CN103086444A - Flushing water recovery method and device - Google Patents
Flushing water recovery method and device Download PDFInfo
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- CN103086444A CN103086444A CN2011103418133A CN201110341813A CN103086444A CN 103086444 A CN103086444 A CN 103086444A CN 2011103418133 A CN2011103418133 A CN 2011103418133A CN 201110341813 A CN201110341813 A CN 201110341813A CN 103086444 A CN103086444 A CN 103086444A
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- down water
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Abstract
The invention relates to a flushing water recovery method and a flushing water recovery device. The device is used for recovering polishing mixed bed flushing water. The device comprises a polishing mixed bed, a flushing water discharge pipeline, and a recovery water tank. The flushing water discharge pipeline is connected with the polishing mixed bed and the recovery water tank. According to the invention, the connection of the flushing water discharge pipeline is modified, and the flushing water discharge pipeline is connected to the recovery water tank. The recovery water tank is an initial end of a draining and purifying system of a production line machine part. Therefore, flushing water can be recovered and purified, such that the flushing water can be recovered and reused. Therefore, the waste of a large amount of flushing water is avoided, production cost is greatly reduced, and water resource is greatly saved.
Description
[technical field]
The present invention relates to a kind of wash-down water recovery method and device.
[background technology]
At present, in semiconductor production, the polishing mixed bed in UPW system (ultrapure water system) just can come into operation after a large amount of wash-down water of needs rinses the MBP resin for a long time after having changed MBP resin (finishing polish mixed-bed resin).
But, a large amount of wash-down waters is after having rinsed the MBP resin, directly be discharged in WWT system (Waste Water Treatment) via the wash-down water discharge pipe, then exclusive to municipal water lines, wash-down water is not recycled, cause a large amount of wash-down water wastes, improved cost, wasted greatly water resources.
[summary of the invention]
In view of this, be necessary to provide a kind of wash-down water recovery method and device that wash-down water is reclaimed.
A kind of wash-down water retrieving arrangement is used for the wash-down water of polishing mixed bed is reclaimed, and comprises polishing mixed bed, wash-down water discharge pipe and return water tank; Described wash-down water discharge pipe connects polishing mixed bed and return water tank.
Preferably, described wash-down water retrieving arrangement also comprises the first valve that is arranged on described wash-down water discharge pipe; Described the first valve is controlled the conducting of described wash-down water discharge pipe and closes.
Preferably, described wash-down water retrieving arrangement also comprises wash-down water diverter branch and the second valve; Described wash-down water diverter branch one end is connected with wash-down water discharge pipe between the first valve and polishing mixed bed, the other end is connected to Waste Water Treatment, the second valve is arranged on described wash-down water diverter branch, is used for controlling the conducting of wash-down water diverter branch and closing.
Preferably, described the first valve and the second valve are magnetic valve, and described wash-down water retrieving arrangement also comprises monitor and controller; Described monitor is arranged on described return water tank, is used for monitoring the water level in return water tank, and described controller connects monitor, the first valve and the second valve, during higher than predetermined water level, controls the first valve closes, the second valve open at the return water tank water level.
Preferably, described monitor adopts the sound wave monitoring device.
A kind of wash-down water recovery method is used for the wash-down water of polishing mixed bed is reclaimed, and the method is transformed the wash-down water discharge pipe of polishing mixed bed, and the wash-down water discharge pipe is connected to return water tank.
Preferably, described wash-down water recovery method also is included in the step that the first valve is set on described wash-down water discharge pipe; Described the first valve is controlled the conducting of described wash-down water discharge pipe and closes.
Preferably, described wash-down water recovery method also comprises the step that wash-down water diverter branch and the second valve are set; Described wash-down water diverter branch one end is connected with wash-down water discharge pipe between the first valve and polishing mixed bed, the other end is connected to Waste Water Treatment, the second valve is arranged on described wash-down water diverter branch, is used for controlling the conducting of wash-down water diverter branch and closing.
Preferably, described the first valve and the second valve are magnetic valve, and described wash-down water recovery method also comprises the step that monitor and controller are set; Described monitor is arranged on described return water tank, is used for monitoring the water level in return water tank, and described controller connects monitor, the first valve and the second valve, during higher than predetermined water level, controls the first valve closes, the second valve open at the return water tank water level.
Preferably, described monitor adopts the sound wave monitoring device.
Above-mentioned wash-down water retrieving arrangement and method, the connection of washing water discharge pipeline of liquidating is transformed, the wash-down water discharge pipe is connected to return water tank, return water tank is the initiating terminal of production line board partial drainage purification system, can make wash-down water reclaim and purify, thereby make wash-down water be recycled utilization, avoid the waste of a large amount of wash-down water, greatly reduce production cost, saved greatly water resources.
[description of drawings]
Fig. 1 is the structural representation of wash-down water retrieving arrangement in an embodiment.
[embodiment]
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in detail.
Fig. 1 is the structural representation of wash-down water retrieving arrangement in an embodiment.This wash-down water retrieving arrangement reclaims the wash-down water of polishing mixed bed 100, comprising: polishing mixed bed 100, wash-down water discharge pipe 200 and return water tank 300.Wash-down water discharge pipe 200 connects polishing mixed bed 100 and return water tank 300.
In this embodiment, return water tank 300 is for original in factory's business.Return water tank 300 is the initiating terminal of production line board partial drainage purification system, and return water tank 300 is transferred to production line board partial drainage purification system for the partial drainage of collecting the production line board and carried out pure rear recycling.The liquidate connection of washing water discharge pipeline 200 of this wash-down water retrieving arrangement is transformed, and wash-down water discharge pipe 200 is connected to return water tank 300, can be to reclaiming wash-down water, thus make wash-down water be recycled utilization.
For controlling the discharging of wash-down water, this device also comprises the first valve 400.The first valve 400 is arranged on wash-down water discharge pipe 200, controls the conducting of wash-down water discharge pipe 200 and closes, and controls the discharging of wash-down water.
In addition, after avoiding wash-down water to enter return water tank 300, water level is too high causes backflow etc., also needs control the water level of return water tank 300.This device also comprises wash-down water diverter branch 500 and the second valve 600.Wash-down water diverter branch 500 1 ends are connected with wash-down water discharge pipe 200 between the first valve 400 and polishing mixed bed 100, and the other end is connected to Waste Water Treatment (WWT system) 700.The second valve 600 is arranged on wash-down water diverter branch 500, is used for controlling the conducting of wash-down water diverter branch 500 and closing.When wash-down water is discharged into return water tank, open the first valve 400, close the second valve 600; Too high when water level, when surpassing predetermined water level, close the first valve 400, open the second valve 600, wash-down water is disposed to Waste Water Treatment 700 via wash-down water diverter branch 500 and gets final product.
Further, be the water level of the control return water tank 300 of intelligence, the first valve 400 and the second valve 600 all adopt electric valve, and this device also comprises monitor 800 and controller 900.
Monitor 800 is arranged on factory's business return water tank 300, is used for monitoring the water level in return water tank 300.In this embodiment, monitor 800 adopts the sound wave monitoring device, monitors the water level of return water tank 300 by the mode of acoustic reflection time range finding.
In addition, also provide a kind of wash-down water recovery method, the method is transformed the wash-down water discharge pipe of polishing mixed bed, and the wash-down water discharge pipe is connected to return water tank.
In this embodiment, return water tank is original in factory's business.Return water tank is the initiating terminal of production line board partial drainage purification system, and return water tank is transferred to production line board partial drainage purification system for the partial drainage of collecting the production line board and carried out pure rear recycling.The liquidate connection of washing water discharge pipeline of the method is transformed, and the wash-down water discharge pipe is connected to return water tank, thereby makes wash-down water be recycled utilization.
For controlling the discharging of wash-down water, the method also is included in the step that the first valve is set on the wash-down water discharge pipe.The first valve is controlled the conducting of wash-down water discharge pipe and is closed, and controls the discharging of wash-down water.
In addition, after avoiding wash-down water to enter return water tank, water level is too high causes backflow etc., also needs control the water level of return water tank.The method also comprises the step that wash-down water diverter branch and the second valve are set.The wash-down water diverter branch connects wash-down water discharge pipe and Waste Water Treatment (WWT system), and is connected with wash-down water discharge pipe between the first valve and polishing mixed bed.The second valve is arranged on the wash-down water diverter branch, is used for controlling the conducting of wash-down water diverter branch and closing.When wash-down water is discharged into return water tank, open the first valve, close the second valve; Too high when water level, when surpassing predetermined water level, close the first valve, open the second valve, make wash-down water be disposed to Waste Water Treatment via the wash-down water diverter branch and get final product.
Further, be the water level of the control return water tank of intelligence, the first valve and the second valve all adopt electric valve, and the method also comprises the step that controller and monitor are set.
Monitor is arranged on factory's business return water tank, is used for monitoring the water level in return water tank.In this embodiment, monitor adopts the sound wave monitoring device, and the mode of finding range by reflection is monitored the water level of return water tank.
Controller connects monitor, the first valve and the second valve, during higher than predetermined water level, controls the first valve closes, the second valve open at the return water tank water level.By the monitoring of monitor and the control of controller, the water level of the control return water tank of intelligence need not manual operation.
Above-mentioned wash-down water retrieving arrangement and method, the connection of washing water discharge pipeline of liquidating is transformed, the wash-down water discharge pipe is connected to return water tank, return water tank is the initiating terminal of production line board partial drainage purification system, can make wash-down water reclaim and purify, thereby make wash-down water be recycled utilization, avoid the waste of a large amount of wash-down water, greatly reduce production cost, saved greatly water resources.
The above embodiment has only expressed several embodiment of the present invention, and it describes comparatively concrete and detailed, but can not therefore be interpreted as the restriction to the scope of the claims of the present invention.Should be pointed out that for the person of ordinary skill of the art, without departing from the inventive concept of the premise, can also make some distortion and improvement, these all belong to protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be as the criterion with claims.
Claims (10)
1. a wash-down water retrieving arrangement, be used for the wash-down water of polishing mixed bed is reclaimed, and it is characterized in that, comprises polishing mixed bed, wash-down water discharge pipe and return water tank; Described wash-down water discharge pipe connects polishing mixed bed and return water tank.
2. wash-down water retrieving arrangement according to claim 1, is characterized in that, described wash-down water retrieving arrangement also comprises the first valve that is arranged on described wash-down water discharge pipe; Described the first valve is controlled the conducting of described wash-down water discharge pipe and closes.
3. wash-down water retrieving arrangement according to claim 2, is characterized in that, described wash-down water retrieving arrangement also comprises wash-down water diverter branch and the second valve; Described wash-down water diverter branch one end is connected with wash-down water discharge pipe between the first valve and polishing mixed bed, the other end is connected to Waste Water Treatment, the second valve is arranged on described wash-down water diverter branch, is used for controlling the conducting of wash-down water diverter branch and closing.
4. wash-down water retrieving arrangement according to claim 3, is characterized in that, described the first valve and the second valve are magnetic valve, and described wash-down water retrieving arrangement also comprises monitor and controller; Described monitor is arranged on described return water tank, is used for monitoring the water level in return water tank, and described controller connects monitor, the first valve and the second valve, during higher than predetermined water level, controls the first valve closes, the second valve open at the return water tank water level.
5. wash-down water retrieving arrangement according to claim 4, is characterized in that, described monitor adopts the sound wave monitoring device.
6. a wash-down water recovery method, be used for the wash-down water of polishing mixed bed is reclaimed, and it is characterized in that, the method is transformed the wash-down water discharge pipe of polishing mixed bed, and the wash-down water discharge pipe is connected to return water tank.
7. wash-down water recovery method according to claim 6, is characterized in that, described wash-down water recovery method also is included in the step that the first valve is set on described wash-down water discharge pipe; Described the first valve is controlled the conducting of described wash-down water discharge pipe and closes.
8. wash-down water recovery method according to claim 7, is characterized in that, described wash-down water recovery method also comprises the step that wash-down water diverter branch and the second valve are set; Described wash-down water diverter branch one end is connected with wash-down water discharge pipe between the first valve and polishing mixed bed, the other end is connected to Waste Water Treatment, the second valve is arranged on described wash-down water diverter branch, is used for controlling the conducting of wash-down water diverter branch and closing.
9. wash-down water recovery method according to claim 8, is characterized in that, described the first valve and the second valve are magnetic valve, and described wash-down water recovery method also comprises the step that monitor and controller are set; Described monitor is arranged on described return water tank, is used for monitoring the water level in return water tank, and described controller connects monitor, the first valve and the second valve, during higher than predetermined water level, controls the first valve closes, the second valve open at the return water tank water level.
10. wash-down water recovery method according to claim 9, is characterized in that, described monitor adopts the sound wave monitoring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110341813.3A CN103086444B (en) | 2011-11-02 | 2011-11-02 | Flushing water recovery method and device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110341813.3A CN103086444B (en) | 2011-11-02 | 2011-11-02 | Flushing water recovery method and device |
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| Publication Number | Publication Date |
|---|---|
| CN103086444A true CN103086444A (en) | 2013-05-08 |
| CN103086444B CN103086444B (en) | 2014-10-01 |
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| CN201110341813.3A Active CN103086444B (en) | 2011-11-02 | 2011-11-02 | Flushing water recovery method and device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104092643A (en) * | 2014-07-29 | 2014-10-08 | 重庆邮电大学 | H.264/SVC video transmitting method in 2*2MIMO system on basis of HQAM |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02207888A (en) * | 1989-02-06 | 1990-08-17 | Japan Organo Co Ltd | Method and apparatus for producing ultra-pure water |
| CN201362619Y (en) * | 2009-01-22 | 2009-12-16 | 陈涛 | Laboratory industrial ultrapure water purifier |
| CN201569922U (en) * | 2009-10-12 | 2010-09-01 | 彭希南 | Digital water level controller |
-
2011
- 2011-11-02 CN CN201110341813.3A patent/CN103086444B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02207888A (en) * | 1989-02-06 | 1990-08-17 | Japan Organo Co Ltd | Method and apparatus for producing ultra-pure water |
| CN201362619Y (en) * | 2009-01-22 | 2009-12-16 | 陈涛 | Laboratory industrial ultrapure water purifier |
| CN201569922U (en) * | 2009-10-12 | 2010-09-01 | 彭希南 | Digital water level controller |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104092643A (en) * | 2014-07-29 | 2014-10-08 | 重庆邮电大学 | H.264/SVC video transmitting method in 2*2MIMO system on basis of HQAM |
| CN104092643B (en) * | 2014-07-29 | 2017-04-05 | 重庆邮电大学 | H.264/SVC video transmission method in 2x2MIMO systems based on HQAM |
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|---|---|
| CN103086444B (en) | 2014-10-01 |
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