CN103063994A - High vacuum test container and medium discharge test device comprising the same - Google Patents
High vacuum test container and medium discharge test device comprising the same Download PDFInfo
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- CN103063994A CN103063994A CN2011103201850A CN201110320185A CN103063994A CN 103063994 A CN103063994 A CN 103063994A CN 2011103201850 A CN2011103201850 A CN 2011103201850A CN 201110320185 A CN201110320185 A CN 201110320185A CN 103063994 A CN103063994 A CN 103063994A
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Abstract
The invention discloses a high vacuum medium discharge device, in particular to a high vacuum medium discharge test device in which a GM refrigerating machine is used as a cold source. The high vacuum medium discharge test device comprises a high vacuum test container, the GM refrigerating machine, a molecular pump vacuum system, a touch screen temperature control system and the like, wherein a helium compressor unit of the GM refrigerating machine, a molecular pump, a mechanical pump and the like are arranged on the lower portion of equipment in an integrated mode, and a vacuum container, a composite vacuum gauge, a molecular pump power supply, the temperature control system and the like are arranged on the upper portion of the equipment. The invention also discloses the vacuum container for the discharge device. The high vacuum medium discharge test device and the vacuum container solve the problems brought by a working process in which liquid nitrogen is adopted as the cold source of a common vacuum high and low temperature test device, and have the advantages of being simple and compact in structure, convenient to run and low in running cost.
Description
Technical field
The invention belongs to the vacuum refrigeration field.Specifically, the high vacuum medium discharge test unit that the present invention relates to the high-vacuum discharge test chamber and comprise this discharge test container, it can be used for testing insulating material in ultra-high vacuum environment, being subjected to the change of material insulation property under the high and low temperature effect, is a kind of specialized equipment of medium discharge test.
Background technology
Along with developing rapidly of China's space industry, the application of insulating material in space field is also more and more general, and this just requires insulating material before being applied to space environment, carry out test under the space environmental simulation to its insulating property, mechanical property etc.Similarly test unit adopted liquid nitrogen to do low-temperature receiver more in the past, and such test unit one is that structure, feed flow flow process are complicated, and the 2nd, operating cost is high, operation inconvenience.In addition, to reach 10 according to present insulating material discharge medium discharge test device
-6The vacuum tightness of Pa, and probe temperature will satisfy-160 ℃~+ 200 ℃ test request, therefore, how to provide a kind of liquid nitrogen that do not use very urgent as the test unit of low-temperature receiver, and, operating cost and daily management expense are reduced.Based on this, the inventor adopts the GM refrigeration machine to replace traditional liquid nitrogen as low-temperature receiver through years of researches, and has overcome the technical barrier that the GM refrigeration machine can not (100-200 ℃ of warm area) work in the high-temperature region, thereby has finished the present invention.
Summary of the invention
The object of the present invention is to provide that a kind of structure and feed flow flow process are simple, operating cost and the cheap high vacuum medium discharge test unit of daily management expense, this test unit is vacuum condition that can space environmental simulation, the insulating material medium discharge test unit of high and low temperature condition.The low-temperature receiver that the available technology adopting liquid nitrogen needs as test, operating cost is high, complex structure.The inventor is in the face of vacuum tightness and the temperature range requirement of insulating material discharge test, attempt first adopting GM refrigeration machine cold head to replace liquid nitrogen as low-temperature receiver, and when being assemblied in the high vacuum medium discharge test unit in the face of the GM refrigeration machine, the technical matters that is difficult to satisfy the high-temperature region job requirement in the face of this refrigeration machine, through constantly test, developed a kind of temperature, 10 that can satisfy-160 ℃~+ 200 ℃
-6The high vacuum medium discharge test unit of the vacuum tightness of Pa, and by with the helium compressor unit of GM refrigeration machine and molecular pump, mechanical pump equal vacuum extract system over all Integration in the bottom of high vacuum medium discharge test unit, thereby make this device have simple in structure, compact advantage.
The present invention has adopted following technical scheme:
A kind of high vacuum medium discharge device vacuum tank, mainly comprise vacuum tank housing cylindraceous, housing one end is provided with container door, the housing other end is provided with dull and stereotyped back cover, be provided with horizontally-mounted GM refrigeration machine cold head by flange on the dull and stereotyped back cover, the cold head top of inserting the GM refrigeration machine in the container is provided with test piece worktable, test piece worktable supports fixing by four supporting legs that are supported on the vacuum tank barrel, spacing between refrigeration machine cold head and the test piece worktable is the 8-10 millimeter, be sealed with the bimetallic strip of bending between the two, bimetallic strip one end is close on the test piece worktable bottom surface, the other end is close to the upper end of GM refrigeration machine cold head, the test piece worktable bottom is provided with totally-enclosed or semi-enclosed space, so that GM refrigeration machine cold head is heat insulation, be socketed with a radome in the vacuum tank housing, the xsect of radome is the circular arc with opening, the lengthwise opening of radome bottom is fixed or is welded and fixed with work edge of table machinery, be provided with electric discharge device on the radome top inner wall, be provided with heating arrangement on the sidewall, be provided with the vacuum suction interface on the vacuum tank housing barrel, wherein, bimetallic strip makes worktable contact with the refrigeration machine cold head below 70 ℃, and under greater than 70 ℃ working temperature, the two is separated, cut off worktable to the heat conduction of cold head.
Wherein, described bimetallic strip is preferably the 5J20110 bimetallic strip.
Wherein, be provided with view window on the container door.
Further, also be provided with spare interface on the dull and stereotyped back cover.
Further, the preferred infrared heating device of heating arrangement, for example quartz heating-pipe or iodine-tungsten lamp.
Further, described hemi-closure space is surrounded by indent hollow U-shaped cross section cylinder plate and worktable bottom, and the hemi-closure space in the hollow U-shaped of indent cross section holds the refrigeration machine cold head.
Further, described electric discharge device is the 20KV high-pressure discharging device.
A kind of high vacuum medium discharge test unit that comprises above-mentioned vacuum tank, its agent structure is divided two-layer up and down, upper strata one side is provided with control device, opposite side is provided with the vacuum tank of said structure, the vacuum tank top is provided with electric discharge device, and lower floor is the helium compressor group and the vacuum unit that mainly is made of oil-sealed rotary pump, composite molecular pump of the GM refrigeration machine that integrates.Wherein, control device and helium compressor group, vacuum unit carry out pipeline and are connected and are electrically connected and the running parameter of vacuum tank is controlled, and the helium compressor group is freezed to vacuum tank, and the vacuum unit is found time to vacuum tank.
Wherein, control device comprises compound vacuum gauge, compound molecule pumping source, the setting of touch-screen temperature-controlled parameter interface, system's manual operation panel and two GM refrigeration machine helium pressure tables, links to each other with low pressure gasholder with the oil separator of helium compressor unit by thin copper pipe respectively.
Wherein, the vacuum unit provides 10 for test unit
-6The vacuum test environment of Pa; mainly comprise oil-sealed rotary pump, composite molecular pump, vacuum valve, pipeline and compound vacuum gauge; oil-sealed rotary pump is used as forepump; realization is taken out in advance to system; composite molecular pump is decided and is taken out pump and use, the anti-oil when being used for preventing that mechanical pump from shutting down with the vaccum stop valve of means of deflation, and compound vacuum gauge is used for the vacuum tightness in the test container; the vacuum deflation valve is used for the inflation to system, and its connected mode is being known in the art.
Heavy caliber cryopump with liquid nitrogen heat sink of the present invention has following advantage:
1) cold head of employing GM refrigeration machine substitutes liguefied nitrogen in the past, and operating cost and managerial cost are reduced greatly;
2) performance domestic GM refrigeration machine integration good characteristics have been done helium compressor unit and molecular pump, oil-sealed rotary pump integrated, make reasonable integral structure, are convenient to control noise;
3) safeguard measure is abundant, after parameter is once set, adopts temperature automatically controlled mode to need not technician's operation and keeps an eye on;
Description of drawings
Figure 1A is the high vacuum test chamber front elevation of an embodiment of the present invention.
Wherein, 11 is the high vacuum jar housing; 12 is spare interface; 13 is GM refrigeration machine cold head; 14, test piece worktable; 15, supporting leg; 16, totally-enclosed or semi-enclosed space; 17, container door; 18 is infrared heating device; 19, radome; 20, vacuum suction interface; 21, spare interface; 22, electric discharge device; 23, bimetallic strip, 24, dull and stereotyped back cover.
Figure 1B is side view corresponding to high vacuum test chamber of Figure 1A.
Fig. 2 is the structural representation of the test piece worktable of an embodiment of the present invention.
Wherein 31 is the polytetrafluoro jacket: 23 are bimetallic strip; 34 is work top; 15 is supporting leg.
Fig. 3 is the structural representation of high vacuum medium discharge device according to an embodiment of the present invention.
Wherein, 41 is control device; 42 is vacuum tank; 22 is electric discharge device; 43 is the helium compressor unit of GM refrigeration machine; 44 is the vacuum unit.
Embodiment
Referring to accompanying drawing the utility model is elaborated, but the accompanying drawing purpose of example not only is not intended to protection domain of the present utility model is carried out any restriction, its scope is limited by appending claims.
Referring to Fig. 1, Figure 1A is the high vacuum test chamber front elevation of an embodiment of the present invention.According to this embodiment, the high vacuum test chamber comprises and comprises that mainly vacuum tank housing 11 cylindraceous, housing 11 1 ends are provided with container door 17, preferably is provided with view window on the container door 17, so that the insulating material test process that carries out in the container is observed.Housing 11 other ends are provided with dull and stereotyped back cover 24, GM refrigeration machine cold head 13 tops that are provided with in horizontally-mounted GM refrigeration machine cold head 13, the insertion container by flange on the dull and stereotyped back cover 24 are provided with test piece worktable 14, test piece worktable 14 supports fixing by four supporting legs 15 that are supported on the vacuum tank barrel, spacing between refrigeration machine cold head 13 and the test piece worktable 14 is the 8-10 millimeter, be sealed with the bimetallic strip 23 of bending between the two, bimetallic strip is preferably the 5J20110 bimetallic strip, for example available from the sheet metal of stainless steel metal Materials Co., Ltd of Guangdong Nippon Steel.Bimetallic strip 23 1 ends are close on the test piece worktable bottom surface, the other end is close to the upper end of GM refrigeration machine cold head 13, test piece worktable 14 bottoms are provided with totally-enclosed or semi-enclosed space 16, space 16 preferably consists of (consulting Figure 1B is understood) by the hollow U-shaped of indent cross section cylinder plate and worktable bottom surface, this space accommodates GM refrigeration machine cold head so that GM refrigeration machine cold head 13 is heat insulation, be socketed with a radome 19 in the vacuum tank housing 11, the xsect of radome 19 is preferably the circular arc (consulting Figure 1B) with opening, the lengthwise opening of radome 19 bottoms is fixed or is welded and fixed with work edge of table machinery, be provided with electric discharge device 22 on radome 19 top inner wall, be provided with heating arrangement on the sidewall, preferred infrared heating device 18, infrared heating device 18 for example can be quartz heating-pipe or iodine-tungsten lamp.Be provided with vacuum suction interface 20 on the barrel of vacuum tank housing 11, wherein, bimetallic strip 23 makes worktable contact with the refrigeration machine cold head below 70 ℃, and under greater than 70 ℃ working temperature the two is separated, and cuts off test piece worktable to the heat conduction of cold head.
In addition, also be provided with spare interface 21 on the dull and stereotyped back cover.
In addition, according to an embodiment of the present invention, referring to Fig. 2, Fig. 2 has provided a kind of structural representation of test piece worktable.Wherein, the material of test piece worktable face 34 is brass H62 plate, fixes with 4 supporting legs, the 15 usefulness nuts that are welded on internal tank, adopts 31 thermal insulation of teflon jacket between test piece worktable and the supporting leg 15.For preventing that hot environment is to the damage of cold head; adopt bimetallic strip 23, make between the heat interchanger of test piece worktable lower surface and cold head to keep good contact below 70 ℃, the two separation more than 70 ℃; cut off worktable to the heat conduction of cold head, thereby play the effect of protection cold head.
Fig. 3 is the structural representation of high vacuum medium discharge device according to an embodiment of the present invention.A kind of high vacuum medium discharge test unit that comprises above-mentioned vacuum tank, its agent structure is divided two-layer up and down, upper strata one side is provided with control device 41, opposite side is provided with the vacuum tank 42 of said structure, vacuum tank 42 tops are provided with electric discharge device 22, and lower floor is the helium compressor group 43 and the vacuum unit 44 that mainly is made of oil-sealed rotary pump, composite molecular pump of the GM refrigeration machine that integrates.Wherein, control device 41 and helium compressor group 43, vacuum unit 44 carry out pipeline and are connected and are electrically connected and the running parameter of vacuum tank 42 is controlled, and 43 pairs of vacuum tanks 42 of helium compressor group freeze, and 44 pairs of vacuum tanks 42 of vacuum unit are found time.
Wherein, control device comprises conventional compound vacuum gauge, compound molecule pumping source, the setting of touch-screen temperature-controlled parameter interface, system's manual operation panel and two GM refrigeration machine helium pressure tables, links to each other with low pressure gasholder with the oil separator of helium compressor unit by thin copper pipe respectively.These parts are the routine techniques in vacuum degree control and the temperature control, do not repeat them here.
Wherein, the vacuum unit provides 10 for test unit
-6The vacuum test environment of Pa; mainly comprise oil-sealed rotary pump, composite molecular pump, vacuum valve, pipeline and compound vacuum gauge; oil-sealed rotary pump is used as forepump; realization is taken out in advance to system; composite molecular pump is decided and is taken out pump and use, the anti-oil when being used for preventing that mechanical pump from shutting down with the vaccum stop valve of means of deflation, and compound vacuum gauge is used for the vacuum tightness in the test container; the vacuum deflation valve is used for the inflation to system, and its connected mode is being known in the art.
Embodiment: the high vacuum jar useful space is Φ 400mm * 300mm.Area 300 * 300mm
2, the GM refrigeration machine adopts CT80s, adopts 2XZ-4 type mechanical pump to make the holding pump of system's forepump and composite molecular pump, and PNZK-GFF-III 150/600 turbomolecular pump is taken out the pump use as the master of vacuum system.Employing DN25mm corrugated tube is done the pump-line between mechanical pump and the composite molecular pump; anti-oil when preventing that mechanical pump from shutting down; the mechanical pump outlet is equipped with the electromagnet cut off valve DDC-JQ25A of band inflation; near the UNICOM's Manual air-release valves forepump joint of composite molecular pump is for handled easily DN16 venting valve is installed on the right panel of cabinet.The ZDF5227 compound vacuum gauge is used for measuring and showing the vacuum tightness that container is interior.
In high vacuum medium discharge test chamber of the present invention, be equipped with GM refrigeration machine cold head and replace liquid nitrogen as the required low-temperature receiver of test, with the thermal source that the infrared quartz lamp is done experiment, adopt the molecular pump unit as the obtaining means of high vacuum; Thereby realize the space environmental simulation that test is required, and adopt the 20KV high-pressure discharging device to provide experiment required high voltage electric energy.
Temperature control system can realize Set arbitrarily and the control of test piece worktable temperature in temperature range-160 ℃~+ 200 ℃.Core control part is comprised of the thermal module of Omron, touch display screen, Programmable Logic Controller PLC etc.; Execution unit is GM refrigeration machine and quartz ampoule heating lamp; Temperature sensor is for being contained in respectively two Pt100 on cold header heat exchanger and the test piece worktable.Behind Temperature Setting, by the difference with actual temperature of set temperature value relatively, by the operation of programmed control execution unit and stop, reaching set point and keep temperature constant, temperature-controlled precision is ± 2 ℃.For guaranteeing the normal operation of refrigeration machine, be limited to 40 ℃ on the default refrigeration machine start-up temperature, namely the worktable observed temperature is more than 40 ℃ the time, and refrigeration machine can not start cooling, and that can only lean on container naturally cools to that refrigeration machine could work below 40 ℃.Under any temperature, as long as design temperature is higher than observed temperature, can starts heating lamp worktable is heated, when reaching set temperature, heating stops and keeping the temperature substantially constant.Consider that GM refrigeration machine cold head may sustain damage, and adopts bi-metal to make at high temperature automatism isolation of test piece worktable and cold header heat exchanger under the test worst hot case.
Simple GM refrigeration machine is comprised of cold head, compressor unit, flexible pipe line and electrical control part.For compact conformation, this equipment has been done integrated to parts such as compressor unit, flexible pipe line and vacuum pump, composite molecular pumps, is installed in the bottom in the equipment cabinets.Cold head is installed in internal tank, and the temperature control of compressor electrical control part and system is partly merged, by system touch screen indication press ruuning situation.
Although above the specific embodiment of the present invention has been given to describe in detail and explanation; but what should indicate is; those skilled in the art can carry out various equivalences to above-mentioned embodiment according to spirit of the present invention and change and modification; its function that produces all should be within protection domain of the present invention when not exceeding spiritual that instructions and accompanying drawing contain.
Claims (10)
1. high vacuum medium discharge device vacuum tank, mainly comprise vacuum tank housing cylindraceous, housing one end is provided with container door, the housing other end is provided with dull and stereotyped back cover, be provided with horizontally-mounted GM refrigeration machine cold head by flange on the dull and stereotyped back cover, the cold head top of inserting the GM refrigeration machine in the container is provided with test piece worktable, test piece worktable supports fixing by four supporting legs that are supported on the vacuum tank barrel, spacing between refrigeration machine cold head and the test piece worktable is the 8-10 millimeter, be sealed with the bimetallic strip of bending between the two, bimetallic strip one end is close on the test piece worktable bottom surface, the other end is close to the upper end of GM refrigeration machine cold head, the test piece worktable bottom is provided with totally-enclosed or semi-enclosed space, so that GM refrigeration machine cold head is heat insulation, be socketed with a radome in the vacuum tank housing, the xsect of radome is the circular arc with opening, the lengthwise opening of radome bottom is fixed or is welded and fixed with work edge of table machinery, be provided with electric discharge device on the radome top inner wall, be provided with heating arrangement on the sidewall, be provided with the vacuum suction interface on the vacuum tank housing barrel, wherein, bimetallic strip makes worktable contact with the refrigeration machine cold head below 70 ℃, and under greater than 70 ℃ working temperature, the two is separated, cut off worktable to the heat conduction of cold head.
2. vacuum tank as claimed in claim 1, wherein, described bimetallic strip is preferably the 5J20110 bimetallic strip.
3. vacuum tank as claimed in claim 1 or 2 wherein, is provided with view window on the described container door.
4. vacuum tank as claimed in claim 1 or 2 wherein, also is provided with spare interface on the dull and stereotyped back cover.
5. vacuum tank as claimed in claim 1 or 2, wherein, heating arrangement is quartz heating-pipe or iodine-tungsten lamp.
6. vacuum tank as claimed in claim 1 or 2, wherein, described hemi-closure space is surrounded by indent hollow U-shaped cross section cylinder plate and worktable bottom, and the hemi-closure space in the hollow U-shaped of indent cross section holds the refrigeration machine cold head.
7. vacuum tank as claimed in claim 1 or 2, wherein, described electric discharge device is the 20KV high-pressure discharging device.
8. high vacuum medium discharge test unit that comprises above-mentioned vacuum tank, its agent structure is divided two-layer up and down, upper strata one side is provided with control device, opposite side is provided with such as the described vacuum tank of each claim of claim 1-7, the vacuum tank top is provided with electric discharge device, lower floor be the helium compressor group of the GM refrigeration machine that integrates with mainly by oil-sealed rotary pump, the vacuum unit that composite molecular pump consists of, wherein, control device and helium compressor group, the vacuum unit carries out the pipeline connection and is electrically connected and the running parameter of vacuum tank is controlled, the helium compressor group is freezed to vacuum tank, and the vacuum unit is found time to vacuum tank.
9. high vacuum medium discharge test unit as claimed in claim 8, wherein, control device comprises compound vacuum gauge, compound molecule pumping source, the setting of touch-screen temperature-controlled parameter interface, system's manual operation panel and two GM refrigeration machine helium pressure tables, links to each other with low pressure gasholder with the oil separator of helium compressor unit by thin copper pipe respectively.
10. high vacuum medium discharge test unit as claimed in claim 8, wherein, described vacuum unit provides 10 for test unit
-6The vacuum test environment of Pa; mainly comprise oil-sealed rotary pump, composite molecular pump, vacuum valve, pipeline and compound vacuum gauge; oil-sealed rotary pump is used as forepump; realization is taken out in advance to system; composite molecular pump is decided and is taken out the pump use; anti-oil when being used for preventing that mechanical pump from shutting down with the vaccum stop valve of means of deflation, compound vacuum gauge is used for the vacuum tightness in the test container, and the vacuum deflation valve is used for the inflation to system.
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Cited By (5)
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CN105044573A (en) * | 2015-07-17 | 2015-11-11 | 中国科学院电工研究所 | High temperature superconductivity power device low temperature high voltage partial discharge experiment and test device |
CN105116243A (en) * | 2015-07-17 | 2015-12-02 | 中国科学院电工研究所 | Electrical characteristic experimental device for electrified conductor of low temperature insulating and high temperature superconducting cable |
CN110208368A (en) * | 2019-07-16 | 2019-09-06 | 广东电网有限责任公司 | A kind of the insulating gas electric discharge and decomposition experiment equipment of hyperbar high voltage |
CN110426608A (en) * | 2019-06-26 | 2019-11-08 | 上海电气鼓风机厂有限公司 | Dielectric experimental rig and method of the electric device under helium environment |
CN111665423A (en) * | 2020-06-11 | 2020-09-15 | 国网山东省电力公司电力科学研究院 | Medium discharge system suitable for simulating complex environment and use method |
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CN105044573A (en) * | 2015-07-17 | 2015-11-11 | 中国科学院电工研究所 | High temperature superconductivity power device low temperature high voltage partial discharge experiment and test device |
CN105116243A (en) * | 2015-07-17 | 2015-12-02 | 中国科学院电工研究所 | Electrical characteristic experimental device for electrified conductor of low temperature insulating and high temperature superconducting cable |
CN105044573B (en) * | 2015-07-17 | 2017-11-14 | 中国科学院电工研究所 | The low temperature high voltage shelf depreciation experiment of high-temperature superconductor electric device and test device |
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CN110426608A (en) * | 2019-06-26 | 2019-11-08 | 上海电气鼓风机厂有限公司 | Dielectric experimental rig and method of the electric device under helium environment |
CN110208368A (en) * | 2019-07-16 | 2019-09-06 | 广东电网有限责任公司 | A kind of the insulating gas electric discharge and decomposition experiment equipment of hyperbar high voltage |
CN111665423A (en) * | 2020-06-11 | 2020-09-15 | 国网山东省电力公司电力科学研究院 | Medium discharge system suitable for simulating complex environment and use method |
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