CN102928162A - Linear capability testing method for vacuum leak detection system - Google Patents
Linear capability testing method for vacuum leak detection system Download PDFInfo
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- CN102928162A CN102928162A CN2011102252997A CN201110225299A CN102928162A CN 102928162 A CN102928162 A CN 102928162A CN 2011102252997 A CN2011102252997 A CN 2011102252997A CN 201110225299 A CN201110225299 A CN 201110225299A CN 102928162 A CN102928162 A CN 102928162A
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Abstract
The invention discloses a linear capability testing method for a vacuum leak detection system. The linear capability testing method comprises the following steps of: 1) regulating the vacuum leak detection system to be in a leak detection working state and selecting a plurality of vacuum standard leaks within a metering validity period; 2) respectively testing leak rates of the vacuum standard leaks according to the leak detection process of a vacuum leak detection method, and recording leak rate reaction values of the corresponding vacuum leak detection system in real time; and 3) processing data and evaluating. The linear capability testing method is extraordinarily convenient, the resource requirement is low, and the linear capability of the vacuum leak detection system can be estimated on the site; and additional tools and power consumption goods are not required, so that the cost is low.
Description
Technical field
The invention belongs to the leak hunting technology field, specifically, relate to the method for testing of the linear ability of a kind of vacuum leak detecting system, can be applied to the evaluation of the linear ability of vacuum leak detecting system.
Background technology
Vacuum testing is a kind of Comparison Method, thereby the linear ability of vacuum leak detecting system is then restricting the reliability of this kind leak hunting method test result to a great extent.The method that Current Domestic is not still tested the linear ability of vacuum leak detecting system, thus cause estimating the linear ability of vacuum leak detecting system.Therefore, this area is in the urgent need to a kind of method that can assess the linear ability of vacuum leak detecting system, to improve the reliability of vacuum testing test result.
Summary of the invention
The method of testing that the purpose of this invention is to provide the linear ability of a kind of vacuum leak detecting system is in order to improve the reliability of vacuum testing test result.
Concrete scheme provided by the present invention is as follows:
The linear aptitude tests method of vacuum leak detecting system of the present invention may further comprise the steps:
1) test is prepared:
A. vacuum leak detecting system is adjusted to the leak detection duty;
B. select somely at the vacuum standard small openings of metering in the term of validity, and these small openings should cover the range ability that needs in the engineering, and the quantity of suggestion vacuum standard small opening is more than 6, and is preferred more than 10.
2) experimental test:
Press the leak detection process of vacuum testing, test for the leak rate of each vacuum standard small opening respectively, and the leak rate reacting value of the corresponding vacuum leak detecting system of real time record.
3) data are processed and are estimated:
A. process the nominal value of vacuum standard small opening and the leak rate reacting value of corresponding leak detection system with it, and do the linear fit of y=kx+b form, wherein coordinate axis adopts logarithmic coordinate;
B. according to the result of linear fit and the numerical value of coefficient of determination R, the linear ability of this vacuum leak detecting system is estimated, even coefficient of determination R determines then that more than or equal to 0.90 the linear ability of this vacuum leak detecting system is good.
The characteristics of technical solution of the present invention comprise:
1. the unusual convenience of the present invention, resource requirement is few, can on-the-spot the linear ability of vacuum leak detecting system be assessed.
The present invention does not need extra frock and power consumption product, and is therefore with low cost.
Description of drawings
Synoptic diagram when Fig. 1 is the vacuum leak detecting system leak detection;
Wherein, 1-vacuum standard small opening, 2-vacuum chamber, 3-air release, 4-molecular pump, 5-mechanical pump, 6-helium mass spectrometer leak detector.
Fig. 2 is the result of the linear aptitude tests of certain vacuum leak detecting system.Horizontal ordinate I is the leak rate reacting value of vacuum leak detecting system, ordinate Q
lNominal value for the vacuum standard small opening.
Embodiment
What below introduce is embodiment as content of the present invention, below by embodiment described content of the present invention is further illustrated.Certainly, describe following embodiment and only be the content of example different aspect of the present invention, and should not be construed as the restriction scope of the invention.
As example, the present invention has adopted following a kind of concrete vacuum leak detecting system, and as shown in Figure 1, this vacuum leak detecting system is by vacuum chamber 2, air release 3, and molecular pump 4, mechanical pump 5, helium mass spectrometer leak detector 6 and connecting line therebetween form.The characteristics of this vacuum leak detecting system are the primes that helium mass spectrometer leak detector 6 is connected on molecular pump 4.
Test process of the present invention is: open vacuum leak detecting system, treat that the vacuum tightness in the vacuum chamber 2 is better than 1.3 * 10
-3During Pa, first vacuum standard small opening 1 is connected on the vacuum chamber 2, record the leak rate reacting value (its value is provided by the helium mass spectrometer leak detector 6 in the vacuum leak detecting system) of corresponding vacuum leak detecting system this moment, unload first vacuum standard small opening, change second vacuum standard small opening, can obtain equally the leak rate reacting value of second vacuum leak detecting system, by that analogy, until finish all vacuum standard small openings.
The linear aptitude tests method of vacuum leak detecting system of the present invention, the implementation step is as follows:
1) test is prepared:
A. vacuum leak detecting system is adjusted to the leak detection duty;
B. select somely at the vacuum standard small openings of metering in the term of validity, and these small openings should cover the range ability that needs in the engineering, and the quantity of suggestion vacuum standard small opening is more than 6, and is preferred more than 10.
2) experimental test:
Press the leak detection process of vacuum testing, test for the leak rate of each vacuum standard small opening respectively, and the leak rate reacting value of the corresponding vacuum leak detecting system of real time record.
3) data are processed and are estimated:
A. process the nominal value of vacuum standard small opening and the leak rate reacting value of corresponding vacuum leak detecting system with it, and do the linear fit of y=kx+b form;
B. because the coordinate axis numerical value of fitted figure is crossed over several orders of magnitude, therefore, logarithmic coordinate system is adopted in suggestion;
C. according to the evaluating (coefficient of determination R) of result and the match quality of linear fit, the linear ability of this vacuum leak detecting system is estimated;
If d. coefficient of determination R＞0.90 can think that then the linear ability of this vacuum leak detecting system is good.
Test such as the linear ability to certain vacuum leak detecting system, measured data are as shown in table 1.
The test figure of the linear ability of certain vacuum leak detecting system of table 1 test
According to the data of table 1, can make the figure shown in Fig. 2 (coordinate be logarithmic coordinate system), and do the linear fit of y=kx+b form at Fig. 2, wherein red part is matched curve.Observe the coefficient of determination R=0.99 of this red curve＞0.90, therefore, can assert that this vacuum leak detecting system has good linear ability.
Although according to embodiment the present invention is had been described in detail, it will be obvious to those skilled in the art that under the spirit and scope of the present invention any distortion of the present invention and change are possible, all should drop in protection scope of the present invention.
Claims (2)
1. the linear aptitude tests method of vacuum leak detecting system may further comprise the steps:
1) test is prepared:
A. vacuum leak detecting system is adjusted to the leak detection duty;
B. select somely at the vacuum standard small openings of metering in the term of validity, and these small openings should cover the range ability that needs in the engineering, and the quantity of vacuum standard small opening is more than 6;
2) experimental test:
Press the leak detection process of vacuum testing, test for the leak rate of each vacuum standard small opening respectively, and the leak rate reacting value of the corresponding vacuum leak detecting system of real time record;
3) data are processed and are estimated:
A. process the nominal value of vacuum standard small opening and the leak rate reacting value of corresponding leak detection system with it, and do the linear fit of y=kx+b form, wherein coordinate axis adopts logarithmic coordinate;
B. according to the result of linear fit and the numerical value of coefficient of determination R, the linear ability of this vacuum leak detecting system is estimated, even coefficient of determination R determines then that more than or equal to 0.90 the linear ability of this vacuum leak detecting system is good.
2. the linear aptitude tests method of vacuum leak detecting system according to claim 1, wherein, the quantity of vacuum standard small opening is greater than 10.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN2011102252997A CN102928162A (en) | 2011-08-08 | 2011-08-08 | Linear capability testing method for vacuum leak detection system |
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| CN2011102252997A CN102928162A (en) | 2011-08-08 | 2011-08-08 | Linear capability testing method for vacuum leak detection system |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105181269A (en) * | 2015-07-16 | 2015-12-23 | 兰州空间技术物理研究所 | Multi-channel fast calibration device of leakage detection device and method |
| CN105651464A (en) * | 2016-03-03 | 2016-06-08 | 北京卫星环境工程研究所 | Leakage detection sensitivity post-calibration method for large spacecraft leakage detection |
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| CN201318980Y (en) * | 2008-11-05 | 2009-09-30 | 北京中科科仪技术发展有限责任公司 | Helium mass spectrometer leak detector used for detecting integral leakage of product |
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| JPH0560645A (en) * | 1991-09-05 | 1993-03-12 | Mitsubishi Electric Corp | Multi-purpose inspection and gas analysis apparatus for vacuum system |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105181269A (en) * | 2015-07-16 | 2015-12-23 | 兰州空间技术物理研究所 | Multi-channel fast calibration device of leakage detection device and method |
| CN105181269B (en) * | 2015-07-16 | 2018-01-09 | 兰州空间技术物理研究所 | The multichannel fast calibration device and method of a kind of leakage detecting instrument |
| CN105651464A (en) * | 2016-03-03 | 2016-06-08 | 北京卫星环境工程研究所 | Leakage detection sensitivity post-calibration method for large spacecraft leakage detection |
| CN105651464B (en) * | 2016-03-03 | 2018-12-25 | 北京卫星环境工程研究所 | For scaling method after the leak detection sensitivities of Large Spacecraft leak detection |
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Application publication date: 20130213 |