CN102818534A - Detection method for detecting surface shape of plane optical component - Google Patents
Detection method for detecting surface shape of plane optical component Download PDFInfo
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- CN102818534A CN102818534A CN2012102896170A CN201210289617A CN102818534A CN 102818534 A CN102818534 A CN 102818534A CN 2012102896170 A CN2012102896170 A CN 2012102896170A CN 201210289617 A CN201210289617 A CN 201210289617A CN 102818534 A CN102818534 A CN 102818534A
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Abstract
The invention relates to a detection method for detecting the surface shape of a plane optical component of which the reflectivity is greater than 13 percent. Tools used by the detection method comprise a Fizeau interferometer, two plane standard lenses with the reflectivities of 4 percent, a plane standard lens with the reflectivity of 4 percent to 13 percent and a reflective or adsorption attenuation sheet with the transmissivity of between 0.30 and 0.36. The detection method comprises the following steps of: firstly, carrying out absolute inspection on the three standard lenses with the reflectivities of 4 percent, 4 percent and 4 percent to 13 percent to obtain the absolute surface shape of the plane standard lens with the reflectivity of 4 percent to 13 percent; then inserting the attenuation sheet in an interference cavity, carrying out relative inspection on the plane standard lens with the reflectivity of 4 percent to 13 percent and calculating a system error of the interferometer; and finally, carrying out relative inspection on the component to be detected and deducting the system error to obtain the absolute surface shape distribution of the component to be detected. The detection method has high detection accuracy for detection of the plane optical component of which the reflectivity is greater than 13 percent.
Description
Technical field
The invention belongs to interference of light metrology and measurement field, particularly a kind of reflectivity that is used for>detection method of 13% planar optical elements face shape.
Background technology
The result of fizeau interferometer detection plane optical element surface receives the restriction of reference surface surface figure accuracy, and the influence of deduction this respect need be done absolute check to detected element.Three traditional planes are examined method mutually and are measured the absolute face shape distribution that can obtain on the axis direction in three plane components edges for 3 times.(1. [G.Schulz; J.Schwider.Precise Measurement of Plainness [J] .Applied Optics, 1967,6 (6): 1077 ~ 1084] and 2. [G.Schulz; J.Schwider; C.Hiller et al.Establishing an Optical Flatness Standard [J] .Applied Optics, 1971,10 (4): 929 ~ 934]).Chiayu Ai and J.C.Wyant examine mutually on traditional three planes on the basis of method and have proposed the odd even function method; Plane surface shape is resolved into idol-idol, odd-odd, even-odd, strange-four function component of idol; After 3 times of three traditional mutual inspection methods measuring and make again the measuring for totally 6 times of 45 °, 90 ° of one of them plane rotations and 180 °, obtain wherein each component respectively, the absolute face shape that last addition the obtains three plane components (3. [C.Ai that distributes; J.C.Wyant.Absolute testing of flats decomposed to even and odd function [C] .SPIE; 1992,1776:73 ~ 83] and 4. [C.Ai, J.C.Wyant.Absolutetesting of flats by using even and odd function [J] .Applied Optics; 1993,32 (25): 4698 ~ 4705]).M.K ü chel proposes face shape is divided into rotation symmetry and the asymmetric two parts of rotation; Need not convert rectangular coordinate system into polar coordinates; Absolute check through measure accomplishing three plane surface shapes for 9 times (5. [Michael F.K ü chel.A new approach to solve the three flat problem [J] .Optik; 2001,112 (9): 381 ~ 391]).U.Griesmann has proposed the minute surface balanced method; Face shape is divided into minute surface symmetry and the asymmetric two parts of minute surface; Definitely check (6. [Ulf Griesmann.Three-flat test solutions based on simple mirror symmetry [J] .Applied Optics, 2006,45 (23): 5856 ~ 5865] and 7. [Ulf Griesmann through measure realizing three plane surface shapes for 6 times; Quandou Wang; Johannes Soons.Three-flat tests including mounting-induced deformations [J] .Optical Engineering, 2007,46 (9): 0936011 ~ 09360115]).More than the absolute method of inspection when detecting high reflectance planar optical elements face shape, cause the test result existence than mistake owing to the interference fringe contrast is lower, can not detect its plane surface shape exactly.
Summary of the invention
The purpose of this invention is to provide a kind of reflectivity that is used for>detection method of 13% planar optical elements face shape; This method measurement of reflectivity>13% planar optical elements face shape has higher precision, can obtain planar optical elements to be measured deduction the absolute face shape of interferometer system error distribute.
Technical solution of the present invention is following:
A kind of reflectivity that is used for>detection method of 13% planar optical elements face shape, this detection method institute tool using comprises fizeau interferometer, the first standard mirror; Reflectivity 4%, the second standard mirror, reflectivity 4%; The 3rd standard mirror, the range of choice of reflectivity are 4%～13%, attenuator; Transmissivity is characterized in that between 0.30～0.36: this method may further comprise the steps:
1. utilize described fizeau interferometer, adopt existing absolute method of inspection that the first standard mirror, the second standard mirror and the 3rd standard mirror are definitely checked, obtain absolute face shape distribution C (x, y) the also storage of the 3rd standard mirror;
2. measure the systematic error of fizeau interferometer: with the first standard mirror clamping on the reference mirror adjustment rack of described fizeau interferometer; With described the 3rd standard mirror clamping on the mirror adjustment rack to be measured of fizeau interferometer; Between the first standard mirror and the 3rd standard mirror, insert described attenuator, the inclination angle of this attenuator and the described first standard mirror<1 °, utilize described fizeau interferometer to measure the corrugated data W of the 3rd standard mirror
0(described fizeau interferometer calculates the systematic error W of fizeau interferometer by following formula for x, y) also storage
Sys_err:
W
sys_err=W
O（x，y)-C(x，y)；
3. the 3rd standard mirror on the mirror adjustment rack to be measured is replaced by planar optical elements to be measured, utilizes fizeau interferometer to measure planar optical elements to be measured corrugated data W
1(x, y) also storage;
4. described fizeau interferometer utilizes formula to calculate the absolute face shape distribution W of planar optical elements to be measured
Test(x, y):
W
test（x，y)=W
1（x，y)-W
sys_err=W
1（x，y)-[W
0（x，y)-C（x，y)]。
The described absolute method of inspection is odd even function method, rotation balanced method or minute surface balanced method.
The present invention compared with prior art, its remarkable advantage is:
1, planar optical elements reflectivity to be measured>13% o'clock, insert the light intensity attenuation sheet of transmissivity between 0.30～0.36 and measure.Than traditional method of inspection, insert the light intensity attenuation sheet and can guarantee reflectivity the required contrast of interfering 80% or more during 13% planar optical elements face shape interferometry, and can not produce the measuring error that causes because of reflection parasitism interference repeatedly.
2, avoided the systematic error of fizeau interferometer during the present invention measures, compared, improved accuracy of detection with traditional method of inspection.
Description of drawings
Fig. 1 is that the inventive method step 2 is measured the light path synoptic diagram.
Fig. 2 is that the inventive method step 3 is measured the light path synoptic diagram.
Embodiment
The purpose of embodiment, technical scheme and advantage are described further the present invention below in conjunction with accompanying drawing and embodiment for a better understanding of the present invention, but should not limit protection scope of the present invention with this.
A kind of reflectivity that is used for>detection method of 13% planar optical elements face shape, step is following:
1. utilize fizeau interferometer 1; Adopt background technology document 4 described odd even function methods that 4% reflectivity, the first standard mirror 2,4% reflectivity, the second standard mirror 3 and 4% reflectivity the 3rd standard mirror 4 are definitely checked; Obtain absolute face shape distribution C (x, y) the also storage of the 3rd standard mirror 4;
2. with the first standard mirror, 2 clampings on the reference mirror adjustment rack 1_2 of fizeau interferometer 1; With the 3rd standard mirror 4 clampings on the mirror adjustment rack 1_3 to be measured of fizeau interferometer 1; The insertion transmissivity is 0.36 attenuator 5 between the first standard mirror 2 and the 3rd standard mirror 4; 0.8 ° at the inclination angle of this attenuator 5 and the first standard mirror 2, as shown in Figure 1, utilize fizeau interferometer 1 to measure the corrugated data W of the 3rd standard mirror 4
0(fizeau interferometer 1 calculates the systematic error W of fizeau interferometer 1 by following formula for x, y) also storage
Sys_err:
W
sys_err=W
0(x，y)-C(x，y)；
3. the 3rd standard mirror 4 on the mirror adjustment rack 1_3 to be measured is replaced by the planar optical elements to be measured 6 of 15% reflectivity, as shown in Figure 2, utilize fizeau interferometer 1 to measure planar optical elements 6 corrugated data W to be measured
1(x, y) also storage;
4. fizeau interferometer 1 utilizes formula to calculate the absolute face shape distribution W of planar optical elements 6 to be measured
Test(x, y):
W
test(x，y)=W
1(x，y)-W
sys_err=W
1(x，y)-[W
0(x，y)-C(x，y)]。
The contrast of measurement result and existing method is as shown in table 1 below:
| 15% reflectivity is to be measured | Flat element to be measured | The surface shape measurement result | The surface shape measurement error |
[0029]
| Planar optical elements | The actual face shape of part | The absolute method of inspection of odd even function | The inventive method | The absolute method of inspection of odd even function | The inventive method |
| PV value (nm) | 140.0 | 145.0 | 144.2 | 11.4 | 10.4 |
| RMS value (nm) | 21.6 | 21.6 | 21.7 | 1.4 | 1.3 |
Table 1
A kind of reflectivity that is used for>detection method of 13% planar optical elements face shape, step is following:
1. utilize fizeau interferometer 1; Adopt background technology document 6 described minute surface balanced methods that 4% reflectivity, the first standard mirror 2,4% reflectivity, the second standard mirror 3 and 13% reflectivity the 3rd standard mirror 4 are definitely checked; Obtain absolute face shape distribution C (x, y) the also storage of the 3rd standard mirror 4;
2. with the first standard mirror, 2 clampings on the reference mirror adjustment rack 12 of fizeau interferometer 1; With the 3rd standard mirror 4 clampings on the mirror adjustment rack 13 to be measured of fizeau interferometer 1; The insertion transmissivity is 0.30 attenuator 5 between the first standard mirror 2 and the 3rd standard mirror 4; 0.2 ° at the inclination angle of this attenuator 5 and the first standard mirror 2, as shown in Figure 1, utilize fizeau interferometer 1 to measure the corrugated data W of the 3rd standard mirror 4
0(fizeau interferometer 1 calculates the systematic error W of fizeau interferometer 1 by following formula for x, y) also storage
Sys_err:
W
sys_err=W
0(x，y)-C(x，y)；
3. the 3rd standard mirror 4 on the mirror adjustment rack 1_3 to be measured is replaced by the planar optical elements to be measured 6 of 80% reflectivity, as shown in Figure 2, utilize fizeau interferometer 1 to measure planar optical elements 6 corrugated data W to be measured
1(x, y) also storage;
4. fizeau interferometer 1 utilizes formula to calculate the absolute face shape distribution W of planar optical elements 6 to be measured
Test(x, y):
W
test(x，y)=W
1(x，y)-W
sys_err=W
1(x，y)-[W
0(x，y)-C(x，y)]。
The contrast of measurement result and existing method is as shown in table 2 below:
Table 2
Experiment shows that the inventive method is to reflectivity>13% planar optical elements face shape is detected has the higher detection precision.
Claims (2)
1. one kind is used for reflectivity>detection method of 13% planar optical elements face shape, this detection method institute tool using comprises fizeau interferometer (1), the first standard mirror (2); Reflectivity 4%, the second standard mirror (3), reflectivity 4%; The 3rd standard mirror (4), the range of choice of reflectivity are 4%～13%, attenuator (5); Transmissivity is characterized in that between 0.30～0.36: this method may further comprise the steps:
1. utilize described fizeau interferometer (1), adopt existing absolute method of inspection that the first standard mirror (2), the second standard mirror (3) and the 3rd standard mirror (4) are definitely checked, obtain absolute face shape distribution C (x, y) the also storage of the 3rd standard mirror (4);
2. measure the systematic error of fizeau interferometer: with first standard mirror (2) clamping on the reference mirror adjustment rack of described fizeau interferometer (1); With described the 3rd standard mirror (4) clamping on the mirror adjustment rack to be measured of fizeau interferometer (1); Between the first standard mirror (2) and the 3rd standard mirror (4), insert described attenuator (5), the inclination angle of this attenuator (5) and the described first standard mirror (2)<1 °, utilize described fizeau interferometer (1) to measure the corrugated data W of the 3rd standard mirror (4)
0(described fizeau interferometer (1) calculates the systematic error W of fizeau interferometer (1) by following formula for x, y) also storage
Sys_err:
W
sys_err=W
0(x，y)-C(x，y)；
3. the 3rd standard mirror (4) on the mirror adjustment rack to be measured is replaced by planar optical elements to be measured (6), utilizes fizeau interferometer (1) to measure planar optical elements to be measured (6) corrugated data W
1(x, y) also storage;
4. described fizeau interferometer (1) utilizes formula to calculate the absolute face shape distribution W of planar optical elements to be measured (6)
Test(x, y):
W
test(x，y)=W
1(x，y)-W
sys_err=W
1(x，y)-[W
0(x，y)-C(x，y)]。
2. the detection method of planar optical elements face shape according to claim 1 is characterized in that the described absolute method of inspection is odd even function method, rotation balanced method or minute surface balanced method.
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| CN201210289617.0A CN102818534B (en) | 2012-08-15 | 2012-08-15 | Detection method for detecting surface shape of plane optical component |
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Cited By (5)
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| CN103278105A (en) * | 2013-05-16 | 2013-09-04 | 中国科学院上海光学精密机械研究所 | Axicon surface shape and cone angle detection method |
| CN104296689B (en) * | 2014-11-06 | 2017-03-15 | 中国科学院光电技术研究所 | A kind of detection method of the spacing reflection mirror weightlessness face shape with supporting construction |
| CN107388996A (en) * | 2017-09-08 | 2017-11-24 | 上海理工大学 | A kind of plane of reference planarity checking method |
| CN108917662A (en) * | 2018-05-18 | 2018-11-30 | 上海理工大学 | The optimization method of plane of reference planarity checking |
| CN110332905A (en) * | 2019-07-22 | 2019-10-15 | 中国工程物理研究院激光聚变研究中心 | Any attitude optical element surface shape detection apparatus in place and method |
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Cited By (8)
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|---|---|---|---|---|
| CN103278105A (en) * | 2013-05-16 | 2013-09-04 | 中国科学院上海光学精密机械研究所 | Axicon surface shape and cone angle detection method |
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| CN104296689B (en) * | 2014-11-06 | 2017-03-15 | 中国科学院光电技术研究所 | A kind of detection method of the spacing reflection mirror weightlessness face shape with supporting construction |
| CN107388996A (en) * | 2017-09-08 | 2017-11-24 | 上海理工大学 | A kind of plane of reference planarity checking method |
| CN108917662A (en) * | 2018-05-18 | 2018-11-30 | 上海理工大学 | The optimization method of plane of reference planarity checking |
| CN108917662B (en) * | 2018-05-18 | 2020-05-19 | 上海理工大学 | Optimization method for reference surface flatness inspection |
| CN110332905A (en) * | 2019-07-22 | 2019-10-15 | 中国工程物理研究院激光聚变研究中心 | Any attitude optical element surface shape detection apparatus in place and method |
| CN110332905B (en) * | 2019-07-22 | 2024-05-07 | 中国工程物理研究院激光聚变研究中心 | Device and method for detecting in-situ surface shape of optical element in any posture |
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Inventor after: Zhang Min Inventor after: Tang Feng Inventor after: Wang Xiangchao Inventor after: Dai Fengzhao Inventor before: Zhang Min Inventor before: Tang Feng Inventor before: Wang Xiangchao Inventor before: Dai Fengjian |
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