CN102828237A - Apparatus for preparing zinc selenide/zinc sulfide lamination polycrystal optical material - Google Patents
Apparatus for preparing zinc selenide/zinc sulfide lamination polycrystal optical material Download PDFInfo
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- CN102828237A CN102828237A CN201210170245XA CN201210170245A CN102828237A CN 102828237 A CN102828237 A CN 102828237A CN 201210170245X A CN201210170245X A CN 201210170245XA CN 201210170245 A CN201210170245 A CN 201210170245A CN 102828237 A CN102828237 A CN 102828237A
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- heater
- lamination
- optical material
- vacuum system
- zinc selenide
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Abstract
The invention belongs to the technical field of optical material manufacturing, and concretely relates to an apparatus for preparing a zinc selenide/zinc sulfide lamination polycrystal optical material. The apparatus of the invention comprises a furnace body, a power distribution cabinet, a control cabinet, a vacuum system and a cooling system, wherein the control cabinet performs control, alarm and data recording through sensors in the vacuum system, the cooling system and the furnace body; the vacuum system is connected with the furnace body to perform vacuum processing operation to the furnace body; the cooling system is connected with the furnace body and the vacuum system to perform cooling treatments for the furnace body and the vacuum system; and the power distribution cabinet provides a power source for the apparatus. According to the apparatus, technical problems of poor penetration performance of midium wave infrared band spectra, and low production efficiency of the zinc selenide/zinc sulfide lamination polycrystal optical material prepared by using a chemical vapor deposition method of the prior art are solved; and the zinc selenide/zinc sulfide lamination polycrystal optical material prepared by using a physical vapor deposition theory under a vacuum circumstance is excellent in penetration performance of the midium wave infrared band spectra , and high in production efficiency.
Description
Technical field
The invention belongs to the optical material preparing technical field, be specifically related to a kind of device for preparing zinc selenide/zinc sulphide lamination polycrystalline optical material.
Background technology
Current optical material preparing technical field generally adopts chemical Vapor deposition process to prepare composite optical material.
For zinc selenide/zinc sulphide lamination polycrystalline optical material, adopt the product of chemical Vapor deposition process preparation poor in medium wave infrared band spectrum transmitting characteristic, MV only can reach 60%, can not satisfy the production design requirements; In addition, it is long that said chemical Vapor deposition process prepares the production cycle, and production efficiency is low.
Summary of the invention
Zinc selenide/zinc sulphide lamination polycrystalline optical material medium wave infrared band spectrum transmitting characteristic is poor, production efficiency is low for the available technology adopting chemical gaseous phase depositing process prepares for the technical issues that need to address of the present invention.
Technical scheme of the present invention is described below:
A kind of device for preparing zinc selenide/zinc sulphide lamination polycrystalline optical material; Comprise body of heater and power distribution cabinet; Also comprise housing, vacuum system and cooling system; Wherein, housing through the inner transmitter of vacuum system, cooling system, body of heater to whole device control, warning and record data; Vacuum system is connected with body of heater, is used for body of heater is carried out vacuum pumping; Cooling system is connected with body of heater and vacuum system, is used for body of heater and vacuum system are carried out processing under cooling; Power distribution cabinet is that whole device provides electrical source of power.
Said housing comprises PLC programmable logic controller and PC; Wherein, set vacuum tightness, temperature, air pressure, time parameter through PC, and through vacuum system, cooling system, the inner transmitter monitoring parameter numerical value of body of heater; The PLC programmable logic controller is connected through data line with vacuum system, cooling system and body of heater, to it relevant steering order is provided.
Said PLC programmable logic controller model is preferably Mitsubishi FX3U-64M type.
Said housing also comprises alarm assemblies, and when said PC monitoring data surpassed the safety range of staff's setting, alarm assemblies was reported to the police.
Said alarm assemblies is preferably the sound and light signal panalarm.
Said vacuum system is connected through the stainless steel pipeline with body of heater, and its steering order according to PLC programmable logic controller issue in the said housing is carried out vacuum pumping to body of heater; Said stainless steel pipeline is provided with vacuum transducer, and its monitoring data transfers to PC in the housing through data line.
Said cooling system is connected with vacuum system with body of heater through pipeline, and it is provided with hydraulic pressure sensor, and monitoring data transfers to PC in the housing through data line.
Said body of heater comprises furnace shell, electrode, heating member, thermopair and vent line; Furnace shell is the double-deck water-cooling structure housing that is provided with loam cake, and its top is provided with vent line; Heating member is processed by graphite material, and its global shape is that top opens wide, the cylindrical housings of lower seal, and its sidewall is stepped, and its outside is provided with the hard felt thermal insulation layer of graphite, and heating member is positioned over furnace shell inside; Heating member inside is provided with crucible; Electrode is installed on the furnace shell bottom, and it is positioned at the inner part of furnace shell is graphite material, is connected with said heating member, and it is positioned at the outside part of furnace shell is metallic substance, is connected with power distribution cabinet; Thermopair is used to measure temperature in the body of heater, and its monitoring data transfers to PC in the housing through data line.
As preferred version, respectively be provided with a thermopair in top, middle part, the bottom of furnace shell respectively.
Said power distribution cabinet is that all parts of device provide electrical source of power through cable.
Beneficial effect of the present invention is:
(1) device of preparation zinc selenide of the present invention/zinc sulphide lamination polycrystalline optical material adopts the principle of physical vapor deposition under the vacuum condition to prepare zinc selenide/zinc sulphide lamination polycrystalline optical material; The product medium wave infrared band spectrum transmitting characteristic of producing is good, and MV is up to 70%;
(2) the device production cycle of preparation zinc selenide of the present invention/zinc sulphide lamination polycrystalline optical material is merely 1/4th of the chemical Vapor deposition process production cycle, has significantly improved production efficiency.
Description of drawings
Fig. 1 is the apparatus structure synoptic diagram of preparation zinc selenide of the present invention/zinc sulphide lamination polycrystalline optical material;
Fig. 2 is the intravital heating member front view of stove;
Fig. 3 is the intravital heating member vertical view of stove.
Wherein, 1-housing, 2-vacuum system, 3-cooling system, 4-body of heater, 5-power distribution cabinet.
Embodiment
Below in conjunction with accompanying drawing and embodiment the device of preparation zinc selenide of the present invention/zinc sulphide lamination polycrystalline optical material is elaborated.
As shown in Figure 1, the device of preparation zinc selenide of the present invention/zinc sulphide lamination polycrystalline optical material comprises housing 1, vacuum system 2, cooling system 3, body of heater 4 and power distribution cabinet 5.Wherein, housing 1 be used for to whole device control, warning and record data; Vacuum system 2 is connected with body of heater 4, is used for body of heater 4 is carried out vacuum pumping; Cooling system 3 is connected with body of heater 4 and vacuum system 2, is used for body of heater 4 and vacuum system 2 are carried out processing under cooling; Power distribution cabinet 5 provides electrical source of power for whole device.
Housing 1 comprises PLC programmable logic controller, PC and alarm assemblies.Wherein, set parameters such as vacuum tightness, temperature, air pressure, time to device, and monitor correlation parameter numerical value through vacuum system 2, cooling system 3, body of heater 4 inner transmitters through PC; PLC programmable logic controller and vacuum system 2, cooling system 3 and body of heater 4 are connected through data line, to it relevant steering order are provided; When said PC monitoring data surpassed the safety range of staff's setting, alarm assemblies was reported to the police.In the present embodiment, PLC programmable logic controller model is a Mitsubishi FX3U-64M type, and alarm assemblies adopts the sound and light signal panalarm.
Body of heater 4 comprises furnace shell, electrode, heating member, thermopair and vent line.Furnace shell is the double-deck water-cooling structure Stainless Steel Shell that is provided with loam cake; Its top is provided with vent line, and the obnoxious flavour that produces in the body of heater is discharged; Heating member is processed by graphite material, and its global shape is that top opens wide, the cylindrical housings of lower seal, and it is shown in Figure 2 stepped that its sidewall is, and its outside is provided with the hard felt thermal insulation layer of graphite and is used for insulation, and heating member is positioned over furnace shell inside; Heating member inside is provided with crucible, is used to hold raw materials for production; Electrode is installed on the furnace shell bottom, and it is positioned at the inner part of furnace shell is graphite material, is connected with said heating member, and it is positioned at the outside part of furnace shell is metallic substance, is connected with the cable of power distribution cabinet 5; Thermopair is used to measure temperature in the body of heater; Its monitoring data transfers to PC in the housing 1 through data line; The number and the installation site of thermopair are set according to practical situation flexibly, in the present embodiment, are provided with a thermopair in top, middle part, the bottom of furnace shell respectively.
The working process of the device of preparation zinc selenide of the present invention/zinc sulphide lamination polycrystalline optical material is described below:
Set parameters such as vacuum tightness, temperature, time through the housing PC;
Be positioned in the crucible of body of heater after the zinc selenide powder weighed;
Open cooling system;
Body of heater is vacuumized;
When reaching, body of heater vacuum tightness after setting requires body of heater is heated;
After reaching the heat-up time of setting, open furnace upper cover, take out the zinc selenide polycrystalline material that generates in the crucible;
Zinc selenide polycrystalline material is carried out optics processing, and the said optics course of processing is a general knowledge as well known to those skilled in the art;
Set parameters such as vacuum tightness, temperature, time once more through the housing PC;
Be positioned in the crucible of body of heater after zinc selenide polycrystalline material after the optics processing and zinc sulphide powder weighed;
Open cooling system;
Body of heater is vacuumized;
When reaching, body of heater vacuum tightness after setting requires body of heater is heated;
After reaching the heat-up time of setting, open furnace upper cover, take out the zinc selenide/zinc sulphide lamination polycrystalline optical material that generates in the crucible;
Zinc selenide/zinc sulphide lamination polycrystalline optical material is carried out optics processing obtain desired product, the said optics course of processing is a general knowledge as well known to those skilled in the art.
Claims (10)
1. device for preparing zinc selenide/zinc sulphide lamination polycrystalline optical material; Comprise body of heater (4) and power distribution cabinet (5); It is characterized in that: also comprise housing (1), vacuum system (2) and cooling system (3); Wherein, housing (1) through the inner transmitter of vacuum system (2), cooling system (3), body of heater (4) to whole device control, warning and record data; Vacuum system (2) is connected with body of heater (4), is used for body of heater (4) is carried out vacuum pumping; Cooling system (3) is connected with body of heater (4) and vacuum system (2), is used for body of heater (4) and vacuum system (2) are carried out processing under cooling; Power distribution cabinet (5) provides electrical source of power for whole device.
2. the device of preparation zinc selenide according to claim 1/zinc sulphide lamination polycrystalline optical material, it is characterized in that: said housing (1) comprises PLC programmable logic controller and PC; Wherein, set vacuum tightness, temperature, air pressure, time parameter through PC, and through vacuum system (2), cooling system (3), the inner transmitter monitoring parameter numerical value of body of heater (4); The PLC programmable logic controller is connected through data line with vacuum system (2), cooling system (3) and body of heater (4), to it relevant steering order is provided.
3. the device of preparation zinc selenide according to claim 2/zinc sulphide lamination polycrystalline optical material is characterized in that: said PLC programmable logic controller model is a Mitsubishi FX3U-64M type.
4. the device of preparation zinc selenide according to claim 2/zinc sulphide lamination polycrystalline optical material; It is characterized in that: said housing (1) also comprises alarm assemblies; When said PC monitoring data surpassed the safety range of staff's setting, alarm assemblies was reported to the police.
5. the device of preparation zinc selenide according to claim 4/zinc sulphide lamination polycrystalline optical material, it is characterized in that: said alarm assemblies is the sound and light signal panalarm.
6. the device of preparation zinc selenide according to claim 2/zinc sulphide lamination polycrystalline optical material; It is characterized in that: said vacuum system (2) is connected through the stainless steel pipeline with body of heater (4), and its steering order according to PLC programmable logic controller issue in the said housing (1) is carried out vacuum pumping to body of heater (4); Said stainless steel pipeline is provided with vacuum transducer, and its monitoring data transfers to PC in the housing (1) through data line.
7. the device of preparation zinc selenide according to claim 2/zinc sulphide lamination polycrystalline optical material; It is characterized in that: said cooling system (3) is connected with vacuum system (2) with body of heater (4) through pipeline; It is provided with hydraulic pressure sensor, and monitoring data transfers to PC in the housing (1) through data line.
8. the device of preparation zinc selenide according to claim 2/zinc sulphide lamination polycrystalline optical material, it is characterized in that: said body of heater (4) comprises furnace shell, electrode, heating member, thermopair and vent line; Furnace shell is the double-deck water-cooling structure housing that is provided with loam cake, and its top is provided with vent line; Heating member is processed by graphite material, and its global shape is that top opens wide, the cylindrical housings of lower seal, and its sidewall is stepped, and its outside is provided with the hard felt thermal insulation layer of graphite, and heating member is positioned over furnace shell inside; Heating member inside is provided with crucible; Electrode is installed on the furnace shell bottom, and it is positioned at the inner part of furnace shell is graphite material, is connected with said heating member, and it is positioned at the outside part of furnace shell is metallic substance, is connected with power distribution cabinet (5); Thermopair is used to measure temperature in the body of heater, and its monitoring data transfers to PC in the housing (1) through data line.
9. the device of preparation zinc selenide according to claim 8/zinc sulphide lamination polycrystalline optical material is characterized in that: respectively be provided with a thermopair in top, middle part, the bottom of furnace shell respectively.
10. the device of preparation zinc selenide according to claim 1 and 2/zinc sulphide lamination polycrystalline optical material is characterized in that: said power distribution cabinet (5) is that all parts of device provide electrical source of power through cable.
Applications Claiming Priority (2)
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RU2011501934 | 2011-06-17 | ||
RU2011501934 | 2011-06-17 |
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CN 201220245352 Expired - Fee Related CN202643822U (en) | 2011-06-17 | 2012-05-22 | Device capable of preparing zinc selenide or zinc sulfide lamination polycrystal optical material |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103633570A (en) * | 2013-11-02 | 2014-03-12 | 安徽国瑞特重型数控机床制造有限公司 | Graphite processing machine tool power distribution cabinet with air curtain sealing device |
Families Citing this family (1)
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CN102828237A (en) * | 2011-06-17 | 2012-12-19 | 天津津航技术物理研究所 | Apparatus for preparing zinc selenide/zinc sulfide lamination polycrystal optical material |
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CN1344336A (en) * | 1998-10-09 | 2002-04-10 | 克里公司 | Prodn. of bulk single crystals of aluminum nitride, silicon carbide and aluminum nitride: silicon carbide alloy |
US20070256630A1 (en) * | 2006-05-04 | 2007-11-08 | Fairfield Crystal Technology, Llc | Method and apparatus for aluminum nitride monocrystal boule growth |
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CN201198501Y (en) * | 2008-05-12 | 2009-02-25 | 扬州华夏集成光电有限公司 | Gradient temperature field heating element |
CN101649449A (en) * | 2009-09-17 | 2010-02-17 | 北京中材人工晶体研究院有限公司 | Preparation method and preparation mould of ZnS/ZnSe composite infrared transmission material |
CN101805927A (en) * | 2010-04-20 | 2010-08-18 | 中国科学院上海硅酸盐研究所 | Grower of high-purity semi-insulating silicon carbide single crystal |
CN202643822U (en) * | 2011-06-17 | 2013-01-02 | 天津津航技术物理研究所 | Device capable of preparing zinc selenide or zinc sulfide lamination polycrystal optical material |
-
2012
- 2012-05-22 CN CN201210170245XA patent/CN102828237A/en active Pending
- 2012-05-22 CN CN 201220245352 patent/CN202643822U/en not_active Expired - Fee Related
Patent Citations (7)
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CN1344336A (en) * | 1998-10-09 | 2002-04-10 | 克里公司 | Prodn. of bulk single crystals of aluminum nitride, silicon carbide and aluminum nitride: silicon carbide alloy |
US20070256630A1 (en) * | 2006-05-04 | 2007-11-08 | Fairfield Crystal Technology, Llc | Method and apparatus for aluminum nitride monocrystal boule growth |
CN201133766Y (en) * | 2007-11-30 | 2008-10-15 | 上海普罗新能源有限公司 | Polycrystalline silicon fine ingot furnace adopting gradient temperature reduction |
CN201198501Y (en) * | 2008-05-12 | 2009-02-25 | 扬州华夏集成光电有限公司 | Gradient temperature field heating element |
CN101649449A (en) * | 2009-09-17 | 2010-02-17 | 北京中材人工晶体研究院有限公司 | Preparation method and preparation mould of ZnS/ZnSe composite infrared transmission material |
CN101805927A (en) * | 2010-04-20 | 2010-08-18 | 中国科学院上海硅酸盐研究所 | Grower of high-purity semi-insulating silicon carbide single crystal |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103633570A (en) * | 2013-11-02 | 2014-03-12 | 安徽国瑞特重型数控机床制造有限公司 | Graphite processing machine tool power distribution cabinet with air curtain sealing device |
CN103633570B (en) * | 2013-11-02 | 2016-06-29 | 安徽国瑞特重型数控机床制造有限公司 | A kind of graphite processing machine tool power distribution cabinet with air curtain sealing device |
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Application publication date: 20121219 |