CN102992257A - Actuator and method for manufacturing the same - Google Patents
Actuator and method for manufacturing the same Download PDFInfo
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- CN102992257A CN102992257A CN201210313060XA CN201210313060A CN102992257A CN 102992257 A CN102992257 A CN 102992257A CN 201210313060X A CN201210313060X A CN 201210313060XA CN 201210313060 A CN201210313060 A CN 201210313060A CN 102992257 A CN102992257 A CN 102992257A
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- Prior art keywords
- exchange resin
- electrode
- resin membrane
- actuator
- anion
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 238000000034 method Methods 0.000 title claims description 15
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 claims abstract description 78
- 239000003957 anion exchange resin Substances 0.000 claims abstract description 70
- 239000003729 cation exchange resin Substances 0.000 claims abstract description 68
- 239000012528 membrane Substances 0.000 claims description 130
- 239000003456 ion exchange resin Substances 0.000 claims description 10
- 229920003303 ion-exchange polymer Polymers 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 229910052731 fluorine Inorganic materials 0.000 claims description 4
- 239000011737 fluorine Substances 0.000 claims description 4
- 230000004044 response Effects 0.000 abstract description 20
- 238000006073 displacement reaction Methods 0.000 abstract description 15
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 239000007864 aqueous solution Substances 0.000 description 4
- 238000007598 dipping method Methods 0.000 description 4
- -1 polyethylene Polymers 0.000 description 4
- 229920003934 Aciplex® Polymers 0.000 description 3
- 229920000557 Nafion® Polymers 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000465 moulding Methods 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 230000008961 swelling Effects 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000005342 ion exchange Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- GEHJYWRUCIMESM-UHFFFAOYSA-L sodium sulfite Chemical compound [Na+].[Na+].[O-]S([O-])=O GEHJYWRUCIMESM-UHFFFAOYSA-L 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 229920003935 Flemion® Polymers 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 229920002614 Polyether block amide Polymers 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 150000001450 anions Chemical class 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 125000003963 dichloro group Chemical group Cl* 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 239000004945 silicone rubber Substances 0.000 description 1
- 235000010378 sodium ascorbate Nutrition 0.000 description 1
- PPASLZSBLFJQEF-RKJRWTFHSA-M sodium ascorbate Substances [Na+].OC[C@@H](O)[C@H]1OC(=O)C(O)=C1[O-] PPASLZSBLFJQEF-RKJRWTFHSA-M 0.000 description 1
- 229960005055 sodium ascorbate Drugs 0.000 description 1
- 235000010265 sodium sulphite Nutrition 0.000 description 1
- PPASLZSBLFJQEF-RXSVEWSESA-M sodium-L-ascorbate Chemical compound [Na+].OC[C@H](O)[C@H]1OC(=O)C(O)=C1[O-] PPASLZSBLFJQEF-RXSVEWSESA-M 0.000 description 1
- 235000019187 sodium-L-ascorbate Nutrition 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
- F03G—SPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
- F03G7/00—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
- F03G7/005—Electro-chemical actuators; Actuators having a material for absorbing or desorbing gas, e.g. a metal hydride; Actuators using the difference in osmotic pressure between fluids; Actuators with elements stretchable when contacted with liquid rich in ions, with UV light, with a salt solution
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N11/00—Generators or motors not provided for elsewhere; Alleged perpetua mobilia obtained by electric or magnetic means
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/027—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed by irradiation, e.g. by photons, alpha or beta particles
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Analytical Chemistry (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Micromachines (AREA)
Abstract
Provided are an actuator that is small, superior in terms of high-speed response, and capable of large displacement, and a manufacturing method that can easily manufacture the actuator. The actuator is configured by a laminated body including multiple electrodes(1), multiple cation-exchange resin films(12), and multiple anion-exchange resin films(13). The cation-exchange resin films (12) and the anion-exchange resin films (13) are stacked alternately, and each of the cation-exchange resin films (12) and the anion-exchange resin films (13)is sandwiched between two of the electrodes (11). A voltage is applied such that the electrodes between adjacent ones of the cation-exchange resin films (12) and anion-exchange resin films (13) have the same polarity.
Description
Technical field
The present invention relates to a kind of actuator and manufacture method thereof.
Background technology
In recent years, in medical field or micromechanics field etc., the necessity of small-sized actuator improves.
Small-sized actuator like this require small-sized in, also require with low voltage drive.Various trials (for example, with reference to patent documentation 1) have been carried out in order to realize such lower voltage.
Present known small-sized actuator, main flow adopts by the movement of ion so that the amberplex of Material shrinkage/swelling.
In such actuator, when increasing the thickness of amberplex in order to increase displacement, owing to arrange action by the diffusion velocity of ion, there is the problem that can't obtain high-speed response.
Technical literature formerly
Patent documentation
Patent documentation 1: Japanese kokai publication hei 9-79129 communique
Summary of the invention
A mode of the present invention provide a kind of small-sized, high-speed response is superior, actuator that can larger displacement.In addition, provide a kind of manufacture method that can make easily such actuator.
The actuator of a mode of the present invention comprises the first cation exchange resin membrane and the first anion-exchange resin membrane, described the first cation exchange resin membrane and described the first anion-exchange resin membrane are stacked on first direction, described the first cation exchange resin membrane is applied the first voltage of the first polarity at described first direction, described the first anion-exchange resin membrane is applied the second voltage of the second polarity at described first direction.
By this structure, provide a kind of small-sized, high-speed response is superior and actuator that can larger displacement.
The manufacture method of the actuator of a mode of the present invention is characterized in that, comprising: so that the operation that the mode of the thin thickness of the Thickness Ratio the second end side of the first end side separately of a plurality of cation exchange resin membranes forms; So that the operation that the mode of the thin thickness of Thickness Ratio the 4th end side of the 3rd end side separately of a plurality of anion-exchange resin membranes forms; On the described first surface separately of described a plurality of cation exchange resin membranes and described the 3rd, described second and described fourth face, form respectively the operation of the first electrode, the second electrode; On separately described the 5th and the 7th of described a plurality of anion-exchange resin membranes, described the 6th and described octahedral, form respectively the operation of third electrode, the 4th electrode; With a cation exchange resin membrane in described a plurality of cation exchange resin membranes and an anion-exchange resin membrane in described a plurality of anion-exchange resin membrane with described fourth face and described the 7th operation that engages across the mode of described the second electrode and described third electrode; Between described the second electrode between described second and described the 5th and described third electrode, insert the operation of the 5th electrode.
By this structure, can provide a kind of small-sized, high-speed response is superior and the manufacture method of actuator that can larger displacement.
Above-mentioned actuator of the present invention is characterised in that, its duplexer by a plurality of electrodes, a plurality of cation exchange resin membrane, a plurality of anion-exchange resin membranes consists of, described cation exchange resin membrane and described anion-exchange resin membrane are alternately laminated, described cation exchange resin membrane and described anion-exchange resin membrane are respectively by two described electrode clampings, adjacent described cation exchange resin membrane and the described electrode between the described anion-exchange resin membrane are applied in voltage, so that become identical polarity.
By this structure, provide a kind of small-sized, high-speed response is superior and actuator that can larger displacement.
In above-mentioned actuator of the present invention, the thickness of preferred described cation exchange resin membrane is below the above 1000 μ m of 20 μ m.
By this structure, can in the response speed that makes actuator simultaneously faster, further increase displacement.
In above-mentioned actuator of the present invention, the thickness of preferred described anion-exchange resin membrane is below the above 1000 μ m of 20 μ m.
By this structure, can in the response speed that makes actuator simultaneously faster, further increase displacement.
In above-mentioned actuator of the present invention, preferred described cation exchange resin membrane is that ion exchange resin consists of by fluorine.
By this structure, can make the response speed of actuator faster.
In above-mentioned actuator of the present invention, preferred described anion-exchange resin membrane is that ion exchange resin consists of by carbon.
Thus, can make response speed faster.
At above-mentioned actuator of the present invention preferably by being covered by overlay film.
By this structure, can further improve the durability of actuator.
In above-mentioned actuator of the present invention, preferred described be more than the 0.1 μ m below the 100 μ m by the thickness of overlay film.
By this structure, can in the situation of the response that does not hinder actuator, further improve the durability of actuator.
In above-mentioned actuator of the present invention, preferred described a plurality of cation exchange resin membranes comprise respectively first end, the second end, the relative first surface on thickness direction of one side of described first end and second, relative the 3rd and the fourth face on thickness direction of one side of described the second end, described first surface is shorter than described the 3rd interval with described fourth face with described second interval, described a plurality of anion-exchange resin membrane comprises respectively the 3rd end, the 4th end, on thickness direction relative the 5th and the 6th of one side of described the 3rd end, relative the 7th and the octahedral on thickness direction of one side of described the 4th end, described the 5th shorter than described the 7th interval with described octahedral with described the 6th interval, the first electrode among described a plurality of electrode is configured in described first surface and described the 3rd, the second electrode among described a plurality of electrode is configured in described second and described fourth face, third electrode among described a plurality of electrode is configured in described the 5th and described the 7th, the 4th electrode among described a plurality of electrode is configured in described the 6th and described octahedral, described the second electrode and described third electrode join in a side of described the second end and described the 4th end, and the 5th electrode among described a plurality of electrodes is configured between described the second electrode and the described third electrode in a side of described first end and described the 3rd end.
By this structure, provide a kind of further small-sized, high-speed response is superior and actuator that can larger displacement.
The manufacture method of above-mentioned actuator of the present invention is characterised in that, comprising: so that the operation that the mode of the thin thickness of the described the second end side of Thickness Ratio of the described first end side separately of described a plurality of cation exchange resin membranes forms; So that the operation that the mode of the thin thickness of described the 4th end side of Thickness Ratio of described the 3rd end side separately of described a plurality of anion-exchange resin membranes forms; On the described first surface separately of described a plurality of cation exchange resin membranes and described the 3rd, described second and described fourth face, form respectively the operation of the first electrode, the second electrode; On separately described the 5th and the 7th of described a plurality of anion-exchange resin membranes, described the 6th and described octahedral, form respectively the operation of third electrode, the 4th electrode; With each cation exchange resin membrane of described a plurality of cation exchange resin membranes and each anion-exchange resin membrane of described a plurality of anion-exchange resin membranes, alternately and with described the 3rd and described octahedral across described the first electrode and described the 4th electrode join, described fourth face and described the 7th operation that the mode of joining across described the second electrode and described third electrode engages; A side of described first end and described the 3rd end, between described the first electrode and described the 4th electrode and the operation of inserting respectively the 5th electrode between described the second electrode and the described third electrode.
By this structure, provide a kind of further small-sized, high-speed response is superior and actuator that can larger displacement.
Description of drawings
Fig. 1 is the cutaway view of the first embodiment of expression actuator of the present invention.
Fig. 2 is the ideograph of driving condition of the actuator of expression the first embodiment.
Fig. 3 is the cutaway view of the second embodiment of expression actuator of the present invention.
Fig. 4 is the process chart of an example of the manufacture method of expression actuator of the present invention.
Symbol description
1... actuator 1 ' ... actuator 11... electrode 12... cation exchange resin membrane 13... anion-exchange resin membrane 14... terminal (the 5th electrode)
The specific embodiment
Below, describe preferred forms of the present invention in detail.
" the first embodiment of actuator "
At first, the first embodiment of actuator of the present invention described.
Fig. 1 is the cutaway view of the first embodiment of expression actuator of the present invention, and Fig. 2 is the ideograph of driving condition of the actuator of expression the first embodiment.
Actuator 1 is by a plurality of electrodes 11, a plurality of cation exchange resin membrane 12, a plurality of anion-exchange resin membrane 13 stacked duplexers are consisted of.In the present embodiment, as shown in Figure 1, consisted of by four cation exchange resin membranes 12, three anion-exchange resin membranes 13, eight electrodes 11.
As shown in Figure 1, actuator 1 is alternately laminated cation exchange resin membrane 12 and an anion-exchange resin membrane 13.
And, between cation exchange resin membrane 12 and anion-exchange resin membrane 13, dispose an electrode 11.
In addition, cation exchange resin membrane 12 and anion-exchange resin membrane 13 are respectively by two electrode 11 clampings.
In other words, actuator 1 according to electrode 11, cation exchange resin membrane 12, electrode 11, anion-exchange resin membrane 13, electrode 11, cation exchange resin membrane 12, electrode 11 ..., the order of anion-exchange resin membrane 13, electrode 11 carries out stacked.
Electrode 11 is connected with power supply, and has cation exchange resin membrane 12, anion-exchange resin membrane 13 are executed alive function.
As the material that consists of electrode 11, such as the metals such as gold, platinum, iridium, palladium, ruthenium, carbon fiber, various electroconductive polymers etc. are arranged.
Cation exchange resin membrane 12 is by applying voltage, to electrode 11 lateral bends that are connected with the side of the positive electrode of power supply.This is by in cation exchange resin membrane 12, it is also mobile to the mobile hydrone of negative side to be accompanied by cation, and negative side swelling side of the positive electrode shrinks and produces.
As the cationic ion-exchange resin that consists of cation exchange resin membrane 12, there is no particular limitation, is ion exchange resin but preferably use fluorine.Thus, can make response speed faster, further increase simultaneously displacement.
Be ion exchange resin as fluorine, such as enumerating: Nafion (trade name of E.I.Du Pont Company), Flemion (trade name of Asahi Glass company) etc.
The thickness of such cation exchange resin membrane 12 is preferably below the above 1000 μ m of 20 μ m, more preferably below the above 500 μ m of 100 μ m.Thus, can making response speed simultaneously faster, further increase displacement.
Anion-exchange resin membrane 13 by applying voltage to electrode 11 lateral bends that are connected with the negative side of power supply.This is by in anion-exchange resin membrane 13, it is also mobile to the mobile hydrone of side of the positive electrode to be accompanied by anion, and side of the positive electrode swelling negative side is shunk and produced.
As the anion exchange resin that consists of anion-exchange resin membrane 13, there is no particular limitation, is ion exchange resin but preferably use carbon.Thus, can making response speed simultaneously faster, further increase displacement.
Be ion exchange resin as carbon, such as enumerating Aciplex (trade name of Asahi Kasei Corporation) etc.
The thickness of such anion-exchange resin membrane 13 is preferably below the above 1000 μ m of 20 μ m, more preferably below the above 500 μ m of 100 μ m.By this structure, can in the response speed that makes actuator simultaneously faster, further increase displacement.
In addition, actuator 1 is preferred whole by being covered by overlay film.By this structure, can prevent the evaporation of the moisture in each ion exchange resin membrane, can further improve the durability of actuator 1.
As consisting of by the material of overlay film, be not particularly limited, for example, can enumerate: the polyolefin of polyethylene, polypropylene etc., polyvinyl chloride, polyester, polyamide, polyetheramides, polyurethane, fluororesin, silicone rubber etc.
The thickness by overlay film like this is preferably more than the 0.1 μ m below the 100 μ m, more preferably below the above 10 μ m of 1 μ m.Thus, can in the situation of the response that does not hinder actuator, further improve the durability of actuator.
In the actuator 1 that consists of like this, when to electrode application voltage, cation exchange resin membrane 12 and anion-exchange resin membrane 13 are to equidirectional crooked (solid line of Fig. 2), and actuator 1 integral body is than macrobending.In addition, owing to use thin ion exchange resin, produce reduction so can prevent the translational speed of ion, can accelerate response speed.In addition, positive and negative by Switching power, as shown in Figure 2, actuator 1 can make bending direction change.
More than, the actuator 1 of present embodiment is illustrated, but actuator of the present invention is not limited to this.For example, in the above description, illustrated that actuator 1 is made of four cation exchange resin membranes 12, three anion-exchange resin membranes 13, eight electrodes 11, but a plurality of as long as cation exchange resin membrane 12, anion-exchange resin membrane 13, electrode 11 have, its quantity does not limit.
" the second embodiment of actuator "
Below, the second embodiment of actuator of the present invention is described.
Fig. 3 is the cutaway view of the second embodiment of expression actuator of the present invention.
The actuator 1 ' of present embodiment is same with aforesaid embodiment, is by a plurality of electrodes 11, a plurality of cation exchange resin membrane 12, a plurality of anion-exchange resin membrane 13 stacked duplexers are consisted of.In the present embodiment, as shown in Figure 3, consisted of by four cation exchange resin membranes 12, three anion-exchange resin membranes 13,14 electrodes 11.
Actuator 1 ' is same with aforesaid embodiment, and alternately laminated have cation exchange resin membrane 12 and an anion-exchange resin membrane 13.
And, between cation exchange resin membrane 12 and anion-exchange resin membrane 13, disposing two electrodes 11, these are different from aforesaid embodiment.
That is, actuator 1 ' is alternately laminated by the cation exchange resin membrane 12 of two electrode 11 clampings with by the structure of the anion-exchange resin membrane 13 of two electrode 11 clampings.
By forming such structure, can provide a kind of high-speed response superior, actuator 1 ' that can larger displacement, and can make easily such actuator 1 '.
" manufacture method of actuator 1 ' "
Below, an example of the manufacture method of above-mentioned actuator 1 ' is described.
Fig. 4 is the process chart of an example of the manufacture method of expression actuator.
At first, prepare four cation exchange resin membranes 12 and three anion-exchange resin membranes 13.Among the figure, the top of cation exchange resin membrane 12 is called first end, the below of cation exchange resin membrane 12 is called the second end, the top of anion-exchange resin membrane 13 is called the 3rd end, the below of anion-exchange resin membrane 13 is called the 4th end.In addition, the left side of first end is called first surface, the right side of first end is called second, the left side of the second end is called the 3rd, the right side of the second end is called fourth face, and then the left side of the 3rd end is called the 5th, the right side of the 3rd end is called the 6th, the left side of the 4th end is called the 7th, the right side of the 4th end is called octahedral.
Then, shown in Fig. 4 (a), by stamping grade moulding is carried out in one side's of each film end (first end and the 3rd end), so that its a part of thickness attenuation.
Then, form pair of electrodes 11 (Fig. 4 (b)) on the two sides of four cation exchange resin membranes 12 and three anion-exchange resin membranes 13.Among the figure, to be called the first electrode at the electrode 11 of first surface and the 3rd configuration, to be called the second electrode at the electrode 11 of second and fourth face configuration, to be called third electrode at the electrode 11 of the 5th and the 7th configuration, will be called the 4th electrode at the electrode 11 of the 6th and octahedral configuration.
Using Nafion (trade name of E.I.Du Pont Company) to be used as in the situation of cation exchange resin membrane 12, for example, can form as described below electrode 11 (gold-plated).
In the aqueous solution of dichloro ferrosin gold as the complex compound of gold, with moulding as described above Nafion (cation exchange resin membrane 12) dipping about 12 hours of a part of end, by ion-exchange, make the gold complex ionic adsorption in film.Afterwards, dipping is about 5 hours in 60 ℃ sodium sulfite aqueous solution, in each film surface gold-plating, forms electrode 11 by reduction.
On the other hand, using Aciplex (trade name of Asahi Kasei Corporation) to be used as in the situation of anion-exchange resin membrane 13, for example, can form as described below electrode 11 (gold-plated).
At tetrachloro gold (III) acid (HAuCl as golden complex compound
4) the aqueous solution in Aciplex film (anion-exchange resin membrane 13) dipping about 12 hours, by ion-exchange, make the gold complex ionic adsorption in film.Afterwards, dipping is about 5 hours in 60 ℃ sodium ascorbates (sodium ascorbate) aqueous solution, in the film surface gold-plating, forms electrode 11 by reduction.
Then, shown in Fig. 4 (c), the cation exchange resin membrane 12 and the anion-exchange resin membrane 13 that the two sides are formed with electrode 11 alternately engage.That is, the 3rd and octahedral join across the first electrode and the 4th electrode, and fourth face and the 7th are joined across the second electrode and third electrode.At this moment, in the space that the part by the cation exchange resin membrane 12 of as mentioned above moulding and anion-exchange resin membrane 13 forms, insert the terminal 14 (the 5th electrode) that is used for connecting electrode 11 and power supply.That is, between the first electrode of a side of first end and the 3rd end and the 4th electrode and between the second electrode and third electrode, insert respectively the 5th electrode.
Need to prove that the joint of cation exchange resin membrane 12 and anion-exchange resin membrane 13 for example can adopt known conductive adhesive to carry out.
Afterwards, use by overlay film as required to cover, then power supply and terminal 14 (the 5th electrode) are electrically connected, obtain thus actuator 1 '.
More than, for the present invention, be illustrated based on preferred forms, but the present invention is not limited to this.
Claims (13)
1. an actuator is characterized in that,
Comprise the first cation exchange resin membrane and the first anion-exchange resin membrane,
Described the first cation exchange resin membrane and described the first anion-exchange resin membrane are stacked on first direction,
Described the first cation exchange resin membrane is applied the first voltage of the first polarity at described first direction, described the first anion-exchange resin membrane is applied the second voltage of the second polarity at described first direction.
2. actuator as claimed in claim 1 is characterized in that,
Described the first cation exchange resin membrane is clipped by the first electrode and the second electrode,
Described the first anion-exchange resin membrane is clipped by third electrode and the 4th electrode.
3. actuator as claimed in claim 2 is characterized in that,
Described the second electrode is held concurrently and is described third electrode.
4. such as each described actuator in the claims 1 to 3, it is characterized in that,
Described actuator also comprises the second cation exchange resin membrane and the second anion-exchange resin membrane,
Described the second cation exchange resin membrane and described the second anion-exchange resin membrane are layered on described the first anion-exchange resin membrane along described first direction.
5. such as each described actuator in the claim 1 to 4, it is characterized in that,
The thickness of described cation exchange resin membrane is below the above 1000 μ m of 20 μ m.
6. such as each described actuator in the claim 1 to 5, it is characterized in that,
The thickness of described anion-exchange resin membrane is below the above 1000 μ m of 20 μ m.
7. such as each described actuator in the claim 1 to 6, it is characterized in that,
It is ion exchange resin that described cation exchange resin membrane comprises fluorine.
8. such as each described actuator in the claim 1 to 7, it is characterized in that,
It is ion exchange resin that described anion-exchange resin membrane comprises carbon.
9. such as each described actuator in the claim 1 to 8, it is characterized in that,
Described actuator is by being covered by overlay film.
10. actuator as claimed in claim 9 is characterized in that,
Described is more than the 0.1 μ m below the 100 μ m by the thickness of overlay film.
11. such as each described actuator in the claim 1 to 10, it is characterized in that,
Described the first cation exchange resin membrane and described the second cation exchange resin membrane comprise respectively relative the 3rd and the fourth face on described first direction in a side of first surface relative on the described first direction and second, described the second end of a side of first end, the second end, described first end
Described first surface is shorter than described the 3rd interval with described fourth face with described second interval,
Described the first anion-exchange resin membrane and described the second anion-exchange resin membrane comprise respectively relative the 7th and the octahedral on described first direction in a side of relative the 5th and the 6th, described the 4th end on the described first direction of a side of the 3rd end, the 4th end, described the 3rd end
Described the 5th shorter than described the 7th interval with described octahedral with described the 6th interval,
Described the first electrode is disposed at described first surface and described the 3rd,
Described the second electrode is disposed at described second and described fourth face,
Described third electrode is disposed at described the 5th and described the 7th,
Described the 4th electrode is disposed at described the 6th and described octahedral,
Described the second electrode and described third electrode join in a side of described the second end and described the 4th end,
The 5th electrode is configured between described the second electrode and the described third electrode in a side of described first end and described the 3rd end.
12. the manufacture method of an actuator is characterized in that, comprising:
So that the operation that the mode of the thin thickness of the Thickness Ratio the second end side of the first end side separately of a plurality of cation exchange resin membranes forms;
So that the operation that the mode of the thin thickness of Thickness Ratio the 4th end side of the 3rd end side separately of a plurality of anion-exchange resin membranes forms;
On the described first surface separately of described a plurality of cation exchange resin membranes and described the 3rd, described second and described fourth face, form respectively the operation of the first electrode, the second electrode;
On separately described the 5th and the 7th of described a plurality of anion-exchange resin membranes, described the 6th and described octahedral, form respectively the operation of third electrode, the 4th electrode;
With a cation exchange resin membrane in described a plurality of cation exchange resin membranes and an anion-exchange resin membrane in described a plurality of anion-exchange resin membrane with described fourth face and described the 7th operation that engages across the mode of described the second electrode and described third electrode;
Between described the second electrode between described second and described the 5th and described third electrode, insert the operation of the 5th electrode.
13. the manufacture method of actuator as claimed in claim 12 is characterized in that, also comprises:
The operation that a described anion-exchange resin membrane in another one cation exchange resin membrane in described a plurality of cation exchange resin membranes and the described a plurality of anion-exchange resin membrane is engaged across the mode of described the first electrode and described the 4th electrode with described the 3rd and described octahedral;
Insert the operation of the 6th electrode between described the first electrode between described first surface and described the 6th and described the 4th electrode.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-200256 | 2011-09-14 | ||
| JP2011200256A JP2013062964A (en) | 2011-09-14 | 2011-09-14 | Actuator and method of manufacturing the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102992257A true CN102992257A (en) | 2013-03-27 |
Family
ID=47829216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210313060XA Pending CN102992257A (en) | 2011-09-14 | 2012-08-29 | Actuator and method for manufacturing the same |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9316211B2 (en) |
| JP (1) | JP2013062964A (en) |
| CN (1) | CN102992257A (en) |
Cited By (1)
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| CN107405921A (en) * | 2015-03-24 | 2017-11-28 | 精工爱普生株式会社 | Printhead unit and liquid injection apparatus |
Families Citing this family (1)
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| JP5958162B2 (en) * | 2012-08-03 | 2016-07-27 | セイコーエプソン株式会社 | Actuator |
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Also Published As
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| US9316211B2 (en) | 2016-04-19 |
| JP2013062964A (en) | 2013-04-04 |
| US20130062993A1 (en) | 2013-03-14 |
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