CN103104810B - A kind of positive/negative pressure gas channel generating means - Google Patents
A kind of positive/negative pressure gas channel generating means Download PDFInfo
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- CN103104810B CN103104810B CN201310025879.0A CN201310025879A CN103104810B CN 103104810 B CN103104810 B CN 103104810B CN 201310025879 A CN201310025879 A CN 201310025879A CN 103104810 B CN103104810 B CN 103104810B
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Abstract
The invention discloses a kind of positive/negative pressure gas channel generating means, this device comprises with lower component: suction port, air filter, oil mist filter, vacuum generator, three-way magnetic valve, malleation Proportional valve, negative pressure Proportional valve, T-shaped pipe, vacuum filter, air outlet, further, described device also comprises a controlling component, by producing the working method conversion of malleation/negative pressure and the adjustment of pressure size to the control realization of described vacuum generator, described three-way magnetic valve, malleation Proportional valve, negative pressure Proportional valve.The present invention freely can control the generation of malleation, negative pressure gas circuit, manual and automatic two kinds of mode of operations simultaneously, and feedback regulation control can be carried out to air pressure, reliablely and stablely positive and negative air-pressure can be provided, also there is compact, portable feature simultaneously, be applicable to various vacuum-adsorption type clamp holder.
Description
Technical field
The present invention relates to the thin slice in Fine Boring or thin wall component clamping technique field, specifically a kind of gas circuit generating means for vacuum-adsorption type clamp holder.
Background technique
In Fine Boring field, there is some thin slices or thin wall component (thickness is at 10-100 micron), their feature be that light weight, matter are soft, mutability, frangible, usually adopt vacuum-adsorption type clamp holder carry out clamping carrying to it and assemble.
Traditional vacuum generating device on the one hand precision cannot satisfy the demands, and can not provide reliable and stable negative pressure; On the other hand, when we adsorb the part of some light weights, device cannot discharge automatically, and we also need to add certain malleation to discharge the part of light weight.Therefore, need badly and a kind ofly can produce stable negative pressure and malleation and the real-time controllable device of pressure can be realized.
Summary of the invention
The object of the present invention is to provide a kind of positive/negative pressure gas channel generating means in Fine Boring required for vacuum-adsorption type clamp holder, to meet the demand to gas circuit in thin slice, thin wall component clipping operation process.
In order to achieve the above object, the present invention proposes a kind of positive/negative pressure gas channel generating means, it is characterized in that, described device comprises with lower component: suction port 1, air filter 2, oil mist filter 3, vacuum generator 4, three-way magnetic valve 5, malleation Proportional valve 6, negative pressure Proportional valve 7, T-shaped pipe 8, vacuum filter 9, air outlet 10; Wherein, described suction port 1, air filter 2, oil mist filter 3 are linked in sequence; The input port of described vacuum generator 4 is connected with the delivery outlet of oil mist filter 3, and the output port of described vacuum generator 4 is connected with the input port of three-way magnetic valve 5; First output port of described three-way magnetic valve 5 is connected with the input port of malleation Proportional valve 6, and the second output port of described three-way magnetic valve 5 is connected with the input port of negative pressure Proportional valve 7; The output port of described malleation Proportional valve 5 is connected with the first end of described T-shaped pipe 8, the output port of described negative pressure Proportional valve 7 is connected with the second end of described T-shaped pipe 8,3rd end of described T-shaped pipe 8 is connected with the input port of described vacuum filter 9, and the output port of described vacuum filter is connected 10 with described air outlet.
Especially, described device also comprises a controlling component, it is electrically connected with described vacuum generator 4, described three-way magnetic valve 5, malleation Proportional valve 6, negative pressure Proportional valve 7, by producing the working method conversion of malleation/negative pressure and the adjustment of pressure size to the control realization of described vacuum generator 4, described three-way magnetic valve 5, malleation Proportional valve 6, negative pressure Proportional valve 7.
Especially, described controlling component also comprises a single-chip microcomputer 12, first relay R L1, the second relay R L2, the 3rd relay R L3, the 4th relay R L4, the 5th relay R L5, and ad/da converter, wherein said single-chip microcomputer 12 and the first relay R L1, the second relay R L2, the 3rd relay R L3, the 4th relay R L4, the 5th relay R L5, and ad/da converter is connected; The feeder ear of the positive/negative pressure mode of operation of vacuum generator 4, three-way magnetic valve 5, malleation Proportional valve 6, negative pressure Proportional valve 7 is directly connected with the first relay R L1, the second relay R L2, the 3rd relay R L3, the 4th relay R L4, the 5th relay R L5 respectively by wire; The folding of described first relay R L1 controls vacuum generator 4 malleation mode of operation respectively and does not work; The folding of the second relay R L2 controls vacuum generator 4 negative pressure mode of operation respectively and does not work; The folding of the 3rd relay R L3 controls the power on/off of three-way magnetic valve 5 respectively; The folding of the 4th relay R L4 controls the power on/off of malleation Proportional valve 6 respectively; The folding of the 5th relay R L5 controls the power on/off of negative pressure Proportional valve 7 respectively.
Especially, described control gear also comprises a positive/negative-pressure selector switch 21, and it is connected with single-chip microcomputer 12, for switching malleation working method/negative pressure working method; When positive/negative-pressure selector switch 21 is in malleation mode of operation, described single-chip microcomputer 12 controls the first relay R L1, the 3rd relay R L3 and the 4th relay R L4 adhesive, second relay R L2 and the 5th relay R L5 open circuit, make vacuum generator 4 export malleation, gas exports malleation through the first output port of three-way magnetic valve 5 to malleation Proportional valve 6 to T-shaped pipe 8 to vacuum filter 9 to air outlet 10;
When positive/negative-pressure selector switch 21 is in negative pressure mode of operation, single-chip microcomputer 12 controls the first relay R L1, the 3rd relay R L3 and the 4th relay R L4 open circuit, second relay R L2 and the 5th relay R L5 adhesive, make vacuum generator 4 export negative pressure, gas exports negative pressure through the second output port of three-way magnetic valve 5 to negative pressure Proportional valve 7 to T-shaped pipe 8 to vacuum filter 9 to air outlet 10.
Especially, described control gear also comprises malleation adjusting knob 19 and a negative pressure adjusting knob 20; Described malleation adjusting knob 19 and a negative pressure adjusting knob are connected with first, second analog input end AIN0, AIN1 of ad/da converter 18 by wire, and single-chip microcomputer gathers the pressure size of manual tune by ad/da converter; Described malleation Proportional valve 6, negative pressure Proportional valve 7 have air pressure feedback end respectively, and its output voltage represents the size flowing through positive/negative pressure Proportional valve 6,7 pressure respectively, are connected with the 3rd, the 4th analog input end AIN2, AIN3 of ad/da converter 18 by wire; Described malleation Proportional valve 6, negative pressure Proportional valve 7 have air pressure adjustment control end respectively, and it is connected with the first analog output AOUT of ad/da converter 18 by wire; Described single-chip microcomputer 12 gathers the pressure size signalization of described first, second analog input end AIN0, AIN1, the folding size of positive/negative-pressure Proportional valve 6,7 is controlled by the first analog output AOUT of ad/da converter with the pressure size of control flow check through it after conversion treatment.
Especially, described controlling component also comprises: a mode of operation selector switch 22, and it is connected with described single-chip microcomputer 12, for the switching between manual work pattern and automatic operation mode;
Under described manual mode, the size of delivery pressure can be regulated by malleation adjusting knob 19, negative pressure adjusting knob 20; Under described automatic operation mode, by RS-232 interface, send instruction by computer directly to single-chip microcomputer, controlled by the size of the corresponding relay work of Single-chip Controlling to positive/negative-pressure working method and delivery pressure.
Especially, under described automatic operation mode, the size information flowing through positive/negative pressure Proportional valve 6,7 pressure of the air pressure feedback end feedback of the pressure size configuration information that described single-chip microcomputer 12 sends according to computer and described malleation Proportional valve 6, negative pressure Proportional valve 7, the closed-loop feedback realizing pressure controls.
Especially, ad/da converter has the resolution of 8, realizes pressure 255 grades adjustable.
Especially, described device comprises a control box 11 for holding each parts in described device, wherein, the front panel of described control box 11 is provided with a LCD liquid crystal display screen 24, described positive/negative-pressure selector switch 21, described mode of operation selector switch 22 and described positive and negative pressure and regulates button 19,20, the rear board of described control box is provided with described suction port 1, air outlet 10, RS-232 interface and outlet; Described LCD liquid crystal display screen 24 for showing current mode of operation, positive/negative-pressure working method, and current atmospheric pressure value.
Technological scheme in the present invention has following one or more technique effect respectively:
(1) the present invention freely can control the generation of malleation, negative pressure gas circuit, the demand to gas circuit when the satisfied clamping to different part, release.
(2) the present invention has manually and automatic two kinds of mode of operations, can switch positive/negative-pressure working method fast, simple to operate.
(3) the present invention can carry out feedback regulation control to air pressure, can provide reliablely and stablely positive and negative air-pressure.
(4) the present invention is applicable to various vacuum-adsorption type clamp holder, compact, is easy to carry.
Accompanying drawing explanation
Fig. 1 is positive/negative pressure gas channel generating means schematic diagram.
Fig. 2 is the structural representation of controlling component in positive/negative pressure gas channel generating means.
Fig. 3 is that malleation working method gas circuit flows to schematic diagram.
Fig. 4 is that negative pressure working method gas circuit flows to schematic diagram.
Embodiment
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
Fig. 1 is the positive/negative pressure gas channel generating means schematic diagram in the embodiment of the present invention.This device comprises with lower component: suction port 1, air filter 2, oil mist filter 3, vacuum generator 4, three-way magnetic valve 5, malleation Proportional valve 6, negative pressure Proportional valve 7, T-shaped pipe 8, vacuum filter 9, air outlet 10, further, described device also comprises a control box 11, and described parts are all installed in control box.
Described suction port 1, air filter 2, oil mist filter 3 are linked in sequence;
The input port of described vacuum generator 4 is connected with the delivery outlet of oil mist filter 3, and the output port of described vacuum generator 4 is connected with the input port of three-way magnetic valve 5;
The output port 1 of described three-way magnetic valve 5 is connected with the input port of malleation Proportional valve 6, and the output port 2 of described three-way magnetic valve 5 is connected with the input port of negative pressure Proportional valve 7;
The output port of described malleation Proportional valve 5 is connected with the first end of described T-shaped pipe 8, the output port of described negative pressure Proportional valve 7 is connected with the second end of described T-shaped pipe 8,3rd end of described T-shaped pipe 8 is connected with the input port of described vacuum filter 9, and the output port of described vacuum filter is connected 10 with described air outlet.
Described device also comprises a controlling component (attached not shown), it is electrically connected with described vacuum generator 4, described three-way magnetic valve 5, malleation Proportional valve 6, negative pressure Proportional valve 7, by producing the working mode change of malleation/negative pressure and the adjustment of pressure size to the control realization of described vacuum generator 4, described three-way magnetic valve 5, malleation Proportional valve 6, negative pressure Proportional valve 7.
Those skilled in the art should understand, above-mentioned suction port 1, air filter 2, oil mist filter 3, vacuum generator 4, three-way magnetic valve 5, malleation Proportional valve 6, negative pressure Proportional valve 7, T-shaped pipe 8, vacuum filter 9, air outlet 10 are the parts known in prior art, therefore, its concrete structure and working principle repeat no more.
Concrete, in an embodiment, such as, air filter 2 adopts the AF20-01BC of SMC, oil mist filter 3 adopts the AFM20-01BC of SMC, vacuum generator 4 adopts the ZM131SH-K5LZB-E15L of SMC, three-way magnetic valve 5 adopts the VT307-50-01-F of SMC, malleation Proportional valve 6 adopts the ITV2050-212BL5 (delivery pressure scope: 0 ~ 0.9Mpa) of SMC, negative pressure Proportional valve 7 adopts the ITV2090-212BL5 (delivery pressure scope: 0 ~-80kpa) of SMC, T-shaped pipe 8 adopts the KQ2T06-00 of SMC, vacuum filter 9 adopts the ZFC200-06B of SMC, suction port 1 and air outlet 10 are common erecting of panel joint, all devices are arranged in control box 11, and it is of a size of: wide 300mm, high 250mm, dark 400mm.
Concrete, operation panel before described control box 11 comprises one, described front operation panel comprises a LCD liquid crystal display screen 24, malleation adjusting knob 19, negative pressure adjusting knob 20, positive/negative-pressure selector switch 21, mode of operation selector switch 22, wherein positive/negative-pressure selector switch 21 is for selecting the working method of malleation or negative pressure, and mode of operation selector switch 22 is for selecting manual, automatic mode of operation; Described control box comprises a rear board, and described rear board includes suction port 1, air outlet 10, RS-232 interface and outlet.
Fig. 2 is the structural representation of controlling component in positive/negative pressure gas channel generating means.Single-chip microcomputer 12, relay R L1, RL2, RL3, RL4, RL5 in described controlling component, AD/DA chips welding is on pcb board 25, and single-chip microcomputer 12 to be connected with computer 23 by Serial Port Line RS-232 and to realize program control.Mode of operation selector switch 22, positive/negative-pressure selector switch 21 are connected by the control pin that winding displacement is corresponding with on single-chip microcomputer, and the feeder ear of the positive/negative pressure mode of operation of vacuum generator 4, three-way magnetic valve 5, malleation Proportional valve 6, negative pressure Proportional valve 7 is directly connected with relay R L1, RL2, RL3, RL4, RL5 on pcb board 25 respectively by wire.The folding of relay R L1 controls vacuum generator 4 malleation mode of operation respectively and does not work; The folding of relay R L2 controls vacuum generator 4 negative pressure mode of operation respectively and does not work; The folding of relay R L3 controls the power on/off of three-way magnetic valve 5 respectively; The folding of relay R L4 controls the power on/off of malleation Proportional valve 6 respectively; The folding of relay R L5 controls the power on/off of negative pressure Proportional valve 7 respectively.
Malleation adjusting knob 19, negative pressure adjusting knob 20 are connected with analog input end AIN0, AIN1 of ad/da converter 18 by wire, and single-chip microcomputer gathers the pressure size of manual tune by ad/da converter.The air pressure feedback end of malleation Proportional valve 6, negative pressure Proportional valve 7 exports 0 ~ 5V voltage and represents the size flowing through positive/negative pressure Proportional valve pressure, be connected with analog input end AIN2, AIN3 of ad/da converter 18 by wire, single-chip microcomputer gathers the Real-time Feedback size flowing through Proportional valve pressure of returning by ad/da converter and is presented in LCD liquid crystal display screen 24.The air pressure adjustment control end of malleation Proportional valve 6, negative pressure Proportional valve 7 is connected with the analog output AOUT of ad/da converter 18 by wire.The pressure size signalization of analog input end AIN0, AIN1 that single-chip microcomputer gathers, is directly changed into 0 ~ 5V analogue signal and controls the folding size of positive and negative Proportional valve and then the control flow check pressure size through it by the analog output AOUT of ad/da converter.
When positive/negative-pressure selector switch 21 is in malleation mode of operation, single-chip microcomputer 12 control relay RL1, RL3 and RL4 adhesive, RL2 and RL5 open circuit.Make vacuum generator 4 export malleation, gas exports malleation to vacuum filter to air outlet 10 to malleation Proportional valve 6 to T-shaped pipe through the output terminal 5-1 of three-way magnetic valve.Gas circuit flows to schematic diagram as shown in Figure 3.
When positive/negative-pressure selector switch 21 is in negative pressure mode of operation, single-chip microcomputer 12 control relay RL1, RL3 and RL4 open circuit, RL2 and RL5 adhesive.Make vacuum generator 4 export negative pressure, gas exports negative pressure to vacuum filter to air outlet 10 to negative pressure Proportional valve 7 to T-shaped pipe through the output terminal 5-2 of three-way magnetic valve.Gas circuit flows to schematic diagram as shown in Figure 4.
Under manual work pattern, the size of delivery pressure can be regulated by malleation adjusting knob 19, negative pressure adjusting knob 20; Under automatic operation mode, pass through RS-232 interface, instruction is sent directly to single-chip microcomputer by computer, and undertaken controlling the size of positive/negative-pressure working method and delivery pressure by the corresponding relay work of Single-chip Controlling according to the communication protocol formulated, its to the control principle of each parts with flow process with manually identical, therefore repeat no more.
Further, under automatic operation mode, described single-chip microcomputer 12 can according to computer send pressure size configuration information and described malleation Proportional valve 6, negative pressure Proportional valve 7 air pressure feedback end feedback the size information flowing through positive/negative pressure Proportional valve 6,7 pressure, realize pressure closed-loop feedback control.
LCD liquid crystal display screen 24 on control box front panel is for showing current mode of operation for automatic or manual, malleation or negative pressure working method, and current atmospheric pressure value.
Practical application proves, the invention process is convenient, and simple to operate, compact structure is small and exquisite.The demand of vacuum-adsorption type clamp holder to gas circuit can be met.
Above-described specific embodiment; object of the present invention, technological scheme and beneficial effect are further described; be understood that; the foregoing is only specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any amendment made, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (4)
1. a positive/negative pressure gas channel generating means, it is characterized in that, described device comprises with lower component: suction port (1), air filter (2), oil mist filter (3), vacuum generator (4), three-way magnetic valve (5), malleation Proportional valve (6), negative pressure Proportional valve (7), T-shaped pipe (8), vacuum filter (9), air outlet (10); Wherein, described suction port (1), air filter (2), oil mist filter (3) are linked in sequence; The input port of described vacuum generator (4) is connected with the delivery outlet of oil mist filter (3), and the output port of described vacuum generator (4) is connected with the input port of three-way magnetic valve (5); First output port of described three-way magnetic valve (5) is connected with the input port of malleation Proportional valve (6), and the second output port of described three-way magnetic valve (5) is connected with the input port of negative pressure Proportional valve (7); The output port of described malleation Proportional valve (6) is connected with the first end of described T-shaped pipe (8), the output port of described negative pressure Proportional valve (7) is connected with the second end of described T-shaped pipe (8), 3rd end of described T-shaped pipe (8) is connected with the input port of described vacuum filter (9), and the output port of described vacuum filter is connected with described air outlet (10);
Described device also comprises a controlling component, it is electrically connected with described vacuum generator (4), described three-way magnetic valve (5), malleation Proportional valve (6), negative pressure Proportional valve (7), by producing the working method conversion of malleation/negative pressure and the adjustment of pressure size to the control realization of described vacuum generator (4), described three-way magnetic valve (5), malleation Proportional valve (6), negative pressure Proportional valve (7);
Described controlling component also comprises a malleation adjusting knob (19) and a negative pressure adjusting knob (20); Described malleation adjusting knob (19) and a negative pressure adjusting knob are connected with first, second analog input end (AIN0, AIN1) of ad/da converter (18) by wire, single-chip microcomputer gathers the pressure size of manual tune by ad/da converter, and the force value collected is presented in LCD liquid crystal display screen (24); Described malleation Proportional valve (6), negative pressure Proportional valve (7) have air pressure feedback end respectively, its output voltage represents respectively and flows through positive/negative pressure Proportional valve (6,7) size of pressure, is connected with the 3rd, the 4th analog input end (AIN2, AIN3) of ad/da converter (18) by wire; Described malleation Proportional valve (6), negative pressure Proportional valve (7) have air pressure adjustment control end respectively, and it is connected with first analog output (AOUT) of ad/da converter (18) by wire; Described single-chip microcomputer (12) gathers the pressure size signalization of described first, second analog input end (AIN0, AIN1), the first analog output (AOUT) by ad/da converter after conversion treatment controls the folding size of positive/negative-pressure Proportional valve (6,7) with the pressure size of control flow check through it;
Described device also comprises a LCD liquid crystal display screen (24), for showing current mode of operation, and positive/negative-pressure working method, and current atmospheric pressure value;
Described controlling component also comprises a single-chip microcomputer (12), first relay (RL1), the second relay (RL2), the 3rd relay (RL3), the 4th relay (RL4), the 5th relay (RL5), and ad/da converter, wherein said single-chip microcomputer (12) and the first relay (RL1), the second relay (RL2), the 3rd relay (RL3), the 4th relay (RL4), the 5th relay (RL5), and ad/da converter is connected; The feeder ear of the positive/negative pressure mode of operation of vacuum generator (4), three-way magnetic valve (5), malleation Proportional valve (6), negative pressure Proportional valve (7) is directly connected with the first relay (RL1), the second relay (RL2), the 3rd relay (RL3), the 4th relay (RL4), the 5th relay (RL5) respectively by wire; The folding of described first relay (RL1) controls vacuum generator (4) malleation mode of operation respectively and does not work; The folding of the second relay (RL2) controls vacuum generator (4) negative pressure mode of operation respectively and does not work; The folding of the 3rd relay (RL3) controls the power on/off of three-way magnetic valve (5) respectively; The folding of the 4th relay (RL4) controls the power on/off of malleation Proportional valve (6) respectively; The folding of the 5th relay (RL5) controls the power on/off of negative pressure Proportional valve (7) respectively;
Described controlling component also comprises a positive/negative-pressure selector switch (21), and it is connected with single-chip microcomputer (12), for switching malleation working method/negative pressure working method; When positive/negative-pressure selector switch (21) is in malleation mode of operation, described single-chip microcomputer (12) controls the first relay (RL1), the 3rd relay (RL3) and the 4th relay (RL4) adhesive, second relay (RL2) and the 5th relay (RL5) open circuit, make vacuum generator (4) export malleation, gas exports malleation through the first output port of three-way magnetic valve (5) to malleation Proportional valve (6) to T-shaped pipe (8) to vacuum filter (9) to air outlet (10);
When positive/negative-pressure selector switch (21) is in negative pressure mode of operation, single-chip microcomputer (12) controls the first relay (RL1), the 3rd relay (RL3) and the 4th relay (RL4) open circuit, second relay (RL2) and the 5th relay (RL5) adhesive, make vacuum generator (4) export negative pressure, gas exports negative pressure through the second output port of three-way magnetic valve (5) to negative pressure Proportional valve (7) to T-shaped pipe (8) to vacuum filter (9) to air outlet (10);
Described controlling component also comprises: a mode of operation selector switch (22), and it is connected with described single-chip microcomputer (12), for the switching between manual work pattern and automatic operation mode;
Under described manual mode, the size of delivery pressure is regulated by malleation adjusting knob (19), negative pressure adjusting knob (20); Under described automatic operation mode, by RS-232 interface, send instruction by computer directly to single-chip microcomputer, controlled by the size of the corresponding relay work of Single-chip Controlling to positive/negative-pressure working method and delivery pressure.
2. device as claimed in claim 1, it is characterized in that, under described automatic operation mode, the air pressure feedback end feedback of the pressure size configuration information that described single-chip microcomputer (12) sends according to computer and described malleation Proportional valve (6), negative pressure Proportional valve (7) flow through positive/negative pressure Proportional valve (6,7) size information of pressure, the closed-loop feedback realizing pressure controls.
3. device as claimed in claim 2, it is characterized in that, ad/da converter has the resolution of 8, realizes pressure 255 grades adjustable.
4. device as claimed in claim 3, it is characterized in that, described device comprises a control box (11) for holding each parts in described device, wherein, the front panel of described control box (11) is provided with described LCD liquid crystal display screen (24), described positive/negative-pressure selector switch (21), described mode of operation selector switch (22) and described positive and negative pressure and regulates button (19,20), the rear board of described control box is provided with described suction port (1), air outlet (10), RS-232 interface and outlet.
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| CN201310025879.0A CN103104810B (en) | 2013-01-24 | 2013-01-24 | A kind of positive/negative pressure gas channel generating means |
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| CN111459053B (en) * | 2019-01-22 | 2023-09-12 | 汉达精密电子(昆山)有限公司 | Positive and negative pressure fast switching device |
| CN110032223A (en) * | 2019-04-18 | 2019-07-19 | 安徽皖仪科技股份有限公司 | High-precision positive/negative-pressure is double to apply automatically controlled regulator |
| CN110594588A (en) * | 2019-08-20 | 2019-12-20 | 湖南金时科技有限公司 | Vacuum constant pressure air supply device |
| CN112838281B (en) * | 2021-01-07 | 2022-03-25 | 广州擎天实业有限公司 | Negative pressure control method and system for formation of lithium ion battery |
| CN113244974B (en) * | 2021-04-30 | 2022-12-30 | 重庆微浪自动化设备有限公司 | Sample automatic processing platform and sample processing method |
| CN113790289A (en) * | 2021-09-16 | 2021-12-14 | 深圳大学 | Multi-channel mixing valve suitable for soft actuator and air pressure control method thereof |
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| CN101642880A (en) * | 2009-08-24 | 2010-02-10 | 哈尔滨工业大学 | Vacuum adsorption clamping device used for clamping thin-walled planar workpiece |
| CN101984038A (en) * | 2010-09-10 | 2011-03-09 | 北京航空航天大学 | Pneumatic micro-operation device for tiny organisms |
| CN201916283U (en) * | 2010-12-31 | 2011-08-03 | 中国飞机强度研究所 | Pneumatic servo positive and negative pressure control device |
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| CN103104810A (en) | 2013-05-15 |
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