CN102889779A - Vertical furnace - Google Patents
Vertical furnace Download PDFInfo
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- CN102889779A CN102889779A CN201210365870XA CN201210365870A CN102889779A CN 102889779 A CN102889779 A CN 102889779A CN 201210365870X A CN201210365870X A CN 201210365870XA CN 201210365870 A CN201210365870 A CN 201210365870A CN 102889779 A CN102889779 A CN 102889779A
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- jacking block
- vertical
- hold
- down support
- furnace
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Abstract
The invention relates to a furnace and discloses a vertical furnace. The vertical furnace comprises a furnace body, wherein a lifting mechanism is arranged at the bottom of the furnace body; the lifting mechanism comprises fixed supports, ejection blocks and a lifting driving unit; one or more vertical guide slots are formed in the fixed supports; the ejection blocks are respectively arranged in each vertical guide slot and are connected with the lifting driving unit; and the lifting driving unit drives the ejection blocks to lift in the vertical guide slots and drives the furnace body to lift, so that the height of the furnace body is adjusted. The height of the furnace body can be adjusted by employing the lifting mechanism, so that a thermostatic area is positioned at an ideal position by adjusting the height of the furnace body under the condition that the temperature area distribution in the furnace body is invariable; and moreover, the temperature area has consistency after the furnace body of equipment is replaced, more products can be positioned in the thermostatic area, and the furnace is suitable for heat treatment furnace with different process requirements for different products.
Description
Technical field
The present invention relates to a kind of body of heater, particularly relate to a kind of vertical furnace.
Background technology
At present, multiplex to all kinds of stoves in industries such as semiconductors, particularly for the extensive use of Equipment for Heating Processing, one of them very important parameter of Equipment for Heating Processing is that warm area distributes, and at present the warm area distribution situation in the used body of heater of heat-treatment production line is changeless, for different heat-treatment furnaces, it is not identical that its warm area distributes, this just requires body of heater of every replacing, all will distribute to regulate corresponding technical process and parameter according to new warm area, this stability to technique is also brought adverse influence.
Summary of the invention
The technical problem that (one) will solve
The technical problem to be solved in the present invention is how a kind of adjustable for height heat treatment furnace body is provided, and is in ideal position to guarantee the flat-temperature zone.
(2) technical scheme
In order to solve the problems of the technologies described above, a kind of vertical furnace provided by the invention comprises the body of heater body, and the outside of described body of heater body is provided with elevating mechanism, and described elevating mechanism is used for regulating the height of described body of heater body.
Wherein, described elevating mechanism is located at the bottom of described body of heater body.
Wherein, described elevating mechanism comprises hold-down support, jacking block and lifting driver element; Described hold-down support is provided with one or more vertical gathering sills, be respectively equipped with jacking block in each described vertical gathering sill, described jacking block is connected with the lifting driver element, the top of described jacking block props up the bottom of described body of heater body, and the described jacking block of described lifting drive unit drives moves up and down and drive the height that the body of heater body moved up and down and then regulated the body of heater body in described vertical gathering sill.
Wherein, the top of described jacking block also is provided with elevating bracket, and the top of described elevating bracket is connected with described body of heater body bottom, and the bottom of described elevating bracket and described hold-down support are interlocked.
Wherein, described elevating bracket is provided with the first groove that Open Side Down, and described hold-down support is provided with the projection that is complementary with described the first groove, and described jacking block is positioned on the described projection.
Wherein, described lifting driver element adopts fluid power system, and described fluid power system and described hold-down support are integrally formed, and described fluid power system directly drives jacking block and moves up and down.
Wherein, described lifting driver element comprises fluid power system and motion converting unit, and described motion converting unit is arranged on the inside of described hold-down support and is connected with described jacking block; Described fluid power system is arranged on the outside of described hold-down support, and by being connected to come the Indirect driven jacking block to move up and down with described motion converting unit.
Wherein, described lifting driver element comprises electric-motor drive unit and motion converting unit, and described motion converting unit is arranged on the inside of described hold-down support and is connected with described jacking block; Described electric-motor drive unit is arranged on the outside of described hold-down support, and by being connected to come the Indirect driven jacking block to move up and down with described motion converting unit.
Wherein, described elevating mechanism also comprises alignment pin, have the first vertical locating hole that is complementary with described alignment pin on the described hold-down support, the position relative with the described first vertical locating hole has the second vertical locating hole that is complementary with described alignment pin on the described elevating bracket, and the two ends of described alignment pin are installed in respectively in the described first vertical locating hole and the second vertical locating hole.
Wherein, described hold-down support is made as one or more.
(3) beneficial effect
A kind of vertical furnace that technique scheme provides, adopt elevating mechanism to realize that the height of body of heater body is adjustable, so that under the intrinsic warm area of body of heater distributes constant situation, by regulating the height of body of heater body, be in ideal position to guarantee the flat-temperature zone, warm area has uniformity behind the realization equipment replacement body of heater, and can so that product as much as possible be in the flat-temperature zone, this body of heater adapts to the heat-treatment furnace of different product, different process requirement, and Technology for Heating Processing is stable, has saved cost and resource.
Description of drawings
Fig. 1 is the structural representation of a kind of vertical furnace of the present invention;
Fig. 2 is the structural representation of elevating mechanism of the present invention;
Fig. 3 is the axonometric drawing of elevating mechanism of the present invention;
Fig. 4 is the internal structure schematic diagram of hold-down support of the present invention;
Fig. 5 is the profile of elevating bracket.
Wherein, 1, body of heater body; 2, hold-down support; 21, projection; 3, jacking block; 4, elevating bracket; 41, the first groove; 42, the second groove; 5, alignment pin; 6, oil inlet and outlet; A, flat-temperature zone.
The specific embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present invention is described in further detail.Following examples are used for explanation the present invention, but are not used for limiting the scope of the invention.
As depicted in figs. 1 and 2, a kind of vertical furnace that the embodiment of the invention provides comprises body of heater body 1, and the outside of this body of heater body is provided with elevating mechanism, and this elevating mechanism is used for regulating the height of body of heater body.Having realized that the height of body of heater body is adjustable has uniformity with constant temperature warm area after guaranteeing the equipment replacement body of heater, flat-temperature zone A is in ideal position, so that product as much as possible is in the flat-temperature zone A, this body of heater can adapt to the heat-treatment furnace of different product, different process requirement, the realization Technology for Heating Processing is stable, has saved cost and resource.
In order to alleviate the bearing capacity of elevating mechanism, to improve the service life of equipment, this elevating mechanism is located at the bottom of body of heater body 1.As shown in Figure 4 and Figure 5, wherein, elevating mechanism comprises hold-down support 2, jacking block 3 and lifting driver element; Hold-down support 2 be provided with one or more vertical gathering sills, be respectively equipped with jacking block 3 in each vertical gathering sill, one or more vertical gathering sills can be set at the length direction of hold-down support 2, be preferably two, lay respectively at the two ends of this hold-down support 2; Adopt the design of establishing the gathering sill of jacking block 3 in a plurality of can alleviate the load of each jacking block, reduce the requirement to jacking block, the service life that can improve jacking block; Jacking block 3 is connected with the lifting driver element, and the top of jacking block 3 props up the bottom of body of heater body 1, and lifting drive unit drives jacking block 3 is vertically moving up and down and driving the height that body of heater body 1 moved up and down and then regulated body of heater body 1 in the gathering sill.
In order to improve the balance of body of heater body 1 integral elevating motion, the top of jacking block 3 also is provided with elevating bracket 4, and the top of this elevating bracket 4 is connected with the bottom of body of heater body, and the bottom of this elevating bracket 4 and hold-down support 3 are interlocked.Hold-down support 2 can be made as one or more, can be the two ends that are symmetricly set on body of heater body 1 bottom.Preferably, the top of a plurality of jacking blocks 3 on each hold-down support 2 is connected with an elevating bracket 4, such as Fig. 3; The length of elevating bracket 4 is consistent with the length of hold-down support 2, so that the motive force of jacking block 3 is evenly distributed on the body of heater body bottom 11.Preferably, in order to prevent the balance of elevating bracket 4 whole body of heater body 1 of broken ring moving up and down the process medium dip, elevating bracket 4 is provided with the first groove 41 that Open Side Down, and hold-down support 2 is provided with the projection 21 that is complementary with this first groove 41, jacking block 3 is positioned on the projection 21, such as Fig. 2.Wherein, the first groove 41 of elevating bracket 4 is provided with the second groove 42 that is complementary with this jacking block 3 with the junction of jacking block 3, and jacking block 3 props up this second groove 42, such as Fig. 5.
Further, in order to guarantee that elevating bracket 4 vertically moves up and down, and the displacement that can not produce horizontal direction, such as Fig. 2 and Fig. 4, the elevating mechanism of present embodiment also comprises alignment pin 5, have the first vertical locating hole that is complementary with alignment pin 5 on the hold-down support 3, the position relative with this first vertical locating hole has the second vertical locating hole that is complementary with alignment pin on the elevating bracket 4, and the two ends of alignment pin 5 are installed in respectively in the first vertical locating hole and the second vertical locating hole.Alignment pin 5 can be set to one or more.
Preferably, lifting drive adopts the fluid power system integrally formed with hold-down support 2, and this fluid power system is located at the inside of hold-down support 2, and the part of hold-down support 2 oil cylinder as fluid power system is used, it has rationally utilized space, saving resource.This fluid power system is connected with jacking block 3, directly drives jacking block 3 and moves up and down.Wherein, the oil inlet and outlet 6 of fluid power system is arranged on the side of hold-down support 2.
Preferably, lifting drive comprises fluid power system and motion converting unit, and the motion converting unit is arranged on the inside of hold-down support 2 and is connected with jacking block 3; Fluid power system is arranged on the outside of hold-down support 2, and by being connected to come Indirect driven jacking block 3 to move up and down with the motion converting unit.
Preferably, the lifting driver element comprises electric-motor drive unit and motion converting unit, and the motion converting unit is arranged on the inside of hold-down support 2 and is connected with jacking block 3; Electric-motor drive unit is arranged on the outside of hold-down support 2, and by being connected to come Indirect driven jacking block 3 to move up and down with the motion converting unit.
Above-mentioned motion converting unit becomes to drive the power that jacking block 3 moves up and down with the power conversion of electric-motor drive unit or fluid power system, and it can be for being applicable to the movement transforming device of this power conversion.
The vertical furnace that adopts technique scheme to provide has realized that the height of body of heater body is adjustable, warm area in body of heater body 1 distributes in the constant situation, adopting the control of lifting driver element to drive jacking block 3 moves up and down, jacking block 3 promotes elevating bracket 4 drive body of heater bodies 1 and moves up and down, under the restriction of hold-down support 2 and alignment pin 6, elevating bracket 4 can only vertically move, guaranteed the firm and balance of height adjustment movement, obtain easily the uniformity of warm area behind the realization equipment replacement body of heater, and can guarantee that the flat-temperature zone is in ideal position, so that product as much as possible is in the flat-temperature zone A, this body of heater adapts to different product, the heat-treatment furnace that different process requires is saved cost and resource.
The above only is preferred embodiment of the present invention; should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the technology of the present invention principle; can also make some improvement and replacement, these improvement and replacement also should be considered as protection scope of the present invention.
Claims (10)
1. a vertical furnace is characterized in that, comprises the body of heater body, and the outside of described body of heater body is provided with elevating mechanism, and described elevating mechanism is used for regulating the height of described body of heater body.
2. vertical furnace as claimed in claim 1 is characterized in that, described elevating mechanism is located at the bottom of described body of heater body.
3. vertical furnace as claimed in claim 2 is characterized in that, described elevating mechanism comprises hold-down support, jacking block and lifting driver element; Described hold-down support is provided with one or more vertical gathering sills, be respectively equipped with jacking block in each described vertical gathering sill, described jacking block is connected with the lifting driver element, the top of described jacking block props up the bottom of described body of heater body, and the described jacking block of described lifting drive unit drives moves up and down and drive the height that the body of heater body moved up and down and then regulated the body of heater body in described vertical gathering sill.
4. vertical furnace as claimed in claim 3 is characterized in that, the top of described jacking block also is provided with elevating bracket, and the top of described elevating bracket is connected with described body of heater body bottom, and the bottom of described elevating bracket and described hold-down support are interlocked.
5. vertical furnace as claimed in claim 4 is characterized in that, described elevating bracket is provided with the first groove that Open Side Down, and described hold-down support is provided with the projection that is complementary with described the first groove, and described jacking block is positioned on the described projection.
6. vertical furnace as claimed in claim 3 is characterized in that, described lifting driver element adopts fluid power system, and described fluid power system and described hold-down support are integrally formed, and described fluid power system directly drives jacking block and moves up and down.
7. vertical furnace as claimed in claim 3 is characterized in that, described lifting driver element comprises fluid power system and motion converting unit, and described motion converting unit is arranged on the inside of described hold-down support and is connected with described jacking block; Described fluid power system is arranged on the outside of described hold-down support, and by being connected to come the Indirect driven jacking block to move up and down with described motion converting unit.
8. vertical furnace as claimed in claim 3 is characterized in that, described lifting driver element comprises electric-motor drive unit and motion converting unit, and described motion converting unit is arranged on the inside of described hold-down support and is connected with described jacking block; Described electric-motor drive unit is arranged on the outside of described hold-down support, and by being connected to come the Indirect driven jacking block to move up and down with described motion converting unit.
9. vertical furnace as claimed in claim 4, it is characterized in that, described elevating mechanism also comprises alignment pin, have the first vertical locating hole that is complementary with described alignment pin on the described hold-down support, the position relative with the described first vertical locating hole has the second vertical locating hole that is complementary with described alignment pin on the described elevating bracket, and the two ends of described alignment pin are installed in respectively in the described first vertical locating hole and the second vertical locating hole.
10. vertical furnace as claimed in claim 3 is characterized in that, described hold-down support is made as one or more.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210365870.XA CN102889779B (en) | 2012-09-27 | 2012-09-27 | Vertical furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210365870.XA CN102889779B (en) | 2012-09-27 | 2012-09-27 | Vertical furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102889779A true CN102889779A (en) | 2013-01-23 |
| CN102889779B CN102889779B (en) | 2015-01-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210365870.XA Active CN102889779B (en) | 2012-09-27 | 2012-09-27 | Vertical furnace |
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| Country | Link |
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| CN (1) | CN102889779B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103913059A (en) * | 2014-04-02 | 2014-07-09 | 湖州科富电子科技有限公司 | Vertical sintering furnace |
Citations (13)
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| US3312544A (en) * | 1965-12-16 | 1967-04-04 | Kerma Corp | Method and apparatus for making steel |
| SU761808A1 (en) * | 1978-11-10 | 1980-09-07 | Предприятие П/Я Г-4696 | Vacuum elevator furnace |
| SU1046582A1 (en) * | 1981-03-23 | 1983-10-07 | Khramov Yurij F | Vertical electric furnace |
| US4463857A (en) * | 1979-10-02 | 1984-08-07 | Bbc Brown, Boveri & Company, Limited | Lifting and swivelling device |
| EP0230180A1 (en) * | 1985-12-13 | 1987-07-29 | Clecim Sa | Process and installation for maintaining the lining of a furnace vessel |
| SU1444351A2 (en) * | 1987-04-20 | 1988-12-15 | Днепропетровский металлургический завод им.Петровского | Blast-furnace skip |
| CN2037834U (en) * | 1988-10-04 | 1989-05-17 | 彭仁达 | Suspended and movable circulating brickkiln |
| RU2042900C1 (en) * | 1993-06-10 | 1995-08-27 | Татарский научно-исследовательский и проектный институт нефтяной промышленности | Electric elevator furnace |
| CN2446478Y (en) * | 2000-07-15 | 2001-09-05 | 殷黎丽 | Hearth elevator of cupola |
| CN202054512U (en) * | 2010-12-31 | 2011-11-30 | 江苏丰东热技术股份有限公司 | Guide mechanism of heat treating furnace lift |
| CN202099187U (en) * | 2011-07-06 | 2012-01-04 | 重庆飞达电炉有限公司 | Electric heating lifting type annealing furnace |
| CN202359159U (en) * | 2011-11-08 | 2012-08-01 | 江西省永海锻造有限公司 | Rapid heat treatment quenching machine |
| CN202709707U (en) * | 2012-07-04 | 2013-01-30 | 苏良磁 | Lifting-type movable cupola |
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2012
- 2012-09-27 CN CN201210365870.XA patent/CN102889779B/en active Active
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3312544A (en) * | 1965-12-16 | 1967-04-04 | Kerma Corp | Method and apparatus for making steel |
| SU761808A1 (en) * | 1978-11-10 | 1980-09-07 | Предприятие П/Я Г-4696 | Vacuum elevator furnace |
| US4463857A (en) * | 1979-10-02 | 1984-08-07 | Bbc Brown, Boveri & Company, Limited | Lifting and swivelling device |
| SU1046582A1 (en) * | 1981-03-23 | 1983-10-07 | Khramov Yurij F | Vertical electric furnace |
| EP0230180A1 (en) * | 1985-12-13 | 1987-07-29 | Clecim Sa | Process and installation for maintaining the lining of a furnace vessel |
| SU1444351A2 (en) * | 1987-04-20 | 1988-12-15 | Днепропетровский металлургический завод им.Петровского | Blast-furnace skip |
| CN2037834U (en) * | 1988-10-04 | 1989-05-17 | 彭仁达 | Suspended and movable circulating brickkiln |
| RU2042900C1 (en) * | 1993-06-10 | 1995-08-27 | Татарский научно-исследовательский и проектный институт нефтяной промышленности | Electric elevator furnace |
| CN2446478Y (en) * | 2000-07-15 | 2001-09-05 | 殷黎丽 | Hearth elevator of cupola |
| CN202054512U (en) * | 2010-12-31 | 2011-11-30 | 江苏丰东热技术股份有限公司 | Guide mechanism of heat treating furnace lift |
| CN202099187U (en) * | 2011-07-06 | 2012-01-04 | 重庆飞达电炉有限公司 | Electric heating lifting type annealing furnace |
| CN202359159U (en) * | 2011-11-08 | 2012-08-01 | 江西省永海锻造有限公司 | Rapid heat treatment quenching machine |
| CN202709707U (en) * | 2012-07-04 | 2013-01-30 | 苏良磁 | Lifting-type movable cupola |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103913059A (en) * | 2014-04-02 | 2014-07-09 | 湖州科富电子科技有限公司 | Vertical sintering furnace |
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| Publication number | Publication date |
|---|---|
| CN102889779B (en) | 2015-01-21 |
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Address after: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee after: North China Science and technology group Limited by Share Ltd. Address before: 100015 Jiuxianqiao Chaoyang District, East Beijing Road, building M2, floor 1, No. 2 Patentee before: BEIJING SEVENSTAR ELECTRONIC Co.,Ltd. |
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Effective date of registration: 20180316 Address after: 100176 Beijing economic and Technological Development Zone, Wenchang Road, No. 8, No. Patentee after: BEIJING NAURA MICROELECTRONICS EQUIPMENT Co.,Ltd. Address before: 100015 No. 1 East Jiuxianqiao Road, Beijing, Chaoyang District Patentee before: North China Science and technology group Limited by Share Ltd. |
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