CN103045996A - Mask plate regulating device for evaporating organic electroluminescence device - Google Patents
Mask plate regulating device for evaporating organic electroluminescence device Download PDFInfo
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- CN103045996A CN103045996A CN2012105278245A CN201210527824A CN103045996A CN 103045996 A CN103045996 A CN 103045996A CN 2012105278245 A CN2012105278245 A CN 2012105278245A CN 201210527824 A CN201210527824 A CN 201210527824A CN 103045996 A CN103045996 A CN 103045996A
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- mask plate
- setting device
- regulating device
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Abstract
The invention belongs to the technical field of panel display and relates to a mask plate regulating device for evaporating an organic electroluminescence device. The mask plate regulating device comprises a frame of which one end is provided with a regulating device, wherein a guide rail is arranged on an inner wall on two sides of the frame; a mask plate body is arranged in the guide rail; and the regulating device is connected with the mask plate body. The mask plate system has a novel structure; and due to the arrangement of the regulating device, the mask plate is not required to be frequently replaced in the process of evaporating and preparing the device, so that the evaporation process is easy to operate, and the working efficiency is improved.
Description
Technical field
The invention belongs to technical field of flat panel display, be specifically related to a kind of vapor plating of organic electroluminescent device mask plate setting device.
Background technology
Organic Light Emitting Diode or organic elctroluminescent device (Organic Light-Emitting Diode, OLED) be the technique of display that recent two decades is subject to extensive concern, it has lightweight, reduce power consumption, active illuminating, and angular field of view is wide, manufacture craft is simple, production cost is low, can flexible demonstration etc. characteristics, not only in the demonstration field, and very large development space is also arranged aspect illumination, therefore be considered to that one of flat panel display of development potentiality is arranged most.The full color of device is the important symbol of its market competitiveness of check.And the mode that realizes at present colorize mainly contains three primary colours vertical stacking formula, the three primary colours formula that is arranged in parallel, multi-mode micro-cavity structure and blue light and yellow light mix pattern etc.No matter the color device of which kind of mode substantially all adopts the mode of vacuum evaporation to make, the mask plate part that is absolutely necessary.In preparation process, the precision of mask plate and aligning accuracy thereof are the important factors that determines resulting devices pixel resolution and display quality.
In the process of using mask plate, Main Problems has at present:
(1) number of operations causes precision to be difficult to control more, when preparation is arranged in parallel formula three primary colours device, need generally speaking to make respectively three chromatograph pixels with three mask plates of red, green, blue, intermediate demand is changed three mask plates, each replacing certainly will cause the inconsistent of precision, causes the display quality of device to descend.
(2) operation easier is large, existing vacuum evaporation prepares the colour formula OLED display device that is arranged in parallel, at least need to change mask plate four times, and Maskplate replacing substantially all is to adopt mechanical manipulator to replace people's manual manipulation in the whole preparation process, cause replacing very difficult because distance and guide rail such as are aligned with each other at the problem during replacing, need to expend for a long time.Just in case the mask plate landing allows the experiment merit lose in bursting especially.Therefore seek a kind of can fix and maneuverable mask plate system seems particularly important.
Summary of the invention
In order to overcome above-mentioned technical problem, the invention provides a kind of vapor plating of organic electroluminescent device mask plate setting device.
For achieving the above object, the technical solution used in the present invention is: comprise the framework with setting device, be provided with guide rail on the inwall of described framework both sides, the mask plate plate body is installed in the described guide rail, setting device is connected with the mask plate plate body.
It is the accurate spiral regulating device of 0.01mm that described setting device adopts precision.
Also be provided with pulley in the described guide rail, pulley places the below of mask plate plate body.
The end of described setting device is provided with the anchor clamps for permanent mask plate plate body.
Described mask plate plate body height is concordant with framework.
Compared with prior art, the present invention has following useful technique effect:
The present invention offers guide rail by the both sides inwall that is parallel to each other at framework, the mask plate plate body that is installed in the guide rail can be slided in guide rail, other end at framework is provided with setting device simultaneously, setting device is connected with the mask plate plate body, during evaporation, slide thereby can drive mask plate plate body front and back in guide rail by the regulating and controlling device, finish the evaporation operation to the different colours pixel portion.The present invention is a kind of brand-new structure, the setting of setting device, so that needn't the frequent mask plate in the evaporation fabricate devices process, so that evaporate process more easily operates, improved working efficiency.
Description of drawings
Fig. 1 is mask plate system framework schematic diagram;
Fig. 2 is mask plate system vertical view;
Wherein, 1 is framework; 2 is setting device; 3 is shaded portions; 4 is the sub-pixel part; 5 is guide rail; 6 is pulley; 7 is the mask plate plate body; 8 is anchor clamps.
Embodiment
The present invention is described in further detail below in conjunction with accompanying drawing and specific embodiment, and the explanation of the invention is not limited.
Referring to Fig. 1,2, the present invention includes the framework 1 with accurate spiral regulating device 2, be provided with guide rail 5 on the inwall of framework 1 both sides, mask plate plate body 7 is installed in the guide rail 5, and mask plate plate body 7 can slide front and back in guide rail, and accurate spiral regulating device 2 is connected with mask plate plate body 7.
The present invention also is provided with pulley 6 in guide rail 5, mask plate plate body 7 places the top of pulley 6, pass through adjustment precision spiral regulating device 2 equally so that slide in mask plate plate body 7 front and back on pulley 6, the frictional force the when setting of pulley 6 has reduced the motion of mask plate plate body.
Preferably, the end of accurate spiral regulating device 2 also is provided with the anchor clamps 8 for permanent mask plate plate body 7.
When evaporation operates, the present invention is close to anode substrate places its below, guarantee that at first the length direction of sub-pixel should be consistent with the sub-pixel direction of required fabricate devices, behind the good anode electrode bar of photoetching and cathode insulated column, the organic colour layer material of beginning evaporation, i.e. pixel portion.When evaporation red pixel layer, the mask plate plate body is fixed in the anchor clamps of accurate spiral regulating device, the sub-pixel part 4 of mask plate and red sub-pixel part are fully overlapping, and shaded portions 3 just can cover green and blue subpixels, to be deposited complete after, according to the interval between the sub-pixel that designs, utilize accurate spiral regulating device 2 to move mask plate, make it sub-pixel part and aim at the delegation of green sub-pixels again, carry out evaporation, successively evaporation blue subpixels again.Last evaporation cathode electrode bar when ranks power up, just can be realized colored the demonstration.
Claims (5)
1. vapor plating of organic electroluminescent device mask plate setting device, it is characterized in that, comprise the framework (1) with setting device (2), be provided with guide rail (5) on the inwall of described framework (1) both sides, mask plate plate body (7) is installed in the described guide rail (5), and setting device (2) is connected with mask plate plate body (7).
2. a kind of vapor plating of organic electroluminescent device mask plate setting device according to claim 1 is characterized in that, it is the accurate spiral regulating device of 0.01mm that described setting device (2) adopts precision.
3. a kind of vapor plating of organic electroluminescent device mask plate setting device according to claim 1 is characterized in that, also is provided with pulley (6) in the described guide rail (5), and pulley (6) places the below of mask plate plate body (7).
4. vapor plating of organic electroluminescent device according to claim 1 mask plate setting device is characterized in that, the end of described setting device (2) is provided with the anchor clamps (8) for permanent mask plate plate body (7).
5. vapor plating of organic electroluminescent device according to claim 1 mask plate setting device is characterized in that: described mask plate plate body (7) height is concordant with framework (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012105278245A CN103045996A (en) | 2012-12-10 | 2012-12-10 | Mask plate regulating device for evaporating organic electroluminescence device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012105278245A CN103045996A (en) | 2012-12-10 | 2012-12-10 | Mask plate regulating device for evaporating organic electroluminescence device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103045996A true CN103045996A (en) | 2013-04-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012105278245A Pending CN103045996A (en) | 2012-12-10 | 2012-12-10 | Mask plate regulating device for evaporating organic electroluminescence device |
Country Status (1)
| Country | Link |
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| CN (1) | CN103045996A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104213074A (en) * | 2014-08-21 | 2014-12-17 | 宁波英飞迈材料科技有限公司 | An in-situ mask changing device and an application method thereof |
| CN105349946A (en) * | 2012-01-12 | 2016-02-24 | 大日本印刷株式会社 | Vapor deposition mask method for producing organic semiconductor element |
| CN105372112A (en) * | 2015-12-21 | 2016-03-02 | 宁波英飞迈材料科技有限公司 | Mask replacement device and high-throughput sample preparation method |
| CN110027834A (en) * | 2019-04-19 | 2019-07-19 | 云谷（固安）科技有限公司 | A kind of mask plate storage transport device and method |
| CN112750968A (en) * | 2021-01-22 | 2021-05-04 | 深圳市峻鸿设备有限公司 | Manufacturing process of cathode isolation column of OLED display panel |
| CN113215527A (en) * | 2021-04-23 | 2021-08-06 | 京东方科技集团股份有限公司 | Mask plate frame, mask plate assembly and manufacturing method thereof |
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| CN1901138A (en) * | 2005-07-20 | 2007-01-24 | 精工爱普生株式会社 | Mask, mask chip, manufacturing method of mask, manufacturing method of mask chip, and electronic device |
| CN101220452A (en) * | 2008-01-22 | 2008-07-16 | 电子科技大学 | Novel mask system of organic electroluminescent device and method for manufacturing the same |
| CN101694562A (en) * | 2009-06-30 | 2010-04-14 | 清华大学 | Multi-mask photoetching machine silicon wafer stage system |
| CN202257029U (en) * | 2011-09-21 | 2012-05-30 | 广东工业大学 | Large-area laser-projection scanning type exposure workbench |
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| CN1901138A (en) * | 2005-07-20 | 2007-01-24 | 精工爱普生株式会社 | Mask, mask chip, manufacturing method of mask, manufacturing method of mask chip, and electronic device |
| JP2007023358A (en) * | 2005-07-20 | 2007-02-01 | Seiko Epson Corp | Mask, mask chip, method of manufacturing mask, method of manufacturing mask chip, and electronic equipment |
| CN101220452A (en) * | 2008-01-22 | 2008-07-16 | 电子科技大学 | Novel mask system of organic electroluminescent device and method for manufacturing the same |
| CN101694562A (en) * | 2009-06-30 | 2010-04-14 | 清华大学 | Multi-mask photoetching machine silicon wafer stage system |
| CN202257029U (en) * | 2011-09-21 | 2012-05-30 | 广东工业大学 | Large-area laser-projection scanning type exposure workbench |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105349946A (en) * | 2012-01-12 | 2016-02-24 | 大日本印刷株式会社 | Vapor deposition mask method for producing organic semiconductor element |
| CN104213074A (en) * | 2014-08-21 | 2014-12-17 | 宁波英飞迈材料科技有限公司 | An in-situ mask changing device and an application method thereof |
| CN104213074B (en) * | 2014-08-21 | 2016-06-29 | 宁波英飞迈材料科技有限公司 | A kind of in-situ mask conversion equipment and using method thereof |
| CN105372112A (en) * | 2015-12-21 | 2016-03-02 | 宁波英飞迈材料科技有限公司 | Mask replacement device and high-throughput sample preparation method |
| CN110027834A (en) * | 2019-04-19 | 2019-07-19 | 云谷（固安）科技有限公司 | A kind of mask plate storage transport device and method |
| CN112750968A (en) * | 2021-01-22 | 2021-05-04 | 深圳市峻鸿设备有限公司 | Manufacturing process of cathode isolation column of OLED display panel |
| CN112750968B (en) * | 2021-01-22 | 2022-06-21 | 深圳市与辰科技有限公司 | Manufacturing process of cathode isolation column of OLED display panel |
| CN113215527A (en) * | 2021-04-23 | 2021-08-06 | 京东方科技集团股份有限公司 | Mask plate frame, mask plate assembly and manufacturing method thereof |
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Application publication date: 20130417 |