CN102829847A - Online detection device of thermal gas mass flowmeter - Google Patents
Online detection device of thermal gas mass flowmeter Download PDFInfo
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- CN102829847A CN102829847A CN2012103259343A CN201210325934A CN102829847A CN 102829847 A CN102829847 A CN 102829847A CN 2012103259343 A CN2012103259343 A CN 2012103259343A CN 201210325934 A CN201210325934 A CN 201210325934A CN 102829847 A CN102829847 A CN 102829847A
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- flow meter
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Abstract
The invention discloses an online detection device of a thermal gas mass flowmeter, which comprises a flowmeter with a blowing pipeline, a pressure regulating valve, a pressure gauge, a nitrogen gas cylinder, a gas delivery pipe and a gas discharge pipe, wherein a gas pipe is arranged in the pressure regulating valve, a screw bolt for opening and closing the gas pipe is arranged on the gas pipe, one end of the gas pipe is provided with an output joint for connecting with the pressure gauge, and the other end of the gas pipe is provided with an input joint for connecting with the gas delivery pipe; and the nitrogen gas cylinder is connected with the input joint of the pressure regulating valve through the gas delivery pipe, and the pressure gauge is connected with the blowing pipeline of the flowmeter with the blowing pipeline through the gas discharge pipe. The online detection device has the advantages that the pressure regulating valve is used to accurately control the nitrogen gas flow to the thermal mass flowmeter, the pressure of the nitrogen gas is a constant value, the measured nitrogen gas flow data is same as the data which is calibrated on delivery or not through comparison , so whether the thermal mass flowmeter is accurate or not is judged; and the online calibration can be realized without dismantling, and the online detection device is convenient to use.
Description
Technical field
The present invention relates to a kind of calibrating installation of flowmeter, particularly disclose a kind of thermal type gas quality flow meter in-line calibration device.
Background technology
In the prior art; Thermal type gas quality flow meter uses separately usually, when thermal type gas quality flow meter need be calibrated, and must be with after the thermal type gas quality flow meter dismounting; It is accurate to return factory-run school again; And can't realize on-line calibration, in the process of dismounting and assembling, very bother like this, and time-consuming longer.
Summary of the invention
The objective of the invention is to overcome the defective that exists in the prior art, provide a kind of easy to operate, realize on-line calibration, remove the dismounting thermal mass flow meter from, thermal type gas quality flow meter in-line calibration device easy to use.
The present invention is achieved in that a kind of thermal type gas quality flow meter in-line calibration device; Comprise and have the thermal mass flow meter that purges pipeline; It is characterized in that: also comprise pressure regulator valve, pressure gauge, nitrogen cylinder, gas piping, escape pipe; Be provided with breather line in the said pressure regulator valve; Said breather line is provided with and is used for tighting a bolt of switch breather line, and an end of said breather line is provided with and is used to connect manometric out splice going splice, and the other end of said breather line is provided with the input adapter that is used to connect gas piping; Said nitrogen cylinder links to each other with input adapter through gas piping, and said pressure gauge links to each other with the said purging pipeline that has the thermal mass flow meter that purges pipeline through escape pipe.
Saidly tight a bolt, input adapter, out splice going splice link to each other with said breather line through the mode of screw thread respectively.
Said gas piping is made up of the input flexible tube section that links to each other, input copper pipe section, and said input copper pipe section links to each other with said input adapter, and said input flexible tube section links to each other with said nitrogen cylinder.
Said escape pipe is made up of the flexible tube section of giving vent to anger, the copper pipe section of giving vent to anger that link to each other, and the said copper pipe section of giving vent to anger links to each other with said pressure gauge, and soft section of said escape pipe links to each other with said purging pipeline.
Tighting a bolt of pressure regulator valve screws in the breather line of pressure regulator valve, and the path of internal ventilation pipeline diminishes, and flow and pressure through gas just can diminish, and come the flow of pilot-gas with this.
The invention has the beneficial effects as follows: realize on-line calibration, the link of removing dismounting, postal delivery etc. from is used more easy; Come accurately control to lead to the flow of the nitrogen of thermal mass flow meter through pressure regulator valve; Making nitrogen gas pressure is a definite value; Whether whether the data when relatively the measured nitrogen flow data of flowmeter should be dispatched from the factory with demarcation are identical, accurate to judge thermal mass flow meter, if the data when the nitrogen flow data that flowmeter records are dispatched from the factory with demarcation are identical; Explain that then flowmeter is accurate, otherwise be inaccurate.Realized through apparatus of the present invention that thermal mass flow meter need not be dismantled promptly and can accomplish on-line calibration, easy to use, remove the trouble that the dismounting thermal mass flow meter is sent to the calibrating center from.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 is the structural representation of pressure regulator valve of the present invention.
Wherein: 1, thermal mass flow meter; 2, purge pipeline; 3, pressure regulator valve; 4, pressure gauge; 5, nitrogen cylinder; 6, input flexible tube section; 7, input copper pipe section; 8, the flexible tube section of giving vent to anger; 9, the copper pipe section of giving vent to anger; 10, breather line; 11, tight a bolt; 12, out splice going splice; 13, input adapter; 14, probe.
Embodiment
According to Fig. 1, Fig. 2, the escape pipe that the present invention includes the gas piping that has the thermal mass flow meter 1 that purges pipeline 2, pressure regulator valve 3, pressure gauge 4, nitrogen cylinder 5, constitute by input flexible tube section 6 that links to each other and input copper pipe section 7, constitutes by give vent to anger flexible tube section 8 and the copper pipe section 9 of giving vent to anger that link to each other.Be provided with breather line 10 in the said pressure regulator valve 3; Said breather line 10 be provided be used for switch breather line 10 tight a bolt 11; One end of said breather line 10 is provided with the out splice going splice 12 that is used to connect pressure gauge 4, and the other end of said breather line 10 is provided with the input adapter 13 that is used to connect input copper pipe section 7; Said input adapter 13, input copper pipe section 7, input flexible tube section 6, nitrogen cylinder 5 link to each other successively; Said pressure gauge 4 links to each other with the purging pipeline 2 of said thermal mass flow meter 1 with the flexible tube section 8 of giving vent to anger through the copper pipe section 9 of giving vent to anger that links to each other.Saidly tight a bolt 11, input adapter 13, out splice going splice 12 link to each other with said breather line 10 through the mode of screw thread respectively.In the breather line 10 of the 11 screw-in pressure regulator valves that tight a bolt of pressure regulator valve 3; The path of breather line 10 diminishes; Nitrogen flow that passes through and pressure just can diminish; Control the flow of nitrogen with this, the flow of nitrogen then records through the probe 14 of the purging pipeline 2 on the thermal mass flow meter 1 by thermal mass flow meter 1.When nitrogen gas pressure is a definite value; If thermal mass flow meter 1 is talked about accurately; Data when the data on flows of the nitrogen that thermal mass flow meter 1 is measured should be dispatched from the factory with demarcation are identical; And the data that draw on the thermal mass flow meter 1 with demarcate when dispatching from the factory data not simultaneously, then thermal mass flow meter 1 is inaccurate; Utilize this point, the user can judge whether thermal mass flow meter 1 is accurate under the situation that thermal mass flow meter 1 is not disassembled, and dismantles the trouble that instrument is sent to the detection of calibrating center to remove the user from.The present invention's action effect when the accuracy of the own verification thermal mass flow meter 1 of user is obvious especially.
Claims (4)
1. thermal type gas quality flow meter in-line calibration device; Comprise and have the thermal mass flow meter that purges pipeline; It is characterized in that: also comprise pressure regulator valve, pressure gauge, nitrogen cylinder, gas piping, escape pipe, be provided with breather line in the said pressure regulator valve, said breather line is provided with and is used for tighting a bolt of switch breather line; One end of said breather line is provided with and is used to connect manometric out splice going splice, and the other end of said breather line is provided with the input adapter that is used to connect gas piping; Said nitrogen cylinder links to each other with input adapter through gas piping, and said pressure gauge links to each other with the said purging pipeline that has the thermal mass flow meter that purges pipeline through escape pipe.
2. according to the described thermal type gas quality flow meter in-line calibration of claim 1 device, it is characterized in that: saidly tight a bolt, input adapter, out splice going splice link to each other with said breather line through the mode of screw thread respectively.
3. according to the described thermal type gas quality flow meter in-line calibration of claim 1 device; It is characterized in that: said gas piping is made up of the input flexible tube section that links to each other, input copper pipe section; Said input copper pipe section links to each other with said input adapter, and said input flexible tube section links to each other with said nitrogen cylinder.
4. according to the described thermal type gas quality flow meter in-line calibration of claim 1 device; It is characterized in that: said escape pipe is made up of the flexible tube section of giving vent to anger, the copper pipe section of giving vent to anger that link to each other; The said copper pipe section of giving vent to anger links to each other with said pressure gauge, and soft section of said escape pipe links to each other with said purging pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012103259343A CN102829847A (en) | 2012-09-06 | 2012-09-06 | Online detection device of thermal gas mass flowmeter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012103259343A CN102829847A (en) | 2012-09-06 | 2012-09-06 | Online detection device of thermal gas mass flowmeter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102829847A true CN102829847A (en) | 2012-12-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012103259343A Pending CN102829847A (en) | 2012-09-06 | 2012-09-06 | Online detection device of thermal gas mass flowmeter |
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| Country | Link |
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| CN (1) | CN102829847A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110299300A (en) * | 2019-07-11 | 2019-10-01 | 晶澳太阳能有限公司 | The scaling method of the mass flowmenter of board-like PECVD device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2577271Y (en) * | 2002-11-08 | 2003-10-01 | 大庆油田有限责任公司 | Portable checking water for metering device |
| CN202814513U (en) * | 2012-09-06 | 2013-03-20 | 上海华强浮罗仪表有限公司 | Online calibrating apparatus for thermal gas mass flow meter |
-
2012
- 2012-09-06 CN CN2012103259343A patent/CN102829847A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2577271Y (en) * | 2002-11-08 | 2003-10-01 | 大庆油田有限责任公司 | Portable checking water for metering device |
| CN202814513U (en) * | 2012-09-06 | 2013-03-20 | 上海华强浮罗仪表有限公司 | Online calibrating apparatus for thermal gas mass flow meter |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110299300A (en) * | 2019-07-11 | 2019-10-01 | 晶澳太阳能有限公司 | The scaling method of the mass flowmenter of board-like PECVD device |
| CN110299300B (en) * | 2019-07-11 | 2021-07-20 | 晶澳太阳能有限公司 | Calibration method for mass flowmeter of plate type PECVD (plasma enhanced chemical vapor deposition) equipment |
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
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Application publication date: 20121219 |