 electric field Effects 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 3
- 238000013461 design Methods 0.000 abstract description 4
- 230000005284 excitation Effects 0.000 abstract 2
- 239000010410 layer Substances 0.000 description 8
- 238000003384 imaging method Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000010998 test method Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- CAEFTTNJCFXOSS-UHFFFAOYSA-N dioxosilane;silver Chemical compound [Ag].O=[Si]=O CAEFTTNJCFXOSS-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011990 functional testing Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
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Abstract
The invention discloses a test analysis method for optical transmission characteristics of a super-diffraction material, which realizes test analysis by using a test excitation grating, a super-diffraction material sample to be tested and a detection grating, and is characterized in that: the light source is incident from the side of the excitation grating to generate multi-level diffraction waves carrying high spatial frequency, and then the transmission waves of the sample and the detection grating difference frequency form interference fringes carrying the transmission characteristics of the sample to be detected through the super-diffraction material sample to be detected. And the transmission light intensity or the interference fringe contrast of different spatial frequency diffraction waves can be tested by rotating the sample to be tested, so that the light transmission characteristic of the super-diffraction material sample to be tested can be determined. The method has the advantages of simple structure, flexible design, convenience and rapidness in testing and strong real-time performance.
Description
Technical field
The present invention relates to a kind of method of testing super diffractive material light-transfer characteristic, concrete principle utilizes to excite grating to produce different diffraction frequency by super diffractive material to be measured, then utilize and detect transmitted light intensity or the intetference-fit strengthening that grating observes different space frequency, determine the light-transfer characteristic of super diffractive material.
Background technology
Due to the existence of diffraction effect, in image, the high frequency spatial information of super diffraction limit exists with the form of evanescent wave, by local at body surface, so the resolution of traditional optical instrument is subject to the restriction of Rayleigh diffraction limit.The super diffractive material information coupling that effectively suddenly died by high frequency is utilized to participate in imaging to far field and caused the extensive concern of people.Single-layer metal rete achieves super-diffraction photoetching imaging (the Fang N of ultraviolet band as super diffractive material, Lee H, Sun C, Zhang X.Sub-diffraction-limited optical imaging with a sliver superlens.Science.2005,308 (5721): 534-537); The spatial information that surface can be surpassed diffraction limit by " far-field hyperlens " super diffraction structure material of metal-electrolytic multi-layer curved surface composite structure composition is equally transmitted to far field and is embodied as (Jacob Z, Alekseyev LV, Narimanov E.Opticalhyperlens:Far-field imaging beyond the diffraction limit.Opt.Express.2006,14 (18): 8247-8256).Most research is all the super diffraction imaging function of optical transmission property realization based on fixed diffraction material, but functional test research difference being surpassed to diffractive material optical transmission property is less, generally all need utilize super diffractive material imaging and carry out aftertreatment, not there is real-time, and process means is complicated, cost intensive etc., are unfavorable for the system integration.
Summary of the invention
For the deficiency that prior art exists, the object of this invention is to provide a kind of method of testing super diffractive material light-transfer characteristic.The method not only simplify process means, further increases design flexibility, real-time, has very strong practical value.
For reaching described object, the invention provides a kind of method for testing and analyzing of super diffractive material light-transfer characteristic, the step of described test analysis comprises:
Step S1: utilize and excite grating and detect grating composition optical system for testing;
Step S2: light source incidence light is adjusted to the direction of an electric field linear polarization pattern vertical with exciting light grid bearing through polaroid and is irradiated to and excites grating, make to excite grating produce the diffracted wave carrying spatial frequency of multilevel and pass through to rotate super diffractive material sample to be measured, obtain the transport property of the different space frequency diffracted wave exciting grating to produce, the diffraction space frequency k of wherein rotational angle and generation
xmeet:
Wherein n=0, ± 1, ± 2 ..., k
0for free space wave vector, θ is oblique incidence angle, T
exfor exciting light grid cycle, n represents the order of diffraction time exciting grating;
Step S3: the transmitted wave of super diffractive material sample to be measured with detect grating difference frequency and form the interference fringe of carrying super diffractive material sample transfer characteristic to be measured and utilize object lens to observe, determine the light-transfer characteristic of super diffractive material with this.
Preferred embodiment, described incident light selects single color plane ripple, be adjusted to the direction of an electric field linear polarization pattern vertical with exciting light grid bearing through polaroid to be irradiated to and to excite grating, then by super diffractive material sample to be measured, object lens are finally utilized to observe the interference fringe produced through detecting grating.
Preferred embodiment, excites grating to be all one-dimensional grating with detecting grating, excites grating consistent with detection grating arragement direction.
Preferred embodiment, super diffractive material sample to be measured is have the structured material that evanescent wave surpasses diffraction transport property, includes but not limited to metal-dielectric multi-layer film structure.
Preferred embodiment, by rotating super diffractive material sample to be measured, test space frequency range is
the light-transfer characteristic of evanescent wave.
Preferred embodiment, for different spatial frequency diffracted waves, after super diffractive material sample to be measured, the fringe period formed with detection grating difference frequency meets:
Wherein T
detfor detecting screen periods, T
interferencefor observation fringe period, by observing the transmissison characteristic of different fringe period determination different diffraction spatial frequency.
Preferred embodiment, by rotating super diffractive material sample to be measured, the intetference-fit strengthening under observation different spaces diffraction frequency, determines the super-diffraction transmittability of super diffractive material sample to be measured.
Preferred embodiment, the means of testing of optical transmission property includes but not limited to the contrast of interference fringe or transmitted light intensity.
The feature that the present invention is compared with prior art had is: the diffracted wave utilizing excite grating to produce multistage to carry high spatial frequency by super diffractive material to be measured, then measures the light-transfer characteristic determining super diffractive material to be measured through the transmitted intensity of detection grating or intetference-fit strengthening.In addition, by rotating transmitted light intensity or the intetference-fit strengthening of testing sample test different space frequency diffracted wave, the transport property of testing sample can also be determined further.Relative to common super diffractive material detection means, the method not only process means is simple, and flexible design, real-time, has very strong practical value.
Accompanying drawing explanation
Fig. 1 is the principle assumption diagram of the test analysis designed by the embodiment of the present invention;
Fig. 2 is the structure side view of the test analysis designed by the embodiment of the present invention;
Fig. 3 is the structural drawing of the to be measured super diffractive material designed by the embodiment of the present invention;
Fig. 4 is the optical transfer function of the to be measured super diffractive material designed by the embodiment of the present invention;
Fig. 5 is the interference fringe emulating image by super diffractive material to be measured designed by the embodiment of the present invention;
Fig. 6 a and Fig. 6 b is the interference fringe experimental image of the rotation super diffractive material to be measured designed by the embodiment of the present invention.
Embodiment
Elaborate to embodiments of the invention below, the present embodiment is implemented under premised on technical solution of the present invention, give detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
Refer to the schematic diagram that Fig. 1 is the test analysis of super diffractive material light-transfer characteristic.As shown in the figure, the present invention is by exciting grating 1, and super diffractive material 2 to be measured and detection grating 3 form.The incident light beam strikes of light source, to exciting grating 1, produces and multistagely carries the diffracted wave of high spatial frequency and enter super diffractive material 2 to be measured; Carry the sample message of super diffractive material 2 to be measured by the transmitted wave after super diffractive material 2 to be measured and act on detection grating 3, difference frequency forms the interference fringe of carrying the sample transfer characteristic of super diffractive material 2 to be measured.And can by rotating sample (the structure side view of test analysis as shown in Figure 2 of super diffractive material 2 to be measured, the rotary sample angle of super diffractive material 2 to be measured is θ), the transmitted light intensity of test different space frequency or intetference-fit strengthening, determine the light-transfer characteristic of the sample of super diffractive material 2 to be measured.This is ultimate principle of the present invention.
The concrete steps of the embodiment of the present invention are as follows:
Step (1): utilize and excite grating 1 and detection grating 3 to form optical system for testing; Operation wavelength elects 532 nanometers as, and the incident light polarization state of light source elects the direction of an electric field linear polarization pattern vertical with exciting grating 1 direction as.
Step (2): excite the material of grating 1 and detection grating 3 to select cadmium and the silicon of high index of refraction respectively, ε
cr=-10.92-26.52i, ε
si=17.22-0.365i.
Step (3): excite the cycle of grating 1 and detection grating 3 to select 400 nanometers and 210 nanometers respectively.
Step (4): light source incidence light is adjusted to the direction of an electric field linear polarization pattern vertical with exciting light grid bearing through polaroid and is irradiated to and excites grating, make to excite grating produce the diffracted wave carrying spatial frequency of multilevel and pass through to rotate super diffractive material sample to be measured, obtain the transport property of the different space frequency diffracted wave exciting grating to produce, the space diffraction frequency kx of wherein rotational angle and generation can be determined by following formula:
Wherein k
0for free space wave vector, T
exfor exciting light grid cycle, θ is incident light and the angle of vertical normal, be 0, n is the order of diffraction time exciting grating during normal incidence.According to step (1) and step (3), the spatial frequency producing diffracted wave after exciting grating 1 is 1.33n × k
0.
Step (5): super diffractive material 2 to be measured is chosen as metal-dielectric multi-layer film structure, and as shown in Figure 3, wherein metal level 4 is chosen as silver, and dielectric layer 5 is chosen as silicon dioxide.
Step (6): the thickness of the metal level 4 in preiodic type multi-layer film structure is chosen as 30 nanometers, the thickness of dielectric layer 5 is chosen as 20 nanometers.
Step (7): silver-silicon dioxide multi-layer film structure that step (5) and step (6) are designed, its optical transfer function (Optical Transfer Functions, OTF) can be calculated by rigorous coupled wave approach, as shown in Figure 4 the optical transfer function of super diffractive material to be measured.Its optical transmission property is: the diffraction frequency for the first rank and the 3rd rank is respectively 1.33 × k
0with 3.99 × k
0, be to be transmitted through multi-layer film structure.Only there is second-order diffraction frequency 2.66 × k
0transmission can be produced.
Step (8): through the sample of super diffractive material 2 to be measured transmitted light with detect grating 3 difference frequency and form the interference fringe of carrying super diffractive material sample transfer characteristic to be measured and utilize object lens to observe, wherein transmitted light frequency, detect grating 3 cycle and observe the relation of fringe period meet following formula:
Wherein T
exfor exciting the cycle of grating 1, T
detfor detecting the cycle of grating 3, T
interferencefor observation fringe period.By Fig. 5, the interference fringe emulating image by super diffractive material to be measured is shown, the cycle obtaining final interference fringe is 4.2 microns, with formula 2 to coincideing, determine the optical transmission property of sample as described in step (7) of super diffractive material 2 to be measured through observation interference fringe.
Step (9): rotate the diffracted wave (as shown in Figure 2) that super diffractive material 2 to be measured produces different space frequency according to formula (1), can determine the optical transmission property of super diffractive material 2 to be measured further by the change observing intetference-fit strengthening.In Fig. 6 a, when vertical incidence, clear-cut texture contrast can reach 0.81; But along with the anglec of rotation is increased to 14 °, the change due to diffraction frequency makes transmissivity decline, and striped is buried in noise signal.The method of testing utilizing the present invention to propose simplifies process greatly, and flexible design, real-time; Fig. 6 a and Fig. 6 b is the interference fringe experimental image of the rotation super diffractive material to be measured designed by the embodiment of the present invention; Fig. 6 a is 0 °, and Fig. 6 b is 14 °.
The above; be only the embodiment in the present invention, but protection scope of the present invention is not limited thereto, any people being familiar with this technology is in the technical scope disclosed by the present invention; the conversion or replacement expected can be understood, all should be encompassed in of the present invention comprising within scope.
Claims (7)
1. a method for testing and analyzing for super diffractive material light-transfer characteristic, is characterized in that the step of test analysis comprises:
Step S1: utilize and excite grating and detect grating composition optical system for testing;
Step S2: light source incidence light is adjusted to the direction of an electric field linear polarization pattern vertical with exciting light grid bearing through polaroid and is irradiated to and excites grating, make to excite grating produce the diffracted wave carrying spatial frequency of multilevel and pass through to rotate super diffractive material sample to be measured, obtain the transport property of the different space frequency diffracted wave exciting grating to produce, the space diffraction frequency k of wherein rotational angle and generation
xmeet:
Wherein n=0, ± 1, ± 2 ...., k
0for free space wave vector, θ is oblique incidence angle, T
exfor exciting light grid cycle, n represents the order of diffraction time exciting grating;
Step S3: the transmitted wave of super diffractive material sample to be measured with detect grating difference frequency and form the interference fringe of carrying super diffractive material sample transfer characteristic to be measured and utilize object lens to observe, determine the optical transmission property of super diffractive material with this.
2. the method for testing and analyzing of super diffractive material light-transfer characteristic according to claim 1, it is characterized in that, described incident light selects single color plane ripple, be adjusted to the direction of an electric field linear polarization pattern vertical with exciting light grid bearing through polaroid to be irradiated to and to excite grating, then by super diffractive material sample to be measured, object lens are finally utilized to observe the interference fringe produced through detecting grating.
3. the method for testing and analyzing of super diffractive material light-transfer characteristic according to claim 1, is characterized in that, excites grating to be all one-dimensional grating with detecting grating, excites grating consistent with detection grating arragement direction.
4. the method for testing and analyzing of super diffractive material light-transfer characteristic according to claim 1, is characterized in that, super diffractive material sample to be measured is have the structured material that evanescent wave surpasses diffraction transport property, includes but not limited to metal-dielectric multi-layer film structure.
5. the method for testing and analyzing of the super diffractive material light-transfer characteristic described in 1,3,4 any one is required according to profit, it is characterized in that, for different spatial frequency diffracted waves, after super diffractive material sample to be measured, the fringe period formed with detection grating difference frequency meets:
Wherein T
exfor exciting the cycle of grating, T
detfor detecting screen periods, T
interferencefor observation fringe period, by observing the transmissison characteristic of different fringe period determination different diffraction spatial frequency.
6. the method for testing and analyzing of the super diffractive material light-transfer characteristic according to any one of claim 1,3,4, it is characterized in that, by rotating super diffractive material sample to be measured, intetference-fit strengthening under observation different spaces diffraction frequency, determines the super-diffraction transmittability of super diffractive material sample to be measured.
7. the method for testing and analyzing of super diffractive material light-transfer characteristic according to claim 1, is characterized in that, the means of testing of optical transmission property includes but not limited to the contrast of interference fringe or transmitted light intensity.
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