CN102996695A - Three-line pendulum in-series air spring vibration isolation mechanism - Google Patents

Three-line pendulum in-series air spring vibration isolation mechanism Download PDF

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Publication number
CN102996695A
CN102996695A CN2012105062679A CN201210506267A CN102996695A CN 102996695 A CN102996695 A CN 102996695A CN 2012105062679 A CN2012105062679 A CN 2012105062679A CN 201210506267 A CN201210506267 A CN 201210506267A CN 102996695 A CN102996695 A CN 102996695A
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CN
China
Prior art keywords
pendulum
line
line pendulum
vibration isolation
disc
Prior art date
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Pending
Application number
CN2012105062679A
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Chinese (zh)
Inventor
朱煜
徐登峰
黎远成
曹胜
闫永固
管高峰
李强
董桂清
雷忠兴
荆新丽
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Tsinghua University
U Precision Tech Co Ltd
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Tsinghua University
U Precision Tech Co Ltd
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Application filed by Tsinghua University, U Precision Tech Co Ltd filed Critical Tsinghua University
Priority to CN2012105062679A priority Critical patent/CN102996695A/en
Publication of CN102996695A publication Critical patent/CN102996695A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a three-line pendulum in-series air spring vibration isolation mechanism and relates to an optical platform vibration isolator for machining, manufacturing and measuring precise instruments. The three-line pendulum in-series air spring vibration isolation mechanism comprises two parts, namely, an air spring and a three-line pendulum, wherein the air spring comprises a rubber piston, a main chamber, a throttle hole and an additional chamber; the three-line pendulum comprises an upper pendulum disc, pendulums, a pendulum rod and a lower pendulum disc; the lower part of the main chamber is communicated with the upper part of the additional chamber through the throttle hole; the lower end of the additional chamber is connected with the lower pendulum disc; the upper and lower ends of the pendulum lines are respectively connected with the upper pendulum disc and the lower pendulum disc; connecting points correspond to each other and are uniformly distributed on two circumferences of the upper pendulum disc and the lower pendulum; the additional chamber is used as the three-line pendulum rod; the main chamber, the additional chamber, the upper pendulum disc and the lower pendulum disc are vertically and concentrically installed; and the rubber piston is used as a load support so as to realize the vibration isolation. By utilizing the three-line pendulum in-series air spring vibration isolation mechanism, vibration isolation of three free degrees in horizontal and vertical directions is realized, a better low frequency vibration isolation effect is achieved, and meanwhile the structural design is more compact, and the machining and manufacturing cost is lower.

Description

A kind of three-line pendulum series connection pneumatic spring vibration isolating mechanism
Technical field
The present invention relates to a kind of three-line pendulum series connection pneumatic spring vibration isolating mechanism, be used for isolation and come from the outside vertically and the vibration of substantially horizontal.This vibration isolating mechanism is mainly used in optics, ultraprecise detection, ultraprecise processing and other fields.
Background technique
Current, the precision type instrument industry particularly relates to the positive fast development of ultraprecise processing, manufacturing and optical field both at home and abroad, and meanwhile, environmental disturbances is further very important on the impact of the sector, vibration isolation becomes a kind of the most practical the most effective method, and wherein passive vibration isolation uses very extensive.
Vibration is divided into vertical and the substantially horizontal three degree of freedom substantially, and present most popular vertical vibration mechanism surely belongs to pneumatic spring, and it has to make processes the outstanding advantages such as simple, with low cost, that anti-vibration performance is good.Horizontal vibration isolating mechanism has laminated rubber, three-line pendulum, fall pendulum, just fall the form such as pendulum combination, its natural frequency is all relevant with pendulum length, the natural frequency reduction means that pendulum length must increase, the while mechanism height can rise, and is unfavorable for Systems balanth.
Summary of the invention
The objective of the invention is to propose a kind of low frequency Three Degree Of Freedom vibration isolating mechanism, can realize simultaneously the vibration isolation of vertical and substantially horizontal three degree of freedom.
Realization technological scheme of the present invention is as follows:
A kind of three-line pendulum series connection pneumatic spring vibration isolating mechanism, described three-line pendulum series connection pneumatic spring vibration isolating mechanism comprises pneumatic spring and two parts of three-line pendulum, described pneumatic spring comprises rubber piston, main chamber, throttle orifice and further chambers, and main chamber bottom and further chambers top are communicated with by throttle orifice; Described three-line pendulum comprises balance, cycloid, fork and lower swinging disc; It is characterized in that: described further chambers is as the three-line pendulum fork, the further chambers lower end is connected with lower swinging disc, the up and down two ends of described cycloid are connected with lower swinging disc with upper balance respectively, cycloid up and down tie point is corresponding and be uniformly distributed on two circumference of balance and lower swinging disc, main chamber, further chambers, upper balance and lower swinging disc are vertically installed with one heart.
A kind of three-line pendulum series connection pneumatic spring vibrating isolation system provided by the invention, this system is comprised of a described three-line pendulum series connection pneumatic spring vibration isolating mechanism, or formed by three described three-line pendulums series connection pneumatic spring vibration isolating mechanisms, and and be unified into regular polygon or rectangle.
The present invention compared with prior art has following advantage: the one since with the pneumatic spring further chambers as the three-line pendulum fork so that simple and compact for structure, and described component are easy to processing and make, therefore cost is lower; The 2nd, pneumatic spring and three-line pendulum low frequency vibration isolation are effective, and its natural frequency is lower especially in the horizontal direction, and can realize simultaneously the vibration isolation of vertical and horizontal three degree of freedom.
Description of drawings
Fig. 1 is three-line pendulum series connection pneumatic spring vibration isolating mechanism master sectional view provided by the invention.
Fig. 2 is three-line pendulum series connection pneumatic spring vibration isolating mechanism 3D stereogram provided by the invention.
Fig. 3 is the worm's eye view of Fig. 2.
Among the figure: the 1-rubber piston; 2-main chamber; The 3-throttle orifice; The 4-further chambers; The 5-lower swinging disc; The 6-cycloid; The upper balance of 7-.
Embodiment
Specify embodiment of the present invention below in conjunction with accompanying drawing.
Fig. 1 is the result schematic diagram of three-line pendulum series connection pneumatic spring vibration isolating mechanism, described three-line pendulum series connection pneumatic spring vibration isolating mechanism comprises pneumatic spring and two parts of three-line pendulum, and described pneumatic spring comprises rubber piston 1, main chamber 2, throttle orifice 3 and further chambers 4; Described three-line pendulum comprises balance 7, cycloid 6, fork and lower swinging disc 5, described main chamber 2 bottoms and further chambers 4 tops are communicated with by throttle orifice 3, further chambers 4 lower ends are connected with lower swinging disc 5, are connected with lower swinging disc with upper balance 7 respectively and are connected in the up and down two ends of described cycloid 6, cycloid about in the of 6 tie point corresponding and be uniformly distributed on two circumference of balance 7 and lower swinging disc 5, main chamber 2, further chambers 4, upper balance 7 and lower swinging disc 5 are vertically installed with one heart, wherein further chambers 4 is as the three-line pendulum fork, and three-line pendulum and pneumatic spring series connection realize the vibration isolation of horizontal and vertical three degree of freedom.
A kind of three-line pendulum series connection pneumatic spring vibrating isolation system provided by the invention, formed by a described three-line pendulum series connection pneumatic spring vibration isolating mechanism, or formed by three described three-line pendulums series connection pneumatic spring vibration isolating mechanisms, and and be unified into regular polygon or rectangle, can increase ability to bear.
Three-line pendulum series connection pneumatic spring vibration isolating mechanism working principle provided by the invention is as follows:
When system is subject to disturbance from substantially horizontal, pneumatic spring top is together with further chambers 4 skew equilibrium positions, system returns to former balance position under the pulling force of cycloid 6 and load Action of Gravity Field, because system level direction natural frequency is lower, can isolate the vibration from the ground level direction.Equally, rubber piston 1 floats after the pneumatic spring inflation, load-supporting floats, when the vibration that is subject to from the Vertical direction on ground, rubber piston 1 produces displacement, and main chamber's 2 volumes change, thereby gas pressure intensity changes, gas because the specific function of pneumatic spring makes mechanism's mechanical energy be converted into thermal energy consumption, is realized the vibration isolating effect of Vertical direction by throttle orifice 3 turnover further chambers 4; Thereby system can realize the vibration isolation of vertical and substantially horizontal three degree of freedom.

Claims (2)

1. three-line pendulum series connection pneumatic spring vibration isolating mechanism, described three-line pendulum series connection pneumatic spring vibration isolating mechanism comprises pneumatic spring and two parts of three-line pendulum, described pneumatic spring comprises rubber piston (1), main chamber (2), throttle orifice (3) and further chambers (4), and main chamber (2) bottom and further chambers (4) top are communicated with by throttle orifice (3); Described three-line pendulum comprises balance (7), cycloid (6), fork and lower swinging disc (5); It is characterized in that: described further chambers (4) is as the three-line pendulum fork, further chambers (4) lower end is connected with lower swinging disc (5), the up and down two ends of described cycloid (6) are connected 5 with upper balance (7) with lower swinging disc respectively) be connected, cycloid (6) up and down tie point is corresponding and be uniformly distributed on two circumference of balance (7) and lower swinging disc (5), and described main chamber (2), further chambers (4), upper balance (7) and lower swinging disc (5) be concentric installation vertically.
2. three-line pendulum series connection pneumatic spring vibrating isolation system, it is characterized in that: this system is comprised of a three-line pendulum series connection pneumatic spring vibration isolating mechanism as claimed in claim 1, or formed by three-line pendulum as claimed in claim 1 series connection pneumatic spring vibration isolating mechanism more than three, and and be unified into regular polygon or rectangle.
CN2012105062679A 2012-11-30 2012-11-30 Three-line pendulum in-series air spring vibration isolation mechanism Pending CN102996695A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2012105062679A CN102996695A (en) 2012-11-30 2012-11-30 Three-line pendulum in-series air spring vibration isolation mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2012105062679A CN102996695A (en) 2012-11-30 2012-11-30 Three-line pendulum in-series air spring vibration isolation mechanism

Publications (1)

Publication Number Publication Date
CN102996695A true CN102996695A (en) 2013-03-27

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CN (1) CN102996695A (en)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1741507A1 (en) * 1989-09-25 1996-10-10 Московский институт теплотехники Bearing unit
US5779010A (en) * 1996-07-12 1998-07-14 Technical Manufacturing Corporation Suspended low-frequency horizontal pendulum isolator for vibration isolation systems
JP2000097282A (en) * 1998-09-24 2000-04-04 Nec Environment Eng Ltd Air spring vibration-resistant device
CN1487216A (en) * 2003-07-30 2004-04-07 上海理工大学附属工厂 Turned pendulum type pneumatic vibration isolator
CN101398052A (en) * 2008-09-17 2009-04-01 华中科技大学 Heavy load precision damper and vibration reduction system formed thereby
CN102330767A (en) * 2010-11-30 2012-01-25 哈尔滨工业大学 Air spring vibration isolator based on gas-solid damping and coupling action adjusted by air cylinder
CN203067639U (en) * 2012-11-30 2013-07-17 清华大学 Three-line pendulum series connection air spring vibration isolation mechanism and vibration isolation system

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1741507A1 (en) * 1989-09-25 1996-10-10 Московский институт теплотехники Bearing unit
US5779010A (en) * 1996-07-12 1998-07-14 Technical Manufacturing Corporation Suspended low-frequency horizontal pendulum isolator for vibration isolation systems
JP2000097282A (en) * 1998-09-24 2000-04-04 Nec Environment Eng Ltd Air spring vibration-resistant device
CN1487216A (en) * 2003-07-30 2004-04-07 上海理工大学附属工厂 Turned pendulum type pneumatic vibration isolator
CN101398052A (en) * 2008-09-17 2009-04-01 华中科技大学 Heavy load precision damper and vibration reduction system formed thereby
CN102330767A (en) * 2010-11-30 2012-01-25 哈尔滨工业大学 Air spring vibration isolator based on gas-solid damping and coupling action adjusted by air cylinder
CN203067639U (en) * 2012-11-30 2013-07-17 清华大学 Three-line pendulum series connection air spring vibration isolation mechanism and vibration isolation system

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Application publication date: 20130327