CN103091824A - Disc and manufacturing method thereof and structured light illumination mode generating device - Google Patents
Disc and manufacturing method thereof and structured light illumination mode generating device Download PDFInfo
- Publication number
- CN103091824A CN103091824A CN2012105807431A CN201210580743A CN103091824A CN 103091824 A CN103091824 A CN 103091824A CN 2012105807431 A CN2012105807431 A CN 2012105807431A CN 201210580743 A CN201210580743 A CN 201210580743A CN 103091824 A CN103091824 A CN 103091824A
- Authority
- CN
- China
- Prior art keywords
- grid
- micropore
- group
- disk
- imaging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
A disc used for achieving structured light illumination is evenly divided into nine fan-shaped areas. Nine micro holes used for being matched to generate imaging triggering signals are formed in the edge of the disc. A grid is arranged on each fan-shaped area of the disc. The nine grids are divided into a first grid group, a second grid group and a third group in sequence, wherein the first grid group, the second grid group and the third group are respectively provided with three grids. The inclined angle of each grid of the first grid group is minus 120 degrees, the inclined angle of each grid of the second grid group is 0 degree, and the inclined angle of each grid of the third grid group is 120 degrees. Each grid group is divided into three parallel grids. When the grids in the same grid group are imaged, stripes of each grid horizontally shift one third cycle. In addition, the invention further provides a manufacturing method of the disc and a structured light illumination mode generating device. The disc, the manufacturing method of the disc and the structured light illumination mode generating device are convenient to operate, fast in operation, rapid in imaging, free of expensive precise instruments to control rotation of the disc, and capable of reducing cost.
Description
Technical field
The present invention relates to the optical microscope field, particularly relates to disk for the implementation structure optical illumination and preparation method thereof, Structured Illumination mode producing device.
Background technology
Microscope is one of requisite instrument of modern scientific research.The optical microphotograph imaging is convenient due to it, observation method and liking of scientific research personnel extremely intuitively.Present microscopical manufacture craft level has reached very high level, and still " optical diffraction limit " restricted the further raising of imaging resolution.So-called " optical diffraction limit " refers to the system resolution limit that the undulatory property principle according to light causes.In actual optical system, because the lens opening size is limited, light can produce diffraction, and desirable object point is no longer desirable geometry picture point through system's imaging, but the hot spot (Airy disk) that a certain size is arranged.To such an extent as to when very approaching its image patch of two object points overlaps, just can not tell having looked like of two object points, namely optical system exists a resolving limit.Present common wide field optical microscope can't the object of Resolving size below 200nm.Meanwhile, because common wide field microscope does not possess depth resolution (claiming again the optical section ability), also admix the information outside the focal plane in to focal plane imaging, greatly reduced resolution and the contrast of imaging system.The optical 3-dimensional micro-imaging instrument of the development need super-resolution of scientific research.
2000, the Structured Illumination microtechnic (Structure Illumination Microscopy, SIM) of professor's M.G.L.Gustafsson research and development of California, USA university was for a new path has been opened up in the optical microphotograph imaging of super-resolution.This technology adopts horizontal light modulated illumination sample, utilize modulate illumination light with the high spatial frequency Signal coding in low-frequency image.After knowing illumination light field distribution and final low frequency stack striped, can't observe, meticulous image just can obtain by the mode that the later stage calculates originally.Particularly, the raising for lateral resolution mainly gets by resolving imaging formula:
Wherein: D (r) is the actual image that obtains, and S (r) is target image, and I (r) is cycle shape structured illumination, and H (γ) is system responses.In frequency field reconstructing lost information, obtain super resolution image after anti-solution.Mainly obtain by the image that connection is separated three transverse shiftings for the raising of longitudinal frame:
Wherein, D
1,2,3Be the image that three transverse translations obtain, D
pBe the image with optical section ability (longitudinal frame improves rear).
Existing Structured Illumination micro-imaging technique generally only has a grid, thereby need to change by the mode of mechanical motion this grid position and angle implementation structure optical illumination, need three transverse shifting grids to obtain image, and again repeat transverse shifting grid acquisition image after rotating this grid, complex operation, and due to the movement of grid with rotate exigent precision, so need high-precision translation and whirligig and signal feedback device, cause whole system to involve great expense.
Summary of the invention
Based on this, be necessary for the loaded down with trivial details problem of existing Structured Illumination imaging operation, a kind of disk that is used for the implementation structure optical illumination of simple operation is provided.
In addition, also be necessary for the loaded down with trivial details problem of existing Structured Illumination imaging operation, a kind of method for making of the disk that is used for the implementation structure optical illumination of simple operation is provided.
In addition, also be necessary to provide a kind of Structured Illumination mode producing device of simple operation for the loaded down with trivial details problem of existing Structured Illumination imaging operation.
A kind of disk for the implementation structure optical illumination is characterized in that, described disk is divided into nine sector regions; Be provided with nine micropores that produce the imaging trigger pip for coordinating at the edge of described disk, described nine micropores lay respectively in nine sector regions of described disk; Described each micropore center equates with the distance of disc centre, and described micropore is on the center line of place sector region; Be provided with a grid on each sector region of described disk, described nine grids are divided into the first grid group, the second grid group and the 3rd grid group that comprises respectively three grids successively; Each grid in described the first grid group is take the line of the micropore of place sector region and disc centre as datum line, and the pitch angle is negative 120 degree; Each grid in described the second grid group is take the line of the micropore of place sector region and disc centre as datum line, and the pitch angle is 0 degree; Each grid in described the 3rd grid group is take the line of the micropore of place sector region and disc centre as datum line, and the pitch angle is positive 120 degree; With respect to the line of micropore and disc centre, every group of grid is divided into three parallel grids, and on the same group during the grid imaging, 1/3rd cycles of striped lateral excursion of each grid.
In embodiment, described micropore is circular micropore therein.
In embodiment, described disc centre is rotation center therein.
In embodiment, described disk comprises the transparent material substrate and covers the metal mask of described suprabasil stripe grating therein.
In embodiment, described transparent material substrate is quartz substrate therein.
A kind of method for making of the disk for the implementation structure optical illumination comprises the following steps:
Provide a transparent material as substrate;
At substrate surface covering metal mask;
Described metal mask is carried out photoetching treatment form stripe grating;
Wherein, described stripe grating is nine, and described nine grids are divided into the first grid group, the second grid group and the 3rd grid group that comprises respectively three grids successively; Each grid in described the first grid group is take the line of the micropore of place sector region and disc centre as datum line, and the pitch angle is negative 120 degree; Each grid in described the second grid group is take the line of the micropore of place sector region and disc centre as datum line, and the pitch angle is 0 degree; Each grid in described the 3rd grid group is take the line of the micropore of place sector region and disc centre as datum line, the pitch angle is positive 120 degree, line with respect to micropore and disc centre, every group of grid is divided into three parallel grids, and on the same group during the grid imaging, 1/3rd cycles of striped lateral excursion of each grid; Be formed at the edge of substrate coordinating nine micropores that produce the imaging trigger pip, described nine micropores lay respectively in nine sector regions of described substrate; Described each micropore center equates with the distance at substrate center, and described micropore is on the center line of place sector region.
In embodiment, described transparent material is quartzy therein.A kind of Structured Illumination mode producing device comprises light source, first lens, spectroscope, object lens, laser instrument, laser detector, imaging device and the second lens, above-mentioned disk, and described disk, first lens, spectroscope, object lens consist of the first light path; Described object lens, spectroscope, the second lens and imaging device consist of the second light path; The light that described light source sends is incident upon on the grid of described disk, and the light that sees through grid carries out projection through after first lens, spectroscope and object lens; The laser of described laser instrument emission is detected by described laser detector by described micropore, produce the imaging trigger pip, and described imaging trigger pip is passed to described imaging device, described imaging device receives according to described imaging trigger pip the light that through spectroscope light splitting enters the second lens and carries out imaging.
In embodiment, described Structured Illumination mode producing device also comprises rotating stepper motor therein, and described rotating stepper motor is used for controlling described disk and rotates.
Therein in embodiment, described Structured Illumination mode producing device also comprises the first optical filter and the second optical filter, described the first optical filter is arranged between described first lens and spectroscope, described the second optical filter is arranged between described the second lens and described imaging device, enter through the light of described first lens and enter again described spectroscope after the first optical filter and carry out light splitting, enter to enter after described the second lens through spectroscopical light splitting and enter again described imaging device after the second optical filter filters and carry out imaging.
Above-mentioned disk for the implementation structure optical illumination and preparation method thereof, Structured Illumination mode producing device, by be provided with three groups of different grids on disk, striped 1/3rd cycles of lateral excursion during the parallel and imaging of the grid in every group, only need rotating circular disk can obtain different grids during imaging and satisfy Structured Illumination pattern needs, also carry out the lateral excursion operation after need not rotating, simple operation, and Imaging fast, control disc rotary and do not need expensive exact instrument, reduced cost.
Description of drawings
Fig. 1 is the structural representation of disk in an embodiment;
The schematic diagram of lateral excursion 1/3rd when Fig. 2 is the parallel and imaging of every group of grid;
Fig. 3 is that in an embodiment, Structured Illumination mode producing device is realized the system schematic of resolution imaging under white light conditions;
Fig. 4 is that in an embodiment, Structured Illumination mode producing device is realized the system schematic of resolution imaging under the fluorescence condition.
Embodiment
Be described in detail below in conjunction with specific embodiment and the accompanying drawing technical scheme to disk of being used for the implementation structure optical illumination and preparation method thereof, Structured Illumination mode producing device, so that it is clearer.
As shown in Figure 1, in one embodiment, a kind of disk for the implementation structure optical illumination is divided into nine sector regions, is respectively 10,20,30,40,50,60,70,80 and 90.Be provided with a grid on each sector region of disk, totally nine grids, be respectively 11,21,31,41,51,61,71,81 and 91; Be provided with nine micropores that produce the imaging trigger pip for coordinating at the edge of disk, nine micropores lay respectively in nine sector regions of disk, be respectively 12,22,32,42,52,62,72,82 and 92, each micropore center equates with the distance of disc centre, and micropore is on the center line of place sector region.
Nine grids 11,21,31,41,51,61,71,81 and 91 are divided into three groups successively, and namely 11,21 and 31 is that the first grid group, 41,51 and 61 is that the second grid group, 71,81 and 91 is the 3rd grid group.Each grid in the first grid group is take the line of the micropore of place sector region and disc centre as datum line, and the pitch angle is followed successively by negative 120 degree; Each grid in the second grid group is take the line of the micropore of place sector region and disc centre as datum line, and the pitch angle is 0 degree; Each grid in the 3rd grid group is take the line of the micropore of place sector region and disc centre as datum line, the pitch angle is positive 120 degree, the pitch angle of the i.e. datum line of 11,21 and 31 grid and place sector region formation is negative 120 degree, 41, the pitch angle of the datum line of 51 and 61 grid and place sector region formation is 0 degree, and the pitch angle that the datum line of 71,81 and 91 grid and place sector region forms is positive 120 degree.
As shown in Figure 2, with respect to the line of micropore and disc centre, every group of grid is divided into three parallel grids, and namely grid 11,21,31 is parallel with respect to micropore with the line of disc centre, and on the same group during the grid imaging, 1/3rd cycles of striped lateral excursion of each grid.
Further, micropore can be circular micropore or polygon micropore.In the present embodiment, micropore is circular micropore, facilitates imaging.The diameter of circular micropore is 0.1 millimeter to 1 millimeter.
Further, disc centre is rotation center, and conveniently being rotated, and rotation is not prone to skew.
Further, disk comprises the transparent material substrate and covers the metal mask of suprabasil stripe grating.In this example, the transparent material substrate is quartz substrate.
The invention provides a kind of method for making of the disk for the implementation structure optical illumination, comprise the following steps:
(1) provide a transparent material as substrate;
In the present embodiment, transparent material is quartzy.
(2) at substrate surface covering metal mask;
(3) metal mask is carried out photoetching treatment and form stripe grating;
Wherein, stripe grating is nine, and nine grids are divided into the first grid group, the second grid group and the 3rd grid group that comprises respectively three grids successively; Each grid in described the first grid group is take the line of the micropore of place sector region and disc centre as datum line, and the pitch angle is negative 120 degree; Each grid in described the second grid group is take the line of the micropore of place sector region and disc centre as datum line, and the pitch angle is 0 degree; Each grid in described the 3rd grid group is take the line of the micropore of place sector region and disc centre as datum line, and the pitch angle is positive 120 degree; With respect to the line of micropore and disc centre, every group of grid is divided into three parallel grids, and on the same group during the grid imaging, 1/3rd cycles of striped lateral excursion of each grid; Be formed at the edge of substrate coordinating nine micropores that produce the imaging trigger pip, nine micropores are evenly distributed on nine sector regions of substrate; Each micropore center equates with the distance at substrate center, and micropore is on the center line of place sector region.
In addition, the method for making of above-mentioned disk is not limited to above-mentioned described step, also can adopt other modes to make.
The present invention also provides a kind of Structured Illumination mode producing device.As shown in Figure 3, a kind of Structured Illumination mode producing device comprises light source 1, disk 2, first lens 3, object lens 4, sample 5, spectroscope 6, the second lens 7, laser instrument 8, laser detector 9, imaging device 10 and computing machine 11.Wherein, disk 2, first lens 3, spectroscope 6, object lens 4 consist of the first light path; Object lens 4, spectroscope 6, the second lens 7 and imaging device 10 consist of the second light path; Laser instrument 8, disk 2 and laser detector 9 are used for being provided as the picture trigger pip.Computing machine 11 is used for controlling imaging device and carries out imaging.Light source 1 can adopt the light sources such as LED, xenon lamp or laser instrument.
The course of work of the Structured Illumination mode producing device in Fig. 3 is: the light that light source 1 sends is projected on sample 5 through the first light path, be that the light that light source 1 sends is incident upon on the grid of disk 2, the light that sees through grid projects on sample 5 through after first lens 3, spectroscope 6 and object lens 4; The laser of laser instrument 8 emissions is detected by laser detector 9 by micropore, produce the imaging trigger pip, laser detector 9 also passes to imaging device 10 with the imaging trigger pip, and imaging device 10 receives according to the imaging trigger pip light that through spectroscope 6 light splitting enter the second lens 7 and carries out imaging.And need to guarantee that this group grid corresponding to micropore just satisfies the pattern needs that produce Structured Illumination this moment.Change different grids by rotary disk, produce nine kinds of required light illumination modes, thus the implementation structure optical illumination.
Further, said structure optical illumination mode producing device also comprises rotating stepper motor, and this rotating stepper motor is used for controlling disk and rotates.Control the average rate rotating circular disk by rotating stepper motor.This rotating stepper motor can be controlled by computing machine, to realize accurate adjusting.
In addition, can make structure light imaging at the different depth of sample by moving up and down sample 5.
Structured Illumination mode producing device in the present embodiment mainly is applicable to realize super-resolution imaging under white light conditions.
Fig. 4 is the system schematic that the Structured Illumination mode producing device under the fluorescence condition is realized super-resolution imaging.Be with the difference of Fig. 3, this Structured Illumination mode producing device also comprises the first optical filter 12 and the second optical filter 13, the first optical filter 12 is arranged between first lens 3 and spectroscope 6, the second optical filter 13 is arranged between the second lens 7 and imaging device 11, enter through the light of first lens 3 and enter again spectroscope 6 after the first optical filter 12 and carry out light splitting, enter to enter after the second lens 7 through the light splitting of spectroscope 6 and enter again imaging device 11 after the second optical filter 13 filters and carry out imaging.
Above-mentioned disk for the implementation structure optical illumination and preparation method thereof, Structured Illumination mode producing device, by be provided with three groups of different grids on disk, striped 1/3rd cycles of lateral excursion during the parallel and imaging of the grid in every group, only need rotating circular disk can obtain different grids during imaging and satisfy Structured Illumination pattern needs, also carry out the lateral excursion operation after need not rotating, simple operation, and Imaging fast, control disc rotary and do not need expensive exact instrument, reduced cost.
In addition, control disc rotary by rotating stepper motor, simple in structure, cost is lower.
In addition, above-mentioned disk for the implementation structure optical illumination and preparation method thereof, Structured Illumination mode producing device are applicable to all wide field microscopes, can realize simultaneously the transverse super-resolution of sample and vertically optical section differentiate.
The above embodiment has only expressed several embodiment of the present invention, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the scope of the claims of the present invention.Should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.
Claims (10)
1. a disk that is used for the implementation structure optical illumination, is characterized in that, described disk is divided into nine sector regions; Be provided with nine micropores that produce the imaging trigger pip for coordinating at the edge of described disk, described nine micropores lay respectively in nine sector regions of described disk; Described each micropore center equates with the distance of disc centre, and described micropore is on the center line of place sector region; Be provided with a grid on each sector region of described disk, described nine grids are divided into the first grid group, the second grid group and the 3rd grid group that comprises respectively three grids successively; Each grid in described the first grid group is take the line of the micropore of place sector region and disc centre as datum line, and the pitch angle is negative 120 degree; Each grid in described the second grid group is take the line of the micropore of place sector region and disc centre as datum line, and the pitch angle is 0 degree; Each grid in described the 3rd grid group is take the line of the micropore of place sector region and disc centre as datum line, and the pitch angle is positive 120 degree; With respect to the line of micropore and disc centre, every group of grid is divided into three parallel grids, and on the same group during the grid imaging, 1/3rd cycles of striped lateral excursion of each grid.
2. disk according to claim 1, is characterized in that, described micropore is circular micropore.
3. disk according to claim 1, is characterized in that, described disc centre is rotation center.
4. disk according to claim 1, is characterized in that, described disk comprises the transparent material substrate and covers the metal mask of described suprabasil stripe grating.
5. disk according to claim 4, is characterized in that, described transparent material substrate is quartz substrate.
6. method for making that is used for the disk of implementation structure optical illumination comprises the following steps:
Provide a transparent material as substrate;
At substrate surface covering metal mask;
Described metal mask is carried out photoetching treatment form stripe grating;
Wherein, described stripe grating is nine, and described nine grids are divided into the first grid group, the second grid group and the 3rd grid group that comprises respectively three grids successively; Each grid in described the first grid group is take the line of the micropore of place sector region and disc centre as datum line, and the pitch angle is negative 120 degree; Each grid in described the second grid group is take the line of the micropore of place sector region and disc centre as datum line, and the pitch angle is 0 degree; Each grid in described the 3rd grid group is take the line of the micropore of place sector region and disc centre as datum line, and the pitch angle is positive 120 degree; With respect to the line of micropore and disc centre, every group of grid is divided into three parallel grids, and on the same group during the grid imaging, 1/3rd cycles of striped lateral excursion of each grid; Be formed at the edge of substrate coordinating nine micropores that produce the imaging trigger pip, described nine micropores lay respectively in nine sector regions of described substrate; Described each micropore center equates with the distance at substrate center, and described micropore is on the center line of place sector region.
7. the method for making of disk according to claim 6 is characterized in that: described transparent material is for quartzy.
8. Structured Illumination mode producing device, comprise light source, first lens, spectroscope, object lens, laser instrument, laser detector, imaging device and the second lens, it is characterized in that, also comprise disk as described in any one in claim 1 to 5, described disk, first lens, spectroscope, object lens consist of the first light path; Described object lens, spectroscope, the second lens and imaging device consist of the second light path; The light that described light source sends is incident upon on the grid of described disk, and the light that sees through grid carries out projection through after first lens, spectroscope and object lens; The laser of described laser instrument emission is detected by described laser detector by described micropore, produce the imaging trigger pip, and described imaging trigger pip is passed to described imaging device, described imaging device receives according to described imaging trigger pip the light that through spectroscope light splitting enters the second lens and carries out imaging.
9. Structured Illumination mode producing device according to claim 8, is characterized in that, described Structured Illumination mode producing device also comprises rotating stepper motor, and described rotating stepper motor is used for controlling described disk and rotates.
10. Structured Illumination mode producing device according to claim 8, it is characterized in that, described Structured Illumination mode producing device also comprises the first optical filter and the second optical filter, described the first optical filter is arranged between described first lens and spectroscope, described the second optical filter is arranged between described the second lens and described imaging device, enter through the light of described first lens and enter again described spectroscope after the first optical filter and carry out light splitting, enter to enter after described the second lens through spectroscopical light splitting and enter again described imaging device after the second optical filter filters and carry out imaging.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210580743.1A CN103091824B (en) | 2012-12-27 | 2012-12-27 | Disc and manufacturing method thereof and structured light illumination mode generating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210580743.1A CN103091824B (en) | 2012-12-27 | 2012-12-27 | Disc and manufacturing method thereof and structured light illumination mode generating device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103091824A true CN103091824A (en) | 2013-05-08 |
| CN103091824B CN103091824B (en) | 2015-04-15 |
Family
ID=48204603
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210580743.1A Active CN103091824B (en) | 2012-12-27 | 2012-12-27 | Disc and manufacturing method thereof and structured light illumination mode generating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103091824B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104459971A (en) * | 2014-12-24 | 2015-03-25 | 中国科学院半导体研究所 | Structured light illuminating microscopic imaging system based on integrated photonic chip |
| CN106597674A (en) * | 2015-10-16 | 2017-04-26 | 高准精密工业股份有限公司 | Optical device |
| CN106770147A (en) * | 2017-03-15 | 2017-05-31 | 北京大学 | A kind of Structured Illumination super-resolution micro imaging system and its imaging method |
| CN107966826A (en) * | 2017-12-27 | 2018-04-27 | 中国科学院半导体研究所 | A kind of small-scale structure optical illumination super-resolution micro imaging system |
| JP2020534553A (en) * | 2018-01-16 | 2020-11-26 | イラミーナ インコーポレーテッド | Dual Optical Lattice Slide Structured Illumination Imaging |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002202460A (en) * | 2000-12-28 | 2002-07-19 | Manii Kk | Dental stereomicroscope |
| JP2003188087A (en) * | 2001-12-21 | 2003-07-04 | Sony Corp | Aligning method and aligner and method for manufacturing semiconductor device |
| JP2007199397A (en) * | 2006-01-26 | 2007-08-09 | Nikon Corp | Microscope apparatus |
| JP2007199572A (en) * | 2006-01-30 | 2007-08-09 | Nikon Corp | Microscope |
| KR20110093291A (en) * | 2010-02-12 | 2011-08-18 | 한국과학기술원 | Structured illumination confocal microscope with the use of cross-type linear structured illumination |
| CN202145257U (en) * | 2011-07-20 | 2012-02-15 | 哈尔滨理工大学 | Structured light projection device based on circular grating control |
| JP2012150140A (en) * | 2011-01-17 | 2012-08-09 | Nikon Corp | Microscope device and observation method |
-
2012
- 2012-12-27 CN CN201210580743.1A patent/CN103091824B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002202460A (en) * | 2000-12-28 | 2002-07-19 | Manii Kk | Dental stereomicroscope |
| JP2003188087A (en) * | 2001-12-21 | 2003-07-04 | Sony Corp | Aligning method and aligner and method for manufacturing semiconductor device |
| JP2007199397A (en) * | 2006-01-26 | 2007-08-09 | Nikon Corp | Microscope apparatus |
| JP2007199572A (en) * | 2006-01-30 | 2007-08-09 | Nikon Corp | Microscope |
| KR20110093291A (en) * | 2010-02-12 | 2011-08-18 | 한국과학기술원 | Structured illumination confocal microscope with the use of cross-type linear structured illumination |
| JP2012150140A (en) * | 2011-01-17 | 2012-08-09 | Nikon Corp | Microscope device and observation method |
| CN202145257U (en) * | 2011-07-20 | 2012-02-15 | 哈尔滨理工大学 | Structured light projection device based on circular grating control |
Non-Patent Citations (1)
| Title |
|---|
| MYOUNGKI AHN.ST: "Cross structured illumination for high speed high resolution line scanning confocal microscopy", 《MEASUREMENT SCIENCE AND TECHNOLOGY》 * |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104459971A (en) * | 2014-12-24 | 2015-03-25 | 中国科学院半导体研究所 | Structured light illuminating microscopic imaging system based on integrated photonic chip |
| CN106597674A (en) * | 2015-10-16 | 2017-04-26 | 高准精密工业股份有限公司 | Optical device |
| CN106770147A (en) * | 2017-03-15 | 2017-05-31 | 北京大学 | A kind of Structured Illumination super-resolution micro imaging system and its imaging method |
| CN106770147B (en) * | 2017-03-15 | 2019-07-19 | 北京大学 | A kind of Structured Illumination super-resolution micro imaging method |
| CN107966826A (en) * | 2017-12-27 | 2018-04-27 | 中国科学院半导体研究所 | A kind of small-scale structure optical illumination super-resolution micro imaging system |
| CN107966826B (en) * | 2017-12-27 | 2019-07-05 | 中国科学院半导体研究所 | A kind of small-scale structure optical illumination super-resolution micro imaging system |
| JP2020534553A (en) * | 2018-01-16 | 2020-11-26 | イラミーナ インコーポレーテッド | Dual Optical Lattice Slide Structured Illumination Imaging |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103091824B (en) | 2015-04-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105814402B (en) | The super-resolution micro imaging method and system of continuously adjustable Structured Illumination | |
| CN103091824B (en) | Disc and manufacturing method thereof and structured light illumination mode generating device | |
| CN104155851B (en) | Femtosecond laser two-photon polymerization micro-nano processing system and method | |
| CN107065159B (en) | A kind of large visual field high resolution microscopic imaging device and iterative reconstruction method based on big illumination numerical aperture | |
| CN103477209B (en) | For the system and method for phase control of throwing light in fluorescent microscope | |
| CN104459971B (en) | A kind of Structured Illumination micro imaging system based on integrated photon chip | |
| CN107389631A (en) | The multi-modal Structured Illumination super-resolution micro imaging system of high speed polychrome and its method | |
| CN102540446B (en) | High-speed structure illumination optical microscope system and method based on digital micromirror device | |
| CN104102017B (en) | The super diffraction limit imaging system of random scatter optics and method shone based on structure light | |
| CN107966826B (en) | A kind of small-scale structure optical illumination super-resolution micro imaging system | |
| CN107490562A (en) | Utilize the ultrahigh speed three-dimensional refractive index filming image and fluorescence structure optical illumination microscopic system and its application method of corrugated reshaper | |
| CN101799569B (en) | Method for producing convex double blazed grating | |
| CN109407293A (en) | Three-dimensional structure optical illumination super-resolution microscopic imaging device and method based on double galvanometer doublets | |
| CN107505695B (en) | Structured Illumination device and its method for generating fringe structure light | |
| CN105807412A (en) | Total internal reflection microscopy method and device based on free-form surface shaping | |
| CN108303402A (en) | A kind of micro- scan imaging method of big visual field salt free ligands Bezier mating plate and system | |
| CN105817758A (en) | Method, processing system and collecting system for processing various structure colors through femtosecond laser | |
| CN105759440A (en) | Random scattering optical super-diffraction limit imaging method based on structured illumination | |
| DE112012005960T5 (en) | Software-defined microscope | |
| CN103399463B (en) | Projection mask aligner's lighting device and using method | |
| CN103226009A (en) | Self-imaging structured light projection and phase shift device and method | |
| CN110320654A (en) | Based on the microscopical quick three-dimensional body imaging system of multi-angle 4Pi and method | |
| CN106204434B (en) | A kind of Image Iterative reconstructing method towards large visual field high resolution micro-imaging | |
| CN111610150B (en) | Full-field structured light coherence coding tomography device and method | |
| CN106908942A (en) | The parallel microscopic imaging apparatus of high-resolution based on microlens array |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |