CN103028568B - A kind of modularization silicon chip cleaning system - Google Patents
A kind of modularization silicon chip cleaning system Download PDFInfo
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- CN103028568B CN103028568B CN201210553009.6A CN201210553009A CN103028568B CN 103028568 B CN103028568 B CN 103028568B CN 201210553009 A CN201210553009 A CN 201210553009A CN 103028568 B CN103028568 B CN 103028568B
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Abstract
The invention provides a kind of modularization silicon chip cleaning system, it comprises: pass section, process island and chemical liquid distribute district, and described biography section comprises the first manipulator, silicon box, the first main body framework and the first manipulator linear moving cell of being located at respectively in the first main body framework and silicon slice loading port; Described process island comprises the second manipulator, the second main body framework and is located at the second manipulator linear moving cell, the technique wash chamber in the second main body framework respectively; Described second main body framework and the first main body framework removably connect; Described chemical liquid distributes district and comprises the 3rd main body framework and be located at the infusion pipeline in the 3rd main body framework, and described 3rd main body framework and the second main body framework removably connect.Modularization silicon chip cleaning system provided by the invention can be installed independently and dismantle due to each part, thus makes this silicon chip cleaning system diverse in function, can meet various different cleaning, and can realize more complicated function.
Description
Technical field
The present invention relates to field of semiconductor devices, particularly relate to a kind of modularization silicon chip cleaning system.
Background technology
Current silicon chip cleaning system comprises biography section, process island, electrically district, chemical liquid distributes district, a few part such as gas unit and auxiliary unit filtered by blower fan, these parts form silicon chip cleaning system jointly, its each part is by various machinery and be electrically connected into an entirety, can not install independently and dismantle, thus cause described silicon chip cleaning system function singleness, be difficult to meet various different cleaning, more complicated function can not be realized.
Therefore, for above deficiency, the invention provides a kind of modularization silicon chip cleaning system.
Summary of the invention
(1) technical problem that will solve
The object of the present invention is to provide and a kind ofly can independently install and dismantle and the modularization silicon chip cleaning system that can meet that various different cleaning can realize again more sophisticated functions.
(2) technical scheme
In order to solve the problems of the technologies described above, the invention provides a kind of modularization silicon chip cleaning system, this silicon chip cleaning system comprises:
Pass section, described biography section comprises the first manipulator, silicon box, the first main body framework and the first manipulator linear moving cell of being located at respectively in the first main body framework and silicon slice loading port, described first manipulator is positioned on the first manipulator linear moving cell, and described silicon box is placed on silicon slice loading port;
Process island, described process island comprises the second manipulator, the second main body framework and is located at the chuck of the second manipulator linear moving cell, technique wash chamber and carrying silicon chip in the second main body framework respectively, and described second main body framework and the first main body framework removably connect; Described second manipulator is positioned on the second manipulator linear moving cell;
Chemical liquid distributes district, described chemical liquid distributes district and comprises the 3rd main body framework and be located at the infusion pipeline in the 3rd main body framework, described 3rd main body framework and the second main body framework removably connect, and described infusion pipeline provides chemical liquid for technique wash chamber.
Further, described biography section also comprises the first manipulator linear moving cell, left buffering position, right buffering position and touch-screen, and described left buffering position, right buffering position, touch-screen are all located in the first main body framework.
Further, described technique wash chamber comprises the first wash chamber and the second wash chamber; Described process island is divided into first area, second area and the 3rd region, and described first area and second area install the first wash chamber and the second wash chamber respectively, and the second manipulator and the second manipulator linear moving cell are installed in the 3rd region.
Further, described chemical liquid distributes district and also comprises and be located at flow pressure control device in described 3rd main body framework and temperature control equipment.
Wherein, this modularization silicon chip cleaning system also comprises electric district, and it is positioned at the top that chemical liquid distributes district; Described electric district comprises the 4th main body framework and the cooling fan be located at respectively in the 4th main body framework and each several part and controls electrical box; Described 4th main body framework and described 3rd main body framework removably connect; Described each several part controls electrical box can integral replacing, also can change its a certain parts thereof.
Wherein, this modularization silicon chip cleaning system also comprises blower fan filter gas unit, and it is positioned at the top passing section and process island; Described blower fan filter gas unit is provided with the 5th main body framework, and described 5th main body framework removably connects with the first main body framework, the second main body framework respectively; Described blower fan filter gas unit is divided into several subelements, and it can integral replacing, also can change quantity and the position of each subelement.
Wherein, this modularization silicon chip cleaning system also comprises auxiliary unit, gas extraction system, connecting line and electric interfaces that described auxiliary unit comprises the 6th main body framework and is located at respectively in the 6th main body framework; Described connecting line distributes district and process island for connecting chemical liquid; Described chemical liquid distributes district and electric district includes electric wiring, and described chemical liquid is distributed district and is connected by described electric interfaces with the electric wiring in electric district.
Wherein, described 6th main body framework removably connects with the second main body framework, the 3rd main body framework, the 4th main body framework respectively.
(3) beneficial effect
Modularization silicon chip cleaning system provided by the invention can be installed independently and dismantle due to its each part, thus makes this silicon chip cleaning system diverse in function, can meet various different cleaning, and can realize more complicated function.
Accompanying drawing explanation
Fig. 1 is the front view of the modularization silicon chip cleaning system of the embodiment of the present invention.
Fig. 2 is the top view that the modularization silicon chip cleaning system of the embodiment of the present invention removes that gas unit filtered by blower fan.
In figure, 1: pass section; 2: process island; 3: electrically district; 4: chemical liquid distributes district; 5: blower fan filter gas unit; 6: auxiliary unit; 7: first area; 8: second area; 9: the three regions.
Detailed description of the invention
Be described in further detail below in conjunction with the detailed description of the invention of accompanying drawing to modularization silicon chip cleaning system provided by the invention.These embodiments only for illustration of the present invention, and are not limitation of the present invention.
In describing the invention, it should be noted that, term " " center ", " longitudinal direction ", " transverse direction ", " on ", D score, " front ", " afterwards ", " left side ", " right side ", " vertically ", " level ", " top ", " end " " interior ", orientation or the position relationship of the instruction such as " outward " are based on orientation shown in the drawings or position relationship, only the present invention for convenience of description and simplified characterization, instead of indicate or imply that the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore limitation of the present invention can not be interpreted as.In addition, term " first ", " second ", " the 3rd " only for describing object, and can not be interpreted as instruction or hint relative importance.
In describing the invention, it should be noted that, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection " should be interpreted broadly, and such as, can be fixedly connected with, also can be removably connect, or connect integratedly; Can be mechanical connection, also can be electrical connection; Can be directly be connected, also indirectly can be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, concrete condition above-mentioned term concrete meaning in the present invention can be understood.
In addition, in describing the invention, except as otherwise noted, the implication of " multiple " is two or more.
As shown in Figure 1, modularization silicon chip cleaning system provided by the invention, comprising: pass section 1, process island 2 and chemical liquid and distribute district 4.
Described biography section 1 comprises the first main body framework, the first manipulator, silicon box, silicon slice loading port, the first manipulator linear moving cell, buffering position, touch-screen and associated electrical components etc.; Described buffering position comprises left buffering position and right buffering position; Described first manipulator linear moving cell, left buffering position, right buffering position, touch-screen and silicon slice loading port are located in the first main body framework respectively; Described first manipulator is positioned on the first manipulator linear moving cell, its can on the first manipulator linear moving cell rectilinear motion, also can carry out getting sheet action; Described silicon box is placed on silicon slice loading port.
Described process island 2 comprises the second manipulator, the second main body framework and is located at the chuck of the second manipulator linear moving cell, technique wash chamber and carrying silicon chip in the second main body framework respectively, and described second main body framework and the first main body framework removably connect; In the present embodiment, described second main body framework is connected by screw thread with the first main body framework; Described second manipulator is positioned on the second manipulator linear moving cell, its can on described second manipulator linear moving cell rectilinear motion, also can carry out getting sheet action.
Described technique wash chamber is the core component of purging system, and its quantity and position can be changed, each technique wash chamber independent operating, non-interference, and when some technique wash chamber break down, other technique wash chamber still can normally work.Described each technique wash chamber can be changed in integral installation and dismounting and its distribution; When cleaning or actual demand change, all right other forms of technique wash chamber of integral replacing, makes it meet actual cleaning, and without integral replacing equipment, gives full play to its modular characteristic.
Described chemical liquid distributes district 4 and comprises the 3rd main body framework and be located at infusion pipeline, flow pressure control device and the temperature control equipment in the 3rd main body framework, described 3rd main body framework and the second main body framework removably connect, in the present embodiment, described 3rd main body framework is connected by screw thread with the second main body framework; Described infusion pipeline can provide separate chemical liquid for each technique wash chamber.Guarantee that the spray equipment of each chamber is ejected into silicon chip surface with stable flow and temperature.Described chemical liquid distributes district 4 can integral replacing, also can change parts according to the actual requirements.
Modularization silicon chip cleaning system provided by the invention also comprises electric district 3, blower fan filter gas unit 5 and auxiliary unit 6.
Described electric district 3 is positioned at the top that chemical liquid distributes district 4, comprises the 4th main body framework and the cooling fan be located at respectively in the 4th main body framework and each several part and controls electrical box; Described 4th main body framework and described 3rd main body framework removably connect; Described electric district 3 takes modularized design, and each several part controls electrical box and works alone, and when a certain module replacing of system, each several part controls electrical box can integral replacing, also can change its a certain parts thereof and satisfy the demands
Described blower fan filter gas unit 5 is positioned at the top passing section 1 and process island 2, and described blower fan filter gas unit 5 is provided with the 5th main body framework, and described 5th main body framework removably connects with the first main body framework, the second main body framework respectively; In the present embodiment, the 5th main body framework is all connected by screw thread with the first main body framework, the second main body framework respectively; Described blower fan filter gas unit 5 is divided into several subelements, and it can integral replacing, also can change quantity and the position of each subelement.
Gas extraction system, connecting line and electric interfaces that described auxiliary unit 6 comprises the 6th main body framework and is located at respectively in the 6th main body framework; Described connecting line distributes district 4 and process island 2 for connecting chemical liquid, and the liquid making chemical liquid distribute district 4 enters into process island 2; Described chemical liquid distributes district 4 and includes electric wiring with electric district 3, and described chemical liquid is distributed district 4 and is connected by described electric interfaces with the electric wiring in electric district 3; Described 6th main body framework removably connects with the second main body framework, the 3rd main body framework, the 4th main body framework respectively; The position of described gas extraction system can be changed according to the actual requirements easily; In the present embodiment, gas extraction system is connected in this purging system by screw thread and electric interfaces, can integral installation and dismounting.
As shown in Figure 2, described process island 2 is divided into first area 7, second area 8 and the 3rd region 9; Described technique wash chamber comprises the first wash chamber and the second wash chamber; Described first area 7 and second area 8 install the first wash chamber and the second wash chamber respectively, and the second manipulator and the second manipulator linear moving cell are installed in the 3rd region 9.
Utilize the cleaning process of modularization silicon chip cleaning system provided by the invention as follows:
S1: silicon box is taken out, by AGV(automatic guided vehicle after silicon chip is put into described silicon box from biography section 1) silicon box that silicon chip is housed is placed on silicon slice loading port;
S2: the first manipulator passing section 1 captures silicon chip from the silicon box silicon slice loading port, is placed on buffering position and calibrates;
S3: silicon chip takes out from biography section 1 by the second manipulator of process island 2, and is placed on technique wash chamber;
S4: chuck is ready;
S5: silicon wafer horizontal to be placed on chuck and to be clamped by silicon chip by the second manipulator of process island 2, and chuck drops to correct position, then rotates, and the chemical liquid that chemical liquid distributes district 4 to be provided is sprayed on silicon chip, starts cleaning;
S6: after having cleaned, the second manipulator of process island 2 by the silicon chip extracting after cleaning, is then placed on biography section 1 and cushions on position from described technique wash chamber;
S7: the first manipulator passing section 1 captures silicon chip from buffering position, is placed in silicon box;
S8:AGV(automatic guided vehicle) silicon box that the silicon chip after cleaning is housed to be taken away, cleaning process completes.
Modularization silicon chip cleaning system provided by the invention removably connects due to its each part and whole system, and without integral replacing equipment, the each part of this purging system is made to install independently and to dismantle, thus make whole system diverse in function, various different cleaning can be met, and more complicated function can be realized.
The above is only the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the prerequisite not departing from the technology of the present invention principle; can also make some improvement and replacement, these improve and replace and also should be considered as protection scope of the present invention.
Claims (4)
1. a modularization silicon chip cleaning system, is characterized in that, this silicon chip cleaning system comprises:
Pass section (1), described biography section (1) comprises the first manipulator, silicon box, the first main body framework and the first manipulator linear moving cell of being located at respectively in the first main body framework and silicon slice loading port, described first manipulator is positioned on the first manipulator linear moving cell, and described silicon box is placed on silicon slice loading port;
Process island (2), described process island (2) comprises the second manipulator, the second main body framework and is located at the chuck of the second manipulator linear moving cell, technique wash chamber and carrying silicon chip in the second main body framework respectively, and described second main body framework and the first main body framework removably connect; Described second manipulator is positioned on the second manipulator linear moving cell, the quantity of described technique wash chamber and position changeable;
Chemical liquid distributes district (4), described chemical liquid distributes district (4) and comprises the 3rd main body framework and be located at the infusion pipeline in the 3rd main body framework, described 3rd main body framework and the second main body framework removably connect, and described infusion pipeline provides chemical liquid for technique wash chamber;
This modularization silicon chip cleaning system also comprises electric district (3), and it is positioned at the top that chemical liquid distributes district (4); Described electric district (3) comprises the 4th main body framework and the cooling fan be located at respectively in the 4th main body framework and each several part and controls electrical box; Described 4th main body framework and described 3rd main body framework removably connect; Described each several part controls electrical box can integral replacing, also can change its a certain parts thereof;
This modularization silicon chip cleaning system also comprises blower fan filter gas unit (5), and it is positioned at the top passing section (1) and process island (2); Described blower fan filter gas unit (5) is provided with the 5th main body framework, and described 5th main body framework removably connects with the first main body framework, the second main body framework respectively; Described blower fan filter gas unit (5) is divided into several subelements, and it can integral replacing, also can change quantity and the position of each subelement;
This modularization silicon chip cleaning system also comprises auxiliary unit (6), gas extraction system, connecting line and electric interfaces that described auxiliary unit (6) comprises the 6th main body framework and is located at respectively in the 6th main body framework; Described connecting line distributes district (4) and process island (2) for connecting chemical liquid; Described chemical liquid distributes district (4) and includes electric wiring with electric district (3), and described chemical liquid is distributed district (4) and is connected by described electric interfaces with the electric wiring of electric district (3);
Described 6th main body framework removably connects with the second main body framework, the 3rd main body framework, the 4th main body framework respectively.
2. modularization silicon chip cleaning system according to claim 1, is characterized in that, described biography section (1) also comprises left buffering position, right buffering position and touch-screen, and described left buffering position, right buffering position, touch-screen are all located in the first main body framework.
3. modularization silicon chip cleaning system according to claim 1, is characterized in that, described technique wash chamber comprises the first wash chamber and the second wash chamber; Described process island (2) is divided into first area (7), second area (8) and the 3rd region (9), described first area (7) and second area (8) install the first wash chamber and the second wash chamber respectively, and the second manipulator and the second manipulator linear moving cell are installed in the 3rd region (9).
4. modularization silicon chip cleaning system according to claim 1, is characterized in that, described chemical liquid distributes district (4) and also comprises and be located at flow pressure control device in described 3rd main body framework and temperature control equipment.
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| CN201210553009.6A CN103028568B (en) | 2012-12-18 | 2012-12-18 | A kind of modularization silicon chip cleaning system |
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| CN201210553009.6A CN103028568B (en) | 2012-12-18 | 2012-12-18 | A kind of modularization silicon chip cleaning system |
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| CN103028568B true CN103028568B (en) | 2015-11-18 |
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| US6457199B1 (en) * | 2000-10-12 | 2002-10-01 | Lam Research Corporation | Substrate processing in an immersion, scrub and dry system |
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