CN102782581B

CN102782581B - Lithographic apparatus and device manufacturing method

Info

Publication number: CN102782581B
Application number: CN201180010568.6A
Authority: CN
Inventors: 埃尔温·范茨韦特; 彼得·德亚格尔; 约翰内斯·昂伍李; 埃里克·弗瑞特茨
Original assignee: ASML Netherlands BV
Current assignee: ASML Netherlands BV
Priority date: 2010-02-23
Filing date: 2011-02-18
Publication date: 2015-05-20
Anticipated expiration: 2031-02-18
Also published as: CN102782581A; NL2006255A; WO2011104177A1; TWI505039B; KR20120123706A; TW201142536A; KR101496877B1; JP2013520818A; JP5584786B2

Abstract

The invention relates to a lithographic apparatus with a substrate table constructed to hold a substrate and an optical column (924, 930) capable of creating a pattern on a target portion of the substrate. The apparatus has an actuator (928) to move the optical column or part thereof with respect to the substrate. The movement of the optical column or part thereof through a medium causes a heat load on the optical column or part thereof. The apparatus is constructed or operated to reduce the influence of the heat load on the operation of the apparatus.

Description

Lithographic equipment and device making method

The cross reference of related application

This application claims the rights and interests of the U.S. Provisional Application 61/307,343 in application on February 23rd, 2010, and by reference its full content is incorporated herein.

Technical field

The present invention relates to lithographic equipment, programmable patterning device and device making method.

Background technology

Lithographic equipment is that the pattern of applying expectation is to the machine on substrate or a part of substrate.Lithographic equipment may be used for such as integrated circuit (IC), flat-panel monitor and has in other device of fine-feature or the manufacture of structure.In traditional lithographic equipment, can will be called the circuit pattern of the patterning device of mask or mask for generation of the individual layer corresponding to IC, flat-panel monitor or other device.Can by this design transfer on substrate (such as silicon wafer or glass plate) (part), such as via imaging by described design transfer on the radiation-sensitive materials arranged over the substrate (resist) layer.

Except circuit pattern, patterning device can also for generation of other pattern, the such as matrix of color filter patterns or point.Substitute traditional mask, patterning device can comprise pattern and form array, and this pattern forms array and comprises and produce circuit or other can apply the array of the independent controlled member of pattern.Compared with traditional system based on mask, the advantage of such " maskless " system can arrange more rapidly and/or change pattern, and cost is less.

Therefore, maskless system comprises programmable patterning device (such as spatial light modulator, contrast device etc.).The array of independent controlled member is used to carry out (such as electronics or optically) programming, for the formation of the bundle of the patterning expected to programmable patterning device.The type of programmable patterning device comprises micro reflector array, liquid crystal display (LCD) array, grating light valve array etc.

Summary of the invention

Such as expect to provide a kind of flexibly, the lithographic equipment of low cost, this lithographic equipment comprises programmable patterning device.

In one embodiment, disclose a kind of lithographic equipment, described lithographic equipment comprises modulator and optical projection system, and described modulator is configured to the exposure area of substrate to be exposed by the multiple bundles according to the pattern modulates expected, described optical projection system is configured to modulated bundle to project on substrate.Modulator can move relative to exposure area, and/or optical projection system can have the lens arra for receiving multiple bundle, and described lens arra can move relative to exposure area.

In one embodiment, lithographic equipment such as can be provided with optical column, described optical column can on the target part of substrate pattern generation.Optical column can be provided with: self-emission formula contrast device, is configured to transmitted beam; And optical projection system, be configured to described bundle to project on target part at least partially.Described equipment can be provided with actuator, and described actuator is used for the part relative to substrate mobile optical device row or optical column.By " connection " or " shutoff " self-emission formula contrast device during movement, can on substrate pattern generation.

Such as, expect to provide a kind of lithographic equipment, its to arranged by mobile optical device or optical column a part and heat load in a part for the optical column caused or optical column is more insensitive.

According to one embodiment of present invention, provide a kind of equipment, comprising:

Optical column, is configured to bundle to project on the target part of substrate;

Actuator, for arranging relative to substrate mobile optical device or its part; With

Compensation system, for being reduced by the impact making optical column or the mobile heat load in optical column or its part caused by medium of its part.

According to one embodiment of present invention, provide a kind of device making method, comprise step:

By using optical column to project on substrate by radiation beam, pattern generation on the target part of substrate;

Relative to substrate mobile optical device row or its part, described optical column or its part move and make to cause heat load in described optical column or its part by medium; With

Reduce the impact of described heat load.

Accompanying drawing explanation

Be incorporated herein and form a part for instructions drawings show embodiments of the invention, and in addition make those skilled in the relevant art to carry out and to use the present invention for illustration of principle of the present invention together with described description.In the accompanying drawings, identical reference marker can represent identical or functionally similar element.

Fig. 1 shows the diagrammatic side view of lithographic equipment according to an embodiment of the invention.

Fig. 2 shows the diagrammatic top view of lithographic equipment according to an embodiment of the invention.

Fig. 3 shows the diagrammatic top view of lithographic equipment according to an embodiment of the invention.

Fig. 4 shows the diagrammatic top view of lithographic equipment according to an embodiment of the invention.

Fig. 5 shows the diagrammatic top view of lithographic equipment according to an embodiment of the invention.

Fig. 6 (A)-(D) shows diagrammatic top view and the side view of a part for lithographic equipment according to an embodiment of the invention.

Fig. 7 (A)-(O) shows diagrammatic top view and the side view of a part for lithographic equipment according to an embodiment of the invention.

Fig. 7 (P) shows the power/forward current figure of independent according to an embodiment of the invention addressable element.

Fig. 8 shows the diagrammatic side view of lithographic equipment according to an embodiment of the invention.

Fig. 9 shows the diagrammatic side view of lithographic equipment according to an embodiment of the invention.

Figure 10 shows the diagrammatic side view of lithographic equipment according to an embodiment of the invention.

Figure 11 display is according to an embodiment of the invention for the diagrammatic top view of the array of the independent controlled member of lithographic equipment.

Figure 12 shows use embodiments of the invention by the pattern of design transfer to substrate.

The illustrative arrangement of Figure 13 display optical engine.

Figure 14 (A) and (B) show the diagrammatic side view of a part for lithographic equipment according to an embodiment of the invention.

Figure 15 shows the diagrammatic top view of lithographic equipment according to an embodiment of the invention.

Figure 16 (A) shows the diagrammatic side view of a part for lithographic equipment according to an embodiment of the invention.

Figure 16 (B) display is relative to the illustrated position of the surveyed area of the sensor of substrate.

Figure 17 shows the diagrammatic top view of lithographic equipment according to an embodiment of the invention.

Figure 18 shows the schematic, cross-sectional side view of lithographic equipment according to an embodiment of the invention.

Figure 19 display has the layout of independent controlled member substantially static in X-Y plane and the diagrammatic top view relative to a part for the lithographic equipment of its moveable optical element according to an embodiment of the invention.

Figure 20 shows the schematic three dimensional view of a part for the lithographic equipment in Figure 19.

Figure 21 display has the layout of independent controlled member substantially static in X-Y plane and the diagrammatic side view relative to a part for the lithographic equipment of its moveable optical element according to an embodiment of the invention, and the position of rotation that three that demonstrate the optical element 242 set relative to independent controlled member different.

Figure 22 display has the layout of independent controlled member substantially static in X-Y plane and the diagrammatic side view relative to a part for the lithographic equipment of its moveable optical element according to an embodiment of the invention, and the position of rotation that three that demonstrate the optical element 242 set relative to independent controlled member different.

Figure 23 display has the layout of independent controlled member substantially static in X-Y plane and the diagrammatic side view relative to a part for the lithographic equipment of its moveable optical element according to an embodiment of the invention, and the position of rotation that five that demonstrate the optical element 242 set relative to independent controlled member different.

Figure 24 be presented at the standard laser diode that uses diameter to be 5.6mm for obtain the width crossing substrate whole coverage conditions under the schematic layout of a part of independent controlled member 102.

Figure 25 shows the diagrammatic layout of the details of Figure 24.

Figure 26 display has the layout of independent controlled member substantially static in X-Y plane and the diagrammatic side view relative to a part for the lithographic equipment of its moveable optical element according to an embodiment of the invention.

Figure 27 display has the layout of independent controlled member substantially static in X-Y plane and the diagrammatic side view relative to a part for the lithographic equipment of its moveable optical element according to an embodiment of the invention.

Figure 28 display has the layout of independent controlled member substantially static in X-Y plane and the diagrammatic side view relative to a part for the lithographic equipment of its moveable optical element according to an embodiment of the invention, and the position of rotation that five that demonstrate the optical element 242 set relative to independent controlled member different.

Figure 29 shows the schematic three dimensional view of a part for the lithographic equipment of Figure 28.

Figure 30 schematically shows the layout of 8 lines simultaneously write out by the single removable optical element 242 of setting in Figure 28 and 29.

Figure 31 display, for controlling the illustrative arrangement focused on, wherein has the Mobile house dome-shaped parts (rooftop) in the layout of Figure 28 and 29.

Figure 32 display have according to an embodiment of the invention independent controlled member substantially static in X-Y plane and relative to its moveable optical element, the schematic, cross-sectional side view of lithographic equipment according to an embodiment of the invention.

Figure 33 shows a part for lithographic equipment.

Figure 34 shows the vertical view of the lithographic equipment of Figure 33.

Figure 35 schematically shows a part for the lithographic equipment according to one embodiment of the invention.

Figure 36 schematically shows a part for lithographic equipment according to another embodiment of the present invention.

Figure 37 schematically shows a part for lithographic equipment according to another embodiment of the present invention.

Figure 38 schematically shows a part for lithographic equipment according to another embodiment of the present invention.

Embodiment

Describe the embodiment of maskless lithography apparatus, maskless lithography method, programmable patterning device and miscellaneous equipment, the object of manufacture and the one or more of method herein.In one embodiment, low cost and/or maskless lithography apparatus is flexibly provided.Because it is maskless, therefore do not need traditional mask for exposing such as IC or flat-panel monitor.Similarly, there is no need for one or more ring of package application; Programmable patterning device can provide digital edge process " ring ", for avoiding edge projection for package application.Maskless (digitized map patterning) can use flexible substrate.

In one embodiment, lithographic equipment can be used in the application of super non-critical (super-non-critical).In one embodiment, lithographic equipment can have >=resolution of 0.1 μm, the resolution of the resolution of such as >=0.5 μm or >=1 μm.In one embodiment, lithographic equipment can have the resolution of≤resolution of 20 μm, the resolution of such as≤10 μm or≤5 μm.In one embodiment, lithographic equipment can have ~ the resolution of 0.1-10 μm.In one embodiment, lithographic equipment can have >=overlap of 50nm, the overlap of the overlap of such as >=100nm, the overlap of >=200nm or >=300nm.In one embodiment, lithographic equipment can have≤overlap of 500nm, the overlap of the overlap of such as≤400nm, the overlap of≤300nm or≤200nm.These overlaps and resolution value can have nothing to do with substrate dimension and material.

In one embodiment, lithographic equipment has very high dirigibility.In one embodiment, lithographic equipment easily extensible is to the substrate of different size, type and characteristic.In one embodiment, lithographic equipment has in fact unlimited field size.Therefore, lithographic equipment can with single lithographic equipment or with using multiple lithographic equipments of large public lithographic equipment platform to carry out multiple application (such as, IC, flat-panel monitor, encapsulation etc.).In one embodiment, lithographic equipment allows to produce automated job, for providing flexible manufacture.In one embodiment, lithographic equipment provides 3D integrated.

In one embodiment, lithographic equipment is low cost.In one embodiment, the parts of public existing (off-the-shelf) (such as, emitted radiation diode, simple moveable substrate holder and lens arra) are only used.In one embodiment, pixel-grid imaging is provided for simple projecting optical device and operates.In one embodiment, the substrate holder with single direction of scanning is used to reduce costs and/or reduce complicacy.

Fig. 1 schematically shows lithographic projection apparatus 100 according to an embodiment of the invention.Equipment 100 comprises patterning device 104, object holder 106 (such as object table, such as substrate table) and optical projection system 108.

In one embodiment, patterning device 104 comprises the multiple independent controlled member 102 for chopped radiation, for applying pattern to bundle 110.In one embodiment, the position of multiple independent controlled member 102 can be fixed relative to optical projection system 108.But in alternative layout, multiple independent controlled member 102 can be connected to locating device (not shown), one or more for accurately locating in them according to specific parameter (such as relative to optical projection system 108).

In one embodiment, patterning device 104 is self-emission formula contrast devices.Such patterning device 104 eliminates the requirement to radiating system, and it such as can reduce cost and the size of lithographic equipment.Such as, each independent controlled member 102 is emitted radiation diodes, such as light emitting diode (LED), organic LED (OLED), polymer LED (PLED) or laser diode (such as solid-state laser diode).In one embodiment, each independent controlled member 102 is laser diodes.In one embodiment, each independent controlled member 102 is bluish-violet laser diode (such as Sanyo model no.DL-3146-151).Such diode is supplied by companies such as such as Sanyo, Nichia, Osram and Nitride.In one embodiment, diode emitter has the radiation of the wavelength of about 365nm or about 405nm.In one embodiment, diode can provide the output power selected from the scope of 0.5-100mW.In one embodiment, the size of laser diode (naked pipe core) selects from the scope of 250-600 micron.In one embodiment, laser diode has the emitting area selected from the scope of 1-5 micron.In one embodiment, laser diode has the angle of divergence selected from the scope of 7-44 degree.In one embodiment, patterning device 104 has about 1 × 10 ⁵individual diode, has for providing more than or equaling about 6.4 × 10 ⁸w/ (m ²the configuration (such as emitting area, the angle of divergence, output power etc.) of total brightness .sr).

In one embodiment, self-emission formula contrast device comprise than can not operate at another independent controlled member 102 or can not proper handling allow " redundancy " used independent controlled member 102 required for the more independent addressable element 102 of independent addressable element.In one embodiment, the independent controlled member of redundancy may be advantageously utilised in use such as in the embodiment of the moveable independent controlled member 102 hereafter discussed about Fig. 5.

In one embodiment, the independent controlled member 102 in self-emission formula contrast device is operated in the steeply inclined part of the power/forward current curve of independent controlled member 102 (such as laser diode).This may be effectively and cause less power attenuation/heat.In one embodiment, in use, the light output of each independent controlled member is at least 1mW, such as at least 10mW, at least 25mW, at least 50mW, at least 100mW or at least 200mW.In one embodiment, in use, the light output of each independent controlled member is less than 300mW, is less than 250mW, is less than 200mW, be less than 150mW, be less than 100mW, be less than 50mW, be less than 25mW, or be less than 10mW.In one embodiment, in use each programmable patterning device be less than 10kW for the power attenuation operating independent controlled member, be such as less than 5kW, be less than 1kW, or be less than 0.5kW.In one embodiment, be at least 100W for operating the power attenuation of each programmable patterning device of independent controlled member in use, such as at least 300W, at least 500W, or at least 1kW.

Lithographic equipment 100 comprises object holder 106.In the present embodiment, object holder comprises the object table 106 for keeping substrate 114 (being such as coated with silicon wafer or the glass substrate of resist).Object table 106 can be moveable and be connected to locating device 116, for according to specific parameter accurately position substrate 114.Such as locating device 116 can relative to optical projection system 108 and/or patterning device 104 accurately position substrate 114.In one embodiment, can realize the movement of object table 106 with locating device 116, this locating device 116 comprises the Long travel module (coarse positioning) and optional short stroke module (fine positioning) that do not specifically illustrate in FIG.In one embodiment, described equipment is at least not used for the short stroke module of motive objects object table 106.Similar system can be used to locate independent controlled member 102.Should be appreciated that bundle 110 can alternatively/be additionally moveable, and object table 106 and/or independent controlled member 102 can have fixing position, for the relative movement provided.Such layout can help the size of limiting device.Can such as be used in the embodiment in the manufacture of flat-panel monitor, object table 106 can be static, and locating device 116 is configured to relative to object table 106 (such as thereon) moving substrate 114.Such as, object table 106 can be provided with for the system of the velocity sweeping of substantial constant across the substrate 114 through object table 106.When this is done, object table 106 can be provided with a large amount of openings on smooth uppermost surface, gas be supplied to by described opening, can the air cushion (gas cushion) of support substrates 114 for providing.This is commonly referred to gas bearing and arranges.Use one or more actuator (not shown)s moving substrate 114 in object table 106, described actuator can relative to the path of bundle 110 accurately position substrate 114.Alternately, can by optionally opening and ending the path of gas through opening, relative to object table 106 moving substrate 114.In one embodiment, object holder 106 can be rolling system, and substrate rolls in described rolling system, and locating device 116 can be motor, for rotating rolling system to provide substrate to object table 106.

Optical projection system 108 (such as quartz and/or CaF ₂lens combination or comprise refraction-reflection system or the mirror system of the lens element be made up of such material) may be used for the bundle of the patterning modulated by independent controlled member 102 being projected on the target part 120 (such as one or more tube cores) of substrate 114.The pattern projection imaging that optical projection system 108 can will be provided by multiple independent controlled member 102, makes pattern as one man be formed on substrate 114.Alternately, optical projection system 108 can project the image of secondary source, and the element in multiple independent controlled member 102 is used as the shading piece of secondary source.

In this respect, optical projection system can comprise a concentrating element or multiple concentrating element (being hereafter referred to as lens arra), such as microlens array (being known as MLA) or array of fresnel lenses, such as, make hot spot be imaged onto on substrate 114 for the formation of secondary source.In one embodiment, lens arra (such as MLA) comprises at least 10 concentrating elements, such as at least 100 concentrating elements, at least 1000 concentrating elements, at least 10000 concentrating elements, at least 100000 concentrating elements or at least 1000000 concentrating elements.In one embodiment, the quantity of the independent controlled member in patterning device is equal to or greater than the quantity of the concentrating element in lens arra.In one embodiment, lens arra comprises concentrating element, one or more independent controlled member optical correlation in this concentrating element and independent controlled member array, such as only controlled member optical correlation independent of in independent controlled member array, or with the two or more independent controlled member optical correlation in independent controlled member array, such as 3 or more, 5 or more, 10 or more, 20 or more, 25 or more, 35 or more or the independent controlled member optical correlation of 50 or more; In one embodiment, concentrating element be less than 5000 independent controlled member optical correlations, such as be less than 2500, be less than 1000, be less than 500, or be less than the independent controlled member optical correlation of 100.In one embodiment, lens arra comprises more than one concentrating element (such as more than 1000, great majority or about whole), the one or more independent controlled member optical correlation in itself and independent controlled member array.

In one embodiment, such as, by using one or more actuator, lens arra is at least at arrival substrate with away from the direction of substrate is moveable.Can make to allow such as when focusing adjustment need not be carried out when moving substrate to substrate with away from substrate by mobile lens array.In one embodiment, the separate lenses element (each separate lenses element in such as lens arra) in lens arra at least edge is moveable (focal length such as carrying out local focal adjustment on the substrate of non-flat forms or make each optical column reach identical) to substrate with away from the direction of substrate.

In one embodiment, when the wavelength of such as radiation is more than or equal to about 400nm (such as 405nm), lens arra comprises plastics concentrating element (it can be easy to manufacture (such as by injection-molded) and/or be that cost is low).In one embodiment, the wavelength of radiation is selected from the scope of about 400nm-500nm.In one embodiment, lens arra comprises quartzy concentrating element.In one embodiment, each concentrating element or multiple concentrating element can be asymmetric lens.Asymmetry can be identical for each in multiple concentrating element or asymmetry can be the one or more different concentrating element be different from multiple concentrating element for the one or more concentrating element in multiple concentrating element.Asymmetric lens may be convenient to convert oval radiant output to circular projection spot, and vice versa.

In one embodiment, concentrating element has high-NA (NA), and it to be arranged to radiation in focal position outer projection on substrate, to obtain the low NA for described system.The lens that NA is higher can be more cost effective, popular and/or have quality more better than available low NA lens.In one embodiment, low NA is less than or equal to 0.3, and in one embodiment, low NA is 0.18,0.15 or less.Correspondingly, the lens that NA is higher have the NA larger than the design NA of described system, such as, be greater than 0.3, be greater than 0.18 or be greater than 0.15.

Although optical projection system 108 is separated with patterning device 104 in one embodiment, this not necessarily.Optical projection system 108 can be one with patterning device 108.Such as, lens arra block or plate can connect (one connects) to patterning device 104.In one embodiment, the form of the lenslet that lens arra can become separate space to be separated, each lenslet connects (one connects) to the independent addressable element in patterning device 104, as hereafter more described in detail.

Alternatively, lithographic equipment can comprise radiating system radiation (such as ultraviolet (UV) radiation) being supplied to multiple independent controlled member 102.If patterning device self is radiation source (such as diode laser matrix or LED array), so can design lithographic equipment and there is no radiating system, namely the radiation source not except patterning device self, or be at least the radiating system simplified.

Radiating system comprises irradiation system (irradiator), and described irradiation system is configured for the radiation received from radiation source.Irradiation system comprises one or more element in following element: radiation delivery system (be such as applicable to directional mirror), radiation regulating device (such as beam expander), for setting adjusting gear, integrator and/or the condenser of the angle intensity distributions (usually, can adjust at least described outside and/or the inner radial scope (being generally called σ-outside and σ-inside) of the intensity distributions in the pupil plane of irradiator) of described radiation.Irradiation system may be used for adjusting radiation, and this radiation can be provided to independent controlled member 102, for having homogeneity and the intensity distributions of expectation in its xsect.Irradiation system can be arranged to radiation to be divided into multiple son bundle, described son bundle can one or more in such as each and multiple independent controlled member relevant.Two-dimensional diffraction gratings can such as being divided into son bundle by radiation.In described description, term " bundle of radiation " and " radiation beam " include but not limited to restraint the situation be made up of multiple such radiator bundle.

Radiating system can also comprise radiation source (such as excimer laser), for generation of being supplied to multiple independent controlled member 102 or the radiation by multiple independent controlled member 102.Radiation source and lithographic equipment 100 can be discrete entities, such as, when radiation source is excimer laser.Under such a condition, radiation source can not be considered to the part forming lithographic equipment 100, and radiation is passed to irradiator from source.Under other circumstances, radiation source can be the ingredient of lithographic equipment 100, such as, when source is mercury lamp.Should be appreciated that these two kinds of situations are all designed within the scope of the invention.

In one embodiment, radiation source can be multiple independent controlled members 102, and radiation source can provide wavelength to be at least 5nm in one embodiment, such as at least 10nm, at least 50nm, at least 100nm, at least 150nm, at least 175nm, at least 200nm, at least 250nm, at least 275nm, at least 300nm, at least 325nm, at least radiation of 350nm or at least 360nm.In one embodiment, the wavelength of radiation is 450nm at the most, such as 425nm, at the most 375nm, at the most 360nm, at the most 325nm, at the most 275nm, at the most 250nm, at the most 225nm, at the most 200nm at the most, or 175nm at the most.In one embodiment, the wavelength of radiation comprises 436nm, 405nm, 365nm, 355nm, 248nm, 193nm, 157nm, 126nm, and/or 13.5nm.In one embodiment, radiation comprises the wavelength of about 365nm or about 355nm.In one embodiment, radiation comprises broad band wavelength, such as, comprise 365nm, 405nm and 436nm.355nm lasing light emitter can be used.In one embodiment, the wavelength that radiation has is about 405nm.

In one embodiment, from irradiation system, radiation is directed to patterning device 104 with the angle between the angle between 0 and 90 °, such as 5 and 85 °, between 15 and 75 °, between 25 and 65 ° or between 35 and 55 °.Radiation from irradiation system can be provided directly to patterning device 104.In alternative embodiment, by beam splitter (not shown), radiation can be guided to patterning device 104 from irradiation system, this beam splitter is arranged so that radiation is directed to patterning device 104 by beam splitter reflection at first.Patterning device 104 is modulated described bundle and its reflection is back to beam splitter, and this beam splitter transmits modulated bundle towards substrate 114.But, should be appreciated that alternative layout may be used for radiation being guided to patterning device 104 and guiding to substrate 114 afterwards.Especially, if use transmission-type patterning device 104 (such as LCD array) or patterning device 104 to be self-emission formula (such as multiple diodes), irradiation system so may not be needed to arrange.

In the operation of lithographic equipment 100, when patterning device 104 is not emitted radiation type (such as comprising LED), radiation is incided patterning device 104 (such as multiple independent controlled member) from radiating system (irradiation system and/or radiation source), and is modulated by patterning device 104.After being produced by multiple independent controlled member 102, the bundle 110 of patterning is through optical projection system 108, and bundle 110 focuses on the target part 120 of substrate 114 by this optical projection system 108.

Under the help of locating device 116 (with the position transducer 134 (such as receiving the interferometric measuring means of interfering beams 138, linear encoder or capacitive transducer) alternatively on pedestal 136), can accurately moving substrate 114, such as, to locate different target part 120 in the path of bundle 110.In use, the locating device for multiple independent controlled member 102 may be used for the position accurately correcting multiple independent controlled member 102 relative to the path of bundle 110, such as, in scan period.

Although lithographic equipment 100 is described as the resist on exposed substrate herein according to an embodiment of the invention, should be appreciated that equipment 100 may be used for projection patterning bundle 110, for being used in the photolithography without resist.

As shown here, lithographic equipment 100 is reflection type (such as adopting reflective independent controlled member).Alternately, equipment can be transmission-type (such as adopting transmission-type independence controlled member).

Can described specialized equipment 100 be used in following one or more of patterns, such as:

1. in step mode, independent controlled member 102 and substrate 114 are remained substantially static while, the radiation beam 110 of whole patterning is once projected to (that is, single static exposure) on target part 120.Then moved along X and/or Y-direction by substrate 114, the radiation beam 110 making it possible to different target part 120 is patterned exposes.In step mode, the full-size of exposure field limits the size of the described target part 120 of imaging in single static exposure.

2., in scan pattern, while independent controlled member 102 and substrate 114 are synchronously scanned, the radiation beam 110 of patterning is projected to (that is, single dynamic exposure) on target part 120.Substrate can be determined by (reducing) magnification of described optical projection system PS and image reversal characteristics relative to the speed of independent controlled member and direction.In scan pattern, the full-size of exposure field limits the width (along non-scan direction) of target part described in single dynamic exposure, and the length of described scanning motion determines the height (along described direction of scanning) of described target part.

3. in pulse mode, independent controlled member 102 remains substantially static, and uses (such as by impulse radiation source or to be provided by pulsed modulation independence controlled member) pulse to be projected on the target part 120 of substrate 114 by whole pattern.With the speed moving substrate 114 of substantial constant, make the line sweep that the bundle 110 of patterning carries out through substrate 114.The pattern provided by independent controlled member upgrades as required between the pulses, and pulse is time controlled into the desired location place exposure continuous print target part 120 made on substrate 114.Therefore, the bundle 110 of patterning can cross substrate 114 and scan, and thinks that the band of substrate 114 exposes complete pattern.Repeat described process, until whole substrate 114 is exposed line by line.

4. in continuous sweep pattern, except substrate 114 carried out scanning with the speed of substantial constant by the radiation beam B relative to modulation and pattern on independent controlled member array except the bundle 110 of patterning crosses and to upgrade when substrate 114 carries out scanning and makes it expose, identical with pulse mode in fact.Can use radiation source or the impulse radiation source of substantial constant, it is caught synchronous with the renewal of the pattern on independent controlled member array.

Also combination and/or the variant of above-mentioned using forestland can be adopted, or diverse using forestland.

Fig. 2 display is used for the diagrammatic top view of the lithographic equipment according to an embodiment of the invention used together with wafer (wafer of such as 300mm).As shown in Figure 2, lithographic equipment 100 comprises the substrate table 106 for keeping wafer 114.Locating device 116 is associated with substrate table 106, for moving substrate platform 106 at least X-direction.Alternatively, locating device 116 can moving substrate platform 106 in the Y direction and/or in Z-direction.Locating device 116 can also rotate substrate table 106 around X, Y and/or Z-direction.Therefore, locating device 116 can provide up to the motion to 6 degree of freedom.In one embodiment, substrate table 106 provides only motion in the X direction, and its advantage is that cost is lower and complicacy is lower.In one embodiment, substrate table 106 comprises relay optics.

Lithographic equipment 100 also comprises the multiple independent addressable element 102 be arranged on framework 160.Framework 160 can with substrate table 106 and its locating device 116 mechanical isolation.Such as by framework 160 is connected to ground or the firmly pedestal discrete with the framework being used for substrate table 106 and/or its locating device 116, mechanical isolation can be provided.Additionally or alternatively, damper can be arranged between framework 160 and the described structure be connected with this framework, no matter and whether described structure is ground, firmly pedestal or the framework for support substrates platform 106 and/or its locating device 116.

In the present embodiment, each independent addressable element 102 is emitted radiation diode, such as bluish-violet laser diode.As shown in Figure 2, independent addressable element 102 can be arranged to the array that at least 3 of the independent addressable element 102 extended along the Y direction are discrete.In one embodiment, the array of independent addressable element 102 and the array of adjacent independent addressable element 102 interlock in the X direction.Lithographic equipment 100, especially independent addressable element 102 can be arranged to the pixel-grid imaging provided as more described in detail herein.

Each in the array of independent addressable element 102 can be a part for Individual optical engine components, and for the ease of copying, it can be manufactured into a unit.In addition, framework 160 can be configured to is expandable and can be configured to be easy to the such light engine parts adopting any amount.Light engine parts can comprise the array of independent addressable element 102 and the combination of lens arra 170 (see such as Fig. 8).Such as, 3 light engine parts (below each respective array of independent addressable element 102, there is relevant lens arra 170) are demonstrated in fig. 2.Therefore, in one embodiment, multicolumn optical arrangement can be provided, and each light engine forms a post.

In addition, lithographic equipment 100 comprises alignment sensor 150.The aligning that alignment sensor is used for before the exposure of substrate 114 and/or period is determined between independent addressable element 102 and substrate 114.The result of alignment sensor 150 can be used by the controller in lithographic equipment 100, carrying out position substrate platform 106, improving aligning for such as controlling locating device 116.In addition or alternately, controller such as can control the locating device for locate one or more independent addressable element 102 relevant to independent addressable element 102, improves aligning.In one embodiment, alignment sensor 150 can comprise the pattern recognition functions/software for performing aligning.

In addition or alternately, lithographic equipment 100 comprises horizon sensor 150.Horizon sensor 150 is for determining that whether substrate 106 is level relative to the projection of the pattern from independent addressable element 102.Horizon sensor 150 can before exposed substrate 114 and/or period determine horizontality.The result of horizon sensor 150 can be used by the controller in lithographic equipment 100, such as, control locating device 116 and carry out position substrate platform 106, to improve leveling.In addition or alternately, controller can control such as the element in positioning projection's system 108 (such as lens arra), the locating device that is associated with optical projection system 108 (such as lens arra), improve leveling.In one embodiment, can substrate 106 operate horizon sensor by supersonic beam is projected and/or operate on it by electromagnetic radiation beam being projected on substrate 106.

In one embodiment, the result from alignment sensor and/or horizon sensor may be used for changing the pattern provided by independent addressable element 102.Pattern can be changed and such as be out of shape for correcting, and this distortion may be caused by the irregularity degree etc. of the optical devices (if any) such as between independent addressable element 102 and substrate 114, the scrambling in the location of substrate 114, substrate 114.Therefore, the result from alignment sensor and/or horizon sensor may be used for changing the pattern projected, and realizes nonlinear deformation and corrects.It may be favourable for such as flexible display that nonlinear deformation corrects, and flexible display may not have consistent linear or nonlinear deformation.

In the operation of lithographic equipment 100, such as robotic delivery device (not shown) is used to be loaded on substrate table 106 by substrate 114.Afterwards, substrate 114 is shifted in X direction below framework 160 and independent addressable element 102.Substrate 114 is measured by horizon sensor and/or alignment sensor 150, and uses independent addressable element 102 to make substrate by pattern exposure afterwards.Such as, substrate 114 is scanned through the focal plane (as plane) of optical projection system 108, simultaneously son bundle and therefore figure image patch S (see such as Figure 12) be switched to by patterning device 104 and connect (ON) at least in part or all connect (ON) or turn off (OFF).Feature corresponding to the pattern in patterning device 104 is formed on substrate 114.Independent addressable element 102 can be operated, such as, for providing pixel as described here-grid imaging.

In one embodiment, substrate 114 can be completely scanned in positive X-direction, and is completely scanned in the negative x direction afterwards.In such embodiments, the extra horizon sensor on the opposition side of independent addressable element 102 and/or alignment sensor 150 may be needs for negative X-direction scanning.

Fig. 3 display is used in the diagrammatic top view of Production Example as the lithographic equipment according to an embodiment of the invention of exposed substrate in flat-panel monitor (such as LCD, OLED display etc.).As the lithographic equipment 100 shown in such as Fig. 2, lithographic equipment 100 comprises for keeping the substrate table 106 of flat-panel display substrates 114, at the locating device 116 up to moving substrate platform 106 in 6 degree of freedom, for determining alignment sensor 150 and the horizon sensor 150 of the aligning between independent addressable element 102 and substrate 114, and described horizon sensor 50 is for determining whether substrate 114 is level relative to the projection of the pattern from independent addressable element 102.

Lithographic equipment 100 also comprises the multiple independent addressable element 102 be arranged on framework 160.In this embodiment, each independent addressable element 102 is emitted radiation diode, such as bluish-violet laser diode.As shown in Figure 3, the array of the independent addressable element 102 of the separation that independent addressable element 102 a large amount of (such as at least 8) that are arranged to extend in the Y direction is static.In one embodiment, array is substantially static, and namely they can not move significantly during projecting.In addition, in one embodiment, the array of a large amount of independent addressable element 102 and the array of adjacent independent addressable element 102 interlock in the X direction in alternately mode.Lithographic equipment 100, especially independent addressable element 102, can be arranged to provide pixel-grid imaging.

In the operation of lithographic equipment 100, such as robotic delivery device (not shown) is used flat-panel display substrates 114 to be loaded on substrate table 106.Afterwards, substrate 114 is shifted in X direction below framework 160 and independent addressable element 102.Substrate 114 is measured by horizon sensor and/or alignment sensor 150, and afterwards by using independent addressable element 102 and by pattern exposure.Independent addressable element 102 can be operated, such as, for providing pixel as described here-grid imaging.

Fig. 4 display is used for the diagrammatic top view of the lithographic equipment according to the embodiment of the present invention of roll-to-roll flexible display/electronic installation.As the lithographic equipment 100 shown in Fig. 3, lithographic equipment 100 comprises the multiple independent addressable element 102 be arranged on framework 160.In this embodiment, each independent addressable element 102 is emitted radiation diode, such as bluish-violet laser diode.In addition, lithographic equipment comprises alignment sensor 150 for determining the aligning between independent addressable element 102 and substrate 114 and for determining the horizon sensor 150 of substrate 114 relative to the projection whether level of the pattern from independent addressable element 102.

Lithographic equipment can also comprise the object holder with object table 106, and substrate 114 moves in object table 106.Substrate 114 be flexible and be rolled to be connected to locating device 116 roller on, this locating device 116 can be the motor of live-rollers.In one embodiment, substrate 114 can additionally or alternatively roll from the roller being connected to locating device 116, and this locating device can be the motor of live-rollers.In one embodiment, have at least two rollers, roller is that substrate rolls the roller left, another roller be substrate the roller arrived that rolls.In one embodiment, if such as substrate 114 is enough rigidity between the rolls, so do not need to arrange object table 106.In such circumstances, still will have object holder, such as one or more rollers.In one embodiment, lithographic equipment can provide carrier-free (carrier-less) substrate (such as carrier-free paillon foil (CLF)) and/or roll-to-roll manufacture.In one embodiment, lithographic equipment can provide sheet material to the manufacture of sheet material.

In the operation of lithographic equipment 100, flexible substrate 114 is rolled on roller in X direction and/or rolls below framework 160 and independent addressable element 102 leaves roller.Substrate 114 is measured by horizon sensor and/or alignment sensor 150, and uses independent addressable element 102 to make substrate 114 by pattern exposure afterwards.Independent addressable element 102 can be operated, such as, provide pixel-grid imaging as discussed herein.

Fig. 5 display has the diagrammatic top view of the lithographic equipment according to the embodiment of the present invention of removable independent addressable element 102.As the lithographic equipment 100 shown in Fig. 2, lithographic equipment 100 comprises for keeping the substrate table 106 of substrate 114, at the locating device 116 up to moving substrate platform 106 in 6 degree of freedom, for determining the alignment sensor 150 of the aligning between independent addressable element 102 and substrate 114 and determining substrate 114 whether relative to the horizon sensor 150 of the projection whether level of the pattern from independent addressable element 102.

Lithographic equipment 100 also comprises the multiple independent addressable element 102 be arranged on framework 160.In this embodiment, each independent addressable element 102 is emitted radiation diodes, such as laser diode (such as bluish-violet laser diode).As shown in Figure 5, independent addressable element 102 is arranged to the array 200 of the independent addressable element 102 of a large amount of separation extended along the Y direction.In addition, in one embodiment, the array 200 of a large amount of independent addressable element 102 interlocks with the adjacent array 200 of independent addressable element 102 in an alternating fashion along the X direction.Lithographic equipment 100, especially independent addressable element 102, can be arranged to provide pixel-grid imaging.But in one embodiment, lithographic equipment 100 does not need to provide pixel-grid imaging.More properly, lithographic equipment 100 can with do not formed for project to single pixel on substrate but the mode formed for projecting to the roughly continuous print image on substrate by the tomographic projection of diode to substrate.

In one embodiment, one or more in multiple independent addressable element 102 is moveable between position outside exposure area and exposure area, independent addressable element one or more in exposure area is used for all or part of projection of bundle 110, and independent addressable element one or more in the position outside this exposure area can not project any bundle 110.In one embodiment, one or more independent addressable element 102 is emitted radiation devices, it is switched on (ON) or connects (ON) at least partly in exposure area 204, their (in the light shading region in Fig. 5) emitted radiations i.e., and be turned off (OFF) when being positioned at exposure area 204 outside, i.e. their not emitted radiations.

In one embodiment, one or more independent addressable element 102 is emitted radiation devices, and it can be switched on (ON) in the outside of exposure area 204 and exposure area 204.Under such a condition, if such as radiation does not suitably project in exposure area 204 by one or more independent addressable element 102, so one or more independent addressable element 102 can be switched on for the exposure that affords redress in the outside of exposure area 204.Such as, with reference to figure 5, the one or more independent addressable element 102 in the array relative with exposure area 204 can be switched on (ON), for correcting inefficacy or the unsuitable tomographic projection in exposure area 204.

In one embodiment, exposure area 204 is elongated lines.In one embodiment, exposure area 204 is one-dimensional arraies of one or more independent addressable element 102.In one embodiment, exposure area 204 is two-dimensional arraies of one or more independent addressable element 102.In one embodiment, exposure area 204 is elongated.

In one embodiment, each moveable independent addressable element 102 can move independently, need not together as a unit.

In one embodiment, one or more independent addressable element is moveable, and at least moves along the direction of the direction of propagation transverse to bundle 110 during the projection of bundle 110 in use.Such as, in one embodiment, one or more independent addressable element 102 is emitted radiation devices, and it moves along the direction of the direction of propagation being substantially perpendicular to bundle 110 during the projection of bundle 110.

In one embodiment, each array 200 is can the plate of transverse shift, and this plate has multiple independent addressable element 102 be spatially separated of arranging along plate as shown in Figure 6.In use, each plate is along direction 208 translation.In use, the motion of independent addressable element 102 by suitably timing controlled to be arranged in exposure area 204 (being shown as the dark shadow region of Fig. 6) so that by all or part of bundle 110 projection.Such as, in one embodiment, one or more independent addressable element 102 is emitted radiation devices, independent turning on and off of addressable element 102 is timed control, make one or more independent addressable element 102 they in exposure area 204 time be switched on (ON), be turned off (OFF) when region 204 is outer at them.Such as in Fig. 6 (A), the two-dimensional array of multiple emitted radiation diode 200 is by along direction 208 translation, and two arrays are along positive dirction 208, and one, the centre between two arrays array is along negative direction 208.Connection (ON) or the shutoff (OFF) of emitted radiation diode 102 are timed control, specific emitted radiation diode 102 in every an array 200 is switched on (ON) when they are arranged in exposure area 204, and is turned off (OFF) when region 204 is outer at them.Certainly, when such as array 200 arrives the end of their strokes, array 200 can be advanced in the opposite direction, and namely two arrays are along negative direction 208, and one, the centre between two arrays array is along positive dirction 208.In other example, in Fig. 6 (B), multiple one-dimensional arraies be interweaved of emitted radiation diode 200, along direction 208 translation, replace in positive dirction 208 and in negative direction 208.Connection (ON) or the shutoff (OFF) of emitted radiation diode 102 are timed control, particular transmission radiation-emitting semiconductor diode 102 in every an array 200 is switched on (ON) when they are arranged in exposure area 204, and they be positioned at region 204 outer time be turned off (OFF).Certainly, array 200 can be advanced along contrary direction.In another example, in Fig. 6 (C), the single array (be shown as one-dimensional array, but this not necessarily) of emitted radiation diode 200 is by along direction 208 translation.The connection (ON) of emitted radiation diode 102 or turn off (OFF) and be timed control, make the particular transmission radiation-emitting semiconductor diode 102 of every an array 200 be switched on when they are arranged in exposure area 204 (ON) and they be positioned at region 204 outer time be turned off (OFF).

In one embodiment, every an array 200 is rotatable plates, and this plate has multiple independent addressable element 102 be spatially separated of arranging around plate.In use, each plate rotates around the axis 206 of himself, such as, on the direction shown by arrow in Figure 5.Namely, array 200 can alternately along rotating as Fig. 5 display clockwise and counterclockwise.Alternately, every an array 200 can be rotated in a clockwise direction or rotate in the counterclockwise direction.In one embodiment, array 200 rotates around.In one embodiment, the radian that array 200 rotates is less than a complete circle.In one embodiment, if such as substrate scans along the Z direction, so array 200 can rotate around the axis extended along X or Y-direction.In one embodiment, with reference to figure 6 (D), the independent addressable element 102 in array 200 can be arranged in edge, and along the outside projection of the radial direction towards substrate 114.Substrate 114 can around the extension at least partially of the side of array 200.In this case, array 200 rotates around the axis extended along the X direction, and substrate 114 moves in X direction.

In use, the motion of independent addressable element 102 is used for being positioned in exposure area 204, so that by all or part of projection of bundle 110 by suitably timing controlled.Such as, in one embodiment, one or more independent addressable element 102 is emitted radiation devices, the connection (ON) of independent addressable element 102 or turn off (OFF) and be timed control, make one or more independent addressable element 102 be switched on (ON) when they are arranged in exposure area 204 and they be positioned at region 204 outer time be turned off (OFF).Therefore, in one embodiment, emitted radiation device 102 can during movement all keep connecting, and some emitted radiation device 102 is modulated into shutoff (OFF) in exposure area 204 afterwards.Between emitted radiation device 102 and substrate and being applicable to outside exposure area 204 to cover may be needs, prevent emitted radiation device 102 to be switched on (ON) outside exposure area 204 for covering exposure area 204.Make emitted radiation device 102 as one man connect (ON) can be convenient to during use make emitted radiation device 102 be in substantially consistent temperature.In one embodiment, emitted radiation device 102 can keep turning off (OFF) in the most of the time, and the emitted radiation device 102 one or more when being in exposure area 204 is switched on (ON).

In one embodiment, rotatable plate can have configuration as shown in Figure 7.Such as, in Fig. 7 (A), the diagrammatic top view of rotatable plate is shown.Rotatable plate can have array 200, this array 200 has multiple subarrays 210 (compared with the rotatable plate in Fig. 5, it schematically shows the single array 200 of the independent addressable element 102 of arranging around plate) of the independent addressable element 102 of arranging around plate.In Fig. 7 (A), subarray 210 is shown as interlaced with each other, makes the independent addressable element 102 of a subarray 210 between two independent addressable element 102 of another subarray 210.But the independent addressable element 102 of subarray 210 can be aligned with each other.Independent addressable element 102 can be enclosed independently or together by motor 216 and be rotated about the axis, and in this example, axis extends through motor 216 along the Z-direction in Fig. 7 (A).Motor 216 can be connected to rotatable plate and is connected to framework (such as framework 160) or is connected to framework (such as framework 160) and is connected to rotatable plate.In one embodiment, motor 216 (or such as, being positioned at certain motor of other position) may cause the other movement of independent addressable element 102, no matter be move individually or together.Such as, motor 216 can cause the one or more translation of independent addressable element 102 on X, Y and/or Z-direction.Additionally or alternatively, motor 216 may cause one or more independent addressable element 102 around rotation (that is, the R of X and/or Y-direction _xand/or R _ymotion).

In the embodiment of the rotatable plate schematically shown in as Fig. 7 (B) of vertical view, rotatable plate may have opening 212 in heart region wherein, and the array 200 of independent addressable element 102 is arranged on the plate outside opening 212.Therefore, such as rotatable plate can form the annular disk as shown in Fig. 7 (B), and the array 200 of independent addressable element 102 is arranged around dish.Opening can reduce the weight of rotatable plate, and/or is convenient to cool independent addressable element 102.

In one embodiment, support member 204 can be used to support rotatable plate in outer circumference.Support member 214 can be bearing, such as roller bearing or gas bearing.Rotate (and/or other motion, such as, along translation and/or the R of X, Y and/or Z-direction _xmotion and/or R _ymotion) can be provided by the motor 216 as shown in Fig. 7 (A).Additionally or alternately, support member 214 can comprise and independent addressable element 102 rotated around axis A (and/or provide other to move, such as, along translation and/or the R of X, Y and/or Z-direction _xmotion and/or R _ymotion) motor.

In one embodiment, with reference to figure 7 (D) and 7 (E), the rotatable plate with the array 200 of independent addressable element 102 can be connected to rotary structure 218.Rotary structure 218 can be rotated around axis B by motor 220.In addition, rotatable plate can be rotated relative to rotary structure 218 by motor 216, and motor 216 makes rotatable plate rotate around axis A.In one embodiment, rotation A and B can not overlap, therefore axis being spatially separated as display in Fig. 7 (D) and 7 (E).In one embodiment, rotation A and B is substantially parallel to each other.In use between exposure period, rotary structure 218 and rotatable plate rotate.Rotation can be coordinated, makes independent addressable element 102 can along roughly adjusting to a line in exposure area 204.This can compared with the embodiment of such as Fig. 5, and the independent addressable element 102 wherein in exposure area 204 can not by along roughly adjusting to a line.

When having moveable independent addressable element as described above, when needed can by independent addressable element being moved to the quantity reducing independent addressable element in exposure area 204.Therefore, heat load can be reduced.

In one embodiment, moveable independent addressable element more more than moveable independent addressable element (such as on rotatable plate) required in theory can be provided.The possible advantage of this layout is: maybe can not operate if one or more moveable independent addressable element is broken, and alternatively can use other one or more moveable independent addressable element.Additionally or alternatively, extra moveable independent addressable element can have the advantage of the heat load controlled in independent addressable element, this is because moveable independent addressable element is more, the cooler of the moveable independent addressable element outside exposure area 204 can be larger.

In one embodiment, moveable independent addressable element 102 is embedded into and has in the material of lower thermal conductivity.Such as, material can be ceramic, such as trichroite or based on the pottery of trichroite and/or devitrified glass (Zerodur) pottery.In one embodiment, moveable independent addressable element 102 is embedded in be had in the material of high heat conductance, such as metal, the metal of such as relative lightweight, such as aluminium or titanium.

In one embodiment, array 200 can comprise temperature control layout.Such as, with reference to figure 7 (F), array 200 can have fluid (such as liquid) guiding channel 222, cools array for transmitting near cooling fluid to array 200, transmission cooling fluid to array 200 or transmitting cooling fluid by array 200.Passage 222 can be connected to applicable heat exchanger and pump 228, passes through channel cycle to make fluid.The feedway 224 be connected with between heat exchanger and pump 228 at passage 222 and loop back device 226 can promote that the circulation of fluid and temperature control.Sensor 234 can be arranged in an array, on array or near array, to measure the parameter of array 200, gained measurement result may be used for the temperature controlling the fluid stream provided by heat exchanger and pump.In one embodiment, sensor 234 can measure expansion and/or the contraction of the main body of array 200, and gained measurement result may be used for the temperature controlling the fluid stream provided by heat exchanger and pump.Such expansion and/or contraction can be the representatives of temperature.In one embodiment, sensor 234 can integrated with array 200 (as shown in the sensor 234 of the form become a little) and/or can be discrete (as shown in the sensor 234 becoming box-like formula) with array 200.The sensor 234 discrete with array 200 can be optical sensor.

In one embodiment, with reference to figure 7 (G), array 200 can have one or more heat radiator 230, for increasing the surface area of heat radiation.On the top surface that heat radiator 230 such as can be positioned at array 200 and/or on the side surface of array 200.Alternatively, one or more other heat radiator 232 can be provided for and coordinate with heat radiator 230, so that heat radiation.Such as, heat radiator 232 can absorb heat from heat radiator 230, and fluid (such as liquid) guiding channel can be comprised and be similar to as in Fig. 7 (F) display and about the relevant heat exchanger/pump described by it.

In one embodiment, with reference to figure 7 (H), array 200 can be positioned at fluid confinement structure 236 place or near, this fluid confinement structure 236 is configured to keep the body contact of fluid 238 and array 200 so that dispelled the heat by fluid.In one embodiment, fluid 238 can be liquid, such as water.In one embodiment, fluid confinement structure 236 is provided in the sealing between it and the main body of array 200.In one embodiment, sealing can be such as by contactless sealing that air-flow or capillary force provide.In one embodiment, be similar to as about fluid conducting channels 222 discuss, fluid 238 is recycled to promote heat radiation.Fluid 238 can be provided by fluid supply apparatus 240.

In one embodiment, with reference to figure 7 (H), array 200 can be positioned at fluid supply apparatus 240 place or near, this fluid supply apparatus 240 be configured to towards array 200 main body projection fluid 238 so that dispelled the heat by fluid.In one embodiment, fluid 238 is gas, such as clean dry gas, N ₂, inert gas etc.Although together with fluid confinement structure 236 and fluid supply apparatus 240 are presented in Fig. 7 (H), they need not be set together.

In one embodiment, the main body of array 200 is roughly solid structures, and has such as the chamber of fluid conducting channels 222.In one embodiment, the main body of array 200 is roughly frame-like structure that major part is opened wide, and various parts (such as independent addressable element 102, fluid conducting channels 222 etc.) are connected to this roughly frame-like structure.The structure of this open state is convenient to gas flowing and/or increases surface area.In one embodiment, the main body of array 200 has multiple entering or the roughly solid construction in chamber by described main body, so that gas flowing and/or increase surface area.

Although described above is the embodiment providing cooling, embodiment is alternative or can provide heating in addition.

In one embodiment, between the exposure operating period, array 200 expects the steady temperature remaining on constant.Therefore, such as, all perhaps how independent addressable element 102 in array 200 can be energized to reach the steady temperature or in its vicinity of expectation before exposure, and between exposure period any one or more temperature control layout may be used for cooling and/or heating electrodes 200, to keep steady temperature.In one embodiment, any one or more temperature control layout and may be used for heating electrodes 200 before exposure, to reach the steady temperature or in its vicinity of expectation.Afterwards, between exposure period, any one or more temperature control layout may be used for cooling and/or heating electrodes 200, to keep steady temperature.The measurement result carrying out sensor 234 can use in the mode of feedforward and/or feedback, to keep steady temperature.In one embodiment, each in multiple array 200 can have identical steady temperature, or the one or more array 200 in multiple array 200 can have the steady temperature of other the one or more array 200 be different from multiple array 200.In one embodiment, array 200 is heated to the high temperature of steady temperature than expecting, and afterwards due to any one or more temperature control to arrange the cooling that applies and/or because the use of independent addressable element 102 is not enough to keep the temperature higher than the steady temperature expected between exposure period temperature reduce.

In one embodiment, in order to improve heat control and overall cooling, the quantity of the main body of array 200 by along and/or increase across through exposure area.Therefore, four arrays 200 of such as, in alternate figures 5 display, can arrange the array 200 of 5,6,7,8,9,10 or more.Less array can be set, such as an array 200, such as cover the single large array of whole width of substrate.

In one embodiment, as the lens arra that describes herein and moveable independent addressable element be associated or one.Such as, lens array plate can be connected to each removable array 200, and therefore with independent addressable element 102 be can together with mobile (such as rotatable).As described above, lens array plate can be displaceable relative to independent addressable element 102 (such as along the Z direction).In one embodiment, can arrange multiple lens array plate for array 200, each lens array plate is associated from the different subgroup of multiple independent addressable element 102.

In one embodiment, with reference to figure 7 (I), single discrete lens 242 can be connected to before each independent addressable element 102, and 102 be can with (such as around axis A be rotatable) of independent addressable element movement.In addition, by using actuator 244, lens 242 can be displaceable relative to independent addressable element 102 (such as along the Z direction).In one embodiment, with reference to figure 7 (J), independent addressable element 102 and lens 242 can by actuator 244 relative to array 200 main body 246 together be shifted.In one embodiment, actuator 244 is configured to (namely relative to independent addressable element 102 or together with independent addressable element 102) and only makes lens 242 be shifted along the Z direction.

In one embodiment, actuator 244 is configured to be shifted by lens 242 up to (Z-direction, the rotation around X-direction and/or the rotation around Y-direction) in 3 degree of freedom.In one embodiment, actuator 244 is configured to be shifted by lens 242 up in 6 degree of freedom.When lens 242 are removable relative to its independent addressable element 102, can by actuator 244 mobile lens 242 to change the focal position of lens 242 relative to substrate.When moving together with the independent addressable element 102 of lens 242 and its, the focal position of lens 242 is constants, but is shifted about substrate.In one embodiment, the movement of lens 242 is independently controlled for each lens 242 relevant to each independent addressable element 102 in array 200.In one embodiment, the subgroup of multiple lens 242 moves together relative to the relevant sub-group of their multiple independent addressable element 102, or moves together with them.In the latter case, in order to lower data management expense and/or respond faster, may be sacrifice meticulous focus control for cost.In one embodiment, the size of the radiation spot provided by independent addressable element 102 can be adjusted by out of focus, and namely out of focus is larger, and the size of radiation spot is larger.

In one embodiment, with reference to figure 7 (K), the aperture structure 248 wherein with aperture can be positioned at below lens 242.In one embodiment, aperture structure 248 can be located at above lens 242, and between lens 242 and relevant independent addressable element 102.Aperture structure 248 may limit the diffraction effect of lens 242, relevant independent addressable element 102 and/or the independent addressable element 102 of adjacent lens 242/.

In one embodiment, independent addressable element 102 can be emitted radiation device, such as laser diode.Such emitted radiation device can have high spatial coherence and therefore may demonstrate speckle issue.In order to avoid such speckle issue, the radiation of being launched by emitted radiation device should be upset by mobile a branch of part relative to the phase place of another bundle part.In one embodiment, with reference to figure 7 (L) and 7 (M), plate 250 can be positioned on such as framework 160, and independent addressable element 102 moves relative to plate 250.In independent addressable element 102 relative to plate 250 and when moving on plate 250, plate 250 causes the destruction of the spatial coherence of the radiation of being launched towards substrate by independent addressable element 102.In one embodiment, in independent addressable element 102 relative to plate 250 with when moving on plate 250, plate 250 is between lens 242 and its relevant independent addressable element 102.In one embodiment, plate 250 can between lens 242 and substrate.

In one embodiment, with reference to figure 7 (N), spatial coherence breaking plant 252 can between substrate and at least independent addressable element 102, this independent addressable element 102 by tomographic projection on exposure area.In one embodiment, spatial coherence breaking plant 252 between independent addressable element 102 and lens 242, and can be connected to main body 246.In one embodiment, spatial coherence breaking plant 252 is phase-modulator, oscillating plate or swivel plate.When radiation projects towards substrate by independent addressable element 102, spatial coherence breaking plant 252 makes the spatial coherence destroying the radiation of being launched by independent addressable element 102.

In one embodiment, lens arra (no matter whether being together as a unit or conduct independently lens) (desirably via high thermal conductivity material) is connected to array 200, so that providing in cooling situation advantageously, heat is conducted to array 200 from lens arra.

In one embodiment, array 200 can comprise one or more focusing or horizon sensor 254, as horizon sensor 150.Such as, sensor 254 can be configured to measure the focusing of the multiple independent addressable element 102 of each independent addressable element 102 in array 200 or array 200.Therefore, if the out-of-focus appearance of detecting, so focusing can be corrected for each independent addressable element 102 in array 200 or for the multiple independent addressable element 102 in array 200.Focusing can be passed through (and/or around X-axis line and/or around Y-axis line) mobile lens 242 such as along the Z direction and correct.

In one embodiment, sensor 254 and independent addressable element 102 are one (or can be one with the multiple independent addressable element 102 in array 200).With reference to figure 7 (O), schematically show exemplary sensor 254.Focus detection bundle 256 is altered course, and (such as reflecting), away from substrate surface, through lens 242, and is guided towards detecting device 262 by partially silvered mirror 258.In one embodiment, focus detection bundle 256 can be the radiation for exposing, and this radiation is just altered course from substrate.In one embodiment, focus detection bundle 256 can be the special bundle directed at substrate place, and it becomes bundle 256 when being altered course by substrate.Before bundle 256 strikes on detecting device 262, knife-edge edge 260 (it can be aperture) is arranged in the path of bundle 256.In this example, detecting device 262 comprises at least two radiation-sensitive portion (such as region or detecting device) by separate detection device 262 display in Fig. 7 (O).When substrate is in positive burnt position, form picture rich in detail at edge 260 place, therefore the radiation-sensitive portion of detecting device 262 receives the radiation of equal quantities.When substrate is in out-of-focus appearance, bundle 256 displacement, image will to be formed in before edge 260 or below.Therefore, edge 260 will intercept the specific part of bundle 256, and a radiation-sensitive portion of detecting device 262 will receive another radiation-sensitive portion radiation more in a small amount than detecting device 262.The comparison carrying out the output signal of the radiation-sensitive portion of self-detector 262 make it possible to obtain by the bundle 256 that the alters course amount different from desired position, different with desired position by the bundle 256 that alters course time residing direction and different with desired position by the bundle 256 that alters course time the plane of substrate left.Signal can be electronically processed to provide control signal, such as, can be adjusted lens 242 by this control signal.Catoptron 258, edge 260 and detecting device 262 can be mounted to array 200.In one embodiment, detecting device 262 can be four-quadrant photovoltaic element.

In one embodiment, 400 independent addressable element 102 can be provided, and (at any one time) 133 carries out work.In one embodiment, the independent addressable element 102 of 600-1200 work can be provided with, and there is extra independent addressable element 102 alternatively, such as, be used as reserved and/or for correction exposure (as such as mentioned above).The quantity of the independent addressable element 102 of work such as may depend on resist, and it needs the given dose for the formation of the radiation of pattern.Under independent addressable element 102 is rotatable (as independent addressable element 102) situation, independent addressable element 102 can rotate in the frequency of 6Hz, and has the independent addressable element 102 of 1200 work.If have less independent addressable element 102, then can rotate independent addressable element 102 at higher frequencies; If have more independent addressable element 102, independent addressable element 102 can be rotated with lower frequency.

In one embodiment, compared with the array of independent addressable element 102, moveable independent addressable element 102 can be used to reduce the quantity of independent addressable element 102.Such as, can (at any one time) independent addressable element 102 of providing 600-1200 to work.In addition, the quantity of reduction can produce substantially similar with the array of independent addressable element 102 result, but has one or more advantages.Such as, for the sufficient exposure capability using purplish blue diode array, the array of 100000 purplish blue diodes may be needed, such as, be arranged to 200 diode × 500 diodes.When the frequencies operations with 10kHz, the luminous power of each laser diode will be 0.33mW.The electric power of each laser diode will be 150mW=35mA × 4.1V.Therefore, for described array, electric power will be 15kW.In the embodiment using moveable independent addressable element, can provide 400 purplish blue diodes, wherein 133 are carried out work.When operating under the frequency of 9Mhz, the luminous power of each laser diode will be 250mW.The electric power of each laser diode will be 1000mW=240mA × 4.2V.Therefore, for described array, electric power will be 133W.Therefore, diode in moveable independent addressable element layout can operate in the steep part in the optical output power of such as such as display in Fig. 7 (P) and forward current relation curve (240mA v.35mA), thus create the high-output power (250mW v.0.33mW) of each diode, but there is the low electric power for multiple independent addressable element (133W v.15kW).Therefore, diode more effectively can use and cause power attenuation and/or the heat of reduction.

Therefore, in one embodiment, diode operates in the steep part of power/forward current curve.Carry out operating the incoherentness that may cause radiation in the non-steep part of power/forward current curve.In one embodiment, diode is still less than or equal to 20mW under the luminous power being greater than 5mW, or is less than or equal to 30mW, or operates when being less than or equal to 40mW.In one embodiment, diode does not operate under the luminous power being greater than 300mW.In one embodiment, diode is operated by with single pattern, instead of operates with multi-mode.

The quantity of the independent addressable element 102 on array 200 may depend on, particularly depend on the length of the exposure area that (and as in addition in degree noted above) array 200 will cover, the speed of array movement between exposure period, the size of spot (namely projects to the cross sectional dimensions of the spot substrate from independent addressable element 102, such as width/diameter), whether the intensity of the expectation that each independent addressable element should provide (such as expects that the spot on the substrate above for more than one independent addressable element launches the dosage of expectation, to avoid the infringement to the resist on substrate or substrate), the sweep velocity of the expectation of substrate, cost consideration, independent addressable element can be switched on (ON) or turn off the frequency of (OFF), and the expectation of independent addressable element 102 for redundancy (as previously discussed, such as correction exposure or as reserved, if such as one or more independent addressable element faults).In one embodiment, array 200 comprises at least 100 independent addressable element 102, such as at least 200 independent addressable element, at least 400 independent addressable element, at least 600 independent addressable element, at least 1000 independent addressable element, at least 1500 independent addressable element, at least 2500 independent addressable element, or at least 5000 independent addressable element.In one embodiment, array 200 comprises and is less than 50000 independent addressable element 102, such as be less than 25000 independent addressable element, be less than 15000 independent addressable element, be less than 10000 independent addressable element, be less than 7500 independent addressable element, be less than 5000 independent addressable element, be less than 2500 independent addressable element, be less than 1200 independent addressable element, be less than 600 independent addressable element, or be less than 300 independent addressable element.

In one embodiment, array 200 for every 10cm exposure area length (namely, the quantity of the independent addressable element in array is made to carry out standardization for the exposure area length of 10cm) comprising: at least 100 independent addressable element 102, such as at least 200 independent addressable element, at least 400 independent addressable element, at least 600 independent addressable element, at least 1000 independent addressable element, at least 1500 independent addressable element, at least 2500 independent addressable element, or at least 5000 independent addressable element.In one embodiment, array 200 comprising for every 10cm exposure area length (namely making the quantity of the independent addressable element in array carry out standardization for the exposure area length of 10cm): be less than 50000 independent addressable element 102, such as be less than 25000 independent addressable element, be less than 15000 independent addressable element, be less than 10000 independent addressable element, be less than 7500 independent addressable element, be less than 5000 independent addressable element, be less than 2500 independent addressable element, be less than 1200 independent addressable element, be less than 600 independent addressable element, or be less than 300 independent addressable element.

In one embodiment, array 200 comprises the independent addressable element 102 of the redundancy being less than 75%, and such as 67% or less, 50% or less, about 33% or less, 25% or less, 20% or less, 10% or less, or 5% or less.In one embodiment, array 200 comprises the independent addressable element 102 of the redundancy of at least 5%, and such as at least 10%, at least 25%, at least 33%, at least 50%, or at least 65%.In one embodiment, array comprises the independent addressable element of the redundancy of about 67%.

In one embodiment, the size of the spot of the independent addressable element on substrate is 10 microns or less, 5 microns or less, such as 3 microns or less, 2 microns or less, 1 micron or less, 0.5 micron or less, 0.3 micron or less, or about 0.1 micron.In one embodiment, the size of the spot of the independent addressable element on substrate is 0.1 micron or larger, 0.2 micron or larger, 0.3 micron or larger, 0.5 micron or larger, 0.7 micron or larger, 1 micron or larger, 1.5 microns or larger, 2 microns or larger, or 5 microns or larger.In one embodiment, the size of spot is about 0.1 micron.In one embodiment, the size of spot is about 0.5 micron.In one embodiment, the size of spot is about 1 micron.

When operating lithographic equipment 100, substrate 114 is used such as robotic delivery device (not shown) to be loaded on substrate table 106.Back substrate 114 be shifted along the X direction below framework 160 and independent addressable element 102.Substrate 114 is measured by horizon sensor and/or alignment sensor 150, and uses independent addressable element 102 afterwards by substrate with pattern exposure, as described above.Independent addressable element 102 can be operated, such as, provide pixel as discussed here-grid imaging.

Fig. 8 shows the diagrammatic side view of lithographic equipment according to an embodiment of the invention.As shown in Figure 8, lithographic equipment 100 comprises patterning device 104 and optical projection system 108.Optical projection system 108 comprises two lens 176,172.First lens 176 are arranged to receive the radiation beam 110 through ovennodulation from patterning device 104, and focus on it by the contrast aperture in aperture diaphragm 174.Other lens (not shown) can be arranged in aperture.Radiation beam 110 is dispersed afterwards, and is focused on by the second lens 172 (such as field lens).

Optical projection system 108 also comprises and is arranged to receive through the lens arra 170 of the radiation beam 110 of ovennodulation.The different piece of the radiation beam 110 through ovennodulation corresponding from the one or more independent controlled member in patterning device 104 is through the lens different separately in lens arra 170.The respective part of the radiation beam 110 through ovennodulation focuses on the point that is positioned on substrate 114 by each lens.Like this, the array of radiation spot S (see Figure 12) is exposed on substrate 114.Although should be appreciated that 5 lens only demonstrated in shown lens arra 170, lens arra can comprise hundreds of or thousands of lens (this is equally applicable to be used as the independent controlled member of patterning device 104).

As shown in Figure 8, free operating distance FWD is set between substrate 114 and lens arra 170.This distance allows substrate 114 and/or lens arra 170 to move, thus allows such as convergence correction.In one embodiment, free operating distance in the scope of 1-3mm, such as about 1.4mm.The independent addressable element of patterning device 104 is arranged in pitch P place, and it causes the associated section of the one-tenth image patch at substrate 114 place apart from P.In one embodiment, lens arra 170 can provide the NA of 0.15 or 0.18.In one embodiment, the size becoming image patch is about 1.6 μm.

In this embodiment, optical projection system 108 can be 1: 1 optical projection system, and the array pitch of the figure image patch wherein on substrate 114 is identical with the array pitch of the pixel of patterning device 104.In order to provide the resolution of improvement, figure image patch can much smaller than the pixel of patterning device 104.

Fig. 9 demonstrates the diagrammatic side view of lithographic equipment according to an embodiment of the invention.In this embodiment, except lens arra 170, between patterning device 104 and substrate 114, there is no optical devices.

Lithographic equipment 100 in Fig. 9 comprises patterning device 104 and optical projection system 108.In this case, optical projection system 108 only comprises and is arranged to receive through the lens arra 170 of the radiation beam 110 of ovennodulation.The different piece of the radiation beam 110 corresponding from the one or more independent controlled member in patterning device 104 is through the respective different lens in lens arra 170.The respective part of the radiation beam 110 through ovennodulation focuses on the point that is positioned on substrate 114 by each lens.Like this, the array of radiation spot S (see Figure 12) is exposed on substrate 114.Although should be appreciated that 5 lens only demonstrated in shown lens arra 170, lens arra can comprise hundreds of or thousands of lens (this is equally applicable to be used as the independent controlled member of patterning device 104).

As shown in Figure 8, between substrate 114 and lens arra 170, be provided with free operating distance FWD.This distance allows substrate 114 and/or lens arra 170 to move, to allow such as to carry out convergence correction.The independent addressable element of patterning device 104 is arranged in pitch P place, which results in the associated section of the one-tenth image patch at substrate 114 place apart from P.In one embodiment, lens arra 170 can provide the NA of 0.15.In one embodiment, the size becoming image patch is about 1.6 μm.

Figure 10 shows use about the diagrammatic side view of Fig. 5 at the lithographic equipment according to the embodiment of the present invention of above-described moveable independent addressable element 102.In this embodiment, except lens arra 170, between patterning device 104 and substrate 114, there is no other optical devices.

Lithographic equipment 100 in Figure 10 comprises patterning device 104 and optical projection system 108.In this case, optical projection system 108 only comprises and is arranged to receive through the lens arra 170 of the radiation beam 110 of ovennodulation.The different piece of the radiation beam 110 corresponding from the one or more independent controlled member in patterning device 104 is through the respective different lens in lens arra 170.The respective part of the radiation beam 110 through ovennodulation focuses on the point that is positioned on substrate 114 by each lens.Like this, the array of radiation spot S (see Figure 12) is exposed on substrate 114.Although should be appreciated that 5 lens only demonstrated in shown lens arra 170, lens arra can comprise hundreds of or thousands of lens (this is equally applicable to be used as the independent controlled member of patterning device 104).

Figure 11 shows multiple independent addressable element 102, specifically 6 independent addressable element 102.In this embodiment, each independent addressable element 102 is emitted radiation diode, such as bluish-violet laser diode.Each emitted radiation diode bridge joint two electric wires, to supply an electric current to emitted radiation diode to control diode.Therefore, diode forms addressable grid.Article two, the width between electric wire is about 250 μm, and emitted radiation diode has the pitch of about 500 μm.

How the pattern that Figure 12 schematically shows on substrate 114 can produce.Solid circles represents the array being projected to the spot S on substrate 114 by the lens arra MLA in optical projection system 108.When carrying out a series of exposure on substrate, substrate 114 is moved in the X direction by relative to optical projection system 108.The spot exposure SE be exposed on substrate before empty circles represents.As shown in the figure, the every one spot projected on substrate 114 by the lens arra 170 in optical projection system 108 exposes the spot of a row R on substrate 114.The complete pattern of the summation generation substrate 114 of SE is exposed by the spot of all row R exposed by every one spot S.Such layout is commonly referred to " pixel-grid imaging ".Should be appreciated that Figure 12 is schematic accompanying drawing and spot S in practice may be overlapping.

Visible, the array of radiation spot S is arranged (edge of substrate 114 is positioned at and is parallel to X and Y-direction) by with the angle [alpha] relative to substrate 114.This is done and makes when substrate 114 is moved along direction of scanning (X-direction), and each radiation spot will by the different region of substrate, thus allow whole substrate to be covered by the array of radiation spot S.In one embodiment, angle [alpha] is 20 ° at the most, 10 °, such as at the most 5 °, 3 ° at the most, 1 ° at the most, 0.5 ° at the most, 0.25 ° at the most, 0.10 ° at the most, 0.05 ° at the most, or 0.01 ° at the most.In one embodiment, angle [alpha] is at least 0.0001 °, such as at least 0.001 °.Width and the inclined angle alpha of array is in a scanning direction determined according to array pitch in the direction perpendicular to the scan direction and image spot size, addressed for guaranteeing the whole surface area of substrate 114.

How Figure 13 can expose whole substrate 114 by using multiple light engine in single scanning if schematically showing, each light engine comprises one or more independent addressable element.8 array SA of radiation spot S (not shown) are produced by 8 light engines, these 8 light engines are arranged to two rows R1, R2 on " chessboard plate ", or interconnected, make radiation spot S edge for array slightly overlapping with the edge of the adjacent array of radiation spot S.In one embodiment, light engine is arranged at least 3 rows, such as 4 rows or 5 rows.Like this, radiation belt extends across the width of substrate W, thus the exposure that permission performs whole substrate in single scanning." full duration " once-through exposure like this helps to avoid connection twice or more time by the possible stitching problem of process, and can also reduce machine trace because substrate may not need transverse to substrate by the direction in direction is moved.Should be appreciated that the light engine that can use any applicable quantity.In one embodiment, the quantity of light engine is at least 1, such as at least 2, at least 4, at least 8, at least 10, at least 12, at least 14, or at least 17.In one embodiment, the quantity of light engine is less than 40, such as, be less than 30 or be less than 20.Each light engine can comprise discrete patterning device 104 and optional discrete optical projection system 108 as described above and/or radiating system.But should be appreciated that two or more light engine may to have in one or more radiating systems, patterning device 104 and/or optical projection system 108 at least partially.

In the embodiment described herein, be provided for the controller controlling independent addressable element.Such as, be in the example of emitted radiation device in independent addressable element, controller can control when independent addressable element is switched on (ON) or turns off (OFF), and obtains the high frequency modulated to independent addressable element.Controller can control the power of the radiation of being launched by one or more independent addressable element.Controller can modulate the intensity of the radiation of being launched by one or more independent addressable element.Controller can control/adjust the intensity homogeneity in all or part of the array of independent addressable element.Controller can adjust the radiant output of independent addressable element, to correct image error (such as etendue and optical aberration (such as coma, astigmatism etc.)).

In photolithography, can by optionally by the resist layer on substrate with radiant exposure (such as by with the radiant exposure resist layer of patterning), and on substrate, produce the feature of expectation.Receive the resist region experience chemical reaction of specific MID (" dose threshold value "), and other region remains unchanged.Chemical difference in consequent resist layer allows resist development, and namely selectivity removes the region that receives at least minimum dose or removes the region not receiving minimum dose.As a result, a part of substrate is still protected by resist, and the region removing the substrate of resist is exposed, thus allows such as extra treatment step, and such as selective etch substrate, selective metal deposition etc., produce the feature of expectation thus.The patterning of radiation can be realized by setting independent controlled member in patterning device, the radiation making to be transferred to the resist layer region on the substrate of the feature being positioned at expectation is in sufficiently high intensity, make described region between exposure period, receive the radiation dose being greater than dose threshold value, and other region on substrate receives radiation dose lower than dose threshold value by setting corresponding independent controlled member, to provide zero or radiation intensity lower significantly.

In practice, even if the side that independent controlled member is provided in characteristic boundary provides maximum radiant intensity and provides minimized radiation intensity on another side, zero-dose may can not be changed to sharp from given maximum dose at the radiation dose of the edge of the feature expected.Alternatively, due to diffraction effect, the level of radiation dose may reduce across through zone of transition.Then, after development resist, the position on the border of the final desired character formed is passed through the position that received dosage is reduced to lower than radiation dose threshold value and is determined.Radiation dose can come more accurately to control by setting independent controlled member across the exact position of the distribution declined through zone of transition and characteristic boundary thus, this independent controlled member provide be not only maximum or minimum intensity level and also can be strength level between minimum and maximum strength level be radiated to substrate is positioned on characteristic boundary or near point on.This is commonly referred to " gray level " or " grey level ".

Gray level can provide compared with feasible in a lithography system, to the larger control of the position of characteristic boundary, the radiation intensity being wherein provided to substrate by given independent controlled member only can be configured to two values (being namely only maximal value and minimum value).In one embodiment, at least three different radiation intensity value can be projected on substrate, such as at least 4 radiation intensity value, at least 8 radiation intensity value, at least 16 radiation intensity value, at least 32 radiation intensity value, at least 64 radiation intensity value, at least 100 radiation intensity value, at least 128 radiation intensity value, or at least 256 radiation intensity value.If patterning device self is radiation source (array of such as light emitting diode or laser diode), so gray level can be realized, such as, by controlling the strength level of the radiation be transmitted.If contrast device is micro-mirror device, gray level can be realized, such as, by controlling the angle of inclination of micro-reflector.In addition, by dividing into groups to the multiple programmable elements in contrast device and the quantity of element in described group that controls to be switched on or to turn off in preset time, gray level can be realized.

In one example in which, patterning device can have a series of state, comprising: (a) black state, and the contribution of wherein provided radiation to the intensity distributions of its respective pixel is minimum or is even zero; (b) the whitest state, maximum contribution has been made in wherein provided radiation; (c) the multiple states between aforementioned two states, middle contribution has been made in wherein provided radiation.Described state is divided into normal group and compensating group, and this normal group is used for reasonable beam patterning/printing, and this compensating group is used for the effect of compensating defective element.Normal group comprises black state and first group of intermediateness.This first group will be described as grey states, and they are optional, provide from minimum black value until the ever-increasing contribution of specific normal maximum size to give respective pixel intensity.Compensating group comprises second group of remaining intermediateness and the whitest state.This second group of intermediateness will be described as white state, and they are optionally, to provide the contribution larger than normal maximum size, are constantly increased to the true maximal value corresponding to the whitest state.Although second group of intermediateness is described as white state, be to be understood that: this is only be convenient to normally and between compensation step of exposure distinguishing.Whole multiple state by be alternately described as be at black and white between the sequence of a grey states, selectively can make it possible to carry out gray level printing.

Should be appreciated that gray level may be used for for object extra or alternative mentioned above.Such as, the process of substrate after exposition can be adjusted, and makes to depend on received dose level of radiation, have the region of substrate more than the potential response of two.Such as, the part receiving the substrate of the radiation dose lower than first threshold responds in the first way; Receive and respond in a second manner higher than first threshold but lower than a part for the substrate of the radiation dose of Second Threshold; Respond with Third Way with the part received higher than the substrate of the radiation dose of Second Threshold.Therefore, gray level may be used for the Radiation dose distribution provided on substrate, and it has the dosage level more than the expectation of two.In one embodiment, Radiation dose distribution has at least 2 dosage levels expected, such as at least 3 dose level of radiation expected, at least 4 dose level of radiation expected, at least 6 dose level of radiation expected or at least 8 dose level of radiation expected.

It is also understood that and can control Radiation dose distribution by the method except the intensity of the radiation except only controlling the every bit place reception on substrate, as described above.Such as, alternately or additionally, can control by the duration of the exposure controlling described point the radiation dose that received by the every bit on substrate.As another example, the every bit on substrate can receive the radiation in the exposure of multiple continuous print potentially.Therefore, the radiation dose received by every bit can alternately or additionally control by using the subgroup selected in described multiple continuous exposure to expose described point.

In order to form pattern on substrate, need at every one-phase, independent for each in patterning device controlled member to be set to required state during exposure process.Therefore, the control signal of the state required for expression must be transferred to each independent controlled member.Desirably, lithographic equipment comprises the controller 400 producing control signal.The pattern that substrate is formed can be provided to lithographic equipment with the form (such as GDSII) of vector definition.In order to design information being converted to the control signal of each independent controlled member, controller comprises one or more data operation device, and each is configured to perform treatment step in the data stream representing pattern.Data operation device can be referred to as " data path (datapath) ".

Data operation device in data path can be configured to perform in following function one or more: convert the design information based on vector to bitmap pattern data; Bitmap pattern data are converted to the radiation dose figure (namely required Radiation dose distribution) over the entire substrate of needs; Convert the radiation dose figure of needs to needed for each independent controlled member radiation intensity value; And control signal corresponding to the radiation intensity value of the needs of each independent controlled member convert to.

In one embodiment, control signal can be supplied to independent controlled member 102 and/or one or more other devices (such as sensor) by wire communication or radio communication.In addition, controller 400 can be communicated to from independent controlled member 102 and/or from the signal of one or more other devices (such as sensor).

With reference to Figure 14 (A), in wireless embodiment, transceiver (or being only transmitter) 406 launches the signal comprising the control signal received by transceiver (or being only receiver) 402.By one or more lines 404, control signal is sent to respective independent controlled member 102.In one embodiment, signal from transceiver 406 can comprise multiple control signal, and described signal DeMux can be become multiple control signals of respective independent controlled member 102 and/or one or more other devices (such as sensor) by transceiver 402.In one embodiment, wireless transmission can be undertaken by radio frequency (RF).

With reference to Figure 14 (B), in wired embodiment, controller 400 can be connected to independent controlled member 102 and/or one or more other devices (such as sensor) by one or more lines 404.In one embodiment, single line 404 can be provided, each control signal be sent to the main body of array 200 and/or transmit each control signal from the main body of array 200.At the main body place of array 200, independent controlled member 102 and/or one or more other devices (such as sensor) after control signal, can be provided to individually.Such as, be similar to wireless example, in order on single line, transmission can carry out multipath transmission to control signal, and afterwards in order to be provided to independent controlled member 102 and/or one or more other devices (such as sensor) can carry out DeMux to it.In one embodiment, many lines 404 can be provided, to transmit the respective control signal of independent controlled member 102 and/or one or more other devices (such as sensor).In the rotatable embodiment of array 200, line 404 can be provided along rotation A.In one embodiment, by signal can be provided to the main body of array 200 at motor 216 place or the sliding contact around motor 216, or signal is provided from the main body of array 200.This may be favourable for rotatable embodiment.Sliding contact can be the brush such as by contacting with plate.

In one embodiment, line 404 can be optical line.In this case, signal can be optical signalling, wherein such as can transmit different control signals with different wavelength.

To be similar to the mode of control signal, can by wired or wireless mode by power supply to independent controlled member 102 or one or more other devices (such as sensor).Such as, in wired embodiment, can by one or more line 404 supply power, and be no matter whether identical or different from the line of transmission signal.As mentioned above, sliding contact can be arranged arrange with through-put power.In wireless embodiment, can be coupled transmitted power by RF.

Although discussion before concentrates on the control signal being supplied to independent controlled member 102 and/or one or more other devices (such as sensor), but be to be understood that they also comprise, signal is transferred to controller 400 from independent controlled member 102 and/or one or more other devices (such as sensor) by the configuration additionally or alternately by being applicable to.Therefore, communication can be unidirectional (such as only arrive or from independent controlled member 102 and/or one or more other devices (such as sensor)) or two to (that is, arrive and from independent controlled member 102 and/or one or more other devices (such as sensor)).Such as, multiple signals from independent controlled member 102 and/or one or more other devices (such as sensor) can be carried out multipath transmission to transfer to transceiver 406 by transceiver 402, and now it can be become independently signal by DeMux.

In one embodiment, consider the correct supply of the pattern that may affect on substrate and/or the factor of realization, the control signal that pattern is provided can be changed.Such as, consider the heating to one or more arrays 200, correction can be applied to control signal.Such heating may cause the pointing direction of the change of independent controlled member 102, change etc. from the homogeneity of the radiation of independent controlled member 102.In one embodiment, may be used for changing control signal to the temperature of (such as one or more independent controlled members 102) measurement that array 200 is relevant and/or expansion/contraction from such as sensor 234, otherwise will provide this control signal to form pattern.Therefore, such as, between exposure period, the temperature of independent controlled member 102 may change, and this change causes the change of the pattern projected provided in single stationary temperature.Therefore, consider such change, can control signal be changed.Similarly, in one embodiment, the result from alignment sensor and/or horizon sensor 150 may be used for changing the pattern provided by independent controlled member 102.Can change this pattern to be such as out of shape to correct, this distortion may be caused by the scrambling of location of the optical devices (if any) such as between independent controlled member 102 and substrate 114, substrate 114, the irregularity degree etc. of substrate 114.

In one embodiment, based on the theory of the physics/optical results in the desired pattern caused by measured parameter (temperature such as measured, the distance etc. measured by horizon sensor), the change of control signal can be determined.In one embodiment, based on the test of the physics/optical results in desired pattern caused by measured parameter or empirical model, the change of control signal can be determined.In one embodiment, the change of control signal can be applied with feedforward and/or the mode fed back.

In one embodiment, lithographic equipment can comprise the sensor 500 of the characteristic of measuring radiation, this radiation by or transmit by by one or more independent controlled members 102 towards substrate.Such sensor can be spot sensor or transmitted image sensor.Sensor may be used for the position of the intensity of the radiation such as determined from independent controlled member 102, the homogeneity from the radiation of independent controlled member 102, the cross sectional dimensions from the radiation spot of independent controlled member 102 or area and/or the radiation spot (in X-Y plane) from independent controlled member 102.

Figure 15 shows the diagrammatic top view of lithographic equipment according to an embodiment of the invention, demonstrates some exemplary positions of sensor 500.In one embodiment, one or more sensors 500 is arranged in the substrate table 106 keeping substrate 114 or on substrate table 106.Such as, sensor 500 can be arranged on the leading edge of substrate table 106 and/or the trailing edge of substrate table 106.In this example, demonstrate four sensors 500, for the corresponding sensor of every an array 200.Expect that they are positioned at the position that can not be covered by substrate 116.In alternative or other example, by the lateral edges of sensor setting at substrate table 106, can desirably be arranged on the position that can not be covered by substrate 116.The detection of the pre-exposure of independent controlled member 102 is may be used at the sensor 500 at the leading edge place of substrate table 106.The detection of the post-exposure of independent controlled member 102 is may be used at the sensor 500 at the trailing edge place of substrate table 106.The detection (" operating (on-the-fly) " detects) between exposure period of independent controlled member 102 is may be used at the sensor 500 at the lateral edges place of substrate table 106.

With reference to Figure 16 (A), demonstrate the diagrammatic side view of a part for lithographic equipment according to an embodiment of the invention.In this example, only demonstrate single array 200, and for the sake of clarity eliminate the other parts of lithographic equipment; Sensor described herein can be applied to every an array 200 or some arrays 200.Some other or alternative examples (except the sensor 500 of substrate table 106) of the position of sensor 500 are demonstrated in Figure 16 (A).First example is the sensor 500 on framework 160, and this sensor receives the radiation from independent controlled member 102 by Shu Gaixiang structure 502 (such as reflective catoptron is arranged).In this first example, independent controlled member 102 moves in X-Y plane, and the different independent controlled member therefore in independent controlled member 102 can be configured to provide and is radiated to Shu Gaixiang structure 502.In addition or alternative second example be the sensor 500 on framework 160, this sensor 500 receives the radiation from independent controlled member 102 of the dorsal part (namely with the side providing exposing radiation relative) from independent controlled member 102.In this second example, independent controlled member 102 moves in X-Y plane, and the different independent controlled member therefore in independent controlled member 102 can be configured to provide and is radiated to sensor 500.Although the sensor 500 in second example is presented in the path of the independent controlled member 102 at exposure area 204 place, sensor 500 can be positioned at the position of display sensor 510.In one embodiment, the sensor 500 on framework 160 is positioned at fixing position or can is moveable by such as relevant actuator in addition.Except or alternative pre-exposure sensing and/or post-exposure sensing, the first and second examples above may be used for providing " operating " to sense.3rd example is the sensor 500 in structure 504,506.Structure 504,506 can be moveable by actuator 508.In one embodiment, structure 504 to be positioned at below path that substrate table will move (as Suo Shi Figure 16 (A)) or as described in the side in path.In one embodiment, structure 504 can be the position (if substrate table 106 is not there) at sensor 500 place being moved to the substrate table 106 of display in Figure 16 (A) by actuator 508, if fruit structure 504 is in the side in path, then such movement can be along the Z direction (as Suo Shi Figure 16 (A)) or along X and/or Y-direction.In one embodiment, structure 506 is positioned at substrate table and will moves (as Suo Shi Figure 16 (the A)) top in path at place or the side in path.In one embodiment, structure 506 can move to the position (if substrate table 106 is not there) at sensor 500 place of the substrate table 106 shown by Figure 16 (A) by actuator 508.Structure 506 can be connected to framework 160 and be displaceable relative to framework 160.

In the operation of characteristic of measuring the radiation maybe will transmitted towards substrate transport by one or more independent controlled members 102, by movable sensor 500 and/or the radiation beam moving independent controlled member 102, sensor 500 is made to be arranged in the path of the radiation from independent controlled member 102.Therefore, as an example, can moving substrate platform 106, sensor 500 is positioned in the path from the radiation of the independent controlled member 102 of display in Figure 16 (A).In this case, sensor 500 is positioned in the path of the independent controlled member 102 at exposure area 204 place.In one embodiment, sensor 500 can be positioned at (the independent controlled member 102 of such as side display leftward, if Shu Gaixiang structure 502 is not there) in the path of the independent controlled member 102 outside exposure area 204.If be arranged in radiation path, sensor 500 can detect radiation and the characteristic of measuring radiation.For the ease of sensing, sensor 500 can move relative to independent controlled member 102, and/or independent controlled member 102 can move relative to sensor 500.

As another example, independent controlled member 102 can be moved to a position, make radiation strikes from independent controlled member 102 in Shu Gaixiang structure 502.Shu Gaixiang structure 502 will restraint the sensor 500 guided on framework 160.For the ease of sensing, sensor 500 can move relative to independent controlled member 102, and/or independent controlled member 102 can move relative to sensor 500.In this example, at exposure area 204 external pelivimetry independence controlled member 102.

In one embodiment, sensor 500 can be fixing or movement.If fixing, independent controlled member 102 is desirably moveable relative to fixing sensor 500, so that sensing.Such as, array 200 can move relative to sensor 500 (sensor 500 on such as framework 160) (such as rotating or translation), so that sensed by sensor 500.If sensor 500 is moveable (sensors 500 on such as substrate table 106), then independent controlled member 102 can be held in static, for sensing, or be moved in addition such as to accelerate sensing.

Sensor 500 may be used for calibrating one or more independent controlled members 102.Such as, the position of the spot of independent controlled member 102 can be detected before exposure by sensor 500, and correspondingly system is calibrated.Afterwards can based on this desired location adjustment exposure of spot (such as control the position of substrate 114, control the position of independent controlled member 102, control the shutoff (OFF) of independent controlled member 102 or connect (ON) etc.).In addition, can calibrate subsequently.Such as, can after exposition, another exposure before, use the sensor 500 on the trailing edge of such as substrate table 106 to calibrate immediately.Calibration can before each exposure, carry out in situation after the exposure of specific quantity etc.In addition, the position of the spot detecting independent controlled member 102 that can " be in operation " by use sensor 500, and correspondingly adjust exposure.Perhaps, independent controlled member 102 can be calibrated based on " being in operation " sensing again.

In one embodiment, one or more independent controlled members 102 can be encoded can detect which independent controlled member 102 to be positioned at specific position or to be used.In one embodiment, independent controlled member 102 can have mark, and sensor 510 may be used for detecting mark, and this mark can be RFID, bar code etc.Such as, each in multiple independent controlled member 102 can be moved near sensor 510, to read mark.When know which independent controlled member 102 near sensor 510, can know which independent controlled member 102 is near sensor 500, and which independent controlled member 102 is medium in exposure area 204.In one embodiment, each independent controlled member 102 may be used for providing the radiation with different frequency, and sensor 500,510 may be used for detecting which independent controlled member 102 near sensor 500,510.Such as, each in multiple independent controlled member 102 can be moved near sensor 500,510, to receive the radiation from independent controlled member 102, and sensor 500,510 can radiation received by DeMux afterwards, to determine which independent controlled member 102 at special time near sensor 500,510.When knowing above-mentioned situation, can know which independent controlled member 102 is near sensor 500, and it is medium which independent controlled member 102 is positioned at exposure area 204.

In one embodiment, as described above, position transducer can be provided to determine that one or more independent controlled members 102 is up to the position in 6 degree of freedom.Such as, sensor 510 may be used for position detection.In one embodiment, sensor 510 can comprise interferometer.In one embodiment, sensor 510 can comprise scrambler, and this scrambler may be used for the scrambler grating detecting one or more one-dimensional coding device gratings and/or one or more two dimensions.

In one embodiment, sensor 520 can be provided for determining the characteristic of the radiation transferring to substrate.In this embodiment, the radiation altered course by substrate caught by sensor 520.In the use of example, by the position (such as from the dislocation of the spot of the radiation of independent controlled member 102) that be may be used for the spot being convenient to the radiation determined from independent controlled member 102 by the radiation altered course that sensor 520 is caught.Particularly, sensor 520 can be caught from the part be just exposed of substrate by the radiation altered course, i.e. sub-image.To the measurement of the intensity of the radiation that this afterbody alters course, the instruction whether spot is properly aimed can be provided.Such as, the signal of repetition can be provided to the duplicate measurements of this afterbody, from the dislocation (such as, the signal of out-phase may represent misalignment) departed from showing spot of the signal of this repetition.Figure 16 (B) shows the illustrated position of surveyed area relative to the exposure area 522 of substrate 114 of sensor 520.In this embodiment, demonstrate 3 surveyed areas, its result can be compared and/or be combined so that identify dislocation.Only need use surveyed area, such as, leftward on side one.In one embodiment, the detecting device 262 of independent controlled member 102 can be used in the mode similar with sensor 520.Such as, the one or more independent controlled member 102 outside the exposure area 204 of array 200 on the right-hand side may be used for detecting from the sub-image substrate by the radiation altered course.

Figure 17 shows an embodiment of lithographic equipment.In this embodiment, multiple independent controlled member 102 guides radiation towards rotatable polygonal element 600.Radiation alters course towards lens arra 170 to the surface 604 of the polygonal element 600 on it by radiation strikes.Lens arra 170 guides radiation towards substrate 114.Between exposure period, polygonal element 600 rotates around axis 602, thus makes to move across through lens arra 170 along the Y direction from the respective bundle of each in multiple independent controlled member 102.Particularly, when each new facet and the radiation strikes of polygonal element 600, bundle will along positive Y-direction across repeating scanning through lens arra 170.Between exposure period, independent controlled member 102 is modulated, to provide the pattern as expectation discussed herein.Polygonal element can have the limit be applicable to of any amount.In addition, independent controlled member 102 is modulated, on the lens that respective bundle is struck in lens arra 170 by with the polygon 600 rotated in sequential.In one embodiment, multiple independent controlled member 102 in addition can be arranged on the opposition side of polygonal element, namely on the right-hand side, to make radiation strikes on the surface 606 of polygonal element 600.

In one embodiment, the optical element of vibration can be used to substitute polygonal element 600.The optical element of vibration has specific fixed angle relative to lens arra 170, and can translation back and forth along the Y direction, scans back and forth along the Y direction to make bundle across through lens arra 170.In one embodiment, can use to rotate back and forth around axis 602 and substitute polygonal element 600 by the optical element of a radian.By rotating back and forth optical element by a radian, bundle is scanned along the Y direction back and forth across through lens arra 170.In one embodiment, the optical element of polygonal element 600, vibration and/or the optical element of rotation have one or more mirror surface.In one embodiment, the optical element of polygonal element 600, vibration and/or the optical element of rotation comprise prism.In one embodiment, acousto-optic modulator can be used to substitute polygonal element 600.Acousto-optic modulator may be used for across through lens arra 170 scanning beam.In one embodiment, lens arra 170 can be placed in the radiation path between multiple independent controlled member 102 and polygonal element 600, the optical element vibrated, the optical element of rotation and/or acousto-optic modulator.

Therefore, usually, be divided into exposure area width these radiant outputs width compared with, the width of exposure area (such as substrate) can be covered with less radiant output.In one embodiment, this can comprise relative to exposure area to move radiation electron gun or to move radiation beam relative to exposure area.

Figure 18 display, according to the schematic, cross-sectional side view of the lithographic equipment of the embodiment of the present invention, has moveable independent controlled member 102.Lithographic equipment 100 is as shown in Figure 5 the same, and lithographic equipment 100 comprises the substrate table 106 for keeping substrate, and at the locating device 116 up to moving substrate platform 106 in 6 degree of freedom.

Lithographic equipment 100 also comprises the multiple independent controlled member 102 be arranged on framework 160.In this embodiment, each independent controlled member 102 is emitted radiation diode, such as laser diode, such as bluish-violet laser diode.Independent controlled member 102 is arranged to the array 200 of the independent controlled member 102 extended along the Y direction.Although demonstrate an array 200, lithographic equipment can have the multiple arrays 200 such as shown in Figure 5.

In this embodiment, array 200 is rotatable plates, has the multiple spatially discrete independent controlled members 102 arranged around plate.In use, plate rotates around the axis 206 of himself, such as, along the direction shown by the arrow in Fig. 5.Use motor 216 that the plate of array 200 is rotated around axis 206.In addition, the plate of array 200 can be moved along the Z direction by motor 216, and independent controlled member 102 can be shifted relative to substrate table 106.

In this embodiment, array 200 can have one or more heat radiator 230, to increase cooling surface area.Heat radiator 230 can such as on the top surface of array 200.Alternatively, one or more other heat radiator 232 can be provided, to coordinate so that dispel the heat with heat radiator 230.Such as, heat radiator 232 can absorb heat from heat radiator 230, and fluid (such as liquid) guiding channel can be comprised and be similar in Fig. 7 (F) display and the relevant heat exchanger/pump described relative to it.

In this embodiment, lens 242 can be positioned at before each independent controlled member 102, and can move (such as around axis A be rotatable) together with independent controlled member 102.In figure 18, demonstrate two lens 242 and be connected to array 200.In addition, lens 242 can be displaceable relative to independent controlled member 102 (such as along the Z direction).

In this embodiment, the aperture structure 248 wherein with aperture can above lens 242, between lens 242 and relevant independent controlled member 102.Aperture structure 248 can limit lens 242, the relevant diffraction effect of independent controlled member 102 and/or the diffraction effect of the independent controlled member 102 of adjacent lens 242/.

In this embodiment, sensor 254 can be provided with independent addressable element 102 (or the multiple independent addressable element 102 in array 200).In this embodiment, sensor 254 is arranged for detecting focusing.Focus detection bundle 256 is altered course (such as reflecting) away from substrate surface, through lens 242, and is guided towards detecting device 262 by by such as partially silvered mirror 258.In one embodiment, focus detection bundle 256 can be the radiation for exposing, and this radiation is just altered course from substrate.In one embodiment, focus detection bundle 256 can be the special bundle directed at substrate place, and it becomes bundle 256 when being altered course by substrate.About Fig. 7 (O), described above is exemplary focus sensor.Catoptron 258 and detecting device 262 can be mounted to array 200.

In this embodiment, control signal can be supplied to independent controlled member 102 and/or one or more other devices (such as sensor) by wire communication or radio communication.In addition, controller can be communicated to from independent controlled member 102 and/or from the signal of one or more other devices (such as sensor).In figure 18, line 404 can be set along rotation 206.In one embodiment, line 404 can be optical line.In described situation, described signal can be optical signalling, wherein such as transmits different control signals with different wavelength.To be similar to the mode of control signal, can by wired or wireless mode by power supply extremely independent controlled member 102 or one or more other devices (such as sensor).Such as in wired embodiment, can by one or more line 404 supply powers, and be identical or different regardless of it from the line of transmission signal.In wireless embodiment, can by the RF coupling transmitted power as shown at mark 700 place.

In this embodiment, lithographic equipment can comprise the sensor 500 of the characteristic of measuring radiation, this radiation by or transmit by by one or more independent controlled members 102 towards substrate.Such sensor can be spot sensor or transmitted image sensor.Sensor may be used for the intensity of the radiation such as determined from independent controlled member 102, the homogeneity from the radiation of independent controlled member 102, the cross sectional dimensions from the radiation spot of independent controlled member 102 or area and/or the position (in X-Y plane) from the radiation spot of independent controlled member 102.In this embodiment, sensor 500 on framework 160, and can adjacent substrate platform 106 or by substrate table 106 addressable.

In one embodiment, not have moveable independent controlled member 102 in X-Y plane, independent controlled member 102 is roughly static between the exposure period of substrate in X-Y plane.Needless to say, controlled member 102 may be immovable in X-Y plane.Such as, they can be moveable in X-Y plane, to correct their position.The possible advantage with substantially static controlled member 102 be relatively easily by power and/or data batchmove to controlled member 102.In addition or alternative possible advantage be local directed complete set focus on be improved with the ability compensating the difference in height on substrate, wherein said difference in height is greater than the depth of focus of system and is in the spatial frequency higher than the pitch of mobile controlled member.

In this embodiment, although controlled member 102 is substantially static, there is at least one optical element relative to the movement of independent controlled member 102.Following describes independent controlled member 102 substantially static in X-Y plane various layout and relative to its moveable optical element.

In the following description, term " lens " should be usually understood as and comprise, can represent when situation allows, the combination of any one or its of various types of optics, comprise refraction type, reflective, magnetic, electromagnetic type and electrostatic optics, such as arbitrary refraction type, reflective and/or diffractive optical element, it provides the function identical with mentioned lens.Such as, imaging len can be specially the form that the form of traditional refraction type lens with focal power, the form becoming to have the Schwarzschild reflect system of focal power and/or one-tenth have the zone plate of focal power.In addition, if the effect produced is the bundle producing convergence on substrate, then imaging len can comprise the optical devices of non-imaged.

In addition, in the following description, reference is made to multiple independent controlled member 102, the catoptron in such as reflection mirror array modulator or multiple radiation source.But, should be appreciated that description typically refers to the modulator being arranged to export multiple bundle more.Such as, modulator can be acousto-optic modulator, to export multiple bundle from the bundle provided by radiation source.

Figure 19 display is substantially static multiple independent controlled member 102 (such as laser diode) according to having in X-Y plane of the embodiment of the present invention and is the diagrammatic top view layout of a part of the lithographic equipment of moveable optical element 242 relative to it.In this embodiment, multiple independent controlled member 102 can be connected to framework, and be substantially static in X-Y plane, multiple imaging len 242 relative to these independent controlled members 102 substantially move in X-Y plane (as in Figure 19 by wheel 801 rotation indicate as shown in), substrate moves along direction 803.In one embodiment, imaging len 242 rotates about the axis by enclosing and moves relative to independent controlled member 102.In one embodiment, imaging len 242 to be installed in the structure that rotates around axis (direction such as shown in Figure 19) and to be arranged (as partly shown in Figure 19) by the mode with circle.

Each independent controlled member 102 provides collimated beam to the imaging len 242 of movement.In one embodiment, independent controlled member 102 is relevant to one or more collimation lenses, to provide collimated beam.In one embodiment, collimation lens is substantially static and is connected to independent controlled member 102 and connects on the framework at place in X-Y plane.

In this embodiment, the cross-sectional width of collimated beam is less than the cross-sectional width of imaging len 242.Therefore, just dropped into completely in the optical transmission part of imaging len 242 at collimated beam, independent controlled member 102 (such as laser diode) just can be switched on.Afterwards when restrainting outside the optical transmission part dropping into imaging len 242, then turn off independent controlled member 102 (such as laser diode).Therefore, in one embodiment, the bundle from independent controlled member 102 passes single imaging len 242 at any one time.Imaging len 242 creates relevant imaging line 800 relative to cross (traversal) that formed of the bundle from independent controlled member 102 by each the independent controlled member 102 be switched on substrate.Other the independent controlled member 102 in obvious Figure 19 in Figure 19, demonstrates three imaging line 800 about each in the exemplary independent controlled member 102 of three in Figure 19, although can produce relevant imaging line 800 on substrate.

In the layout of Figure 19, the pitch of imaging len 242 can be 1.5mm, and the cross-sectional width (such as diameter) from the bundle of each independent controlled member 102 is slightly less than 0.5mm.For this configuration, can write with each independent controlled member 102 line that length is about 1mm.Therefore, be 0.5mm and the diameter of imaging len 242 is that in this configuration of 1.5mm, dutycycle can up to 67% at beam diameter.Suitably locate independent controlled member 102 for relative to imaging len 242, all standing across the width through substrate is feasible.Therefore, if such as only use the laser diode of standard 5.6mm diameter, several concentric rings of laser diode so as shown in figure 19 may be used for obtaining the whole coverings across the width through substrate.Therefore, in this embodiment, the independent controlled member 102 (such as laser diode) than only using the fixing array of independent controlled member 102 that the situation of the independent controlled member 102 of movement described herein maybe may be used less can be used.

In this embodiment, each imaging len 242 should be identical, this is because the imaging len 242 by all movements is carried out imaging by each independent controlled member 102.In this embodiment, all imaging lens 242 do not need to make an imaging, although need to have the lens of higher NA, such as, are greater than 0.3, are greater than 0.18 or be greater than 0.15.For the optical devices of so single element, it similarly is possible that diffraction-limited is made.

No matter where collimated beam enters lens for the focus point of the bundle on substrate, is all fixed to the optical axis (such as, see, Figure 20, its display is the schematic three dimensional view of a part for the lithographic equipment of Figure 19) of imaging len 242.The shortcoming of this layout is not the heart far away from imaging len 242 towards the bundle of substrate, and therefore focusing error can occur, thus may cause aliasing error.

In this embodiment, the element adjustment by being used in (such as at independent controlled member 102 place) of not movement in X-Y plane focuses on and may cause halation.Therefore, the focusing adjustment expected should occur in the imaging len 242 of movement.Therefore this may need the actuator of imaging len 242 higher frequency than movement.

Figure 21 display has the diagrammatic side view layout of independent controlled member substantially static in X-Y plane and the part relative to the lithographic equipment of its moveable optical element according to an embodiment of the invention, and the position of rotation that display is different relative to three of imaging len 242 groups of independent controlled member.In this embodiment, the lithographic equipment in Figure 19 and 20 is expanded by having imaging len 242, and this imaging len 242 comprises two lens 802,804 for receiving the collimated beam from independent controlled member 102.As shown in Figure 19, imaging len 242 moves (such as around arranging that the axis corresponding to imaging len 242 rotates at least in part in a circular manner) relative to independent controlled member 102 in X-Y plane.In this embodiment, before arrival imaging len 242, scioptics 806 make to collimate from the bundle of independent controlled member 102, but do not need in one embodiment to provide such lens.Lens 806 are static substantially in X-Y plane.Substrate moves along the X direction.

Two lens 802,804 be arranged in collimated beam from the light path of independent controlled member 102 to substrate, be the heart far away to make Shu Chaoxiang substrate.Lens 802 between independent controlled member 102 and lens 804 comprise two lens 802A, the 802B with roughly equal focal length.From the collimated beam of independent controlled member 102 at two lens 802A, focus between 802B, make lens 802B will collimate described bundle towards imaging len 804.Imaging len 804 makes bundle be imaged onto on substrate.

In this embodiment, lens 802 are mobile with specific speed (such as specific revolution (RPM) per minute) in X-Y plane relative to independent controlled member 102.Therefore, in this embodiment, if the imaging len of movement 804 moves with the speed identical with lens 802, the collimated beam from the outgoing of lens 802 will have the speed of the imaging len 804 doubling movement in X-Y plane.Therefore, in this embodiment, imaging len 804 moves with the speed of the speed being different from lens 802 relative to independent controlled member 102.Especially, imaging len 804 moves in X-Y plane with the speed of the twice of the speed of lens 802 (such as the twice of the RPM of lens 802), makes bundle telecentrically to be focused on substrate.Show schematically show from the collimated beam of the outgoing of lens 802 and aiming at of imaging len 804 in three of Figure 21 exemplary positions.In addition, because the actual inscription on substrate completes with the speed of the twice of described speed compared with the example in Figure 19, so the power of independent controlled member 102 should be twice.

In this embodiment, focused on by (such as independent controlled member 102 place) the element adjustment being used in X-Y plane not movement, the heart far away may be caused to lose and cause halation.Therefore, the focusing adjustment expected should be there is in the imaging len 242 of movement.

In addition, in this embodiment, all imaging lens 242 do not need to make an imaging.For the optical devices of such discrete component, the imaging of diffraction restriction is possible.The dutycycle of about 65% is possible.In one embodiment, lens 806,802A, 802B and 804 can comprise 2 non-spherical lenses and 2 spherical lenses.

In one embodiment, about 380 independent controlled members 102 (such as standard laser diode) can be used.In one embodiment, the group of about 1400 imaging lens 242 can be used.In the embodiment using standard laser diode, can use the group of about 4200 imaging lens 242, it can be arranged to 6 concentric rings of taking turns.In one embodiment, the wheel of the rotation of imaging len will rotate with about 12000RPM.

Figure 22 display has the diagrammatic side view layout of independent controlled member substantially static in X-Y plane and the part relative to the lithographic equipment of its moveable optical element according to an embodiment of the invention, and the position of rotation that display is different relative to three of group of the imaging len 242 of independent controlled member.In this embodiment, in order to avoid with from such as about the different speed mobile lens that Figure 21 describes, can use as illustrated in figure 22 the so-called 4f heart far away for mobile imaging lens 242 enter/heart far away goes out the imaging system of (telecentric in/telecentric out).The imaging len 242 of movement comprises two imaging lens 808,810, these two imaging lens 808,810 move (be such as centered around and arrange that the axis on imaging len 242 edges rotates at least in part in a circular manner) with roughly the same speed in X-Y plane, and receive heart Shu Zuowei far away input and export telecentric imaging bundle to substrate.In the layout of 1 x magnification, the image on substrate with the speed of imaging len 242 twice with movement equally fast mobile.Substrate moves along the X direction.In this layout, optical devices may need with relatively large NA (be such as greater than 0.3, be greater than 0.18 or be greater than 0.15) make an imaging.This layout may not have two unit piece optical devices.The element of six with alignment tolerance very accurately or more may be needed, to obtain diffraction limited images.The dutycycle of about 65% is possible.In this embodiment, also with not moving together with moveable imaging len 242 or coordinating the elements relative of moveable imaging len 242 movement easily to carry out local focal.

Figure 23 display has the diagrammatic side view layout of independent controlled member substantially static in X-Y plane and the part relative to the lithographic equipment of its moveable optical element according to an embodiment of the invention, and the position of rotation that display is different relative to five of group of the imaging len 242 of independent controlled member.In this embodiment, in order to avoid with the not identical speed mobile lens described by Figure 21, and there are the optical devices to field imaging do not made as pointed by about Figure 22, the combination of lens substantially static in X-Y plane is combined with the imaging len 242 of movement.With reference to Figure 23, be provided with independent controlled member 102 substantially static in X-Y plane.Providing optional collimation lens 806 substantially static in X-Y plane, for collimating the bundle from independent controlled member 102, and providing collimated beam (having the cross-sectional width (such as diameter) of such as 0.5mm) to lens 812.

In addition, lens 812 are substantially static and collimated beam are focused to the field lens 814 (having the cross-sectional width (such as diameter) of such as 1.5mm) of the imaging len 242 of movement in X-Y plane.Lens 814 have relatively large focal length (such as f=20mm).

The field lens 814 of moveable imaging len 242 moves (be such as centered around and arrange that the axis on imaging len 242 edges rotates at least in part in a circular manner) relative to independent controlled member 102.Field lens 814 guides bundle towards the imaging len 818 of moveable imaging len 242.As field lens 814, imaging len 818 moves (be such as centered around and arrange that the axis on imaging len 242 edges rotates at least in part in a circular manner) relative to independent controlled member 102.In this embodiment, field lens 814 moves with the speed roughly the same with imaging len 818.A pair field lens 814 and imaging len 818 aligned with each other.Substrate moves along the X direction.

Is lens 816 between field lens 814 and imaging len 818.Lens 816 are substantially static in X-Y plane, and the bundle from field lens 814 is collimated to imaging len 818.Lens 816 have relatively large focal length (such as, f=20mm).

In this embodiment, field lens 814 optical axis should with the optical axis coincidence of corresponding imaging len 816.Field lens 814 is designed so that described bundle to fold, thus the principal ray of bundle collimated by lens 816 and the optical axis coincidence of imaging len 818.Like this, the bundle towards substrate is the heart far away.

Due to large f number, lens 812 and 816 can be simple spherical lenses.Field lens 814 can not affect image quality, and can also be aspherical elements.In this embodiment, collimation lens 806 and imaging len 818 do not need the lens to field imaging.For the optical devices of this discrete component, it similarly is possible that diffraction-limited is made.The dutycycle of about 65% is fine.

In one embodiment, under moveable imaging len 242 is rotatable situations, provide at least two concentric rings of independent controlled member 102 and lens, to obtain across the whole coverings through substrate width.In one embodiment, the independent controlled member 102 on these rings is arranged to the pitch place being in 1.5mm.If use and there is the standard laser diode that diameter is 5.6mm, so at least 6 concentric rings may be needed for all covering.The layout of the concentric ring of the independent controlled member 102 that Figure 24 and 25 display is arranged according to these.In one embodiment, this will cause the lens of about 380 independent controlled members 102 and correspondence substantially static in X-Y plane.The imaging len 242 of movement will have 700 × 6 ring=4200 group lens 814,818.By means of this configuration, can inscribe with each independent controlled member 102 line that length is about 1mm.In one embodiment, the group of about 1400 imaging lens 242 can be used.In one embodiment, lens 812,814,816 and 818 can comprise 4 non-spherical lenses.

In this embodiment, the element adjustment of not moving (such as at independent controlled member 102 place) by being used in X-Y plane focuses on and the heart far away may be caused to lose and cause halation.Therefore, the focusing adjustment expected should occur in the imaging len 242 of movement.Therefore this may need the actuator of imaging len 242 higher frequency than movement.

Figure 26 display has the diagrammatic side view layout of independent controlled member substantially static in X-Y plane and the part relative to the lithographic equipment of its moveable optical element according to an embodiment of the invention.In this embodiment, optics derotator (derotator) is for being coupled to the imaging len 242 of movement by independent controlled member 102 roughly static in X-Y plane.

In this embodiment, independent controlled member 102 is arranged to ring together with optional collimation lens.Two parabolic mirrors 820,822 make the ring from the collimated beam of independent controlled member 102 be decreased to for the acceptable diameter of derotator 824.In fig. 26, Pei Ken (pechan) prism is used as derotator 824.If derotator rotates with the speed of the half compared with the speed of imaging len 242, each independent controlled member 102 looks that relative to its respective imaging len 242 be roughly static.Two other parabolic mirrors 826,828 make from derotator 824 disappear turn bundle ring extension to the acceptable diameter of imaging len 242 for movement.Substrate moves along the X direction.

In this embodiment, each independent controlled member 102 becomes a pair with imaging len 242.Therefore, cannot independent controlled member 102 be arranged on concentric ring, therefore can not obtain the whole coverings across the width through substrate.The dutycycle of about 33% is possible.In this embodiment, imaging len 242 does not need the lens to field imaging.

Figure 27 display has the diagrammatic side view layout of independent controlled member substantially static in X-Y plane and the part relative to the lithographic equipment of its moveable optical element according to an embodiment of the invention.In this arrangement, imaging len 242 is arranged to be centered around the direction extended in X-Y plane and rotates (such as going barrel, instead of as such as about the swiveling wheel described by Figure 19-26).With reference to Figure 27, moveable imaging len 242 is arranged in and is arranged to around on the drum that such as Y-direction rotates.Moveable imaging len 242 is received in the radiation from independent controlled member 102 that the line in the Y-direction between bulging rotation and moveable imaging len 242 extends.In principle, the line inscribed by the moveable imaging len 242 of such drum will be parallel to the direction of scanning 831 of substrate.Therefore, the derotator 830 installed with 45 ° is arranged to the line half-twist manufactured by the moveable imaging len 242 by drum, makes the direction of scanning of line perpendicular to substrate of imaging.Substrate moves along the X direction.

For the every stripe on substrate, drum will need the circle of moveable imaging len 242.If such circle can inscribe the wide striped of 3mm on substrate and substrate is that 300mm is wide, 700 (optical devices circumferentially of drum) × 100=70000 optical module so may be needed on drum.If use Acylindrical optical devices on drum, then it may be less.In addition, imaging optical device may need particular field imaging in this embodiment, and it may make optical devices more complicated.The dutycycle of about 95% is possible.The advantage of this embodiment is that the striped of imaging can have roughly equal length and be almost parallel and be straight.In this embodiment, with not move together with moveable imaging len 242 or the element of movement carries out local focal is together relatively easy in conjunction with it.

Figure 28 display has the diagrammatic side view layout of independent controlled member substantially static in X-Y plane and the part relative to the lithographic equipment of its moveable optical element according to an embodiment of the invention, and the position of rotation that display is different relative to five of group of the imaging len 242 of independent controlled member.

With reference to Figure 28, be provided with independent controlled member 102 substantially static in X-Y plane.Moveable imaging len 242 comprises multiple lens combination, and each lens combination comprises field lens 814 and imaging len 818.Substrate moves along the X direction.

The field lens 814 (such as spherical lens) of moveable imaging len 242 relative to independent controlled member 102 move along direction 815 (be such as centered around imaging len 242 by arrange in a circular manner at least in part institute edge axis rotate).Field lens 814 guides bundle towards the imaging len 818 non-spherical lenses such as (such as) such as two non-spherical lenses of moveable imaging len 242.As field lens 814, imaging len 818 moves (be such as centered around imaging len 242 and arranged that the axis on institute edge rotates at least in part in a circular manner) relative to independent controlled member 102.In this embodiment, field lens 814 moves with substantially identical with imaging len 818 speed.

The focal plane of field lens 814 overlaps with the back focal plane of imaging len 818 at position 815 place, and it provides the heart far away to enter the/system that goes out of the heart far away.Contrary with the layout of Figure 23, imaging len 818 pairs of particular field imagings.The half-angle that the focal length of field lens 814 makes the field size for imaging len 818 be less than 2 to 3 °.In this case, diffraction-limited can also be obtained with unit piece optical devices (such as two non-spherical surface unit piece) and make picture.Arrange that field lens 814 is mounted to do not have spacing between each field lens 814.In this case, the dutycycle of independent controlled member 102 can be about 95%.

The focal length of imaging len 818 make for substrate place be 0.2 NA, these lens can not be greater than the diameter of field lens 814.The focal length equaling the imaging len 818 of the diameter of field lens 814 will provide the diameter of imaging len 818, and it leaves the sufficient space for installing imaging len 818.

Due to rink corner degree, the line slightly larger than the pitch of field lens 814 can be inscribed.Depend on the focal length of imaging len 818 in addition, the overlap between the line this providing the imaging of the adjacent independent controlled member 102 on substrate.Therefore, independent controlled member 102 can be arranged in the pitch identical with imaging len 242 pitch on a ring.

Figure 29 demonstrates the schematic three dimensional view of a part for the lithographic equipment of Figure 28.In this description, 5 independent controlled member 102 displays have 5 relevant moveable imaging lens group 242.Can understand, other independent controlled member 102 and relevant moveable imaging lens group 242 can be provided.Substrate moves along the X-direction shown by arrow 829.In one embodiment, field lens 814 is arranged to do not have spacing between them.Pupil plane is positioned at mark 817 place.

In order to avoid relatively little two aspherical imaging lens 818, reduce the amount of the optical devices of the imaging len 242 of movement and use standard laser diode as independent controlled member 102, the single lens group of moveable imaging len 242 may be used in this embodiment to the imaging of multiple independent controlled member 102.As long as independent controlled member 102 is telecentrically imaged onto on the field lens 814 of each moveable imaging len 242, the Shu Zaici made from independent controlled member 102 is telecentrically imaged onto on substrate by corresponding imaging len 818.If such as 8 lines are inscribed simultaneously, so the diameter of field lens 814 can be increased 8 times with the focal length of imaging len 818 under identical throughput rate, and the quantity of moveable imaging len 242 can be reduced 8 times simultaneously.In addition, because it can be public for being provided for the part that independent controlled member 102 to be imaged onto on field lens 814 required optical devices, so optical devices substantially static in X-Y plane can be reduced.Schematically show the such layout simultaneously being inscribed 8 lines by the group of single moveable imaging len 242 in fig. 30, there is the radius 823 of the rotation 821 of the group of imaging len 242 and the group distance rotation 821 of imaging len 242.Be that the standard laser diode installed as independent controlled member 102 leaves enough spaces from the pitch of 1.5mm to the pitch (when the group by single moveable imaging len 242 inscribes 8 lines simultaneously) of 12mm.In one embodiment, 224 independent controlled members 102 (such as standard laser diode) can be used.In one embodiment, the group of 120 imaging lens 242 can be used.In one embodiment, 28 substantially static optical devices groups and 224 independent controlled members 102 can be used.

In this embodiment, also relatively easily with not moving together with moveable imaging len 242 or coordinating the element of its movement together to carry out local focal.As long as the heart image far away of the independent controlled member 102 on field lens 814 is moved along optical axis and is held in the heart far away, by the focus variations of the image on only substrate, and maintenance is the heart far away by image.Figure 31 shows the illustrative arrangement focused on by the Mobile house dome-shaped unit control in the layout of Figure 28 and 29.Two folding catoptrons 832 and roof shape parts (such as prism or catoptron group) 834 hearts far away be placed on from independent controlled member 102 intrafascicular, and before field lens 814.By along direction 833 Mobile house dome-shaped parts 834 away from or towards folding catoptron 832, image is shifted by along optical axis, and is therefore also shifted relative to substrate.Because because axial focusing change equals the quadratic power ratio of F/ number, the out of focus with 25 μm of the substrate place of the bundle of F/2.5 along optical axis, there is large enlargement factor, so will be provided in the 5.625mm (37.5/2.5) at field lens 814 place of the bundle of f/37.5 ²focus displacement.This means that roof shape parts 834 must move its half.

Figure 32 display has the schematic, cross-sectional side view of independent controlled member substantially static in X-Y plane according to an embodiment of the invention and the lithographic equipment relative to its moveable optical element according to an embodiment of the invention.Although Figure 32 display is similar to the layout of Figure 23, it can be revised as any embodiment in applicable Figure 19-22 and/or Figure 24-31.

With reference to Figure 32, lithographic equipment 100 comprises the substrate table 106 keeping substrate, and at the locating device 116 up to moving substrate platform 106 in 6 degree of freedom.

Lithographic equipment 100 is also included in the multiple independent controlled member 102 that framework 160 is arranged.In this embodiment, each independent controlled member 102 is emitted radiation diode, such as laser diode, such as bluish-violet laser diode.Independent controlled member 102 to be arranged on framework 838 and to extend along the Y direction.Although show a framework 838, lithographic equipment can have the multiple frameworks 838 shown similarly with such as array 200 in Figure 5.Being arranged in further, framework 838 is lens 812 and 816.Framework 838 and therefore independent controlled member 102 are substantially static with lens 812 and 816 in X-Y plane.Framework 838, independent controlled member 102 and lens 812 and 816 can be moved along the Z direction by actuator 836.

In this embodiment, rotatable framework 840 is set.Field lens 814 and imaging len 818 are arranged on framework 840, wherein field lens 814 and imaging len 818 collectively form moveable imaging len 242.In use, plate rotates around the axis 206 of himself, such as, along the direction shown by arrow in Fig. 5 relative to array 200.Use motor 216 that framework 840 is rotated around axis 206.In addition, can motor 216 movable frame 840 along the Z direction be passed through, moveable imaging len 242 can be shifted relative to substrate table 106.

In this embodiment, the aperture structure 248 wherein with aperture can above lens 812, between lens 812 and relevant independent controlled member 102.Aperture structure 248 can limit lens 812, the relevant diffraction effect of independent controlled member 102 and/or the diffraction effect of the independent controlled member 102 of adjacent lens 812/.

In one embodiment, lithographic equipment 100 comprises one or more movable panel 890 (such as rotatable plate, such as rotatable dish), and it comprises optical element, such as lens.In the embodiment of Figure 32, display has the plate 890 of field lens 814 and has the plate 890 of imaging len 818.In one embodiment, any reflection type optical element of not rotating of lithographic equipment in use.In one embodiment, lithographic equipment is without any reflection type optical element, and it receives the radiation from any or all independent controlled members 102, and it rotates in use.In one embodiment, one or more (such as whole) plates 890 is general planar, such as, do not reach one or more surfaces or the optical element (or part of optical element) below of plate.Such as this can by guaranteeing that plate 890 is enough thick (namely at least thick than the height of optical element and positioning optical element makes them to stretch out) or realized by the smooth cover plate be provided in above plate 890 (not shown).Guarantee that the one or more surface of plate is that smooth can help such as reduces noise when equipment is in use substantially.

Figure 33 schematically shows the cross sectional side schematic diagram of a part for lithographic equipment.Lithographic equipment 900 comprise for keep substrate substrate table 902 and at the locating device 904 up to moving substrate platform 902 on 6DOF.Substrate can be the substrate (such as silicon wafer or glass plate) being coated with resist.

Lithographic equipment 900 also comprises the controlled self-emission formula contrast device 906 of multiple independences of being configured to launch multiple bundle.In one embodiment, self-emission formula contrast device 906 is emitted radiation diodes, such as light emitting diode (LED), organic LED (OLED), polymer LED (PLED) or laser diode (such as solid-state laser diode).In one embodiment, each independent controlled member 906 is bluish-violet color laser diode (such as Sanyo (Sanyo) model no.DL-3146-151).Such diode can be supplied by the company of such as Sanyo, Nichia, Osram and Nitride.In one embodiment, diode emitter has the radiation of the wavelength of about 365nm or about 405nm.In one embodiment, diode can provide the output power selected in the scope of 0.5-100mW.In one embodiment, the size of laser diode (exposed tube core) selects in the scope of 100-800 micron.In one embodiment, laser diode has the emitting area selected in the scope of 1-5 square micron.In one embodiment, laser diode has the angle of divergence selected from the scope of 7-44 degree.In one embodiment, diode has and is more than or equal to about 6.4x10 for providing ⁸the configuration (such as, emitting area, the angle of divergence, output power etc.) of the total brightness of W/ (m2.sr).

Self-emission formula contrast device 906 to be arranged on framework 908 and can along the Y direction and/or X-direction extend.Although show a framework 908, as shown in figure 34, lithographic equipment can have multiple framework 908.Framework 908 is also furnished with lens 920.Framework 908 and therefore self-emission formula contrast device 906 and lens 920 are roughly static in X-Y plane.Actuator 910 movable frame 908, self-emission formula contrast device 906 and lens 920 along the Z direction can be passed through.Alternately or additionally, lens 920 can be moved along the Z direction by the actuator being provided to lens 920.Alternatively, each lens 920 can be provided with actuator.

Self-emission formula contrast device 906 can be configured to transmitted beam, and optical projection system 920,924 and 930 can be configured to bundle to project on the target part of substrate.Self-emission formula contrast device 906 and optical projection system form optical column.Lithographic equipment 900 can comprise for the actuator relative to substrate mobile optical device row or its part.The framework 912 being furnished with field lens 924 and imaging len 930 thereon can rotate along with actuator.Field lens 924 and imaging len 930 collectively form moveable optical devices 914.In use, framework 912 rotates around the axis 916 of himself, such as, along the direction shown by the arrow in Figure 34.By using actuator (such as motor 918), framework 912 is rotated around axis 916.In addition, framework 912 can be moved along the Z direction by motor 910, moveable optical devices 914 can be shifted relative to substrate table 902.

Pore structure 922 wherein has hole, can be positioned at lens 920 top and between lens 920 and self-emission formula contrast device 906.Pore structure 922 can limit lens 920, the diffraction effect of self-emission formula contrast device 906 be associated and/or the diffraction effect of contiguous lens 920/ self-emission formula contrast device 906.

Shown equipment can be used by rotating frame 912 and the substrate simultaneously below optical column on moving substrate platform 902.Self-emission formula contrast device 906 can transmitted beam, described bundle when lens 920,924 and 930 are roughly aligned with each other through these lens.By mobile lens 924 and 930, the picture restrainted on substrate is scanned by a part for substrate.By the substrate simultaneously below optical column on moving substrate platform 902, the part standing the substrate of the picture of self-emission formula contrast device 906 also moves.By under the control of optical column controller, connect and/or turn off self-emission formula contrast device 906 at high speed (such as when it is by " shutoff ", do not export or export below threshold value, and the output had when it is switched " on " higher than threshold value), in the resist layer of substrate, imaging can be carried out to the pattern expected, the rotation of described controller control both optical device row or its part, control the intensity of self-emission formula contrast device 906 and control the speed of substrate.

Figure 34 illustrates the schematic plan of the lithographic equipment of the Figure 33 with self-emission formula contrast device 906.As display in the lithographic equipment 900 shown in Figure 33, lithographic equipment 900 comprises for keeping the substrate table 902 of substrate 928, at the locating device 904 up to moving substrate platform 902 in 6 degree of freedom, for determining aligning between self-emission formula contrast device 906 and substrate 928 and for determining whether substrate 928 is in the aligning/leveling sensor 932 of level relative to the projection of self-emission formula contrast device 906.As shown in the figure, substrate 928 has round-shaped, but, additionally or alternatively also can process rectangular substrate.

Self-emission formula contrast device 906 is arranged on framework 926.Self-emission formula contrast device 906 can be emitted radiation diode, such as laser diode, such as bluish-violet color laser diode.As shown in figure 34, self-emission formula contrast device 906 can be arranged in the array extended in X-Y plane.

Array 934 can be elongated line.In an embodiment, array 934 can be the one-dimensional array of self-emission formula contrast device 906.In an embodiment, array 934 can be the two-dimensional array of self-emission formula contrast device 906.Rotating frame 912 can be arranged to, and it can rotate up in the side shown by arrow.

Figure 35 schematically shows a part for the lithographic equipment according to one embodiment of the invention.Rotating frame can have lens 924,930, to provide the image of each self-emission formula contrast device 906.Described equipment can also comprise actuator 918, with relative to substrate and self-emission formula contrast device 906 rotating frame 912 and lens 924,930.Moveable optical column or its part move and may cause heat load in moveable optical column or its part by medium, and described heat load is caused by the towing of framework 912 and lens 924,930.Such as, if mobile very quick, so towing and heat load may be very large.Described equipment can be provided with refrigeratory, for cooling away the heat load in removable optical column or its part.Refrigeratory can be that liquid (such as water) cools, refrigerant cools or Peltier cooling.Moveable refrigeratory 936 (see Figure 35) can be provided to rotating frame 912.In one embodiment, moveable refrigeratory 936 is Peltier refrigeratorys, this is because it can be closely.

Figure 36 schematically shows a part for lithographic equipment according to another embodiment of the present invention.Fixing refrigeratory 938 can be arranged near framework 912 and lens 924,930, to absorb the heat from framework 912 and lens 924,930 radiation.Fixing refrigeratory 938 may be used for cooling the medium surrounding framework 912 and lens 924,930, to cool framework 912 and lens 924,930 by the convection current of medium and/or conduction.Such as, refrigeratory 938 can within the 10cm of application component, can within the 5cm of application component, can within the 3cm of application component, can within the 1cm of application component or can within the 0.5cm of application component.

Figure 37 discloses a part for lithographic equipment according to another embodiment of the present invention.Described equipment is provided with measuring system, for measuring the position of the first movable lens 924.Measuring system comprises the radiant output device 940 (be connected to radiation source or comprise radiation source) for radiation beams 942, and described bundle is tackled by the edge of rotating frame 912.The survey sensor 944 (such as charge-coupled image sensor) of measuring system measure described bundle 942 not by the part of the edge of framework 912 interception, and therefore provide the information of the position about the first lens 924.Any expansion of the position of the change lens 924 of framework 912, can be undertaken measuring by measuring system and consider the sequential of the pulse of self-emission formula contrast device 906.Described expansion such as additionally or alternatively can be used to the zoom factor calculating printed patterns.

Figure 38 schematically shows a part for lithographic equipment according to another embodiment of the present invention.Described equipment can be provided with controller 946, and described controller is connected to actuator 918 (for rotating frame 912 and lens 924,930) via connection 948.Controller 946 can the velocity of rotation of control framework 912, and/or can receive the information of velocity of rotation about framework 912 and/or position via connection 948.Controller 946 can be connected to locating device 904 (for moving substrate platform 902).Controller 946 can receive the information of the position about the substrate below optical column, and/or can control locating device 904, for being positioned at below optical column the position that substrate is being expected.Controller 946 can control self-emission formula contrast device 906, to be projected to by pattern on the desired locations on substrate.

Lithographic projection apparatus can also comprise position-measurement device 950,952, and it can adopt the form of interferometer, incremental encoder, capacitance type sensor or any other position-measurement device.Position-measurement device 950,952 can be connected to controller 946.The position of the respective part of position-measurement device 950,952 gage frame 912.Such as, the position of the part in the near zone of lens 924 of position-measurement device 950 gage frame 912, the position of the part in the near zone of lens 930 of position-measurement device 952 gage frame 912.Measured position will be used for the expansion of Computational frame 912, to determine the position of the lens 924,930 rotated.

Alternately or additionally, the position of lens 924,930 can such as directly be measured, directly to determine the position of lens by being emitted on charge coupled device ccd plate by bundle scioptics.CCD can be connected to controller 946 and can be positioned at and will not carry out the position projected.

Controller 946 can be connected to thermometer (not shown) to measure the temperature of the framework 912 rotated.The input value of thermometer may be used for calculating the expansion as the framework 912 of the function of temperature.Controller 946 can use described expansion to control actuator 918, locating device 904 and/or self-emission formula contrast device 906, to compensate any thermal effect of the framework 912 caused by heat load.Controller 946 can be connected with refrigeratory 936,938, to control the temperature of moveable optical devices, rotating frame or its part.

Be hereafter marked with sequence number in additionally provide embodiment:

1. a lithographic equipment, comprising:

Substrate holder, is configured to keep substrate;

Modulator, is configured to the exposure area of described substrate is exposed by the multiple Shu Jinhang according to the pattern modulates expected; With

Optical projection system, being configured to modulated bundle to project on described substrate and comprising the lens arra receiving described multiple bundle, described optical projection system is configured to move described lens arra relative to described modulator between the exposure period of described exposure area.

2. the lithographic equipment according to embodiment 1, wherein each lens comprises at least two lens of the beam path layout along at least one the described multiple intrafascicular bundle from described modulator to described substrate.

3. the lithographic equipment according to embodiment 2, the first lens in wherein said at least two lens comprise field lens, and the second lens in described at least two lens comprise imaging len.

4. the lithographic equipment according to embodiment 3, the focal plane of wherein said field lens overlaps with the back focal plane of described imaging len.

5. the lithographic equipment according to embodiment 3 or 4, wherein said imaging len comprises two non-spherical lens.

6., according to the lithographic equipment in embodiment 3-5 described in any one, the focal length of wherein said field lens makes the field size of described imaging len be less than 2 to 3 ° of half-angles.

7. according to the lithographic equipment in embodiment 3-6 described in any one, the focal length of wherein said imaging len make to described substrate place be 0.2 NA, described imaging len is not more than the diameter of described field lens.

8. the lithographic equipment according to embodiment 7, the focal length of wherein said imaging len equals the diameter of described field lens.

9., according to the lithographic equipment in embodiment 3-8 described in any one, wherein make multiple described bundle imaging with the single combination of described field lens and described imaging len.

10. according to the lithographic equipment in embodiment 3-9 described in any one, also comprise focus control device, this focus control device is arranged along the beam path of at least one the described multiple intrafascicular bundle from described modulator to described field lens.

11. lithographic equipments according to embodiment 10, wherein said focus control device comprises folding mirror and movable roof shape parts.

12. lithographic equipments according to embodiment 3, also comprise lens in the path for which, with by the described bundle collimation from described first lens to described second lens.

13. lithographic equipments according to embodiment 12, the lens in the path for which wherein for collimating described bundle are static relative to described modulator substantially.

14. according to the lithographic equipment in embodiment 3,12 and 13 described in any one, is also included in the lens in the path between described modulator and described first lens, with towards intrafascicular at least one multiple described in described first lens focus.

15. lithographic equipments according to embodiment 14, the lens in the path for which wherein for focusing on described bundle are substantially static relative to described modulator.

16. according to the lithographic equipment in embodiment 3 and 12-15 described in any one, the optical axis of wherein said field lens and the optical axis coincidence of described imaging len.

17. lithographic equipments according to embodiment 2, the first lens in wherein said at least two lens comprise at least two sub-lens, and wherein said multiple at least one intrafascicular bundle focuses in the middle of described two sub-lens.

18. lithographic equipments according to embodiment 17, each in wherein said at least two sub-lens has roughly equal focal length.

19. according to the lithographic equipment in embodiment 2,17 and 18 described in any one, and wherein said first lens are arranged to export towards the second lens in described at least two lens the bundle be collimated.

20. according to the lithographic equipment in embodiment 2 and 17-19 described in any one, the first lens at least two lens described in the speed being configured to the second lens at least two lens described in being different from moves.

21. lithographic equipments according to embodiment 20, the speed of wherein said second lens is twices of the speed of described first lens.

22. lithographic equipments according to embodiment 1, wherein each lens comprises the 4f heart far away and enters/the imaging system that goes out of the heart far away.

23. lithographic equipments according to embodiment 22, the wherein said 4f heart far away enters/and imaging system that the heart far away goes out comprises at least 6 lens.

24. lithographic equipments according to embodiment 1, are also included in the derotator between described modulator and described lens arra.

25. lithographic equipments according to embodiment 24, wherein said derotator comprises Pechan prism.

26. lithographic equipments according to embodiment 24 or 25, wherein said derotator is arranged to move with the half of the speed of described lens arra.

27., according to the lithographic equipment in embodiment 24-26 described in any one, also comprise parabolic mirror, to reduce the size of the bundle between described modulator and described derotator.

28., according to the lithographic equipment in embodiment 24-27 described in any one, also comprise parabolic mirror, to be increased in the size of the bundle between described derotator and described lens arra.

29. according to the lithographic equipment in embodiment 1-28 described in any one, and wherein said lens arra rotates relative to described modulator.

30. according to the lithographic equipment in embodiment 1-29 described in any one, and wherein said modulator comprises the multiple independent controllable radiation source for electromagnetic radiation-emitting.

31. according to the lithographic equipment in embodiment 1-29 described in any one, and wherein said modulator comprises micro reflector array.

32. according to the lithographic equipment in embodiment 1-29 described in any one, and wherein said modulator comprises radiation source and acousto-optic modulator.

33. 1 kinds of device making methods, comprise step:

Multiple bundles according to the pattern modulates expected are provided; With

The lens arra receiving described multiple bundle is used to project on substrate by described multiple bundle; With

During described projection, relative to lens arra described in described Shu Yidong.

34. methods according to embodiment 33, wherein each lens comprises at least two lens arranged along the beam path from source of at least one bundle described at least one described multiple intrafascicular bundle of described substrate.

35. methods according to embodiment 34, the first lens in wherein said at least two lens comprise field lens, and the second lens in described at least two lens comprise imaging len.

36. methods according to embodiment 35, the focal plane of wherein said field lens overlaps with the back focal plane of described imaging len.

37. methods according to embodiment 35 or 36, wherein said imaging len comprises two non-spherical lens.

38. according to the method in embodiment 35-37 described in any one, and the focal length of wherein said field lens makes the field size of described imaging len be less than 2 to 3 ° of half-angles.

39. according to the method in embodiment 35-38 described in any one, the focal length of wherein said imaging len make to described substrate place be 0.2 NA, described imaging len is not more than the diameter of described field lens.

40. methods according to embodiment 39, the focal length of wherein said imaging len equals the diameter of described field lens.

41. according to the method in embodiment 35-40 described in any one, wherein with the single combination of described field lens and described imaging len to multiple described bundle imaging.

42. according to the method in embodiment 35-41 described in any one, also comprises the focus control device between source and described field lens being used in described multiple at least one intrafascicular bundle.

43. methods according to embodiment 42, wherein said focus control device comprises folding mirror and moveable roof shape parts.

44. methods according to embodiment 35, also comprise and use lens by least one the bundle collimation between described first lens and described second lens.

45. methods according to embodiment 44, the lens wherein for collimating at least one bundle described are static relative at least one bundle described substantially.

46. according to the method in embodiment 35,44 and 45 described in any one, also comprises the lens in the path between source and described first lens being used at least one bundle described, towards intrafascicular at least one multiple described in described first lens focus.

47. methods according to embodiment 46, the lens wherein for focusing at least one bundle described are substantially static relative at least one bundle described.

48. according to the method in embodiment 35 and 44-47 described in any one, the optical axis of wherein said field lens and the optical axis coincidence of described corresponding imaging len.

49. methods according to embodiment 34, the first lens in wherein said at least two lens comprise at least two sub-lens, and wherein said multiple at least one intrafascicular bundle focuses in the middle of described two sub-lens.

50. methods according to embodiment 49, each in wherein said at least two sub-lens has roughly equal focal length.

51. according to the method in embodiment 34,49 and 50 described in any one, and wherein said first lens are arranged to export towards the second lens in described at least two lens the bundle be collimated.

52. according to the method in embodiment 34 and 49-51 described in any one, the first lens at least two lens described in the speed comprising the second lens at least two lens described in being different from moves.

53. methods according to embodiment 52, the speed of wherein said second lens is twices of the speed of described first lens.

54. methods according to embodiment 33, wherein each lens comprises the 4f heart far away and enters/the imaging system that goes out of the heart far away.

55. methods according to embodiment 54, the wherein said 4f heart far away enters/and imaging system that the heart far away goes out comprises at least 6 lens.

56. methods according to embodiment 33, also comprise the derotator between source and described lens arra being used in described bundle and disappear to described Shu Jinhang and turn.

57. methods according to embodiment 56, wherein said derotator comprises Pechan prism.

58. methods according to embodiment 56 or 57, comprise and move described derotator with the half of the speed of described lens arra.

59. according to the method in embodiment 56-58 described in any one, also comprises the size using parabolic mirror to reduce the bundle between the source of described bundle and described derotator.

60. according to the method in embodiment 56-59 described in any one, also comprises the size using parabolic mirror to be increased in the bundle between described derotator and described lens arra.

61. according to the method in embodiment 33-60 described in any one, comprises relative to lens arra described in described Shu Xuanzhuan.

62. according to the method in embodiment 33-61 described in any one, and each wherein in multiple independent controllable radiation source launches described multiple intrafascicular each.

63. according to the method in embodiment 33-61 described in any one, and wherein micro reflector array launches multiple bundle.

64. according to the method in embodiment 33-61 described in any one, and wherein radiation source and acousto-optic modulator produce described multiple bundle.

65. 1 kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Modulator, comprises the multiple independent controllable radiation source of electromagnetic radiation-emitting, is configured to the exposure area of described substrate is exposed by the multiple Shu Jinhang according to the pattern modulates expected; With

Optical projection system, being configured to modulated bundle to project on described substrate and comprising the lens arra receiving described multiple bundle, described optical projection system is configured to move described lens arra relative to described independent controllable radiation source between the exposure period of described exposure area.

66. 1 kinds of device making methods, comprise step:

Multiple independent controllable radiation source is used to provide multiple bundles of the pattern modulates according to expectation; With

Described lens arra is moved relative to described independent controllable radiation source during described projection.

67. 1 kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Optical projection system, to be configured to modulated bundle to project on substrate and the multiple lens arras comprised for receiving described multiple bundle, each in described array is arranged along the beam path of described multiple bundle independently.

68. lithographic equipments according to embodiment 67, wherein said optical projection system is configured to move described lens arra relative to described modulator between the exposure period of described exposure area.

69. lithographic equipments according to embodiment 67 or 68, the described lens layout wherein in every an array is in single main body.

70. 1 kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Modulator, comprise the multiple independent controllable radiation source of electromagnetic radiation-emitting, the exposure area of described substrate is configured to be exposed by the multiple Shu Jinhang according to the pattern modulates expected, and be configured to move described multiple radiation source relative to described exposure area between the exposure period of described exposure area, make the multiple radiation sources being only less than whole described multiple radiation source can expose described exposure area at any one time; With

Optical projection system, is configured to modulated bundle to project on described substrate.

71. 1 kinds of lithographic equipments, comprising:

Multiple independent controllable radiation source, being configured to provide the multiple bundles according to the pattern modulates expected, is moveable between the position of at least one radiation source in its emitted radiation in described multiple radiation source and the position in its not emitted radiation;

Substrate holder, is configured to keep substrate; With

72. 1 kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Modulator, comprise the multiple independent controllable radiation source for electromagnetic radiation-emitting, the exposure area of described substrate is configured to be exposed by the multiple Shu Jinhang according to the pattern modulates expected, and be configured to move at least one radiation source in described multiple radiation source relative to described exposure area between the exposure period of described exposure area, make radiation from least one radiation source described at synchronization with adjacent or overlapping from other the radiation of radiation source of at least one in described multiple radiation source; With

73. 1 kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Multiple independent controllable radiation source, be configured to the exposure area by being provided to described substrate according to multiple bundles of the pattern modulates expected, at least one radiation source in described multiple radiation source it can emitted radiation to the position of described exposure area and its not emitted radiation to the position of described exposure area between be moveable, and

74. 1 kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Modulator, comprise multiple independent controllable radiation source, be configured to the exposure area by being provided to described substrate according to multiple bundles of the pattern modulates expected, and be configured to move described multiple radiation source relative to described exposure area between the exposure period of described exposure area, described modulator has the output of the multiple bundles to described exposure area, and described output has the area of the area of the output being less than described multiple radiation source; With

75. 1 kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Modulator, comprise the array in multiple independent controllable radiation source, be configured to the respective exposure area by being provided to described substrate according to multiple bundles of the pattern modulates expected, and be configured to move every an array relative to its respective exposure area, or move the described multiple bundle from every an array relative to its respective exposure area, or move described array and described multiple bundle relative to described respective exposure area, the respective exposure area of the array wherein in use in multiple array is adjacent or overlapping with the respective exposure area of another array in described multiple array, with

76. 1 kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Modulator, comprise multiple independent controllable radiation source, be configured to the exposure area by being provided to described substrate according to multiple bundles of the pattern modulates expected, and be configured to relative to described exposure area move in described multiple radiation source each, or move described multiple bundle relative to described exposure area, or each and the described multiple bundle that to move relative to described exposure area in described multiple radiation source, each wherein in use in described radiation source operates in the steep part of its respective power/forward current curve; With

77. 1 kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Modulator, comprise multiple independent controllable radiation source, be configured to the exposure area by being provided to described substrate according to multiple bundles of the pattern modulates expected, and be configured to relative to described exposure area move in described multiple radiation source each, or move described multiple bundle relative to described exposure area, or each and the described multiple bundle that to move relative to described exposure area in described multiple radiation source, each in wherein said independent controllable radiation source comprises bluish-violet laser diode; With

78. 1 kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Modulator, comprise multiple independent controllable radiation source, be configured to the exposure area by being provided to described substrate according to multiple bundles of the pattern modulates expected, and be configured to relative to described exposure area move in described multiple radiation source each, described multiple radiation source is arranged at least two concentric circular array; With

79. lithographic equipments according to embodiment 78, at least one circular array in wherein said circular array is by least one other the circular array be disposed in a staggered manner in described circular array.

80. 1 kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Modulator, comprise multiple independent controllable radiation source, be configured to the exposure area by being provided to described substrate according to multiple bundles of the pattern modulates expected, and be configured to relative to described exposure area move in described multiple radiation source each, described multiple radiation source is around the center arrangement of structure, and described structure has the opening extending through described structure in described multiple radiation source; With

81. lithographic equipments according to embodiment 80, the outside being also included in described radiation source place or described radiation source keeps the support member of supporting construction.

82. lithographic equipments according to embodiment 81, wherein said support member comprises the bearing allowing described structure movement.

83. lithographic equipments according to embodiment 81 or 82, wherein said support member comprises the motor of mobile described structure.

84. 1 kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Modulator, comprise multiple independent controllable radiation source, be configured to the exposure area by being provided to described substrate according to the multiple bundles of pattern modulates expected, and be configured to relative to described exposure area move in described multiple radiation source each, described multiple radiation source is around the center arrangement of structure;

Support member, for structure described in the external support at described radiation source place or described radiation source, described structural allocation becomes to rotate described structure or allows to rotate described structure; With

85. lithographic equipments according to embodiment 84, wherein said support member comprises the bearing allowing to rotate described structure.

86. lithographic equipments according to embodiment 84 or 85, wherein said support member comprises the motor rotating described structure.

87. 1 kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Modulator, comprise multiple independent controllable radiation source, be configured to the exposure area by being provided to described substrate according to multiple bundles of the pattern modulates expected, and be configured to relative to described exposure area move in described multiple radiation source each, described multiple radiation source is arranged on removable frame, and described removable frame is arranged in again in movable panel; With

88. lithographic equipments according to embodiment 87, wherein said removable frame is rotatable.

89. lithographic equipments according to embodiment 87 or 88, wherein said movable panel is rotatable.

90. lithographic equipments according to embodiment 89, the rotation center of wherein said movable panel does not overlap with the rotation center of described removable frame.

91. 1 kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Modulator, comprise multiple independent controllable radiation source, be configured to the exposure area by being provided to described substrate according to multiple bundles of the pattern modulates expected, and be configured to relative to described exposure area move in described multiple radiation source each, described multiple radiation source is arranged in removable frame or on removable frame;

Fluid passage, is arranged in described removable frame, to provide temperature control fluid to the position of at least contiguous described multiple radiation source; With

92. lithographic equipments according to embodiment 91, also comprise the sensor be arranged on described removable frame or removable frame.

93. lithographic equipments according to embodiment 91 or 92, also comprise sensor, described sensor be arranged at least one radiation source of contiguous described multiple radiation source position but not on described removable frame or described removable frame.

94. lithographic equipments according to embodiment 92 or 93, wherein said sensor comprises temperature sensor.

95. according to the lithographic equipment in embodiment 92-94 described in any one, and wherein said sensor comprises and is configured to measure the expansion of described structure and/or the sensor of contraction.

96. 1 kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Heat radiator, described heat radiator is arranged in described removable frame or on removable frame, controls the temperature of described structure to provide; With

97. lithographic equipments according to embodiment 96, also comprise static heat radiator, to coordinate with the heat radiator in described removable frame or on removable frame.

98. lithographic equipments according to embodiment 97, be included at least two heat radiator in described removable frame or on removable frame, between at least one other heat radiator in the described heat radiator at least one heat radiator in the described heat radiator of described static heat radiator in described removable frame or on removable frame and described removable frame or on described removable frame.

99. 1 kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Fluid supply apparatus, is configured to the outside surface of delivering fluids to described structure, to control the temperature of described structure; With

100. lithographic equipments according to embodiment 99, wherein said fluid supply apparatus is configured to supply gas.

101. lithographic equipments according to embodiment 99, wherein said fluid supply apparatus is configured to feed fluid.

102. lithographic equipments according to embodiment 101, also comprise fluid confinement structure, are configured to keep described liquid and described form touch.

103. lithographic equipments according to embodiment 102, wherein said fluid confinement structure is configured to keep the sealing between described structure and described fluid confinement structure.

104. one kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Modulator, comprises multiple independent controllable radiation source, is configured to the exposure area by being provided to described substrate according to the multiple bundles of pattern modulates expected, and be configured to relative to described exposure area move in described multiple radiation source each;

Independently lens in structure, described lens are connected near each radiation source in described multiple radiation source or each radiation source be connected in described multiple radiation source, and can move with respective radiation source.

105. lithographic equipments according to embodiment 104, also comprise actuator, and described actuator is configured to relative to its respective radiation source to make Lens shift.

106. lithographic equipments according to embodiment 104 or 105, also comprise actuator, and described actuator is configured to relative to supporting the structure of described lens and its respective radiation source to make lens and its respective radiation source displacement.

107. lithographic equipments according to embodiment 105 or 106, wherein said actuator is configured to up to described lens mobile in 3 degree of freedom.

108. according to the lithographic equipment in embodiment 104-107 described in any one, also comprises the aperture structure in the downstream of at least one radiation source in described multiple radiation source.

109. according to the lithographic equipment in embodiment 104-107 described in any one, wherein described lens is connected to the structure that supports described lens and its respective radiation source with high thermal conductivity material.

110. one kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Spatial coherence breaking plant, is configured to upset the radiation from least one radiation source in described multiple radiation source; With

111. lithographic equipments according to embodiment 110, wherein said spatial coherence breaking plant comprises static plate, and at least one radiation source described is moveable relative to described plate.

112. lithographic equipments according to embodiment 110, wherein said spatial coherence breaking plant comprises at least one that select from following apparatus: phase-modulator, swivel plate or oscillating plate.

113. one kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Sensor, is configured to measure the focusing relevant at least one radiation source in described multiple radiation source, at least partially at least one radiation source described or at least one radiation source described of described sensor; With

114. lithographic equipments according to embodiment 113, wherein said sensor is configured to each relevant focusing of independent measurement and described radiation source.

115. lithographic equipments according to embodiment 113 or 114, wherein said sensor is edge of a knife focused detector.

116. one kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Transmitter, is configured to wirelessly send signal and/or power extremely described multiple radiation source, to control described multiple radiation source respectively and/or to power to described multiple radiation source; With

117. lithographic equipments according to embodiment 116, wherein said signal comprises multiple signal, and also comprises demultiplexer, to send each signal in described multiple signal towards respective radiation source.

118. one kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Single line, for controller is connected to described removable frame, so that multiple signal and/or power are sent to described multiple radiation source, to control described multiple radiation source respectively and/or to power to it; With

119. lithographic equipments according to embodiment 118, wherein said signal comprises multiple signal, and also comprises demultiplexer, to send each signal in described multiple signal towards respective radiation source.

120. lithographic equipments according to embodiment 118 or 119, wherein said line comprises optical line.

121. one kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Sensor, measures the characteristic of being launched the radiation maybe will launched by least one radiation source in described multiple radiation source towards described substrate; With

122. lithographic equipments according to embodiment 121, being arranged at least partially on described substrate holder or described substrate holder of wherein said sensor.

123. lithographic equipments according to embodiment 122, wherein said sensor described to be arranged at least partially on described substrate holder or described substrate holder and to be supported on a position of the outside in region residing on described substrate holder at described substrate.

124. according to the lithographic equipment in embodiment 121-123 described in any one, the side being positioned at described substrate at least partially of wherein said sensor, and it extends along the direction of scanning of described substrate in use substantially.

125. according to the lithographic equipment in embodiment 121-124 described in any one, being arranged at least partially in the framework supporting described removable frame or on framework of wherein said sensor.

126. according to the lithographic equipment in embodiment 121-125 described in any one, and wherein said sensor is configured to measure the radiation from least one radiation source described in outside described exposure area.

127. according to the lithographic equipment in embodiment 121-126 described in any one, wherein said sensor be moveable at least partially.

128., according to the lithographic equipment in embodiment 121-127 described in any one, also comprise controller, and described controller is configured to calibrate at least one radiation source described based on the result of described sensor.

129. one kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Sensor, for measuring the position of described removable frame; With

130. lithographic equipments according to embodiment 129, being arranged at least partially in the framework supporting described removable frame or on framework of wherein said sensor.

131. one kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Modulator, comprise multiple independent controllable radiation source, be configured to the exposure area by being provided to described substrate according to multiple bundles of the pattern modulates expected, and be configured to relative to described exposure area move in described multiple radiation source each, each in described multiple radiation source has distinguishing mark or provides distinguishing mark;

Sensor, is configured to detect described distinguishing mark; With

132. lithographic equipments according to embodiment 131, being arranged at least partially in the framework supporting described multiple radiation source or on framework of wherein said sensor.

133. lithographic equipments according to embodiment 131 or 132, wherein said distinguishing mark comprises the radiation frequency from respective radiation source.

134. according to the lithographic equipment in embodiment 131-133 described in any one, and wherein said distinguishing mark comprises at least one from following middle selection: bar code, mark or radio frequency identification marker.

135. one kinds of lithographic equipments, comprising:

Substrate holder, is configured to keep substrate;

Sensor, be configured to detect altered course by described substrate, from the radiation of at least one radiation source in described multiple radiation source; With

136. lithographic equipments according to embodiment 135, wherein said sensor is configured to the position of the spot determining the described radiation from least one radiation source described incided on described substrate according to the radiation of described changed course.

137. according to the lithographic equipment in embodiment 70-136 described in any one, and wherein said modulator is configured to rotate at least one radiation source around the axis of the direction of propagation being arranged essentially parallel to described multiple bundle.

138. according to the lithographic equipment in embodiment 70-137 described in any one, and wherein said modulator is configured at least one radiation source of direction translation along the direction of propagation transverse to described multiple bundle.

139. according to the lithographic equipment in embodiment 70-138 described in any one, and wherein said modulator comprises the beam-deflector being configured to mobile described multiple bundle.

140. lithographic equipments according to embodiment 139, wherein said beam-deflector selects from the group be made up of following parts: catoptron, prism and acousto-optic modulator.

141. lithographic equipments according to embodiment 139, wherein said beam-deflector comprises polygonal element.

142. lithographic equipments according to embodiment 139, wherein said beam-deflector is configured to vibration.

143. lithographic equipments according to embodiment 139, wherein said beam-deflector is configured to rotate.

144. according to the lithographic equipment in embodiment 70-143 described in any one, and described substrate is moved in the direction that wherein said substrate holder is configured to along arranging described multiple bundle.

145. lithographic equipments according to embodiment 144, the movement of wherein said substrate rotates.

146. according to the lithographic equipment in embodiment 70-145 described in any one, and wherein said multiple radiation source can move together.

147. according to the lithographic equipment in embodiment 70-146 described in any one, and wherein said multiple radiation source is arranged in a circular manner.

148. according to the lithographic equipment in embodiment 70-147 described in any one, and wherein said multiple radiation source to be arranged in plate and to be spaced apart from each other.

149. according to the lithographic equipment in embodiment 70-148 described in any one, and wherein said optical projection system comprises lens arra.

150. according to the lithographic equipment in embodiment 70-149 described in any one, and wherein said optical projection system is made up of lens arra in fact.

151. lithographic equipments according to embodiment 149 or 150, the lens of wherein said lens arra have high numerical aperture, described lithographic equipment is arranged so that described substrate is in the outside of the focal position of the radiation relevant to described lens, effectively to reduce the numerical aperture of described lens.

152. according to the lithographic equipment in embodiment 70-151 described in any one, and each in wherein said radiation source comprises laser diode.

153. lithographic equipments according to embodiment 152, wherein each laser diode is configured to launch the radiation of the wavelength with about 405nm.

154., according to the lithographic equipment in embodiment 70-153 described in any one, also comprise temperature controller, and described temperature controller is configured to the temperature described multiple radiation source being remained on constant between exposure period.

155. lithographic equipments according to embodiment 154, wherein said controller be configured to before exposure by described multiple radiation source heats to the temperature of the temperature of temperature or the temperature close to described constant that are in described constant.

156. according to the lithographic equipment in embodiment 70-155 described in any one, and comprise at least 3 the independently arrays arranged along a direction, in described array, each comprises multiple radiation source.

157. according to the lithographic equipment in embodiment 70-156 described in any one, and wherein said multiple radiation source comprises at least about 1200 radiation sources.

158., according to the lithographic equipment in embodiment 70-157 described in any one, also comprise alignment sensor, for determining at least one radiation source in described multiple radiation source and aiming between described substrate.

159., according to the lithographic equipment in embodiment 70-158 described in any one, also comprise horizon sensor, for determining the position of described substrate relative to the focal position of described multiple at least one intrafascicular bundle.

160. lithographic equipments according to embodiment 158 or 159, also comprise controller, described controller is configured to change described pattern based on the result of alignment sensor and/or the result of horizon sensor.

161. according to the lithographic equipment in embodiment 70-160 described in any one, also comprise controller, described controller is configured to change described pattern based on the measurement of the temperature of at least one radiation source in described multiple radiation source or the measurement of the temperature relevant at least one radiation source in described multiple radiation source.

162., according to the lithographic equipment in embodiment 70-161 described in any one, also comprise sensor, are launched the characteristic of radiation maybe will be launched for measuring by least one radiation source in described multiple radiation source towards described substrate.

163. one kinds of lithographic equipments, comprising:

Multiple independent controllable radiation source, is configured to provide the multiple bundles according to the pattern modulates expected;

Lens arra, comprises multiple lenslet; With

Substrate holder, is configured to keep substrate,

Wherein during use, except described lens arra, between described multiple radiation source and described substrate, there is no other optical devices.

164. one kinds of programmable patterning devices, comprising:

Substrate, has the array of the isolated emitted radiation diode along at least one direction over the substrate; With

Lens arra, at the radiation downstream place of described emitted radiation diode.

165. programmable patterning devices according to embodiment 164, wherein said lens arra comprises and has multiple lenticular microlens array, described lenticular quantity corresponds to the quantity of emitted radiation diode, and is located that the radiation focusing optionally through the respective emitted radiation diode in described emitted radiation diode is become micro-spot array.

166. programmable patterning devices according to embodiment 164 or 165, wherein said emitted radiation diode is spaced apart along at least two orthogonal directions.

167. according to the programmable patterning device in embodiment 164-166 described in any one, and wherein said emitted radiation diode is embedded in be had in the material of lower thermal conductivity.

168. one kinds of device making methods, comprise step:

Multiple independent controllable radiation source is used to provide multiple bundles according to the pattern modulates expected towards the exposure area of substrate;

While described multiple bundle is provided, moves at least one in described multiple radiation source, makes the multiple radiation sources being only less than whole described multiple radiation source can expose described exposure area at any one time; With

Described multiple bundle is projected on described substrate.

169. one kinds of device making methods, comprise step:

Multiple independent controllable radiation source is used to provide multiple bundles of the pattern modulates according to expectation;

At least one in described multiple radiation source is moved between the position and the position of its not emitted radiation of its emitted radiation; With

Described multiple bundle is projected on described substrate.

170. one kinds of device making methods, comprise the bundle using multiple independent controllable radiation source to provide the pattern modulates according to expectation, and only use lens arra that the bundle of the modulation from described multiple independent controllable radiation source is projected to substrate.

171. one kinds of device making methods, comprise step:

Multiple independent controllable radiation source is used to provide multiple electromagnetic radiation beams of the pattern modulates according to expectation;

Between the exposure period of exposure area, move at least one radiation source in described multiple radiation source relative to described exposure area, make the radiation from least one radiation source described adjacent or overlapping with the radiation from least one other radiation source in described multiple radiation source at synchronization; With

Described multiple bundle is projected on substrate.

172. according to the method in embodiment 168-171 described in any one, wherein moves the axis that step comprises around the direction of propagation being arranged essentially parallel to described multiple bundle and rotates at least one radiation source.

173. according to the method in embodiment 168-172 described in any one, wherein moves step and comprises at least one radiation source of direction translation along the direction of propagation transverse to described multiple bundle.

174. according to the method in embodiment 168-173 described in any one, comprises by using beam-deflector to move described multiple bundle.

175. methods according to embodiment 174, wherein said beam-deflector selects in the group be made up of following parts: catoptron, prism and acousto-optic modulator.

176. methods according to embodiment 174, wherein said beam-deflector comprises polygonal element.

177. methods according to embodiment 174, wherein said beam-deflector is configured to vibration.

178. methods according to embodiment 174, wherein said beam-deflector is configured to rotate.

179. according to the method in embodiment 168-178 described in any one, comprises the direction making described substrate be set up place along described multiple bundle and moves.

180. methods according to embodiment 179, the motion of wherein said substrate rotates.

181. according to the method in embodiment 168-180 described in any one, comprises and moves described multiple radiation source together.

182. according to the method in embodiment 168-181 described in any one, and wherein said multiple radiation source is arranged in a circular manner.

183. according to the method in embodiment 168-182 described in any one, and wherein said multiple radiation source to be arranged in plate and to be spaced apart from each other.

184. according to the method in embodiment 168-183 described in any one, and wherein said projection step comprises by using lens arra to be formed over the substrate by the image of described intrafascicular each bundle.

185. according to the method in embodiment 168-184 described in any one, and wherein said projection step comprises in fact only use lens arra and formed over the substrate by the image of described intrafascicular each bundle.

186. according to the method in embodiment 168-185 described in any one, and each in wherein said radiation source comprises laser diode.

187. methods according to embodiment 186, wherein each laser diode is configured to launch the radiation of the wavelength with about 405nm.

188. one kinds of flat-panel monitors manufactured according to the method in embodiment 168-187 described in any one.

189. one kinds of integrated circuit (IC)-components manufactured according to the method in embodiment 168-187 described in any one.

190. one kinds of radiating systems, comprising:

Multiple moveable radiating curtain, each radiating curtain comprises multiple independent controllable radiation source, and described multiple independent controllable radiation source is configured to provide the multiple bundles according to the pattern modulates expected; With

Motor, is configured to each in mobile described radiating curtain.

191. radiating systems according to embodiment 190, wherein said motor be configured to around the axis of the direction of propagation being arranged essentially parallel to described multiple bundle rotate in described radiating curtain each.

192. radiating systems according to embodiment 190 or 191, wherein said motor is configured to each in radiating curtain described in the direction translation along the direction of propagation transverse to described multiple bundle.

193., according to the radiating system in embodiment 190-192 described in any one, also comprise beam-deflector, and described beam-deflector is configured to mobile described multiple bundle.

194. radiating systems according to embodiment 193, wherein said beam-deflector selects in the group be made up of following parts: catoptron, prism and acousto-optic modulator.

195. radiating systems according to embodiment 193, wherein said beam-deflector comprises polygonal element.

196. radiating systems according to embodiment 193, wherein said beam-deflector is configured to vibration.

197. radiating systems according to embodiment 193, wherein said beam-deflector is configured to rotate.

198. according to the radiating system in embodiment 190-197 described in any one, and multiple radiation sources of each radiating curtain in wherein said radiating curtain can move together.

199. according to the radiating system in embodiment 190-198 described in any one, and multiple radiation sources of each radiating curtain in wherein said radiating curtain are arranged in a circular manner.

200. according to the radiating system in embodiment 190-199 described in any one, and described multiple radiation source of each radiating curtain in wherein said radiating curtain to be arranged in plate and to be spaced apart from each other.

201. according to the radiating system in embodiment 190-200 described in any one, also comprises the lens arra be associated with each radiating curtain in described radiating curtain.

202. radiating systems according to embodiment 201, the lens in each lens arra be associated with described radiating curtain in described multiple radiation source of each radiating curtain in wherein said radiating curtain are associated.

203. according to the radiating system in embodiment 190-202 described in any one, and each source in multiple sources of each radiating curtain in wherein said radiating curtain comprises laser diode.

204. radiating systems according to embodiment 203, wherein each laser diode is configured to launch the radiation of the wavelength with about 405nm.

205. one kinds for by substrate with the lithographic equipment of radiant exposure, described lithographic equipment comprises the programmable patterning device with 100-25000 self-emission formula independence addressable element.

206. lithographic equipments according to embodiment 205, comprise at least 400 self-emission formula independence addressable element.

207. lithographic equipments according to embodiment 205, comprise at least 1000 self-emission formula independence addressable element.

208. according to the lithographic equipment in embodiment 205-207 described in any one, comprises and is less than 10000 self-emission formula independence addressable element.

209. according to the lithographic equipment in embodiment 205-207 described in any one, comprises and is less than 5000 self-emission formula independence addressable element.

210. according to the lithographic equipment in embodiment 205-209 described in any one, and wherein said self-emission formula independence addressable element is laser diode.

211. according to the lithographic equipment in embodiment 205-209 described in any one, and wherein said self-emission formula independence addressable element is arranged to have the spot size over the substrate selected from the scope of 0.1-3 micron.

212. according to the lithographic equipment in embodiment 205-209 described in any one, and wherein said self-emission formula independence addressable element is arranged to have the spot size over the substrate of about 1 micron.

213. one kinds for by substrate with the lithographic equipment of radiant exposure, described lithographic equipment comprises programmable patterning device, described programmable patterning device makes, and with the exposure field length of 10cm for benchmark, has 100-25000 self-emission formula independence addressable element.

214. lithographic equipments according to embodiment 213, comprise at least 400 self-emission formula independence addressable element.

215. lithographic equipments according to embodiment 213, comprise at least 1000 self-emission formula independence addressable element.

216. according to the lithographic equipment in embodiment 213-215 described in any one, comprises and is less than 10000 self-emission formula independence addressable element.

217. according to the lithographic equipment in embodiment 213-215 described in any one, comprises and is less than 5000 self-emission formula independence addressable element.

218. according to the lithographic equipment in embodiment 213-217 described in any one, and wherein said self-emission formula independence addressable element is laser diode.

219. according to the lithographic equipment in embodiment 213-217 described in any one, and wherein said self-emission formula independence addressable element is arranged to have the spot size over the substrate selected from the scope of 0.1-3 micron.

220. according to the lithographic equipment in embodiment 213-217 described in any one, and wherein said self-emission formula independence addressable element is arranged to have the spot size over the substrate of about 1 micron.

221. one kinds of programmable patterning devices, comprise rotatable dish, and described dish has 100-25000 self-emission formula independence addressable element.

222. programmable patterning devices according to embodiment 221, wherein said dish comprises at least 400 self-emission formula independence addressable element.

223. programmable patterning devices according to embodiment 221, wherein said dish comprises at least 1000 self-emission formula independence addressable element.

224. according to the programmable patterning device in embodiment 221-223 described in any one, and wherein said dish comprises and is less than 10000 self-emission formula independence addressable element.

225. according to the programmable patterning device in embodiment 221-223 described in any one, and wherein said dish comprises and is less than 5000 self-emission formula independence addressable element.

226. according to the programmable patterning device in embodiment 221-225 described in any one, and wherein said self-emission formula independence addressable element is laser diode.

227. use one or more the present invention in manufacture flat-panel monitor.

228. use one or more the present invention in integrated antenna package.

229. one kinds of photoetching methods, comprise the programmable patterning device that uses and have a self-emission formula element by substrate with radiant exposure, the power consumption wherein operating the described programmable patterning device of described self-emission formula element between described exposure period is less than 10kW.

230. methods according to embodiment 229, wherein said power consumption is less than 5kW.

231. methods according to embodiment 229 or 230, wherein said power consumption is at least 100mW.

232. according to the method in embodiment 229-231 described in any one, and wherein said self-emission formula element is laser diode.

233. methods according to embodiment 232, wherein said laser diode is bluish-violet laser diode.

234. one kinds of photoetching methods, comprise the programmable patterning device that uses and have a self-emission formula element by substrate with radiant exposure, and wherein the light output of each emission-type element is at least 1mW in use.

235. methods according to embodiment 234, wherein said light output is at least 10mW.

236. methods according to embodiment 234, wherein said light output is at least 50mW.

237. according to the method in embodiment 234-236 described in any one, and wherein said light output is less than 200mW.

238. according to the method in embodiment 234-237 described in any one, and wherein said self-emission formula element is laser diode.

239. methods according to embodiment 238, wherein said laser diode is bluish-violet laser diode.

240. methods according to embodiment 234, wherein said light output is greater than 5mW but is less than or equal to 20mW.

241. methods according to embodiment 234, wherein said light output is greater than 5mW but is less than or equal to 30mW.

242. methods according to embodiment 234, wherein said light output is greater than 5mW but is less than or equal to 40mW.

243. according to the method in embodiment 234-242 described in any one, and wherein said self-emission formula element operates with single-mode.

244. one kinds of lithographic equipments, comprising:

Programmable patterning device, has self-emission formula element; With

Rotatable framework, have the optical element for receiving the radiation from described self-emission formula element, described optical element is refractive optical element.

245. one kinds of lithographic equipments, comprising:

Programmable patterning device, has self-emission formula element; With

Rotatable framework, has the optical element for receiving the radiation from described self-emission formula element, and described rotatable framework is not used for the reflection type optical element of the radiation received from any described self-emission formula element or all described self-emission formula elements.

246. one kinds of lithographic equipments, comprising:

Programmable patterning device; With

Rotatable framework, described rotatable framework comprises the plate with optical element, described in there is the plate of optical element surface be smooth.

247. use in described invention when manufacturing flat-panel monitor one or more.

248. use in described invention in the encapsulation of integrated circuit one or more.

249. one kinds of flat-panel monitors, described flat pannel display is manufactured by according to any means in described method.

250. one kinds of integrated circuit (IC)-components manufactured according to any means in described method.

251. one kinds of equipment, comprising:

252. equipment according to embodiment 251, wherein said compensation system comprises refrigeratory, can the optical column of movement or its part for cooling.

253. equipment according to embodiment 252, wherein said refrigeratory comprises liquid chiller.

254. equipment according to embodiment 252, wherein said refrigeratory comprises Peltier element.

255. according to described equipment arbitrary in embodiment 252-254, and wherein said refrigeratory is constructed and arranged to cool the fluid media (medium) in described equipment, and described fluid media (medium) vicinity can the optical column of movement or its part.

256. according to described equipment arbitrary in embodiment 252-255, wherein refrigeratory be constructed and arranged to directly cooling can movement optical column a part or described can movement optical column a part in part.

257. according to described equipment arbitrary in embodiment 252-256, wherein said refrigeratory be constructed and arranged in case around can movement optical column a part maybe can movement optical column a part in part.

258. according to described equipment arbitrary in embodiment 251-257, and wherein said compensation system comprises can the position-measurement device of the optical column of movement or the position of its part for measuring.

259. equipment according to embodiment 258, wherein said position-measurement device comprises radiation source and detecting device.

260. equipment according to embodiment 258, wherein said position measuring system comprises capacitance type sensor.

261. according to described equipment arbitrary in embodiment 251-260, wherein said compensation system comprises controller, described controller is connected to actuator, be connected to locating device for position substrate and/or the locating device that is connected to for locating controlled member, described controlled member is used for optionally providing radiation beam, described controller is configured to operating said equipment, to reduce the impact of described heat load on the operation at described equipment.

262. equipment according to embodiment 261, wherein said controller is connected to the position-measurement device of the position for measuring optical column or its part.

263. equipment according to embodiment 261 or 262, also comprise the temperature sensor being connected to controller, to measure the temperature of optical column or its part.

264. according to described equipment arbitrary in embodiment 261-263, and wherein said movement is greater than 500RPM, is greater than 1000RPM, is greater than 2000RPM or is greater than the rotary motion of 4000RPM.

265. according to described equipment arbitrary in embodiment 261-264, and wherein said optical column comprises:

Controlled member, for optionally providing radiation beam; With

Optical projection system, is configured to described bundle to project on target part.

266. equipment according to embodiment 265, wherein said controlled member comprises self-emission formula contrast device.

267. according to described equipment arbitrary in embodiment 251-266, and wherein said actuator is configured to rotating optics row or its part.

268. one kinds of device making methods, comprise step:

Reduce the impact of described heat load.

269. device making methods according to embodiment 268, wherein said optical column comprises controlled member and optical projection system for optionally providing radiation beam, use self-emission formula contrast device, described optical projection system is configured to bundle to project on target part.

270. device making methods according to embodiment 269, wherein said controlled member comprises self-emission formula contrast device.

271. according to the arbitrary described device making method of embodiment 268-271, wherein moves step and comprises the described optical column of rotation or its part.

Although concrete reference can be made in this article, by described lithographic equipment for the manufacture of specific device or structure (such as integrated circuit or flat-panel monitor), but be to be understood that lithographic equipment described here and photoetching method can have other application.Application includes but not limited to integrated circuit, integrated optics system, the guiding of magnetic domain memory and check pattern, flat-panel monitor, liquid crystal display (LCD), OLED display, thin-film head, micro electro mechanical device (MEMS), Micro-Opto-Electro-Mechanical Systems (MOEMS), DNA chip, encapsulation (such as flip-chip, distribution etc. again), (it is display or electronic installation for flexible display or electronic installation, it can be rotatable, flexible and the shape that remains unchanged as paper like, conformal, rugged, thin and/or lightweight, such as flexiplast display) etc. manufacture.In addition, such as, in flat-panel monitor, equipment of the present invention and method may be used for helping to produce various layer, such as tft layer and/or color filter layers.It will be understood by those skilled in the art that when this alternate application, any term " wafer " wherein used or " tube core " can be thought and more upper term " substrate " or " target part " synonym respectively.Here the substrate of indication can process before or after exposure, such as, in track (such as, a kind of typically resist layer is coated onto the instrument developed on substrate and to the resist exposed), measuring tool or the instruments of inspection.In the applicable case, disclosure herein can be applied in this and other substrate processing tool.In addition, described substrate can process once, such as, to produce multilayer IC, makes described term " substrate " used herein also can represent the substrate having comprised multiple processed layers.

Flat-panel display substrates can be rectangular shape.Be designed for the lithographic equipment exposing such substrate and can provide exposure area, it covers whole width of rectangular substrate, or covers a part (half of such as width) for described width.Can at the lower Surface scan substrate of exposure area, the pattern of change is provided by the bundle synchronous scanning patterning device of patterning or patterning device simultaneously.Like this, all or part of the pattern expected is transferred on substrate.If exposure area covers whole width of substrate, so exposure can be completed with single sweep operation.If exposure area covers the half of the width of such as substrate, so can laterally moving substrate after the first scan, and usually carry out another scanning with the remainder of exposed substrate.

The random devices that expression may be used for the xsect of radiation beam broadly should be annotated in term used herein " patterning device ", such as produces the pattern in (part) substrate.It should be noted that the pattern giving radiation beam not exclusively can correspond to the pattern of the expectation in the target part of substrate, if such as pattern comprises phase shift characteristics or so-called supplemental characteristic.Similarly, the pattern finally produced on substrate may not correspond to the arbitrary pattern formed instantaneously on the array of independent controlled member.This can be especially such for following layout: in described layout, the final pattern be formed in every part of substrate is built on the given time cycle or between to the exposure period of determined number, the given time cycle or give determined number exposure period between, the change of the relative position of the pattern on the array of independent controlled member and/or substrate.Usually, the particular functional layer that the pattern that the target part of substrate produces will correspond in the device that produces in target part, such as integrated circuit or flat-panel monitor (color filter layers in such as flat-panel monitor or the tft layer in flat-panel monitor).The example of such patterning device comprises such as mask, array of programmable mirrors, diode laser matrix, light emitting diode matrix, grating light valve and LCD array.Its pattern is that programmable patterning device is collectively referred to as " contrast device " herein under the help of electronic installation (such as computing machine), such as comprise the patterning device of multiple programmable element, its can each programmable element radiation beam a part intensity (such as except mask external before sentence in all devices of mentioning), comprise the electronic programmable patterning device with multiple programmable element, pattern is given radiation beam by the phase place of a part for radiation beam of assigning to relative to the adjacent portions of radiation beam by it.In one embodiment, patterning device comprises at least 10 programmable elements, and such as at least 100, at least 1000, at least 10000, at least 100000, at least 1000000, or at least 10000000 programmable elements.Several embodiment in these devices is hereafter being discussed to a certain extent in further detail:

Array of programmable mirrors.Array of programmable mirrors can comprise matrix-addressable surface, and this matrix-addressable surface has viscoelastic control layer and reflecting surface.The ultimate principle of such equipment institute foundation be the addressed region of such as reflecting surface using the radiation reflective of incidence as diffraction radiation, and not addressed region using the radiation reflective of incidence as not diffracted radiation.By using suitable spatial filter, not diffracted radiation can be filtered out from reflecting bundle, only leaving diffraction radiation and arriving substrate.Like this, described bundle is patterned according to the addressing-pattern of matrix-addressable surface.Should be appreciated that as an alternative, wave filter can filter out diffraction radiation, leaves not diffracted radiation and arrives substrate.The array of the optical MEMS device of diffraction also can use in a corresponding way.The optical MEMS device of diffraction can comprise multiple zone of reflections, and described multiple zone of reflections can relative to each other be out of shape, to form the grating of reflection incident radiation as diffraction radiation.The other embodiment of array of programmable mirrors adopts the matrix arrangements of tiny mirror, and each tiny mirror can by applying applicable internal field or passing through to adopt piezoelectric actuators to tilt independently around axis.Degree of tilt defines the state of each catoptron.When element is zero defect, catoptron can be controlled by the control signal be applicable to carrying out self-controller.Each flawless element is controllable, to adopt any one in a series of state, to adjust the intensity of the pixel of its correspondence in the radiation pattern of projection.Moreover catoptron is matrix-addressable, addressed catoptron is made to reflect incident radiation beam along the direction different from not addressed catoptron; Like this, reflecting bundle can carry out patterning according to the addressing-pattern of matrix-addressable mirrors.Applicable electronics mode can be used to carry out required matrix addressing.The more information of the relevant reflection mirror array of place like this citation can see, for example United States Patent(USP) Nos. US5,296,891 and US5,523,193 and open Nos.WO98/38597 and WO98/33096 of PCT patented claim, be incorporated herein by reference to by their full content.

Programmable LCD array.At U.S. Patent No. US5,229, provide the example of such structure in 872, be incorporated herein by reference to by its full content.

Lithographic equipment can comprise one or more patterning devices, such as one or more contrast devices.Such as, it can have the array of multiple independent controlled member, eachly controls independently of one another.In such an arrangement, some or all in independent controlled member array can have public irradiation system (or part of irradiation system), at least one in the common support structure of the array of independent controlled member and/or public optical projection system (or part of optical projection system).

Be to be understood that, when offset features, optical proximity correction features, phase place change technique and/or multiple exposure techniques are used in advance, such as on the array of independent controlled member " display " pattern can substantially be different from finally transfer to substrate a layer or substrate on pattern.Similarly, the pattern finally produced on substrate may not correspond to the pattern formed in a flash in office on the array of independent controlled member.This can be especially such to following layout: in described layout, be formed in final pattern in every part of substrate on the given time cycle or building in the exposure of determined number, the given time cycle or give determined number exposure period between independent controlled member array on pattern and/or the relative position change of substrate.

Optical projection system and/or irradiation system can comprise various types of optics, and the such as optics of refraction type, reflective, magnetic, electromagnetic type, electrostatic or other type, or their combination in any, to guide, to be shaped or to control radiation beam.

Described lithographic equipment can be the type with two (such as dual stage) or more substrate table (and/or two or more patterning device platform).In this " multiple stage " machine, additional platform can be used concurrently, or while preliminary step can being performed on one or more platform, be used for exposure by one or more other.

Lithographic equipment can also be that substrate can be had relative high index of refraction " immersion liquid " (such as water) covering to fill the type in the space between optical projection system and substrate at least partially.Immersion liquid can also be applied to other space in lithographic equipment, such as, between patterning device and optical projection system.Immersion technique is for increasing the numerical aperture of optical projection system.Term " submergence " as used herein also do not mean that the structures such as such as substrate must submergence in a liquid, but mean and to be positioned between optical projection system and substrate at exposure period interstitial fluid body.

In addition, equipment can be provided with fluid processing unit, to allow the interaction between fluid and the illuminated portion of substrate (such as optionally chemicals is connected to substrate or optionally revises the surface structure of substrate).

In one embodiment, substrate has circular shape, has the edge of recess along a part for its circumference and/or planarization alternatively.In one embodiment, substrate has polygonal shape, such as rectangular shape.The embodiment that substrate has circular shape comprises such embodiment: wherein the diameter of substrate is at least 25mm, such as at least 50mm, at least 75mm, at least 100mm, at least 125mm, at least 150mm, at least 175mm, at least 200mm, at least 250mm, or at least 300mm.In one embodiment, the diameter of substrate is 500mm, at the most 400mm, at the most 350mm, at the most 300mm, at the most 250mm, at the most 200mm, at the most 150mm, at the most 100mm at the most, or 75mm at the most.Substrate is at least 1 side that the embodiment of polygon (such as rectangle) comprises substrate, such as at least 2 sides or at least 3 sides have at least 5cm, such as at least 25cm, at least 50cm, at least 100cm, at least 150cm, at least 200cm, or the embodiment of at least length of 250cm.In one embodiment, the length that at least 1 side of substrate has is 1000cm at the most, such as 750cm, at the most 500cm, at the most 350cm, at the most 250cm, at the most 150cm at the most, or 75cm at the most.In one embodiment, substrate has length to be about 250-350cm and width is the rectangular substrate of about 250-300cm.The thickness of substrate can change, and can depend on such as backing material and/or substrate dimension to a certain extent.In one embodiment, thickness is at least 50 μm, such as at least 100 μm, at least 200 μm, at least 300 μm, at least 400 μm, at least 500 μm, or at least 600 μm.In one embodiment, the thickness of substrate is 5000 μm at the most, such as at the most 3500 μm, 2500 μm at the most, 1750 μm at the most, 1250 μm at the most, 1000 μm at the most, 800 μm at the most, 600 μm at the most, 500 μm at the most, 400 μm at the most, or 300 μm at the most.Here the substrate of indication can process before or after exposure, such as, in track (a kind of typically resist layer is coated onto the instrument developed on substrate and to the resist exposed).The character of substrate can be measured before exposure or after exposure, such as, in measuring tool and/or the instruments of inspection.

In one embodiment, resist layer is arranged on substrate.In one embodiment, substrate is wafer, such as semiconductor wafer.In one embodiment, wafer material selects from the group be made up of Si, SiGe, SiGeC, SiC, Ge, GaAs, InP and InAs.In one embodiment, wafer is III/V compound semiconductor wafer.In one embodiment, wafer is silicon wafer.In one embodiment, substrate is ceramic substrate.In one embodiment, substrate is glass substrate.Glass substrate may be useful, such as, in manufacture flat-panel monitor and panel of LCD.In one embodiment, substrate is plastic.In one embodiment, substrate is transparent (naked eyes for people).In one embodiment, substrate is that tool is coloured.In one embodiment, substrate be do not have coloured.

Although patterning device 104 is as described above and/or being shown as on substrate 114 in one embodiment, it can substitute or additionally be positioned at below substrate 114.In addition, in one embodiment, patterning device 104 and substrate 114 can be side by side, and such as patterning device 104 and substrate 114 vertically extend, and pattern is flatly projected.In one embodiment, provide patterning device 104 with at least two of exposed substrate 114 relative sides.Such as, at least at least two patterning devices 104 can be had on each respective opposite flank of substrate 114, to expose these sides.In one embodiment, single patterning device 104 may be had, with a side of the substrate 114 that projects and applicable optical devices (such as restrainting directing mirror), the pattern from single patterning device 104 is projected on the another side of substrate 114.

Be a kind of equipment according to one embodiment of present invention, comprise:

Compensation system, for being reduced by the impact making optical column or the mobile heat load in optical column or its part caused by medium of its part, wherein said compensation system comprises refrigeratory, can the optical column of movement or its part for cooling, wherein said refrigeratory comprises liquid chiller and/or Peltier element.

Are a kind of device making methods according to embodiments of the invention, comprise step:

Reduce the impact of described heat load.

In another embodiment in accordance with the invention, described optical column comprises controlled member and optical projection system for optionally providing radiation beam, and described optical projection system is configured to bundle to project on target part.

In another embodiment in accordance with the invention, described device making method has controlled member, and described controlled member comprises self-emission formula contrast device.

In another embodiment of device making method according to the present invention, mobile step comprises the described optical column of rotation or its part.

Although be described above specific embodiment of the present invention, it should be understood that the present invention can to realize from above-mentioned different form.Such as, the present invention can take the form of the computer program of one or more sequence of machine-readable instruction comprised for describing above-mentioned disclosed method, or take the form (such as, semiconductor memory, disk or CD) of the data storage medium with this computer program stored wherein.

In addition, although disclose the present invention when specific embodiment and example, but it will be understood by those of skill in the art that the present invention exceeds specific disclosed embodiment and extends to other alternative embodiment and/or use of the present invention and its apparent amendment and equivalent.In addition, although show in detail and describe many distortion of the present invention, it is easy understand that other amendment within the scope of the invention discloses those skilled in the art based on this.Such as, the special characteristic of contemplated example and the various combination of aspect or sub-portfolio can be carried out and still be fallen in scope of the present invention.Therefore, should be appreciated that the various characteristic sum aspects of disclosed embodiment can be bonded to each other or substitute, for the formation of the pattern of disclosed change of the present invention.Such as in one embodiment, the embodiment of the moveable independent controlled member of Fig. 5 can with immovable array combination of independent controlled member, such as provide or there is standby system.

Therefore, although described above is various embodiment of the present invention, should be appreciated that the mode by means of only citing demonstrates them, and be not restrictive.Those skilled in the relevant art it should be understood that under the conditions without departing from the spirit and scope of the present invention, can carry out various change in form and details to the present invention.Therefore, width of the present invention and scope by any one restriction in above-described exemplary embodiment, but should only should not limit according to claim and their equivalent.

Claims

1. a lithographic equipment, comprising:

Compensation system, for being reduced by the impact of the heat load in optical column or its a part making optical column or its part movement be caused by medium;

Modulator, comprises the multiple independent controllable radiation source of electromagnetic radiation-emitting, is configured to the exposure area of described substrate is exposed by the multiple Shu Jinhang according to the pattern modulates expected.

2. lithographic equipment according to claim 1, wherein said compensation system comprises refrigeratory, can the optical column of movement or its part for cooling.

3. lithographic equipment according to claim 2, wherein said refrigeratory is constructed and arranged to cool the fluid media (medium) in described lithographic equipment, and described fluid media (medium) vicinity can the optical column of movement or its part.

4. the lithographic equipment according to Claims 2 or 3, wherein refrigeratory be constructed and arranged to directly cooling can movement optical column a part or described can movement optical column a part in part.

5. lithographic equipment according to claim 2, wherein said refrigeratory be constructed and arranged in case around can movement optical column a part maybe can movement optical column a part in part.

6. lithographic equipment according to claim 1, wherein said compensation system comprises can the position-measurement device of the optical column of movement or the position of its part for measuring.

7. lithographic equipment according to claim 6, wherein said position-measurement device comprises radiation source and detecting device.

8. lithographic equipment according to claim 6, wherein said position measuring system comprises capacitance type sensor.

9. lithographic equipment according to claim 1, wherein said compensation system comprises controller, described controller is connected to actuator, be connected to locating device for position substrate and/or the locating device that is connected to for locating controlled member, described controlled member is used for optionally providing radiation beam, described controller is configured to operate described lithographic equipment, to reduce the impact of described heat load on the operation at described lithographic equipment.

10. lithographic equipment according to claim 9, wherein said controller is connected to the position-measurement device of the position for measuring optical column or its part.

11. lithographic equipments according to claim 9 or 10, also comprise the temperature sensor being connected to controller, for measuring the temperature of optical column or its part.

12. lithographic equipments according to claim 1, wherein said movement is greater than 500RPM, is greater than 1000RPM, is greater than 2000RPM or is greater than the rotary motion of 4000RPM.

13. lithographic equipments according to claim 1, wherein said optical column comprises:

Controlled member, for optionally providing radiation beam; With

14. lithographic equipments according to claim 13, wherein said controlled member comprises self-emission formula contrast device.

15. lithographic equipments according to claim 1, wherein said actuator is configured to rotating optics row or its part.