CN102975105A - Self compensating angle device of cutting machine - Google Patents

Abstract

The invention relates to a self compensating angle device of a cutting machine, which solves the problems that the existing cutting machine is liable to be worn due to the use of a worm and worm gear transmission mechanism, and low in the angle precision and processing precision of the cutting machine caused by the large vibration. The self compensating angle device of the cutting machine comprises an assembling worm wheel which is assembled on a center shaft and a worm which is occluded with the assembling worm wheel each othermutually. The essential technical scheme is as follows: an upper worm wheel is sleeved onto a boss of a lower worm wheel of the assembling worm wheel, the circumferences of the upper and lower worm wheels are complete and the upper and lower tooth surfaces of the assembling worm wheel are respectively formed, and the upper and lower tooth surfaces are respectively and closely in contact with the left and right tooth surfaces of the same tooth space of the worm; and moreover, an extension spring is embedded inside a part of worm wheels, two ends of the extension spring are respectively connected with the upper and lower worm wheels, and the end planes of the upper and lower worm wheels are pressed together and the relative circumferential displacements of the upper and lower worm wheels are limited by the screws. The self compensating angle device of the cutting machine provides reliable work guarantee for cutting quality of the cutting machine; and meanwhile, the yield of the product is improved and the production cost is reduced.

Description

The cutting machine self-compensating rotary angle device

Technical field

The present invention relates to a kind of rotary driving device of cutting machine, particularly the cutting machine of a kind of reasonable in design, reliable working performance subdivision worm gear angle station.It is applicable to the compensation of cutting machine platform cutting angle station, also can be used for the self compensation of the angle station of other same category of device.

Background technology

Abrasive wheel cutting machine is the special cutting device of the brilliant substrate of circle such as processing various semiconductors etc. and other similar substrates, it is important equipment in the semiconductor production process, is mainly used in the processing of the products such as semiconductor chip, thermistor, B ultrasonic transducing head, solar cell.Abrasive wheel cutting machine is to utilize thickness minimum that the subparticle diamond dust makes for the disc wheel cutter of 0.02mm, under the cutting speed of 0.1～400m/s, make the emery wheel blade along the cut-off rule of being cut part cut into.What have only cuts into silicon wafer thickness half, and then adopts and manually break disconnected method off with the fingers and thumb separately, also have adopt cut whole silicon wafer thickness method separately.Under the precision of X, the Y under industrial computer control, Z, θ four direction micro machine drove, the reciprocating motion by X, Y, Z-direction and θ were cut apart large wafer according to default size, thereby are obtained single little tube core to 360 ° rotation.θ to rotation accurately whether determine institute's cut spare shape accurately whether.Cutting machine when work, θ to rotation accurate, be a very important positioning index.If the error of this index is excessive, will affect the processing dimension of cutting, also can increase manufacturing cost and operating personnel's labour intensity.

Adopt at present the angle station of common worm gear structure on the cutting machine, a normally respective side engagement of the worm gear teeth groove side and worm screw teeth groove, after so just causing operation a period of time wear and tear in the teeth groove side, when driving the worm gear counter-rotating, worm screw will produce certain idle running amount, when the idle running amount increases gradually with the teeth groove degree of wear, error will appear in corner, and workbench can produce shake at work, cause machining accuracy to reduce, crudy descends, the result is that product percent of pass descends, and production cost increases.For solving Similar Problems, patent announcement number proposes to utilize the subdivision worm gear to carry out self compensation for CN2823688Y " Subdivision Worm of Roll grinder ", but structurally there is following defective in it: at first, the side face of upper worm gear and lower worm gear is the worm gear flank of tooth jointly, but from this patent disclosure accompanying drawing, can see in 360 ° of scopes of the above-mentioned worm gear flank of tooth it not being the side face combination of upper worm gear and lower worm gear entirely, namely this worm gear only has the side face of lower worm gear to contact with worm screw at its syndeton place, so this worm gear can not all can reach the self compensation purpose in the rotating 360 degrees scope, can only do the low-angle adjustment.In case this worm gear rotates to its syndeton place, just only have lower worm-gear toothing to contact with worm screw, the subdivision worm gear does not just have compensating action; Second, its syndeton is essentially Compress Spring, this Compress Spring one side pressure is loaded on worm gear side face bayonet socket, the other end is fitted on the pin that is connected with lower worm gear, under the effect of Compress Spring pressure, when mechanism rotated to the syndeton place, worm-gear toothing very easily staggered up and down, and mechanism can't rotate back into the correct position of engagement; In addition, the self compensation of this subdivision worm gear holds out against to realize by three groups of Compress Springs.The easy unstability of Compress Spring, any one group of Compress Spring bending-buckling in the work all can cause mechanism's shake, affects corner accuracy and machining accuracy, so its stability is bad, still needs further to improve.

Summary of the invention

The objective of the invention is for the cutting machine that a kind of reasonable in design, reliable working performance are provided self compensation worm gear angle station, solve fundamentally that the upper Worm and worm-wheel gearing that uses of existing cutting exists easy to wear, vibrations are large, cause the problems such as rotating angle of cutting machine precision and machining accuracy are low, when making the worm and wheel engagement the idle running amount can not appear, make the corner of cutting machine keep for a long time high accuracy, improve the stability of mechanism, thereby improved the qualification rate of product, reduced production cost.

Technical scheme of the present invention is: this cutting machine comprises that with self compensation worm gear angle station the subdivision worm gear that is assembled on the central shaft reaches and the intermeshing worm screw of subdivision worm gear, its technical essential is: be set with worm gear on the boss of the lower worm gear of subdivision worm gear, on described, the side face of lower worm gear is complete and consist of respectively the upper of described subdivision worm gear, dedendum flank, respectively with the left and right sides flank of tooth close contact of the same teeth groove of described worm screw, described subdivision worm gear inside is embedded with extension spring, described extension spring two ends are respectively with upper, lower worm gear connects, described on, lower worm gear end face is pressed against together and utilizes screw to limit its relatively circumferentially displacement.

Between described subdivision worm gear and the described central shaft deep groove ball bearing is set, the upper and lower end face of described subdivision worm gear place arranges respectively little, high thrust bearing, and described low thrust bearing upper surface is provided with locking nut.

Advantage of the present invention and the positive technique effect that produces are: the present invention utilizes the extension spring tension to drive, the flank of tooth of lower worm gear respectively with the left side of worm screw teeth groove, the right flank of tooth is close to, so just guaranteed the zero clearance of worm and wheel engagement, idle running amount when the worm gear counter-rotating has also just been eliminated in the elimination gap, its reasonable in design, performance safety is reliable, fundamentally solved easy to wear that the Worm and worm-wheel gearing that uses in the existing cutting exists, vibrations are large, cause the problems such as rotating angle of cutting machine precision and machining accuracy are low, cut quality to cutting machine provides reliable operation guarantee, and reduced maintenance cost, obviously prolong the service life of cutting machine, significantly improve operating efficiency and minimizing attendant's labour intensity.Adopt extension spring to realize the self-compensating function of subdivision worm gear, extension spring is embedded in the inside of subdivision worm gear, so just can 360 ° of any rotations, the problem of inefficacy can not appear compensating in worm gear.When mounted, upper and lower worm gear utilizes screw spacing, guarantees side set can not occur between the upper and lower worm gear, has guaranteed reliability, the stability of rotation angle mechanism.It reasonably designs the qualification rate that has improved product, has reduced production cost.

Description of drawings

The invention will be further described below in conjunction with accompanying drawing.

Fig. 1 is that the present invention is loaded on the axial cutaway view on the central shaft.

Fig. 2 is that the present invention is loaded on the top view on the central shaft.

Sequence number explanation among the figure: worm gear on 1,2 times worm gears, 3 bearing glands, 4 locking nuts, 5 central shafts, 6 low thrust bearings, 7 deep groove ball bearings, 8 pads, 9 screws, 10 high thrust bearings, 11 worm screws, 12 extension springs.

The specific embodiment

Describe the present invention in detail according to Fig. 1-2.The present invention includes the subdivision worm gear that is assembled on the central shaft 5 reaches and the intermeshing worm screw 11 of subdivision worm gear, bearing, locking nut 4 etc.Wherein: the subdivision worm gear is comprised of upper worm gear 1 and lower worm gear 2 two parts, cover is loaded onto worm gear 1 on the boss of lower worm gear 2, upper and lower worm gear 1,2 side face is complete and consist of respectively the upper and lower flank of tooth of subdivision worm gear, its upper and lower flank of tooth respectively with the left and right sides flank of tooth close contact of worm screw 11 same teeth groove, for guaranteeing the self compensation of subdivision worm gear, idle running amount when eliminating the worm gear counter-rotating, be embedded with extension spring 12 in subdivision worm gear inside especially, as shown in Figure 2, extension spring 12 two ends are connected with upper and lower worm gear 1,2 respectively.During installation, be pressed against together and utilize screw 9 to limit its relatively circumferentially displacement upper and lower worm gear 1,2 end faces.After assembling, the subdivision worm gear set is contained on the central shaft 5, and between subdivision worm gear and central shaft 5 deep groove ball bearing 7 is set, guarantees that smooth rotation arranges respectively little, high thrust bearing 6,10 at the upper and lower end face of subdivision worm gear place, low thrust bearing 6 upper surfaces are provided with locking nut 4.As shown in Figure 1, between low thrust bearing 6 and deep groove ball bearing 7 and lower worm gear 2, bearing gland 3 is set, between high thrust bearing 10 and lower worm gear 2, pad 8 is set.

Claims (2)

1. cutting machine self-compensating rotary angle device, comprise that the assembly type worm gear that is assembled on the central shaft reaches and the worm screw of the mutual interlock of assembly type worm gear, it is characterized in that: be set with worm gear on the boss of the lower worm gear of described assembly type worm gear, on described, the side face of lower worm gear is complete and consist of respectively the upper of assembly type worm gear, dedendum flank, respectively with the left and right sides flank of tooth close contact of the same teeth groove of worm screw, described assembly type subdivision worm gear inside is embedded with extension spring, the extension spring two ends are respectively with upper, lower worm gear connects, described on, lower worm gear end face is pressed against together and utilizes screw to limit its relatively circumferentially displacement.

2. cutting machine self-compensating rotary angle device according to claim 1, be further characterized in that, between described assembly type worm gear and the described central shaft deep groove ball bearing is set, the upper and lower end face of described assembly type worm gear arranges respectively large and small thrust bearing, and described low thrust bearing upper surface is provided with locking nut.

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