CN102930045A - Multi-device formula management method of integrated circuit production line - Google Patents
Multi-device formula management method of integrated circuit production line Download PDFInfo
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- CN102930045A CN102930045A CN2012104581781A CN201210458178A CN102930045A CN 102930045 A CN102930045 A CN 102930045A CN 2012104581781 A CN2012104581781 A CN 2012104581781A CN 201210458178 A CN201210458178 A CN 201210458178A CN 102930045 A CN102930045 A CN 102930045A
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Abstract
The invention discloses a multi-device formula management method of an integrated circuit production line. The multi-device formula management method comprises the following steps: 1, a formula server is started; 2, a formula index table is created by the formula server; 3, a formula is created from the locality by a formula editing interface and is uploaded to the formula server; 4, the command of the formula list table is read by a formula server receiving device; 5, a formula type, a device number and a formula file storage path are assigned by a formula interface program; 6, a formula file is downloaded from the formula server by the formula interface program to the locality; and 7, before a production line device is used for processing the formula, the formula file needing to be processed is downloaded to the locality from the formula server. With the adoption of the multi-device formula management method, a user can manage different types of formulas without modifying a code, the devices suitable for the formula and the formula storage path are assigned, thereby ensuring that the formula processed by each device each time is latest formula file, and according to the multi-device formula management method, the universality is strong, the manage is convenient, and the real-time property is good.
Description
Technical field
The present invention relates to a kind of process formula management, specifically a kind of many equipment process formula management towards integrated circuit production line.
Background technology
The integrated circuit production line industry is the industry of a highly-specialised, and the production procedure of each production line is very complicated, and its prescription is also more complicated with respect to other industry.When the component design management method, need the factors such as synchronism of the prescription of each equipment of consideration, the prescription problem of therefore how better to manage integrated circuit production line becomes formulation management software developer's a difficult problem.
Conventional process formula management is first edit recipes, sends prescription to equipment again.For example, some process formula management is at first on technologist's computing machine prescription to be edited, and then by movable storage devices such as USB flash disks prescription is copied in the computing machine at equipment place.Also having some process formula managements is that the prescription that will edit sends in the computing machine at equipment place by network communication.Although these methods can realize the basic function of formulation management, dirigibility is not strong, may need the designer that program is made amendment if change other equipment into, has increased cost of development.And, easily the prescription between distinct device is obscured together, need more high-quality technologist, increased the training cost of factory, also may the economic interests of factory be caused damage in case go wrong.
Summary of the invention
For the above-mentioned deficiency of the process formula management of integrated circuit production line, the present invention is for a kind of method that can effectively manage many equipment prescriptions that provides is provided.
For realizing the object of the invention, take following technical scheme:
A kind of many equipment process formula management towards integrated circuit production line may further comprise the steps:
Step 1, startup prescription server; The prescription server creates recipe file clip directory structure automatically;
Step 2, prescription server are set up the prescription concordance list, carry out fast query for equipment;
Step 3, prescription editing interface at first create prescription and are uploaded to the prescription server from this locality, server adds new formulation data in the prescription concordance list when receiving recipe file;
When step 4, prescription server read the instruction of prescription tabulation at the equipment of receiving, can declare according to the needed prescription tabulation of device numbering Returning equipment;
Step 5, prescription interface program need type, suitable device numbering and the recipe file store path of specified mix when newly-built prescription;
Step 6, prescription interface program are edited it to this from prescription server downloading recipes file, at last amended recipe file are uploaded to the prescription server;
Step 7, apparatus for production line will think that the recipe file of required processing downloads to this locality from the prescription server before processing formula.
The server of filling a prescription in the described step 1 automatically creates recipe file clip directory structure and may further comprise the steps:
The first step, read configuration file, and configuration information is write buffer memory;
Second step, judge whether configuration information is effective, if effectively, then set up each recipe file folder according to the configuration information in the internal memory;
If invalid, then send error reporting and withdraw from.
Prescription server foundation prescription concordance list may further comprise the steps in the described step 2:
The first step, in buffer memory, create the prescription concordance list;
Second step, the concordance list of will filling a prescription save as the XML file.
The structure of prescription concordance list is divided into 5 row in the described step 2, is respectively: formula I D, formulation types, prescription title, prescription suitable device, recipe file store path.
The prescription server comprises following steps to the needed prescription tabulation of client Returning equipment in the described step 4:
The first step, equipment computer call the prescription fetch interface in the prescription client-side program, send the instruction of reading the prescription tabulation to the prescription server;
After second step, prescription server are received reading command, read prescription index XML file, the concordance list that the XML file is comprised writes buffer memory;
The 3rd step, prescription server are judged the device numbering of the side of reading, and utilize device numbering to screen inquiry in the concordance list of buffer memory, obtain the assembly side tabulation that is complementary;
The 4th step, prescription server will be filled a prescription to tabulate and be returned to client, and equipment successfully inquires the prescription tabulation.
Newly-built prescription comprises following steps in the described step 3:
The first step, prescription editing interface program are obtained the prescription tabulation from the prescription server;
Second step, prescription editing interface program create in this locality and fill a prescription, and check during establishment whether the prescription name of this prescription is included in the prescription tabulation, if comprise, then eject prompting and stop establishment;
If do not comprise, then finish the establishment of local prescription;
The device numbering and the default storage path that comprise in the configuration file of the 3rd step, prescription editing interface process analysis local computer are together issued the prescription server with these data together with recipe file;
The 4th step, prescription server add corresponding formulation data, and recipe file are stored in the corresponding store path after receiving newly-built formulation data in the prescription concordance list.
The present invention has following advantage:
1. highly versatile.The present invention is applicable to the various prescriptions of all kinds equipment, and for dissimilar prescriptions, each attribute such as the type of prescription can be self-defined completely, need not to revise code and just can realize management function to dissimilar prescriptions.
2. be convenient to management.Conventional process formula management can't be realized fill a prescription applicable equipment and prescription store path are specified, the present invention can specify its applicable equipment for each prescription, and store path that can specified mix, the prescription of same type is put together, is convenient to user's management from now on.
3. real-time.By unified process formula management, the all devices computing machine is connected with the prescription server, equipment will be first before processing formula be downloaded from the prescription server and is wanted the recipe file processed, the prescription that has so just guaranteed each processing all is up-to-date recipe file, avoids occurring owing to recipe file upgrades the untimely loss that causes.
Description of drawings
Fig. 1 is that the prescription server creates recipe file clip directory structure flow chart automatically in the inventive method;
Fig. 2 fills a prescription server to the needed prescription tabulation of client Returning equipment process flow diagram in the inventive method;
Fig. 3 is newly-built prescription process flow diagram in the inventive method.
Embodiment
Problem for the data corruption that solves many equipment formulation management, the invention provides a kind of method that the prescription server and client side is optimized, namely towards many equipment process formula management of integrated circuit production line, can realize the effective management to the prescription of many equipment rooms.
As shown in Figure 1, a kind of many equipment process formula management towards integrated circuit production line may further comprise the steps:
Step 1, startup prescription server; The prescription server creates recipe file clip directory structure automatically;
Step 2, prescription server are set up the prescription concordance list, carry out fast query for equipment;
Step 3, prescription editing interface at first create prescription and are uploaded to the prescription server from this locality, server adds new formulation data in the prescription concordance list when receiving recipe file;
When step 4, prescription server read the instruction of prescription tabulation at the equipment of receiving, can declare according to the needed prescription tabulation of device numbering Returning equipment;
Step 5, prescription interface program need type, suitable device numbering and the recipe file store path of specified mix when newly-built prescription;
Step 6, prescription interface program are edited it to this from prescription server downloading recipes file, at last amended recipe file are uploaded to the prescription server;
Step 7, apparatus for production line will think that the recipe file of required processing downloads to this locality from the prescription server before processing formula.
The server of filling a prescription in the described step 1 automatically creates recipe file clip directory structure and may further comprise the steps:
The first step, read configuration file, and configuration information is write buffer memory;
Second step, judge whether configuration information is effective, if effectively, then set up each recipe file folder according to the configuration information in the internal memory;
If invalid, then send error reporting and withdraw from.
Prescription server foundation prescription concordance list may further comprise the steps in the described step 2:
The first step, in buffer memory, create the prescription concordance list;
Second step, the concordance list of will filling a prescription save as the XML file.
The structure of prescription concordance list is divided into 5 row in the described step 2, is respectively: formula I D, formulation types, prescription title, prescription suitable device, recipe file store path.
As shown in Figure 2, the prescription server comprises following steps to the needed prescription tabulation of client Returning equipment in the described step 4:
The first step, equipment computer call the prescription fetch interface in the prescription client-side program, send the instruction of reading the prescription tabulation to the prescription server;
After second step, prescription server are received reading command, read prescription index XML file, the concordance list that the XML file is comprised writes buffer memory;
The 3rd step, prescription server are judged the device numbering of the side of reading, and utilize device numbering to screen inquiry in the concordance list of buffer memory, obtain the assembly side tabulation that is complementary;
The 4th step, prescription server will be filled a prescription to tabulate and be returned to client, and equipment successfully inquires the prescription tabulation.
As shown in Figure 3, newly-built prescription comprises following steps in the described step 3:
The first step, prescription editing interface program are obtained the prescription tabulation from the prescription server;
Second step, prescription editing interface program create in this locality and fill a prescription, and check during establishment whether the prescription name of this prescription is included in the prescription tabulation, if comprise, then eject prompting and stop establishment;
If do not comprise, then finish the establishment of local prescription;
The device numbering and the default storage path that comprise in the configuration file of the 3rd step, prescription editing interface process analysis local computer are together issued the prescription server with these data together with recipe file;
The 4th step, prescription server add corresponding formulation data, and recipe file are stored in the corresponding store path after receiving newly-built formulation data in the prescription concordance list.
As shown in Figure 1, the prescription server automatically creates recipe file clip directory structure and may further comprise the steps:
Read configuration file, and configuration information is write buffer memory;
Judge whether configuration information is effective, if effectively, then set up each recipe file folder according to the configuration information in the internal memory;
If configuration information is invalid, then stop creating and withdrawing from.
Described configuration file is preserved with the XML form, XML(eXtensible Markup Language) be extend markup language, it is the same with HTML, all is to be in SGML the standard universal language.Xml is cross-platform in the Internet environment, depends on the technology of content, is the powerful when pre-treatment structured document information.Extending mark language XML is a kind of simple data storage language, use a series of simple mark data of description, and these marks can be set up with mode easily, although the space that XML takies will take more space than binary data, XML extremely simply is easy to grasp and use.
Below be the example of XML configuration file internal data:
The prescription server is set up the prescription concordance list and be may further comprise the steps:
In buffer memory, create the prescription concordance list;
The concordance list of will filling a prescription saves as the XML file;
The structure of prescription concordance list wherein is divided into 5 row, is respectively: formula I D, formulation types, prescription title, prescription suitable device, recipe file store path.
| Formula I D | Formulation types | The prescription title | Suitable device | Store path |
| 1 | Process | TestRCP1 | 1,2,3 | \Process\Test\ |
| 2 | Clean | TestRCP2 | 1,4 | \Clean\Test\ |
Below be the example of prescription concordance list XML file internal data:
Claims (6)
1. many equipment process formula management towards integrated circuit production line is characterized in that: may further comprise the steps:
Step 1, startup prescription server; The prescription server creates recipe file clip directory structure automatically;
Step 2, prescription server are set up the prescription concordance list, carry out fast query for equipment;
Step 3, prescription editing interface at first create prescription and are uploaded to the prescription server from this locality, server adds new formulation data in the prescription concordance list when receiving recipe file;
When step 4, prescription server read the instruction of prescription tabulation at the equipment of receiving, can declare according to the needed prescription tabulation of device numbering Returning equipment;
Step 5, prescription interface program need type, suitable device numbering and the recipe file store path of specified mix when newly-built prescription;
Step 6, prescription interface program are edited it to this from prescription server downloading recipes file, at last amended recipe file are uploaded to the prescription server;
Step 7, apparatus for production line will think that the recipe file of required processing downloads to this locality from the prescription server before processing formula.
2. by the many equipment process formula management towards integrated circuit production line claimed in claim 1, it is characterized in that: the server of filling a prescription in the described step 1 automatically creates recipe file clip directory structure and may further comprise the steps:
The first step, read configuration file, and configuration information is write buffer memory;
Second step, judge whether configuration information is effective, if effectively, then set up each recipe file folder according to the configuration information in the internal memory;
If invalid, then send error reporting and withdraw from.
3. by the many equipment process formula management towards integrated circuit production line claimed in claim 1, it is characterized in that: prescription server foundation prescription concordance list may further comprise the steps in the described step 2:
The first step, in buffer memory, create the prescription concordance list;
Second step, the concordance list of will filling a prescription save as the XML file.
4. by the many equipment process formula management towards integrated circuit production line claimed in claim 4, it is characterized in that: the structure of prescription concordance list is divided into 5 row in the described step 2, is respectively: formula I D, formulation types, prescription title, prescription suitable device, recipe file store path.
5. by the many equipment process formula management towards integrated circuit production line claimed in claim 1, it is characterized in that: the prescription server comprises following steps to the needed prescription tabulation of client Returning equipment in the described step 4:
The first step, equipment computer call the prescription fetch interface in the prescription client-side program, send the instruction of reading the prescription tabulation to the prescription server;
After second step, prescription server are received reading command, read prescription index XML file, the concordance list that the XML file is comprised writes buffer memory;
The 3rd step, prescription server are judged the device numbering of the side of reading, and utilize device numbering to screen inquiry in the concordance list of buffer memory, obtain the assembly side tabulation that is complementary;
The 4th step, prescription server will be filled a prescription to tabulate and be returned to client, and equipment successfully inquires the prescription tabulation.
6. by the many equipment process formula management towards integrated circuit production line claimed in claim 1, it is characterized in that: newly-built prescription comprises following steps in the described step 3:
The first step, prescription editing interface program are obtained the prescription tabulation from the prescription server;
Second step, prescription editing interface program create in this locality and fill a prescription, and check during establishment whether the prescription name of this prescription is included in the prescription tabulation, if comprise, then eject prompting and stop establishment;
If do not comprise, then finish the establishment of local prescription;
The device numbering and the default storage path that comprise in the configuration file of the 3rd step, prescription editing interface process analysis local computer are together issued the prescription server with these data together with recipe file;
The 4th step, prescription server add corresponding formulation data, and recipe file are stored in the corresponding store path after receiving newly-built formulation data in the prescription concordance list.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104503971A (en) * | 2014-11-03 | 2015-04-08 | 深圳市兴森快捷电路科技股份有限公司 | Periodic control method using solder resist exposure files |
| CN111221609A (en) * | 2019-12-30 | 2020-06-02 | 创维集团有限公司 | Data processing method, system and storage medium |
| CN113568763A (en) * | 2021-07-27 | 2021-10-29 | 合肥欣奕华智能机器有限公司 | Production line equipment communication system generation method, device and equipment |
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| CN1508730A (en) * | 2002-11-21 | 2004-06-30 | �����ּ�����˾ | Automatic generation of measuring formule |
| CN1535435A (en) * | 2001-07-30 | 2004-10-06 | Ӧ�ò��Ϲ�˾ | Method and apparatus for analyzing manufacturing data |
| CN101526485A (en) * | 2008-03-06 | 2009-09-09 | 奥林巴斯株式会社 | Inspection detecting method |
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- 2012-11-15 CN CN2012104581781A patent/CN102930045A/en active Pending
Patent Citations (3)
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| CN1535435A (en) * | 2001-07-30 | 2004-10-06 | Ӧ�ò��Ϲ�˾ | Method and apparatus for analyzing manufacturing data |
| CN1508730A (en) * | 2002-11-21 | 2004-06-30 | �����ּ�����˾ | Automatic generation of measuring formule |
| CN101526485A (en) * | 2008-03-06 | 2009-09-09 | 奥林巴斯株式会社 | Inspection detecting method |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104503971A (en) * | 2014-11-03 | 2015-04-08 | 深圳市兴森快捷电路科技股份有限公司 | Periodic control method using solder resist exposure files |
| CN104503971B (en) * | 2014-11-03 | 2017-12-19 | 深圳市兴森快捷电路科技股份有限公司 | A kind of cycle control methods that file is exposed using welding resistance |
| CN111221609A (en) * | 2019-12-30 | 2020-06-02 | 创维集团有限公司 | Data processing method, system and storage medium |
| CN113568763A (en) * | 2021-07-27 | 2021-10-29 | 合肥欣奕华智能机器有限公司 | Production line equipment communication system generation method, device and equipment |
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