CN102879439A - Composite sensor for detection of multiple gases - Google Patents

Composite sensor for detection of multiple gases Download PDF

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Publication number
CN102879439A
CN102879439A CN2011101979237A CN201110197923A CN102879439A CN 102879439 A CN102879439 A CN 102879439A CN 2011101979237 A CN2011101979237 A CN 2011101979237A CN 201110197923 A CN201110197923 A CN 201110197923A CN 102879439 A CN102879439 A CN 102879439A
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China
Prior art keywords
acoustic wave
surface acoustic
saw
filter array
detection
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Pending
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CN2011101979237A
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Chinese (zh)
Inventor
李冬梅
侯成诚
闫学锋
周文
汪幸
刘明
谢常青
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Institute of Microelectronics of CAS
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Institute of Microelectronics of CAS
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Application filed by Institute of Microelectronics of CAS filed Critical Institute of Microelectronics of CAS
Priority to CN2011101979237A priority Critical patent/CN102879439A/en
Publication of CN102879439A publication Critical patent/CN102879439A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a composite sensor for detection of multiple gases. The composite sensor consists of a surface acoustic wave filter array, an electrochemical unit and at least one pump, wherein the surface acoustic wave filter array, the electrochemical unit and the pump are interconnected to form a composite sensor in a cascaded structure or a composite sensor in a parallel structure. The composite sensor for detection of multiple gases provided by the invention integrates the sensors of two technologies on a same sensor, realizes simultaneous detection of multiple gases on one sensor, and avoids the inconvenience resulted from environmental gas detection by two sensors. Besides, after integration, the two sensors use one power supply, thus reducing the sensor weight and being convenient to carry.

Description

A kind of compound sensor for detection of multiple gases
Technical field
The present invention relates to the gas sensor technical field, particularly a kind of compound sensor for detection of multiple gases.
Background technology
Along with science and technology, industrial expansion, environmental pollution is more and more serious, how to detect gas, and monitoring of environmental is in time known the concentration of gas in the environment also more and more to receive people's concern.The technology that detects at present gas mainly contains electrochemical process, Fiber Optic Sensor, surface acoustic wave method, catalytic combustion method, vapor-phase chromatography, infrared absorption method, semi-conductor type detection method and heat conduction method etc.The sensor that can hand of making based on above method has electrochemical sensor and surface acoustic wave sensor, and wherein electrochemical sensor is to CO, H 2S, NH 3, blood gas, the gases such as toxic agent that suffocate the detection effect better, surface acoustic wave sensor is better for the detection effect of macromolecular organic gas, such as gases such as benzene class, never poison, rotten to the corn toxic agent.
But at present electrochemical gas sensor and sonic surface wave gas sensors all are discrete types, if when needing to detect simultaneously asphyxiant and never poison in same environment, will need two sensors to detect, like this, not only consuming time, and carry comparatively trouble.So how on same sensor, can detect simultaneously above-mentioned multiple gases, it is a difficult problem on the hand-held sensor always.
Summary of the invention
The technical matters that (one) will solve
In view of this, fundamental purpose of the present invention has been to provide a kind of compound sensor for detection of multiple gases, to realize can detecting simultaneously multiple gases on same sensor.
(2) technical scheme
For achieving the above object, the invention provides a kind of compound sensor for detection of multiple gases, this compound sensor comprises a SAW (Surface Acoustic Wave) filter array, an electrochemical cell and at least one pump, wherein SAW (Surface Acoustic Wave) filter array, electrochemical cell and pump interconnect, and consist of the compound sensor of cascaded structure or the compound sensor of parallel-connection structure.
In the such scheme, the compound sensor of described cascaded structure is followed in series to form by a SAW (Surface Acoustic Wave) filter array, a pump and an electrochemical cell, the compound sensor of this cascaded structure by pump with gas to be measured from the air intake opening suction, by SAW (Surface Acoustic Wave) filter array and electrochemical cell, discharge by the gas outlet at last successively.
In the such scheme, the compound sensor of described parallel-connection structure is made of a SAW (Surface Acoustic Wave) filter array and an electrochemical cell parallel connection, SAW (Surface Acoustic Wave) filter array and the electrochemical cell pump of also connecting respectively wherein, these two pumps respectively with gas to be measured from the air intake opening suction, wherein a gas to be measured is by discharging from the gas outlet behind the SAW (Surface Acoustic Wave) filter array, and another gas to be measured is discharged from the gas outlet by behind the electrochemical cell.
In the such scheme, the preconcentrator of also connecting before the described SAW (Surface Acoustic Wave) filter array is for increasing the gas concentration to be measured that passes into the SAW (Surface Acoustic Wave) filter array.
In the such scheme, described preconcentrator is one and includes adsorbent and peripheral pipe with heater strip.
In the such scheme, described SAW (Surface Acoustic Wave) filter array is made of one or more SAW (Surface Acoustic Wave) filter, with utilization sound surface filtering technology for detection multiple gases.
(3) beneficial effect
Can find out from technique scheme, the present invention has following beneficial effect:
1, the compound sensor for detection of multiple gases provided by the invention, that sensor with two kinds of technology is integrated on the same sensor, realized on same sensor, can detecting simultaneously multiple gases, and avoided using the inconvenience of two sensors sense environmental gases, and two kinds of sensors after integrated are with using a power supply, reduced the weight of sensor, be more convenient for carrying.
2, the compound sensor for detection of multiple gases provided by the invention, wherein the SAW (Surface Acoustic Wave) filter array is made of one or more SAW (Surface Acoustic Wave) filter (SAW) device, and its purpose is to utilize SAW technology for detection multiple gases.
3, the compound sensor for detection of multiple gases provided by the invention, the compound sensor of wherein said cascaded structure are that two kinds of detection methods are used an aspiration pump simultaneously, its objective is the minimizing aspiration pump, thereby reduce power consumption and sensor bulk.
4, the compound sensor for detection of multiple gases provided by the invention, the compound sensor of wherein said parallel-connection structure is that two kinds of detection methods are respectively used an aspiration pump, its objective is that being convenient to electrochemical cell changes probe, thereby realize detecting more kinds of gases.
Description of drawings
Fig. 1 is the schematic diagram of the compound sensor of cascaded structure provided by the invention;
Fig. 2 is the schematic diagram of the compound sensor of parallel-connection structure provided by the invention.
Embodiment
For making the purpose, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and with reference to accompanying drawing, the present invention is described in more detail.
Please refer to Fig. 1 and Fig. 2, compound sensor for detection of multiple gases provided by the invention, comprise a SAW (Surface Acoustic Wave) filter array, an electrochemical cell and at least one pump, wherein SAW (Surface Acoustic Wave) filter array, electrochemical cell and pump interconnect, and consist of the compound sensor of cascaded structure or the compound sensor of parallel-connection structure.
Wherein, the compound sensor of described cascaded structure is followed in series to form by a SAW (Surface Acoustic Wave) filter array, a pump and an electrochemical cell, the compound sensor of this cascaded structure by pump with gas to be measured from the air intake opening suction, by SAW (Surface Acoustic Wave) filter array and electrochemical cell, discharge by the gas outlet at last successively.The compound sensor of cascaded structure as shown in Figure 1.
The compound sensor of described parallel-connection structure is made of a SAW (Surface Acoustic Wave) filter array and an electrochemical cell parallel connection, SAW (Surface Acoustic Wave) filter array and the electrochemical cell pump of also connecting respectively wherein, these two pumps respectively with gas to be measured from the air intake opening suction, wherein a gas to be measured is by discharging from the gas outlet behind the SAW (Surface Acoustic Wave) filter array, and another gas to be measured is discharged from the gas outlet by behind the electrochemical cell.The compound sensor of parallel-connection structure as shown in Figure 2.
The preconcentrator of also connecting before the described SAW (Surface Acoustic Wave) filter array is for increasing the gas concentration to be measured that passes into the SAW (Surface Acoustic Wave) filter array.Preconcentrator is one and includes adsorbent and peripheral pipe with heater strip, and its purpose is to increase the gas concentration to be measured that passes into the SAW (Surface Acoustic Wave) filter array, makes SAW (Surface Acoustic Wave) filter better detect minimum gas.
The compound sensor of cascaded structure is at first with gas suction preconcentrator to be measured, and then gas to be measured passes into SAW (Surface Acoustic Wave) filter array and electrochemical cell successively, last Exhaust Gas.The compound sensor of parallel-connection structure is with gas difference suction SAW (Surface Acoustic Wave) filter array to be measured and electrochemical cell, last Exhaust Gas.
Wherein, the SAW (Surface Acoustic Wave) filter array is made of one or more SAW (Surface Acoustic Wave) filter, and its purpose is to utilize SAW technology for detection multiple gases.The compound sensor of cascaded structure is that two kinds of detection methods are used an aspiration pump simultaneously, its objective is the minimizing aspiration pump, thereby reduces power consumption and sensor bulk.The compound sensor of parallel-connection structure is that two kinds of detection methods are respectively used an aspiration pump, its objective is that being convenient to electrochemical cell changes probe, thereby realizes detecting more kinds of gases.
The present invention is integrated on the same sensor by the sensor with two kinds of technology, thereby avoid using the inconvenience of two sensors sense environmental gases, and two kinds of technology of the sensor after integrated have reduced the weight of sensor with using a power supply, are more convenient for carrying.
Above-described specific embodiment; purpose of the present invention, technical scheme and beneficial effect are further described; institute is understood that; the above only is specific embodiments of the invention; be not limited to the present invention; within the spirit and principles in the present invention all, any modification of making, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (6)

1. compound sensor for detection of multiple gases, it is characterized in that, this compound sensor comprises a SAW (Surface Acoustic Wave) filter array, an electrochemical cell and at least one pump, wherein SAW (Surface Acoustic Wave) filter array, electrochemical cell and pump interconnect, and consist of the compound sensor of cascaded structure or the compound sensor of parallel-connection structure.
2. the compound sensor for detection of multiple gases according to claim 1, it is characterized in that, the compound sensor of described cascaded structure is followed in series to form by a SAW (Surface Acoustic Wave) filter array, a pump and an electrochemical cell, the compound sensor of this cascaded structure by pump with gas to be measured from the air intake opening suction, by SAW (Surface Acoustic Wave) filter array and electrochemical cell, discharge by the gas outlet at last successively.
3. the compound sensor for detection of multiple gases according to claim 1, it is characterized in that, the compound sensor of described parallel-connection structure is made of a SAW (Surface Acoustic Wave) filter array and an electrochemical cell parallel connection, SAW (Surface Acoustic Wave) filter array and the electrochemical cell pump of also connecting respectively wherein, these two pumps respectively with gas to be measured from the air intake opening suction, wherein a gas to be measured is by discharging from the gas outlet behind the SAW (Surface Acoustic Wave) filter array, and another gas to be measured is discharged from the gas outlet by behind the electrochemical cell.
4. according to claim 2 or 3 described compound sensors for detection of multiple gases, it is characterized in that, the preconcentrator of also connecting before the described SAW (Surface Acoustic Wave) filter array is for increasing the gas concentration to be measured that passes into the SAW (Surface Acoustic Wave) filter array.
5. the compound sensor for detection of multiple gases according to claim 4 is characterized in that, described preconcentrator is one and includes adsorbent and peripheral pipe with heater strip.
6. the compound sensor for detection of multiple gases according to claim 1 is characterized in that, described SAW (Surface Acoustic Wave) filter array is made of one or more SAW (Surface Acoustic Wave) filter, with utilization sound surface filtering technology for detection multiple gases.
CN2011101979237A 2011-07-15 2011-07-15 Composite sensor for detection of multiple gases Pending CN102879439A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106442640A (en) * 2015-08-06 2017-02-22 宏达国际电子股份有限公司 Gas detection apparatus and gas detection method using gas detection apparatus
CN106940353A (en) * 2017-04-28 2017-07-11 中国科学院电子学研究所 Many sensing chromatogram detectors and its detection method
US10520490B2 (en) 2015-08-06 2019-12-31 Htc Corporation Gas detecting device and gas detecting method using the same
CN110954655A (en) * 2019-11-18 2020-04-03 核工业北京化工冶金研究院 Dynamic increase and decrease measuring device and method for inspection device of integrated control room of in-situ leaching uranium mine

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CN101368927A (en) * 2008-09-08 2009-02-18 无锡尚沃生物科技有限公司 Self-calibration gas sensor

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
CN1301342A (en) * 1998-03-20 2001-06-27 塞莱诺科学股份有限公司 Handheld sensing apparatus
CN101368927A (en) * 2008-09-08 2009-02-18 无锡尚沃生物科技有限公司 Self-calibration gas sensor

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106442640A (en) * 2015-08-06 2017-02-22 宏达国际电子股份有限公司 Gas detection apparatus and gas detection method using gas detection apparatus
US10520490B2 (en) 2015-08-06 2019-12-31 Htc Corporation Gas detecting device and gas detecting method using the same
CN106940353A (en) * 2017-04-28 2017-07-11 中国科学院电子学研究所 Many sensing chromatogram detectors and its detection method
CN110954655A (en) * 2019-11-18 2020-04-03 核工业北京化工冶金研究院 Dynamic increase and decrease measuring device and method for inspection device of integrated control room of in-situ leaching uranium mine

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Application publication date: 20130116