CN103062062A - Buffering and filtering device for air exhaust port of vacuum pump - Google Patents
Buffering and filtering device for air exhaust port of vacuum pump Download PDFInfo
- Publication number
- CN103062062A CN103062062A CN2013100356045A CN201310035604A CN103062062A CN 103062062 A CN103062062 A CN 103062062A CN 2013100356045 A CN2013100356045 A CN 2013100356045A CN 201310035604 A CN201310035604 A CN 201310035604A CN 103062062 A CN103062062 A CN 103062062A
- Authority
- CN
- China
- Prior art keywords
- baffle
- vacuum pump
- bleeding point
- baffle plate
- buffering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
The invention relate to a buffering and filtering device for an air exhaust port of a vacuum pump. The device comprises a closed cavity which is formed by a first baffle, a second baffle and side walls, wherein the side walls are fixedly connected with the edges of the first and second baffles; the air exhaust port of the vacuum pump is completely occluded by the first baffle; air exhaust holes for communicating the cavity with the outside are respectively formed in the first baffle and the second baffle; and the air exhaust holes of the first baffle and the second baffle are staggered in the axial direction of the air exhaust port. The device disclosed by the invention has the advantages that the flow of sucked air can be reduced during the operation of the vacuum pump, so that the force of air motion on objects in a vacuum chamber can be reduced, and the damage of dust and foreign matters to rotary vanes of the vacuum pump is alleviated.
Description
Technical field
The present invention relates to a kind of buffering filtrating equipment, particularly relate to a kind of buffering filtrating equipment that is used in the vacuum pump bleeding point.
Background technique
At present, vacuum lines utilizes vacuum pump carrying out the conversion of atmosphere, vacuum into and out of vacuum chamber always.Prior art directly stretches in the vacuum chamber with the bleeding point of vacuum pump, air is extracted out reach vacuum environment.
But when opening vacuum pump, air is directly discharged by bleeding point in vacuum chamber, because the speed of exhaust may well cause the loading in the vacuum chamber to move, or drives loading or dust is extracted in the vacuum pump, damages the working life that blade reduces pump.
Summary of the invention
Technical problem to be solved by this invention provides a kind of vacuum pump bleeding point buffering filtrating equipment, the flow of air amount in the time of can reducing the vacuum pump running, and then reduce Air Flow to the active force of object in the vacuum chamber, and reduce the dust foreign material to the infringement of Vacuum pump rotary vane.
For solving the problems of the technologies described above, the invention provides a kind of vacuum pump bleeding point buffering filtrating equipment, comprise between the first baffle edge and the second baffle edge being fixedly connected with sidewall, the first baffle plate, second baffle and sidewall consist of a cavity, and the first baffle plate blocks the vacuum pump bleeding point fully; Have respectively on the first baffle plate and the second baffle to make cavity and the extraneous bleeder hole that communicates, the bleeder hole of the first baffle plate and the bleeder hole of second baffle stagger in the position of bleeding point axial direction.
After adopting above technological scheme, air in the vacuum chamber enters cavity by the bleeder hole on the second baffle first, make air dispersion enter cavity, reduce Air Flow to the active force of loading, can prevent that also larger dust or foreign material from flying in cavity and the vacuum pump, be drawn in the vacuum pump by the bleeder hole on the first baffle plate again, further reduce the air mass flow that the air in the cavity enters vacuum pump, because the first baffle plate bleed with second baffle on bleeder hole stagger in the position of bleeding point axial direction, the dust loading major part that enters cavity is blocked on the first baffle plate, reaches the effect that buffering is filtered.
The sidewall of this vacuum pump bleeding point buffering filtrating equipment has extension at the bleeding point axial direction to bleeding point, and vacuum pump bleeding point buffering filtrating equipment is socketed on the outer wall of bleeding point.
Flanging is arranged at the extension bottom of this vacuum pump bleeding point buffering filtrating equipment, and mounting hole is arranged on the flanging, can make whole device be fixedly connected on external bracing section by mounting hole.
Description of drawings
Fig. 1 is the sectional view of vacuum pump bleeding point buffering filtrating equipment embodiment one plan view.
Fig. 2 is the sectional view of vacuum pump bleeding point buffering filtrating equipment embodiment two plan views.
Fig. 3 is the sectional view of vacuum pump bleeding point buffering filtrating equipment embodiment three plan views.
Fig. 4 is the sectional view of vacuum pump bleeding point buffering filtrating equipment embodiment four plan views.
Embodiment
Embodiment one
As shown in Figure 1, vacuum pump bleeding point buffering filtrating equipment comprises two baffle plates, be welded with sidewall 3a between the first baffle plate 1a edge and the second baffle 2a edge, the area of the first baffle plate 1a is greater than the cross section of suction opeing, the area of the first baffle plate 1a equals the area of second baffle 2a, the first baffle plate 1a is parallel with second baffle 2a, the first baffle plate 1a, second baffle 2a and sidewall 3a consist of an airtight cylindrical cavity 6, the first baffle plate 1a area is long-pending greater than vacuum pump bleeding point 5 radial cross sections, the first baffle plate 1a bottom and the welding of bleeding point 5 upper ends; The first baffle plate 1a has 12 to make cavity 6 and the extraneous bleeder hole 4a that communicates, seven bleeder hole 4a that communicate with the external world are arranged respectively on the second baffle 2a, the bleeder hole 4a of the first baffle plate 1a is identical with the bleeder hole 4a sectional area of second baffle 2a, and the bleeder hole 4a of the first baffle plate 1a and the bleeder hole 4a of second baffle 2a stagger in the position of bleeding point 5 axial directions.
Embodiment two
As shown in Figure 2, vacuum pump bleeding point buffering filtrating equipment comprises two baffle plates, be welded with sidewall 3b between the first baffle plate 1b edge and the second baffle 2b edge, the area of the first baffle plate 1b equals the area of second baffle 2b, the first baffle plate 1b is parallel with second baffle 2b, the first baffle plate 1b, second baffle 2b and sidewall 3b consist of an airtight cylindrical cavity 6, the first baffle plate 1b area is long-pending greater than vacuum pump bleeding point 5 radial cross sections, sidewall 3b has extension 7 at bleeding point 5 axial directions to bleeding point 5, so that bleeding point 5 is socketed in the extension 7 of sidewall 3b, flanging 8 is arranged at the bottom of extension 7, by bolt 9 flanging 8 is fixedly connected with vacuum chamber wall 10; The first baffle plate 1b has six to make cavity 6 and the extraneous bleeder hole 4b that communicates, ten bleeder hole 4b that communicate with the external world are arranged respectively on the second baffle 2b, the bleeder hole 4b of the first baffle plate 1b is identical with the bleeder hole 4b sectional area of second baffle 2b, and the bleeder hole 4b of the first baffle plate 1b and the bleeder hole 4b of second baffle 2b stagger in the position of bleeding point 5 axial directions.
Embodiment three
As shown in Figure 3, vacuum pump bleeding point buffering filtrating equipment comprises two baffle plates, be welded with sidewall 3c between the first baffle plate 1c edge and the second baffle 2c edge, the area of the first baffle plate 1c equals the cross section of bleeding point 5, the area of the first baffle plate 1c equals the area of second baffle 2c, the first baffle plate 1c is parallel with second baffle 2c, the first baffle plate 1c, second baffle 2c and sidewall 3c consist of an airtight cylindrical cavity 6, it is long-pending that the first baffle plate 1c area equals vacuum pump bleeding point 5 radial cross sections, the inwall welding of sidewall 3c and bleeding point 5; The first baffle plate 1c has four to make cavity 6 and the extraneous bleeder hole 4c that communicates, three bleeder hole 4c that communicate with the external world are arranged respectively on the second baffle 2c, the bleeder hole 4c of the first baffle plate 1c is identical with the bleeder hole 4c sectional area of second baffle 2c, and the bleeder hole 4c of the first baffle plate 1c and the bleeder hole 4c of second baffle 2c stagger in the position of bleeding point 5 axial directions.
Embodiment four
As shown in Figure 4, vacuum pump bleeding point buffering filtrating equipment comprises two baffle plates, be welded with sidewall 3d between the first baffle plate 1d edge and the second baffle 2d edge, the area of the first baffle plate 1d is greater than the cross section of bleeding point 5, the area of the first baffle plate 1d is greater than the area of second baffle 2d, the first baffle plate 1d and second baffle 2d are not parallel, the first baffle plate 1d and second baffle 2d have 5 ° inclination angle in the radial direction of bleeding point, the first baffle plate 1d, second baffle 2d and sidewall 3d consist of an airtight cavity 6, the first baffle plate 1d area is long-pending greater than vacuum pump bleeding point 5 radial cross sections, the first baffle plate 1d bottom and the welding of bleeding point 5 upper ends; The first baffle plate 1d has one to make cavity 6 and the extraneous bleeder hole 4d that communicates, a bleeder hole 4d who communicates with the external world is arranged respectively on the second baffle 2d, the bleeder hole 4d of the first baffle plate 1d is less than the bleeder hole 4d sectional area of second baffle 2d, and the bleeder hole 4d of the first baffle plate 1d and the bleeder hole 4d of second baffle 2d stagger in the position of bleeding point 5 axial directions.
Because four embodiments' principle and using method are basic identical, following using method by elaboration enforcement one specifies, and other embodiments is not illustrated one by one.
During use, the vacuum pump running is outwards bled, air in the vacuum chamber is first by the bleeder hole 4a on the second baffle 2a, enter cavity 6, reduce the air mass flow (pressing arrow sign direction among the figure) that enters cavity 6, can prevent that also larger dust or foreign material from flying in cavity 6 and the vacuum pump, be drawn in the vacuum pump by the bleeder hole 4a on the first baffle plate 1a again and (press arrow sign direction among the figure), further reduce the air mass flow that the air in the cavity 6 enters vacuum pump, because the first baffle plate 1a bleed with second baffle 2a on bleeder hole 4a stagger in the position of bleeding point 5 axial directions, the dust loading major part that enters cavity 6 is blocked on the first baffle plate 1, reaches the effect that buffering is filtered.
Above-described only is four kinds of mode of executions of the present invention.Should be pointed out that for the person of ordinary skill of the art, under the prerequisite that does not break away from the principle of the invention, can also make some modification and improvement, these also should be considered as belonging to protection scope of the present invention.
Claims (3)
1. the vacuum pump bleeding point cushions filtrating equipment, it is characterized in that: described vacuum pump bleeding point buffering filtrating equipment comprises between the first baffle edge and the second baffle edge and is fixedly connected with sidewall, the first baffle plate, second baffle and sidewall consist of a cavity, and the first baffle plate blocks the vacuum pump bleeding point fully; Have respectively on the first baffle plate and the second baffle to make cavity and the extraneous bleeder hole that communicates, the bleeder hole of the first baffle plate and the bleeder hole of second baffle stagger in the position of bleeding point axial direction.
2. vacuum pump bleeding point according to claim 1 cushions filtrating equipment, and it is characterized in that: described sidewall has extension at the bleeding point axial direction to bleeding point.
3. vacuum pump bleeding point buffering filtrating equipment according to claim 2 is characterized in that: bottom the described extension flanging is arranged, mounting hole is arranged on the flanging.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013100356045A CN103062062A (en) | 2013-01-30 | 2013-01-30 | Buffering and filtering device for air exhaust port of vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013100356045A CN103062062A (en) | 2013-01-30 | 2013-01-30 | Buffering and filtering device for air exhaust port of vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103062062A true CN103062062A (en) | 2013-04-24 |
Family
ID=48104868
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013100356045A Pending CN103062062A (en) | 2013-01-30 | 2013-01-30 | Buffering and filtering device for air exhaust port of vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103062062A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107385410A (en) * | 2017-08-31 | 2017-11-24 | 武汉华星光电技术有限公司 | A kind of forvacuum device |
| CN116978833A (en) * | 2023-09-20 | 2023-10-31 | 上海谙邦半导体设备有限公司 | Vacuum atmosphere switching device and method |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5631420A (en) * | 1979-08-20 | 1981-03-30 | Hitachi Ltd | Filter for pump |
| EP1327472A1 (en) * | 2002-01-10 | 2003-07-16 | Filterwerk Mann + Hummel Gmbh | Filter element for removing oil from a gas stream |
| CN2931881Y (en) * | 2006-08-11 | 2007-08-08 | 上海煤气第二管线工程有限公司 | Slurry pump with screen |
| CN201661465U (en) * | 2010-04-06 | 2010-12-01 | 海安县工贸职业培训学校 | Novel direct connection vacuum pump |
| CN202348670U (en) * | 2011-10-27 | 2012-07-25 | 南通龙鹰真空泵业有限公司 | Improved air-cooled type roots vacuum pump |
| CN202811400U (en) * | 2012-09-25 | 2013-03-20 | 南通海迪化工有限公司 | Vacuum pump |
| CN203081701U (en) * | 2013-01-30 | 2013-07-24 | 安徽省蚌埠华益导电膜玻璃有限公司 | Buffering filter device of vacuum pump extraction opening |
-
2013
- 2013-01-30 CN CN2013100356045A patent/CN103062062A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5631420A (en) * | 1979-08-20 | 1981-03-30 | Hitachi Ltd | Filter for pump |
| EP1327472A1 (en) * | 2002-01-10 | 2003-07-16 | Filterwerk Mann + Hummel Gmbh | Filter element for removing oil from a gas stream |
| CN2931881Y (en) * | 2006-08-11 | 2007-08-08 | 上海煤气第二管线工程有限公司 | Slurry pump with screen |
| CN201661465U (en) * | 2010-04-06 | 2010-12-01 | 海安县工贸职业培训学校 | Novel direct connection vacuum pump |
| CN202348670U (en) * | 2011-10-27 | 2012-07-25 | 南通龙鹰真空泵业有限公司 | Improved air-cooled type roots vacuum pump |
| CN202811400U (en) * | 2012-09-25 | 2013-03-20 | 南通海迪化工有限公司 | Vacuum pump |
| CN203081701U (en) * | 2013-01-30 | 2013-07-24 | 安徽省蚌埠华益导电膜玻璃有限公司 | Buffering filter device of vacuum pump extraction opening |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107385410A (en) * | 2017-08-31 | 2017-11-24 | 武汉华星光电技术有限公司 | A kind of forvacuum device |
| CN107385410B (en) * | 2017-08-31 | 2019-07-05 | 武汉华星光电技术有限公司 | A kind of forvacuum device |
| CN116978833A (en) * | 2023-09-20 | 2023-10-31 | 上海谙邦半导体设备有限公司 | Vacuum atmosphere switching device and method |
| CN116978833B (en) * | 2023-09-20 | 2023-12-19 | 上海谙邦半导体设备有限公司 | Vacuum atmosphere switching device and method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203861141U (en) | Dust collector with suction-loss-free multistage cyclone filtration system | |
| CN103842593B (en) | Industrial vehicle | |
| WO2008096553A1 (en) | Indoor unit for air conditioner | |
| CN103062062A (en) | Buffering and filtering device for air exhaust port of vacuum pump | |
| CN203081701U (en) | Buffering filter device of vacuum pump extraction opening | |
| CN203540221U (en) | Rotary drum type dust removal device | |
| CN104912139A (en) | Dust suction type breaking grab bucket | |
| CN204140339U (en) | Air compressor | |
| CN104069693A (en) | Road air cleaning device | |
| CN104033358A (en) | Double-chamber double-acting air pump and glass wiping robot with same | |
| CN206764922U (en) | One kind is used for plastic pipe processing dust exhaust apparatus | |
| CN205233343U (en) | High -efficient two dust collector of grain drier | |
| CN104929173B (en) | A kind of dust-collecting type grab bucket mechanism | |
| CN204847816U (en) | Special grab bucket of negative pressure formula | |
| CN204402708U (en) | A kind of deduster | |
| CN212923629U (en) | Auxiliary loading system for building sand | |
| CN204275692U (en) | A kind of sack cleaner | |
| CN204826019U (en) | Dust absorption formula grab bucket mechanism | |
| CN204755235U (en) | Car vacuum pump | |
| CN217449395U (en) | Novel dirty-suction vehicle with filtration | |
| CN103495721A (en) | Shakeout machine dust cover | |
| CN101871317A (en) | Anchor rod drilling machine | |
| CN203809375U (en) | Filter barrel for gas model blower | |
| CN204041296U (en) | From dust discharge filtrating equipment | |
| CN218166426U (en) | Miniature dust catcher for steel pipe pile construction |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20130424 |