CN102854902B - Chamber pressure adjusting method - Google Patents
Chamber pressure adjusting method Download PDFInfo
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- CN102854902B CN102854902B CN201210296654.4A CN201210296654A CN102854902B CN 102854902 B CN102854902 B CN 102854902B CN 201210296654 A CN201210296654 A CN 201210296654A CN 102854902 B CN102854902 B CN 102854902B
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- pressure
- regulation cabin
- decompression
- pressure regulation
- reduction valve
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Abstract
The invention discloses a chamber pressure adjusting method which is used for performing reduced-pressure control on a pressure adjusting bin, wherein the pressure adjusting bin is provided with one or more pressure reducing valves; and one or more pressure reducing bins output gas from the pressure adjusting bin through corresponding pressure reducing valves to reduce the pressure of the pressure adjusting bin. The method comprises the following steps of: inputting the target pressure of the pressure adjusting bin and the time required for reducing the pressure to the target pressure; measuring the current actual pressure of the pressure adjusting bin; and automatically adjusting the opening of the pressure reducing valve according to the target pressure and the actual pressure of the pressure adjusting bin so that the actual pressure of the pressure adjusting bin reaches the target pressure within the required time. Through the invention, the reduced-pressure control on the pressure adjusting bin can be accurately, safely and quickly realized.
Description
Technical field
The present invention relates to air pressure control technology field, in particular a kind of chamber pressure control method.
Background technology
Along with the development of aeronautical technology, the Decompression Controlling of chamber is become and becomes more and more important.As: by carrying out Decompression Controlling to a chamber, the atmospheric pressure state of aerospace personnel at a few myriametre high discipline of height above sea level can be simulated.Also application of reduced pressure technology is needed in medical research field, as: in a depressurized system, animal is placed in low-pressure chamber wherein, thus the physiological parameter change of observation animal under lower pressure.By the research changed above-mentioned physiological parameter, can understand better, give treatment to and protect and be in the mankind under extreme condition or other animals.
Shown in Figure 1, the depressurized system of prior art comprises: decompression chamber 20 and pressure regulation cabin 10.Wherein, decompression chamber 20 exports gas to reduce the pressure in pressure regulation cabin 10 by the reduction valve 11 in pressure regulation cabin 10 from pressure regulation cabin 10.The pressure of decompression chamber 20 is far smaller than the force value that pressure regulation cabin 10 needs to reach.Can comprise in pressure regulation cabin 10: pressure transducer 13 and parameter measuring apparatus 12, parameter measuring apparatus 12 is for obtaining the physiological parameter information of animal used as test under different pressures condition.Pressure transducer 13 is for obtaining the real-time pressure value in pressure regulation cabin 10.When exchanging ballasting 10 and carrying out pressure adjustment, staff obtains the current pressure in pressure regulation cabin 10 by pressure transducer 13, according to the difference of current pressure and goal pressure, the artificial open degree regulating reduction valve 11, is reduced to goal pressure to make the pressure in pressure regulation cabin 10.
In order to more tally with the actual situation, need to make the pressure in pressure regulation cabin 10 to reduce pressure goal pressure in the shorter time.But then can not meet time requirement by artificial adjustment, and regulate inaccurate, easily there is very large deviation, finally affect experimental result.
Similarly, in other pressure regulating systems, also there is identical problem.
Therefore, the low pressure how realizing chamber rapidly and accurately just becomes those skilled in the art's problem demanding prompt solution.
Summary of the invention
The problem that the present invention solves is to provide a kind of chamber pressure control method, accurately to obtain target air pressure rapidly.
For solving the problem, the invention provides a kind of chamber pressure control method, Decompression Controlling is carried out for exchanging ballasting, described pressure regulation cabin is provided with one or more reduction valve, one or more decompression chamber exports gas to reduce the pressure in pressure regulation cabin by corresponding reduction valve from pressure regulation cabin, and described method comprises:
The goal pressure inputting pressure regulation cabin and the time of being down to needed for goal pressure;
Measure the actual pressure that pressure regulation cabin is current;
According to goal pressure and the actual pressure in pressure regulation cabin, automatically regulate the open degree of reduction valve, make the actual pressure in pressure regulation cabin reach goal pressure in the required time.
Alternatively, while measuring the current actual pressure in pressure regulation cabin, measure in following information one or more: concentration information, the pressure information of decompression chamber, the temperature information of decompression chamber of carbon dioxide in the concentration information of oxygen, pressure regulation cabin in the temperature information in pressure regulation cabin, the humidity information in pressure regulation cabin, pressure regulation cabin.
Alternatively, described chamber pressure control method also comprises: in described pressure regulation cabin, put into animal used as test, while measuring the current actual pressure in pressure regulation cabin, measures the physiological parameter information of described animal used as test.
Alternatively, described chamber pressure control method also comprises:: in Decompression Controlling process, carry out timing output to the open degree of major general's reduction valve and the real-time pressure in pressure regulation cabin.
Alternatively, described output is one in voice output, display translation or printout or combination in any.
Alternatively, described chamber pressure control method also comprises: in Decompression Controlling process, carries out timing store to the open degree of major general's reduction valve and the real-time pressure in pressure regulation cabin.
Alternatively, described chamber pressure control method also comprises: at least when the open degree of reduction valve or the actual pressure in pressure regulation cabin are greater than threshold value, sends voice, light or display alarm.
Alternatively, the open degree of described reduction valve regulates in the following manner:
The pressure arranging pressure regulation cabin meets P
t=P
0× K × t, wherein, P
0the pressure before the decompression of pressure regulation cabin, P
tthe pressure in pressure regulation cabin after being decompression t, t is decompression time, and K is the rate ratio of decompression;
According to the pressure differential in pressure regulation cabin before and after decompression, regulate the open degree of reduction valve.
Alternatively, the value of described K is greater than-1 and is less than 0.
Alternatively, according to the pressure differential in pressure regulation cabin before and after decompression, the open degree of reduction valve is regulated to comprise:
Obtain the open degree of the front reduction valve of decompression;
According to F
k=F
ka+ Δ Pa+F
kb× Δ Pa
2, calculate the open degree of the rear reduction valve of decompression, wherein, F
kthe open degree of reduction valve after decompression, F
kabe the open degree of reduction valve before decompression, Δ Pa is the pressure reduced, F
kbit is scale-up factor;
By the open degree of reduction valve from F
kabe adjusted to F
k.
Compared with prior art, the present invention has the following advantages: decompression chamber exports gas to reduce the pressure in pressure regulation cabin by reduction valve from pressure regulation cabin, when exchanging ballasting and carrying out Decompression Controlling, the goal pressure inputting pressure regulation cabin and the time reached needed for goal pressure, and measure the current actual pressure in pressure regulation cabin, and then according to the goal pressure in pressure regulation cabin and actual pressure, automatically regulate the open degree of reduction valve, make the actual pressure in pressure regulation cabin reach goal pressure at required time.By manual adjustments is converted to automatic adjustment, thus the high speed of Decompression Controlling, accuracy and security can be ensured.
Accompanying drawing explanation
Fig. 1 is the structural representation of depressurized system in prior art;
Fig. 2 is the schematic flow sheet of embodiment of the present invention chamber pressure control method;
Fig. 3 is the structural representation of depressurized system in the embodiment of the present invention;
Fig. 4 is the structural representation of pick-up unit in Fig. 3.
Embodiment
For enabling above-mentioned purpose of the present invention, feature and advantage become apparent more, are described in detail the specific embodiment of the present invention below in conjunction with accompanying drawing.
Set forth a lot of detail in the following description so that fully understand the present invention, but the present invention can also adopt other to be different from alternate manner described here to implement, therefore the present invention is not by the restriction of following public specific embodiment.
Just as described in the background section, it is all the reduction valve open degree artificially regulating pressure regulation cabin in prior art, because staff needs a period of time from the actual pressure obtaining pressure regulation cabin to the regulated quantity calculating reduction valve, reduction valve is adjusted to suitable open degree and needs a period of time again, thus the requirement of fast decompression can not be met.In addition, manually regulate in the process of the open degree of reduction valve, the shake of hand probably causes there is error, thus make the actual pressure in pressure regulation cabin and goal pressure inconsistent.In addition, also there is potential safety issue in the artificial mode of the reduction valve open degree in pressure regulation cabin that regulates.
For above-mentioned defect, the invention provides a kind of chamber pressure control method, Decompression Controlling is carried out for exchanging ballasting, described pressure regulation cabin is provided with one or more reduction valve, one or more decompression chamber exports gas to reduce the pressure in pressure regulation cabin by corresponding reduction valve from pressure regulation cabin, specifically comprises: the goal pressure inputting pressure regulation cabin and the time of being down to needed for goal pressure; Measure the actual pressure that pressure regulation cabin is current; According to goal pressure and the actual pressure in pressure regulation cabin, automatically regulate the open degree of reduction valve, make the actual pressure in pressure regulation cabin reach goal pressure in the required time.
The present invention by manual adjustments is converted to automatic adjustment, thus can ensure the high speed of Decompression Controlling, accuracy and security.
Be described in detail below in conjunction with accompanying drawing.
Shown in figure 2, present embodiments provide a kind of chamber pressure control method, Decompression Controlling is carried out for exchanging ballasting, described pressure regulation cabin is provided with one or more reduction valve, one or more decompression chamber exports gas to reduce the pressure in pressure regulation cabin by corresponding reduction valve from pressure regulation cabin, comprises the following steps:
Step S1, the goal pressure inputting pressure regulation cabin and the time reached needed for goal pressure;
Step S2, measures the actual pressure that pressure regulation cabin is current;
Step S3, according to goal pressure and the actual pressure in pressure regulation cabin, automatically regulates the open degree of reduction valve, makes the actual pressure in pressure regulation cabin reach goal pressure in the required time.
Shown in figure 3, said method can adopt the depressurized system shown in Fig. 3 to realize.Described depressurized system comprises:
Pressure regulation cabin 100, is provided with one or more reduction valve;
One or more decompression chamber, exports gas to reduce the pressure in pressure regulation cabin by the reduction valve of correspondence from pressure regulation cabin 100;
Pick-up unit, at least comprises the pressure transducer 810 be arranged in pressure regulation cabin, for obtaining the actual pressure in pressure regulation cabin 100;
Input media 400, for the goal pressure that inputs pressure regulation cabin 100 and the time reached needed for goal pressure;
Controller 300, connects pick-up unit, input media 400 and reduction valve, according to goal pressure and the actual pressure in pressure regulation cabin 100, automatically regulates the open degree of described reduction valve, makes the actual pressure in pressure regulation cabin 100 reach goal pressure in the required time.
In the present embodiment, depressurized system obtains the actual pressure in pressure regulation cabin 100 by pressure transducer 810, the goal pressure inputting pressure regulation cabin 100 by input media 400 and the time reached needed for goal pressure, and then controller 300 is according to the goal pressure in pressure regulation cabin 100 and actual pressure, regulate the open degree of reduction valve, thus make the actual pressure in pressure regulation cabin 100 reach goal pressure in the required time, ensure that the high speed of decompression, accuracy and security.
Described pressure regulation cabin 100 is cabins of pressure to be regulated.Animal used as test is placed in pressure regulation cabin 100 in the present embodiment, with this simulated experiment animal in the aerial pressure condition of height.
In conjunction with reference to shown in figure 3, in the present embodiment, depressurized system comprises two decompression chambers, is respectively: the first decompression chamber 910 and the second decompression chamber 920.Correspondingly, pressure regulation cabin 100 comprises two reduction valve, is respectively: the first reduction valve 140 and the second reduction valve 150.Gas in pressure regulation cabin 100 is exported with the pressure reducing pressure regulation cabin 100 by the first reduction valve 140 by the first decompression chamber 910, and the second decompression chamber 920 exports gas to reduce the pressure in pressure regulation cabin 100 by the second reduction valve 150 from pressure regulation cabin 100.
Described reduction valve can be provided with electronic switch, for receiving control information, to control the open degree of reduction valve.The open degree of described reduction valve refers to the opening degree of reduction valve, and its value is more than or equal to 0 and is less than or equal to 1.
The pressure of each decompression chamber is far smaller than the goal pressure in pressure regulation cabin, as: the pressure of the first decompression chamber 910 can be 0.1MPa, and the actual pressure in pressure regulation cabin 100 is 1.5Mpa.
Input in the process of gas by reduction valve to pressure regulation cabin 100 at decompression chamber, the open degree of reduction valve is larger, and the gas that decompression chamber exports from pressure regulation cabin 100 is more, thus the pressure drop in pressure regulation cabin 100 is faster.In the present embodiment, the open degree of each reduction valve can be identical, also can be different.
Relation between the open degree of described reduction valve and the pressure of reduction can be:
F
k＝F
ka+ΔPa+F
kb×ΔPa
2，
Wherein, F
kthe open degree of reduction valve after decompression, F
kabe the open degree of reduction valve before decompression, Δ Pa is the pressure reduced, F
kbit is scale-up factor.
Because the present embodiment comprises multiple decompression chamber, compared to the situation only having a decompression chamber, decompression process can be realized more quickly.Particularly, in order to realize controlling more accurately, two reduction valve in the present embodiment can be respectively DN32 (namely the diameter of reduction valve is 32mm) and DN40 (namely the diameter of reduction valve is 40mm), thus can realize the decompression of different rates, various combination scheme.It should be noted that, in other embodiments, the diameter of at least part of quantity reduction valve can also be identical.
It should be noted that, in other embodiments of the invention, keeping under the prerequisite that the quantity of decompression chamber is identical with the quantity of reduction valve, the quantity of decompression chamber or reduction valve can also be one, more than three or three, and it is all within protection scope of the present invention.
The present embodiment while measuring the current actual pressure in pressure regulation cabin, can also measure in following information one or more: concentration information, the pressure information of decompression chamber, the temperature information of decompression chamber of carbon dioxide in the concentration information of oxygen, pressure regulation cabin in the temperature information in pressure regulation cabin, the humidity information in pressure regulation cabin, pressure regulation cabin.Correspondingly, shown in figure 4, pick-up unit described in the present embodiment can also comprise in following device one or more:
Be arranged on the temperature sensor 820 in pressure regulation cabin 100, for obtaining the temperature information in pressure regulation cabin 100;
Be arranged on the humidity sensor 830 in pressure regulation cabin 100, for obtaining the humidity information in pressure regulation cabin 100;
Be arranged on the oxygen concentration sensor 850 in pressure regulation cabin 100, for obtaining the concentration information of oxygen in pressure regulation cabin 100;
Be arranged on the gas concentration lwevel sensor 860 in pressure regulation cabin 100, for obtaining the concentration information of carbon dioxide in pressure regulation cabin 100;
Be arranged on the pressure transducer 891 in decompression chamber, for obtaining the pressure information of decompression chamber;
Be arranged on the temperature sensor 892 in decompression chamber, for obtaining the temperature information of decompression chamber.
In addition, the present embodiment can also put into animal used as test (as: small white mouse) in described pressure regulation cabin 100, thus while measuring the current actual pressure in pressure regulation cabin 100, can measure the physiological parameter information of described animal used as test.Particularly, refer again to shown in Fig. 4, described pick-up unit can also comprise: be arranged on the physiological parameter measurement device 840 in pressure regulation cabin 100, for obtaining the physiological parameter information of animal in pressure regulation cabin 100.
Only can be provided with pressure transducer 891 or/and temperature sensor 892 in part reduced pressure cabin in the present embodiment, also pressure transducer 891 can be set in each decompression chamber or/and temperature sensor 892.
Described pressure transducer 810 or pressure transducer 891 can adopt Honeywell high-pressure pressure sensor, and its inside has auto thermal compensation and corrects, and reaction velocity is very fast, and security is higher.
Described temperature sensor 820 and humidity sensor 830 can become one, and specifically can adopt Switzerland's flourishing age auspicious grace HT1 series digit humiture transducer, thus can digital output temperature and moisture signal, and accuracy of detection is high, and reaction velocity is fast.
Described physiological parameter measurement device 840 can be any one physiological parameter monitor device in prior art, for measuring the physiological parameter such as electrocardio, blood pressure, pulse frequency, blood oxygen saturation, respiratory rate, body temperature of animal used as test in pressure regulation cabin.
In the present embodiment, pick-up unit is after the above-mentioned metrical information of acquisition, and above-mentioned metrical information is sent to controller 300.
Described input media 400 for obtaining goal pressure and the time relationship in pressure regulation cabin 100, as: the pressure in pressure regulation cabin 100 linearly descends degradation in time.Further, the pressure in described pressure regulation cabin 100 can also remain unchanged a period of time, as: after the step-down a period of time of pressure regulation cabin 100, static a period of time, then continue the step such as step-down, maintenance.
When the pressure in pressure regulation cabin 100 linearly declines in time, meet following relational expression:
P
t＝P
0×K×t，
Wherein, P
0the pressure before reducing pressure in pressure regulation cabin 100, P
tthe pressure in pressure regulation cabin 100 after being decompression t, t is decompression time, and K is the rate ratio of decompression, the rate constant of the straight line that namely reduces pressure.The value of described K can be greater than-1 and be less than 0, as :-1/3 ,-0.5 or-2/3 etc.Now, the open degree of reduction valve regulates in the following manner:
The pressure arranging pressure regulation cabin meets P
t=P
0× K × t, wherein, P
0the pressure before the decompression of pressure regulation cabin, P
tthe pressure in pressure regulation cabin after being decompression t, t is decompression time, and K is the rate ratio of decompression;
According to the pressure differential in pressure regulation cabin before and after decompression, regulate the open degree of reduction valve.
Wherein, according to the pressure differential in pressure regulation cabin before and after decompression, the open degree of reduction valve is regulated to comprise:
Obtain the open degree of the front reduction valve of decompression;
According to F
k=F
ka+ Δ Pa+F
kb× Δ Pa
2, calculate the open degree of the rear reduction valve of decompression, wherein, F
kthe open degree of reduction valve after decompression, F
kabe the open degree of reduction valve before decompression, Δ Pa is the pressure reduced, F
kbit is scale-up factor;
By the open degree of reduction valve from F
kabe adjusted to F
k.
It should be noted that, in the present invention, the pressure in pressure regulation cabin 100 can be any relation with the time.
Particularly, described input media 400 can be keyboard, mouse, speech input device or touch input device etc.
Described controller 300 can select technical grade to monitor notebook, thus highly easily and accurately can realize the control to reduction valve open degree.Particularly, controller 300 obtains the goal pressure in pressure regulation cabin from input media 400, the actual pressure in pressure regulation cabin is obtained from pressure transducer 810, the open degree of pressure regulation is needed according to described goal pressure and actual pressure calculating reduction valve, and then regulate the open degree of described reduction valve, reach goal pressure to make the actual pressure in pressure regulation cabin 100 at required time.
Control signal is sent to the electronic switch on reduction valve by described controller 300, by control electronic switch and then the open degree that can control reduction valve.Particularly, controller 300 both can make the open degree of part or all of reduction valve be 1 (namely opening completely), also the open degree of part reduced pressure valve can be made to be 0 (namely closing completely), the open degree of part or all of reduction valve can also to be made to be greater than 0 and be less than 1 (i.e. opening section).
Particularly, high level language can be adopted and detect relevant program to improve travelling speed in controller 300, and adopt in controller 300 assembly language write to calculate control relevant program with guarantee to control accurate and safety.
One or more during the present embodiment middle chamber pressure regulating method can also comprise the following steps:
In Decompression Controlling process, carry out timing output to the open degree of major general's reduction valve and the real-time pressure in pressure regulation cabin;
In Decompression Controlling process, carry out timing to the open degree of major general's reduction valve and the real-time pressure in pressure regulation cabin and store;
At least when the open degree of reduction valve or the actual pressure in pressure regulation cabin are greater than threshold value, send voice, light or display alarm.
Particularly, refer again to shown in Fig. 3, in order to realize above-mentioned steps, described depressurized system can also comprise with the one in lower device or combination in any:
Output unit 500, connection control device 300, for the open degree of reduction valve and the real-time pressure in pressure regulation cabin 100 at least timing output decompression process;
Memory storage 600, connection control device 300, stores at least carrying out timing to the open degree of reduction valve in decompression process and the real-time pressure in pressure regulation cabin 100;
Warning device 700, connection control device 300, at least when the open degree of reduction valve or the actual pressure in pressure regulation cabin 100 are greater than threshold value, sends voice, light or display alarm.
Particularly, the actual pressure in a pressure regulation cabin can be tested every 1s, then just the real-time pressure in the open degree of reduction valve and pressure regulation cabin be carried out exporting and/or storing every 1s.
Because the present embodiment middle controller 300 can also be obtained by pick-up unit: the temperature information in pressure regulation cabin 100, humidity information, the physiological parameter information of animal used as test, oxygen concentration information, gas concentration lwevel information, the pressure information of decompression chamber and temperature information, therefore output unit 500 also by the one in above-mentioned information or multiplely arbitrarily can to export in the lump.
Particularly, described output unit 500 can be one in instantaneous speech power, print-out device or display translation device or combination in any, thus exports as the one in voice output, display translation or printout or combination in any.
Described memory storage 600 can be any storer, as: USB flash disk, flash memory or hard disk etc.Described memory storage 600 is while the pressure information of storage pressure regulation cabin, can also store: the temperature information in pressure regulation cabin 100, humidity information, the physiological parameter information of animal used as test, oxygen concentration information, gas concentration lwevel information, the pressure information of decompression chamber and temperature information.
Described warning device 700 can be phonetic alarm device, light alarming device or displaying alarm etc., thus when any one information that pick-up unit obtains does not meet normal condition, corresponding warning information can be sent, to inform staff in time, ensure that the security of decompression.
The present embodiment can realize the decompression of exchanging ballasting accurately, safely and fast.
Although the present invention discloses as above with preferred embodiment, the present invention is not defined in this.Any those skilled in the art, without departing from the spirit and scope of the present invention, all can make various changes or modifications, and therefore protection scope of the present invention should be as the criterion with claim limited range.
Claims (9)
1. a chamber pressure control method, it is characterized in that, carry out Decompression Controlling for exchanging ballasting, described pressure regulation cabin is provided with multiple reduction valve, multiple decompression chamber exports gas to reduce the pressure in pressure regulation cabin by corresponding reduction valve from pressure regulation cabin, and described method comprises:
The goal pressure inputting pressure regulation cabin and the time of being down to needed for goal pressure;
Measure the actual pressure that pressure regulation cabin is current;
According to goal pressure and the actual pressure in pressure regulation cabin, automatically the open degree of the corresponding reduction valve of multiple decompression chamber is regulated based on the pressure differential in pressure regulation cabin before and after decompression, make the actual pressure in pressure regulation cabin reach goal pressure in the required time, the pressure of each decompression chamber is far smaller than the goal pressure in pressure regulation cabin;
The described pressure differential based on pressure regulation cabin, decompression front and back regulates the open degree of the corresponding reduction valve of multiple decompression chamber to comprise automatically:
Obtain the open degree of the front reduction valve of decompression;
According to F
k=F
ka+ Δ Pa+F
kb× △ Pa
2, calculate the open degree of the rear reduction valve of decompression, wherein, F
kthe open degree of reduction valve after decompression, F
kabe the open degree of reduction valve before decompression, Δ Pa is the pressure reduced, F
kbit is scale-up factor;
By the open degree of reduction valve from F
kabe adjusted to F
k.
2. chamber pressure control method as claimed in claim 1, it is characterized in that, while measuring the current actual pressure in pressure regulation cabin, measure in following information one or more: concentration information, the pressure information of decompression chamber, the temperature information of decompression chamber of carbon dioxide in the concentration information of oxygen, pressure regulation cabin in the temperature information in pressure regulation cabin, the humidity information in pressure regulation cabin, pressure regulation cabin.
3. chamber pressure control method as claimed in claim 1 or 2, is characterized in that, also comprise: in described pressure regulation cabin, put into animal used as test, while measuring the current actual pressure in pressure regulation cabin, measures the physiological parameter information of described animal used as test.
4. chamber pressure control method as claimed in claim 1, is characterized in that, also comprise: in Decompression Controlling process, carry out timing output to the open degree of major general's reduction valve and the real-time pressure in pressure regulation cabin.
5. chamber pressure control method as claimed in claim 4, is characterized in that, described output is one in voice output, display translation or printout or combination in any.
6. chamber pressure control method as claimed in claim 1, is characterized in that, also comprise: in Decompression Controlling process, carries out timing store to the open degree of major general's reduction valve and the real-time pressure in pressure regulation cabin.
7. chamber pressure control method as claimed in claim 1, is characterized in that, also comprise: at least when the open degree of reduction valve or the actual pressure in pressure regulation cabin are greater than threshold value, sends voice, light or display alarm.
8. chamber pressure control method as claimed in claim 1, it is characterized in that, the open degree of described reduction valve regulates in the following manner:
The pressure arranging pressure regulation cabin meets P
t=P
0× K × t, wherein, P
0the pressure before the decompression of pressure regulation cabin, P
tthe pressure in pressure regulation cabin after being decompression t, t is decompression time, and K is the rate ratio of decompression.
9. chamber pressure control method as claimed in claim 8, it is characterized in that, the value of described K is greater than-1 and is less than 0.
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|---|---|---|---|
| CN201210296654.4A CN102854902B (en) | 2012-08-13 | 2012-08-13 | Chamber pressure adjusting method |
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| CN102677024A (en) * | 2012-05-28 | 2012-09-19 | 上海华力微电子有限公司 | Cavity pressure adjustment method and cavity pressure adjustment device |
| CN104991581B (en) * | 2015-06-08 | 2019-08-23 | 北京北方华创微电子装备有限公司 | A kind of compress control method and device of processing chamber |
| CN111831022B (en) * | 2019-04-18 | 2022-03-18 | 北京七星华创流量计有限公司 | Chamber pressure control method and device and semiconductor equipment |
| CN110672346B (en) * | 2019-10-16 | 2021-05-18 | 珠海市精实测控技术有限公司 | Adjustable altitude enthalpy difference laboratory |
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| CN1964878A (en) * | 2004-06-07 | 2007-05-16 | 斯堪尼亚有限公司 | A method and a device for controlling a control pressure |
| CN101140474A (en) * | 2006-09-06 | 2008-03-12 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Pressure control system |
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| US9372009B2 (en) * | 2007-08-17 | 2016-06-21 | Siemens Industry, Inc. | Pressure control with coarse and fine adjustment |
| CN102429806A (en) * | 2011-12-07 | 2012-05-02 | 深圳市龙岗中心医院 | Shank vein pressurizing airbag device |
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| CN1964878A (en) * | 2004-06-07 | 2007-05-16 | 斯堪尼亚有限公司 | A method and a device for controlling a control pressure |
| CN101140474A (en) * | 2006-09-06 | 2008-03-12 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Pressure control system |
| CN101244305A (en) * | 2007-12-03 | 2008-08-20 | 王鸿庆 | Breathing machine and pressure control method |
| CN101509605A (en) * | 2009-03-09 | 2009-08-19 | 罗东晓 | Method for recovering relief gas in process for examining and repairing gas pipe network |
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