CN102866628A - Method for closed-loop control of power input - Google Patents
Method for closed-loop control of power input Download PDFInfo
- Publication number
- CN102866628A CN102866628A CN2011101865039A CN201110186503A CN102866628A CN 102866628 A CN102866628 A CN 102866628A CN 2011101865039 A CN2011101865039 A CN 2011101865039A CN 201110186503 A CN201110186503 A CN 201110186503A CN 102866628 A CN102866628 A CN 102866628A
- Authority
- CN
- China
- Prior art keywords
- power supply
- closed
- loop control
- amount
- input quantity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Abstract
The invention relates to a method for closed-loop control of power input, and belongs to the field of semiconductor manufacturing. The method is characterized in that a certain physical return quantity is associated with a power input quantity through a certain algorithm, so that the return quantity and the power input quantity are in a closed loop, and the input quantity is controlled by the return quantity. The method is used for an ion implanter. As the input quantity is controlled by the return quantity, power can be more accurately controlled by software, and input errors are decreased to a certain extent and are gradually diminished as time goes on.
Description
Technical field
The present invention relates to the control method of Implantation electromechanical source input.The method can so that software is more accurate to the control of power supply, reduced to a certain extent error originated from input, and As time goes on and gradually error diminish by the amount of returning control inputs amount.
Background technology
The SIC (semiconductor integrated circuit) manufacturing process has developed into 12 inches wafers, nm technology node period.Along with the wafer size is increasing, the unit component size is more and more less, and is also just more and more higher to the performance requirement of semiconductor manufacturing equipment.Ion implantation apparatus is requisite key equipment in the semiconductor device manufacturing process.In order to improve the performance of ion implantation apparatus, make its development of satisfying the requirement of modern large wafer, nano-device production technology and adapting to the semiconductor process techniques in future, must develop efficient full-automatic control system.
In the ion implantation apparatus, many power supplys are arranged, comprise high-voltage power supply, current source etc.The control quality of these power supplys has directly affected the stability of educt beaming flow.
During the control of general power supply, whether just no longer change after just input quantity being arranged is just monitored power supply and is reported an error, and can not well regulate for the amount of the returning deviation that the instability of power supply self may cause.
Summary of the invention
The present invention mainly is in order to control more accurately power supply, to obtain the accurate stable target amount of returning.
Concrete steps are as follows:
＜1〉as required, primary power input quantity (1) is set, power supply can obtain power supply input quantity (2) this moment.
＜2〉after amount to be entered is delivered to power supply, with the actual power supply (3) that is set to of input quantity.This moment, power supply can make a change (4) according to input quantity, and meanwhile, the target amount of returning is affected by power supply and makes a change (5).
＜3〉gather the target amount of returning (6), then detect the amount of returning whether go beyond the scope (7).(11) then report an error if go beyond the scope, and withdraw from (12).If do not go beyond the scope (8), then target rreturn value actual acquisition amount and expectation value are compared (9), (for example, PID) calculate suitable input quantity (10) according to comparative result in conjunction with certain algorithm.
The suitable input quantity that＜4〉will newly calculate sends to power supply, and power supply obtains power supply input quantity (2), thereby carries out the closed loop cycle flow process of next round.
The present invention has following remarkable advantage:
1. reduced the error of the actual amount of returning of the target amount of returning and desired amount, and passed in time error and be minimizing trend.
2. increased the stability of power supply output.
Embodiment
Below in conjunction with specific embodiment the present invention is described in further detail, but not as the restriction to patent of the present invention.
As shown in Figure 1, the input quantity that we want to control grid bias power supply is 2A (2), utilizes simultaneously pid algorithm to obtain suitable input quantity (10).At first, 2A is set to grid bias power supply (1) as the primary power input quantity, power-supply controller of electric with this 2A as the actual power supply (3) that is set to of input quantity, grid bias power supply is made change (4) according to this input quantity of 2A, and the target amount of returning is affected by power supply and makes change (5) simultaneously.Power-supply controller of electric gathers this target amount of returning (6), if bias voltage is enough accurate, and ignores other all influence factors, and this collection value should be 2A, but in fact this rreturn value is subject to the impact of each side, and is not equal to 2A.This rreturn value is detected (7), detect it and whether exceed normal range, such as, whether less than 1A or greater than 4A.If exceeded scope (11), so directly make mistakes and withdraw from (12), because this moment, power supply rreturn value error was too large, itself problem appearred in power supply.If do not go beyond the scope (8), we can regulate the power supply input quantity so, obtain this goal-setting amount of 2A.By the target amount of returning actual acquisition amount, may be 1.8A or 2.4A, compare (9) with the 2A of expectation, utilize pid algorithm to calculate, if suitable input quantity (10) when going for the input quantity of 2A, and power-supply controller of electric has obtained this power supply input quantity (2), then it is set to power supply (3), finishes the circulation of a closed loop.Through after a plurality of closed loop cycle, the time rreturn value of bias voltage will be more and more close to 2A.
Description of drawings
Fig. 1 is closed-loop control power supply input flow chart illustration.
Specific embodiment of the present invention elaborates content of the present invention.For persons skilled in the art, any apparent change of without departing from the premise in the spirit of the present invention it being done all consists of the infringement to patent of the present invention, will bear corresponding legal liabilities.
Claims (4)
1. the method for a closed-loop control power supply input is characterized in that: primary power input quantity (1) can be set as closed-loop control, the basis of calibration.
2. whether the method for a closed-loop control power supply input is characterized in that: can constantly detect the amount of returning and go beyond the scope (7), when going beyond the scope (11), can report an error, withdraw from (12).
3. the method for closed-loop control power supply input is characterized in that: rreturn value do not go beyond the scope (8), can carry out the target amount of returning actual acquisition amount and desired amount and compare (9), and (for example, PID) calculate suitable input quantity (10) according to comparative result in conjunction with certain algorithm.
4. the method for a closed-loop control power supply input is characterized in that: after closed loop begins, by constantly obtaining power supply input quantity (2), and the actual power supply (3) that is set to of input quantity regulated power supply, so that the actual physics amount of returning infinite approach and the desired amount of the target amount of returning.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101865039A CN102866628A (en) | 2011-07-05 | 2011-07-05 | Method for closed-loop control of power input |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101865039A CN102866628A (en) | 2011-07-05 | 2011-07-05 | Method for closed-loop control of power input |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102866628A true CN102866628A (en) | 2013-01-09 |
Family
ID=47445558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011101865039A Pending CN102866628A (en) | 2011-07-05 | 2011-07-05 | Method for closed-loop control of power input |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102866628A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1758520A (en) * | 2005-10-31 | 2006-04-12 | 华中科技大学 | Inverter of instantaneous voltage PID analogue controlled |
| CN1828467A (en) * | 2005-03-03 | 2006-09-06 | 华邦电子股份有限公司 | Adjustable stabilized voltage supply device |
| US7615974B1 (en) * | 2007-11-08 | 2009-11-10 | National Semiconductor Corporation | High dimming ratio LED drive circuit |
| US20100114748A1 (en) * | 2008-10-31 | 2010-05-06 | Wachovia Corporation | Predictive advisor system and method for communicating with a user regarding a payment account in a computer network |
| CN201557040U (en) * | 2009-11-24 | 2010-08-18 | 江阴市星火电子科技有限公司 | Intelligent voltage and current double-closed-loop control system |
-
2011
- 2011-07-05 CN CN2011101865039A patent/CN102866628A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1828467A (en) * | 2005-03-03 | 2006-09-06 | 华邦电子股份有限公司 | Adjustable stabilized voltage supply device |
| CN1758520A (en) * | 2005-10-31 | 2006-04-12 | 华中科技大学 | Inverter of instantaneous voltage PID analogue controlled |
| US7615974B1 (en) * | 2007-11-08 | 2009-11-10 | National Semiconductor Corporation | High dimming ratio LED drive circuit |
| US20100114748A1 (en) * | 2008-10-31 | 2010-05-06 | Wachovia Corporation | Predictive advisor system and method for communicating with a user regarding a payment account in a computer network |
| CN201557040U (en) * | 2009-11-24 | 2010-08-18 | 江阴市星火电子科技有限公司 | Intelligent voltage and current double-closed-loop control system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP2390751B1 (en) | Maximum power point tracking method, photovoltaic system controller and photovoltaic system | |
| JP6476353B2 (en) | Power plant ramp rate control | |
| US20080116180A1 (en) | Methods and systems for controlling electric heaters | |
| CN108448874B (en) | Method for controlling power conversion system and control apparatus of power conversion system | |
| CN101795071A (en) | DC-DC power supply device, voltage regulation method and network equipment | |
| JP6531501B2 (en) | Battery control unit | |
| CN101614999A (en) | A kind of fuzzy control method of stable operation of static dust-removal system | |
| CN102866628A (en) | Method for closed-loop control of power input | |
| JP2013167919A (en) | Device and method for reduction of power consumption | |
| CN103887154A (en) | Method for reinforcing ionization radiation resistance of bipolar device based on passivation layer ion injection mode | |
| CN104851819B (en) | Temperature monitoring method in ion implantation process | |
| Perfumo et al. | An analytical characterisation of cold-load pickup oscillations in thermostatically controlled loads | |
| CN108352807A (en) | The improvement power control of one group of photovoltaic panel contributes to frequency to adjust and without using storage medium | |
| CN104332375B (en) | Ion source digital IIR filters parameter self-tuning system and method | |
| CN109524297A (en) | A kind of ion implantation apparatus angle monitor method | |
| CN102834995A (en) | System and method for balancing input current with parallel power supplies | |
| CN109710020B (en) | Active approximation type power control method and system for new energy power station | |
| CN109687699B (en) | Control method for real-time tracking output state soft adjustment of digital voltage current loop | |
| CN101178582B (en) | Power controller in semi-conductor production facility and method | |
| CN114938201B (en) | Scanning method and device of photovoltaic grid-connected inverter | |
| CN109617136B (en) | Method for adjusting output power of wind power plant | |
| Subramany et al. | CPE run-to-run overlay control for high volume manufacturing | |
| US20130278228A1 (en) | Method of controlling speed of a variable speed generator | |
| Dlapa | Air-heating set control via direct search method and structured singular value | |
| Ren et al. | Minimum entropy incremental control for nonlinear stochastic systems with non-gaussian disturbances and uncertain parameters |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| DD01 | Delivery of document by public notice |
Addressee: Zhongkexin Electronic Equipment Co., Ltd., Beijing Document name: the First Notification of an Office Action |
|
| DD01 | Delivery of document by public notice |
Addressee: Zhongkexin Electronic Equipment Co., Ltd., Beijing Document name: Notification that Application Deemed to be Withdrawn |
|
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20130109 |