CN102799030A - Liquid crystal display substrate and manufacturing method thereof - Google Patents
Liquid crystal display substrate and manufacturing method thereof Download PDFInfo
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- CN102799030A CN102799030A CN2012103149536A CN201210314953A CN102799030A CN 102799030 A CN102799030 A CN 102799030A CN 2012103149536 A CN2012103149536 A CN 2012103149536A CN 201210314953 A CN201210314953 A CN 201210314953A CN 102799030 A CN102799030 A CN 102799030A
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Abstract
The invention provides a liquid crystal display substrate and a manufacturing method thereof. The liquid crystal display substrate comprises a TFT (Thin Film Transistor) substrate, a CF (Color Filter) substrate and a liquid crystal clamped between the TFT substrate and the CF substrate, wherein the liquid crystal display substrate is provided with a display area and a cutting area which are cut into a plurality of small substrates; an alignment film is arranged on the CF substrate or the TFT substrate and comprises a molecular main chain parallel to the CF substrate and a photosensitive sensing side chain perpendicular to the molecular main chain; a dye side chain parallel to the photosensitive sensing side chain is arranged in the cutting area; and an included angle between the dye side chain and the substrate is identical with a pretilt angle of the liquid crystal. According to the invention, after the liquid crystal display substrate is aligned by ultraviolet light, the pretilt angle of the liquid crystal can be obtained by measuring the brightness change of linearly polarized light of the alignment film, the problem that the online detection of the pretilt angle of the liquid crystal cannot be realized after the light alignment project is ended and before the box forming project is finished is solved and the online feedback and error correction can be carried out.
Description
Technical field
The present invention relates to a kind of LCD and manufacturing approach thereof of ultraviolet light orientation.
Background technology
Traditional CRT monitor relies on the phosphor powder on the cathode-ray tube (CRT) emitting electrons bump screen to come display image, but the principle of liquid crystal display is then different fully.Usually, liquid crystal display (LCD) device has upper substrate and infrabasal plate, have each other certain intervals and mutually over against.Be formed on two substrates a plurality of electrodes each other over against.Liquid crystal is clipped between upper substrate and the infrabasal plate.Voltage is applied on the liquid crystal through the electrode on the substrate, thus then according to the voltage that acted on change the arrangement display image of liquid crystal molecule, because liquid crystal indicator is not launched light as stated, it needs light source to come display image.Therefore, liquid crystal indicator has the backlight that is positioned at the liquid crystal panel back.Thereby the arrangement according to liquid crystal molecule is controlled from backlight quantity of incident light display image.As shown in Figure 1, accompany color membrane substrates 104, common electrode 105, liquid crystal layer 106 and array base palte 107 between upper strata polaroid 101 and the lower floor's polaroid 109, liquid crystal molecule is the material with refractive index and dielectric constant anisotropy.On array base palte 107, form pixel electrode 108, thin film transistor (TFT) (TFT) 114, array sub-pixel 111, sweep trace 110, signal wire 112 etc.Signal wire 112 is connected to the drain electrode of TFT, and pixel electrode 108 is connected to source class, and sweep trace 110 is connected to grid.The light process that backlight 113 sends is polaroid 109 down, becomes the polarized light with certain polarization direction.Institute's making alive between the thin film transistor (TFT) 114 control pixel electrodes 108; And this voltage acts on the polarization direction that liquid crystal is controlled polarized light; Polarized light sees through corresponding color film 102 backs and forms monochromatic polarized light, if polarized light can penetrate upper strata polaroid 101, then demonstrates corresponding color; Electric field intensity is different, and the deflection angle of liquid crystal molecule is also different, and the light intensity that sees through is different, and the brightness of demonstration is also different.The combination of the different light intensity through three kinds of colors of RGB shows motley image.
In order to make liquid crystal molecule have stable original state, need to use alignment film.Alignment film need carry out orientation and handle the arrangement that could control liquid crystal molecule effectively, and alignment technique mainly contains friction (Rubbing) type and non-friction (Non-Rubbing) type two big classes.The bad problem that non-friction matching can avoid mechanical friction to bring to alignment film.
As shown in Figure 3, alignment film comprises some molecular backbones 10 and perpendicular to the photosensitive side chain 20 of molecular backbone 10, molecular backbone 10 is parallel to substrate.
Friction matching is to carry out the directed mechanical friction of contact on macromolecule PI surface with the flannelette roller; The energy that friction macromolecule PI surface is supplied makes high polymer main chain 10 align because of extension; And it is horizontal that molecular backbone 10 is parallel to orientation substrate, thereby the control LCD alignment is arranged.The advantage of this method is to operate at normal temperatures, and fraction time is short, and production is high.Shortcoming is that the PI material has high polarity, high-hydroscopicity, and is apt to deteriorate and cause orientation inhomogeneous when storing or transporting; Problems such as dust granules, the static that friction causes is residual, brush mark reduce the technology yield easily.
Non-friction matching technology comprises light orientation, ion beam orientation etc.The principle of light orientation is to utilize the photochemical reaction of UV photosensitive polymer monomer material to produce anisotropy; Liquid crystal molecule and alignment film surface molecular interact; In order to reach the minimum steady state (SS) of energy, liquid crystal molecule is arranged along the direction of the defined stressed maximum of light orientation.Light alignment technique commonly used is linear polarized uv polymerization technique (Liner Photo-polymerization by polarized UV light is called for short LPP), and the nonlinear polarization ultraviolet light is also used in the light orientation that has.The ion beam orientation is with the vapor deposition mode quasi cobalt carbon diaphragm (Diamond Like Carbon is called for short DLC) to be attached to glass surface the earliest, forms the alignment film of oblique arrangement, with the control liquid crystal molecular orientation.Though this technology has good orientation effect, production efficiency is low, and cost is very high again, and the usefulness seldom in the LCD field is mainly used in liquid crystal on silicon (LCOS) micro-display device.In addition, can also utilize argon (Ar) ion beam that the PI film is carried out orientation handles.
The process of light orientation is as shown in Figure 2, before the light orientation: at first on substrate, be coated with special material as alignment film PI; After the light orientation: alignment film PI when shining with the UV purple light again, the macromolecular material PI of alignment film is automatically towards the light-struck angle of UV; Form liquid crystal LC tilt angle: liquid crystal molecule LC pre-dumping angle is led into the high molecular angle of alignment film automatically.
Through making liquid crystal molecule, reach the effect of the initial orientation of liquid crystal molecule along being tilted by the orientation molecular side chain direction of ultraviolet light oblique illumination.
As shown in Figure 3 is the light process of alignment synoptic diagram of microcosmic, the first step (before the light orientation), and it is horizontal that 10 one-tenth of the molecular backbones of the alignment film before carrying out ultraviolet light UV orientation are parallel to substrate, and 20 of photosensitive side chains are perpendicular to molecular backbone 10; Second step (after the light orientation); After applying ultraviolet light UV with certain angle of inclination; Light orientation reaction (being orientated reaction etc. again like dimerization reaction, decomposition reaction, isomerization reaction, light) takes place in the photosensitive side chain 20 responsive to ultraviolet light, arranges along the vergence direction of light; The 3rd step (forming the tilt angle of liquid crystal); After liquid crystal molecule LC touches alignment film in order to reach the minimum steady state (SS) of energy; Liquid crystal molecule LC arranges along the direction of the defined stressed maximum of light orientation; Promptly be arranged in parallel with photosensitive side chain 20, at this moment the angle of it and substrate or main chain 10 just is called tilt angle α.
Can only be after the perfusion liquid crystal becomes box to accomplish wait at present and measure through ellipsometry for the measurement of tilt angle α after the light orientation; Just know whether requirement up to specification of angle after this; If incongruent words; At this moment produce line overstock a large amount of from light orientation engineering to the defective products that becomes the box engineering, can not realize on-line measurement and error correction.
Summary of the invention
The present invention provides the liquid crystal display substrate and the manufacturing approach thereof of the measurement liquid crystal pretilt angle of a kind of on-line measurement and error correction.
The present invention provides a kind of liquid crystal display substrate; Liquid crystal display substrate comprise TFT substrate, CF substrate and be located in the TFT substrate and the CF substrate between liquid crystal; Liquid crystal display substrate has viewing area and the cutting zone that cuts into some little substrates; On CF substrate or TFT substrate, be provided with alignment film; Said alignment film comprises the molecular backbone that is parallel to the CF substrate and perpendicular to the photaesthesia side chain of molecular backbone, in cutting zone, is provided with the dyestuff side chain parallel with the photaesthesia side chain, and the angle of the angle between said dyestuff side chain and the substrate and the tilt angle of liquid crystal is identical.
The present invention provides a kind of manufacturing approach of liquid crystal display substrate again; Liquid crystal display substrate is the CF substrate; The CF substrate has viewing area and the cutting zone that cuts into some little substrates; On the CF substrate, be provided with alignment film, said alignment film comprises the molecular backbone that is parallel to the CF substrate and perpendicular to the photaesthesia side chain of molecular backbone, may further comprise the steps:
The first step: the angle of the liquid crystal pretilt angle of calculating specification product and the relation between the brightness of incident ray polarized light;
Second step: in cutting zone, be provided with the dyestuff side chain parallel with the photaesthesia side chain;
The 3rd step: before the light orientation, see through with the parallel rays polarization of a Polarizer with incident light, the polarization of light of the vertical direction of incident light filters, and brightness measuring device for camera records the brightness of the parallel rays polarized light of incident light;
The 4th step: after the light orientation, dyestuff side chain and substrate have angle, and the major axis of parallel incident polarized light and dyestuff side chain forms angle, and parallel incident polarization luminance brightness decays, and brightness measuring device for camera records the brightness of the parallel incident polarized light in decay back;
The 5th step: the corresponding relation of the brightness decay through parallel incident polarized light and the liquid crystal pretilt angle degree of specification product draws the tilt angle angle of liquid crystal.
The present invention provides a kind of manufacturing approach of liquid crystal display substrate again; Liquid crystal display substrate is the TFT substrate; The TFT substrate has viewing area and the cutting zone that cuts into some little substrates; On the TFT substrate, be provided with alignment film, said alignment film comprises the molecular backbone that is parallel to the TFT substrate and perpendicular to the photaesthesia side chain of molecular backbone, may further comprise the steps:
The first step: the angle of the liquid crystal pretilt angle of calculating specification product and the relation between the brightness of incident ray polarized light;
Second step: in cutting zone, be provided with the dyestuff side chain parallel with the photaesthesia side chain;
The 3rd step: before the light orientation, see through with the parallel rays polarization of a Polarizer with incident light, the polarization of light of the vertical direction of incident light filters, and brightness measuring device for camera records the brightness of the parallel rays polarized light of incident light;
The 4th step: after the light orientation, dyestuff side chain and substrate have angle, and the major axis of parallel incident polarized light and dyestuff side chain forms angle, and parallel incident polarization luminance brightness decays, and brightness measuring device for camera records the brightness of the parallel incident polarized light in decay back;
The 5th step: the corresponding relation of the brightness decay through parallel incident polarized light and the liquid crystal pretilt angle degree of specification product draws the tilt angle angle of liquid crystal.
The present invention is through being provided with the parallel with it dichroic dye side chain that has perpendicular to the responsive side chain of the ultraviolet light of orientation molecular backbone is other on alignment film; The liquid crystal pretilt angle degree is learnt in the measurement that after carrying out the ultraviolet light orientation, can change according to the brightness to the linearly polarized light through this alignment film; Solved after the present light orientation engineering before become the box engineering to finish can not online detection liquid crystal pretilt angle problem, can carry out online feedback and error correction.
Description of drawings
Fig. 1 shows the structural representation of (LCD) device for available liquid crystal;
Fig. 2 is the procedure chart of existing light orientation;
Fig. 3 is the microprocess synoptic diagram of smooth process of alignment shown in Figure 2;
Fig. 4 is the synoptic diagram of light orientation of the present invention;
Fig. 5 is the structural representation of liquid crystal display substrate of the present invention;
Fig. 6 is the synoptic diagram of the measurement liquid crystal pretilt angle before the light orientation of the present invention;
Fig. 7 is for measuring the synoptic diagram of liquid crystal pretilt angle after the light orientation of the present invention.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment; Further illustrate the present invention; Should understand these embodiment only be used to the present invention is described and be not used in the restriction scope of the present invention; After having read the present invention, those skilled in the art all fall within the application's accompanying claims institute restricted portion to the modification of the various equivalent form of values of the present invention.
The present invention is through being provided with the parallel with it dichroic dye side chain 30 that has perpendicular to the UV photaesthesia side chain of orientation molecular backbone 10 20 is other on alignment film; The pre-dumping angle of liquid crystal is learnt in the measurement that after carrying out ultraviolet light UV orientation, can change according to the brightness to the linearly polarized light through this alignment film; Solved after the present light orientation engineering before become the box engineering to finish can not online detection liquid crystal pretilt angle problem, can carry out online feedback and error correction.
As shown in Figure 4, alignment film comprises some molecular backbones 10 and perpendicular to the some photosensitive side chain 20 of molecular backbone 10, molecular backbone 10 is parallel to substrate.
After applying the ultraviolet light UV with certain angle of inclination, light orientation reaction (being orientated reaction etc. again like dimerization reaction, decomposition reaction, isomerization reaction, light) takes place in the photosensitive side chain 20 responsive to ultraviolet light, arranges along the vergence direction of light; Dyestuff side chain 30 receives the extruding and the drive of photosensitive side chain 20, also can arrange along the vergence direction of light, and the angle of dyestuff side chain 30 and substrate or main chain 10 is similar to the angle of liquid crystal LC and substrate or main chain 10 at this moment; After liquid crystal molecule LC touches alignment film in order to reach the minimum steady state (SS) of energy; Liquid crystal molecule is arranged along the direction of the defined stressed maximum of light orientation; Promptly be arranged in parallel with photosensitive side chain 20, at this moment the angle of it and substrate or main chain 10 just is called tilt angle α.
Be illustrated in figure 5 as the structural representation of liquid crystal display substrate; Each big liquid crystal display substrate 300 comprise TFT substrate 100, CF substrate 200 and be folded in TFT substrate 100 and the CF substrate between liquid crystal; In the present embodiment; Each liquid crystal display substrate 300 can be cut into the little substrate 600 of 2*2 piece; Each little substrate 600 is stayed the screen shot area edge 400 and edge of display area 102 on the substrate after comprising exposure, and wherein screen shot area edge 400 is exactly the edge that cuts little substrate 600, and edge of display area 102 is edges of each little substrate 600 ability display image.
Is cutting zone 500 at big liquid crystal display substrate 300 with the zone that four little substrates 600 do not overlap, and this cutting zone 500 can be used for measuring the measurement zone of liquid crystal pretilt angle.
Said dyestuff side chain 30 is positioned at this cutting zone 500; After accomplishing the light orientation; The cutting zone 500 of TFT substrate 100 or CF substrate 200 is a tilt angle measurement zone shown in Figure 4; And the screen shot area edge 400 of each little substrate 600 is viewing area shown in Figure 4 with edge of display area 102, owing to cutting zone 500 finally is cut, so the performance that dyestuff side chain 30 can not influence liquid crystal is set in cutting zone 500.
Through measuring dyestuff side chain 30 and the angle between the substrate in cutting zone 500; Need a linear polarization plate 40 and a measurement mechanism 50 twice; Calculate angle and the relation between the brightness of incident ray polarized light of the liquid crystal pretilt angle of specification product in advance, concrete measuring method is described below.
As shown in Figure 6, before the ultraviolet light orientation, with the parallel rays of a line Polarizer 40 with incident light L
L ∥Polarized light sees through, with the vertical direction light L of incident light L
⊥Polarized light filters, because the parallel rays L of incident light L
∥ is inclined to one sideShake light perpendicular to the major axis of dyestuff side chain 30, and dye materials carries out trace to light and absorbs, and the most of light that transmits, brightness measuring device for camera 50 record the parallel rays L of most of incident light L
∥The brightness of polarized light.Before the ultraviolet light orientation, the common incident light L of usefulness, rather than ultraviolet light are because ultraviolet light can react to photosensitive side chain 20, and can see through common incident light L polarization with dyestuff side chain 30.
As shown in Figure 7, after the ultraviolet light orientation, dyestuff side chain 30 is not perpendicular to substrate and arranges, but has certain angle with substrate, the parallel rays L of incident light L
∥The major axis of polarized light and dyestuff side chain 30 forms certain angle, and dye materials carries out certain absorption to light, the parallel rays L of incident light L
∥Polarized light brightness decays, and brightness measuring device for camera 50 records the parallel rays of decay back incident light L
L ∥The brightness of polarized light.
For example, can be 88 degree through the tilt angle of off-line measurement device measuring specification product, and the parallel rays L of incident light L after the decay of its corresponding this on-line measurement measurement device
∥The brightness of polarized light is 100 units, and tilt angle is that corresponding 110 units of 89 degree, tilt angle are corresponding 90 units of 87 degree or the like, can set up the parallel rays L of tilt angle and decay back incident light L
∥The relation table of the brightness of polarized light.So, the parallel rays L of incident light L that just can be through the on-line measurement measurement device
∥The corresponding relation of polarized light brightness decay and liquid crystal pretilt angle degree has been known the tilt angle angle of liquid crystal in real time.
Be positioned at the inclination angle of the dyestuff side chain 30 of cutting zone 500 through on-line measurement, thereby know the tilt angle of liquid crystal LC.
It is following that the present invention measures the method step of liquid crystal pretilt angle:
The first step: angle and the relation between the brightness of incident ray polarized light of calculating the liquid crystal pretilt angle of specification product in advance.
Second step: in cutting zone 500, be provided with the dyestuff side chain 30 parallel with photaesthesia side chain 20.
The 3rd step: before the light orientation, see through with the parallel rays polarization of a Polarizer 40 with incident light, the polarization of light of the vertical direction of incident light filters, and brightness measuring device for camera 50 records the parallel rays L of incident light L
∥The brightness of polarized light.
The 4th step: after the light orientation; Dyestuff side chain 30 has certain angle with substrate; The major axis of parallel incident polarized light and dyestuff side chain 30 forms angle, and parallel incident polarization luminance brightness decays, and brightness measuring device for camera 50 records the brightness of the parallel incident polarized light in decay back;
The 5th step: the corresponding relation of the brightness decay through parallel incident polarized light and the liquid crystal pretilt angle degree of specification product draws the tilt angle angle of liquid crystal.
In the said method, alignment film can be arranged on the CF substrate, also can be arranged on the TFT substrate.
The present invention is through being provided with the parallel with it dichroic dye side chain that has perpendicular to the responsive side chain of the ultraviolet light of orientation molecular backbone is other on alignment film; The liquid crystal pretilt angle degree is learnt in the measurement that after carrying out the ultraviolet light orientation, can change according to the brightness to the linearly polarized light through this alignment film; Solved after the present light orientation engineering before become the box engineering to finish can not online detection liquid crystal pretilt angle problem, can carry out online feedback and error correction.
Claims (5)
1. liquid crystal display substrate; Liquid crystal display substrate comprise TFT substrate, CF substrate and be located in the TFT substrate and the CF substrate between liquid crystal; Liquid crystal display substrate has viewing area and the cutting zone that cuts into some little substrates; On CF substrate or TFT substrate, be provided with alignment film; Said alignment film comprises the molecular backbone that is parallel to the CF substrate and perpendicular to the photaesthesia side chain of molecular backbone, it is characterized in that: in cutting zone, be provided with the dyestuff side chain parallel with the photaesthesia side chain, the angle of the angle between said dyestuff side chain and the substrate and the tilt angle of liquid crystal is identical.
2. liquid crystal display substrate according to claim 1 is characterized in that: said dyestuff side chain is the compound of toluenesulfonic acid base or anthraquinonyl or phthalocyanine base.
3. the manufacturing approach of a liquid crystal display substrate; Liquid crystal display substrate is the CF substrate; The CF substrate has viewing area and the cutting zone that cuts into some little substrates, on the CF substrate, is provided with alignment film, and said alignment film comprises the molecular backbone that is parallel to the CF substrate and perpendicular to the photaesthesia side chain of molecular backbone; It is characterized in that, may further comprise the steps:
The first step: the angle of the liquid crystal pretilt angle of calculating specification product and the relation between the brightness of incident ray polarized light;
Second step: in cutting zone, be provided with the dyestuff side chain parallel with the photaesthesia side chain;
The 3rd step: before the ultraviolet light orientation, see through with the parallel rays polarization of a Polarizer with incident light, the polarization of light of the vertical direction of incident light filters, and brightness measuring device for camera records the brightness of the parallel rays polarized light of incident light;
The 4th step: after the ultraviolet light orientation, dyestuff side chain and substrate have angle, and the major axis of parallel incident polarized light and dyestuff side chain forms angle, and parallel incident polarization luminance brightness decays, and brightness measuring device for camera records the brightness of the parallel incident polarized light in decay back;
The 5th step: the corresponding relation of the brightness decay through parallel incident polarized light and the liquid crystal pretilt angle degree of specification product draws the tilt angle angle of liquid crystal.
4. the manufacturing approach of a liquid crystal display substrate; Liquid crystal display substrate is the TFT substrate; The TFT substrate has viewing area and the cutting zone that cuts into some little substrates, on the TFT substrate, is provided with alignment film, and said alignment film comprises the molecular backbone that is parallel to the TFT substrate and perpendicular to the photaesthesia side chain of molecular backbone; It is characterized in that, may further comprise the steps:
The first step: the angle of the liquid crystal pretilt angle of calculating specification product and the relation between the brightness of incident ray polarized light;
Second step: in cutting zone, be provided with the dyestuff side chain parallel with the photaesthesia side chain;
The 3rd step: before the ultraviolet light orientation, see through with the parallel rays polarization of a Polarizer with incident light, the polarization of light of the vertical direction of incident light filters, and brightness measuring device for camera records the brightness of the parallel rays polarized light of incident light;
The 4th step: after the ultraviolet light orientation, dyestuff side chain and substrate have angle, and the major axis of parallel incident polarized light and dyestuff side chain forms angle, and parallel incident polarization luminance brightness decays, and brightness measuring device for camera records the brightness of the parallel incident polarized light in decay back;
The 5th step: the corresponding relation of the brightness decay through parallel incident polarized light and the liquid crystal pretilt angle degree of specification product draws the tilt angle angle of liquid crystal.
5. according to the manufacturing approach of claim 3 or 4 described liquid crystal display substrates, it is characterized in that: said dyestuff side chain is the compound of toluenesulfonic acid base or anthraquinonyl or phthalocyanine base.
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| CN104166254A (en) * | 2014-08-20 | 2014-11-26 | 深圳市华星光电技术有限公司 | Method for measuring box thickness and pre-tilt angle of liquid crystal layers |
| CN104714338A (en) * | 2013-12-16 | 2015-06-17 | 群创光电股份有限公司 | Liquid crystal display panel |
| CN105842889A (en) * | 2016-06-21 | 2016-08-10 | 京东方科技集团股份有限公司 | Detection device and method of optical alignment substrate |
| WO2016148041A1 (en) * | 2015-03-18 | 2016-09-22 | シャープ株式会社 | Liquid crystal display device |
| CN104166254B (en) * | 2014-08-20 | 2016-11-30 | 深圳市华星光电技术有限公司 | Measure the thick method with tilt angle of liquid crystal layer box |
| CN107065238A (en) * | 2017-01-22 | 2017-08-18 | 京东方科技集团股份有限公司 | A kind of alignment film film surface detection means and method |
| WO2020088383A1 (en) * | 2018-10-29 | 2020-05-07 | 京东方科技集团股份有限公司 | Display substrate, method for manufacturing same, and display device |
| CN113467131A (en) * | 2021-06-28 | 2021-10-01 | 北海惠科光电技术有限公司 | Alignment film manufacturing method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104714338A (en) * | 2013-12-16 | 2015-06-17 | 群创光电股份有限公司 | Liquid crystal display panel |
| WO2016026187A1 (en) * | 2014-08-20 | 2016-02-25 | 深圳市华星光电技术有限公司 | Method for measuring box thickness and pre-tilt angle of liquid crystal layer |
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| CN107065238A (en) * | 2017-01-22 | 2017-08-18 | 京东方科技集团股份有限公司 | A kind of alignment film film surface detection means and method |
| CN107065238B (en) * | 2017-01-22 | 2020-07-03 | 京东方科技集团股份有限公司 | Alignment film surface detection device and method |
| WO2020088383A1 (en) * | 2018-10-29 | 2020-05-07 | 京东方科技集团股份有限公司 | Display substrate, method for manufacturing same, and display device |
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| CN113467131A (en) * | 2021-06-28 | 2021-10-01 | 北海惠科光电技术有限公司 | Alignment film manufacturing method |
| CN113467131B (en) * | 2021-06-28 | 2022-05-24 | 北海惠科光电技术有限公司 | Alignment film manufacturing method |
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