CN102938964A - 多通道等离子体光源 - Google Patents
多通道等离子体光源 Download PDFInfo
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- CN102938964A CN102938964A CN2012104134769A CN201210413476A CN102938964A CN 102938964 A CN102938964 A CN 102938964A CN 2012104134769 A CN2012104134769 A CN 2012104134769A CN 201210413476 A CN201210413476 A CN 201210413476A CN 102938964 A CN102938964 A CN 102938964A
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CN201210413476.9A CN102938964B (zh) | 2012-10-26 | 2012-10-26 | 多通道等离子体光源 |
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CN201210413476.9A CN102938964B (zh) | 2012-10-26 | 2012-10-26 | 多通道等离子体光源 |
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CN102938964A true CN102938964A (zh) | 2013-02-20 |
CN102938964B CN102938964B (zh) | 2016-03-30 |
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CN201210413476.9A Active CN102938964B (zh) | 2012-10-26 | 2012-10-26 | 多通道等离子体光源 |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1863426A (zh) * | 2005-05-11 | 2006-11-15 | Lg电子株式会社 | 等离子照明系统及其控制方法 |
US7368916B2 (en) * | 2003-10-15 | 2008-05-06 | Lutron Electronics Co., Inc. | Apparatus and methods for making capacitive measurements of cathode fall in fluorescent lamps |
CN101335180A (zh) * | 2007-06-29 | 2008-12-31 | 诺信公司 | 紫外线灯系统和用于控制发射的紫外线的方法 |
CN101465265A (zh) * | 2007-12-21 | 2009-06-24 | 诺信公司 | 具有改进的磁控管控制的紫外线灯系统和相关方法 |
CN102065623A (zh) * | 2010-10-21 | 2011-05-18 | 北京纳克分析仪器有限公司 | 全数字功率可调电感耦合等离子体射频光源 |
CN102735654A (zh) * | 2012-06-21 | 2012-10-17 | 中国科学院半导体研究所 | 一种反射式局域表面等离子体共振增强生化检测仪 |
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- 2012-10-26 CN CN201210413476.9A patent/CN102938964B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7368916B2 (en) * | 2003-10-15 | 2008-05-06 | Lutron Electronics Co., Inc. | Apparatus and methods for making capacitive measurements of cathode fall in fluorescent lamps |
CN1863426A (zh) * | 2005-05-11 | 2006-11-15 | Lg电子株式会社 | 等离子照明系统及其控制方法 |
CN101335180A (zh) * | 2007-06-29 | 2008-12-31 | 诺信公司 | 紫外线灯系统和用于控制发射的紫外线的方法 |
CN101465265A (zh) * | 2007-12-21 | 2009-06-24 | 诺信公司 | 具有改进的磁控管控制的紫外线灯系统和相关方法 |
CN102065623A (zh) * | 2010-10-21 | 2011-05-18 | 北京纳克分析仪器有限公司 | 全数字功率可调电感耦合等离子体射频光源 |
CN102735654A (zh) * | 2012-06-21 | 2012-10-17 | 中国科学院半导体研究所 | 一种反射式局域表面等离子体共振增强生化检测仪 |
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CN102938964B (zh) | 2016-03-30 |
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Denomination of invention: Multichannel plasma source Effective date of registration: 20200810 Granted publication date: 20160330 Pledgee: Societe Generale Bank Limited by Share Ltd. Yantai branch Pledgor: SHANDONG DONGYI PHOTOELECTRIC INSTRUMENTS Co.,Ltd. Registration number: Y2020980004836 |
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Effective date of registration: 20210602 Address after: 264003 No.28, Chuangxin Road, hi tech Zone, Yantai City, Shandong Province Patentee after: SHANDONG DONGYI PHOTOELECTRIC INSTRUMENTS Co.,Ltd. Patentee after: Yantai Dongyi Optoelectronic Industrial Technology Research Institute Co.,Ltd. Address before: 264003 No.11 Jingqi Road, Yantai hi tech Industrial Park, Shandong Province Patentee before: SHANDONG DONGYI PHOTOELECTRIC INSTRUMENTS Co.,Ltd. |
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Date of cancellation: 20230815 Granted publication date: 20160330 Pledgee: Societe Generale Bank Limited by Share Ltd. Yantai branch Pledgor: SHANDONG DONGYI PHOTOELECTRIC INSTRUMENTS CO.,LTD. Registration number: Y2020980004836 |