CN103042305B - Timesharing beam splitting system - Google Patents

Timesharing beam splitting system Download PDF

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CN103042305B
CN103042305B CN201210571749.2A CN201210571749A CN103042305B CN 103042305 B CN103042305 B CN 103042305B CN 201210571749 A CN201210571749 A CN 201210571749A CN 103042305 B CN103042305 B CN 103042305B
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laser
electrooptic modulator
timesharing
beam splitting
polarization
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CN103042305A (en
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李志刚
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Wuhan DR Llaser Technology Corp Ltd
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Wuhan DR Llaser Technology Corp Ltd
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  • Laser Beam Processing (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Lasers (AREA)

Abstract

The invention discloses a kind of timesharing beam splitting system, comprise laser instrument, polarization spectroscope, total reflective mirror and electrooptic modulator, the additional control voltage of laser adopting electrooptic modulator to send at laser instrument changes the polarization direction of laser or not additional control voltage realizes carrying out timesharing light splitting to laser.The effect of application technical solution of the present invention is as follows: (1) timesharing beam splitting system of the present invention structure is simple, convenient installation, operation; (2) timesharing beam splitting system of the present invention is by adopting electrooptic modulator, and the polarization direction that can realize timesharing change laser manufactures a point optical condition, can regulate and control arbitrarily the polarization angle of beam splitting laser, realize the object of timesharing light splitting; (3) in timesharing beam splitting system of the present invention, the unit pulse energy of laser is identical, and the pulse frequency of the laser after light splitting is the half of the laser before light splitting, and whole process does not have loss laser energy, takes full advantage of laser energy.

Description

Timesharing beam splitting system
Technical field
The present invention relates to optical transform and the control field of laser, disclose a kind of timesharing beam splitting system.
Background technology
Laser technology, from upper world sixties high speed development so far, meanwhile, because other new and high technologies interpenetrate, adds work ﹑ Yi Liao ﹑ army thing ﹑ at material material and to measure and the various fields such as scientific experiment research has and applies more and more widely.And the light source for processing of laser process equipment is the key of equipment crudy and efficiency.By reasonable disposition light source for processing, to the service efficiency of equipment and process modification all tool be of great significance.
Traditional laser process equipment spectroscopic modes generally adopts common spectroscope to carry out light splitting, laser beam energy after such beam splitting can decline, such as by after the light splitting of half-reflection and half-transmission spectroscope, every road beam energy drops to the half of original energy of light source, for ensureing certain crudy, LASER Light Source energy requirement before light splitting improves, thus causes cost increase.
For pulse modulated laser instrument, modulating frequency can reach tens to hundreds of kHz, during for processing work, usually beam flying processing is carried out in conjunction with optical vibrating mirror, its sweep speed, far away from light beam pulse frequency, very easily causes hot spot overlapping, causes the waste of light source for processing.
Also has the system of being carried out light splitting by full spectroscope, speculum and light attenuation device, principle is: the photosynthetic reverberation of transmission that spectroscope light splitting produces by completely reflecting mirror leads the direction of specifying respectively, light attenuation device is arranged on the stronger a branch of light splitting optical path of power in transmitted light and reverberation, the power attenuation of a branch of light splitting stronger for power and another are restrainted beam splitting capabilities identical, the method is also the energy of light source of having decayed, and does not reasonably utilize energy of light source.
Summary of the invention
The invention provides a kind of timesharing beam splitting system, technical problem to be solved is Appropriate application energy of light source, improves working (machining) efficiency.
Namely timesharing beam splitting system refers to the polarization state changing laser instrument output laser pulse in time domain according to specific rule, the reflection utilizing optics such as polarization spectroscope to control the laser pulse of different polarization states with through, thus in chronomere, beam of laser is carried out light splitting.
In order to solve the problems of the technologies described above, technical scheme of the present invention is as follows:
A kind of timesharing beam splitting system, comprises laser instrument, polarization spectroscope and total reflective mirror, also comprises electrooptic modulator;
Described electrooptic modulator is provided with Drive and Control Circuit;
During the additional control voltage of electrooptic modulator described in described drive control circuit, described laser instrument, electrooptic modulator and polarization spectroscope are successively set in the light path of optical transport, the first laser that described laser instrument is launched changes its polarization direction after described electrooptic modulator, obtain the second laser, described second laser obtains the 3rd laser of guiding assigned direction after described polarization spectroscope reflection;
Electrooptic modulator described in described drive control circuit not additional control voltage time, described laser instrument, electrooptic modulator, polarization spectroscope and total reflective mirror are successively set in the light path of optical transport, the 4th laser is obtained after electrooptic modulator described in the first laser light that described laser instrument is launched, obtain the 5th laser after polarization spectroscope described in described 4th laser light, the 5th laser obtains the 6th laser of guiding assigned direction through described total reflective mirror reflection.
Preferably, described laser instrument is Lumera HR25 type laser instrument, and optical maser wavelength 532nm, pulsewidth is less than 10ps.
Preferably, described electrooptic modulator is BME dpp2a repetition rate 1MHZ BBO electrooptic modulator.
Preferably, described polarization spectroscope is faraday's prism.
Apply technical scheme of the present invention, there is following technique effect: (1) timesharing beam splitting system of the present invention structure is simple, convenient installation, operation; (2) timesharing beam splitting system of the present invention is by adopting electrooptic modulator, and the polarization direction that can realize timesharing change laser manufactures a point optical condition, can regulate and control arbitrarily the polarization angle of beam splitting laser, realize the object of timesharing light splitting; (3) in timesharing beam splitting system of the present invention, the unit pulse energy of laser is identical, and the pulse frequency of the laser after light splitting is the half of the laser before light splitting, and whole process does not have loss laser energy, takes full advantage of laser energy; (4) Drive and Control Circuit can change arbitrarily the sequential of electrooptic modulator applied voltage, what adopt is that time upper timesharing exports, every road laser pulse frequency can be reduced and do not change light beam pulse energy, thus Appropriate application light source resource, save enterprise's production cost, also reduce hot spot overlapping, improve crudy.
Accompanying drawing explanation
Fig. 1 is the structural representation of timesharing beam splitting system of the present invention.
Detailed description of the invention
Describe technical scheme of the present invention in detail below in conjunction with accompanying drawing and specific embodiment, be used for explaining technical scheme of the present invention in this illustrative examples of the present invention and explanation, but not as a limitation of the invention.
As shown in Figure 1, timesharing beam splitting system provided by the invention comprises laser instrument 11, polarization spectroscope 12, total reflective mirror 13 and electrooptic modulator 14.
Described laser instrument 11, electrooptic modulator 14, polarization spectroscope 12 and total reflective mirror 13 are successively set in the light path of optical transport.
Described electrooptic modulator 14 is provided with Drive and Control Circuit (not shown), carries out applied voltage or not applied voltage for controlling described electrooptic modulator 14 according to actual demand to the laser of process.
During the first laser 15 of the odd numbered sequences that described laser instrument 11 is launched, described Drive and Control Circuit (not shown) controls the polarization direction that the additional control voltage of described electrooptic modulator 14 changes described first laser 15, obtain the second laser 16, described second swashs the 3rd laser 17 that 16 light obtain guiding assigned direction after described polarization spectroscope 12 reflects.
During the first laser 15 of the even order that described laser instrument 11 is launched, described Drive and Control Circuit (not shown) controls the not additional control voltage of described electrooptic modulator 14, described first laser 15 obtains the 4th laser 18 through the direct transmission of described electrooptic modulator 14, described 4th laser 18 reflects through obtaining the 5th laser the 19, five laser 19 after the transmission of described polarization spectroscope 12 the 6th laser 110 obtaining guiding assigned direction through described total reflective mirror 13.
Described Drive and Control Circuit (not shown) can change arbitrarily the sequential of electrooptic modulator applied voltage to obtain the laser in different polarization direction.
Described 3rd laser 17 and the 6th laser 110, as the sub-light after beam splitting, have the unit pulse energy substantially identical with described first laser 15, and the pulse frequency of described 3rd laser 17 and the 6th laser 110 are half of described first laser 15.
Apply timesharing beam splitting system of the present invention, there is following effect:
(1) timesharing beam splitting system structure of the present invention is simple, convenient installation, operation.
(2) timesharing beam splitting system of the present invention is by adopting electrooptic modulator, and the polarization direction that can realize timesharing change laser manufactures a point optical condition, can regulate and control arbitrarily the polarization angle of beam splitting laser, realize the object of timesharing light splitting.
(3) in timesharing beam splitting system of the present invention, the unit pulse energy of laser is identical, and the pulse frequency of the laser after light splitting is the half of the laser before light splitting, and whole process does not have loss laser energy, takes full advantage of laser energy.
(4) Drive and Control Circuit can change arbitrarily the sequential of electrooptic modulator applied voltage, what adopt is that time upper timesharing exports, pulsed laser energy is constant, thus makes the processing configuration mode of conventional two laser heads be reduced to a laser head processing configuration, effectively controls production cost.
The above is the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; can also make some improvements and modifications, these improvements and modifications are also considered as protection scope of the present invention.

Claims (1)

1. a timesharing beam splitting system, comprises laser instrument (11), polarization spectroscope (12) and total reflective mirror (13), it is characterized in that: also comprise electrooptic modulator (14);
Described electrooptic modulator (14) is provided with Drive and Control Circuit;
Described in described drive control circuit during electrooptic modulator (14) additional control voltage, described laser instrument (11), electrooptic modulator (14) and polarization spectroscope (12) are successively set in the light path of optical transport, the first laser (15) that described laser instrument (11) is launched changes its polarization direction after described electrooptic modulator (14), obtain the second laser (16), described second laser (16) obtains the 3rd laser (17) of guiding assigned direction after described polarization spectroscope (12) reflection;
Electrooptic modulator (14) described in described drive control circuit not additional control voltage time, described laser instrument (11), electrooptic modulator (14), polarization spectroscope (12) and total reflective mirror (13) are successively set in the light path of optical transport, the first laser (15) that described laser instrument (11) is launched is through obtaining the 4th laser (18) after described electrooptic modulator (14), described 4th laser (18) is through obtaining the 5th laser (19) after described polarization spectroscope (12), 5th laser (19) obtains the 6th laser (110) of guiding assigned direction through described total reflective mirror (13) reflection,
Described laser instrument (11) is Lumera HR25 type laser instrument, optical maser wavelength 532nm, and pulsewidth is less than 10ps;
Described electrooptic modulator (14) is BME dpp2a repetition rate 1MHZ BBO electrooptic modulator;
Described polarization spectroscope (12) is faraday's prism.
CN201210571749.2A 2012-12-25 2012-12-25 Timesharing beam splitting system Active CN103042305B (en)

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CN103240524B (en) * 2013-05-23 2015-07-08 广东工业大学 Time and focus dividing device and method based on scanning galvanometer
JP6426443B2 (en) * 2014-11-18 2018-11-21 株式会社ディスコ Laser processing equipment
CN108872300A (en) * 2018-09-21 2018-11-23 华北水利水电大学 A kind of full laser type material thermal expansion coefficient measuring quickly and automatically device
CN110181169A (en) * 2019-06-26 2019-08-30 帝尔激光科技(无锡)有限公司 Can independent control Laser Time Sharing light splitting optical path, laser-processing system and method
WO2021116809A1 (en) * 2019-12-13 2021-06-17 Bhogilal Patel Bharatkumar Fiber optic laser marking, coding and engraving device and method thereof
CN111879234B (en) * 2020-06-19 2021-11-30 浙江大学 Three-dimensional sub-ten nanometer positioning method and device based on polarization modulation hollow light spot illumination
CN111900607A (en) * 2020-08-08 2020-11-06 苏州快光科技有限公司 Light splitting system using electro-optical drive and electro-optical crystal

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US5730811A (en) * 1995-12-21 1998-03-24 General Electric Company Cavity dumped laser shock peening process
CN1413428A (en) * 1999-12-07 2003-04-23 电子科学工业公司 Switchable wavelength laser-based etched circuit board processing system
CN101035647A (en) * 2004-06-07 2007-09-12 电子科学工业公司 AOM modulation techniques for improving laser system performance
CN201044024Y (en) * 2007-01-12 2008-04-02 中国科学院上海光学精密机械研究所 Linear polarization laser double pulse beam splitting device with adjustable pulse spacing

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JPH11147186A (en) * 1997-11-13 1999-06-02 Nippon Laser:Kk Texture recording device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5730811A (en) * 1995-12-21 1998-03-24 General Electric Company Cavity dumped laser shock peening process
CN1413428A (en) * 1999-12-07 2003-04-23 电子科学工业公司 Switchable wavelength laser-based etched circuit board processing system
CN101035647A (en) * 2004-06-07 2007-09-12 电子科学工业公司 AOM modulation techniques for improving laser system performance
CN201044024Y (en) * 2007-01-12 2008-04-02 中国科学院上海光学精密机械研究所 Linear polarization laser double pulse beam splitting device with adjustable pulse spacing

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Address after: 430000 Hubei city of Wuhan province Optics Valley Industrial Park of East Lake Development Zone, Shiyuan two Road No. four

Patentee after: WUHAN DR LASER TECHNOLOGY Co.,Ltd.

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Address after: No. 88 Jiulonghu Street, Donghu New Technology Development Zone, Wuhan City, Hubei Province, 430000

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Address before: 430000 Hubei city of Wuhan province Optics Valley Industrial Park of East Lake Development Zone, Shiyuan two Road No. four

Patentee before: WUHAN DR LASER TECHNOLOGY Co.,Ltd.