CN102829918B - Loading method of differential vertical micro force loading device - Google Patents
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- CN102829918B CN102829918B CN201210319440.4A CN201210319440A CN102829918B CN 102829918 B CN102829918 B CN 102829918B CN 201210319440 A CN201210319440 A CN 201210319440A CN 102829918 B CN102829918 B CN 102829918B
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- 238000011068 loading method Methods 0.000 title claims abstract description 50
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 3
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- 238000005259 measurement Methods 0.000 description 6
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- 238000004458 analytical method Methods 0.000 description 1
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Abstract
The invention discloses a loading method of a differential vertical micro force loading device. The loading method is characterized in that the middle part of a horizontally placed secondary lever is provided with a secondary supporting point, wherein a pair of primary levers is separately and symmetrically arranged on two sides of the secondary supporting point in the same vertical plane by taking the secondary supporting point as a center, and is connected with the secondary lever through transition rods on respective sides respectively. The loading method can be used for calibrating a micro force sensor, a micromechanical system and various micro force detectors and provides support for a force measuring system of a micro force value.
Description
The application is: 20110727, application number is: 2011102124289, denomination of invention is: the dividing an application of the application for a patent for invention of differential type vertical micro-force loading device and loading method.
Technical field
The present invention relates to be applied in the loading method of the micro-force loading device in field of measuring technique.
Background technology
Flourish along with modern science and technology, need the occasion of micro-small value force more and more, such as the Research on Mechanical Properties of microscale lower member in MEMS (micro electro mechanical system), Micro Lub phenomenon measure, micro-power detection etc. in the assembling of micro sensing Micro-Robot, therefore, the research of Micro-force sensor, making, production are also with regard to thereupon carrying out.But its research is made relatively, the performance measurement development of Micro-force sensor itself seems and relatively lags behind.The conventional pulley counterweight method of using cannot be carried out micro-power loading force at present; Existing Lorentz force and electrostatic force scaling method, because affected many factors brings instability; The application that utilizes in recent years piezoelectric element to produce micro-power gets more and more, but this method cost is high, complicated operation, and the power scope producing is less.
Flexure hinge mechanism is in precision measurement, be used widely in the fields such as demarcation, but be out of shape about flexible hinge, the variation of lever centre of gravity place and temperature still lacks comprehensive consideration and research to the impact of measurement and stated accuracy, have no so far about designing for eliminating the dependency structure of gravity and temperature two aspect factor impacts, and when micro-power is demarcated or measured, in order to obtain higher precision, must solve the impact that above several respects cause the demarcation of micro-power or measurement, because, the impact that gravity and temperature produce may be far longer than the maximum range that micro-power loads, micro-power is loaded and produces fatal impact.
Summary of the invention
The present invention is for avoiding the existing weak point of above-mentioned prior art, a kind of the meet requirement of certain precision power value and the loading method of differential type vertical micro-force loading device are cheaply provided, be used for Micro-force sensor, MEMS (micro electro mechanical system) and various micro-force detector to demarcate, and provide support for the dynamometric system of micro-small value force.
Technical solution problem of the present invention adopts following technical scheme:
The loading method of differential type vertical micro-force loading device of the present invention, is characterized in:
Described differential type vertical micro-force loading device is set is: the middle part at the second lever of horizontal positioned arranges secondary fulcrum, centered by described secondary fulcrum, in same perpendicular, a pair of one-level lever is in the both sides of secondary fulcrum for symmetrical minute, and by the transiting rod of a side separately, connects mutually with second lever respectively.
Described one-level lever is horizontal positioned, load counterweight and be arranged on the bar outer end as the one-level lever of input end, one-level fulcrum is positioned at the middle part of one-level lever, bar the inner of one-level lever is connected to the top of transiting rod by one-level flexible hinge at bar sidepiece, the bottom of described transiting rod is connected with the rod end sidepiece of second lever by secondary flexible hinge; One end along continuous straight runs of described second lever extends, and forms free end through extension, at the free end of described second lever, probe is set, and with described probe, contacts with the power sensor being arranged on micromotion platform.
Middle part at described transiting rod arranges transiting rod balancing weight by the cantilever connecting firmly, and the centre of gravity adjustment of transiting rod is located to secondary flexible hinge position; Place, bar outer end at described one-level lever arranges one-level lever balancing weight, makes the centre of gravity adjustment of described one-level lever to the position of one-level fulcrum; Restrain end at described second lever arranges second lever balancing weight, makes the common centre of gravity adjustment of second lever and extension thereof, transiting rod, cantilever and transiting rod balancing weight to the position of secondary fulcrum.
The loading method of differential type vertical micro-force loading device of the present invention is to realize one of in the following manner differential loading:
Mode one, at two input ends, load the loading counterweight of equals in quality, now probe is on initial position; Power sensor is set and at initial position, keeps motionless, change the quality difference that two input ends load counterweight, on described power sensor, obtain different big or small loading forces;
Mode two, at two input ends, load the loading counterweight of equals in quality, now probe is on initial position, then change the quality difference that two input ends load counterweight, make probe occur skew, by power sensor, probe is progressively passed to initial position from the position of skew, power sensor distance initial position is nearer, and probe is larger to the acting force of power sensor, finally by two input ends, is loaded the size of the quality difference of counterweight and the displacement of power sensor decision loading force.
The design feature of differential type vertical micro-force loading device described in the present invention is also at described one-level fulcrum and secondary position of the fulcrum place, one-level lever and second lever are suspended on pedestal by each supports flexible hinge respectively, and described each supports flexible hinge becomes consistent with gravity direction.
Compared with the prior art, beneficial effect of the present invention is embodied in:
1, the present invention is based on flexible hinge and lever principle has set up a kind of second lever power and has dwindled mechanism, for generation of micro force, utilize counterweight loading force, simple and reliable, easy to operate, can carry out within the specific limits dynamic load, can be widely used in multiple occasion;
2, the application of flexible hinge of the present invention has reduced the friction link in calibration system, has improved stated accuracy.
3, the present invention, by each balancing weight is set, first makes the centre of gravity adjustment of transiting rod to secondary flexible hinge position, then make second lever and with the common centre of gravity adjustment of the transiting rod of counter weight construction at secondary position of the fulcrum place; Finally make the centre of gravity adjustment of one-level lever on one-level position of the fulcrum, eliminated the impact that gravity center shift causes each rod member, make micro-power of generation more stable, anti-interference factor is strong;
4, the present invention adopts symmetrical mechanism, has eliminated the impact of temperature, has improved power loading accuracy.
5, the flexible hinge at one-level fulcrum of the present invention and secondary fulcrum place all adopts and becomes consistent setting with gravity direction, has eliminated flexural deformation and bending stress that gravity causes flexible hinge, otherwise, the destruction that the moment of flexure that gravity produces can cause flexible hinge.
Accompanying drawing explanation
Fig. 1 is vertical micro-force loading device schematic diagram in the present invention;
Number in the figure: 1 second lever; 2 secondary fulcrums; 3 one-level levers; 4 load counterweight; 5 one-level fulcrums; 6 one-level flexible hinges; 7 transiting rods; 8 secondary flexible hinges; 9 probes; 10 micromotion platforms; 11 power sensors; 12 one-level lever balancing weights; 13 second lever balancing weights; 14 second lever extensions; 7a cantilever; 7b transition lever balancing weight.
Embodiment
Referring to Fig. 1, the present embodiment differential type vertical micro-force loading device includes: a pair of one-level lever 3, second lever 1, a pair of transiting rod 7 and a pair of one-level lever balancing weight 12, a pair of cantilever 7a, a pair of transiting rod balancing weight 7b and a second lever balancing weight 13; In the present embodiment, at the middle part that is the second lever 1 of horizontal positioned, secondary fulcrum 2 is set, centered by secondary fulcrum 2, in same perpendicular, a pair of one-level lever 3 is in the both sides of secondary fulcrum 2 for symmetrical minute, and by the transiting rod 7 of a side separately, connects mutually with second lever 1 respectively;
One-level lever 3 is horizontal positioned, load counterweight 4 and be arranged on the bar outer end as the one-level lever of input end, one-level fulcrum 5 is positioned at the middle part of one-level lever 3, bar the inner of one-level lever 3 is connected to the top of transiting rod 7 by one-level flexible hinge 6 at bar sidepiece, the bottom of transiting rod 7 is connected with the rod end sidepiece of second lever 1 by secondary flexible hinge 8; One end along continuous straight runs of second lever 1 extends, and 14 form free ends through extension, free end at second lever 1 arranges probe 9, with probe 9, contacts with the power sensor 11 being arranged on micromotion platform 10, by micromotion platform 10 drive sensors 11, at vertical direction, is moved.
In order to reduce or to eliminate the impact that gravity center shift causes each rod member, balancing weight is set respectively on the relevant position of each rod member: first at the middle part of transiting rod 7, by the cantilever 7a connecting firmly, transiting rod balancing weight 7b is set, makes the centre of gravity adjustment of transiting rod 7 to secondary flexible hinge 8 places, position; Then at the restrain end place of second lever 1, second lever balancing weight 13 is set, make second lever 1 and extension 17 thereof, transiting rod 7, cantilever 7a and transiting rod balancing weight 7b common centre of gravity adjustment to the position of secondary fulcrum 2; Place, bar outer end at one-level lever 3 arranges one-level lever balancing weight 12, makes the centre of gravity adjustment of one-level lever 3 to one-level fulcrum 5 places, position;
In order to reduce or to eliminate the impact that gravity center shift causes each rod member, the setting of balancing weight can be also:
First at the middle part of transiting rod 7, by the cantilever 7a connecting firmly, transiting rod balancing weight 7b is set, makes the centre of gravity adjustment of transiting rod 7 to one-level flexible hinge 6 places, position; Then at the place, bar outer end of one-level lever 3, one-level lever balancing weight 12 is set, makes the common centre of gravity adjustment of one-level lever 3, transiting rod 7, cantilever 7a and transiting rod balancing weight 7b to the position of one-level fulcrum 5; Finally at the restrain end place of second lever 1, second lever balancing weight 13 is set, makes the centre of gravity adjustment of second lever 1 and extension 14 thereof to the position of secondary fulcrum 2.
In concrete enforcement, can remove transiting rod balancing weight 7b, but can reduce measuring accuracy and reduce force measurement scope.
In one-level fulcrum 5 and secondary fulcrum 2 positions, one-level lever 3 and second lever 1 are to be respectively suspended on pedestal by each supports flexible hinge, the flexural deformation and the bending stress that each supports flexible hinge are caused in order to eliminate gravity, the destruction that the moment of flexure of avoiding gravity to produce causes supports flexible hinge, the supports flexible hinge at one-level fulcrum and secondary points place all adopts and becomes consistent setting with gravity direction.
Whole device produces micro-power by counterweight, micro-power is much smaller than the quality of counterweight, and one-level flexible hinge 6 is larger to the ratio of the distance of one-level fulcrum 5 to the distance of one-level fulcrum 5 and the input end of one-level lever 3, probe 9 is larger to the ratio of the distance of secondary fulcrum 2 to distance and the secondary flexible hinge 8 of secondary fulcrum 2, just can produce less micro-power.
In the present embodiment, differential type vertical micro-force loading device is realized one of in the following manner differential loading:
Mode one, at two input ends, load the loading counterweight of equals in quality, now probe is on initial position; Power sensor is set and at initial position, keeps motionless, change the quality difference that two input ends load counterweight, the loading force that makes one of them input end is F1a, the loading force of another input end is F1b, the power difference F1=F1a-F1b that loaded, after this power difference is dwindled by flexure hinge mechanism, by shorting pin loaded to power sensor 11, thereby obtain micro-power of different sizes;
Mode two, at two input ends, load the loading counterweight of equal in quality, now probe is on initial position, then change the quality difference that two input ends load counterweight, make probe occur skew, by power sensor, probe is progressively passed to initial position from the position of skew, power sensor distance initial position is nearer, probe is larger to the acting force of power sensor, finally by two input ends, loaded the size of the quality difference of counterweight and the displacement of power sensor decision loading force, one non-contact displacement transducer can be set at probe place, pass through theoretical analysis, numerical evaluation and experimental calibration, be based upon different two input ends and load the quality difference test pin biasing displacement of counterweight and the relation between loading force.
Measurement mechanism of the present invention can realize 10
-2following micro-power loads.
Claims (2)
1. a loading method for differential type vertical micro-force loading device, is characterized in that:
Differential type vertical micro-force loading device is set is: the middle part at the second lever (1) of horizontal positioned arranges secondary fulcrum (2), centered by described secondary fulcrum (2), in same perpendicular, a pair of one-level lever (3) is in the both sides of secondary fulcrum (2) for symmetrical minute, and by the transiting rod of a side (7) separately, connects mutually with second lever (1) respectively;
Described one-level lever (3) is horizontal positioned, load counterweight (4) and be arranged on the bar outer end as the one-level lever of input end, one-level fulcrum (5) is positioned at the middle part of one-level lever (3), bar the inner of one-level lever (3) is connected to the top of transiting rod (7) by one-level flexible hinge (6) at bar sidepiece, the bottom of described transiting rod (7) is connected with the rod end sidepiece of second lever (1) by secondary flexible hinge (8); One end along continuous straight runs of described second lever (1) extends, and (14) form free end through extension, free end at described second lever (1) arranges probe (9), with described probe (9), contacts with the power sensor (11) being arranged on micromotion platform (10);
Middle part at described transiting rod (7) arranges transiting rod balancing weight (7b) by the cantilever (7a) connecting firmly, and the centre of gravity adjustment of transiting rod (7) is located to secondary flexible hinge (8) position; In the bar outer end of described one-level lever (3), one-level lever balancing weight (12) is set, makes the centre of gravity adjustment of described one-level lever (3) to the position of one-level fulcrum (5); Restrain end at described second lever (1) arranges second lever balancing weight (13), makes the common centre of gravity adjustment of second lever (1) and extension (14) thereof, transiting rod (7), cantilever (7a) and transiting rod balancing weight (7b) to the position of secondary fulcrum (2);
Described differential type vertical micro-force loading device is realized one of as follows differential loading:
Mode one, at two input ends, load the loading counterweight of equals in quality, now probe is on initial position; Power sensor is set and at initial position, keeps motionless, change the quality difference that two input ends load counterweight, on described power sensor, obtain different big or small loading forces;
Mode two, at two input ends, load the loading counterweight of equals in quality, now probe is on initial position, then change the quality difference that two input ends load counterweight, make probe occur skew, by power sensor, probe is progressively passed to initial position from the position of skew, power sensor distance initial position is nearer, and probe is larger to the acting force of power sensor, finally by two input ends, is loaded the size of the quality difference of counterweight and the displacement of power sensor decision loading force.
2. the loading method of differential type vertical micro-force loading device according to claim 1, it is characterized in that: in described differential type vertical micro-force loading device, at described one-level fulcrum and secondary position of the fulcrum place, one-level lever and second lever are suspended on pedestal by each supports flexible hinge respectively, and described each supports flexible hinge becomes consistent with gravity direction.
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| CN201210319440.4A CN102829918B (en) | 2011-07-27 | 2011-07-27 | Loading method of differential vertical micro force loading device |
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| CN201210319440.4A CN102829918B (en) | 2011-07-27 | 2011-07-27 | Loading method of differential vertical micro force loading device |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4063649A (en) * | 1974-11-22 | 1977-12-20 | Pye Limited | Calibration of crane load indicating arrangement |
| EP0585484A1 (en) * | 1992-09-02 | 1994-03-09 | A. M. Erichsen GmbH | Load-constituting machine with hydraulic force transmission |
| WO2009135606A1 (en) * | 2008-05-05 | 2009-11-12 | Horiba Europe Gmbh | Calibration device and calibration method for a test bench |
| CN102087157A (en) * | 2010-11-16 | 2011-06-08 | 吉林大学 | Double-lever force standard machine and calibration and demarcation method thereof |
| CN102305687A (en) * | 2011-07-27 | 2012-01-04 | 合肥工业大学 | Differential type vertical micro-force loading device and method |
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2011
- 2011-07-27 CN CN201210319440.4A patent/CN102829918B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4063649A (en) * | 1974-11-22 | 1977-12-20 | Pye Limited | Calibration of crane load indicating arrangement |
| EP0585484A1 (en) * | 1992-09-02 | 1994-03-09 | A. M. Erichsen GmbH | Load-constituting machine with hydraulic force transmission |
| WO2009135606A1 (en) * | 2008-05-05 | 2009-11-12 | Horiba Europe Gmbh | Calibration device and calibration method for a test bench |
| CN102087157A (en) * | 2010-11-16 | 2011-06-08 | 吉林大学 | Double-lever force standard machine and calibration and demarcation method thereof |
| CN102305687A (en) * | 2011-07-27 | 2012-01-04 | 合肥工业大学 | Differential type vertical micro-force loading device and method |
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