CN102976256B - Flow-backward device - Google Patents

Flow-backward device Download PDF

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Publication number
CN102976256B
CN102976256B CN201210563610.3A CN201210563610A CN102976256B CN 102976256 B CN102976256 B CN 102976256B CN 201210563610 A CN201210563610 A CN 201210563610A CN 102976256 B CN102976256 B CN 102976256B
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housing
backward device
flowing backward
source liquid
chamber
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CN102976256A (en
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胡树雷
李华
刘子隆
卢新志
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Yingli Group Co Ltd
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Yingli Group Co Ltd
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Abstract

The invention discloses a flow-backward device. The flow-backward device comprises a first shell, an air inlet pipe, a second shell, a first liquid guide pipe and a motor, wherein the first shell is internally provided with a first cavity, and is provided with a first cover board, a rotating shaft, an air inlet end and a liquid outlet end; the air inlet end and the liquid outlet end are arranged on the first cover board; the rotating shaft is parallel to the first cover board in an axial direction; the first cavity is used for fixing a first source liquid bottle internally provided with source liquid; a first end of the air inlet pipe is connected with the air inlet end, and a second end of the air inlet pipe is used for connecting an air inlet source; the second shell is internally provided with a second cavity, and is provided with a second cover board and a liquid inlet end arranged on the second cover board; the second cavity is used for fixing a second source liquid bottle; the first liquid guide pipe is connected between the liquid outlet end and the liquid inlet end; and the motor is connected with the first end of the rotating shaft, and is used for driving the rotating shaft to rotate by a pre-set angle after being electrified. With the adoption of the low-backward device provided by the invention, the problem that safe accidents are easy to occur when source liquid is manually collected in the prior art can be solved, so that the security of collecting the source liquid can be improved, and the collection efficiency can be further improved.

Description

Flowing backward device
Technical field
The present invention relates to production technology field, in particular to a kind of flowing backward device.
Background technology
When the source liquid used in production process in prior art reclaims, generally by manually the source liquid bottle of splendid attire source liquid the other way around, and adopt assist gas to collect in a new source liquid bottle by the residue source liquid in each source liquid bottle, until new source liquid bottle is collected full, although this kind of collection method financial cost drops into lower, but when collected source liquid has toxicity, there is very large potential safety hazard in the method adopting manual operation to carry out collecting, once personnel make a fault to cause fall bottle, bottle explosion, the serious accidents such as leakage, huge prestige evil is brought to operating personal life security, with the POCl used in diffusion technique in solar power industry 3be illustrated:
In solar power industry, object is P-type silicon sheet matrix (boron doping) surface diffusion phosphorus atoms after cleaning for diffusion one in battery technology, forms the P-N junction that junction depth is 0.3-0.5 μm.Technological process is by POCl3 (POCl 3) at high temperature about 860 DEG C and oxygen (O 2) reaction generation phosphorus pentoxide (P 2o 5), corresponding chemical equation is: 4POCl 3+ 3O 2=2P 2o 5+ 6Cl 2, wherein, the phosphorus pentoxide (P produced 2o 5) react generate silicon dioxide (SiO with silicon (Si) 2) and phosphorus atoms (P), corresponding chemical equation is: 2P 2o 5+ 5Si=5SiO 2+ 4P, its resultant of reaction silicon dioxide (SiO 2).The POCl that this diffusing procedure uses 3be a kind of raw MAT'L during diffusing procedure is produced, there is following characteristic:
It is colourless transparent liquid under normal temperature, usual employing glass bottle, has pungent odour, is acutely fuming in damp air, molecular formula Cl3-O-P, mol wt 153.35, relative density 1.67, fusing point 1.25 DEG C, boiling point 105.1 DEG C, in water, ethanol, be decomposed to form phosphoric acid and hydrogen chloride, when large water gaging is poured into suddenly, vigorous reaction can occur.Health hazard: can not suck or eat; There is spread effect to eyes, respiratory mucosa, eye and skin burn can be caused; Several cases has sensation of asphyxia, cyanosis, pulmonary edema, heart failure, also hepatomegaly, albuminuria, anaemia and neutrophilic leukocytosis can occur.Dangerous property: meet water and fiercely decompose, produce a large amount of heat and dense smoke, even explode.There is stronger corrosive property.Burning (decomposition) product: hydrogen chloride, phosphorous oxide, phosphine.Environmental Criteria: the maximum permissible concentration 0.05mg/m3 of objectionable impurities in air.
The POCl that diffusing procedure uses 3in use remain 2-3cm will out of reach technique requirement thus waste, occur about 5% ~ 8% POCl 3cannot utilize, in order to make the POCl be left 3be fully utilized, need all remaining POCl 3re-using after source liquid is brought together, is all manually splendid attire POCl at present 3source bottle turn around source liquid is pressed onto from bottle another sky with nitrogen source bottle inside cycling until source bottled full till because POCl 3for poisonous drugs, manual operation is adopted to carry out POCl 3there is very large potential safety hazard in the method for collecting, once personnel make a fault can cause serious accidents such as falling bottle, bottle explosion, leakage, brings huge prestige evil to operating personal life security.
For the problem artificially collecting source liquid in correlation technique and easily occur safety misadventure, not yet actv. solution is proposed at present.
Summary of the invention
Main purpose of the present invention is to provide a kind of flowing backward device, to solve in prior art the problem artificially collecting source liquid and easily occur safety misadventure.
To achieve these goals, according to the present invention, provide a kind of flowing backward device, comprise: the first housing, inside has the first chamber, and there is the first cover plate, S. A. and the inlet end be arranged on the first cover plate and outlet end, the axial direction of S. A. parallels with the first cover plate, and the first chamber is used for the first source liquid bottle that fixing internal has source liquid; Air inlet pipe, first end is connected with inlet end, and the second end is for connecting air inlet source; Second housing, inside has the second chamber, and has the second cover plate and be arranged on the liquid feeding end on the second cover plate, and the second chamber is used for fixing the second source liquid bottle, and the second source liquid bottle is empty bottle; First catheter, is connected between outlet end and liquid feeding end; And motor, being connected with the first end of S. A., rotating predetermined angle for driving S. A. after the power-up.
Further, flowing backward device also comprises: cabinet, and inside has the 3rd chamber, and wherein, the first housing and the second housing are all arranged in the 3rd chamber; Fan, is arranged on cabinet, for being discharged by the air in the 3rd chamber after the power-up; And recovery channel, be arranged on cabinet outside, for collecting the Exhaust Gas of fan.
Further, flowing backward device also comprises: warning piece; And alarm switch, be arranged on the current supply circuit of warning piece, for closed when the anglec of rotation of S. A. is greater than predetermined angle.
Further, the first housing has jut; And alarm switch is arranged on the primary importance in cabinet, wherein, when the anglec of rotation of S. A. is greater than predetermined angle, jut rotates to primary importance and trigger alarm switch closes.
Further, flowing backward device also comprises: the first support portion, has the first base for supporting and the first bracing frame, and wherein, the second end of S. A. is flexibly connected with the first bracing frame, and the first base for supporting is fixedly installed in cabinet; Draw-in groove, is arranged on the first housing; And positioning plate, pivotable is connected on the first bracing frame, has the first state matching to fix the first housing with draw-in groove, and the second state rotated freely.
Further, the second housing also has the exhaust side be arranged on the second cover plate, and flowing backward device also comprises: ventilation flue, and first end is connected with inlet end, and the second end extends in the first chamber; Second catheter, first end is connected with liquid feeding end, and the second end extends in the second chamber; And freeing pipe, be connected with exhaust side.
Further, flowing backward device also comprises: the second support portion, and have the second base for supporting and the second bracing frame, the second base for supporting is fixedly installed in cabinet; And adapter plate, be fixedly installed on the second bracing frame, have the first through hole and the second through hole, wherein, the first catheter is connected with liquid feeding end by the first through hole, and freeing pipe is connected with exhaust side by the second through hole.
Further, flowing backward device also comprises: weighting material, is arranged in the first chamber; And locking member, be arranged on the first housing, for fixing the first cover plate.
Further, flowing backward device also comprises: check valve, is arranged on air inlet pipe.
Further, the axial direction of S. A. is horizontal direction, and predetermined angle is greater than 90 degree and is less than 270 degree.
Pass through the present invention, adopt the flowing backward device with following structure: the first housing, inside has the first chamber, and there is the first cover plate, S. A. and the inlet end be arranged on the first cover plate and outlet end, the axial direction of S. A. parallels with the first cover plate, and the first chamber is used for the first source liquid bottle that fixing internal has source liquid; Air inlet pipe, first end is connected with inlet end, and the second end is for connecting air inlet source; Second housing, inside has the second chamber, and has the second cover plate and be arranged on the liquid feeding end on the second cover plate, and the second chamber is used for fixing the second source liquid bottle, and the second source liquid bottle is empty bottle; First catheter, is connected between outlet end and liquid feeding end; And motor, being connected with the first end of S. A., rotating predetermined angle for driving S. A. after the power-up.By arranging the first housing and the second housing, and the source liquid bottle being loaded with residue source liquid is fixed by the first housing, the source liquid bottle for reclaiming residue source liquid is fixed by the second housing, by the first catheter, the liquid feeding end on the outlet end on the first housing and the second housing is coupled together simultaneously, and be communicated with air inlet source and the first housing by air inlet pipe, and rotated by electric machine control first housing, achieve by air inlet pipe to aeration in the first source liquid bottle, and make the source liquid in the first source liquid bottle flow to the second source liquid bottle by the first catheter under the compressing of entering source gas by the first housing rotation, achieve automatic collection source liquid, solve in prior art the problem artificially collecting source liquid and easily occur safety misadventure, and then reach the safety of raising source liquid collection, and improve collection efficiency.
Accompanying drawing explanation
The accompanying drawing forming a application's part is used to provide a further understanding of the present invention, and schematic description and description of the present invention, for explaining the present invention, does not form inappropriate limitation of the present invention.In the accompanying drawings:
Fig. 1 is the schematic diagram of the flowing backward device according to the embodiment of the present invention;
Fig. 2 a is the front elevation of the first housing of flowing backward device according to the embodiment of the present invention;
Fig. 2 b is the birds-eye view of the first housing of flowing backward device according to the embodiment of the present invention;
Fig. 3 a is the front elevation of the second housing of flowing backward device according to the embodiment of the present invention
Fig. 3 b is the left view of the second housing of flowing backward device according to the embodiment of the present invention; And
Fig. 3 c is the birds-eye view of the second housing of flowing backward device according to the embodiment of the present invention.
Detailed description of the invention
It should be noted that, when not conflicting, the embodiment in the application and the feature in embodiment can combine mutually.Below with reference to the accompanying drawings and describe the present invention in detail in conjunction with the embodiments.
The invention provides a kind of flowing backward device, below flowing backward device provided by the present invention be specifically introduced:
Fig. 1 is the schematic diagram according to flowing backward device of the present invention, as shown in Figure 1, the flowing backward device of this embodiment comprises the first housing 10, second housing 20, air inlet pipe 41, first catheter 42, first support portion 80 and motor (not shown), wherein, the front elevation of the first housing 10 illustrates in fig. 2 a, the birds-eye view of the first housing 10 is shown in 2b, and the three-view diagram of the second housing 20 is shown in Fig. 3 a to Fig. 3 c.
Particularly, first enclosure interior has the first chamber 11, and there is the first cover plate 12, S. A. 13 and the inlet end 121 be arranged on the first cover plate 12 and outlet end 122, the axial direction of S. A. 13 parallels with the first cover plate 12, first chamber 11 has the first source liquid bottle 30 of source liquid for fixing internal, namely, first source liquid bottle 30 can fixed placement in the first chamber 11, wherein, first cover plate 12 can pass through pivotable member (such as rotary hinge) and be arranged on the body of the first housing, also be fixed by the body of locking member (such as tension lock) with the first housing simultaneously, the first cover plate is realized to be fixed on the body of the first housing, the first end of air inlet pipe 41 is connected with inlet end 121, and the second end is for connecting air inlet source, and in embodiments of the present invention, air inlet source is used to provide power gas, and the gas that air inlet source provides discharges for the residue source liquid of oppressing in the first source liquid bottle 30, second housing 20 inside has the second chamber 21, and the liquid feeding end 221 that there is the second cover plate 22 and be arranged on the second cover plate, second chamber 21 is for fixing the second source liquid bottle 50, namely, second source liquid bottle 50 can fixed placement in the second chamber 21, wherein, the second source liquid bottle 50 is for being used for the empty bottle of residue source liquid in collection first source liquid bottle 30, first catheter 42 is connected between outlet end 122 and liquid feeding end 221, one end of S. A. 13 is flexibly connected with the first support portion 80, the other end is connected with motor by driving band, this motor is used for driving S. A. to rotate predetermined angle after the power-up, namely, the first housing 10 is driven to rotate predetermined angle, in embodiments of the present invention, motor can be stepping motor, accurately to control the anglec of rotation of S. A..
Flowing backward device of the present invention is by arranging the first housing and the second housing, and the source liquid bottle being loaded with residue source liquid is fixed by the first housing, the source liquid bottle for reclaiming residue source liquid is fixed by the second housing, by the first catheter, the liquid feeding end on the outlet end on the first housing and the second housing is coupled together simultaneously, and be communicated with air inlet source and the first housing by air inlet pipe, and rotated by electric machine control first housing, achieve by air inlet pipe to aeration in the first source liquid bottle, and make the source liquid in the first source liquid bottle flow to the second source liquid bottle by the first catheter under the compressing of entering source gas by the first housing rotation, achieve automatic collection source liquid, solve in prior art the problem artificially collecting source liquid and easily occur safety misadventure, and then reach the safety of raising source liquid collection, and improve collection efficiency.
It should be noted that, in the accompanying drawing of the embodiment of the present invention, just diagrammatically illustrate the first housing is cube structure, second housing is cylindrical structure, but the first housing in the flowing backward device that the embodiment of the present invention provides and the second housing are all not limited to the structure provided in accompanying drawing, first housing and the second housing can be the structure that any inside has cavity, first housing can also be called No. 1 tank, and the second housing can also be called No. 2 tanks.
To carry out the POCl in diffusion technique 3collection further illustrate the flowing backward device of the embodiment of the present invention, carrying out POCl 3during collection, air inlet source can be nitrogen (N 2) source, carrying out POCl 3during recovery, be placed in the inner chamber of the first housing by holding the first source liquid bottle being recovered source liquid, and by the body fixing and locking of locking member by the first cover plate and the first housing, be placed in the inner chamber of the second housing by being used for the second source liquid bottle that splendid attire reclaims source liquid, then motor powers on, drive the first housing to rotate predetermined angle, and be blown into nitrogen in the first source liquid bottle, make the POCl in the first source liquid bottle 3solution can be flowed in the second source liquid bottle by the first catheter, realizes POCl 3recovery.
Preferably, the flowing backward device that the embodiment of the present invention provides also comprises check valve 90, and this check valve 90 is arranged on air inlet pipe 41, and its one-way flow direction is from air inlet source to the first housing, and cut-off direction is from the first housing to air inlet source.By arranging check valve on admission line, avoid enter source gas sufficient not or change air inlet source time there is backflow.
Preferably, the flowing backward device of the embodiment of the present invention also comprises cabinet, fan and recovery channel, wherein, first catheter 42 of the first housing 10, second housing 20 and UNICOM first source liquid bottle 30 and the second source liquid bottle 50 is all arranged on the chamber interior (hereinafter referred to as the 3rd chamber) of cabinet inside, 3rd chamber is the chamber of a sealing, that is, the first housing 10 in the flowing backward device provided in the embodiment of the present invention and the second housing 20 are arranged in a sealed chamber; Fan is arranged on cabinet, for being discharged by the air in the 3rd chamber after the power-up, that is, is controlled, for negative pressure state, to make the bar pressure in the 3rd chamber be less than 1 barometric pressure by the 3rd chamber by fan; Recovery channel is arranged on cabinet outside, for collecting the Exhaust Gas of fan.
By the first housing and the second housing being arranged in the chamber of a sealing, and the bar pressure controlled in this chamber is less than 1 barometric pressure, achieve and avoid when carrying out source liquid and reclaiming, the volatilization gas of harmful source liquid is dispersed in the workshop of carrying out source liquid collection, further improves the safety that source liquid is collected; , by recovery channel, the gas that fan is discharged is collected meanwhile, discharge again after can being further processed the volatilization gas collected, reach in the air avoiding the volatilization gas of harmful source liquid to be dispersed into.To carry out the POCl in diffusion technique 3collection be illustrated, the gas that recovery channel can be collected imports in boiler tube, at high temperature with after oxygen reaction enters air, accomplishes the no pollution to environment.
Further, the first support portion 80 tool first base for supporting and the first bracing frame, wherein, the first base for supporting is fixedly installed in cabinet, that is, be fixedly installed on cabinet base plate, and one end of S. A. 13 is flexibly connected with the first bracing frame.The flowing backward device of the embodiment of the present invention also comprises draw-in groove 101 and positioning plate 102, wherein, draw-in groove 101 and positioning plate 102 combinationally use the function realizing reversion lock, draw-in groove 101 is arranged on the first housing 10, positioning plate 102 pivotable is connected on the first bracing frame, there is the first state matching to fix the first housing with draw-in groove, and the second state rotated freely, namely, positioning plate can rotate around the point of connection be connected with the first bracing frame, when positioning plate is stuck in draw-in groove, may be used for fixing the first housing, the first housing is avoided to rotate around S. A. 13, when positioning plate departs from draw-in groove, can rotate freely.
The first housing is fixed to coordinate by arranging positioning plate and draw-in groove, avoiding the first housing to rock in a non-operative state, meanwhile, fixing the first housing by utilizing positioning plate and draw-in groove, also achieve and facilitate placement first source liquid bottle, avoid occurring tilting in the first source liquid bottle put procedure.
Preferably, the flowing backward device of the embodiment of the present invention also comprises warning piece and alarm switch, wherein, alarm switch is arranged on the current supply circuit of warning piece, this alarm switch is closed when the anglec of rotation of S. A. is greater than predetermined angle, to make the current supply circuit conducting of warning piece, warning piece is reported to the police.Wherein, warning piece can be buzzer phone, alarm switch can for being arranged on the button switch in the primary importance of cabinet inside, the first housing that the embodiment of the present invention provides also has jut 14, the shape of jut 14 can have any shape, only need meet when the anglec of rotation of S. A. is greater than predetermined angle, jut rotates to primary importance and to alarm switch application force, alarm switch is closed.
The flowing backward device that the embodiment of the present invention provides is not before motor powers on, be placed on the bottleneck of the first source liquid bottle in the first housing upward, after motor powers on, driving S. A. to rotate makes the bottleneck of the first source liquid bottle downward-sloping, the degree of concrete inclination is determined by the size of predetermined angle, in embodiments of the present invention, predetermined angle can be set to be greater than any one angle that 90 degree are less than 270 degree, when the anglec of rotation of S. A. is more than 270 degree, the bottleneck that cannot meet the first source liquid bottle is downward-sloping, by arranging warning piece in flowing backward device, these parts are reported to the police when the anglec of rotation of S. A. is greater than predetermined angle, achieve and avoid the first housing excessively to rotate caused cannot collecting source liquid.In embodiments of the present invention, predetermined angle can preferably be set to 180 degree.
Preferably, the flowing backward device of the embodiment of the present invention also comprises ventilation flue 60 and the second catheter 70, wherein, one end of ventilation flue 60 is connected with inlet end, the other end extends in the first chamber, and one end of the second catheter is connected with liquid feeding end, and the other end extends in the second chamber; Namely, when carrying out source liquid and reclaiming, ventilation flue 60 extends in the first source liquid bottle, second catheter 70 extends in the second source liquid bottle, the outlet side distance of distance at the bottom of the first source liquid bottle bottle of ventilation flue 60 can be about 2cm, and the distance of outlet end distance at the bottom of the second source liquid bottle bottle of the second catheter 70 also can be about 2cm.
By arranging ventilation flue, achieving when carrying out source liquid and reclaiming, directly power gas can be blown the bottom to the first source liquid bottle, and then realize the residue source liquid in the liquid bottle of source thoroughly to get rid of; By arranging the second catheter, achieving the bottom that the source liquid of collection directly can be guided to the second source liquid bottle, reaching and avoiding source liquid to collect appearance splashing, further increasing the safety that source liquid is collected.
Further, the second cover plate also has exhaust side, the flowing backward device that the embodiment of the present invention provides also comprises freeing pipe, and this freeing pipe is connected with exhaust side.Carrying out in the liquid removal process of source, be drained to fluid in the second source liquid bottle except the liquid of most residue source by the first catheter, also can comprise a small amount of power gas, such as carry out POCl 3during recovery, flow in the fluid of the second source liquid bottle and also comprise nitrogen, the flowing backward device of the embodiment of the present invention by arranging exhaust side on the second cover plate, and freeing pipe is set is connected with exhaust side, achieve and in time the gas entering the second source liquid bottle along with residue source liquid is discharged the second source liquid bottle, to guarantee the recovery source liquid collecting full bottle.
Further, the flowing backward device that the embodiment of the present invention provides also comprises the second support portion and adapter plate, wherein, second support portion has the second base for supporting and the second bracing frame, second base for supporting is fixedly installed in cabinet, namely, second base for supporting is fixedly installed on the base plate of cabinet, adapter plate is fixedly installed on the second bracing frame, and adapter plate also has the first through hole and the second through hole, wherein, the first catheter is connected with the liquid feeding end of the second housing through the first through hole, and freeing pipe is connected with the exhaust side of the second housing through the second through hole.
When the first housing rotates, can shake with the first catheter of be dynamically connected the first housing and the second housing, under the drive of this shake and then rocking of the second housing can be caused, by by the catheter be connected with the second housing and freeing pipe all through receiving on the second housing after the positioning plate be fixedly installed again, achieve the first housing rotate or freeing pipe send shake time, stress will be shaken by the end of adapter plate, to avoid the second housing to shake, further increase the safety of the flowing backward device that the embodiment of the present invention provides.
Preferably, the flowing backward device of the embodiment of the present invention also comprises the weighting material be filled in the first chamber, to ensure that the safety of the first source liquid bottle is fixed.
It should be noted that, can be combined with each other between the various preferred embodiments that embodiment of the present invention foregoing provides, to realize the flowing backward device providing satisfied different demand.
As can be seen from the above description, present invention achieves automatic collection source liquid, solve in prior art the problem artificially collecting source liquid and easily occur safety misadventure, and then reach the safety of raising source liquid collection, and improve collection efficiency.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, for a person skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (8)

1. a flowing backward device, is characterized in that, comprising:
First housing, inside has the first chamber, and there is the first cover plate, S. A. and the inlet end that is arranged on described first cover plate and outlet end, the axial direction of described S. A. parallels with described first cover plate, and described first chamber is used for the first source liquid bottle that fixing internal has source liquid;
Air inlet pipe, first end is connected with described inlet end, and the second end is for connecting air inlet source;
Second housing, inside has the second chamber, and has the second cover plate and be arranged on the liquid feeding end on described second cover plate, and described second chamber is used for fixing the second source liquid bottle, and described second source liquid bottle is empty bottle;
First catheter, is connected between described outlet end and described liquid feeding end;
Motor, is connected with the first end of described S. A., rotates predetermined angle for driving described S. A. after the power-up;
Cabinet, inside has the 3rd chamber, and wherein, described first housing and described second housing are all arranged in described 3rd chamber;
Fan, is arranged on described cabinet, for being discharged by the air in described 3rd chamber after the power-up;
Recovery channel, is arranged on described cabinet outside, for collecting the Exhaust Gas of described fan;
Warning piece; And
Alarm switch, is arranged on the current supply circuit of described warning piece, for closed when the anglec of rotation of described S. A. is greater than described predetermined angle.
2. flowing backward device according to claim 1, is characterized in that:
Described first housing has jut; And
Described alarm switch is arranged on the primary importance in described cabinet, and wherein, when the anglec of rotation of described S. A. is greater than described predetermined angle, described jut rotates to described primary importance and triggers described alarm switch and closes.
3. flowing backward device according to claim 1, is characterized in that, described flowing backward device also comprises:
First support portion, has the first base for supporting and the first bracing frame, and wherein, the second end of described S. A. is flexibly connected with described first bracing frame, and described first base for supporting is fixedly installed in described cabinet;
Draw-in groove, is arranged on described first housing; And
Positioning plate, pivotable is connected on described first bracing frame, has and matches with the first state of fixing described first housing with described draw-in groove, and the second state rotated freely.
4. flowing backward device according to claim 1, is characterized in that, described second housing also has the exhaust side be arranged on described second cover plate, and described flowing backward device also comprises:
Ventilation flue, first end is connected with described inlet end, and the second end extends in described first source liquid bottle;
Second catheter, first end is connected with described liquid feeding end, and the second end extends in described second source liquid bottle; And
Freeing pipe, is connected with described exhaust side.
5. flowing backward device according to claim 4, is characterized in that, described flowing backward device also comprises:
Second support portion, has the second base for supporting and the second bracing frame, and described second base for supporting is fixedly installed in described cabinet; And
Adapter plate, is fixedly installed on described second bracing frame, has the first through hole and the second through hole, and wherein, described first catheter is connected with described liquid feeding end by described first through hole, and described freeing pipe is connected with described exhaust side by described second through hole.
6. flowing backward device according to claim 1, is characterized in that, described flowing backward device also comprises:
Weighting material, is arranged in described first chamber; And
Locking member, is arranged on described first housing, for fixing described first cover plate.
7. flowing backward device according to claim 1, is characterized in that, described flowing backward device also comprises:
Check valve, is arranged on described air inlet pipe.
8. flowing backward device according to claim 1, is characterized in that, the axial direction of described S. A. is horizontal direction, and described predetermined angle is greater than 90 degree and is less than 270 degree.
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CN202390580U (en) * 2011-11-29 2012-08-22 湖南红太阳光电科技有限公司 Constant temperature device for solar cell diffusion source phosphorus oxychloride (POCl3)
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