CN103064442A - Active constant temperature control device and method for guaranteeing temperature stability performance of micro-electromechanical system (MEMS) angular velocity sensor - Google Patents
Active constant temperature control device and method for guaranteeing temperature stability performance of micro-electromechanical system (MEMS) angular velocity sensor Download PDFInfo
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- CN103064442A CN103064442A CN 201110333163 CN201110333163A CN103064442A CN 103064442 A CN103064442 A CN 103064442A CN 201110333163 CN201110333163 CN 201110333163 CN 201110333163 A CN201110333163 A CN 201110333163A CN 103064442 A CN103064442 A CN 103064442A
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Abstract
The invention relates to an active constant temperature control method in a micro-electromechanical system (MEMS) angular velocity chip for controlling of the temperature inside an MEMS angular velocity sensor, so that a stable constant temperature state can be maintained, and thereby the temperature characteristics of the MEMS angular velocity sensor when the MEMS angular velocity sensor is used in different temperature environments are improved, and an active constant temperature control device and the method for guaranteeing the temperature stability performance of the MEMS angular velocity sensor can guarantee the signal output accuracy of MEMS angular velocity. According to the active constant temperature control device and the method for guaranteeing the temperature stability performance of the micro-electromechanical system (MEMS) angular velocity sensor, a temperature constant control method of a confined space of a placing sensing angular velocity sensing small machine of the MEMS angular velocity sensor is provided. The environment temperature inside the confined space of the placing sensing angular velocity sensing small machine and outside the MEMS angular velocity sensor can be monitored at the same time, and according to the difference in the environment temperature inside the confined space of the placing sensing angular velocity sensing small machine and outside the MEMS angular velocity sensor, the inside and outside temperature rate of change and the quantity of inside and outside heat transfer, the confined space of the placing sensing angular velocity sensing small machine is heated so as to conduct active control and thus temperature is controlled, and the sensing angular velocity small machine is enabled to maintain constant in operating temperature.
Description
Technical field
The present invention relates to control the interior temperature of MEMS angular-rate sensor with the active constant-temperature control method in the MEMS angular velocity chip, make it keep stable temperature constant state, thereby improve the temperature characterisitic when different temperature environments is used of MENS angular-rate sensor, ensure method and the device of MEMS angular velocity signal output accuracy.
Background technology
The MEMS angular-rate sensor is the angular-rate sensor of realizing with the milli machine technology.Be widely used in monitoring the fields such as angular velocity varies of the lateral rotation of automobile.Owing to be small mechanical realization, when temperature variation, the mechanical property of MEMS milli machine, to change along with the variation of temperature such as elasticity of the spring section of vibrating mass etc., thereby the output signal of MEMS angular-rate sensor and actual value are departed from, bring negative influence for the authenticity of the output signal of MEMS angular-rate sensor, the output signal accuracy of MEMS angular-rate sensor is descended.
In recent years, the ESC of automobile industry and EPS (automobile laterally skid anti-locking system) system popularizes rapidly, in ESC and ESP system, the important sensor of indispensability during angular-rate sensor, it has great market outlook, because the MEMS angular-rate sensor is moderate, is used widely in ESC and ESP system.And, in recent years in order to reduce the cost of ESC and ESP system, the hydraulic control module of MEMS angular-rate sensor and ESC and ESP system is integrated the main flow trend that has become ESC and ESP development in the engine box that is placed on.This just so that the MEMS angular-rate sensor have to be operated in the fierce working environment that changes of environment temperature of car engine case.The environment temperature that employed MEMS angular-rate sensor will be worked in ESC and the ESP system may be subzero 40 ℃ to the 125 ℃ temperature range of automobile when just having started, the decline that different temperature and fierce temperature variation are brought to the output signal accuracy of MEMS angular-rate sensor has become the important technological difficulties that the MEMS angular-rate sensor will overcome.
About the temperature characterisitic of the output signal of MEMS angular-rate sensor, known method utilizes temperature sensor to monitor temperature and variation thereof, the method for coming the output signal to the MEMS angular-rate sensor to compensate according to the variation of temperature.But this method can't fundamentally be eliminated temperature variation to the negative influence of the output signal of MEMS angular-rate sensor, in the time of especially can't eliminating the velocity variations of temperature variation to the negative influence of MEMS angular-rate sensor output signal.
Summary of the invention
The temperature characterisitic of the output signal of aforesaid MEMS angular-rate sensor, known method utilize temperature sensor to monitor temperature and variation thereof, the method for coming the output signal to the MEMS angular-rate sensor to compensate according to the variation of temperature.The method is to change in temperature, and this temperature variation has produced in the situation of negative influence the output signal of MEMS angular-rate sensor, output signal is compensated, reduce variation of ambient temperature to the method for the negative influence of the output signal of MEMS angular-rate sensor, this method is the variation that can't fundamentally eliminate environment temperature to the negative influence of the output signal of MEMS angular-rate sensor, thereby improves the precision of MEMS angular-rate sensor output signal.
The method of the negative influence that the temperature variation that the objective of the invention is fundamentally to eliminate MEMS angular-rate sensor working environment is brought to the authenticity of its output signal.Simultaneously, temperature changing speed for MEMS angular-rate sensor working environment changes in the negative influence that brings to the authenticity of MEMS angular-rate sensor output signal, also give and more effective solution, improve the precision of MEMS angular-rate sensor output signal.
First summary of the invention of present patent application is the control method of temperature constant of confined space of having invented the placement sense angular rate induction milli machine of MEMS angular-rate sensor.To monitor simultaneously in the confined space of placing induction angular acceleration induction milli machine and the outer environment temperature of MEMS angular-rate sensor, according to the temperature difference that reaches the outer environment temperature of MEMS angular-rate sensor in the confined space of placing angular acceleration induction milli machine, the size of the pace of change of internal and external temperature and inside and outside amount of conducting heat, control its temperature thereby active control is carried out in the confined space heating of placing angular acceleration induction milli machine, make the milli machine of sense angular rate keep the constant method of its working temperature.
In addition, second summary of the invention of the present patent application is, the thermostatically-controlled equipment of the confined space that the angular velocity induction milli machine of the MEMS angular-rate sensor of this MEMS angular-rate sensor is placed consists of the following components: a, airtight indoor temperature transmitter: the interior temperature of confined chamber that this sensor is placed for the milli machine of the sense angular rate signal of induction MEMS angular-rate sensor; B, environment temperature sensor: this sensor is used for the environment temperature of induction MEMS environment that angular-rate sensor is placed; C, small well heater: the temperature that is used for the confined chamber that the milli machine of the sense angular rate signal of heating MEMS angular-rate sensor places; D, radiator valve: this radiator valve, according to the temperature value that obtains of airtight indoor temperature transmitter and environment temperature sensor and the situation of change of temperature, the heat conduction velocity of the airtight locular wall of placing with reference to the milli machine of the sense angular rate signal of MEMS angular-rate sensor simultaneously, small well heater is controlled, made the temperature in the confined chamber keep constant.
The explanation of effect about invention
Invention according to the present patent application, temperature in the confined chamber that the milli machine of the sense angular rate signal of MEMS angular-rate sensor is placed can be carried out thermostatic control, from but the output signal of MEMS angular-rate sensor is not subjected to the impact of the variation of its environment temperature of working, reach the angular velocity output signal of high-precision MEMS angular-rate sensor.
The explanation of preferred plan during the invention process
One, the active control method of angular velocity signal induction milli machine mechanism constant temperature duty.At first the constant-temperature control method with regard to the duty of the milli machine of the sense angular rate signal of the MEMS angular-rate sensor in the present patent application describes: the thermostatic control of the duty of milli machine refer to by a plurality of temperature sensors detect the MEMS angular-rate sensor milli machine temperature and affect the variation of environment temperature and the environment temperature of its temperature variation, come the temperature of the milli machine of MEMS angular-rate sensor is carried out active control by heating and the mode of stopped heating, thereby the temperature constant that keeps the milli machine of MEMS angular-rate sensor, avoid because the variation of the mechanical property of the milli machine that the temperature variation of the milli machine of MEMS angular-rate sensor causes, the output signal that is the MEMS angular-rate sensor is not subjected to the impact of variation of ambient temperature, thereby guarantees the high precision of the output signal value of MEMS angular-rate sensor.
Fig. 1 is the synoptic diagram of the active control of milli machine mechanism constant temperature in the present patent application.
Among Fig. 1, in confined chamber, airtight indoor temperature transmitter 2 has been installed, well heater 4, angular velocity induction milli machine 5, radiator valve 6.Simultaneously, environment temperature sensor 1 is housed outside confined chamber.
From this figure, when inside and outside the confined chamber temperature difference being arranged, will there be heat to pass through airtight locular wall and inside and outside confined chamber, conduct heat.And the speed of conducting heat is directly proportional the speed of the heat transfer of airtight locular wall.
In Fig. 1, when the temperature in the confined chamber is carried out thermostatic control, radiator valve 6 will send instruction according to the next well heater 4 in confined chamber of the heat conducting speed of the temperature difference inside and outside the confined chamber and airtight locular wall 3, carry out thermostatic control.To the heating power of well heater, can be calculated by following formula.
Formula 1:
W＝(Ti-To)*Tr
Ti: airtight indoor temperature [℃]
To: environment temperature [℃]
Tr: the heat transfer rate of airtight locular wall [J/s ℃]
W: heating power [J/s]
Two, utilize the present invention to carry out the thermostatically controlled application examples of working temperature of milli machine of the sense angular rate signal of MEMS angular-rate sensor:
The practical sketch map of the working temperature constant-temperature control method of the milli machine of the sense angular rate signal of above-mentioned MEMS angular-rate sensor is represented by Fig. 2.Among Fig. 2, thermostatic control system is mainly by environment temperature sensor 10, airtight indoor temperature transmitter 20, and airtight locular wall 30, confined chamber internal heater 40, angular velocity induction milli machine 50 and radiator valve 60 form.
[when temperature changes]
When the temperature of environment changed, radiator valve obtained inside and outside temperature difference by environment temperature sensor and airtight indoor temperature transmitter, according to the inside and outside heat transfer rate of known in advance confined chamber, sent the steering order of heating to well heater simultaneously.Make the temperature in the confined chamber keep constant.
[lime light in the design]
When the design well heater, in order to make the even of airtight indoor temperature heating, reach simultaneously the inside and outside heat transfer that can compensate rapidly airtight locular wall, as far as possible well heater is evenly distributed on airtight locular wall.In order to detect more exactly the temperature value of milli machine, with airtight indoor temperature transmitter be placed on milli machine near, perhaps be integrated with milli machine, rather than be placed near other heating modules in the confined chamber, near ASIC.
[application examples 1]
All formation explanations:
Fig. 2 is the interior milli machine thermostatic control system sketch map of the MEMS angular-rate sensor of the first application examples of the present invention.
Use in the MEMS angular-rate sensor of the present invention milli machine thermostatic control system device by, environment temperature sensor 10, airtight indoor temperature transmitter 20, airtight locular wall 30, confined chamber internal heater 40, angular velocity induction milli machine 50 and radiator valve 60 form.
This device is the mode that is combined in one with the MEMS angular-rate sensor.And, radiator valve wherein can be to design as a module separately, also can reach the thermostatic control of the milli machine of MEMS angular-rate sensor sense angular rate signal with the incorporated mode of ASIC (that is, the integrated circuit (IC) system of the MEMS angular-rate sensors such as loop is processed and detected to the driving loop of the milli machine of the sense angular rate signal of MEMS angular-rate sensor and signal) of original MEMS angular-rate sensor.
(1) environment temperature sensor 10:
(2) airtight indoor temperature transmitter 20:
Airtight indoor temperature transmitter 20 is the temperature sensors that detect the temperature in the inner confined chamber of MEMS angular-rate sensor.It can be variable temperatures electric resistance alloy temperature sensor.This temperature sensor can be the milli machine annex that is placed on the sense angular rate signal, also can be integrated to design with milli machine.
(3) airtight locular wall 30:
Airtight locular wall 30, the airtight constant indoor temperature of placing at the milli machine of the sense angular rate signal of MEMS angular-rate sensor has in the source control device, is the heat transfer function module in the thermostatic control system.The design of the heat transfer rate of this heat transfer function module, it is the thermal value of the heater members except the confined chamber internal heater in the confined chamber of placing according to milli machine, the mxm. of the end temperature value that milli machine is possible and MEMS acceleration transducer working environment designs, to ensure that MEMS can work in designed maximum operating temperature environment.
(4) the confined chamber internal heater 40:
Confined chamber internal heater 40 is the devices that heat in the confined chamber of placing at the milli machine of the sense angular rate signal of MEMS angular-rate sensor, can be metallic resistance formula well heater.When the electric current that goes out when radiator valve flows through this well heater, heat occurs, to heating in the confined chamber.The interior temperature of the confined chamber that milli machine is placed keeps constant.For keep to airtight heating indoor evenly, as far as possible confined chamber internal heater 40 is evenly distributed in the confined chamber around, simultaneously near airtight locular wall.
(5) radiator valve 60:
(6) constant-temperature control method
Fig. 3 is the process flow diagram of the constant-temperature control method of airtight indoor temperature of the present invention.Once each step is described.
1, preheat (S100)
When the MEMS angular-rate sensor is brought into use, preheat in the confined chamber that the milli machine of the sense angular rate signal of MEMS angular-rate sensor is placed, make the temperature in the confined chamber reach predefined thermostatic control value.Carrying out the use of MEMS angular-rate sensor prepares.
2, receive temperature sensor signal (S200)
In the confined chamber that reception is placed from the milli machine of the sense angular rate signal of the temperature signal of environment temperature sensor and MEMS angular-rate sensor temperature value signal.
3, judge (S300) to whether heating
Judge whether heating according to temperature gap.If do not need to add heat control, then directly forward to and whether proceed thermostatically controlled judgement.If need heating, then enter next step thermostatic control program.
4, thermal value is calculated (S400)
According to temperature difference in the confined chamber, with reference to the heat transfer rate of airtight locular wall, the thermal value of sending that well heater is required is calculated simultaneously.
5, add heat control (S500, S600) by the heating steering logic
According to the required thermal value of extrapolating, use the heated at constant temperature steering logic, such as PID control, well heater is added heat control.
6, judge (S700) to whether finishing thermostatic control
Whether the instruction of sending according to temperature difference in the confined chamber and peripheral control unit to continuing thermostatic control or finishing thermostatic control and judge.
7, conclusion
(S100～S700) comes to carry out thermostatic control in the milli machine of the sense angular rate signal of MEMS angular-rate sensor is placed constantly the confined chamber, arrives the high precision of MEMS angular-rate sensor output signal by the above step of repeatable operation.
[application examples 2]
The 2nd application examples explanation of the present invention.
The present invention can be placed on radiator valve outside the MEMS angular-rate sensor.
Fig. 4 carries out thermostatically controlled illustraton of model in the confined chamber placed of the milli machine of sense angular rate signal of the MEMS angular-rate sensor of the 2nd application examples of the present invention.That is, radiator valve is placed on outside the MEMS angular-rate sensor.Radiator valve receives from the environment temperature sensor temperature value, ASIC by the MEMS angular-rate sensor obtains the temperature value in the confined chamber simultaneously, according to the temperature difference inside and outside the confined chamber, use the thermostatic control logic, obtain generating heat after the value, ASIC to the MEMS angular-rate sensor sends the heating steering order, by ASIC to heating in the confined chamber.
According to this application, radiator valve is placed on the MEMS angular-rate sensor reaches equally thermostatically controlled target outward.Simultaneously, with respect to application examples 1, the circuit system in the MEMS angular-rate sensor can be simplified.
[simple declaration of figure]
[Fig. 1] thermostatic control illustraton of model.
[Fig. 2] thermostatically-controlled equipment sketch map of the present invention.
[Fig. 3] constant-temperature control method schematic flow sheet of the present invention.
[Fig. 4] is of the present invention to be placed on the outer thermostatically-controlled equipment sketch map of MEMS angular-rate sensor with the thermostatic control module.
[symbol description]
10: environment temperature sensor
20: airtight indoor temperature transmitter
30: in the confined chamber
40: the confined chamber well heater
50: angular velocity induction milli machine
60: radiator valve in the active confined chamber.
Claims (2)
1.MEMS the control method of the temperature constant of the confined space of the placement sense angular rate of angular-rate sensor induction milli machine.To monitor simultaneously in the confined space of placing induction angular acceleration induction milli machine and the outer environment temperature of MEMS angular-rate sensor, according to the temperature difference that reaches the outer environment temperature of MEMS angular-rate sensor in the confined space of placing angular acceleration induction milli machine, the size of the pace of change of internal and external temperature and inside and outside amount of conducting heat, control its temperature thereby active control is carried out in the confined space heating of placing angular acceleration induction milli machine, make the milli machine of sense angular rate keep the constant method of its working temperature.
2. the thermostatically-controlled equipment of the confined space placed of the angular velocity of the MEMS angular-rate sensor of this MEMS angular-rate sensor induction milli machine consists of the following components: a, and airtight indoor temperature transmitter: this sensor is used for the temperature in the confined chamber that the milli machine of the sense angular rate signal of induction MEMS angular-rate sensor places; B, environment temperature sensor: this sensor is used for the environment temperature of induction MEMS environment that angular-rate sensor is placed; C, small well heater: the temperature that is used for the confined chamber that the milli machine of the sense angular rate signal of heating MEMS angular-rate sensor places; D, radiator valve: this radiator valve, according to the temperature value that obtains of airtight indoor temperature transmitter and environment temperature sensor and the situation of change of temperature, the heat conduction velocity of the airtight locular wall of placing with reference to the milli machine of the sense angular rate signal of MEMS angular-rate sensor simultaneously, small well heater is controlled, made the temperature in the confined chamber keep constant.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104733164A (en) * | 2013-12-19 | 2015-06-24 | 四川高精净化设备有限公司 | Vacuum oil injection machine with constant-temperature box |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104733164A (en) * | 2013-12-19 | 2015-06-24 | 四川高精净化设备有限公司 | Vacuum oil injection machine with constant-temperature box |
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Application publication date: 20130424 |