CN102978707A - Processing method for effectively stopping blocking of tail gas tube of diffusion furnace tube - Google Patents
Processing method for effectively stopping blocking of tail gas tube of diffusion furnace tube Download PDFInfo
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- CN102978707A CN102978707A CN201210490555XA CN201210490555A CN102978707A CN 102978707 A CN102978707 A CN 102978707A CN 201210490555X A CN201210490555X A CN 201210490555XA CN 201210490555 A CN201210490555 A CN 201210490555A CN 102978707 A CN102978707 A CN 102978707A
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Abstract
The invention discloses a processing method for effectively stopping blocking of a tail gas tube of a diffusion furnace tube. The processing method disclosed by the invention sequentially comprises the processes of: warming, normally communicating a source, stopping source communicating, communicating the source normally and repeatedly and stopping source communicating for three to five times and cooling, so that the whole source communicating process time is consistent with that of the original process, and expected saturation effect is achieved. The processing method disclosed by the invention has the beneficial effects that the problem that the tail gas tube is blocked is effectively solved, dangers such as explosion, crack and gas escape which are caused as the internal pressure of the furnace tube is too high after the diffusion tail gas tube is blocked can be also solved, and the expected saturation effect is achieved.
Description
Technical field
The present invention relates to the solar battery sheet manufacture technology field, specifically a kind for the treatment of process of effectively stopping the obstruction of diffusion furnace tube offgas duct.
Background technology
For the diffusion furnace tube of new installation or the diffusion furnace tube that has just maintained, all can carry out first saturation process, carry out again normal production technique.Its objective is Quartz stove tube is carried out pre-treatment, the one, purge inner impurity, the 2nd, saturated boiler tube.The waste gas that produces in the technological process comprises phosphorus oxychloride, metaphosphoric acid, Vanadium Pentoxide in FLAKES etc., directly discharges by offgas duct, does not affect diffusion when making normal production.But new boiler tube or the boiler tube that has just maintained, offgas duct does not have preheating, and temperature is lower, and waste gas can enter the condensation of offgas duct place at the fresh baked pipe, and tail gas can't be got rid of, and phenomenon results in blockage.
Summary of the invention
The problem to be solved in the present invention provides a kind for the treatment of process that the diffusion furnace tube offgas duct is stopped up of effectively stopping, solve new boiler tube or the boiler tube that just maintained in the problem of using the starting stage offgas duct to stop up.
In order to solve the problems of the technologies described above, technical solution provided by the invention is: the first step is carried out temperature-rise period, and temperature is increased to 950 ± 5 ℃, passes into simultaneously oxygen and large nitrogen, gas flow is respectively 800 ± 100sccm and 15 ± 0.2L, and the time that temperature-rise period needs is 17 ± 2min; The second step temperature is carried out normal TongYuan after being increased to assigned temperature, pass into simultaneously little nitrogen and large nitrogen, the gas flow of little nitrogen is 1100～1500sccm, the gas flow of large nitrogen is 5 ± 0.2L, TongYuan's time is 18～24min, and the 3rd step stopped TongYuan, passed into simultaneously oxygen and nitrogen, the gas flow of oxygen is 800 ± 100sccm, and the overall gas flow of nitrogen is 6.1～7.5L; The 4th step repeated the second and the 3rd technological process that goes on foot three to five times, directly continued TongYuan again, made the whole TongYuan process time keep consistent with original technique, and TongYuan's process time is 3～4h, and effect reaches capacity.
The invention has the beneficial effects as follows the problem that effective solution offgas duct is stopped up, solved simultaneously and caused the boiler tube internal pressure excessive after the diffusion tails tracheae stops up, occur bursting, the danger such as gas leak, and reach equally pretreated saturation effect.
Embodiment
The below is described in further detail technical scheme of the present invention.
The treatment process process of effectively stopping the obstruction of diffusion furnace tube offgas duct in the present embodiment is as follows:
1. at first diffusion furnace is heated up, temperature rises to 950 ℃, and the heating-up time is 17min, and the gas flow of the oxygen that passes into is 850sccm, and the gas flow of large nitrogen is 15L.
2. diffusion furnace tube is carried out normal TongYuan, the gas flow that passes into simultaneously little nitrogen is 1200sccm, and the gas flow of large nitrogen is 5L, and TongYuan's time is 20min.
3. stop TongYuan's process, pass into simultaneously oxygen and nitrogen, wherein the gas flow of oxygen is 850sccm, and the overall gas flow of nitrogen is 6.2L, and the time length is 50min.
4. repeat the technological process three times of above-mentioned steps 2 and step 3, namely finish the saturated treating processes of diffusion furnace tube.
Result on trial proves behind many experiments, and the treatment effect of diffusion furnace tube is relatively good, does not substantially find the effect that offgas duct is stopped up, and reaches equally pretreated saturation effect.
Claims (6)
1. effectively stop the treatment process that the diffusion furnace tube offgas duct is stopped up for one kind, it is characterized in that: this treatment process is passed through successively intensification, normal TongYuan, is stopped TongYuan, repeats normal TongYuan and stop TongYuan's process and temperature-fall period, make the whole TongYuan process time keep consistent with original technique, reach the saturation effect of expection.
2. according to claim 1ly effectively stop the treatment process that the diffusion furnace tube offgas duct is stopped up, it is characterized in that: in the temperature-rise period, temperature is increased to 950 ± 5 ℃, pass into simultaneously oxygen and large nitrogen, gas flow is respectively 800 ± 100sccm and 15 ± 0.2L, and the time that temperature-rise period needs is 17 ± 2min.
3. according to claim 1ly effectively stop the treatment process that the diffusion furnace tube offgas duct is stopped up, it is characterized in that: temperature is carried out normal TongYuan after being increased to assigned temperature, pass into simultaneously little nitrogen and large nitrogen, the gas flow of little nitrogen is 1100～1500sccm, the gas flow of large nitrogen is 5 ± 0.2L, and TongYuan's time is 18～24min.
4. according to claim 1ly effectively stop the treatment process that the diffusion furnace tube offgas duct is stopped up, it is characterized in that: stop in TongYuan's process, pass into simultaneously oxygen and nitrogen, the gas flow of oxygen is 800 ± 100sccm, and the overall gas flow of nitrogen is 6.1～7.5L.
5. according to claim 1ly effectively stop the treatment process that the diffusion furnace tube offgas duct is stopped up, it is characterized in that: repeat normal TongYuan and stop the technological process three to five times of TongYuan, directly continue again TongYuan.
6. according to claim 1ly effectively stop the treatment process that the diffusion furnace tube offgas duct is stopped up, it is characterized in that: the whole TongYuan process time keeps consistent with original technique, and TongYuan's process time is 3～4h, and effect reaches capacity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210490555XA CN102978707A (en) | 2012-11-28 | 2012-11-28 | Processing method for effectively stopping blocking of tail gas tube of diffusion furnace tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201210490555XA CN102978707A (en) | 2012-11-28 | 2012-11-28 | Processing method for effectively stopping blocking of tail gas tube of diffusion furnace tube |
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| CN102978707A true CN102978707A (en) | 2013-03-20 |
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| CN201210490555XA Pending CN102978707A (en) | 2012-11-28 | 2012-11-28 | Processing method for effectively stopping blocking of tail gas tube of diffusion furnace tube |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103194801A (en) * | 2013-04-09 | 2013-07-10 | 英利能源（中国）有限公司 | Boron diffusion furnace tube tail gas treatment method and device |
| CN111883462A (en) * | 2020-07-29 | 2020-11-03 | 无锡尚德太阳能电力有限公司 | Method for monitoring blockage state of silicon solar cell diffusion tail gas quartz tube |
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| CN102157606A (en) * | 2010-12-30 | 2011-08-17 | 光为绿色新能源有限公司 | Diffusion method used for crystalline silicon solar battery |
| CN102280373A (en) * | 2011-09-13 | 2011-12-14 | 江阴鑫辉太阳能有限公司 | Diffusion method for preparing emitter of polycrystalline silicon solar battery |
| CN102569523A (en) * | 2012-02-09 | 2012-07-11 | 苏州盛康光伏科技有限公司 | Diffusion method for polycrystalline silicon solar photovoltaic cell silicon chip |
| CN102784775A (en) * | 2012-08-23 | 2012-11-21 | 英利能源（中国）有限公司 | Method for cleaning boron-diffusion furnace tubes |
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2012
- 2012-11-28 CN CN201210490555XA patent/CN102978707A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US6203623B1 (en) * | 1999-12-28 | 2001-03-20 | Ball Semiconductor, Inc. | Aerosol assisted chemical cleaning method |
| CN101406891A (en) * | 2007-10-09 | 2009-04-15 | 中芯国际集成电路制造(上海)有限公司 | Boiler tube dry-type cleaning method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103194801A (en) * | 2013-04-09 | 2013-07-10 | 英利能源（中国）有限公司 | Boron diffusion furnace tube tail gas treatment method and device |
| CN103194801B (en) * | 2013-04-09 | 2016-03-02 | 英利能源（中国）有限公司 | Boron diffusion furnace tube exhaust gas treating method and treatment facility |
| CN111883462A (en) * | 2020-07-29 | 2020-11-03 | 无锡尚德太阳能电力有限公司 | Method for monitoring blockage state of silicon solar cell diffusion tail gas quartz tube |
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Address after: The new warehouse Town Pinghu Road, Jiaxing City, 314206 children in Zhejiang Province Applicant after: ZHEJIANG FORTUNE ENERGY CO., LTD. Address before: The new warehouse Town Pinghu Road, Jiaxing City, 314206 children in Zhejiang Province Applicant before: Zhejiang Fortune Photovoltaic Co.,Ltd. |
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Free format text: CORRECT: APPLICANT; FROM: ZHEJIANG FORTUNE PHOTOVOLTAIC CO.,LTD. TO: ZHEJIANG HONGXI ENERGY CO., LTD. |
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Application publication date: 20130320 |