CN103018160A - Flexure testing method and flexure testing device for quantitatively characterizing interface binding property of thin-film material - Google Patents
Flexure testing method and flexure testing device for quantitatively characterizing interface binding property of thin-film material Download PDFInfo
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Abstract
本发明涉及一种定量表征薄膜材料界面结合性能的屈曲测试方法及装置,属于实验力学和材料力学性能表征技术领域。本发明通过万能材料试验机对试样进行轴向的单轴压缩,并记录试样的应力应变数值,同时通过CCD相机对加载过程试样的横截面进行同步的实时观测,并实时记录屈曲过程中的临界应力,挠度以及裂纹长度等剥离特征,建立涂镀层-基底应力应变历史与剥离特征之间的关系来表征涂镀层-基底的界面结合性能。本发明装置的CCD相机、监视器、图像处理卡、计算机、数据处理卡、载荷传感器和万能材料试验机顺次相连。本发明具有原理简单、试样制备简单、模型清晰、易于操作等优点。
The invention relates to a buckling test method and device for quantitatively characterizing the interfacial bonding properties of thin film materials, and belongs to the technical field of experimental mechanics and material mechanical performance characterization. The invention uses a universal material testing machine to perform axial uniaxial compression on the sample, and records the stress and strain values of the sample, and simultaneously uses a CCD camera to observe the cross section of the sample during the loading process in real time, and records the buckling process in real time The relationship between the coating-substrate stress-strain history and the peeling characteristics is established to characterize the interface bonding performance of the coating-substrate. The CCD camera, monitor, image processing card, computer, data processing card, load sensor and universal material testing machine of the device of the invention are connected in sequence. The invention has the advantages of simple principle, simple sample preparation, clear model, easy operation and the like.
Description
技术领域technical field
本发明涉及一种定量表征薄膜材料界面结合性能的屈曲测试方法及装置,属于实验力学和材料力学性能表征技术领域。The invention relates to a buckling test method and device for quantitatively characterizing the interfacial bonding properties of thin film materials, and belongs to the technical field of experimental mechanics and material mechanical performance characterization.
背景技术Background technique
随着科学技术的飞速发展,薄膜/基底体系在表面改性和材料科学中广泛应用,薄膜材料在使用的过程中,由于与基底材料在微观结构等方面存在着差异,因而在机械载荷、热载荷等各种复杂环境下会表现出应力、应变的失配,最终会导致薄膜涂层材料的失效。工程应用中,薄膜/基底体系典型的失效模式为:薄膜或涂层从基底上剥落。薄膜/基底体系界面结合的是否良好很大程度上决定着这种材料的服役寿命,因此界面结合性能的表征对材料的实际应用具有非常重要的意义。With the rapid development of science and technology, thin film/substrate systems are widely used in surface modification and material science. During the use of thin film materials, due to the differences in microstructure and other aspects of substrate materials, the mechanical load, thermal Under various complex environments such as loading, there will be a mismatch of stress and strain, which will eventually lead to the failure of the thin film coating material. In engineering applications, the typical failure mode of the film/substrate system is: the film or coating peels off from the substrate. Whether the interfacial bonding of the film/substrate system is good or not determines the service life of the material to a large extent, so the characterization of the interfacial bonding performance is of great significance to the practical application of the material.
薄膜/基底材料的界面结合性能的表征是研究薄膜界面失效机制和预防其失效的基础,它涉及材料、力学、物理等交叉学科,薄膜失效问题的复杂性,失效现象的多样性以及难以预测性,使得薄膜界面结合性能的表征成为了公认的疑难问题。国际著名学者Evans、Hutchinson、Nix等在此领域做出了杰出贡献,在国内,国家也资助了多个国家自然科学基金项目开展与薄膜界面相关的研究工作,但到目前为止,薄膜的结合性能的表征仍处于理论和实验探索阶段。薄膜基底体系界面结合性能的定量表征是众多研究者和使用者一致追求的目标,但由于薄膜种类和薄膜技术的多样性,追求单一的表征参量和表征方法的努力至今尚无成功的迹象。在一些国家标准中,甚至不得不推荐用简单的弯曲次数判定薄膜与基底结合的牢固程度。这不仅让工程师们无所适从,也令研究者们感到汗颜。The characterization of the interfacial bonding performance of the film/substrate material is the basis for studying the failure mechanism of the film interface and preventing its failure. It involves interdisciplinary subjects such as materials, mechanics, and physics. The complexity of the film failure problem, the diversity of failure phenomena, and the unpredictability , making the characterization of the interfacial bonding properties of thin films a recognized difficult problem. Internationally renowned scholars such as Evans, Hutchinson, and Nix have made outstanding contributions in this field. In China, the country has also funded a number of National Natural Science Foundation projects to carry out research work related to thin film interfaces. However, so far, the binding properties of thin films The characterization of is still in the stage of theoretical and experimental exploration. Quantitative characterization of the interfacial bonding properties of thin-film substrate systems is the unanimous goal pursued by many researchers and users. However, due to the diversity of thin-film types and thin-film technologies, efforts to pursue a single characterization parameter and characterization method have not yet shown signs of success. In some national standards, it even has to be recommended to use a simple number of bending times to determine the firmness of the bond between the film and the substrate. This not only makes engineers at a loss, but also makes researchers feel ashamed.
目前表征薄膜/基底材料界面结合性能的方法多达200余种,如拉伸法、划痕法、剥离法、压痕法、鼓包法等等,但是还没有一种标准的表征方法适合于各种薄膜/基底材料体系。拉伸法适用于弱界面的脆/韧、脆/脆体系,只有在界面结合强度小于粘结强度时才有意义。压痕法适用于脆性薄膜/刚性基底、脆性薄膜/脆性基底材料体系,理论上的一些机制、界面结合强度的表征以及各种因素对临界载荷的影响等,这些问题如果不能很好解决,压痕法的应用就会受到限制。剥离法适用于脆性薄膜和韧性薄膜,虽然直观易行,但很难提取界面裂纹扩展能量。鼓包法虽然能够定量的测量薄膜的界面结合性能,但是它的制样比较困难,加大了实验的难度。亟待一种表征方法来定量表征薄膜-基底体系的界面结合性能。At present, there are more than 200 methods for characterizing the interfacial bonding properties of film/substrate materials, such as tensile method, scratch method, peeling method, indentation method, bulge method, etc., but there is no standard characterization method suitable for each A film/substrate material system. The tensile method is suitable for brittle/ductile and brittle/brittle systems with weak interfaces, and is meaningful only when the interfacial bond strength is less than the bond strength. The indentation method is suitable for brittle film/rigid substrate, brittle film/brittle substrate material system, some theoretical mechanisms, the characterization of interface bonding strength and the influence of various factors on critical load, etc. If these problems cannot be solved well, indentation The application of the trace method will be limited. The exfoliation method is suitable for brittle and ductile films. Although it is intuitive and easy to implement, it is difficult to extract the interfacial crack propagation energy. Although the bulging method can quantitatively measure the interfacial bonding performance of the thin film, its sample preparation is relatively difficult, which increases the difficulty of the experiment. A characterization method is urgently needed to quantitatively characterize the interfacial bonding performance of the film-substrate system.
发明内容Contents of the invention
针对现有技术不足,本发明提供了一种定量表征薄膜材料界面结合性能的屈曲测试方法及装置。Aiming at the deficiencies of the prior art, the invention provides a buckling test method and device for quantitatively characterizing the interfacial bonding properties of thin film materials.
一种定量表征薄膜材料界面结合性能的屈曲测试方法,其具体步骤如下:A buckling test method for quantitatively characterizing the interfacial bonding properties of thin film materials, the specific steps are as follows:
a.制备镀覆待测涂镀层试样,将试样未镀覆的面用砂纸打磨至镜面光滑;a. prepare the coating sample to be tested by coating, and polish the uncoated surface of the sample until the mirror surface is smooth with sandpaper;
b.将制备好的镀覆待测涂镀层的试样夹持在万能材料试验机上,并将CCD相机对准待测试样的横截面,调节CCD相机的位置和焦距,使待测试样在CCD相机视场的中间成清晰的图像;b. Clamp the prepared sample coated with the coating to be tested on the universal material testing machine, and point the CCD camera at the cross section of the sample to be tested, adjust the position and focal length of the CCD camera so that the sample to be tested Form a clear image in the middle of the field of view of the CCD camera;
c.对试样进行轴向的单轴压缩,万能材料试验机实时记录试样的应力应变数值,同时通过CCD相机对加载过程中试样的横截面进行同步的实时观测,实时记录屈曲过程中的临界应力、挠度以及裂纹长度的剥离特征;c. Perform axial uniaxial compression on the sample, and the universal material testing machine records the stress and strain values of the sample in real time. At the same time, the CCD camera performs synchronous real-time observation of the cross-section of the sample during the loading process, and records the buckling process in real time. The critical stress, deflection and peeling characteristics of crack length;
d.建立涂镀层-基底应力应变历史与剥离特征之间的关系来表征涂镀层-基底的界面结合性能;涂镀层屈曲时界面的能量释放率G可由下式计算得到:d. Establish the relationship between the coating-substrate stress-strain history and the peeling characteristics to characterize the interface bonding performance of the coating-substrate; the energy release rate G of the interface when the coating buckles can be calculated by the following formula:
其中Ef为涂镀层的弹性模量,单位为Pa,υf为泊松比,h为涂镀层的厚度,单位为m,G0为平面应变情况下的应变能释放率,单位为J/m2,σ0为加载过程中施加在涂镀层内的应力,单位为Pa,σcr为涂镀层刚开始发生屈曲时的施加在涂镀层内的临界应力,单位为Pa;Wherein E f is the modulus of elasticity of the coating, the unit is Pa, υ f is Poisson's ratio, h is the thickness of the coating, the unit is m, G 0 is the strain energy release rate under the plane strain situation, the unit is J/ m 2 , σ 0 is the stress applied in the coating during the loading process, in Pa, and σ cr is the critical stress in the coating when the coating begins to buckle, in Pa;
对应的相角ψ为:The corresponding phase angle ψ is:
其中ω为材料失配相角,单位为°,ξ为屈曲挠度的一个无量纲化函数。ω与涂镀层和基底材料的失配参数α,β有关,根据α,β取值不同,ω的取值也相应变化,具体取值情况详情见下表:where ω is the material mismatch phase angle in °, and ξ is a dimensionless function of the buckling deflection. ω is related to the mismatch parameters α and β of the coating and the base material. According to the different values of α and β, the value of ω also changes accordingly. See the table below for details of the specific values:
表1ω与α,β关系表Table 1 ω and α, β relationship table
α,β,ξ,σcr用如下公式计算:α, β, ξ, σ cr are calculated with the following formula:
其中分别为平面应变情况下涂镀层和基底的弹性模量,单位为Pa,υf,υs分别为涂镀层和基底的泊松比,μf,μs分别为涂镀层和基底的剪切模量,单位为Pa,Ef,Es分别为涂镀层和基底的弹性模量,单位为Pa,ξ为屈曲挠度的一个无量纲化函数,ωmax为试样涂镀层屈曲中心点的挠度,单位为m,h为涂镀层的厚度,单位为m,σ0为加载过程中涂镀层内的应力,单位为Pa,σcr为涂镀层刚开始发生屈曲时的临界应力,单位为Pa,b为屈曲时的裂纹半长,单位为m。in are the elastic modulus of the coating and the substrate under the plane strain condition respectively, and the unit is Pa, υ f , υ s are the Poisson’s ratios of the coating and the substrate respectively, μ f , μ s are the shear moduli of the coating and the substrate respectively The unit is Pa, E f , E s are the elastic modulus of the coating and the substrate respectively, the unit is Pa, ξ is a dimensionless function of the buckling deflection, ω max is the deflection of the buckling center point of the sample coating, The unit is m, h is the thickness of the coating, the unit is m, σ 0 is the stress in the coating during the loading process, the unit is Pa, σ cr is the critical stress when the coating just begins to buckle, the unit is Pa, b is the half-length of the crack during buckling, in m.
所述镀覆待测涂镀层试样的基底长度为10mm,宽度为5mm,厚度为5mm。The base length of the coating sample to be tested is 10 mm, the width is 5 mm, and the thickness is 5 mm.
所述CCD相机的拍照频率为1~2秒/张。The photographing frequency of the CCD camera is 1-2 seconds/frame.
所述万能材料试验机的加载模式为载荷加载,加载速率均为3000N/min,压缩的最大位移为1~2mm。The loading mode of the universal material testing machine is load loading, the loading rate is 3000N/min, and the maximum compression displacement is 1~2mm.
一种定量表征薄膜材料界面结合性能的屈曲测试装置,其CCD相机、监视器、图像处理卡、计算机、数据处理卡、载荷传感器和万能材料试验机顺次相连。A buckling test device for quantitatively characterizing the interfacial bonding properties of thin film materials, in which a CCD camera, a monitor, an image processing card, a computer, a data processing card, a load sensor and a universal material testing machine are connected in sequence.
所述CCD相机的拍照频率为1~2秒/张。The photographing frequency of the CCD camera is 1-2 seconds/frame.
所述万能材料试验机的加载模式为载荷加载,加载速率均为3000N/min,压缩的最大位移为1~2mm。The loading mode of the universal material testing machine is load loading, the loading rate is 3000N/min, and the maximum compression displacement is 1~2mm.
本发明的有益效果为:The beneficial effects of the present invention are:
本发明利用万能材料试验机对试样进行轴向的单轴压缩,从而使得涂镀层在界面结合薄弱处发生屈曲,同时通过CCD相机对加载过程中试样的横截面进行同步的实时观测,建立涂镀层-基底应力应变历史与剥离特征之间的关系来表征涂镀层-基底的界面结合性能,具有原理简单、试样制备简单、模型清晰、易于操作等优点。In the present invention, the universal material testing machine is used to perform axial uniaxial compression on the sample, so that the coating layer buckles at the weak point of the interface, and at the same time, the cross-section of the sample during the loading process is synchronously observed by a CCD camera to establish The relationship between coating-substrate stress-strain history and peeling characteristics is used to characterize the coating-substrate interface bonding performance, which has the advantages of simple principle, simple sample preparation, clear model, and easy operation.
附图说明Description of drawings
图1为本发明装置结构示意图;Fig. 1 is the schematic diagram of device structure of the present invention;
图2为CCD相机观测区域示意图;Figure 2 is a schematic diagram of the observation area of the CCD camera;
图3为实施例中试样受压的应力应变曲线;Fig. 3 is the stress-strain curve that sample is pressed in embodiment;
图4为实施例中试样在单轴压缩过程中实时记录的图片;其中图4a为试样受压过程中未发生屈曲时的图片,图4b为试样刚发生屈曲时的图片,图4c为试样屈曲扩展的图片;图4a,4b,4c分别对应图3中的A,B,D三点的状态。Fig. 4 is the picture recorded in real time of the sample in the uniaxial compression process in the embodiment; wherein Fig. 4a is the picture when no buckling occurs during the compression process of the sample, Fig. 4b is the picture when the sample just buckled, and Fig. 4c It is a picture of the buckling expansion of the sample; Figures 4a, 4b, and 4c correspond to the states of A, B, and D in Figure 3, respectively.
图中标号:1-万能材料试验机;2-冷光灯源;3-CCD相机;4-监视器;5-图像处理卡;6-计算机;7-数据处理卡;8-载荷传感器;9-万能材料试验机压头;10-万能材料试验机支座;11-样品的涂镀层部分;12-样品的基底部分。Labels in the figure: 1-Universal material testing machine; 2-Cold light source; 3-CCD camera; 4-Monitor; 5-Image processing card; 6-Computer; 7-Data processing card; 8-Load sensor; 9- Indenter of universal testing machine; 10-support of universal testing machine; 11-coating part of sample; 12-base part of sample.
具体实施方式Detailed ways
本发明提供了一种定量表征薄膜材料界面结合性能的屈曲测试方法及装置,下面结合附图和具体实施方式对本发明做进一步说明。The present invention provides a buckling test method and device for quantitatively characterizing the interfacial bonding properties of thin film materials. The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
一种定量表征薄膜材料界面结合性能的屈曲测试方法,其具体步骤如下:A buckling test method for quantitatively characterizing the interfacial bonding properties of thin film materials, the specific steps are as follows:
a.制备镀覆待测涂镀层试样,将试样未镀覆的面用砂纸打磨至镜面光滑;a. prepare the coating sample to be tested by coating, and polish the uncoated surface of the sample until the mirror surface is smooth with sandpaper;
b.将制备好的镀覆待测涂镀层的试样夹持在万能材料试验机上,并将CCD相机对准待测试样的横截面,调节CCD相机的位置和焦距,使待测试样在CCD相机视场的中间成清晰的图像;b. Clamp the prepared sample coated with the coating to be tested on the universal material testing machine, and point the CCD camera at the cross section of the sample to be tested, adjust the position and focal length of the CCD camera so that the sample to be tested Form a clear image in the middle of the field of view of the CCD camera;
c.对试样进行轴向的单轴压缩,万能材料试验机实时记录试样的应力应变数值,同时通过CCD相机对加载过程中试样的横截面进行同步的实时观测,实时记录屈曲过程中的临界应力、挠度以及裂纹长度的剥离特征;c. Perform axial uniaxial compression on the sample, and the universal material testing machine records the stress and strain values of the sample in real time. At the same time, the CCD camera performs synchronous real-time observation of the cross-section of the sample during the loading process, and records the buckling process in real time. The critical stress, deflection and peeling characteristics of crack length;
d.建立涂镀层-基底应力应变历史与剥离特征之间的关系来表征涂镀层-基底的界面结合性能;涂镀层屈曲时界面的能量释放率G可由下式计算得到:d. Establish the relationship between the coating-substrate stress-strain history and the peeling characteristics to characterize the interface bonding performance of the coating-substrate; the energy release rate G of the interface when the coating buckles can be calculated by the following formula:
其中Ef为涂镀层的弹性模量,单位为Pa,υf为泊松比,h为涂镀层的厚度,单位为m,G0为平面应变情况下的应变能释放率,单位为J/m2,σ0为加载过程中施加在涂镀层内的应力,单位为Pa,σcr为涂镀层刚开始发生屈曲时的施加在涂镀层内的临界应力,单位为Pa;Wherein E f is the modulus of elasticity of the coating, the unit is Pa, υ f is Poisson's ratio, h is the thickness of the coating, the unit is m, G 0 is the strain energy release rate under the plane strain situation, the unit is J/ m 2 , σ 0 is the stress applied in the coating during the loading process, in Pa, and σ cr is the critical stress in the coating when the coating begins to buckle, in Pa;
对应的相角ψ为:The corresponding phase angle ψ is:
其中ω为材料失配相角,单位为°,ξ为屈曲挠度的一个无量纲化函数。ω与涂镀层和基底材料的失配参数α,β有关,根据α,β取值不同,ω的取值也相应变化,具体取值情况详情见下表:where ω is the material mismatch phase angle in °, and ξ is a dimensionless function of the buckling deflection. ω is related to the mismatch parameters α and β of the coating and the substrate material. According to the different values of α and β, the value of ω also changes accordingly. See the table below for details of the specific values:
表1ω与α,β关系表Table 1 ω and α, β relationship table
α,β,ξ,σcr用如下公式计算:α, β, ξ, σ cr are calculated with the following formula:
其中分别为平面应变情况下涂镀层和基底的弹性模量,单位为Pa,υf,υs分别为涂镀层和基底的泊松比,μf,μs分别为涂镀层和基底的剪切模量,单位为Pa,Ef,Es分别为涂镀层和基底的弹性模量,单位为Pa,ξ为屈曲挠度的一个无量纲化函数,ωmax为试样涂镀层屈曲中心点的挠度,单位为m,h为涂镀层的厚度,单位为m,σ0为加载过程中涂镀层内的应力,单位为Pa,σcr为涂镀层刚开始发生屈曲时的临界应力,单位为Pa,b为屈曲时的裂纹半长,单位为m。in are the elastic modulus of the coating and the substrate under the plane strain condition respectively, and the unit is Pa, υ f , υ s are the Poisson’s ratios of the coating and the substrate respectively, μ f , μ s are the shear moduli of the coating and the substrate respectively The unit is Pa, E f , E s are the elastic modulus of the coating and the substrate respectively, the unit is Pa, ξ is a dimensionless function of the buckling deflection, ω max is the deflection of the buckling center point of the sample coating, The unit is m, h is the thickness of the coating, the unit is m, σ 0 is the stress in the coating during the loading process, the unit is Pa, σ cr is the critical stress when the coating just begins to buckle, the unit is Pa, b is the half-length of the crack during buckling, in m.
所述镀覆待测涂镀层试样的基底长度为10mm,宽度为5mm,厚度为5mm。The base length of the coating sample to be tested is 10 mm, the width is 5 mm, and the thickness is 5 mm.
所述CCD相机的拍照频率为1~2秒/张。The photographing frequency of the CCD camera is 1-2 seconds/frame.
所述万能材料试验机的加载模式为载荷加载,加载速率均为3000N/min,压缩的最大位移为1~2mm。The loading mode of the universal material testing machine is load loading, the loading rate is 3000N/min, and the maximum compression displacement is 1~2mm.
一种定量表征薄膜材料界面结合性能的屈曲测试装置,其CCD相机3、监视器4、图像处理卡5、计算机6、数据处理卡7、载荷传感器8和万能材料试验机1顺次相连。A buckling test device for quantitatively characterizing the interfacial bonding properties of thin film materials, in which a
所述CCD相机3的拍照频率为1~2秒/张。The photographing frequency of the
所述万能材料试验机1的加载模式为载荷加载,加载速率均为3000N/min,压缩的最大位移为1~2mm。The loading mode of the universal
实施例1Example 1
考虑一个具体的情形:涂镀层-基底选用镍薄膜-低碳钢体系,镍薄膜的厚度h=6×10-5m,弹性模量为Ef=2.2×1011Pa,低碳钢基底的弹性模量Es=2×1011Pa,泊松比υf=υs=0.3。临界屈曲应力σcr=4.46×108Pa,加载时膜内的应力σ0=6×108Pa,对于镍薄膜-低碳钢基底体系,α≈0,β≈0,由表中的数据可得到ω=52.1°,试样涂镀层屈曲中心点的挠度ωmax=6.7×10-5m代入上述公式,得到镍薄膜-低碳钢基底体系的界面结合能G=37.1J/m2,相角Ψ=-637°。Consider a specific situation: the nickel film-low-carbon steel system is used as the coating-substrate, the thickness of the nickel film is h=6×10 -5 m, the elastic modulus is E f =2.2×10 11 Pa, and the thickness of the low-carbon steel substrate is Elastic modulus E s =2×10 11 Pa, Poisson's ratio υ f =υ s =0.3. The critical buckling stress σ cr =4.46×10 8 Pa, the stress in the membrane when loading σ 0 =6×10 8 Pa, for the nickel film-low carbon steel substrate system, α≈0, β≈0, according to the data in the table ω=52.1° can be obtained, and the deflection ω max of the buckling center point of the sample coating coating is 6.7×10 -5 m substituted into the above formula to obtain the interface binding energy of the nickel film-low carbon steel substrate system G=37.1J/m 2 , Phase angle Ψ=-637°.
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