CN103074680B - Preparation method for hafnium two-dimensional atomic crystal material - Google Patents
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- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 title claims abstract description 48
- 229910052735 hafnium Inorganic materials 0.000 title claims abstract description 43
- 239000000463 material Substances 0.000 title claims abstract description 40
- 239000013078 crystal Substances 0.000 title claims abstract description 39
- 238000002360 preparation method Methods 0.000 title claims abstract description 9
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 229910052741 iridium Inorganic materials 0.000 claims abstract description 12
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052723 transition metal Inorganic materials 0.000 claims abstract description 9
- 150000003624 transition metals Chemical class 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 8
- 238000000137 annealing Methods 0.000 claims description 5
- 230000000737 periodic effect Effects 0.000 claims description 5
- 238000005566 electron beam evaporation Methods 0.000 claims description 4
- 230000001413 cellular effect Effects 0.000 claims 2
- 239000007769 metal material Substances 0.000 claims 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 10
- 229910052799 carbon Inorganic materials 0.000 abstract description 2
- 230000008021 deposition Effects 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 229910021389 graphene Inorganic materials 0.000 description 8
- 230000005641 tunneling Effects 0.000 description 5
- 238000001000 micrograph Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000004377 microelectronic Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000000004 low energy electron diffraction Methods 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- -1 argon ions Chemical class 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- 150000002362 hafnium Chemical class 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 1
- 229910052982 molybdenum disulfide Inorganic materials 0.000 description 1
- 229910021428 silicene Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000012995 silicone-based technology Methods 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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Abstract
本发明公开了一种铪二维原子晶体材料的制备方法,铪二维原子晶体材料的制备方法包括:1)在真空环境下,将适量铪蒸发沉积到过渡金属铱基底上;2)对整个样品进行退火处理,以使铪原子发生相互作用,在基底表面形成二维长程有序的膜状结构,其中铪原子成六角蜂窝状周期性排布,形成一种新型的二维原子晶体材料。这种类石墨烯结构的新型材料拓展了非碳基二维蜂窝状晶体材料的研究领域,具有较高的科研价值和潜在的应用潜力。
The invention discloses a preparation method of a hafnium two-dimensional atomic crystal material. The preparation method of the hafnium two-dimensional atomic crystal material comprises: 1) evaporation and deposition of an appropriate amount of hafnium on a transition metal iridium substrate in a vacuum environment; The sample is annealed to make the hafnium atoms interact to form a two-dimensional long-range ordered film structure on the surface of the substrate, in which the hafnium atoms are periodically arranged in a hexagonal honeycomb shape to form a new type of two-dimensional atomic crystal material. This new material with a graphene-like structure expands the research field of non-carbon-based two-dimensional honeycomb crystal materials, and has high scientific research value and potential application potential.
Description
技术领域 technical field
本发明涉及一种铪二维原子晶体材料的制备方法,属于纳米材料技术领域。 The invention relates to a preparation method of a hafnium two-dimensional atomic crystal material, which belongs to the technical field of nanometer materials.
背景技术 Background technique
二维原子晶体材料因其单原子厚度的平面晶体结构,丰富和独特的物理,化学特性以及潜在的巨大应用价值成为近年来世界科技界的研究热点。其中,石墨烯自2004年被成功剥离后成为新型二维原子晶体材料的焦点和代表。 Two-dimensional atomic crystal materials have become a research hotspot in the world's scientific and technological circles in recent years because of their single-atom-thick planar crystal structure, rich and unique physical and chemical properties, and potential huge application value. Among them, graphene has become the focus and representative of new two-dimensional atomic crystal materials since it was successfully exfoliated in 2004.
石墨烯表现出来的一系列奇特的电子和物理特性,如高迁移率、高机械强度、高光透率、高导电性等,在微电子学、微纳米器件、透明导电膜、高效转换电池等领域有着重要的应用前景。石墨烯的研究热潮激发了人们对其他新型二维原子晶体材料(非碳基、类石墨烯结构)的探索和研究热情。 Graphene exhibits a series of peculiar electronic and physical properties, such as high mobility, high mechanical strength, high light transmittance, high conductivity, etc., in the fields of microelectronics, micro-nano devices, transparent conductive films, and high-efficiency conversion batteries. It has important application prospects. The upsurge in graphene research has stimulated people's enthusiasm for exploration and research on other new two-dimensional atomic crystal materials (non-carbon-based, graphene-like structures).
例如,硅烯,作为石墨烯的硅基对应物,已有理论预言其存在的可能性和类似于石墨烯的优异性能。其他类石墨烯结构的二维晶体材料,如氮化硼,二硫化钼等都表现出了许多优异的物理特性。 For example, silicene, as the silicon-based counterpart of graphene, has been theoretically predicted the possibility of its existence and excellent properties similar to graphene. Other two-dimensional crystal materials with graphene-like structures, such as boron nitride and molybdenum disulfide, have shown many excellent physical properties.
在当今微电子学面临物理尺寸极限之时,这些以石墨烯为代表的新型二维平面材料的开发和应用有望融合当前的微电子硅基技术,突破大规模集成电路遇到的瓶颈问题,为我国基础科学、信息科学、材料科学、能源科学等研究领域提供新的机遇与平台,对国民经济的可持续发展以及国防安全的强化产生重大而深远的影响。 When today's microelectronics is facing the limit of physical size, the development and application of these new two-dimensional planar materials represented by graphene are expected to integrate the current microelectronic silicon-based technology and break through the bottleneck problem encountered by large-scale integrated circuits. my country's basic science, information science, material science, energy science and other research fields provide new opportunities and platforms, which will have a significant and far-reaching impact on the sustainable development of the national economy and the strengthening of national defense security.
发明内容 Contents of the invention
鉴于此,本发明的目的是提供一种铪二维原子晶体材料及其制备方法, 能够生长出一种新型的二维原子晶体材料,这种新材料表现为二维有序、铪原子成六角蜂窝状排布的二维周期性结构。 In view of this, the object of the present invention is to provide a hafnium two-dimensional atomic crystal material and a preparation method thereof, which can grow a novel two-dimensional atomic crystal material, which is two-dimensionally ordered and hafnium atoms are hexagonal A two-dimensional periodic structure in a honeycomb arrangement.
本发明提供了一种铪二维原子晶体材料,铪原子成六角蜂窝状排布,并在二维平面内周期性扩展。 The invention provides a hafnium two-dimensional atomic crystal material, in which the hafnium atoms are arranged in a hexagonal honeycomb shape and periodically expand in a two-dimensional plane.
本发明提供了一种铪二维原子晶体材料的制备方法,其步骤包括: The invention provides a method for preparing a hafnium two-dimensional atomic crystal material, the steps comprising:
1)在真空环境下,将适量金属铪蒸发沉积到过渡金属基底上; 1) In a vacuum environment, an appropriate amount of metal hafnium is evaporated and deposited on the transition metal substrate;
2)对整个样品进行退火处理,以使覆盖在基底表面的铪发生相互作用,形成六角蜂窝状分布的二维有序的周期性结构。 2) Annealing the whole sample, so that the hafnium covering the surface of the substrate interacts to form a two-dimensional ordered periodic structure with hexagonal honeycomb distribution.
上述所用的铪是通过电子束蒸发的方法沉积到过渡金属基底上的。 The hafnium used above is deposited on the transition metal substrate by electron beam evaporation.
上述用于生长铪二维原子晶体材料的过渡金属基底为铱的(111)面。 The above-mentioned transition metal substrate for growing the two-dimensional atomic crystal material of hafnium is the (111) plane of iridium.
上述进行铪二维原子晶体材料生长的退火温度为350℃~450℃,优选为400℃。 The above-mentioned annealing temperature for growing the hafnium two-dimensional atomic crystal material is 350°C-450°C, preferably 400°C.
上述铪二维原子晶体材料形成了周期为0.54nm的蜂窝状结构,该周期性结构可以被扫描隧道显微镜和低能电子衍射仪所表征。 The hafnium two-dimensional atomic crystal material forms a honeycomb structure with a period of 0.54 nm, and the periodic structure can be characterized by a scanning tunneling microscope and a low-energy electron diffractometer.
本发明通过外延方法生长高质量的铪二维原子晶体材料,铪原子成六角蜂窝状排布,并在二维平面内扩展,便于进一步研究铪二维原子晶体材料的电子性质及相关器件开发。这种二维晶体材料不同于石墨烯,石墨烯性能是由sp轨道杂化电子决定的;而铪是一种过渡金属,它形成的这种铪二维原子晶体材料的性能是主要由d轨道电子决定,d轨道电子可诱导自旋等新奇特性,所以这种新型二维原子晶体材料可应用于自旋电子学及器件研究。 The invention grows a high-quality hafnium two-dimensional atomic crystal material by an epitaxy method. The hafnium atoms are arranged in a hexagonal honeycomb shape and expand in a two-dimensional plane, which is convenient for further research on the electronic properties of the hafnium two-dimensional atomic crystal material and the development of related devices. This two-dimensional crystal material is different from graphene. The performance of graphene is determined by sp orbital hybrid electrons; while hafnium is a transition metal, the performance of this hafnium two-dimensional atomic crystal material is mainly determined by d orbitals. Electronics determine that d-orbital electrons can induce novel properties such as spin, so this new type of two-dimensional atomic crystal material can be applied to spintronics and device research.
附图说明 Description of drawings
以下,结合附图来详细说明本发明的实施方案,其中: Below, describe embodiment of the present invention in detail in conjunction with accompanying drawing, wherein:
图1示出了本发明的整体制备过程效果示意图; Fig. 1 shows the schematic diagram of the effect of the overall preparation process of the present invention;
图2示出了本发明中在铱的(111)表面沉积的高覆盖度铪颗粒的扫描隧道显微镜图像; Fig. 2 shows the scanning tunneling microscope image of the high-coverage hafnium particles deposited on the (111) surface of iridium in the present invention;
图3示出了本发明中在铱的(111)面上制备的高质量铪二维原子晶体 材料的扫描隧道显微镜图像; Fig. 3 shows the scanning tunneling microscope image of the high-quality hafnium two-dimensional atomic crystal material prepared on the (111) face of iridium in the present invention;
图4示出了本发明中样品400℃退火处理后制得的铪二维原子晶体材料的低能电子衍射图案,包括基底铱和铪二维原子晶体材料中(2x2)超结构的衍射斑点; Figure 4 shows the low-energy electron diffraction pattern of the hafnium two-dimensional atomic crystal material prepared after the sample is annealed at 400°C in the present invention, including the diffraction spots of the (2x2) superstructure in the base iridium and hafnium two-dimensional atomic crystal material;
图5示出了本发明中在铱的(111)面上制备的高质量铪二维原子晶体材料的扫描隧道显微镜放大图像以及对应的原子结构模型。 Fig. 5 shows the enlarged scanning tunneling microscope image and the corresponding atomic structure model of the high-quality hafnium two-dimensional atomic crystal material prepared on the (111) surface of iridium in the present invention.
具体实施方式 Detailed ways
下面将结合附图及实施例对铪二维原子晶体材料的制备方法作进一步的详细说明。此实施例仅仅是用于更详细具体地说明此发明之用,而不应用于以任何形式限制本发明。 The preparation method of the hafnium two-dimensional atomic crystal material will be further described in detail below with reference to the drawings and examples. This embodiment is only used to illustrate the invention in more detail, and should not be used to limit the invention in any form.
本实施例在过渡金属表面制备高质量的铪二维原子晶体材料。具体步骤为:首先在真空腔内对铱单晶进行十几次氩离子溅射,然后通过将铱基底加热并保持在850℃,高温退火得到干净平整的(111)晶面。本发明的整体制备过程效果示意图如图1所示。上部分图示出了本发明中在铱的(111)表面沉积的高覆盖度的铪颗粒;下部分图示出了本发明中样品退火处理后在铱的(111)表面生长出的铪二维原子晶体材料。 In this embodiment, a high-quality hafnium two-dimensional atomic crystal material is prepared on the surface of a transition metal. The specific steps are as follows: firstly, the iridium single crystal is sputtered with argon ions more than a dozen times in a vacuum chamber, and then the iridium substrate is heated and kept at 850°C for high-temperature annealing to obtain a clean and smooth (111) crystal plane. The schematic diagram of the effect of the overall preparation process of the present invention is shown in FIG. 1 . The upper part of the figure shows the hafnium particles with high coverage deposited on the (111) surface of iridium in the present invention; dimensional atomic crystal material.
之后在干净平整的铱表面,通过电子束蒸发源将金属铪均匀沉积其上,基底保持在室温。铪在衬底表面呈无规则分布,如图2的扫描隧道显微镜图像所示。 Afterwards, on the clean and flat iridium surface, metal hafnium is evenly deposited on it by electron beam evaporation source, and the substrate is kept at room temperature. Hafnium is randomly distributed on the substrate surface, as shown in the scanning tunneling microscope image in Figure 2.
将沉积有铪颗粒的样品在400℃下退火,原来沉积在衬底表面的铪颗粒消失了,如图3所示,而在铱表面形成了一种周期为0.54nm的结构,该结构源于退火处理后在样品表面形成的二维有序的铪原子晶体材料。图4的低能电子衍射图案表明该有序结构的存在。这种周期为0.54nm的结构对应于铪原子在衬底表面的六角蜂窝状排布后形成的二维有序的铪原子晶体材料,如图5所示。 The sample deposited with hafnium particles was annealed at 400°C, the hafnium particles deposited on the substrate surface disappeared, as shown in Figure 3, and a structure with a period of 0.54nm was formed on the iridium surface, which originated from A two-dimensional ordered hafnium atomic crystal material formed on the surface of the sample after annealing treatment. The low-energy electron diffraction pattern of Figure 4 indicates the existence of this ordered structure. This structure with a period of 0.54nm corresponds to a two-dimensional ordered hafnium atom crystal material formed after hafnium atoms are arranged in a hexagonal honeycomb shape on the substrate surface, as shown in FIG. 5 .
上面虽然对本发明进行详细的描述,然而也可以在不脱离本发明主要思想的条件下,进行各个条件的适当变化。可以理解为,本发明不限于上述实 施方案,而归于权利要求的范围,其包括所述每个因素的等同替换。例如,金属铪可以通过除电子束蒸发之外的其他方法如直接加热铪棒沉积到基底上,亦可取得与上述实施例相当的效果。 Although the present invention has been described in detail above, various conditions can be appropriately changed without departing from the main idea of the present invention. It is to be understood that the present invention is not limited to the embodiments described above, but falls within the scope of the claims, which include equivalents to each of the elements described. For example, metal hafnium can be deposited on the substrate by other methods than electron beam evaporation, such as direct heating of hafnium rods, and effects comparable to those of the above-mentioned embodiments can also be achieved.
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