CN102978500A - High thermal conductivity microwave attenuation AlN-based composite material and preparation method thereof - Google Patents

High thermal conductivity microwave attenuation AlN-based composite material and preparation method thereof Download PDF

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CN102978500A
CN102978500A CN201210536786XA CN201210536786A CN102978500A CN 102978500 A CN102978500 A CN 102978500A CN 201210536786X A CN201210536786X A CN 201210536786XA CN 201210536786 A CN201210536786 A CN 201210536786A CN 102978500 A CN102978500 A CN 102978500A
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贾成厂
高鹏
张玉利
王江源
崔照雯
常宇宏
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University of Science and Technology Beijing USTB
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Abstract

一种高导热微波衰减AlN基复合材料及其制备方法,属于微波电子真空技术领域。本发明选取CNTs和W作为金属相,AlN为介质相,包括CNTs:(0.1-2.0)vol.%、W:(1.0-20.0)vol.%和AlN:(100-CNTs-W)vol.%。将CNTs、W粉和AlN粉按一定的体积比混合得到混合料;将混合料成形与烧结,得到CNTs/W/AlN复相微波吸收材料。材料的相对密度>98%,介电常数17~25,介电损耗角正切>0.04,在70kHz~1MHz范围内具有良好的吸波性能,特别适合制备微波电真空器件,应用于消极电子对抗和微波测量系统中。A high thermal conductivity microwave attenuation AlN-based composite material and a preparation method thereof belong to the field of microwave electronic vacuum technology. The present invention selects CNTs and W as the metal phase, and AlN as the dielectric phase, including CNTs: (0.1-2.0) vol.%, W: (1.0-20.0) vol.% and AlN: (100-CNTs-W) vol.% . CNTs, W powder and AlN powder are mixed according to a certain volume ratio to obtain a mixture; the mixture is formed and sintered to obtain a CNTs/W/AlN composite microwave absorbing material. The relative density of the material is >98%, the dielectric constant is 17~25, and the dielectric loss tangent is >0.04. It has good microwave absorption performance in the range of 70kHz~1MHz, and is especially suitable for the preparation of microwave electric vacuum devices, which are used in passive electronic countermeasures and Microwave measurement system.

Description

一种高导热微波衰减AlN基复合材料及其制备方法A high thermal conductivity microwave attenuation AlN-based composite material and its preparation method

技术领域 technical field

本发明涉及一种微波衰减器材料及制备方法,特别涉及一种应用于真空条件下的绿色环保微波衰减器材料及制备技术,具体地说是一种碳纳米管/钨/氮化铝(CNTs/W/AlN)复相微波吸收材料的制备方法,属于微波电子真空技术领域。 The present invention relates to a microwave attenuator material and its preparation method, in particular to a green environment-friendly microwave attenuator material and its preparation technology applied under vacuum conditions, specifically a carbon nanotube/tungsten/aluminum nitride (CNTs /W/AlN) composite phase microwave absorbing material and belongs to the field of microwave electron vacuum technology.

背景技术 Background technique

微波衰减材料广泛应用于微波电真空器件中,它对谐振腔和慢波结构等高频互作用电路进行加载,达到展宽频带、抑制振荡和消除其它非设计模式的作用。此外,微波衰减材料广泛应用于消极电子对抗中,地面重要的设施、空中的飞行器以及建造保密的微波隔离室等都需要大量使用微波衰减材料来防止对方的发现、跟踪和袭击。微波衰减材料在微波测量系统中,作为衰减器和负载也在波导和同轴线中得到广泛应用,被誉为电子系统的“心脏”。 Microwave attenuation materials are widely used in microwave electric vacuum devices. They load high-frequency interaction circuits such as resonant cavities and slow-wave structures to broaden the frequency band, suppress oscillation and eliminate other non-design modes. In addition, microwave attenuating materials are widely used in passive electronic countermeasures. Important facilities on the ground, aircraft in the air, and the construction of confidential microwave isolation rooms all require a large amount of microwave attenuating materials to prevent the opponent from discovering, tracking, and attacking. Microwave attenuating materials are widely used in microwave measurement systems as attenuators and loads in waveguides and coaxial cables, and are known as the "heart" of electronic systems.

目前,国内采用的电真空器件体吸收器材料主要是渗碳多孔氧化铝衰减陶瓷及BeO基复合衰减陶瓷。渗碳多孔氧化铝衰减陶瓷由于放气量大,强度较低,衰减相分布不均匀,渗碳成品率较低,多孔结构使之热导率低下,对大功率管的使用造成了一定障碍;BeO的毒性使BeO基复合衰减陶瓷的安全防护难以达到要求。 At present, the bulk absorber materials of electric vacuum devices used in China are mainly carburized porous alumina attenuating ceramics and BeO-based composite attenuating ceramics. Carburized porous alumina attenuation ceramics have a large amount of outgassing, low strength, uneven distribution of attenuation phases, low carburizing yield, and low thermal conductivity due to porous structure, which has caused certain obstacles to the use of high-power tubes; BeO The toxicity of BeO-based composite attenuating ceramics is difficult to meet the safety requirements.

人们把目光转向了AlN,AlN无毒,其热导率理论值可达320 W.m-1.K-1 ,能够接近BeO的热导率,约是Al2O3热导率的8倍。而且,AlN有适中的介电系数、好的化学和热稳定性,很高的电阻率。以AlN作为介质相,不但有利于提高衰减材料的热导率,还有利于提高材料的微波衰减性能。此以,以AlN为基的衰减材料,在高真空环境下放气速率低,与氧化物阴极有很好的兼容性,在1000℃以上的高温下有好的热稳定性和力学性能,与铜可形成气密封接。因此,研制AlN基微波衰减材料,特别是其衰减性能和热导率的提高,是微波衰减材料在微波电真空器件,特别是在大功率微波管应用中的发展趋势。 People turn their attention to AlN, which is non-toxic, and its thermal conductivity can reach 320 Wm -1 .K -1 theoretically, which is close to the thermal conductivity of BeO, which is about 8 times that of Al 2 O 3 . Moreover, AlN has moderate dielectric coefficient, good chemical and thermal stability, and high resistivity. Using AlN as the dielectric phase not only helps to improve the thermal conductivity of the attenuating material, but also helps to improve the microwave attenuating performance of the material. Therefore, the AlN-based attenuation material has a low outgassing rate in a high vacuum environment, has good compatibility with oxide cathodes, and has good thermal stability and mechanical properties at high temperatures above 1000 ° C. Creates an airtight seal. Therefore, the development of AlN-based microwave attenuating materials, especially the improvement of their attenuation performance and thermal conductivity, is the development trend of microwave attenuating materials in microwave electric vacuum devices, especially in the application of high-power microwave tubes.

在大功率微波电真空器件中,对衰减材料基本要求之一是,介电常数高,且虚部可控,这是实现衰减材料高衰减量的关键。但是,纯氮化铝陶瓷具有介电常数低、介电损耗低及电阻率过高等特点,因此常在其中添加一些导电相来加以调整。由于AlN的烧结温度在1700℃左右,添加熔点过低的导电相在烧结过程会形成液体,得不到所需要的结果。合肥工业大学的程继贵在AlN中添加34%-40%(质量分数)的Mo,得到了在2.2-2.5GHz范围内具有良好吸波性能的材料,北京有色金属研究总院的杨志民在AlN中添加1.65%-2.01%的W或Mo,获得了在较宽频段内20.0dB的反射衰减量。以导电颗粒W作为微波衰减剂,具有与AlN匹配的热膨胀系数和较高的热导率。 In high-power microwave electric vacuum devices, one of the basic requirements for attenuating materials is high dielectric constant and controllable imaginary part, which is the key to realize high attenuation of attenuating materials. However, pure aluminum nitride ceramics have the characteristics of low dielectric constant, low dielectric loss and high resistivity, so some conductive phases are often added to it for adjustment. Since the sintering temperature of AlN is about 1700°C, adding a conductive phase with too low melting point will form a liquid during the sintering process, and the desired result cannot be obtained. Cheng Jigui of Hefei University of Technology added 34%-40% (mass fraction) of Mo to AlN to obtain a material with good wave-absorbing properties in the range of 2.2-2.5GHz. Yang Zhimin of Beijing Nonferrous Metals Research Institute added Mo to AlN. 1.65%-2.01% of W or Mo obtains a reflection attenuation of 20.0dB in a wide frequency band. The conductive particle W is used as a microwave attenuator, which has a thermal expansion coefficient matched with AlN and a high thermal conductivity.

大量研究显示,碳纳米管具有优异的导电性能、优良的热传导性能及吸波性能,是新一代最具发展潜力的吸波材料。在CNT与陶瓷基体直接复合制备致密陶瓷的实验中,当烧结温度高于1400℃时,高温烧结后的CNT复合衰减陶瓷具有较好的衰减性能,但是当烧结温度达到1600℃时,衰减量非常小,此温度下陶瓷基体和CNT发生反应而逃逸,因此没有体现出它应有的微波吸收效应,需要添加金属材料,依据复相材料优势互补的设计原则,在AlN基体中加入导电颗粒,使其在绝缘且热导率高的AlN基体材料中均匀分布,能够提高材料的介电常数和损耗,实现综合性能优异的新型衰减材料。 A large number of studies have shown that carbon nanotubes have excellent electrical conductivity, excellent thermal conductivity and microwave absorption performance, and are the most promising new generation of microwave absorbing materials. In the experiment of direct compounding of CNT and ceramic matrix to prepare dense ceramics, when the sintering temperature is higher than 1400 °C, the CNT composite attenuation ceramics after high temperature sintering have good attenuation performance, but when the sintering temperature reaches 1600 °C, the attenuation is very low. Small, at this temperature, the ceramic matrix and CNT react and escape, so it does not reflect the microwave absorption effect it should have. It is necessary to add metal materials. According to the design principle of complementary advantages of composite materials, conductive particles are added to the AlN matrix. It is evenly distributed in the insulating and high thermal conductivity AlN matrix material, which can increase the dielectric constant and loss of the material, and realize a new type of attenuation material with excellent comprehensive performance.

碳纳米管具有的大的比表面积和长径比,小尺寸等特殊结构,以及它所表现出来的特殊的电磁特性,使得碳纳米管在隐身材料、吸波材料上的应用有很大的潜力。与传统微波衰减及相比,碳纳米管具有吸收频带宽、衰减量大、用量少、高稳定性、抗氧化、质量轻等优点,使CNTs复相陶瓷表现出非同寻常的吸波性能。南京工业大学的步文博在AlN基体中添加适量的石墨粉制备出具有优异微波衰减性能的AlN-C 复相材料,在AlN- C 复相材料研究中研制的AlN- C介质谐振损耗腔。中国钢研科技集团公司的于亮等人研究了AlN-SiC复合衰减材料的制备及其微波衰减性能,在AlN基微波衰减材料领域,研究人员不断探索进一步改善材料的吸波性能,以提高材料的使用范围。 Carbon nanotubes have a large specific surface area, aspect ratio, small size and other special structures, as well as their special electromagnetic properties, so that the application of carbon nanotubes in stealth materials and wave-absorbing materials has great potential . Compared with traditional microwave attenuation, carbon nanotubes have the advantages of wide absorption frequency band, large attenuation, less dosage, high stability, oxidation resistance, light weight, etc., which make CNTs composite ceramics exhibit extraordinary microwave absorption properties . Bu Wenbo of Nanjing University of Technology added an appropriate amount of graphite powder to the AlN matrix to prepare an AlN-C composite material with excellent microwave attenuation properties, and developed an AlN-C dielectric resonant loss cavity in the research of AlN-C composite materials. Yu Liang and others from China Iron and Steel Research and Technology Group Corporation studied the preparation of AlN-SiC composite attenuation materials and their microwave attenuation properties. range of use.

发明内容 Contents of the invention

本发明针对现有金属陶瓷基微波吸收材料热压制备的缺陷,旨在提供一种SPS快速烧结获得高致密度、高损耗的微波衰减烧结体,此材料可以满足介电常数17~25,介电损耗角正切>0.04,在70kHz~1MHz范围内具有良好的吸波性能, The present invention aims at the defects of hot-pressing preparation of existing cermet-based microwave absorbing materials, and aims to provide a high-density, high-loss microwave attenuating sintered body obtained by rapid sintering of SPS. Electrical loss tangent>0.04, good absorbing performance in the range of 70kHz~1MHz,

针对上述目的,本发明所采取的技术方案如下: For above-mentioned purpose, the technical scheme that the present invention takes is as follows:

一种高导热微波衰减器材料,选取CNTs和W作为金属相,AlN为介质相,包括CNTs:(0.1-2.0)vol.%、W:(1.0-20.0)vol.%和AlN:(100-CNTs- W)vol.%。 A high thermal conductivity microwave attenuator material, select CNTs and W as the metal phase, AlN as the dielectric phase, including CNTs: (0.1-2.0) vol.%, W: (1.0-20.0) vol.% and AlN: (100- CNTs-W) vol.%.

本发明的另一目的是提供一种上述高导热微波衰减器材料的制备方法,具体实施步骤是: Another object of the present invention is to provide a preparation method of the above-mentioned high thermal conductivity microwave attenuator material, the specific implementation steps are:

(1)将CNTs粉、W粉和AlN粉按(0.1-2.0):(1.0-20.0):(78.0-98.9)的体积比配比后混合均匀,采用不锈钢球为研磨球,以无水乙醇为研磨介质,研磨球与原料粉的质量比为(4-6):1,球磨时间为10~40min,得到混合粉体浆料。 (1) Mix CNTs powder, W powder and AlN powder according to the volume ratio of (0.1-2.0): (1.0-20.0): (78.0-98.9) and mix them evenly. Use stainless steel balls as grinding balls, and use absolute ethanol As the grinding medium, the mass ratio of the grinding ball to the raw material powder is (4-6):1, and the ball milling time is 10-40min to obtain a mixed powder slurry.

(2)将混合粉体浆料置于真空干燥箱中,在70-90℃下真空干燥2-4h得到混合粉末。 (2) The mixed powder slurry is placed in a vacuum drying oven, and vacuum-dried at 70-90° C. for 2-4 hours to obtain a mixed powder.

(3)将混合粉末置于石墨模具中进行SPS烧结制备复合陶瓷样品,其烧结温度为1400~1700℃,保温时间为2~10min,烧结压力为30-40MPa,升温速率为100-150℃/min,得到CNTs-W-AlN复合块体材料。 (3) Put the mixed powder in a graphite mold for SPS sintering to prepare a composite ceramic sample. The sintering temperature is 1400-1700°C, the holding time is 2-10min, the sintering pressure is 30-40MPa, and the heating rate is 100-150°C/ min, the CNTs-W-AlN composite bulk material was obtained.

(4)将复合块体材料按具体使用时的形状和尺寸进行加工,即得到用于微波衰减器的CNTs-W-AlN复合块体材料。 (4) Process the composite block material according to the shape and size of the specific use, and obtain the CNTs-W-AlN composite block material for the microwave attenuator.

所述混合的混合方式包括滚动球磨、高能球磨、磁力搅拌、超声波分散。 The mixing methods include rolling ball milling, high-energy ball milling, magnetic stirring, and ultrasonic dispersion.

本发明的CNTs/W/AlN复相微波吸收材料,W和CNTs的含量对复合陶瓷的性能有直接的影响,CNTs含量过多时,复合陶瓷中的孔隙数增多,而W有效的提高烧结体致密度;在AlN/W中添加CNTs,提高了复合陶瓷的介电损耗。在AlN-10vol.%W中添加1vol.%CNTs制备的复合陶瓷具有优异的介电性能,介电损耗在70kHz~1MHz频率下,tanδ>0.04,介电常数:ε<17.5,特别适合制备微波电真空器件,用于消极电子对抗和微波测量系统中。 In the CNTs/W/AlN composite microwave absorbing material of the present invention, the content of W and CNTs has a direct impact on the performance of the composite ceramics. When the CNTs content is too much, the number of pores in the composite ceramics increases, and W effectively improves the sintered body. Density; adding CNTs to AlN/W increases the dielectric loss of the composite ceramic. The composite ceramic prepared by adding 1vol.%CNTs to AlN-10vol.%W has excellent dielectric properties, dielectric loss at 70kHz~1MHz frequency, tanδ>0.04, dielectric constant: ε<17.5, especially suitable for preparing microwave Electro-vacuum devices are used in passive electronic countermeasures and microwave measurement systems.

具体的实施方式specific implementation

下面结合具体实施例对本发明进行详细说明。 The present invention will be described in detail below in conjunction with specific embodiments.

实施例1 Example 1

(1)将CNTs粉、W粉和AlN粉按1:5:94的体积比配比后混合均匀,采用不锈钢球为研磨球,以无水乙醇为研磨介质,研磨球与原料粉的质量比为4:1,球磨时间为20min。 (1) Mix CNTs powder, W powder and AlN powder according to the volume ratio of 1:5:94, use stainless steel balls as grinding balls, use absolute ethanol as grinding media, and the mass ratio of grinding balls to raw material powder The ratio is 4:1, and the ball milling time is 20 minutes.

(2)将步骤(1)所述的混合粉体浆料置于真空干燥箱中,在70℃下真空干燥2h得到混合粉末。 (2) Put the mixed powder slurry described in step (1) in a vacuum drying oven, and vacuum dry at 70° C. for 2 hours to obtain a mixed powder.

(3)将步骤(2)所述的混合粉末置于石墨模具中进行SPS烧结制备复合陶瓷样品,其烧结温度为1600℃,保温时间为10min,烧结压力为30MPa,升温速率为100℃/min。 (3) Put the mixed powder described in step (2) in a graphite mold for SPS sintering to prepare a composite ceramic sample, the sintering temperature is 1600°C, the holding time is 10min, the sintering pressure is 30MPa, and the heating rate is 100°C/min .

(4)将步骤(3)所述的复合块体材料按具体使用时的形状和尺寸进行加工,即得到用于微波衰减器的CNTs-W-AlN复合块体材料。其相对密度为98%,介电常数为17,介电损耗角正切为0.035,在70kHz~1MHz范围内具有良好的吸波性能。 (4) Process the composite block material described in step (3) according to the specific shape and size when used, to obtain the CNTs-W-AlN composite block material for microwave attenuator. Its relative density is 98%, dielectric constant is 17, dielectric loss tangent is 0.035, and it has good wave-absorbing performance in the range of 70kHz~1MHz.

  the

实施例2 Example 2

(1)将CNTs粉、W粉和AlN粉按1:10:89的体积比配比后混合均匀,采用不锈钢球为研磨球,以无水乙醇为研磨介质,研磨球与原料粉的质量比为4:1,球磨时间为20min。 (1) Mix CNTs powder, W powder and AlN powder according to the volume ratio of 1:10:89 and mix them evenly. Stainless steel balls are used as grinding balls, absolute ethanol is used as grinding medium, and the mass ratio of grinding balls to raw material powder The ratio is 4:1, and the ball milling time is 20 minutes.

(2)将步骤(1)所述的混合粉体浆料置于真空干燥箱中,在70℃下真空干燥2h得到混合粉末。 (2) Put the mixed powder slurry described in step (1) in a vacuum drying oven, and vacuum dry at 70° C. for 2 hours to obtain a mixed powder.

(3)将步骤(2)所述的混合粉末置于石墨模具中进行SPS烧结制备复合陶瓷样品,其烧结温度为1600℃,保温时间为5min,烧结压力为30MPa,升温速率为100℃/min。 (3) Put the mixed powder described in step (2) in a graphite mold for SPS sintering to prepare a composite ceramic sample, the sintering temperature is 1600°C, the holding time is 5min, the sintering pressure is 30MPa, and the heating rate is 100°C/min .

(4)将步骤(3)所述的复合块体材料按具体使用时的形状和尺寸进行加工,即得到用于微波衰减器的CNTs-W-AlN复合块体材料。其相对密度为98%,介电常数为17.5,介电损耗角正切为0.04,在70kHz~1MHz范围内具有良好的吸波性能。 (4) Process the composite block material described in step (3) according to the specific shape and size when used, to obtain the CNTs-W-AlN composite block material for microwave attenuator. Its relative density is 98%, the dielectric constant is 17.5, the dielectric loss tangent is 0.04, and it has good wave-absorbing performance in the range of 70kHz~1MHz.

  the

实施例3 Example 3

(1)将CNTs粉、W粉和AlN粉按1:20:79的体积比配比后混合均匀,采用不锈钢球为研磨球,以无水乙醇为研磨介质,研磨球与原料粉的质量比为4:1,球磨时间为20min。 (1) Mix CNTs powder, W powder and AlN powder according to the volume ratio of 1:20:79, use stainless steel balls as grinding balls, use absolute ethanol as grinding media, and the mass ratio of grinding balls to raw material powder The ratio is 4:1, and the ball milling time is 20 minutes.

(2)将步骤(1)所述的混合粉体浆料置于真空干燥箱中,在70℃下真空干燥2h得到混合粉末。 (2) Put the mixed powder slurry described in step (1) in a vacuum drying oven, and vacuum dry at 70° C. for 2 hours to obtain a mixed powder.

(3)将步骤(2)所述的混合粉末置于石墨模具中进行SPS烧结制备复合陶瓷样品,其烧结温度为1400℃,保温时间为5min,烧结压力为30MPa,升温速率为100℃/min。 (3) Put the mixed powder described in step (2) in a graphite mold for SPS sintering to prepare a composite ceramic sample, the sintering temperature is 1400°C, the holding time is 5min, the sintering pressure is 30MPa, and the heating rate is 100°C/min .

(4)将步骤(3)所述的复合块体材料按具体使用时的形状和尺寸进行加工,即得到用于微波衰减器的CNTs-W-AlN复合块体材料。其相对密度为98%,介电常数为17.3,介电损耗角正切为0.032,在70kHz~1MHz范围内具有良好的吸波性能。 (4) Process the composite block material described in step (3) according to the specific shape and size when used, to obtain the CNTs-W-AlN composite block material for microwave attenuator. Its relative density is 98%, dielectric constant is 17.3, dielectric loss tangent is 0.032, and it has good wave-absorbing performance in the range of 70kHz~1MHz.

  the

实施例4 Example 4

(1)将CNTs粉、W粉和AlN粉按0.1:1:98.9的体积比配比后混合均匀,采用不锈钢球为研磨球,以无水乙醇为研磨介质,研磨球与原料粉的质量比为4:1,球磨时间为20min。 (1) Mix CNTs powder, W powder and AlN powder according to the volume ratio of 0.1:1:98.9 and mix them evenly. Using stainless steel balls as grinding balls and absolute ethanol as grinding media, the mass ratio of grinding balls to raw material powder The ratio is 4:1, and the ball milling time is 20 minutes.

(2)将步骤(1)所述的混合粉体浆料置于真空干燥箱中,在70℃下真空干燥2h得到混合粉末。 (2) Put the mixed powder slurry described in step (1) in a vacuum drying oven, and vacuum dry at 70° C. for 2 hours to obtain a mixed powder.

(3)将步骤(2)所述的混合粉末置于石墨模具中进行SPS烧结制备复合陶瓷样品,其烧结温度为1600℃,保温时间为5min,烧结压力为30MPa,升温速率为100℃/min。 (3) Put the mixed powder described in step (2) in a graphite mold for SPS sintering to prepare a composite ceramic sample, the sintering temperature is 1600°C, the holding time is 5min, the sintering pressure is 30MPa, and the heating rate is 100°C/min .

(4)将步骤(3)所述的复合块体材料按具体使用时的形状和尺寸进行加工,即得到用于微波衰减器的CNTs-W-AlN复合块体材料。其相对密度为99%,介电常数为19,介电损耗角正切为0.05,在70kHz~1MHz范围内具有良好的吸波性能。 (4) Process the composite block material described in step (3) according to the specific shape and size when used, to obtain the CNTs-W-AlN composite block material for microwave attenuator. Its relative density is 99%, dielectric constant is 19, dielectric loss tangent is 0.05, and it has good wave-absorbing performance in the range of 70kHz~1MHz.

  the

实施例5 Example 5

(1)将CNTs粉、W粉和AlN粉按0.1:10:89.9的体积比配比后混合均匀,采用不锈钢球为研磨球,以无水乙醇为研磨介质,研磨球与原料粉的质量比为4:1,球磨时间为20min。 (1) Mix CNTs powder, W powder and AlN powder according to the volume ratio of 0.1:10:89.9 and mix them evenly. Using stainless steel balls as grinding balls and absolute ethanol as grinding media, the mass ratio of grinding balls to raw material powder The ratio is 4:1, and the ball milling time is 20 minutes.

(2)将步骤(1)所述的混合粉体浆料置于真空干燥箱中,在70℃下真空干燥2h得到混合粉末。 (2) Put the mixed powder slurry described in step (1) in a vacuum drying oven, and vacuum dry at 70° C. for 2 hours to obtain a mixed powder.

(3)将步骤(2)所述的混合粉末置于石墨模具中进行SPS烧结制备复合陶瓷样品,其烧结温度为1600℃,保温时间为5min,烧结压力为30MPa,升温速率为100℃/min。 (3) Put the mixed powder described in step (2) in a graphite mold for SPS sintering to prepare a composite ceramic sample, the sintering temperature is 1600°C, the holding time is 5min, the sintering pressure is 30MPa, and the heating rate is 100°C/min .

(4)将步骤(3)所述的复合块体材料按具体使用时的形状和尺寸进行加工,即得到用于微波衰减器的CNTs-W-AlN复合块体材料。其相对密度为98.5%,介电常数为20,介电损耗角正切为0.045,在70kHz~1MHz范围内具有良好的吸波性能。 (4) Process the composite block material described in step (3) according to the specific shape and size when used, to obtain the CNTs-W-AlN composite block material for microwave attenuator. Its relative density is 98.5%, dielectric constant is 20, dielectric loss tangent is 0.045, and it has good wave-absorbing performance in the range of 70kHz~1MHz.

  the

实施例6 Example 6

(1)将CNTs粉、W粉和AlN粉按0.1:20:79.9的体积比配比后混合均匀,采用不锈钢球为研磨球,以无水乙醇为研磨介质,研磨球与原料粉的质量比为4:1,球磨时间为20min。 (1) Mix CNTs powder, W powder and AlN powder according to the volume ratio of 0.1:20:79.9 and mix them evenly. Using stainless steel balls as grinding balls and absolute ethanol as grinding media, the mass ratio of grinding balls to raw material powder The ratio is 4:1, and the ball milling time is 20 minutes.

(2)将步骤(1)所述的混合粉体浆料置于真空干燥箱中,在70℃下真空干燥2h得到混合粉末。 (2) Put the mixed powder slurry described in step (1) in a vacuum drying oven, and vacuum dry at 70° C. for 2 hours to obtain a mixed powder.

(3)将步骤(2)所述的混合粉末置于石墨模具中进行SPS烧结制备复合陶瓷样品,其烧结温度为1600℃,保温时间为5min,烧结压力为30MPa,升温速率为100℃/min。 (3) Put the mixed powder described in step (2) in a graphite mold for SPS sintering to prepare a composite ceramic sample, the sintering temperature is 1600°C, the holding time is 5min, the sintering pressure is 30MPa, and the heating rate is 100°C/min .

(4)将步骤(3)所述的复合块体材料按具体使用时的形状和尺寸进行加工,即得到用于微波衰减器的CNTs-W-AlN复合块体材料。其相对密度为97.5%,介电常数为21,介电损耗角正切为0.056,在70kHz~1MHz范围内具有良好的吸波性能。 (4) Process the composite block material described in step (3) according to the specific shape and size when used, to obtain the CNTs-W-AlN composite block material for microwave attenuator. Its relative density is 97.5%, dielectric constant is 21, dielectric loss tangent is 0.056, and it has good wave-absorbing performance in the range of 70kHz~1MHz.

  the

实施例7 Example 7

(1)将CNTs粉、W粉和AlN粉按2:1:97的体积比配比后混合均匀,采用不锈钢球为研磨球,以无水乙醇为研磨介质,研磨球与原料粉的质量比为5:1,球磨时间为40min。 (1) Mix CNTs powder, W powder and AlN powder according to the volume ratio of 2:1:97, use stainless steel balls as grinding balls, use absolute ethanol as grinding media, and the mass ratio of grinding balls to raw material powder The ratio is 5:1, and the ball milling time is 40 minutes.

(2)将步骤(1)所述的混合粉体浆料置于真空干燥箱中,在70℃下真空干燥2h得到混合粉末。 (2) Put the mixed powder slurry described in step (1) in a vacuum drying oven, and vacuum dry at 70° C. for 2 hours to obtain a mixed powder.

(3)将步骤(2)所述的混合粉末置于石墨模具中进行SPS烧结制备复合陶瓷样品,其烧结温度为1600℃,保温时间为10min,烧结压力为30MPa,升温速率为100℃/min。 (3) Put the mixed powder described in step (2) in a graphite mold for SPS sintering to prepare a composite ceramic sample, the sintering temperature is 1600°C, the holding time is 10min, the sintering pressure is 30MPa, and the heating rate is 100°C/min .

(4)将步骤(3)所述的复合块体材料按具体使用时的形状和尺寸进行加工,即得到用于微波衰减器的CNTs-W-AlN复合块体材料。其相对密度为96.5%,介电常数为22,介电损耗角正切为0.06,在70kHz~1MHz范围内具有良好的吸波性能。 (4) Process the composite block material described in step (3) according to the specific shape and size when used, to obtain the CNTs-W-AlN composite block material for microwave attenuator. Its relative density is 96.5%, dielectric constant is 22, dielectric loss tangent is 0.06, and it has good wave-absorbing performance in the range of 70kHz~1MHz.

  the

实施例8 Example 8

(1)将CNTs粉、W粉和AlN粉按2:10:88的体积比配比后混合均匀,采用不锈钢球为研磨球,以无水乙醇为研磨介质,研磨球与原料粉的质量比为6:1,球磨时间为50min。 (1) Mix CNTs powder, W powder and AlN powder according to the volume ratio of 2:10:88 and mix them evenly. Using stainless steel balls as grinding balls and absolute ethanol as grinding media, the mass ratio of grinding balls to raw material powder The ratio is 6:1, and the ball milling time is 50 minutes.

(2)将步骤(1)所述的混合粉体浆料置于真空干燥箱中,在90℃下真空干燥2h得到混合粉末。 (2) The mixed powder slurry described in step (1) was placed in a vacuum drying oven, and vacuum-dried at 90° C. for 2 hours to obtain a mixed powder.

(3)将步骤(2)所述的混合粉末置于石墨模具中进行SPS烧结制备复合陶瓷样品,其烧结温度为1700℃,保温时间为10min,烧结压力为40MPa,升温速率为140℃/min。 (3) Put the mixed powder described in step (2) in a graphite mold for SPS sintering to prepare a composite ceramic sample, the sintering temperature is 1700°C, the holding time is 10min, the sintering pressure is 40MPa, and the heating rate is 140°C/min .

(4)将步骤(3)所述的复合块体材料按具体使用时的形状和尺寸进行加工,即得到用于微波衰减器的CNTs-W-AlN复合块体材料。其相对密度为96.8%,介电常数为23.5,介电损耗角正切为0.055,在70kHz~1MHz范围内具有良好的吸波性能。 (4) Process the composite block material described in step (3) according to the specific shape and size when used, to obtain the CNTs-W-AlN composite block material for microwave attenuator. Its relative density is 96.8%, dielectric constant is 23.5, dielectric loss tangent is 0.055, and it has good wave-absorbing performance in the range of 70kHz~1MHz.

实施例9 Example 9

(1)将CNTs粉、W粉和AlN粉按2:20:78的体积比配比后混合均匀,采用不锈钢球为研磨球,以无水乙醇为研磨介质,研磨球与原料粉的质量比为4:1,球磨时间为20min。 (1) Mix CNTs powder, W powder and AlN powder according to the volume ratio of 2:20:78 and mix them evenly. Using stainless steel balls as grinding balls and absolute ethanol as grinding media, the mass ratio of grinding balls to raw material powder The ratio is 4:1, and the ball milling time is 20 minutes.

(2)将步骤(1)所述的混合粉体浆料置于真空干燥箱中,在90℃下真空干燥2h得到混合粉末。 (2) The mixed powder slurry described in step (1) was placed in a vacuum drying oven, and vacuum-dried at 90° C. for 2 hours to obtain a mixed powder.

(3)将步骤(2)所述的混合粉末置于石墨模具中进行SPS烧结制备复合陶瓷样品,其烧结温度为1700℃,保温时间为10min,烧结压力为40MPa,升温速率为150℃/min。 (3) Put the mixed powder described in step (2) in a graphite mold for SPS sintering to prepare a composite ceramic sample, the sintering temperature is 1700°C, the holding time is 10min, the sintering pressure is 40MPa, and the heating rate is 150°C/min .

(4)将步骤(3)所述的复合块体材料按具体使用时的形状和尺寸进行加工,即得到用于微波衰减器的CNTs-W-AlN复合块体材料。其相对密度为96.7%,介电常数为25,介电损耗角正切为0.065,在70kHz~1MHz范围内具有良好的吸波性能。 (4) Process the composite block material described in step (3) according to the specific shape and size when used, to obtain the CNTs-W-AlN composite block material for microwave attenuator. Its relative density is 96.7%, dielectric constant is 25, dielectric loss tangent is 0.065, and it has good wave-absorbing performance in the range of 70kHz~1MHz.

Claims (3)

1. one kind high heat conduction microwave attenuation AlN based composites, it is characterized in that: choose CNTs and W as metallographic phase, AlN is the medium phase, comprises CNTs:(0.1-2.0) vol.%, W:(1.0-20.0) vol.% and AlN:(100-CNTs-W) vol.%.
2. the preparation method of the described high heat conduction microwave attenuation AlN based composites of claim 1, it is characterized in that: implementation step is:
1) CNTs powder, W powder and AlN powder are pressed (0.1-2.0): (1.0-20.0): mix after the volume ratio proportioning (78.0-98.9), the employing Stainless Steel Ball is mill ball, take dehydrated alcohol as grinding medium, the mass ratio of mill ball and raw material powder is (4-6): 1, Ball-milling Time is 10 ~ 40min, obtains the mixed powder slurry;
2) the mixed powder slurry is placed vacuum drying oven, obtain mixed powder at 70-90 ℃ of lower vacuum-drying 2-4h;
3) mixed powder is placed graphite jig carry out the SPS sintering and prepare the composite ceramics sample, its sintering temperature is 1400 ~ 1700 ℃, and soaking time is 2 ~ 10min, and sintering pressure is 30-40MPa, temperature rise rate is 100-150 ℃/min, obtains the CNTs-W-AlN composite block material.
3. such as right preparation method claimed in claim 2, it is characterized in that: mix rolling ball milling, high-energy ball milling, magnetic agitation, the ultrasonic wave dispersing and mixing mode of comprising described in the step 1).
CN201210536786XA 2012-12-13 2012-12-13 High thermal conductivity microwave attenuation AlN-based composite material and preparation method thereof Pending CN102978500A (en)

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CN110105090A (en) * 2019-06-12 2019-08-09 刘华云 A kind of micron order AlN ceramic loading nanometer Fe composite attenuation material and preparation method
CN111205819A (en) * 2020-01-10 2020-05-29 中国科学院兰州化学物理研究所 Carbon nanotube-aluminum nitride wave absorbing agent and preparation method thereof, carbon nanotube-aluminum nitride composite wave absorbing material and application thereof
CN116565496A (en) * 2023-06-27 2023-08-08 济钢防务技术有限公司 Preparation method of spiral hexagonal attenuator

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110105090A (en) * 2019-06-12 2019-08-09 刘华云 A kind of micron order AlN ceramic loading nanometer Fe composite attenuation material and preparation method
CN111205819A (en) * 2020-01-10 2020-05-29 中国科学院兰州化学物理研究所 Carbon nanotube-aluminum nitride wave absorbing agent and preparation method thereof, carbon nanotube-aluminum nitride composite wave absorbing material and application thereof
CN111205819B (en) * 2020-01-10 2021-02-19 中国科学院兰州化学物理研究所 Carbon nanotube-aluminum nitride wave absorbing agent and preparation method thereof, carbon nanotube-aluminum nitride composite wave absorbing material and application thereof
CN116565496A (en) * 2023-06-27 2023-08-08 济钢防务技术有限公司 Preparation method of spiral hexagonal attenuator
CN116565496B (en) * 2023-06-27 2025-01-28 济钢防务技术有限公司 A method for preparing a helical hexagonal attenuator

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