CN102864497A - Heat insulating system of sapphire single crystal furnace - Google Patents
Heat insulating system of sapphire single crystal furnace Download PDFInfo
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- CN102864497A CN102864497A CN2012103617979A CN201210361797A CN102864497A CN 102864497 A CN102864497 A CN 102864497A CN 2012103617979 A CN2012103617979 A CN 2012103617979A CN 201210361797 A CN201210361797 A CN 201210361797A CN 102864497 A CN102864497 A CN 102864497A
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- thermofin
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Abstract
The invention relates to a heat insulating system of a sapphire single crystal furnace. The heat insulating system comprises a middle heat insulating layer and a lower heat insulating layer, wherein an internal layer of the middle heat insulating layer is a central heat insulating tungsten screen; the central heat insulating tungsten screen and the middle heat insulating layer are assembled on a supporting steel plate on an internal wall of a chamber body through positioning pins; the central heat insulating tungsten screen and the middle heat insulating layer are uniformly separated through tungsten filament springs which are arranged at intervals through the middle heat insulating layer; upper heat insulating layers are arranged on tops of the central heat insulating tungsten screen and the middle heat insulating layer; the lower heat insulating layer is assembled on a lower copper tray of a lower flange; a tower type heat insulating layer is arranged at a centre of the upper heat insulating layer; the tower type heat insulating layer is connected with an upper flange through suspending bolts; corresponding positioning holes are arranged among the lower heat insulating layer, the upper heat insulating layer and the tower type heat insulating layer; molybdenum separating rings which have the same height are arranged among the positioning holes; molybdenum bolts respectively penetrate through each positioning hole in the upper heat insulating layer and the tower type heat insulating layer and the molybdenum separating rings among layers, and are then fixed through molybdenum nuts; and in the lower heat insulating layer, a tungsten column penetrates through the positioning holes and the molybdenum separating rings among the layers, and then the lower heat insulating layer is fixedly connected in series by the tungsten column.
Description
Technical field
The present invention relates to a kind of High Temperature Furnaces Heating Apparatus inner heat insulation system, especially a kind of heat-insulation and heat-preservation system that can be satisfied with the required good thermal insulation property of Sapphire Crystal Growth for sapphire single-crystal furnace.
Background technology
Sapphire single-crystal furnace is crystal growth equipment important in the LED industry.Thermofin is the heat insulation and preservation device in the sapphire single-crystal furnace, in order to ensure the temperature homogeneity of thermal field in the stove, improves heat utilization rate.Because sapphire monocrystal must slowly be grown under high temperature (about 2050 ° of C) condition and be formed, the homogeneity of the thermal field under the hot conditions in the stove and heat-insulating property directly determine the quality of crystal growth, and therefore design uses the heat-insulation and heat-preservation system with better resistance toheat and heat-insulating property most important in sapphire single-crystal furnace.
The heat-insulation and heat-preservation system that the tradition sapphire single-crystal furnace is commonly used adopts tungsten and molybdenum material, usually includes only middle part thermofin and bottom thermofin.A thick tungsten cylinder (wall thickness is about 10mm) is housed outside well heater; the tungsten cylinder then is outward the middle part thermofin; thin-walled molybdenum matter cylinder by a multi-layer nested is assembled; and the bottom thermofin is the moulding of multilayer thin-walled molybdenum plate closed assembly; the top thermofin is not set and for the protection of the thermofin of seeding device in the stove; thermal insulation system is not sealed, and will affect homogeneity and the heat-insulating property of the thermal field in the stove.Simultaneously, bottom thermofin innermost layer heat shield material is metal molybdenum in the tradition sapphire single-crystal furnace, highly volatile destroys under the hot conditions, cause thermofin not high work-ing life, and have a strong impact on hot heat-insulating property and uniform and stable property, and not volatile under hot conditions of tungsten, stability is better.
At present; in sapphire single-crystal furnace except being provided with the heat insulation tungsten screen of middle thermofin, center and lower thermofin; also be provided with the tower thermofin of protection seeding lever apparatus; the upper thermofin on protection sapphire single-crystal furnace top; and employing center heat insulation tungsten screen replacement heavy wall tungsten cylinder, form the closed loop thermal insulation system, and change the thin-walled molybdenum sheet of thermofin innermost layer into the thin-wall tungsten sheet; with the reliability of raising thermofin, and the design that postpones work-ing life is not seen in report.
Summary of the invention
The object of the invention is to: the heat-insulation and heat-preservation system for the long brilliant stove of existing sapphire adopts non-closed-loop structure form, and the thermal field heat-insulating property is bad, and thermofin work-ing life is with the problem such as low.A kind of novel heat-insulation and heat-preservation system that is used for reliably sapphire single-crystal furnace is provided.
The object of the present invention is achieved like this: a kind of heat-insulation and heat-preservation system for sapphire single-crystal furnace, comprise middle thermofin and lower thermofin, and it is characterized in that:
A) heat insulation tungsten screen centered by the thermofin internal layer in, the heat insulation tungsten screen in center and middle thermofin are assemblied in by steady brace on the supporting steel plate of cavity inner wall setting, all evenly separate by middle thermofin interval tungsten filament spring between the heat insulation tungsten screen in center and middle each layer of thermofin;
B) top of the heat insulation tungsten screen in center and middle thermofin is provided with the upper thermofin of coupling, and lower thermofin then is assemblied on the lower copper dish of lower flange, with the heat insulation tungsten screen in center and middle thermofin coupling;
C) upper thermofin center is provided with concentric tower thermofin, and described tower thermofin is connected with upper flange by hanging bolt and cooperates with the formation of arranging of upper thermofin level;
D) lower thermofin, upper thermofin, each interlayer of tower thermofin are provided with corresponding pilot hole, be provided with contour molybdenum spacer ring between pilot hole corresponding to interlayer, after the molybdenum bolt passes each pilot hole and interlayer molybdenum spacer ring in upper thermofin, the tower thermofin, fix by the molybdenum nut, and pass pilot hole and interlayer molybdenum spacer ring by the tungsten post in the lower thermofin, and its series connection is fixing.
In the present invention: one deck cylinder that the heat insulation tungsten screen in center is spliced by monoblock rolled metal tungsten coiled sheet system or polylith rolled metal tungsten plate.
In the present invention: middle thermofin is 9 ~ 11 layers of nested component location guide core structure of split, and each layer core structure all adopts monoblock rolled metal molybdenum plate to roll or polylith rolled metal molybdenum plate is spliced.
In the present invention: upper thermofin, lower thermofin, tower thermofin all adopt the stacked structure of multilayer parallel, and its interior layer of plate all adopts rolled metal tungsten plate, and all the other each layers all adopt the rolled metal molybdenum plate.
In the present invention: the tungsten post of fixing lower thermofin is installed on the lower copper dish, and the tungsten post passes pilot hole and the interlayer molybdenum spacer ring and its series connection is fixing of lower each layer of thermofin.
The invention has the advantages that: because the heat insulation tungsten screen in employing center replaces heavy wall tungsten cylinder in the heat-insulation and heat-preservation system, provide cost savings it and implement conveniently; Because the heat insulation tungsten screen in center, middle thermofin, lower thermofin, tower thermofin and upper thermofin form the closed loop thermal insulation system by assembly relation in stove, heat-insulating property and temperature homogeneity in the sapphire single-crystal furnace have been improved; Because the thermofin innermost layer is designed to the thin-wall tungsten sheet, the reliability of thermofin is high, long service life.Because each thermofin split design and installation are conducive to follow-up maintenance replacing and maintenance.
Description of drawings
Fig. 1 is a kind of example structure assembling synoptic diagram of the heat-insulation and heat-preservation system that the present invention relates to;
Fig. 2 is the A section enlarged view (upper thermofin is local) among Fig. 1;
Fig. 3 is the B section enlarged view (tower thermofin is local) among Fig. 1;
Fig. 4 is the C section enlarged view (lower thermofin is local) among Fig. 1;
Fig. 5 is the D section enlarged view (middle thermofin is local) among Fig. 1.
Among the figure: 1, cavity, 2, upper flange, 3, upper copper dish, 4, lower flange, 5, lower copper dish, 6, the heat insulation tungsten screen in center, 7, middle thermofin, 8, upper thermofin, 9, tower thermofin, 10, lower thermofin, 11, steady brace, 12, middle thermofin interval tungsten filament spring, 13, molybdenum spacer ring, 14, molybdenum bolt, 15, the molybdenum nut, 16, the tungsten post.
Embodiment
Accompanying drawing discloses the concrete structure of a kind of embodiment that the present invention relates to without limitation, below in conjunction with accompanying drawing this embodiment of the present invention is done to describe further.
As seen from Figure 1, the present invention includes middle thermofin 7 and lower thermofin 10, heat insulation tungsten screen 6 centered by middle thermofin 7 internal layers, the heat insulation tungsten screen 6 in center and middle thermofin 7 are assemblied in by steady brace 11 on the supporting steel plate of cavity 1 inwall setting, all evenly separate by middle thermofin interval tungsten filament spring 12 between the heat insulation tungsten screen 6 in center and middle thermofin 7 each layers.The top of the heat insulation tungsten screen 6 in center and middle thermofin 7 is provided with the upper thermofin 8 of coupling, and lower thermofin 10 then is assemblied on the lower copper dish 5 of lower flange 4, with the heat insulation tungsten screen 6 in center and middle thermofin 7 couplings.Upper thermofin 8 centers are provided with concentric tower thermofin 9, and described tower thermofin 9 is connected with upper flange 2 by hanging bolt and arranges to form with upper thermofin 8 levels and cooperates.Lower thermofin 10, upper thermofin 8, tower thermofin 9 each interlayer are provided with corresponding pilot hole, be provided with contour molybdenum spacer ring 13 between pilot hole corresponding to interlayer, after molybdenum bolt 14 passes each pilot hole and interlayer molybdenum spacer ring 13 in upper thermofin 8, the tower thermofin 9, fixing by molybdenum nut 15, and pass pilot hole and interlayer molybdenum spacer ring 13 by tungsten post 16 in the lower thermofin 10, and its series connection is fixing.
During implementation: the heat insulation tungsten screen 6 in center can form one deck cylinder by monoblock rolled metal tungsten coiled sheet system, also can be spliced to form one deck cylinder by polylith rolled metal tungsten plate.Middle thermofin 7 is 9 ~ 11 layers of nested component location guide core structure of split, and each layer core structure all can adopt monoblock rolled metal molybdenum plate to roll, and also can adopt polylith rolled metal molybdenum plate to be spliced.Upper thermofin 8, lower thermofin 10, tower thermofin 9 all adopt the stacked structure of multilayer parallel, and its interior layer of plate all adopts rolled metal tungsten plate, and all the other each layers all adopt the rolled metal molybdenum plate.The tungsten post 16 of fixing lower thermofin 10 is installed on the lower copper dish 5, and tungsten post 16 passes pilot hole and interlayer molybdenum spacer ring 13, and its series connection is fixing.
Claims (5)
1. a heat-insulation and heat-preservation system that is used for sapphire single-crystal furnace comprises middle thermofin and lower thermofin, it is characterized in that:
A) heat insulation tungsten screen centered by the thermofin internal layer in, the heat insulation tungsten screen in center and middle thermofin are assemblied in by steady brace on the supporting steel plate of cavity inner wall setting, all evenly separate by middle thermofin interval tungsten filament spring between the heat insulation tungsten screen in center and middle each layer of thermofin;
B) top of the heat insulation tungsten screen in center and middle thermofin is provided with the upper thermofin of coupling, and lower thermofin then is assemblied on the lower copper dish of lower flange, with the heat insulation tungsten screen in center and middle thermofin coupling;
C) upper thermofin center is provided with concentric tower thermofin, and described tower thermofin is connected with upper flange by hanging bolt and cooperates with the formation of arranging of upper thermofin level;
D) lower thermofin, upper thermofin, each interlayer of tower thermofin are provided with corresponding pilot hole, be provided with contour molybdenum spacer ring between pilot hole corresponding to interlayer, after the molybdenum bolt passes each pilot hole and interlayer molybdenum spacer ring in upper thermofin, the tower thermofin, fix by the molybdenum nut, and pass pilot hole and interlayer molybdenum spacer ring by the tungsten post in the lower thermofin, and its series connection is fixing.
2. sapphire single-crystal furnace heat-insulation and heat-preservation according to claim 1 system is characterized in that: one deck cylinder that the heat insulation tungsten screen in center is spliced by monoblock rolled metal tungsten coiled sheet system or polylith rolled metal tungsten plate.
3. sapphire single-crystal furnace heat-insulation and heat-preservation according to claim 1 system, it is characterized in that: middle thermofin is 9 ~ 11 layers of nested component location guide core structure of split, and each layer core structure all adopts monoblock rolled metal molybdenum plate to roll or polylith rolled metal molybdenum plate is spliced.
4. sapphire single-crystal furnace heat-insulation and heat-preservation according to claim 1 system is characterized in that:
Upper thermofin, lower thermofin, tower thermofin all adopt the stacked structure of multilayer parallel, and its interior layer of plate all adopts rolled metal tungsten plate, and all the other each layers all adopt the rolled metal molybdenum plate.
5. described sapphire single-crystal furnace heat-insulation and heat-preservation system one of according to claim 1 ~ 4, it is characterized in that: the tungsten post of fixing lower thermofin is installed on the lower copper dish, and the tungsten post passes pilot hole and the interlayer molybdenum spacer ring and its series connection is fixing of lower each layer of thermofin.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2012103617979A CN102864497A (en) | 2012-09-26 | 2012-09-26 | Heat insulating system of sapphire single crystal furnace |
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| CN2012103617979A CN102864497A (en) | 2012-09-26 | 2012-09-26 | Heat insulating system of sapphire single crystal furnace |
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| CN102864497A true CN102864497A (en) | 2013-01-09 |
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| CN2012103617979A Pending CN102864497A (en) | 2012-09-26 | 2012-09-26 | Heat insulating system of sapphire single crystal furnace |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103215638A (en) * | 2013-04-02 | 2013-07-24 | 苏州海铂晶体有限公司 | Step-shaped heat shield of sapphire crystal growing furnace |
| CN104152995A (en) * | 2014-09-04 | 2014-11-19 | 南京晶升能源设备有限公司 | Combined bottom thermal insulating heat shield for sapphire single crystal furnace |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85100534A (en) * | 1985-04-01 | 1986-08-06 | 中国科学院上海光学精密机械研究所 | The device of the terraced method growth of a kind of temperature high temperature crystal |
| CN202247014U (en) * | 2011-09-28 | 2012-05-30 | 刘小梅 | Circular truncated cone-shaped heat shield for sapphire single crystal furnace |
| CN102605426A (en) * | 2012-03-14 | 2012-07-25 | 苏州先端稀有金属有限公司 | Thermal field structure for generating temperature difference in ultra-high temperature state |
| CN102677168A (en) * | 2011-03-15 | 2012-09-19 | 上海晨安电炉制造有限公司 | Thermal-field-adjustable furnace for growing crystals through kyropoulos method |
-
2012
- 2012-09-26 CN CN2012103617979A patent/CN102864497A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85100534A (en) * | 1985-04-01 | 1986-08-06 | 中国科学院上海光学精密机械研究所 | The device of the terraced method growth of a kind of temperature high temperature crystal |
| CN102677168A (en) * | 2011-03-15 | 2012-09-19 | 上海晨安电炉制造有限公司 | Thermal-field-adjustable furnace for growing crystals through kyropoulos method |
| CN202247014U (en) * | 2011-09-28 | 2012-05-30 | 刘小梅 | Circular truncated cone-shaped heat shield for sapphire single crystal furnace |
| CN102605426A (en) * | 2012-03-14 | 2012-07-25 | 苏州先端稀有金属有限公司 | Thermal field structure for generating temperature difference in ultra-high temperature state |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103215638A (en) * | 2013-04-02 | 2013-07-24 | 苏州海铂晶体有限公司 | Step-shaped heat shield of sapphire crystal growing furnace |
| CN104152995A (en) * | 2014-09-04 | 2014-11-19 | 南京晶升能源设备有限公司 | Combined bottom thermal insulating heat shield for sapphire single crystal furnace |
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Application publication date: 20130109 |