CN102985586A - Process and apparatus for the application of solid layers - Google Patents
Process and apparatus for the application of solid layers Download PDFInfo
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- CN102985586A CN102985586A CN2011800339053A CN201180033905A CN102985586A CN 102985586 A CN102985586 A CN 102985586A CN 2011800339053 A CN2011800339053 A CN 2011800339053A CN 201180033905 A CN201180033905 A CN 201180033905A CN 102985586 A CN102985586 A CN 102985586A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/548—Controlling the composition
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Abstract
The invention relates to a process for applying solid layers (14) to an object (12) to be coated by means of at least one radiation source (2), in particular a laser radiation source, which comprises at least the step of removal of a sample (4) in the solid state in at least partially different sections (6) by means of at least one beam (8) emitted by the radiation source (2) to at least partly convert the sample (4) into a gaseous state (10) which deposits at last partially on the object (12) to be coated in order to form a solid layer (14), where at the same time the alignment of a trace of the emitted beam (8) is altered during the step of removal of the sample and the sample (4) is moved.
Description
Technical field
The present invention relates to a kind of by at least a source of radiation, the method and apparatus of a kind of lasing source coating solid coating on an object to be coated particularly, may further comprise the steps in the method: remove a sample, this sample comprises a plurality of different material parts, launch a light beam by this source of radiation and convert gaseous phase with this material with this sample surfaces to from solid state, be also referred to as gas phase, to deposit a film at this object to be coated.
Background technology
In the preparation of coating; especially the protective layer of protection against corrosion and anti-fret wear, optical coating and have superconduction or the preparation of ferromagnetic functional coating and in metrology and automatic control engineering; according to the difference in functionality of coating, need coating to be as thin as several nanometers to several microns.The coating of these types is normally made by the method for laser beam gasification.In this method, the material that is used for applying is generally discoid sample.By using high energy pulse laser, the material of sample surfaces is converted to gaseous phase and carries out simultaneously orientation and accelerate from solid state, and changing the gaseous material cloud that forms by the removing materials of this sample surfaces like this can be deposited on the contiguous object with the form of thin solid cladding.But the material particle condenses under the state of gasification easily.If these condensation products are deposited on this object to be coated, owing to formed a solid cladding in uneven thickness, the quality of the solid cladding that deposits just has been subject to infringement, yet thickness is vital for the application of solid cladding uniformly, and especially the correct transmission for electrical signal is vital in control engineering and automatic control engineering.
As a rule, only have surface little and thin, that be about several square centimeters of meters just to apply by the method for laser beam gasification.In this case, when rotary sample or sample when x direction or y direction move, remove the surface of sample, the light path of meanwhile launching light beam is constant.As be known in the art, traditional laser beam gasification process depends on a large amount of processing parameters, such as energy, pulse sequence, the removing speed of specimen material, the material composition of sample or the relation that arranges between object to be coated and the sample of the light beam of launching.
In addition, using a plurality of independent samples when depositing a plurality of differing materials, these a plurality of samples adopt a so-called sample changer to be arranged side by side in an integrated mode, and sample changer independently each sample guides to the position of light beam successively.Because light beam can only remove a kind of material composition and deposit a new coating, thereby such coating process is very complicated at every turn.
US2005/0067389A1 discloses the laser beam gasification process in a kind of two stages, and in this method, laser beam moves along the axial fixed route of x/y first at the beginning, and afterwards, this sample only rotates through a fixing angle in second step.Periodically repeat such consecutive steps, and so that the erosion minimizing of sample.Because carry out the consecutive steps that constant like this periodicity repeats, the angle of rotation is fixed, so regional can can't removing of sample, hatching effect caused thus.Hatching effect is generally understood as, and is caused the restricted diffusion of the gaseous phase of the sample that removes by the solid material of prismatic projection.In addition, form the material breaks fragment of sample surfaces, the possibility of material breaks fragment that particularly forms the prismatic of projection has increased, and these material breaks fragments can be deposited on the surface of object to be coated as a whole.These are at the material breaks fragment of sample surfaces, and their size range might reach a millimeter rank, and this has very large fluctuation so that the coat-thickness of this solid cladding distributes.But, in the application of the object that is coated with solid cladding, the thickness of solid cladding is preferably in nanometer or millimeter rank, and thickness is uniform, the thickness of the solid cladding that deposits at object to be coated in other words, all should be the same in any position.
Summary of the invention
From known prior art, the purpose of this invention is to provide a kind of method and device for coating solid coating on an object to be coated, the surface that the method and device can be equably, material removes sample independently, can reduce any bad material breaks fragment in the formation of this sample surfaces, and can obtain at the large sized object of square metre order of magnitude uniform coating without difference in thickness by the method and device, wherein, this sample surfaces can comprise various material part.
Claimed in claim 1 in according to the present invention those technical characterictics in removing step, and the technical characterictic of this device in the claim 10, the present invention changes the orientation of the light path of emission light beam by when a sample moves in removing process, realize purpose of the present invention.
According to a preferred embodiment, the change campaign of this orientation of this light path of this emission light beam based on or be independent of the motion of this sample, wherein, this light path of this sample and this emission light beam intersects.Change in the situation of motion based on the sample motion at this, this orientation of this light path of this emission light beam depends on this change campaign, and the motion of this change campaign and this sample is to be mutually related, for example on speed.Therefore, conceivablely be, in the situation of using a discoid sample, the motion of this sample is the central shaft rotation around this sample, and the increase of speed of rotation is so that this of this light path that should the emission light beam changes this Speed Reduction of motion.In this case, be set to the central shaft of this sample perpendicular to this sample surfaces and the axle that passes this surperficial central point of this sample.In addition, the increase of this sample movement velocity (reduction) equally also can cause the increase (reduction) of speed of change campaign of this light path of this emission light beam.
In addition, for example the speed of this motion of the speed of this change campaign and this sample is separate also is feasible, and this change campaign has determined this orientation of this light path of this emission light beam.A benefit like this can be controlled separately each motion exactly, processing parameter in such process, for example say that the emission light beam is in the position of this surface irradiation of this sample, perhaps or even the movement velocity of this sample, can in the situation that does not affect other processing parameters, adjust individually.Can control easily and monitor this change campaign of this orientation of this light path of this emission light beam and the motion of this sample by a computer control system.
According to another preferred embodiment, the orientation of this beam path changes according to following mode, and this light beam carries out straight line motion at sample surfaces, and this sample surfaces is that the light path with this emission light beam crosses one another.This light beam at the translational motion of sample surfaces can be, such as level, vertical or both combination, and the change direction of the orientation of this light path of this emission light beam is original relevant without offset beam with this.If so, this light beam can pass the central point of this sample surfaces for instance at the translational motion on a disk shaped samples surface.Yet if this sample has the geometrical shape of a rectangle, translational motion preferably carries out on the whole surface of this sample.In addition, the change campaign of the orientation of this light path of this emission light beam that is undertaken by the beam deflection device can present a cone shape structure, and this shows as a light beam in this sample surfaces rotation.
According to another preferred embodiment, this emission light beam is with the surface of a predetermined angular illumination at this sample, this light path of the surface of this sample and this emission light beam intersects, simultaneously preferably, this sample is around being rotated perpendicular to the surface of this sample and the axle of central point that passes the surface of this sample.The angle of the angle that the predetermined angular of this light beam namely forms between this surface of this emission light beam and this sample when this emission light beam exposes to this sample surfaces.This predetermined angular preferably is so that this surperficial central point is passed in the change campaign of this light path of this light beam.Preferably, the speed of rotation of this sample is preferably slower with respect to the change of the orientation of this emission light beam.The speed of rotation of this sample preferably is 1-50 rpm at 0.1-250 rpm.
According to another preferred embodiment, on this surface of this sample, this surface of this sample is crossing with the light path of this emission light beam with a default angular illumination for this light beam, and the position of this sample changes at a bearing of trend perpendicular to this light path of this light beam simultaneously.The variation of this position of this sample can for the motion of vertical motion or level or both.Preferably, the movement velocity of the motion that the position of this sample changes is slower than the movement velocity of change campaign of this light path of this emission light beam, and the speed of the position change of this better sample is between 0.01-50 micron per second.
According to another preferred embodiment, when this sample comprised a plurality of different piece, preferably, those parts were comprised of differing materials.If this sample is, for example say plate-like and comprise the sample part that a plurality of classes are fan-shaped, the fan-shaped sample of those classes has comprised that partly a plurality of different materials form, this sample just can be at this object to be coated deposition one solid cladding with periodic material concentration sequence round its central shaft rotation when this orientation of launching this light path of light beam changes.For an example the simplest, the composition of an independent coating of the solid cladding that deposits is corresponding to this composition of the part of this sample.In the situation of more complicated, the coat composed variation that any hope obtains can partly decide by selecting those materials that will remove.The coating of all depositions has formed this solid cladding jointly.Preferably, the periodical change of the coating of the deposition of this solid cladding is that the movement velocity by this light path of this emission light beam of the movement velocity of this sample and deflection decides.In addition, in removing process, the length in the path that the light beam of this deflection stays on this surface of this sample can affect composition and the thickness of each the independent coating in the solid cladding that deposits.For instance, if in the situation of disk samples rotation, this disk samples is divided into a plurality of fan-shaped parts of class that differing materials forms that have, in removing process, compare this light beam of repeatedly deflection but only deflect to the periphery of this sample surfaces from this central point radially outward of this sample surfaces, this emission light beam of deflection makes this light beam repeatedly more material convertings can be become gaseous phase by this central point of this sample surfaces with the such deflection way of whole diameter through this sample surfaces.If this beam deflection is through the whole diameter of this sample, rather than only be the words of radioactively deflection repeatedly, then therefore this gaseous material cloud can obtain higher material concentration, and this also can determine to be deposited on simultaneously the thickness of this solid cladding on this object to be coated.The material that presents with this gaseous clouds form is more, and those coatings that are deposited on so this solid cladding on this object to be coated are just thicker, and vice versa.In addition, what can expect is that the variation of beam power also can have influence on the thickness of those coatings in this solid cladding, because higher beam power can remove this material of this more sample surfaces.
Each of this sample independently material composition of part preferably can be used the chemically composition of homogeneous, and the pure substance that particularly has metalline is for example said titanium, silver, aluminium or iron, and/or has the pure substance of nonmetal character, for example says boron, carbon or phosphorus; Metal composites is for example mediated gold; And/or the compound of nonmetallic compound or non-oxidized substance, for example say carbide, halogenide or nitride.Wherein, described nonmetallic compound preferably industrial as protective layer with the oxidation of antagonism between the surface and interface.In addition, what can expect is to use ceramic composite as the material of those parts of this sample.In this ceramic composite through the parts of plastics of additional processing so that those ceramic composites have snappiness.When ceramic composite is used as the material of those parts of this sample, just can avoid for example forming material breaks fragment on this surface of this sample.Preferably, the organic moiety of this ceramic composite, namely this flexible plastic part is decomposed the removing in the process of this surface of this sample, the ceramic segment of this ceramic composite then is converted into gas phase the removing of this surface of this sample in the process, and is deposited on this object to be coated with the form of a solid cladding.If adopted different materials in the various piece of this sample, that is to say if the material of those parts of this sample has comprised different compositions, for example say metal, sulfide or halogenide, then this emission light beam removes this of this sample surperficial the time, the surface of those parts of this sample also has been removed, preferably, thus enter simultaneously gaseous phase so that those the different materials in those parts of this sample form.If the sample of a plate-like for example is divided into two sample parts, the composition of each this sample part differs from one another, and each this sample partly is a semicircle, the level of the orientation of this light path of this emission light beam changed the whole diameter that motion is covered in this sample when this sample rotated round its central shaft, and then those surfaces of two these parts are just in succession removed and transform for gaseous phase.Therefore this gaseous clouds has comprised that the bi-material that removes part of this sample forms.If chemical reaction can not occur in the material of those parts of this sample composition in this gaseous material cloud, those materials compositions of two these parts that are removed of this sample are deposited on this object to be coated as a solid cladding, that is to say that the solid cladding of deposition has comprised that the bi-material of two parts that come from this sample forms.If the material of those parts of this sample forms the chemical reaction relation that exists in this gaseous material cloud, they are at least part of each other can to react and forms each other new chemical bond.Thus, those materials that remove part except two of this sample formed, this solid cladding of deposition also can comprise by this bi-material and forms the novel compound that forms.The light path of this light beam on this surface of those parts that can be by being covered in this sample arranges or changes the composition of this material in the solid cladding of this deposition, for example by forming concentration gradient and/or form concentration gradient in a coating between at least two coatings that directly next-door neighbour arranges.
According to a preferred embodiment, those different pieces of this sample are a plurality of coatings and/or in the lip-deep a plurality of side by side zones of this of this sample.For example those coatings can be parallel to this sample surfaces continuous coated, and preferably, the material that each coating has forms different from the material composite of adjacent coating.Those parts that in addition, will have this sample that differing materials forms directly next-door neighbour are arranged on this surface of this sample.Those parts can be designed as various desirable geometrical shapies, and are for example fan-shaped, circular or polygonal.Preferably, those part integral body of this sample are arranged in the volume of this sample continuously.Therefore, for example, first part surface and a second section surface can form the part of this sample simultaneously, and this first part surface is relative with this second section surface, this first part surface is at least part of surface of this sample, and this second section surface is at least part of bottom surface of this sample.
According to a preferred embodiment, remove in the process at this, those different pieces of this sample are removed by vertical sliding from the surface of this sample, and preferably, those different pieces are removed by vertical sliding from the surface of this sample individually.Based on this beam power, the material with those parts of different physico-chemical properties forms and can be removed with different speed.Thus can be so that this sample surfaces roughening, corner angle or step that this will cause at the material that forms at the interface this sample surfaces of two proximate portion of this sample cause shade influence thus.Optionally move perpendicular to this sample surfaces by those parts that make this sample, preferably, those parts of those samples are individually perpendicular to this sample surfaces, just can avoid being formed at edge or the step at those interfaces, this has also been avoided simultaneously the removing in the process of this sample surfaces, the material fragment that may be formed by this edge or this step.Adopt at least one operating device to control the deflection of those parts of this sample, this operating device is preferably a Linear actuator.
The present invention comprises that also one is used for the device of coating solid coating on an object to be coated, this device comprises a source of radiation, a direction transformation equipment and a vacuum chamber, this source of radiation is a lasing source especially, this direction conversion equipment is used for changing the light path of this emission light beam, be provided with a sample in this vacuum chamber, this sample preferably comprises a plurality of different pieces, this sample moves under the driving of one first external drive equipment, and the surface of this sample is removed by this light beam, the orientation of this light path is movably, and this sample also can move simultaneously.This device of the present invention comprises the direction transformation equipment for the light path that changes this emission light beam, this direction conversion equipment comprises at least one mirror and/or at least one beam expander device and/or at least one focus set, preferably this mirror is a galvanometer mirror, this galvanometer mirror be single shaft or twin shaft, but preferably be twin shaft.This beam expander preferably is a prism, is used for enlarging when removing large-sized sample surperficial the diameter of this emission light beam.Preferably, this focus set is lens, changes the shape of the cross section of this light beam by these lens.This light beam can also preferably be square cross section for a for example cross section that the angle arranged except the cross section of circle, if the geometrical shape of this sample is when the angle is arranged like this, can guarantee that this surface of this sample can be removed equably.Preferably, even can expect changing the cross section of this light beam of a three-dimensional laser scanners so that complicated sample shape can realize removing uniformly, and the formation of condensation product and the formation of having avoided this sample surfaces material fragment when having avoided the removing materials of this sample to be converted into gas phase.In addition, this three-dimensional laser scanners can arrange a fixing beam focus at whole this sample surfaces.
According to a preferred embodiment, those different parts of this sample are arranged side by side with the form in layer and/or zone, and those distinct portions each other material form different.Therefore this sample can provide multiple material simultaneously.If those parts of this sample can arrange with the form of stratiform, this surface of being parallel to this sample, just can be after removing one first coating on upper strata, to have with that different materials one second coating that form, that be positioned at lower floor and transfer on this object to be coated, and need not to adopt mode consuming time to change sample.
Preferably, the geometry of this sample is the structure of a 3 D stereo.For example, this sample can have the basic configuration of a circle, and is discoid or one cylindric such as one; One polygonal geometrical shape also can be arranged, such as square, rectangle or trilateral.Preferably, this diameter, i.e. this surperficial size of this sample is not limited in the traditional experiment chamber several centimetres scale.This sample can have larger diameter, and preferably between 1-15 centimetre, this sample can have any desirable geometry.In addition, be also contemplated that, the sample of this 3-D solid structure can be a strip or a cable shape, the cross section of this strip sample has the angle, this cable shape sample for example has a circular cross section and has continuous structure, in the process of the coating of giving large-sized object, can regularly do not interrupted thus, regularly interrupting for instance like this is, after the specimen material of finishing a plate-like removes, the sample that the interrupt operation program exhausts with replacing, and again this vacuum chamber is vacuumized.
According to a preferred embodiment, the present invention has an object to be coated, and this object is set to and can moves by one second driving arrangement.During this gaseous phase deposition, the motion of the object that this is to be coated can be vertical, level or not only vertical but also level with respect to this surface of this sample.In addition, in the deposition process of this gaseous phase, will be arranged to object to be coated also to be feasible around the form of axle rotation, the surface that this axle deposits perpendicular to this gaseous phase, and preferably pass this surperficial central point.In addition, preferably, simultaneously can be by this this object to be coated of the second external drive equipment moving so that the distance between this surface of this sample and this object to be coated be variable.In the present invention, preferably, control the thickness of the solid cladding that deposits on this object to be coated and the uniform deposition of the gaseous phase that removes specimen material formation by the motion of this object to be coated, need not to change the parameter of this light beam, for example light beam power or beam diameter, wherein, this object to be coated has larger surface.Preferably, the motion of the variation of the light path of the motion of the motion of this coated object and this sample and this emission light beam is carried out simultaneously.Can remove rapidly like this surface of this sample, and apply the object with several square metres of sizes.In addition, this object to be coated also can be flat, as flat 3-D solid structure or or even a kind of flat continuous strip.
According to another preferred embodiment, be provided with a mask between this sample and this object to be coated.This mask can be arranged on the load-carrying unit with the form fixing with respect to this object to be coated.Preferably, this mask is set to pivotable, that is to say that the position of this mask can change.This pivot preferably carries out around an axle, and this axle is extending with the perpendicular direction of the horizontal surface of this mask, and this axle can have arbitrarily direction.Preferably, this mask has at least one opening, and this opening can be so that this gaseous phase of this sample can be deposited on the geometrical shape of this opening on this object to be coated.Be also contemplated that this mask has a lot of these openings, those openings have different geometries.In addition, be also contemplated that this mask is set to: can change this mask with respect to the position of this object to be applied by guidance system, this guidance system such as the form of track.
The source of radiation that relates to of this device can be a lasing source, a high energy electron irradiation source or a high-energy neutron source of radiation or a plasma source in the present invention, this lasing source preferably can produce a pulsed laser beam, more preferably produces a femtosecond pulse light beam.
In addition, be also contemplated that a more than light beam is used to remove the surface of this sample.This can realize in the following manner, for example says, multiple source of radiation emission can change the ray of light path, realizes by beam splitter that perhaps this beam splitter is dispersed at least twice secondary beam with original emission light beam.For instance, four road shape of cross sections and vary in size light beam can all can be moved by the light path of the deflection of direction transformation equipment and those light beams, can remove simultaneously thus four parts of a sample, those parts of this sample have different shapes and/or material forms.Can save time so on the one hand, and can control on the other hand the composition of the solid cladding that deposits.
Below, the present invention will and be described in detail by reference to the accompanying drawings by a preferred embodiment, and accompanying drawing is as follows.
Description of drawings
Fig. 1 is the sectional view of device of the present invention.
Fig. 2 is the partial schematic diagram of device of the present invention shown in Figure 1.
Fig. 3 is the synoptic diagram of laser motion.
Fig. 4 is the synoptic diagram of another move mode of laser in the method described in the present invention and sample.
Fig. 5 a is the sectional view of the moveable part of this sample.
Fig. 5 b is another sectional view of the moveable part of this sample.
Fig. 6 a-6d is the synoptic diagram of the geometrical shape of this sample.
Fig. 7 a-7c is the synoptic diagram of solid cladding.
Fig. 8 a-8b is the synoptic diagram of the cross section of large-sized sample surfaces.
Fig. 8 c is the synoptic diagram of large-sized sample surfaces.
Embodiment
Be illustrated in figure 1 as the device 23 in one embodiment of the invention.Be arranged on a source of radiation 2 of vacuum chamber 26 outsides, this source of radiation 2 can be a lasing source, and this source of radiation 2 preferably can be launched the femtosecond pulse light beam.Preferably, be arranged on a direction transformation equipment 24 of these vacuum chamber 26 outsides, and this direction conversion equipment 24 is arranged on the x direction of principal axis of the light path of launching light beam 8.This direction conversion equipment 24 preferably comprises at least one mirror, twin shaft galvanometer mirror particularly, be used for making this emission light beam 8 deflections, at least one is used for focusing and/or the equipment that defocuses and an equipment (not shown) that is used for disperseing this light beam 8.This light beam 8 is passed at least one optical window 40 on this vacuum chamber 26 in the further light path on the x direction of principal axis, be low pressure in this vacuum chamber 26, preferably be vacuum, this vacuum chamber 26 is realized vacuum and is kept vacuum state by an air pump equipment 30.In addition, a sample 4 is arranged in this vacuum chamber 26, removably by a sample plummer 42 carryings, this sample 4 preferably comprises among the distinct portions 6(figure and not showing this sample).This sample plummer 42 links to each other via a liner with one first external drive equipment 28 by a sample bearing support 43, can set the angle of inclination, space of sample 4 thus.In addition, one object 12 to be coated is arranged in this vacuum chamber 26 equally, and this object 12 to be coated can pass through 32 deflections of one second external drive equipment, and the motion of this object 12 to be coated preferably is linear, and is for example vertical with respect to this sample 4 or move horizontally.In addition, the surface 16 of this sample 4 and the distance between the object to be coated 12 also can arrange by this second external drive equipment 32, so that this distance is variable at the z direction of principal axis.This light beam 8 is radiated on the surface 16 of sample 4, and is gaseous phase 10 with the solid sample material converting, and forms the gaseous material cloud.When removing the surface 16 of this sample 4, this sample 4 is also moving simultaneously, and simultaneously one so that the light path of this emission light beam 8 is orientated the motion of change is also carrying out.In the situation of as shown in Figure 1 example, in removing process this sample form one discoid, and around the central shaft rotation of this disk, this central shaft is perpendicular to the surface 16 of this sample 4, and passes the central point Z on the surface 16 of this sample 4.Simultaneously, the orientation of the light path of this emission light beam mode with level of linearity on the original beam path changes, this light beam 8 has entered the xy plane with respect to its original beam path from the deflection of x direction of principal axis in other words, and has described the mobile route X of this light beam 8 on the surface 16 of this sample 4.The length of this mobile route X is preferably the diameter of this sample 4, and the length of this mobile route X is preferably passed through the central point Z extension on the surface 16 of this sample 4 in the situation of a disk shaped samples of rotating.Removing of the surface 16 of this sample 4 is to realize in a kind of high-octane mode, that is to say that solid particulate has been accelerated in this sample 4 is converted to the process of gaseous phase 10, thereby and is deposited on the object 12 to be coated and becomes solid cladding 14.This solid cladding 14 for example is that a monoatomic layer, a thickness are several microns layer or a composite bed, and this composite bed has comprised the different coating of multiple material component.In addition, because the part 6 of this sample 4 is removed, can realize the deposition a kind of part, limited of gaseous material composition 10 on object 12 to be coated within the extremely short time, this deposition preferably is isolated island form.For example this can be used for producing stair-stepping solid cladding 14, and this solid cladding 14 is done as a whole, and its thickness aspect remains thin equably.
In addition, the spatial orientation of this sample 4 changes in the process that the surface 16 of this sample 4 is removed by this emission light beam 8, and preferably the change of this spatial orientation changes with the form at angle of inclination, space.The angle of inclination, space of this sample 4 can be understood as, pass this sample 4 this surface 16 this central point Z and and the z axle of the axle of the Surface Vertical of this sample 4 and system of coordinates between angle.The space that this means this sample surfaces 16 tilt to be simultaneously on xz plane and yz plane.When the surface 16 with 8 pairs of these samples 4 of this emission light beam removes, this sample plummer 42 is used for accepting and fixing this sample 4, for example fix this sample 4 by the mode that is spirally connected or by extension spring, the mode that preferably adapts with the geometrical shape with this sample 4 fixes this sample 4.One first end of this sample plummer 42 and these the first external drive equipment 28 separated sample bearing supports 43 is arranged on this sample plummer 42 away from a side of this sample.The second end of this sample carriers support 43 is a liner, and a kind of ball and socket joint for example, this liner can insert in the corresponding recess of a shape in this first peripheral equipment 28.Can change this angle of inclination, space of this sample by this liner, this liner preferably is electrically driven (operated).It also is feasible that this liner directly is located between this sample plummer 42 and this sample bearing support 43, as long as this sample bearing support 43 its position keep motionless in, this angle of inclination, space of this sample plummer 42 and this sample 4 can change and gets final product.This liner can also design in several ways.Preferably, the variation at this angle of inclination, space should with this sample 4 rotatablely move or motion of translation is carried out simultaneously.In order to deposit at this object 12 to be coated the solid cladding of an even thickness, by changing the angle of inclination, space of this sample 4, this gaseous material cloud 10 can be aimed at the different zones of this object 12 to be coated.Therefore, this sample and this object to be coated need not to adopt relative to each other a default fixed orientation.
This vacuum chamber 26 comprises at least one additional outside entrance 36, and by this outside entrance 36, for example gas or gaseous mixture can be introduced into this vacuum chamber 26, is used for being manufactured on this solid cladding 14 on this object 12 to be coated.By introducing reactant gases, for example oxygen enters this vacuum chamber 26, also can allow this gaseous phase 10 of this reactant gases and this sample 4 that chemical reaction occurs, and can allow thus the chemical constitution of new formation can be deposited at least in part on this object 12 to be coated.In order further to improve or accelerate this reaction, this gas can be activated separately, and the activation form is for example with the form that is separated into plasma body of this gas atom.
As shown in Figure 2, also have another mode, at least one extra fixing and/or mask 34 movably namely is set, this mask 34 is with at least one opening 38.This opening 38 can for circular or corner angle are arranged, preferably be the form of slit.In addition, a plurality of openings 38 can be set also, those openings 38 preferably have different geometrical shapies.It can be feasible around axle revolution that this mask 34 is set to, this axle extends in the direction perpendicular to this horizontal surface of this mask 34, preferably, this axle passes a jiao of this mask 34, can be fixed in a frame-type system in an interchangeable form this mask 34 and/or (not shown) on the guide rail shape guidance system by screw thus, this guide rail shape guidance system preferably be the form of slide rail.This can make local deposits that this gaseous phase 10 of this sample 4 can be extra on this object 12 to be coated.When making circuit, this is especially beneficial for control engineering and automatic control engineering.In addition, it also is feasible that a plurality of masks 34 are set, this mask is provided with opening 38 at different positions, preferably, these masks are alternately introduced when this sample 4 is this gaseous state 10, the geometrical shape of the solid cladding 14 of this deposition just can not be limited to single coating or have the coating of gradient thus, but possesses complex construction, for example the coating of circuit.
Fig. 3 is for removing in the step this light beam 8 with respect to the change synoptic diagram of a light path rotatable setting, disk shaped samples 4 at this, this sample 4 comprises different piece 6a and the 6b that class is fan-shaped, part 6a comprises a materials A, and the component of materials A is different from the material B that part 6b comprises.This light beam 8 is radiated at the L1 position on the surface 16 of this sample 4, this light path changes to along direction L and by position L2 and L3 with a linear mode, meanwhile this sample 4 is in rotation, preferably, this sample 4 passes the central point Z on surface 16 of this sample 4 and the axle rotation vertical with the surface 16 of this sample 4 around one.With respect to the movement velocity of this sample 4 in the very fast situation, this movement has formed this mobile route X of this light beam 8 on this surface 16 in the change speed of this light path of this light beam 8.Preferably, this mobile route X extends to the whole diameter of this sample 4.In addition, this mobile route X also can for example be orientated along a predeterminable range on radial orientation on this surface 16 of this sample 4 or this surface 16 at this sample 4.In addition, rotation for this sample 4, the composition of this gaseous phase 10 is that length and the path of this mobile route X of basis on this surface 16 of this sample 4 arranges, and the composition of this gaseous phase 10 has also determined the composition of the solid cladding 14 of this deposition.
Fig. 4 a shows the surface 16 of a Polygons sample 4, and this sample for example is a cubes sample, and this surface 16 of this sample 4 is divided into distinct portions 6a-6c.Each independently part 6a, 6b and 6c all formed by different materials, preferably be pure substance and/or mixture.In Fig. 4 a, schematically shown the variation of this light path of this emission light beam 8, for example occurred in the motion of translation on the horizontal direction L, the motion of translation of this sample 4 of simultaneous on this vertical direction P.Therefore, only have at the beginning two parts of 6a and 6b to be removed, along with this light beam 8 and the 4 simultaneous further motion of translation of this sample, part 6c also has been removed.The motion of this sample 4 and this light beam 8 constantly repeats until the thickness that deposits and composition have reached thickness and the composition of target coating.Shown this sequence of motion among the skeleton view 4b.If the pace of change of this light beam 8 of the velocity ratio of the motion of translation of this sample 4 is slow, preferably, the material that wire will occur removes.Preferably, this sample 4 is vertical movement, and the change campaign of the light path of this light beam 8 is levels.Particularly preferably, in the situation of the sample that uses the Polygons geometrical shape, the cross section of this light beam 8 is not round.For instance, the beam cross-section that the angle is obviously arranged is favourable, because this cross section can be adjusted accurately by existing method like this, and removes specimen material equably.Linearity at the sample 4 that the angle is arranged removes in the process, and circular beam cross-section can be overlapping with this mobile route X.The motion of this sample 4 is best to be adapted to mutually with this light beam 8, does not have like this deviation on the material interface of various piece 6.
Fig. 5 a shows a cross section that comprises the discoid sample 4 of part 6a and part 6b.If, suppose that this source of radiation 2 is a pulse nanosecond laser, removing of part 6a and part 6b is to rely on material, for example says that removing speed in the materials A of part 6a is actually faster than the removing speed in the material B of 6b part.In this case, the thickness of part 6a reduce must be than part 6b fast.Part 6a and part 6b thickness difference between the two will cause not wishing the hatching effect that occurs like this in continuous removing in the step, will causing a deposition that reduces of the gas phase 10 on this object 12 to be coated.Therefore, device 23 of the present invention preferably has at least one and movably rushes tool (Stempel) 44, this rushes tool 44 can be in mobile its initial position of travel direction F, and in the process of the movement on travel direction F, this rushes at least a portion 6 that tool 44 moves this sample 4.Preferably, rush tool 44 and this sample plummer 42 relation is set is such: this rushes tool 44 can be mobile at travel direction F, and this motion of rushing tool 44 is perpendicular to this surface 16 of this sample 4.Preferably, each part 6 of this sample 4 has one movably to rush tool 44, and this rushes tool 44 with a smooth at least part of bottom surface that has covered this part 6 of this sample 4 of mode.In addition, in order to promote this bottom surface of this part 6 of this sample 4 with one perpendicular to the mode on this surface 16 of this sample 4 on this travel direction F from the zero position of rushing tool 44, this is removable, and to rush that tool 44 only contacts with this bottom surface point of this part 6 of this sample 4 also be feasible.All have that part 6 that same material forms promoted simultaneously also is feasible.This motion of rushing tool 44 is preferably carried out simultaneously with the change campaign of the light path of the motion of the sample 4 that carries out simultaneously and emission light beam 8, and preferably, the lifting of this part 6 of this sample 4 that is removed by rapid moving, this sentences this 6a and partly is example, removing in the process of this surface 16 at this sample 4 repeats continuously, thus, and shown in Fig. 5 b, by the part of being removed by rapid moving is moved, can guarantee that the surface properties at arbitrary this sample 4 of the time point that removes is consistent.
Fig. 6 show shown in an example of this sample 4 in the technique, this sample 4 provides a more excellent substrate for uniform solid cladding 14.This sample 4 shown in Fig. 6 have a circle, disk-like structure, this sample 4 includes three distinct portions 6a, 6b and 6c, and part 6a comprises materials A, and part 6b comprises material B, part 6c comprises material C, and these materials are all not identical on forming each other.Part 6a and part 6b to be shaped as class fan-shaped, and part 6a and part 6b are adjacent with circular part 6c.Such setting only is that of a sample geometrical shape gives an example.It also is feasible a plurality of different pieces 6 of this sample 4 being arranged on side by side continuously on this surface 16 of this sample 4.Because the increase of these sample 4 diameters, the material that removes has also increased, and the volume of this gaseous phase 10 has also increased in this process thus, and this just becomes possibility so that apply large sized object 12.Have a geometrical shape with the angle at the schematic sample 4 shown in Fig. 6 b, and comprise 6a, 6b and the several parts of 6c, similarly, these several parts are different on material forms.In addition, the three-dimensional design of this sample 4 can be, for example is divided into the cylindric or shaft-like sample 4 of different piece 6, and various piece has comprised various material (Fig. 6 c) equally.In addition, the geometrical shape of sample also can have the angle, be preferably cubes or rectangular parallelepiped, those distinct portions 6 of this sample 4 can be preferably be formed on this surface 16 abreast with the form of layering, particularly preferably form with the zone perpendicular to this surface 16 of this sample 4, and these zones are at least part of penetrates in this samples 4 (Fig. 6 d).In addition, on inner or surface 14 spiral helicine part 6 being set also is feasible (not shown).In addition, if used large-sized sample 4, then adopt the beam splitter can be more favourable, this beam splitter carries out simultaneously material and removes to realize this in order to will launch beam separation on a plurality of positions of sample 4.Therefore, the present invention can evenly and rapidly be coated in solid cladding 14 on large-sized object 12.
Fig. 7 a show the light path of this emission light beam 8 in the situation that the travel direction L of a level changes in the middle of this object 12(to be coated is seeing) on the sectional view of solid cladding 14 of an exemplary deposition.If, suppose, one circle, the view on the sample 4(left side of plate-like) arranges in the mode that can rotate around an axle along direction of arrow R, this sample comprises that one has the part 6a of material composition A and has the part 6b that is made of B material, for example, the shape of these two parts is set to complete concentric(al) circles or semicircle, this axle is perpendicular to this surface 16 of this sample 4 and pass the central point Z on this surface 16 of this sample 4, removing by the emission of light 8 of horizontal direction of this surface 16 realizes simultaneously the materials A of part 6a and the material B of part 6b are changed into this gaseous phase 10, preferably, the travel direction of this emission light beam 8 passes this central point Z on this surface 16 of this sample 4.Like this, has A
xB
yThe top layer 7a of the solid cladding 14 that forms is deposited on this object 12 to be coated.Whole chemical formula A
xB
yIn subscript index x and y represented respectively materials A and the atomicity of material B in molecule, and atomicity is variable in the present invention, the difference that is preferably according to coating changes.Through the process that removes that continues, the thickness of this solid cladding 14 and other parameters just together have been set.View on the right of for example adopting among rectangle sample 4(Fig. 7 a) also can form a similar solid cladding 14, this sample 4 in the vertical direction P is gone up mobile and has also been comprised a part of 6a with materials A and a part of 6b with material B, this part 6a and this part 6b are rectangular, each part is corresponding to half of this whole sample surfaces 16, and the vertical setting adjacent one another are of these two parts.
The solid cladding 14(that Fig. 7 b shows an exemplary multilayer sees middle) sectional view.The view on one sample 4(left side circle, plate-like) this surface 16 is divided into four zones, represent with part 6a, 6b and 6c respectively, center on an axle when direction of arrow R rotates at this sample 4, this light path of this emission light beam 8 changes in the horizontal direction, at first remove thus and comprise the part 6a of materials A and the part 6b that comprises material B on this surface, wherein, this axle is perpendicular to this surface 16 of this sample 4 and pass this central point Z on this surface 16 of this sample 4.This means that materials A and material B are converted into gaseous phase 10 simultaneously, and with A
mB
nComposition be deposited on this object 12 to be coated as one first coating 7b whole chemical formula A
mB
nSubscript exponent m and n represented respectively materials A and the atomicity of material B in molecule.The material ratio of materials A and material B can be set by the method among the present invention.In ensuing rotation, remove two mutual opposed part 6c and material C and also therefore transform for gaseous phase 10.This first coating 7b that this gaseous phase 10 of this material C is deposited on this object 12 to be sprayed is upper as one second coating 7c.In the further process of present method, described step constantly repeats, and the structure of such multilayer just has been produced out, and the structure of this multilayer is by the transformable A that forms
mB
nAnd the alternately laminated formation of composition C.Adopt for example view on rectangle sample 4(the right) can access a similar coating sequence, in this vertical direction of arrow P movement, and those parts 6a, 6b and 6c are shown in Fig. 7 b when these emission of light 8 levels change for this rectangle sample 4.The thickness of this coating can be set by method of the present invention.
Fig. 7 c shows the sectional view (in the middle of seeing) as a solid cladding 14 with a composite multi-layer system.If separate in the following manner the view on the 16(left side, this surface of this disk shaped samples 4): it is 90 ° four part 6a and 6b and part 6a and part 6b is arranged alternately and directly be close to part 6c that this surface 16 is divided into central angle, this part 6c is the circle take this central point Z on this surface 16 of this sample 4 as the center of circle, then rotate in the situation of this sample 4 when this light path level of this emission light beam 8 changes, this part 6b and part 6c at first are removed.This means that the material C of the material B of part 6b and part 6c is converted for gaseous phase 10, and with B
oC
pComposition be deposited on this object 12 to be coated as one first coating 7e, at whole chemical formula B
oC
pIn subscript index o and the p atomicity that represented respectively material B in the molecule and material C, this atomicity can be different along with the difference of coating.In further rotating, the material C of the materials A of part 6a and part 6c is removed and transforms for gaseous phase 10, and with A
rC
sThis first coating 7e of being deposited on this object 12 to be coated of composition upper as one second coating 7f, whole chemical formula A
rC
sIn subscript index r and the s atomicity that represented respectively materials A in the molecule and material C, this atom can count along with the difference of coating and change.In further rotating, repeat above-mentioned steps, until obtain a multilayer system, this multilayer system has by forming A
rC
sWith composition B
oC
pThe a plurality of coatings that consist of wherein, represent materials A among the composition ArCs of this solid cladding 14 and the atomicity and the composition B that represents this solid cladding 14 of material B
oC
pIn material B and the atomicity of material C can be different.Adopt the view on rectangle sample 4(the right) also can access a similar coating sequence of this solid cladding 14, this sample 4 moves along vertical direction of motion P, should launch in the horizontal direction upper deflecting of light beam 8 simultaneously.The sample 4 of this rectangle comprises three kinds of different material part 6a, 6b and 6c, wherein, and the part 6a of rectangle and 6b horizontal alignment and arrange adjacent to each other, and all occupy the sixth of sample surfaces 16.This part 6c and part 6a and the equal direct neighbor of part 6b, vertical orientated and cover the whole width B of this rectangle sample 4, and occupied 1/3rd of this sample surfaces 16.Last 1/ 3rd rectangle part 6a and 6b by two formed objects of this sample surface 16 form, and rectangle part 6a and 6b relative to each other are horizontally disposed with.In this case, this part 6a and 6c at first are removed and change into gaseous phase 10, and are deposited on this object 12 to be coated as one first coating 7e.In further moving process, this part 6b and 6c have been removed, and it is upper as one second coating 7f to be deposited on this first coating 7e of this object 12 to be coated.For example, the coating sequence of the setting of the coat-thickness of each independent coating 7 and whole solid cladding 14, translational speed that can be by this emission light beam 8 is set or the translational speed of this sample 4 perhaps also can be set by the sample area that this light beam shines.In addition, the individual layer that this geometrical shape that can be by those parts 6 or this emission light beam 8 deposit the length and location setting of this lip-deep mobile route X of this sample 4 and/or the material ratio in the multi-layer solid coating 14.
Fig. 8 a schematically shows at specimen material and is converted in the process of gaseous phase 10, one sample 4 along the cross section (view on the left side) of the section line A-A of the circular sample shown in Fig. 7 c or a sample 4 along the cross section (view on the right) of the section line B-B of the rectangle sample shown in Fig. 7 c, this gaseous phase 10 is tapered disseminating preferably, and be deposited on this object 12 to be coated as solid cladding 14.In this case, the light path of this emission light beam 8 is the (not shown)s that change in the horizontal direction.Can find out that from the sectional view that Fig. 8 a and Fig. 8 b exemplarily illustrate the size of this sample 4 has determined the size of this solid cladding 14, the size of this solid cladding 14 represents with length or the diameter of this solid cladding, in other words, this surface 16 of this sample 4 is larger, but the deposition region of this object 12 to be coated is larger.Therefore the method can adapt with the size of this object 12.Fig. 8 b shows at specimen material and is converted in the process of gaseous phase 10, one sample 4 along such as the cross section (view on the left side) of the section line C-C of the circular sample 4 among Fig. 8 c or a sample 4 along the cross section (view on the right) such as the section line D-D of the rectangle sample 4 among Fig. 8 c, this gaseous phase 10 is tapered disseminating preferably, and be deposited on this object 12 to be coated as a solid cladding 14, wherein, the light path of this emission light beam 8 is that level changes.Have benefited from this larger surface 16 and also can be split into different material parts 6, so that become possibility in the even distribution of larger object 12 formation materials compositions and thickness.For illustrated succinct, this object to be coated and this sample surfaces 16 are mutually over against setting in Fig. 8 a and 8b.But this sample 4 and this object 12 relative positions to be coated also can arrange by angle-adjustable.
In addition, what need consideration is that the pace of change of this light path of the translational speed of this sample 4 and this emission light beam 8 can equate on the one hand in removing process, but also can be different.Therefore, for example say that the speed of rotation that makes this sample 4 is feasible much larger than the pace of change of this light path of this light beam 8.If this is the case, this mobile route X on this surface 16 of this sample 4 can adopt spiral helicine.Because the difference of the movement velocity of this sample 4 and this light beam 8, meeting so that this mobile route X on this surface 16 of this sample 4 be affected.
All features of mentioning in this application file all are necessary technical characterictics for the present invention, as long as the combination of each feature or each feature is to have novelty and creationary for prior art.
List of numerals:
2 source of radiation
4 samples
6 sample parts
6a comprises the sample part of materials A
6b comprises the sample part of material B
6c comprises the sample part of material C
6d comprises the sample part of material D
The coating of 7 solid claddings
8 light beams
10 gaseous phases
12 objects to be coated
14 solid claddings
The surface of 16 samples
The angle of inclination, space of 18b sample
23 devices
24 direction transformation equipment
26 vacuum chambers
28 first external drive equipment
30 pumping units
32 second external drive equipment
34 masks
36 outside entrances
The opening of 38 masks
40 optical windows
42 sample plummers
43 sample bearing supports
44 rush tool
The vertical movement direction of P sample
The vertical movement direction of L light beam
F rushes the direction of motion of tool
The X-ray bundle is at the mobile route on the surface of sample
The central point on the surface of Z sample
Rotatablely moving of R sample
B has the width of the sample at angle
Claims (15)
1. one kind is passed through at least one source of radiation (2), a lasing source particularly, one solid cladding (14) is coated in method on the object to be coated (12), the method comprises that at least one removes step, this removes a plurality of parts (6) that at least one light beam (8) of step by this source of radiation (2) emission will be in a sample (4) of solid state and removes that this sample (4) is converted into a gaseous phase (10) at least in part, thus so that this gaseous phase (10) is deposited on this object to be coated (12) at least in part upward to form a solid cladding (14), the at least part of difference of those parts (6) wherein, it is characterized in that, remove in the step at this, change the orientation of a light path of this emission light beam (8), simultaneously mobile this sample (4).
2. the method for claim 1, it is characterized in that, the motion of orientation that changes this light path of this emission light beam (8) is independent of the motion of this sample (4), perhaps changes the motion of orientation of this light path of this emission light beam (8) based on the motion of this sample (4).
3. such as claim 1 and 2 described methods, it is characterized in that, the orientation of this light path of this light beam (8) changes by this way: this light beam (8) produces a motion of translation on a surface (16) of this sample (4), and the surface (16) of this sample (4) is crossing with this light path of this emission light beam (8).
4. the method described in claim 1-3, it is characterized in that, this light beam (8) exposes on this surface (16) of this sample (4) with a predetermined angle, the surface (16) of this sample (4) is crossing with this light path of this emission light beam (8), and this sample (8) is preferably around central shaft rotation simultaneously.
5. such as the described method of any one in the aforementioned claim, it is characterized in that, light beam presets angular illumination on this surface (16) of this sample (4) with one, the surface of this sample (16) is crossing with this light path of this emission light beam (8), a position of this sample (4) changes in a direction simultaneously, and this direction preferably is the bearing of trend perpendicular to the optical path direction of this light beam (8).
6. such as the described method of any one in the aforementioned claim, it is characterized in that different those parts (6) of this sample (4) are comprised of differing materials.
7. method as claimed in claim 6 is characterized in that, the material of those parts (6) of this sample (4) is homogeneous composition, particularly pure substance, metal and/or such as oxide compound, hydride or halid nonmetallic compound.
8. such as the described method of any one in the aforementioned claim, it is characterized in that different those parts (6) of this sample (4) are a plurality of coatings and/or are located at side by side this lip-deep a plurality of zones.
9. such as the described method of any one in the aforementioned claim, it is characterized in that, remove in the step at this, different those parts (6) of this sample (4) are perpendicular to this surface (16) motion of this sample (4), and different those parts (6) of this sample (4) are preferably moved perpendicular to this surface (16) of this sample (4) individually.
10. one kind is passed through at least one source of radiation (2), a lasing source particularly, solid cladding (14) is coated on device on the object to be coated (12), and this device comprises a direction transformation equipment (24), a vacuum chamber (26) and an external drive equipment (28); This direction changeable device is used for changing this light path of this emission light beam (8); Be provided with a sample (4) in this vacuum chamber (26), this sample (4) comprises at least part of different a plurality of parts (6); This surface (16) of this sample (4) can be removed by this light beam (8); This external drive equipment (28) is used for making this sample (4) motion; It is characterized in that the orientation of this light path of this light beam (8) is movably, this sample (4) also is movably simultaneously.
11. device as claimed in claim 11, it is characterized in that, this direction conversion equipment (24) that is used for this light path of this emission light beam (8) of change comprises at least one mirror and/or at least one beam expander and/or at least one focus set, this mirror is preferably a galvanometer mirror, this beam expander is preferably a prism, and this focus set is preferably lens.
12., it is characterized in that different those parts (6) of this sample (4) are a plurality of coatings and/or a plurality of zones of being arranged side by side such as claim 10 and 11 described devices.
13., it is characterized in that the geometry of this sample (4) is a 3-D solid structure such as the described device of claim 11-12.
14. such as the described device of claim 11-13, it is characterized in that, this object to be coated (12) rotates around a central shaft by one second external drive equipment (32), this object to be coated (12) preferably is arranged at least one position, thus this object to be coated (12) can perpendicular to and/or be parallel to the wall motion of this vacuum chamber (26).
15. the device described in claim 11-14 is characterized in that, between this sample (4) and this object to be coated (12) with a fixed form and/or with one movably mode at least one mask (34) is set.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102010021444.2 | 2010-05-25 | ||
| DE102010021444.2A DE102010021444B4 (en) | 2010-05-25 | 2010-05-25 | Methods and apparatus for applying solid layers |
| PCT/EP2011/058101 WO2011147730A1 (en) | 2010-05-25 | 2011-05-19 | Process and apparatus for the application of solid layers |
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| CN102985586A true CN102985586A (en) | 2013-03-20 |
| CN102985586B CN102985586B (en) | 2014-12-03 |
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| Country | Link |
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| US (1) | US9441297B2 (en) |
| EP (1) | EP2576855B1 (en) |
| CN (1) | CN102985586B (en) |
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| WO (1) | WO2011147730A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103668085A (en) * | 2013-11-29 | 2014-03-26 | 武汉理工大学 | PLD (pulse laser deposition) device |
| CN106756991A (en) * | 2016-11-22 | 2017-05-31 | 浙江工业大学 | A kind of laser reinforcing coating equipment |
| CN106756992A (en) * | 2016-11-22 | 2017-05-31 | 浙江工业大学 | A kind of lens type laser reinforcing coating unit |
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| CN106756991A (en) * | 2016-11-22 | 2017-05-31 | 浙江工业大学 | A kind of laser reinforcing coating equipment |
| CN106756992A (en) * | 2016-11-22 | 2017-05-31 | 浙江工业大学 | A kind of lens type laser reinforcing coating unit |
| CN106756991B (en) * | 2016-11-22 | 2019-05-24 | 浙江工业大学 | A kind of laser reinforcing coating equipment |
| CN106756992B (en) * | 2016-11-22 | 2019-05-24 | 浙江工业大学 | A kind of lens type laser reinforcing coating unit |
Also Published As
| Publication number | Publication date |
|---|---|
| DE102010021444B4 (en) | 2017-08-24 |
| CN102985586B (en) | 2014-12-03 |
| US9441297B2 (en) | 2016-09-13 |
| US20130149470A1 (en) | 2013-06-13 |
| WO2011147730A1 (en) | 2011-12-01 |
| DE102010021444A1 (en) | 2011-12-01 |
| EP2576855B1 (en) | 2016-03-02 |
| EP2576855A1 (en) | 2013-04-10 |
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